JPH0794135A - Electron beam irradiation device - Google Patents
Electron beam irradiation deviceInfo
- Publication number
- JPH0794135A JPH0794135A JP5267702A JP26770293A JPH0794135A JP H0794135 A JPH0794135 A JP H0794135A JP 5267702 A JP5267702 A JP 5267702A JP 26770293 A JP26770293 A JP 26770293A JP H0794135 A JPH0794135 A JP H0794135A
- Authority
- JP
- Japan
- Prior art keywords
- window
- cooling air
- window foil
- foil
- foils
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 title claims description 9
- 239000011888 foil Substances 0.000 claims abstract description 79
- 238000001816 cooling Methods 0.000 claims abstract description 44
- 230000003014 reinforcing effect Effects 0.000 claims description 5
- 238000007664 blowing Methods 0.000 abstract description 4
- 230000002787 reinforcement Effects 0.000 abstract 1
- 239000002184 metal Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は電子線照射装置に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electron beam irradiation device.
【0002】[0002]
【従来の技術】周知のようにこの種電子線照射装置は、
加速管によって加速された電子線を走査管によって走査
して被照射物に照射する構成とされてあり、走査管には
電子線の取り出し部として照射窓を設置し、この照射窓
は金属性の窓箔によって閉塞されている。そしてこの窓
箔には圧縮空気を吹き付けることによる冷却風により冷
却するようにしている。As is well known, this type of electron beam irradiation apparatus is
The scanning tube scans the electron beam accelerated by the accelerating tube to irradiate the object to be irradiated.The scanning tube is provided with an irradiation window as an electron beam extraction portion. It is blocked by a window foil. The window foil is cooled by cooling air by blowing compressed air.
【0003】図3はその従来構成を示し、1は走査管、
2は照射窓、3は窓箔で、走査管1の下部フランジ4と
窓押えフランジ5とによってはさみこまれてあり、金属
シール6によりシールされている。電子線通過にともな
って生ずる窓箔3の発熱に対しては、圧縮空気ダクト7
からの冷却風をノズル8より窓箔3に吹き付けることに
より冷却する。FIG. 3 shows the conventional structure, 1 is a scanning tube,
2 is an irradiation window, 3 is a window foil, which is sandwiched by the lower flange 4 and the window pressing flange 5 of the scanning tube 1 and sealed by a metal seal 6. The compressed air duct 7 is provided for the heat generation of the window foil 3 caused by the passage of the electron beam.
The window 8 is cooled by blowing the cooling air from the nozzle 8 onto the window foil 3.
【0004】ところでこのような構成の照射窓による
と、電子流約100mAが発生しているとき、窓箔3の
温度は三百十数度に上昇し、これ以上電流密度を上げる
ことは困難である。そこで窓箔3の電流密度を上げるた
めに、走査管1の下面中央に補強桟9を設け、窓箔3の
中央上面をこの補強桟9によって支持することにより2
連窓構造とし、窓箔3の両側から圧縮空気ダクト7、ノ
ズル8より冷却風を吹き付けるようにしている。By the way, according to the irradiation window having such a structure, when an electron current of about 100 mA is generated, the temperature of the window foil 3 rises to three hundred and several ten degrees, and it is difficult to further increase the current density. is there. Therefore, in order to increase the current density of the window foil 3, a reinforcing bar 9 is provided at the center of the lower surface of the scanning tube 1, and the central upper surface of the window foil 3 is supported by the reinforcing bar 9.
A continuous window structure is adopted, and cooling air is blown from the compressed air duct 7 and the nozzle 8 from both sides of the window foil 3.
【0005】しかしこのように窓箔3の両側から冷却風
を吹き付けると、その冷却風10は中央で互いに干渉し
合い、下方に向かって流れるようになり、そのため照射
窓2の下方にある被照射物に吹き付けるようになる。こ
の下方に向かう冷却風により被照射物がシート状のもの
であるときは、その被照射物がばたついたり、また強度
の弱いものは破れてしまうことがある。更にメッシュ、
スラット、コンベアなどで搬送される被照射物では巻き
上がってしまうことがある。However, when the cooling airflows are blown from both sides of the window foil 3 in this way, the cooling airflows 10 interfere with each other in the center and flow downward, so that the irradiation target under the irradiation window 2 is irradiated. It comes to spray things. When the object to be irradiated is in the form of a sheet due to the downward cooling air, the object to be irradiated may flutter, or the object having weak strength may be broken. Further mesh,
An object to be irradiated that is conveyed by slats, conveyors, etc. may be rolled up.
【0006】これを解決するために、窓箔3の下方に更
に別の窓箔(以下これを二次窓箔と呼ぶ。)を設け、窓
箔3に吹き付けられた冷却風をこの二次窓箔によって遮
蔽して被照射物に直接当たらないようにすることが考え
られる。In order to solve this, another window foil (hereinafter referred to as a secondary window foil) is provided below the window foil 3, and the cooling air blown on the window foil 3 is supplied to the secondary window. It is conceivable to shield it with a foil so that it does not directly hit the irradiated object.
【0007】しかしこのように二重の窓箔構成とする
と、窓箔3に吹き付けられた冷却風が図3の場合と同様
に中央で干渉して下方に向かい、これが二次窓箔に強く
当たるようになるため、二次窓箔が破れる恐れがある。
またこの二次窓箔にも電子線が透過することにより発熱
するため、冷却風を吹き当てて冷却する必要があるが、
そのために冷却風ダクト、ノズルを別個に用意しなけれ
はぜならず、その構成は煩雑となる。However, in the case of the double window foil structure, the cooling air blown to the window foil 3 interferes at the center and travels downward as in the case of FIG. 3, and hits the secondary window foil strongly. As a result, the secondary window foil may be torn.
Further, since the electron beam also passes through this secondary window foil to generate heat, it is necessary to blow cooling air to cool it.
Therefore, it is necessary to separately prepare the cooling air duct and the nozzle, and the configuration becomes complicated.
【0008】[0008]
【発明が解決しようとする課題】本発明は、二重の窓箔
構成とする照射窓において、窓箔に吹き付けられる冷却
風が二次窓箔に強く当たらないようにするとともに、各
窓箔に対する冷却風の吹付のための構成を簡略化するこ
とを目的とする。SUMMARY OF THE INVENTION In an irradiation window having a double window foil structure, the present invention prevents the cooling air blown to the window foil from striking the secondary window foil strongly, and also for each window foil. It is intended to simplify the structure for spraying cooling air.
【0009】[0009]
【課題を解決するための手段】本発明は、補強桟によっ
て中央が支持されている窓箔と、この窓箔の下方に中央
が桟によって支持される二次窓箔とをもって二重の窓箔
構成とした照射窓において、両窓箔の中央の間に冷却風
ダクトを設け、この冷却風ダクトよりその両側に向けて
両窓箔の面に沿って冷却風を吹き付けるようにしたこと
を特徴とする。SUMMARY OF THE INVENTION The present invention is a dual window foil having a window foil whose center is supported by a reinforcing bar and a secondary window foil whose center is supported by the bar below the window foil. In the irradiation window configured as described above, a cooling air duct is provided between the centers of both window foils, and cooling air is blown toward both sides of this cooling air duct along the surfaces of both window foils. To do.
【0010】[0010]
【作用】窓箔および二次窓箔の中央からその両側に向か
って冷却風ダクトから冷却風が窓箔の下面および二次窓
箔の上面に沿って流れることにより、各窓箔は冷却され
る。そのあと冷却風は照射窓の両側より抜けて出る。そ
のため冷却風が二次窓箔に強く当たることはないし、ま
た各窓箔に冷却風を吹き付けるための構成も簡略とな
る。The cooling air flows from the center of the window foil and the secondary window foil toward both sides thereof through the cooling air duct along the lower surface of the window foil and the upper surface of the secondary window foil to cool each window foil. . After that, the cooling air escapes from both sides of the irradiation window. Therefore, the cooling air does not hit the secondary window foil strongly, and the configuration for blowing the cooling air to each window foil is also simplified.
【0011】[0011]
【実施例】本発明の実施例を図1によって説明する。な
お図3と同じ符号を付した部分は同一または対応する部
分を示す。窓箔3の下方に配置された11は二次窓箔
で、窓箔3と同様の金属箔であり、これはフランジ1
2、13によって両端が支持されてあり、また中央は桟
14によって支持されている。両窓箔3、11とによっ
て二重の窓箔構成とされている。Embodiment An embodiment of the present invention will be described with reference to FIG. It should be noted that the parts denoted by the same reference numerals as those in FIG. 3 indicate the same or corresponding parts. A secondary window foil 11 arranged below the window foil 3 is a metal foil similar to the window foil 3, which is the flange 1
Both ends are supported by 2 and 13, and the center is supported by a crosspiece 14. The window foils 3 and 11 form a double window foil structure.
【0012】本発明にしたがい、窓箔3と二次窓箔11
との間の中央に冷却風ダクト15を設ける。この冷却風
ダクト15としては、たとえば図2に示すように、一対
の側壁16と、その上下開口面を覆う蓋体13、14と
によって構成し、側壁16と蓋体13、14との間の隙
間17をノズルとして利用する。側壁16の一方の端面
を閉塞し、他方の端面より圧縮空気を供給すれば、両側
の隙間17より圧縮空気が吹きでるようになる。この圧
縮空気が冷却風10となって窓箔3、二次窓箔11に吹
き付けられるようになる。According to the invention, the window foil 3 and the secondary window foil 11
A cooling air duct 15 is provided in the center between and. As shown in FIG. 2, for example, the cooling air duct 15 is composed of a pair of side walls 16 and lids 13 and 14 that cover the upper and lower opening surfaces of the side walls 16, and between the side wall 16 and the lids 13 and 14. The gap 17 is used as a nozzle. If one end surface of the side wall 16 is closed and compressed air is supplied from the other end surface, the compressed air can be blown out from the gaps 17 on both sides. This compressed air becomes the cooling air 10 and is blown onto the window foil 3 and the secondary window foil 11.
【0013】このようにして窓箔3、二次窓箔11の中
央からその両側に向かって冷却風が吹き付けられ、その
冷却風は窓箔3の下面、二次窓箔11の上面に沿って流
れることにより窓箔3、二次窓箔11は冷却される。各
窓箔3、11の面を通過した冷却風10はそのままフラ
ンジ5、12間の排出路18より照射窓2の両側に抜け
て出るようになる。そのため冷却風10は各窓箔に強く
当たることなく排出される。In this way, the cooling air is blown from the center of the window foil 3 and the secondary window foil 11 toward both sides thereof, and the cooling air is blown along the lower surface of the window foil 3 and the upper surface of the secondary window foil 11. By flowing, the window foil 3 and the secondary window foil 11 are cooled. The cooling air 10 that has passed through the surfaces of the window foils 3 and 11 comes out through the discharge passage 18 between the flanges 5 and 12 to both sides of the irradiation window 2 as it is. Therefore, the cooling air 10 is discharged without hitting each window foil strongly.
【0014】[0014]
【発明の効果】以上説明したように本発明によれば、照
射窓として二重の窓箔構成とした場合でも、冷却風は窓
箔に強く当たることはなく、したがって窓箔が破れたり
する恐れは全くないし、また冷却ダクトを両窓箔間の中
央に設け、その両側から冷却風を吹き出すようにしてい
るので、各窓箔のための冷却ダクト、ノズルなどをそれ
ぞれ必要としないため、冷却風の吹付のための構成は極
めて簡略となる効果を奏する。As described above, according to the present invention, even when the irradiation window has a double window foil structure, the cooling air does not hit the window foil strongly and therefore the window foil may be broken. There is no cooling duct, and a cooling duct is provided in the center between both window foils so that cooling air is blown out from both sides, so cooling ducts and nozzles for each window foil are not required. The structure for spraying is effective in being extremely simple.
【図1】本発明の実施例を示す断面図である。FIG. 1 is a sectional view showing an embodiment of the present invention.
【図2】冷却ダクトの部分斜視図である。FIG. 2 is a partial perspective view of a cooling duct.
【図3】従来例の断面図である。FIG. 3 is a sectional view of a conventional example.
1 走査管 2 照射窓 3 窓箔 9 補強桟 11 二次窓箔 14 桟 15 冷却風ダクト 1 Scanning Tube 2 Irradiation Window 3 Window Foil 9 Reinforcing Bar 11 Secondary Window Foil 14 Bar 15 Cooling Air Duct
Claims (1)
箔と、前記窓箔の下方に中央が桟によって支持される二
次窓箔とをもって二重の窓箔構成とした照射窓を備えた
電子線照射装置において、前記窓箔および二次窓箔の間
の中央に冷却風ダクトを設け、前記冷却風ダクトより前
記照射窓の両側に向けて前記両窓箔の面に沿って冷却風
を吹き付けてなる電子線照射装置。1. An irradiation window having a double window foil structure having a window foil whose center is supported by a reinforcing bar and a secondary window foil whose center is supported by the bar below the window foil. In the electron beam irradiation device, a cooling air duct is provided in the center between the window foil and the secondary window foil, and cooling air is blown from the cooling air duct toward both sides of the irradiation window along the surfaces of both window foils. An electron beam irradiation device that is sprayed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5267702A JPH0794135A (en) | 1993-09-20 | 1993-09-20 | Electron beam irradiation device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5267702A JPH0794135A (en) | 1993-09-20 | 1993-09-20 | Electron beam irradiation device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0794135A true JPH0794135A (en) | 1995-04-07 |
Family
ID=17448361
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5267702A Pending JPH0794135A (en) | 1993-09-20 | 1993-09-20 | Electron beam irradiation device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0794135A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0769890A1 (en) * | 1995-10-17 | 1997-04-23 | Ebara Corporation | Method and apparatus for cooling window foils of electron beam accelerator |
JPH09133799A (en) * | 1995-11-07 | 1997-05-20 | Nissin High Voltage Co Ltd | Window foil cooling device for electron beam irradiation device |
JP2016500559A (en) * | 2012-10-10 | 2016-01-14 | ザイレコ,インコーポレイテッド | Biomass processing |
-
1993
- 1993-09-20 JP JP5267702A patent/JPH0794135A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0769890A1 (en) * | 1995-10-17 | 1997-04-23 | Ebara Corporation | Method and apparatus for cooling window foils of electron beam accelerator |
US5877582A (en) * | 1995-10-17 | 1999-03-02 | Ebara Corporation | Method and apparatus for cooling window foils of electron beam accelerator |
JPH09133799A (en) * | 1995-11-07 | 1997-05-20 | Nissin High Voltage Co Ltd | Window foil cooling device for electron beam irradiation device |
JP2016500559A (en) * | 2012-10-10 | 2016-01-14 | ザイレコ,インコーポレイテッド | Biomass processing |
US10510510B2 (en) | 2012-10-10 | 2019-12-17 | Xyleco, Inc. | Treating biomass |
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