JPH079325A - Forming device of surface plate surface - Google Patents

Abstract

PURPOSE:To finish in a desired surface plate form with a gentle correcting surface having little unevenness in a simple structure, by using servo-motors both for the horizontal feed and the vertical feed. CONSTITUTION:A surface plate surface forming device 4 provided to a double plane polishing device is composed of a horizontal feeding device 5 and a vertical feeding device 6. The horizontal feeding device 5 moves horizontally between the inner periphery and the outer periphery of the surface plate by the rotation of a ball screw 10a by guiding a tool holding member 8 having tools 7 and 7 at the upper side and the lower side by a linear guide 9a. The vertical feeding device 6 has the same structure, and it moves vertically by the rotation of a ball screw 10b by guiding a machine board 12 loading the horizontal feeding device 5 by a linear guide 9b. By computer-controlling by a control device 3 through the horizontal and the vertical feeding servo-motors 11a and 11b respectively, the surface of the surface plate can be made in a desired form.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface plate surface forming device for forming one surface of a metal surface plate, a grindstone surface plate or the like used in a flat surface polishing apparatus or the like into a predetermined shape. More specifically, the present invention relates to a dressing device and a truing device that perform flat surface processing, curved surface processing, and groove cutting processing on a surface plate.

[0002]

2. Description of the Related Art As a conventional technique, there is a cutting device for grooving a surface plate. This is the actual exploitation Sho 61-16952
As disclosed in Japanese Patent Publication No. 1, a blade is applied to the working surface of a rotating surface plate, and the blade is moved in the radial direction of the surface plate based on a value set as a target at a point on the outer circumference or the inner circumference. There are things that cut while moving. In addition, JP-A-3
Japanese Patent Publication No. 149179 discloses a dressing device fixed to the upper and lower stools for simultaneously dressing the surfaces of the first and second grindstones, respectively.

[0003]

However, among the prior arts shown above, in the case of Japanese Utility Model Laid-Open No. 61-169521, for example, when it is desired to make the surface plate shape concave, the surface plate center to the surface plate center is used. Since the bite is moved linearly with the aim of a certain point of the part (or the central part to the outer peripheral part),
The deeper (larger) the target cutting value for a certain point is, the more the cutting tool is moved toward the center and the more the cutting amount is applied, the more the cutting amount is, and the tool itself is damaged, and the finish becomes inevitably rough. Will end up.
That is, when it is not possible to make deep cuts at one time, a great amount of labor is required to carry out repeated machining with a constant feed amount in the vertical direction. Also, if you want to finish in a shape other than the above, you have to spend a great deal of time to finish in a predetermined shape, such as changing the cutting speed and depth during processing, and the skill of the operator Was needed. Especially, it was almost impossible to finish it into a curved surface. Further, in the case of JP-A-3-149179, it is possible to dress the grindstones fixed to the upper and lower surface plates at a time on both sides when the fixed grindstone surfaces of both the upper and lower surface plates are processed horizontally, or the level is already formed. It is only for sharpening when it is done. That is, like the above example, it is not suitable for processing a curved surface. In view of these circumstances, the present invention provides a surface plate surface forming apparatus that solves the above-mentioned drawbacks of the prior art and can finish an arbitrary surface plate shape with a small correction surface and a gentle correction surface with a simple configuration. The purpose is to do.

[0004]

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and in a platen surface forming device provided in a flat polishing device, a servo is used for both horizontal and vertical feeding. The technical means of using a motor was adopted.

[0005]

As a result of adopting the above technical means, the present invention provides an apparatus for forming a surface plate surface in which an upper surface tool is dressed or trued by an upper tool and a lower surface plate is trued by a lower tool. Is the X axis and the rotation axis of the surface plate is the Z axis, a curve of any shape can be formed in the XZ plane, and the Z axis contact piece of the curve can be changed by a certain set amount. it can. Therefore, even if the amount cannot be processed at one time, it is possible to easily repeat the processing a plurality of times.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to the accompanying drawings. FIG. 1 shows a double-sided plane polishing apparatus provided with a platen surface forming apparatus. Normally, a double-sided surface polishing apparatus is one in which a workpiece held by a carrier meshed with a sun gear and an internal gear is pressed against a rotating upper and lower surface plate for processing. Here, 1 is an upper surface plate, 2 is a lower surface plate, and 3 is a driver. The upper surface plate 1 is driven by a driver 3.
Reference numeral 4 denotes a surface plate surface forming device, which comprises a horizontal feeding device 5 and a vertical feeding device 6, and the horizontal feeding device 5 has a tool support provided with tools 7 and 7 (for example, blades) vertically. The member 8 is guided by the linear guide 9a, and is horizontally moved in the direction of arrow A between the inner and outer circumferences of the surface plate by the rotation of the ball screw 10a. The vertical feed device 6 has the same structure, and the machine base 12 on which the horizontal feed device 5 is placed is guided by the linear guide 9b and is moved in the vertical direction by the rotation of the ball screw 10b. 11a, 11b
Is a horizontal feed servomotor and a vertical feed servomotor, respectively, and the surface of the surface plate can be formed into an arbitrary shape by computer control by the controller 13. Surface plate forming device 4 configured as described above
When the surface plate surface is formed by, first, if the upper surface plate 1 is processed, the upper surface plate 1 is raised to a predetermined height within the range of engaging the driver 3, and the cutting edge of the tool 7 is aligned with the surface plate surface. By the way, adjust 0. Next, after inputting the machining shape to the control device 13, the surface plate is rotated to start machining (FIG. 2). The processing by the surface plate surface forming device may be performed from the outer peripheral side or the inner peripheral side of the surface plate, but the upper surface plate 1 is moved in the direction of arrow A in FIG. When the machining is finished, the tool 7 is returned to the start position. Since the same applies to the processing of the lower turn table 2, the description thereof will be omitted. Since the upper surface plate 1 uses the centering bearing 14, it must be fixed during processing. Therefore, as shown in FIG. 1, when the upper surface plate 1 moves up, the block 15
Comes into contact with the stopper 16, the centering of the upper surface plate 1 does not function, and the upper surface plate 1 is fixed. When the upper surface plate 1 is lowered after the processing is completed, the centering works again. It should be noted that, in FIG. 1, the upper and lower platens are opened for the sake of clarity, but the state shown in FIG. Next, the processing shape of the surface plate will be described. FIG. 3 shows an example of processing the surface plate surface linearly.
FIG. 4 shows an example of processing the surface plate surface into a curved shape. Also, FIG.
Shows an example of spiral groove cutting, and FIG. 6 shows an example of concentric groove cutting. Shaded portions in FIGS. 3 and 4 are processed portions. It should be noted that the feeding means of the horizontal feeding device 5 and the vertical feeding device 6 may be a servo motor and a ball screw, or a servo motor and a rack, or a pinion as long as it is a conventionally known feeding device. Needless to say, it can be used in various ways. Further, the platen surface forming device 4 may be fixed to the lapping machine or may be detachably provided. In the case of fixing, it is possible to freely rotate between the processing position between the upper and lower surface plates and the standby position on the outer periphery of the flat polishing device by a conventional means such as a motor and an air cylinder. Depending on the target surface plate surface shape, it may not be able to be completely processed in one time. At that time, the same processing is repeated several times. For example, in the case of performing truing processing for 50 μm every 10 μm five times, this condition can be input to the control device and processing can be continuously performed five times. At this time,
There is unevenness on the surface plate to be processed, and it is 10
When it becomes necessary to machine more than μm, the range of machining allowable current value is decided, and when this range is exceeded, 10
It is possible to return to the front of μm and restart the processing. That is, it is processed 6 times. If all of the currents are less than the allowable machining current value during one truing process,
It is considered that the processing is completed, and the completion display is displayed and the processing is stopped. Although the technique of forming the lapping plate surface by truing has been described in the present embodiment, it goes without saying that the present technique can be applied to dressing of a grindstone surface or dressing of a polishing pad surface. Also,
It can be applied not only to a double-sided polishing machine but also to a single-sided polishing machine. Furthermore, if NC control or the like is used, the finished surface will not be stepwise due to curve interpolation, arc interpolation, or the like.

[0007]

As a result of adopting the above configuration, the present invention provides
The following effects can be obtained. (1) Since the servomotors are used in both the horizontal direction and the vertical direction and these are controlled by a computer, the surface plate surface of the flat polishing apparatus can be formed in an arbitrary shape.

[Brief description of drawings]

FIG. 1 is a schematic front view showing a platen surface forming apparatus according to an embodiment of the present invention.

FIG. 2 is a schematic front view of a main part of a platen surface forming apparatus according to an embodiment of the present invention.

FIG. 3 is a partial cross-sectional view of a surface plate showing an example of a truing shape.

FIG. 4 is a partial cross-sectional view of a surface plate showing another example of a truing shape.

FIG. 5 is a plan view of a surface plate showing another example of the truing shape.

FIG. 6 is a plan view of a surface plate showing still another example of the truing shape.

[Explanation of symbols]

1 ... upper surface plate 2 ... lower surface plate 3 ... driver 4 ... surface plate surface forming device 5 ... horizontal feed device 6 ... vertical feed device 7 ... tool 8 ... tool support member 9a ... Linear guide 9b Linear guide 10a ... Ball screw 10b ...
Ball screw 11a ... Horizontal feed servo motor 11b ... Vertical feed servo motor 12 ... Machine stand 13 ... Controller 14 ... Aligning bearing 15 ... Block 16 ・ ・ ・ ・ Stopper

Claims (1)

[Claims] 1. A surface plate forming apparatus for a flat polishing apparatus, wherein a servomotor is used for both horizontal and vertical feeding.