JPH0793296B1 - - Google Patents

Info

Publication number
JPH0793296B1
JPH0793296B1 JP4501476A JP50147691A JPH0793296B1 JP H0793296 B1 JPH0793296 B1 JP H0793296B1 JP 4501476 A JP4501476 A JP 4501476A JP 50147691 A JP50147691 A JP 50147691A JP H0793296 B1 JPH0793296 B1 JP H0793296B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4501476A
Other languages
Japanese (ja)
Inventor
Atsuhiro Tsukune
Juji Furumura
Masanobu Hatada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu VLSI Ltd
Fujitsu Ltd
Original Assignee
Fujitsu VLSI Ltd
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu VLSI Ltd, Fujitsu Ltd filed Critical Fujitsu VLSI Ltd
Priority to JP4501476A priority Critical patent/JPH0793296B1/ja
Publication of JPH0793296B1 publication Critical patent/JPH0793296B1/ja
Pending legal-status Critical Current

Links

JP4501476A 1991-01-08 1991-12-19 Pending JPH0793296B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4501476A JPH0793296B1 (en) 1991-01-08 1991-12-19

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP73491 1991-01-08
JP6213391 1991-03-26
JP4501476A JPH0793296B1 (en) 1991-01-08 1991-12-19

Publications (1)

Publication Number Publication Date
JPH0793296B1 true JPH0793296B1 (en) 1995-10-09

Family

ID=27274578

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4501476A Pending JPH0793296B1 (en) 1991-01-08 1991-12-19

Country Status (1)

Country Link
JP (1) JPH0793296B1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002538604A (en) * 1999-02-26 2002-11-12 トリコン ホールディングス リミティド Processing method of polymer layer
JP2021064720A (en) * 2019-10-16 2021-04-22 大陽日酸株式会社 Method of forming metal oxide thin film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002538604A (en) * 1999-02-26 2002-11-12 トリコン ホールディングス リミティド Processing method of polymer layer
JP2021064720A (en) * 2019-10-16 2021-04-22 大陽日酸株式会社 Method of forming metal oxide thin film

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