JPH0793928A - Magnetic head slider - Google Patents

Abstract

PURPOSE:To improve change of the floating height of a magnetic head due to outer disturbances such as dimensional errors and the like and to enhance the reliability by improving the rigidity of an air film which suppresses the difference in the floating height of a magnetic head between in the inner and outer peripheries. CONSTITUTION:A magnetic head slider 1a has a pair of air bearing surfaces 4, 5 formed at a floating surface facing the front side of a magnetic disc and step parts 19, 20, 21, 22 lower than the air bearing surfaces 4, 5 on respective both sides of the air bearing surfaces 4, 5. The width of each air bearing surface 4, 5 on the side of a magnetic gap 13 does not exceed the width on the opposite side. Moreover, the step parts 19, 20, 21, 22 are formed on both sides of the corresponding air bearing surfaces 4, 5 more closely to a front end part 2 of the magnetic head slider 1a by more than 1/5 the total length of the magnetic head slider from an end part opposite to the front end part 2. Each step part has a length of 100mum or lower than the air bearing surfaces 4, 5 by 0.1-4mum.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head slider used in a fixed magnetic disk device or the like.

[0002]

2. Description of the Related Art In recent years, external storage devices for computers have been
Due to their high speed and large capacity, the spread of fixed magnetic disk devices is spreading. Then, in order to miniaturize a fixed magnetic disk device having a larger capacity, a high linear density aiming at a high recording density is required. This high linear density requires that the magnetic gap of the magnetic head be made narrower and the gap between the magnetic gap and the magnetic disk (hereinafter referred to as the air bearing surface) be made smaller in order to operate in a minute region of the recording wavelength. ing. However, when the flying height is low, the magnetic disk and the magnetic head slider (hereinafter simply referred to as slider) are likely to come into contact with each other, and the recording surface of the magnetic disk is likely to be destroyed. Therefore, it is desired to keep the flying height low and constant in sliders having these air bearing surfaces. As a conventional general slider, Japanese Patent Publication No. 57-569
A slider called a taper flat slider described in Japanese Patent Publication is known. In addition, JP-A-61-2
Japanese Patent No. 780087 discloses a lateral pressure cross-section slider (hereinafter referred to as a TPC slider) in which a lateral air pressure portion is provided on a side portion of an air bearing surface by a method such as a taper or a minute step to make a change in flying height constant. A slider referred to as a) is disclosed.

A conventional magnetic head slider will be described below. FIG. 7 is a bottom view showing the shape of the air bearing surface of a conventional TPC slider. Reference numeral 1 is a slider of a magnetic head, 2 is a front end portion of the slider 1, 3 is a rear end portion of the slider 1, 4, 5
Are two air bearing surfaces (hereinafter referred to as ABS) formed from the front end portion 2 to the rear end portion 3 of the slider 1 for floating the slider 1 on the magnetic disk, and 6 and 7 are ABSs.
Tapered portions formed on the front end 2 side of 4,5, 8, 9 and 10, 11 are stepped portions formed on both sides of the two ABSs 4 and 5 to a depth of about 1 μm for pressurizing air. , 12 are groove portions with a depth of 10 μm or more for separating the step portions 9 and 10,
Reference numeral 3 denotes a magnetic gap arranged on the rear end 3 side of at least one of the two ABSs 4 and 5. Where 2
The ABSs 4, 5 of the book are substantially coplanar.

The operation of the magnetic head slider constructed as above will be described below. FIG. 8 is a schematic diagram of a fixed disk device having a rotary actuator, and FIG. 9 is a diagram showing the relationship between the air flow and the magnetic head slider when the skew θ ≠ 0 °. In FIG.
Reference numeral 14 is a suspension for fixing the slider 1, 15 is a drive arm, and 16 is a magnetic disk. In FIG.
Reference numeral 17 is a longitudinal direction of the slider, and 18 is an inflowing airflow. The slider 1 is fixed to the suspension 14 with an adhesive or synthetic resin, and the suspension 14 is fixed to the drive arm 15 by caulking. Magnetic disk 16
The upper slider 1 is an air flow 1 generated by a magnetic disk 16 which rotates in the direction of arrow A as the drive arm 15 rotates.
The angle formed by 8 and the longitudinal direction 17 of the air bearing surface, that is, the skew θ changes. The maximum value of the skew θ is about ± 15 ° with respect to the rotating direction of the magnetic disk 16.
When the skew θ changes from 0 °, the compressed air pressurized by the taper portions 6 and 7 of the front end portion 2 of the air bearing surface is AB.
Before giving a sufficient levitation force to S4,5, it flows out from the side of the ABS4,5 to reduce the flying height of the slider 1 and
An increase in the number of rolls occurs. ABS to prevent this
The decrease in the levitation force when the skew θ becomes large by providing a taper or a minute step on the front end portion 2 side of 4,5 is compensated by pressurizing the lateral air in the step portions 8, 9, 10, 11. There is. Further, in order to compensate for the lowering of the levitation force due to the lowering of the peripheral speed on the inner circumference of the magnetic disk 16, the step portions 8, 10 located on the inner circumference side of each of the magnetic disks 16 of the ABSs 4, 5 are arranged.
Is wider than the stepped portions 9 and 11, and is designed to obtain a substantially constant flying height over the entire area of the magnetic disk 16.

[0005]

However, in the above-mentioned conventional structure, when the skew θ becomes large, the pressure applied to the ABS near the rear end of the slider is generated by the air pressurizing portion near the rear end of the slider. The pressure becomes dominant, but the step portion for pressurizing the air near the trailing end of the slider has a short distance to the trailing end of the ABS, and the substantial length-width ratio of ABS that greatly contributes to air film rigidity is small. The skew θ is extremely lower than that when it is zero, and the fluctuation of the flying height due to disturbance becomes large. Especially in the low flying area of 0.10 μm or less, the possibility of data destruction due to contact with the magnetic disk surface increases. However, there is a problem that it is difficult to use it for a high performance fixed magnetic disk drive that requires high reliability.

The present invention solves the above problems of the prior art by improving the rigidity of the air film for suppressing the difference in the flying height between the inner and outer circumferences of the magnetic disk, improving the flying height fluctuation due to disturbances such as dimensional errors, and improving the reliability. It is an object of the present invention to provide a high magnetic head slider.

[0007]

In order to achieve this object, a magnetic head slider according to claim 1 of the present invention comprises a pair of ABs formed on an air bearing surface facing a surface of a magnetic disk.
A slider having S and a step portion on both sides of the ABS that is one step lower than the ABS, wherein the width of the ABS on the magnetic gap side is opposite to the magnetic gap.
The ABS formed so as not to exceed the width of the slider, and the step is 1
/ 5 or more length 100μ on both sides near the front end
3. The magnetic head slider according to claim 1, wherein the magnetic head slider has a stepped portion having a height of m or more and a depth of 0.1 μm to 4 μm lower than the ABS.
4. The structure in which the width of the step portion on the inner peripheral side of the magnetic disk is wider than the width of the step portion on the outer peripheral side among the step portions formed on both sides of the BS. The magnetic head slider according to claim 1 is the ABS according to claim 1.
Among the step portions formed on both sides of the magnetic disk, the width of the step portion on the inner peripheral side of the magnetic disk is equal to the width of the step portion on the outer peripheral side, and the step portion on the inner peripheral side is the outer peripheral side. 5. The magnetic head slider according to claim 4, wherein the magnetic head slider is formed to be longer than the stepped portion on the magnetic gap side. A pair of magnetic head sliders are formed on the air bearing surface facing the magnetic disk surface in a direction perpendicular to the magnetic gap. A slider having an outer ABS and a central ABS formed inside the ABS, wherein the width of the central ABS on the magnetic gap side does not exceed the width of the ABS on the side opposite to the magnetic gap. The length of the central empty ABS and the magnetic gap side end of the ABS is not less than ⅕ of the entire slider length from the front end to both sides.
0 μm or more and a depth of 0.1 μm from the central ABS
The magnetic head slider according to claim 5 has a structure having a step portion which is 4 μm lower by one step, and in the magnetic head slider according to claim 4, among the step portions formed on both sides of the central ABS, a magnetic disk The width of the step portion on the inner peripheral side is wider than the width of the step portion on the outer peripheral side.
In the magnetic head slider described in claim 4, among the stepped portions formed on both sides of the central ABS, the width of the stepped portion on the inner peripheral side of the magnetic disk is equal to the width of the stepped portion on the outer peripheral side, The magnetic head slider according to claim 7, wherein the step portion on the inner peripheral side is formed to be longer on the magnetic gap side than the step portion on the outer peripheral side. In any one of the above, the length of the outer ABS is 1/5 to 1/2 of the total length of the slider in the direction opposite to the magnetic gap from the magnetic gap side end portion of the outer ABS.
It has a configuration in which a step portion on the rear end side which is one step lower than the BS by a depth of 0.1 μm to 4 μm is formed.

Here, the stepped portion formed on both ends of the ABS for pressurizing the air has a length of 10 from the end of the ABS on the magnetic gap side to the front end portion of ⅕ or more of the entire slider length.
If the thickness is 0 μm or more and is 1/5 or less of the total length of the slider, the effect on the pressure at the slider rear end is large and the effect of improving the air film rigidity is 1/5 or less, which is not preferable. Further, this step portion has a length of 100 μm or more and is formed at a depth of 0.1 μm to 4 μm from the ABS. Outside this range, the air compression effect is small and a practically sufficient levitation force can be obtained. It is difficult and not preferable. Also, outside AB
The rear end side step portion formed on the end portion of the magnetic gap on the side of S is formed from the end portion of the outer ABS on the side of the magnetic gap to a length of 1/5 to 1/2 of the total length of the slider in the direction opposite to the magnetic gap. There is. When the rear end side step portion has a length of ⅕ or less of the total length of the magnetic head slider, the flying height of the outermost ABS portion from the rear end portion is lower than the flying height of the central ABS rear end portion. Occurs, and when the length is 1/2 or more,
The levitation force applied to the outside ABS is reduced, and it becomes unstable against vibration in the rolling direction, which is not preferable. Further, the depth from the outer air bearing surface is 0.1 μm to 4 μm like the stepped portions on both sides of the central ABS, and if it exceeds this range, the air compression effect of the outer ABS is small, which is not preferable. Further, the step portions on both sides of the ABS are arranged on the front end side of the slider in order to prevent the decrease of the air film rigidity when the skew θ becomes large, but the rear end of the ABS is so arranged as not to affect the slider pressure. The width on the part side may be widened to prevent a decrease in air film rigidity.

[0009]

With this structure, since there is no step portion for pressurizing air near the rear end portion of the slider, a step disposed near the slider front end portion with respect to the pressure applied to the ABS near the slider rear end portion. Since the pressure generated by the parts is dominant, the substantial length-width ratio of the ABS can be made large, and even if the skew θ becomes large, the rigidity of the air film will not drop extremely, so that it will float against disturbance. The fluctuation of the quantity can be suppressed.

[0010]

【Example】

(Embodiment 1) An embodiment of the present invention will be described below with reference to the drawings. 1 is an overall perspective view of a magnetic head slider according to an embodiment of the present invention, and FIG. 2 is a bottom view showing the shape of an air bearing surface of the magnetic head slider according to an embodiment of the present invention. 2 is the front end, 3 is the rear end, 4, 5
Is an ABS, 6, 7 is a taper portion, 12 is a groove portion, and 13 is a magnetic gap. 1a is the magnetic head slider of the first embodiment of the present invention, and 19,20 and 21,22 are 2
At least 500 μm from the rear end 3 of the ABS 4, 5 of the book
The above is a step portion for pressurizing air formed at a depth of 4 μm or less from the ABSs 4 and 5 on both sides of the portion from the front end portion 2 side.

Here, the width of the step portions 19 and 21 located on the inner peripheral side of each magnetic disk of the ABSs 4 and 5 is the step portion 20 in order to compensate for the lowering of the levitation force due to the lower peripheral speed on the inner peripheral surface of the magnetic disk. , 22 is formed wider.

The operation of the magnetic head slider constructed as described above will be described below.

As in the conventional example, when the slider 1a fixed to the suspension accesses the track surface of the magnetic disk and the skew θ becomes large, the flying force of the slider 1a is reduced by the step portions 19, 20, 21. And 22 by supplementing the air flow from the lateral direction. Further, since there is no step portion for pressurizing air near the rear end portion 3 side of the slider 1a, the slider 1a
With respect to the pressure applied to the ABSs 4 and 5 near the rear end portion 3 side, the step portion 1 disposed on the front end portion 2 side of the slider 1a
It will be levitated by the pressure generated by 9, 20, 21 and 22. Therefore, since the substantial length-width ratio of the ABS can be made large, it is possible to prevent the air film rigidity from being extremely lowered.

(Experimental Example) Regarding the slider of this embodiment,
Computer simulation of the flying height of the slider was performed under the following conditions. Slider 1a length 2mm, width 1.5mm, A
The widths of the BSs 4 and 5 are 180 μm, respectively, and the widths of the step portions 19 and 21 which are one step lower on the inner peripheral side of the magnetic disks of the ABSs 4 and 5 are 1
45 μm, depth from ABS 4, 5 0.25 μm, AB
Steps 20, which are one step lower on the outer circumference side of the magnetic disk in S4 and S5,
The width of 22 is 60 μm, the depth from ABS 4, 5 is 0.25
.mu.m, the step portions 19, 20, 21, 22 are arranged up to 1.0 mm from the rear end portion 3 of the slider 1a. The configuration of the magnetic disk device used was a 3.5-inch diameter magnetic disk device, the number of revolutions was 5400 rpm, the skew θ between the inner and outer circumferences was + 9 ° to −14 °, and a load of 4 gf was applied to the center of the slider 1a. The results are shown in Fig. 3. FIG. 3 is a diagram showing changes in the flying height depending on the radial position of the magnetic disk of the magnetic head slider. As is clear from FIG. 3, the flying height of the slider of this embodiment is substantially constant over the entire area of the magnetic disk, which is substantially the same as that of the conventional TPC slider. Further, the air film rigidity when the skew θ is zero is 84 gf /
μm, air film rigidity at the outermost periphery of the magnetic disk is 41 gf /
μm, which is almost the same as the air film rigidity of the conventional TPC slider, but the air film rigidity at the innermost circumference of the magnetic disk is 6 μm.
7 gf / μm, which is 43 compared to the conventional TPC slider.
% Could be improved.

As described above, according to the present embodiment, by forming the step portions for pressurizing the air on both sides of the ABS only on the front end side of the ABS, the flying height is made constant over the entire magnetic disk, and By improving the air film rigidity at the innermost circumference of the magnetic disk, it is possible to obtain high reliability.

(Second Embodiment) A second embodiment of the present invention will be described below with reference to the drawings. FIG. 4 is a bottom view showing the shape of the air bearing surface of the magnetic head slider according to the second embodiment of the present invention. The difference from Example 1 is that the ABS width is wide on the front end 2 side of the air bearing surface and narrow on the rear end 3 side A
BSs 4a and 5a are formed, and 1b is a magnetic head slider of the second embodiment of the present invention.

With this configuration, even if the skew θ becomes large, the compressed air generated on the side of the front end portion 2 of the slider can be prevented from flowing out from the side of the slider to the minimum, so that the rigidity of the air film is further improved. Can be made. For example, the air film rigidity at the innermost circumference of the magnetic disk is 72.3 gf
/ Μm and the skew θ is zero, the air film rigidity is 64.
7 gf / μm, 46.5 gf / at the outermost circumference of the magnetic disk
μm, and the air film rigidity when the skew θ is zero is T
Although it is lower than that of the PC slider, it is 52 at the innermost circumference.
% And 13% at the outermost periphery. Therefore,
It is possible to improve the characteristics at the innermost circumference or the outermost circumference of the magnetic disk in which the rigidity of the air film is lowered, and it is more practical than the TPC slider. Further, the other floating characteristics are substantially the same as those of the first embodiment, and the description thereof will be omitted.

As described above, according to this embodiment, by making the width of the ABS on the rear end portion 3 side narrower than that on the front end portion 2 side, the flying height is constant over the entire magnetic disk, and the maximum magnetic disk is kept. The air film rigidity can be improved also in the inner circumference.

(Third Embodiment) A third embodiment of the present invention will be described below with reference to the drawings. FIG. 5 is a bottom view showing the shape of the air bearing surface of the magnetic head slider according to the third embodiment of the present invention. The difference from the first embodiment is that the widths of the step portions 19, 20a, 21, 22a for pressurizing the air are all the same, and the step portions 19, 21 located on the inner peripheral side of the magnetic disk are the step portions 20a, The magnetic head slider 1c according to the third embodiment of the present invention is formed so as to be longer than the rear end 22a of the magnetic disk 22a to compensate for the decrease in the levitation force due to the decrease in the peripheral speed at the inner circumference of the magnetic disk. . Steps 20a and 22 located outside the ABSs 4 and 5 that generate levitation force
Since the width a is the same as the width of the step portions 19 and 21 and the center of the pressure in the slider width direction is aligned with the center of gravity of the slider, the stability of the slider 1c against rolling can be improved. For example, the air film rigidity when the skew θ is zero is 84 gf / μm, which is almost the same as that of the conventional TPC slider, but the air film rigidity at the innermost circumference of the magnetic disk is 67 gf / μm. Yes, conventional TPC
It was improved by 43% as compared with the slider, and the air film rigidity at the outermost periphery of the magnetic disk was 46 gf / μm, which was improved by 12% as compared with the conventional TPC slider. Further, the other floating characteristics are substantially the same as those of the first embodiment, and the description thereof will be omitted.

As described above, according to this embodiment, the first embodiment
In the same way as above, make the flying height constant over the entire magnetic disk,
In addition, the stability of the slider against rolling can be improved.

(Fourth Embodiment) A fourth embodiment of the present invention will be described below with reference to the drawings. FIG. 6 is a bottom view showing the shape of the air bearing surface of the magnetic head slider in the fourth embodiment of the present invention. 1d is the magnetic head slider of the fourth embodiment of the present invention, 2 is the front end portion, 3 is the rear end portion, 4b, 5
b is an outer ABS formed outside the air bearing surface of the slider 1d from the front end portion 2 of the air bearing surface to a position closer to the front end than the rear end portion 3 of the air bearing surface, and 6a and 7a are front end portions 2 of the outer ABSs 4b and 5b. A taper portion formed on the side of the slider 1d
The central ABSs 24 and 25 formed from the position closer to the rear end 3 than the front end 2 to the rear end 3 in the approximate center of the air bearing surface are 4 μm deeper on both sides of the central ABS 23 than the central ABS. Stepped portion for pressurizing the formed air, 2
Reference numerals 6 and 27 denote 1 of the total length of the slider 1d in the direction opposite to the magnetic gap from the ends of the outer ABSs 4b and 5b on the magnetic gap side.
The rear end side step portion formed with a length of / 5 and the same depth as the step portions 24 and 25, and 28 is the outer ABSs 4b and 5b and the step portion 2.
Groove separating 4 and 25, 29 is the central ABS 23
It is a magnetic gap formed on the rear end 3 side.

Here, the rear ends 3 of the outer ABSs 4b and 5b.
The width on the side has a width that does not exceed the width on the side of the front end portion 2. Further, the two outer ABSs 4b and 5b and the central ABS 23 are substantially coplanar. Central AB
The stepped portion 24 located on the inner peripheral side of the magnetic disk in S23,
25 is formed to have a length of 100 μm or more from the rear end portion 3 side of the central ABS 23 to at least ⅕ of the entire length of the slider 1d and from the front end portion 2 side. It is formed wider than the step portion 25 in order to compensate for the lowering of the levitation force due to the lowering of the peripheral speed on the inner circumference of the disk.

The operation of the magnetic disk slider constructed as described above will be described below. As is clear from FIG. 6, the levitation force is applied to the outer ABSs 4b and 5b and the center A.
Since there is no extra mass on the outside of the BS 23 and the center of the pressure in the width direction of the slider 1d and the center of gravity of the slider 1d coincide with each other, it has high stability against rolling. Further, since the rear end side step portions 26 and 27 are steps of 4 μm, a negative pressure is generated near the boundary between the rear end side step portions 26 and 27 and the outer ABSs 4b and 5b. By this negative pressure, the rigidity of the air film in the vertical direction and the rolling direction is improved, and even when the slider 1d is downsized, high stability is exhibited against pitching and rolling. For example, the air film rigidity at the innermost circumference of the magnetic disk is 70.5 gf
/ Μm and the skew θ is zero, the air film rigidity is 63.
6gf / μm, air film rigidity at the outermost periphery of the magnetic disk is 4
Although the air film rigidity is 8.0 gf / μm and the skew θ is zero as compared with the TPC slider,
The improvement was 49% at the innermost circumference and 17% at the maximum outer circumference. Therefore, it is possible to improve the characteristics at the innermost circumference or the outermost circumference of the magnetic disk where the air film rigidity is lowered, and it is more practical than the TPC slider. Further, the floating characteristic is substantially the same as that of the first embodiment, and the description is omitted.

As described above, according to this embodiment, it has high stability against pitching and rolling, and the flying height can be kept constant over the entire area of the magnetic disk.

[0025]

As described above, according to the present invention, since the step portion for pressurizing air does not exist in the vicinity of the rear end portion of the slider, the air film rigidity does not decrease even when the skew θ becomes large. Therefore, the flying height difference between the inner and outer circumferences of the magnetic disk can be suppressed, and the flying height variation due to disturbance such as dimensional error can be improved, and a magnetic head slider with high yield and excellent reliability can be realized.

[Brief description of drawings]

FIG. 1 is an overall perspective view of a magnetic head slider according to an embodiment of the present invention.

FIG. 2 is a bottom view showing the shape of the air bearing surface of the magnetic head slider in one embodiment of the present invention.

FIG. 3 is a diagram showing a change in flying height according to a radial position of a magnetic disk of a magnetic head slider.

FIG. 4 is a bottom view showing the shape of the air bearing surface of the magnetic head slider according to the second embodiment of the invention.

FIG. 5 is a bottom view showing the shape of the air bearing surface of the magnetic head slider in the third embodiment of the invention.

FIG. 6 is a bottom view showing the shape of an air bearing surface of a magnetic head slider in a fourth embodiment of the invention.

FIG. 7 is a bottom view showing the shape of the air bearing surface of the conventional TPC slider.

FIG. 8 is a schematic diagram of a fixed disk device having a rotary arc actuator.

FIG. 9 is a diagram showing the relationship between the air flow and the magnetic head slider when the skew θ ≠ 0 °.

[Explanation of symbols]

1, 1a, 1b, 1c, 1d Magnetic head slider (slider) 2 Front end part 3 Rear end part 4, 4a, 5, 5a Air bearing surface (ABS) 4b, 5b Outer air bearing surface (outer ABS) 6, 6a, 7,7a Tapered part 8,9,10,11,19,20,20a, 21,2
2, 22a, 24, 25 step portion 12, 28 groove portion 13, 29 magnetic gap 14 suspension 15 drive arm 16 magnetic disk 17 longitudinal direction of slider 18 air flow 23 central air bearing surface (central ABS) 26, 27 rear end side step Department

Claims (7)

[Claims] 1. A magnetic head slider having a pair of air bearing surfaces formed on an air bearing surface facing a surface of a magnetic disk, and step portions on both sides of the air bearing surface which are one step lower than the air bearing surface. An air bearing surface formed so that the width of the air bearing surface on the magnetic gap side does not exceed the width of the air bearing surface on the side opposite to the magnetic gap; and the step is on the magnetic gap side of the air bearing surface. A length of 100 μm or more and a depth of 0.1 μm to 4 from the air bearing surface to both sides of the magnetic head slider from the end to 1/5 or more of the entire length of the magnetic head slider.
A magnetic head slider having a step portion having a lower step of μm. 2. The width of the step portion on the inner peripheral side of the magnetic disk among the step portions formed on both sides of the air bearing surface is wider than the width of the step portion on the outer peripheral side. The magnetic head slider according to claim 1, which is characterized in that: 3. The width of the step portion on the inner circumference side of the magnetic disk is equal to the width of the step portion on the outer circumference side of the step portions formed on both sides of the air bearing surface, and the inner circumference is 2. The magnetic head slider according to claim 1, wherein the side step portion is formed longer on the magnetic gap side than the outer peripheral side step portion. 4. A magnetic head slider having a pair of outer air bearing surfaces formed on an air bearing surface facing a surface of a magnetic disk, and a central air bearing surface formed inside the outer air bearing surfaces. A central air bearing surface formed so that the width of the central air bearing surface on the magnetic gap side does not exceed the width of the air bearing surface on the side opposite to the magnetic gap, and the magnetic gap side of the central air bearing surface. ⅕ or more of the total length of the magnetic head slider from the end to the side of the front end on both sides of 100μ
m or more and a depth of 0.1 from the central air bearing surface
A magnetic head slider, characterized in that it has a step portion which is one step lower than μm to 4 μm. 5. The width of the step portion on the inner peripheral side of the magnetic disk among the step portions formed on both sides of the central air bearing surface is wider than the width of the step portion on the outer peripheral side. The magnetic head slider according to claim 4, which is characterized in that. 6. The stepped portion formed on both sides of the central air bearing surface has the same width as the stepped portion on the inner peripheral side of the magnetic disk and the width of the stepped portion on the outer peripheral side, and the inner peripheral portion. 5. The magnetic head slider according to claim 4, wherein the side step portion is formed longer on the magnetic gap side than the outer peripheral side step portion. 7. A length of 1/5 to 1/2 of the total length of the magnetic head slider in the direction opposite to the magnetic gap from the end of the outer air bearing surface on the side of the magnetic gap, and a depth from the outer air bearing surface. 7. The magnetic head slider according to claim 4, wherein a rear end side step portion having a lower step of 0.1 μm to 4 μm is formed.