JPH0792445B2 - Hydrocarbon gas detector - Google Patents
Hydrocarbon gas detectorInfo
- Publication number
- JPH0792445B2 JPH0792445B2 JP2186889A JP18688990A JPH0792445B2 JP H0792445 B2 JPH0792445 B2 JP H0792445B2 JP 2186889 A JP2186889 A JP 2186889A JP 18688990 A JP18688990 A JP 18688990A JP H0792445 B2 JPH0792445 B2 JP H0792445B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- gas
- sensitive element
- electrode
- thick film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、例えばブタンガス等の炭化水素系ガスを検出
するのに用いて好適な炭化水素系ガス検出器に関する。TECHNICAL FIELD The present invention relates to a hydrocarbon-based gas detector suitable for use in detecting a hydrocarbon-based gas such as butane gas.
一般に、自動車用エンジン等では燃料としてガソリンま
たは軽油等を使用しているが、最近のエネルギー事情に
鑑み代替燃料の必要性が高まっている。Generally, gasoline or light oil is used as fuel in automobile engines and the like, but the need for alternative fuels is increasing in view of recent energy circumstances.
そこで、例えばブタン等の炭化水素を代替燃料として使
用することが検討されている。Therefore, the use of hydrocarbons such as butane as an alternative fuel is being studied.
ところで、ブタン等の炭化水素系ガスを代替燃料として
使用する場合には、ガソリン等の燃料に比較して高圧下
で噴射弁から噴射させる必要があるから、燃料配管の途
中等でガス漏れが発生する可能性がある。By the way, when using a hydrocarbon-based gas such as butane as an alternative fuel, it is necessary to inject it from the injection valve under a higher pressure than a fuel such as gasoline, so gas leakage occurs in the middle of the fuel pipe etc. there's a possibility that.
また、従来から種々のガスセンサとしてのガス検出器は
提案されているが、水素、一酸化炭素、アンモニア、硫
化水素等の種々のガスからブタン等の炭化水素系ガスを
特定して検出するのは難しいという問題がある。Further, conventionally, gas detectors as various gas sensors have been proposed, but it is not possible to identify and detect a hydrocarbon-based gas such as butane from various gases such as hydrogen, carbon monoxide, ammonia, and hydrogen sulfide. There is a problem that it is difficult.
本発明は上述した従来技術の問題に鑑みなされたもの
で、本発明はブタン等の炭化水素系ガスを高精度に検出
できるようにした炭化水素系ガス検出器を提供すること
を目的としている。The present invention has been made in view of the above-mentioned problems of the prior art, and an object of the present invention is to provide a hydrocarbon gas detector capable of detecting a hydrocarbon gas such as butane with high accuracy.
上述した課題を解決するために本発明は、絶縁性の基板
と、酸化スズに塩化パラジウムを混合して焼成すること
により、該基板の一側面に凸湾曲状に盛付けるように形
成した厚膜抵抗体からなる感ガス素子と、該感ガス素子
と前記基板の一側面との間に設けられ、該感ガス素子に
電圧を印加するプラス側、マイナス側電極と、前記基板
の他側面に設けられ、外部からの通電により前記感ガス
素子を400℃近傍の温度まで加熱するヒータとからなる
構成を採用している。In order to solve the above-described problems, the present invention provides an insulating substrate and a thick film formed by mixing tin chloride with palladium chloride and baking the mixture to form a convex curve on one side surface of the substrate. A gas sensitive element composed of a resistor, positive and negative electrodes provided between the gas sensitive element and one side surface of the substrate, for applying a voltage to the gas sensitive element, and provided on the other side surface of the substrate. And a heater that heats the gas-sensitive element to a temperature near 400 ° C. by energization from the outside.
この場合、請求項２に記載の発明の如く、前記プラス
側、マイナス側電極のうち一方の電極は、前記基板の一
側面に広い面積をもって略Ｕ字状に伸長する二又部と、
該二又部の一側から前記基板の長手方向に伸びる引出し
部とから構成し、他方の電極は、前記二又部間に位置し
前記引出し部とは逆向きに前記基板の長手方向に伸びる
構成とするのが好ましい。In this case, as in the invention according to claim 2, one of the plus side electrode and the minus side electrode has a bifurcated portion extending in a substantially U shape with a large area on one side surface of the substrate,
A lead portion extending from one side of the bifurcated portion in the longitudinal direction of the substrate, and the other electrode is located between the bifurcated portions and extends in the longitudinal direction of the substrate in a direction opposite to the lead portion. It is preferable to have a structure.
上記構成により、請求項１に記載の発明では、塩化パラ
ジウムを含んだ酸化スズの厚膜抵抗体からなる感ガス素
子を、基板の一側面に凸湾曲状に盛上げる形状に形成で
き、ブタン等の炭化水素系ガスと感ガス素子との接触面
積を大きく拡大することができる。そして、該感ガス素
子をヒータで400℃近傍の温度まで加熱して、該感ガス
素子の抵抗値の変化をモニタすれば、ブタン等の炭化水
素系ガス雰囲気中では感ガス素子の抵抗値が急激に低下
するから、ブタン等の炭化水素系ガスを容易に特定して
検出することができる。With the above structure, in the invention according to claim 1, the gas sensitive element composed of the thick film resistor of tin oxide containing palladium chloride can be formed in a convex curved shape on one side surface of the substrate. The contact area between the hydrocarbon gas and the gas-sensitive element can be greatly expanded. Then, by heating the gas-sensitive element to a temperature near 400 ° C. with a heater and monitoring the change in the resistance value of the gas-sensitive element, the resistance value of the gas-sensitive element is reduced in a hydrocarbon-based gas atmosphere such as butane. Since it drops sharply, a hydrocarbon-based gas such as butane can be easily identified and detected.
この場合、請求項２に記載の発明のように、プラス側、
マイナス側電極のうち一方の電極には、前記基板の一側
面に広い面積をもって略Ｕ字状に伸長する二又部を形成
し、他方の電極を該二又部間で前記基板の長手方向に伸
びる形状とすることにより、前記厚膜抵抗体からなる感
ガス素子を基板の一側面上でプラス側、マイナス側の電
極間に広い面積をもって配設でき、該プラス側電極とマ
イナス側電極との間で感ガス素子の抵抗値変化を高精度
に検出できる。In this case, as in the invention described in claim 2, the plus side,
One of the minus side electrodes is provided with a forked portion extending in a substantially U shape with a large area on one side surface of the substrate, and the other electrode is provided between the forked portions in the longitudinal direction of the substrate. With the elongated shape, the gas sensitive element composed of the thick film resistor can be arranged with a large area between the plus side and the minus side electrodes on one side surface of the substrate, and the plus side electrode and the minus side electrode The change in the resistance value of the gas sensitive element can be detected with high accuracy.
以下、本発明の実施例を第１図ないし第５図に基づき説
明する。An embodiment of the present invention will be described below with reference to FIGS. 1 to 5.
図において、１は炭化水素系ガス検出器としてのガスセ
ンサ、２は該ガスセンサ１の基板を示し、該基板２は耐
熱性を有するアルミナ(Al2O3)等のセラミック材料によ
り長方形の平板状に形成され、ブタンガス等の漏れを検
出すべく所定位置に配設されるようになっている。In the figure, 1 is a gas sensor as a hydrocarbon gas detector, 2 is a substrate of the gas sensor 1, and the substrate 2 is a rectangular flat plate made of a heat-resistant ceramic material such as alumina (Al 2 O 3 ). It is formed and arranged at a predetermined position to detect a leak of butane gas or the like.
3,4は基板２の表面に印刷等の手段を用いて形成された
一側、他側の電極を示し、該電極3,4は基板２上に所定
の暑さをもって形成され、該基板２の表面上で所定寸法
離間して配設されている。ここで、電極３は、基板２の
表面に比較的広い面積をもって略Ｕ字形状に伸長する二
又部3Aと、該二又部3Aの一側から基板２の一側（右側）
へと略長方形状に伸びる引出し部3Bとからなり、該引出
し部3Bの端部3Cは後述の厚膜抵抗体５から右側に突出し
ている。また、電極４は電極３の二又部3A間を左右方向
に伸長して細長い長方形状に形成され、その端部4Aは厚
膜抵抗体５から左側に突出している。そして、電極3,4
のうち一方がプラス側電極となり、他方がマイナス側電
極を構成している。Reference numerals 3 and 4 denote electrodes on one side and the other side formed on the surface of the substrate 2 by means of printing or the like. The electrodes 3 and 4 are formed on the substrate 2 with a predetermined heat and the substrate 2 Are spaced apart from each other by a predetermined size. Here, the electrode 3 has a bifurcated portion 3A extending in a substantially U shape with a relatively large area on the surface of the substrate 2, and one side of the bifurcated portion 3A to one side of the substrate 2 (right side).
And a lead-out portion 3B extending in a substantially rectangular shape, and an end portion 3C of the lead-out portion 3B projects rightward from a thick film resistor 5 described later. The electrode 4 is formed in a slender rectangular shape by extending in the left-right direction between the forked portions 3A of the electrode 3, and the end portion 4A thereof projects from the thick film resistor 5 to the left. And the electrodes 3,4
One of them serves as a positive electrode and the other constitutes a negative electrode.
５は基板２の表面に電極3,4を覆うようにして設けられ
た金属酸化物半導体からなる感ガス素子としての厚膜抵
抗体を示し、該抵抗体５は酸化スズ(SnO2)を母材とする
粉体に、例えば５重量％のパラジウムを混合することに
より形成されたペースト状物を、基板２の表面上に盛付
けるようにして塗布した後に、例えば400℃程度の温度
下で焼成することにより略長方形状に形成されている。
そして、該抵抗体５は電極3,4を端部3C,4Aを残して覆
い、該電極3,4間の抵抗値を周囲のガスに応じて変化さ
せるようになっている。Reference numeral 5 denotes a thick film resistor as a gas sensitive element made of a metal oxide semiconductor, which is provided on the surface of the substrate 2 so as to cover the electrodes 3 and 4, and the resistor 5 is made of tin oxide (SnO 2 ). A paste-like material formed by mixing, for example, 5% by weight of palladium with the powder used as the material is applied so as to be spread on the surface of the substrate 2, and then fired at a temperature of about 400 ° C., for example. By doing so, it is formed in a substantially rectangular shape.
The resistor 5 covers the electrodes 3 and 4 except for the ends 3C and 4A, and changes the resistance value between the electrodes 3 and 4 according to the ambient gas.
６は基板２の裏面に設けられたヒータを示し、該ヒータ
６は基板２の裏面に所定のヒータパターンを持ったヒー
タ線6Aを埋設するよに略長方形状に形成され、その面積
は厚膜抵抗体５の面積よりも小さくなっている。また、
該ヒータ６はその左、右両端にヒータ電極7,7が設けら
れ、外部から該各ヒータ電極７を介して通電されること
により発熱するようになっている。そして、該ヒータ６
は基板２の裏面側に表面側の厚膜抵抗体５と対向するよ
うに配設され、例えば400℃程度の温度まで厚膜抵抗体
５を加熱するようになっている。Reference numeral 6 denotes a heater provided on the back surface of the substrate 2. The heater 6 is formed in a substantially rectangular shape so as to embed a heater wire 6A having a predetermined heater pattern on the back surface of the substrate 2, and its area is a thick film. It is smaller than the area of the resistor 5. Also,
The heater 6 is provided with heater electrodes 7, 7 at both left and right ends thereof, and is adapted to generate heat by being energized from the outside through the heater electrodes 7. And the heater 6
Is disposed on the back side of the substrate 2 so as to face the thick film resistor 5 on the front side, and heats the thick film resistor 5 to a temperature of, for example, about 400 ° C.
本実施例によるガスセンサ１は上述の如き構成を有する
もので、次に感ガス素子としての厚膜抵抗体５の製造方
法について説明する。The gas sensor 1 according to the present embodiment has the above-mentioned configuration. Next, a method for manufacturing the thick film resistor 5 as a gas sensitive element will be described.
まず、硫化スズ(SnSO4)の粉体を例えば600℃の温度下で
１時間程度焼成し、厚膜抵抗体５の母材となる酸化スズ
(SnO2)を調整する。次に、この酸化スズに、例えば５重
量％の塩化パラジウム(PbC12)を混合して800℃の温度下
で１時間程度焼成し、酸化スズと塩化パラジウムとから
なる粉体を調製する。First, tin sulfide (SnSO 4 ) powder is fired at a temperature of, for example, 600 ° C. for about 1 hour to form tin oxide, which is the base material of the thick film resistor 5.
Adjust (SnO 2 ). Next, this tin oxide is mixed with, for example, 5% by weight of palladium chloride (PbC1 2 ) and baked at a temperature of 800 ° C. for about 1 hour to prepare a powder composed of tin oxide and palladium chloride.
そして、その粉体をアルコール等の溶液で混練してぺー
スト状物とし、このペースト状物を基板２の表面上に盛
付けるようにして塗布して、大気中で乾燥させ、例えば
400℃の温度下で１時間程度ペースト状物を焼成して塩
化パラジウムの塩素分やアルコールを発揮させ、これに
より厚膜抵抗体５を基板２の表面に形成する。この場
合、基板２の表面には予め電極3,4を、例えば印刷等の
手段を用いて形成し、この電極3,4の上にペースト状物
を塗布することにより厚膜抵抗体５を形成する。また、
基板２の裏面にはヒータ６を各ヒータ電極７と共に設け
る。Then, the powder is kneaded with a solution of alcohol or the like to form a paste-like material, and this paste-like material is applied on the surface of the substrate 2 so as to be coated and dried in the atmosphere, for example.
The paste-like material is baked at a temperature of 400 ° C. for about 1 hour so that the chlorine content of palladium chloride and alcohol are exerted, whereby the thick film resistor 5 is formed on the surface of the substrate 2. In this case, the electrodes 3 and 4 are previously formed on the surface of the substrate 2 by using a means such as printing, and the paste-like material is applied onto the electrodes 3 and 4 to form the thick film resistor 5. To do. Also,
A heater 6 is provided on the back surface of the substrate 2 together with each heater electrode 7.
そして、このように製造したガスセンサ１は、自動車用
エンジンの代替燃料としてブタン等の炭化水素系ガスを
使用する場合に、燃料配管の近傍に位置して運転室の床
下等に配設する。この場合、厚膜抵抗体５は第４図に示
す如く電極３が電源としてのバッテリ８に接続され、電
極４が保護用または調整用の抵抗９を介してアースされ
る。また、ヒータ６は各ヒータ電極７を介して外部から
通電され、厚膜抵抗体５を400℃程度の温度まで加熱す
る。そして、厚膜抵抗体５と抵抗９との間の接続端子10
をコントロールユニット（図示せず）等に接続し、接続
端子10からの検出電圧に基づきブタンガス等の漏れを検
出し、ガス漏れ時には警報装置（図示せず）を作動させ
る。The gas sensor 1 manufactured in this manner is disposed near the fuel pipe and arranged under the floor of the operator's cab or the like when a hydrocarbon-based gas such as butane is used as a substitute fuel for an automobile engine. In this case, as shown in FIG. 4, the thick film resistor 5 has the electrode 3 connected to the battery 8 as a power source, and the electrode 4 grounded through the protective or adjusting resistor 9. The heater 6 is energized from the outside through each heater electrode 7 to heat the thick film resistor 5 to a temperature of about 400 ° C. And the connection terminal 10 between the thick film resistor 5 and the resistor 9
Is connected to a control unit (not shown) or the like, a leak of butane gas or the like is detected based on the detected voltage from the connection terminal 10, and an alarm device (not shown) is activated when the gas leaks.
ここで、本出願人は当該ガスセンサ１の感度を厚膜抵抗
体５の空気中における抵抗値RAと種々のガス中における
抵抗値RGとの比（RA／RG）として調べた結果、第５図に
示す如く、ヒータ６による加熱温度を、例えば100℃か
ら400℃へと上昇させるに応じて、硫化水素(H2S)ガスの
雰囲気中では当該ガスセンサ１の感度が急激に低下し、
水素(H2)ガス中では漸次低下し、アンモニア(NH3)ガ
ス、一酸化炭素（CO）ガス中ではそれほど変化せず、ブ
タン(C4H10)ガス中では300℃程度から急激に感度が上昇
し、400℃を前、後する温度でブタン等の炭化水素系ガ
スを特定して検出できることを確認した。Here, the applicant has examined the sensitivity of the gas sensor 1 as a ratio (R A / R G ) of the resistance value R A of the thick film resistor 5 in air to the resistance value R G of various gases. As shown in FIG. 5, as the heating temperature of the heater 6 is increased from 100 ° C. to 400 ° C., the sensitivity of the gas sensor 1 is drastically reduced in the atmosphere of hydrogen sulfide (H 2 S) gas. Then
It gradually decreases in hydrogen (H 2 ) gas, does not change so much in ammonia (NH 3 ) gas and carbon monoxide (CO) gas, and rapidly increases in sensitivity from about 300 ° C in butane (C 4 H 10 ) gas. It was confirmed that hydrocarbon gas such as butane can be specified and detected at temperatures of 400 ° C. before and after.
かくして、本実施例によれば、基板２の表面に電極3,4
を覆うようにして厚膜抵抗体５を設け、基板２の裏面側
には該厚膜抵抗体５を、例えば400℃程度まで加熱すべ
くヒータ６を設けることによってガスセンサ１を構成
し、厚膜抵抗体５を酸化スズを母材とし、例えば５重量
％の塩化パラジウムを混合してなる材料によって形成し
たから、ブタン等の炭化水素系ガスを高感度で検出で
き、ブタン等のガス漏れを早期に検出することができ
る。Thus, according to this embodiment, the electrodes 3, 4 are formed on the surface of the substrate 2.
The thick film resistor 5 is provided so as to cover the thick film resistor 5, and the thick film resistor 5 is provided on the back surface side of the substrate 2 with the heater 6 for heating up to, for example, about 400 ° C. Since the resistor 5 is made of a material composed of tin oxide as a base material and mixed with, for example, 5% by weight of palladium chloride, hydrocarbon-based gas such as butane can be detected with high sensitivity, and gas leakage such as butane can occur early. Can be detected.
この場合、基板２の表面に印刷等の手段を用いて形成し
た電極3,4のうち、一方の電極３は、基板２の表面に比
較的広い面積をもって略Ｕ字形状に伸長する二又部3A
と、該二又部3Aの一側から基板２の一側へと略長方形状
に伸びる引出し部3Bとから構成し、他方の電極４は電極
３の二又部3A間を左右方向に伸長する細長い長方形状に
形成しているから、感ガス素子としての厚膜抵抗体５を
基板２の表面上で電極3,4間に広い面積をもって配設で
き、該電極3,4間で厚膜抵抗体５の抵抗値変化を高精度
に取出すことができる。In this case, one of the electrodes 3 and 4 formed on the surface of the substrate 2 by means of printing or the like is one of the two electrodes which extends on the surface of the substrate 2 in a substantially U shape with a relatively large area. 3A
And a lead-out portion 3B extending from one side of the bifurcated portion 3A to one side of the substrate 2 in a substantially rectangular shape, and the other electrode 4 extends laterally between the bifurcated portions 3A of the electrode 3. Since it is formed in an elongated rectangular shape, the thick film resistor 5 as a gas sensitive element can be arranged with a large area between the electrodes 3 and 4 on the surface of the substrate 2, and the thick film resistor 5 can be formed between the electrodes 3 and 4. The change in the resistance value of the body 5 can be taken out with high accuracy.
また、厚膜抵抗体５は基板２の表面に盛付けるようにし
て形成し、第２図に示す如く基板２上に凸湾曲状に盛上
げる形状としたから、厚膜抵抗体５の表面積を大きくし
て周囲のガスとの接触面積を拡大でき、ブタン等のガス
漏れを高精度に検出できる。Further, since the thick film resistor 5 is formed so as to be laid on the surface of the substrate 2 and is formed in a convex curved shape on the substrate 2 as shown in FIG. 2, the surface area of the thick film resistor 5 is By increasing the size, the contact area with the surrounding gas can be expanded, and gas leaks such as butane can be detected with high accuracy.
なお、前記実施例では、感ガス素子としての厚膜抵抗体
５を、５重量％のパラジウムを含む酸化スズによって構
成するものとして述べたが、パラジウムの含有量は５重
量％に限るものではなく、例えば５重量％以上のパラジ
ウムを含有させてもよい。Although the thick film resistor 5 as the gas sensing element is made of tin oxide containing 5% by weight of palladium in the above embodiment, the palladium content is not limited to 5% by weight. For example, 5 wt% or more of palladium may be contained.
以上詳述した通り、請求項１に記載の発明によれば、酸
化スズに塩化パラジウムを混合した厚膜抵抗体からなる
感ガス素子を、基板の一側面に凸湾曲状に盛付けるよう
にして形成し、該感ガス素子と前記基板の一側面との間
には、該感ガス素子に電圧を印加するプラス側、マイナ
ス側電極を設けると共に、前記基板の他側面には、外部
からの通電により前記感ガス素子を400℃近傍の温度ま
で加熱するヒータを設ける構成としたから、基板の一側
面に感ガス素子を凸湾曲状に盛上げる形状に形成でき、
ブタン等の炭化水素系ガスと感ガス素子との接触面積を
拡大して検出感度を確実に高めることができる。As described in detail above, according to the invention of claim 1, a gas sensitive element made of a thick film resistor in which tin oxide is mixed with palladium chloride is arranged in a convex curved shape on one side surface of the substrate. The positive and negative electrodes for applying a voltage to the gas sensitive element are provided between the gas sensitive element and one side surface of the substrate, and the other side surface of the substrate is energized from the outside. Thus, the heater for heating the gas-sensitive element to a temperature near 400 ° C. is provided, so that the gas-sensitive element can be formed in a convex curved shape on one side surface of the substrate,
By increasing the contact area between a hydrocarbon-based gas such as butane and the gas sensitive element, the detection sensitivity can be reliably increased.
そして、感ガス素子をヒータで400℃近傍の温度まで加
熱することにより、ブタン等の炭化水素系ガスの雰囲気
中で感ガス素子の抵抗値が急激に変化するようになり、
炭化水素系ガスを他の種々のガスから容易に特定して検
出でき、検出精度を効果的に向上させることができる。Then, by heating the gas-sensitive element to a temperature near 400 ° C. with a heater, the resistance value of the gas-sensitive element will rapidly change in the atmosphere of a hydrocarbon-based gas such as butane,
The hydrocarbon-based gas can be easily specified and detected from other various gases, and the detection accuracy can be effectively improved.
また、請求項２に記載の発明のように、プラス側、マイ
ナス側電極のうち一方の電極には、前記基板の一側面に
広い面積をもって略Ｕ字状に伸長する二又部を形成し、
他方の電極を該二又部間で前記基板の長手方向に伸びる
形状とすることにより、前記厚膜抵抗体からなる感ガス
素子を基板の一側面上でプラス側、マイナス側の電極間
に広い面積をもって配設できるから、プラス側電極とマ
イナス側電極との間で感ガス素子の抵抗値変化を高精度
に取出すことができ、ブタン等の炭化水素系ガスに対す
る検出感度を大幅に向上できる。Further, as in the invention according to claim 2, one of the plus side electrode and the minus side electrode is provided with a bifurcated portion extending in a substantially U shape with a large area on one side surface of the substrate,
By forming the other electrode so as to extend in the longitudinal direction of the substrate between the bifurcated portions, the gas sensitive element composed of the thick film resistor is wide on one side surface of the substrate between the plus side electrode and the minus side electrode. Since it can be arranged with an area, the change in resistance value of the gas sensing element can be accurately taken out between the positive side electrode and the negative side electrode, and the detection sensitivity for hydrocarbon gas such as butane can be greatly improved.
第１図は本発明の実施例によるガスセンサの正面図、第
２図は第１図中の矢印II−II方向断面図、第３図は第１
図の裏面図、第４図は電気回路図、第５図はガスセンサ
の感度と温度との関係を示す特性線図である。 １……ガスセンサ（ガス検出器）。２……基板、3,4…
…電極、3A……二又部、3B……引出し部、５……厚膜抵
抗体（感ガス素子）、６……ヒータ、７……ヒータ電
極。FIG. 1 is a front view of a gas sensor according to an embodiment of the present invention, FIG. 2 is a sectional view in the direction of arrows II-II in FIG. 1, and FIG.
FIG. 4 is a rear view of the figure, FIG. 4 is an electric circuit diagram, and FIG. 5 is a characteristic diagram showing the relationship between the sensitivity of the gas sensor and the temperature. 1 ... Gas sensor (gas detector). 2 ... Substrate, 3,4 ...
… Electrode, 3A… Bending part, 3B… Drawing part, 5… Thick film resistor (gas sensitive element), 6… Heater, 7… Heater electrode.
Claims (2)
ムを混合して焼成することにより、該基板の一側面に凸
湾曲状に盛付けるように形成した厚膜抵抗体からなる感
ガス素子と、該感ガス素子と前記基板の一側面との間に
設けられ、該感ガス素子に電圧を印加するプラス側、マ
イナス側電極と、前記基板の他側面に設けられ、外部か
らの通電により前記感ガス素子を400℃近傍の温度まで
加熱するヒータとから構成してなる炭化水素系ガス検出
器。1. A gas sensitive element comprising an insulating substrate and a thick film resistor formed so as to be convexly curved on one side surface of the substrate by mixing and firing tin oxide with palladium chloride. A positive side electrode and a negative side electrode for applying a voltage to the gas sensitive element, and the other side surface of the substrate, which are provided between the gas sensitive element and one side surface of the substrate, and are electrically connected from the outside. A hydrocarbon-based gas detector comprising a heater for heating the gas-sensitive element to a temperature near 400 ° C.
の電極は、前記基板の一側面に広い面積をもって略Ｕ字
状に伸長する二又部と、該二又部の一側から前記基板の
長手方向に伸びる引出し部とから構成し、他方の電極
は、前記二又部間に位置し前記引出し部とは逆向きに前
記基板の長手方向に伸びる構成としてなる特許請求の範
囲（１）項記載の炭化水素系ガス検出器。2. One of the plus side electrode and the minus side electrode has a forked portion extending in a substantially U shape with a large area on one side surface of the substrate, and the substrate from one side of the forked portion. A lead portion extending in the longitudinal direction of the substrate, the other electrode being located between the forked portions and extending in the longitudinal direction of the substrate in the opposite direction to the lead portion. The hydrocarbon gas detector according to the item.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2186889A JPH0792445B2 (en) | 1990-07-13 | 1990-07-13 | Hydrocarbon gas detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2186889A JPH0792445B2 (en) | 1990-07-13 | 1990-07-13 | Hydrocarbon gas detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0474954A JPH0474954A (en) | 1992-03-10 |
| JPH0792445B2 true JPH0792445B2 (en) | 1995-10-09 |
Family
ID=16196463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2186889A Expired - Lifetime JPH0792445B2 (en) | 1990-07-13 | 1990-07-13 | Hydrocarbon gas detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0792445B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114839231B (en) * | 2022-04-27 | 2022-12-16 | 河南森斯科传感技术有限公司 | Anti-interference gas-sensitive coating for semiconductor combustible gas sensor and preparation method and application thereof |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5625977A (en) * | 1979-08-06 | 1981-03-12 | Shiseido Co Ltd | Washing method for metal processed body such as metal can or the like |
| JPS5923384A (en) * | 1982-07-30 | 1984-02-06 | 株式会社東芝 | Display |
-
1990
- 1990-07-13 JP JP2186889A patent/JPH0792445B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0474954A (en) | 1992-03-10 |
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