JPH0792441B2 - Pass / fail judgment method - Google Patents

Pass / fail judgment method

Info

Publication number
JPH0792441B2
JPH0792441B2 JP4290393A JP29039392A JPH0792441B2 JP H0792441 B2 JPH0792441 B2 JP H0792441B2 JP 4290393 A JP4290393 A JP 4290393A JP 29039392 A JP29039392 A JP 29039392A JP H0792441 B2 JPH0792441 B2 JP H0792441B2
Authority
JP
Japan
Prior art keywords
histogram
feature amount
inspection
amount change
pass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP4290393A
Other languages
Japanese (ja)
Other versions
JPH06201606A (en
Inventor
篤 柏谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP4290393A priority Critical patent/JPH0792441B2/en
Publication of JPH06201606A publication Critical patent/JPH06201606A/en
Publication of JPH0792441B2 publication Critical patent/JPH0792441B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、濃淡画像による外観検
査のような良否判定しきい値決定が困難な検査における
良否判定方式に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pass / fail judgment method in an inspection in which it is difficult to determine a pass / fail threshold such as an appearance inspection using a grayscale image.

【0002】[0002]

【従来の技術】プリント基板の欠陥検査や部品の位置ず
れ検査等の従来の主な検査では、良品と不良品との特徴
差が顕著であり、検査部の2値画像特徴量による良否判
定が可能であった。そのため、従来の良否判定方式で
は、良否判定のための特徴量しきい値(画像の2値化の
ためのしきい値ではない)は固定型であった。例えば固
定しきい値の検査方法としては特開昭62−17768
1号公報がある。
2. Description of the Related Art In a conventional main inspection such as a defect inspection of a printed circuit board or a displacement inspection of a component, a characteristic difference between a non-defective product and a defective product is remarkable, and a pass / fail judgment is made by a binary image feature amount of an inspection unit. It was possible. Therefore, in the conventional quality determination method, the feature amount threshold value (not the threshold value for binarizing an image) for quality determination is fixed. For example, as a method for inspecting a fixed threshold value, Japanese Patent Laid-Open No. 62-17768.
There is publication No. 1.

【0003】[0003]

【発明が解決しようとする課題】しかし、表面実装ピン
グリッドアレイのはんだ付け検査や、ファイバースコー
プ等による狭小部の検査では、濃淡画像や劣悪な画像を
処理し、良否判定する必要がある。したがって、従来の
良否判定方式のような固定型しきい値では、最適な良否
判定が不可能であった。
However, in the soldering inspection of the surface mount pin grid array and the inspection of the narrow portion by the fiberscope or the like, it is necessary to process the grayscale image and the poor image and judge the quality. Therefore, it is impossible to perform the optimum quality determination with the fixed threshold value as in the conventional quality determination method.

【0004】また、はんだ付け等のそれぞれ微妙に形状
の違う検査物や、検査対象物との相対距離・姿勢を精密
に位置決めできないファイバースコープ等による検査で
は、固定型しきい値による良否判定は不可能であった。
Further, in the inspection by an inspection object having a slightly different shape such as soldering, or a fiberscope in which the relative distance and posture with respect to the inspection object cannot be precisely positioned, the quality judgment based on the fixed threshold value is not possible. It was possible.

【0005】本発明の目的は検査対象の特徴量のデータ
集団の分布のばらつきに応じて、正確な良否判定のでき
る方式を提供することにある。特に、従来の方式では正
確な判定のできなかった分布のばらつきの大きい場合で
も安定に良否判定できる方式を提供する。
An object of the present invention is to provide a method capable of making an accurate pass / fail judgment according to the variation in the distribution of the data group of the feature quantity to be inspected. In particular, the present invention provides a method capable of making a stable pass / fail determination even when there is a large variation in distribution, which cannot be accurately determined by the conventional method.

【0006】[0006]

【課題を解決するための手段】本発明は、濃淡画像によ
る外観検査等の良否判定しきい値決定が困難な検査にお
ける良否判定方式であって、N個の検査対象物を検査
し、検査部の画像等から抽出された特徴量を配列データ
として取り込むための特徴量入力手段と、前記特徴量入
力手段で取り込まれた特徴量のサンプル番号に関する変
化量を算出するための特徴量変化算出手段と、前記特徴
量変化算出手段によって算出された特徴量変化のヒスト
グラムを生成するための特徴量変化ヒストグラム生成手
段と、前記特徴量変化ヒストグラム生成手段によって生
成されたヒストグラムの半値幅を算出するためのヒスト
グラム半値幅算出手段と、前記ヒストグラム判値幅算出
手段によって算出された半値幅を元に良否判定を行うた
めの良否判定手段とを備えることを特徴とする良否判定
方式である。
SUMMARY OF THE INVENTION The present invention is a pass / fail judgment method in an inspection in which it is difficult to determine a pass / fail threshold such as a visual inspection using a grayscale image. Feature quantity input means for taking in the feature quantity extracted from the image or the like as array data, and a feature quantity change calculating means for calculating the change quantity relating to the sample number of the feature quantity taken in by the feature quantity input means. A feature amount change histogram generating means for generating a feature amount change histogram calculated by the feature amount change calculating means, and a histogram for calculating a half width of the histogram generated by the feature amount change histogram generating means A half-value width calculation means, and a quality determination means for performing quality determination based on the half-value width calculated by the histogram threshold price width calculation means A quality determination method, characterized in that it comprises.

【0007】[0007]

【実施例】以下に本発明の一実施例を図面を用いて説明
する。
An embodiment of the present invention will be described below with reference to the drawings.

【0008】図1は、本発明の良否判定処理方式の一実
施例を示す構成図である。良否判定処理方式は、図1に
示すように、N個の検査対象物を検査し、検査部の画像
等から抽出された特徴量を配列データとして取り込むた
めの特徴量入力手段11と、特徴量入力手段11で取り
込まれた特徴量のサンプル番号に関する変化量を算出す
るための特徴量変化算出手段12と、特徴量変化算出手
段12によって算出された特徴量変化のヒストグラムを
生成するための特徴量変化ヒストグラム生成手段13
と、特徴量変化ヒストグラム生成手段13によって生成
されたヒストグラムの半値幅を算出するためのヒストグ
ラム半値幅算出手段14と、ヒストグラム半値幅算出手
段14によって算出された半値幅を元に良否判定を行う
ための良否判定手段15とを備える。
FIG. 1 is a block diagram showing an embodiment of a quality determination processing system of the present invention. As shown in FIG. 1, the quality determination processing method includes a feature quantity input means 11 for inspecting N inspection objects and taking in the feature quantity extracted from an image of an inspection unit or the like as array data. A feature amount change calculation unit 12 for calculating a change amount of the feature amount fetched by the input unit 11 and a feature amount for generating a histogram of the feature amount change calculated by the feature amount change calculation unit 12. Change histogram generation means 13
And a histogram half-value width calculating unit 14 for calculating the half-value width of the histogram generated by the feature amount change histogram generating unit 13, and a pass / fail judgment based on the half-value width calculated by the histogram half-value width calculating unit 14. And a pass / fail judgment means 15.

【0009】特徴量入力手段11は、N個の検査対象物
を検査し、検査部の画像等から抽出された特徴量f
(i)を配列データとして取り込む。ただし、iはサン
プル番号で、i=1,2,…,Nである。例えば、30
個の検査対象物を検査した場合、図2に示すような特徴
量f(i)が得られる。ここで、サンプル番号7の検査
対象物は不良品である。
The feature amount input means 11 inspects N inspection objects, and the feature amount f extracted from the image of the inspection unit or the like.
(I) is taken in as array data. However, i is a sample number and i = 1, 2, ..., N. For example, 30
When individual inspection objects are inspected, the characteristic amount f (i) as shown in FIG. 2 is obtained. Here, the inspection object of sample number 7 is a defective product.

【0010】特徴量変化算出手段12は、特徴量f
(i)を下記計算により処理し、サンプル番号に関する
徴量変化df(i)を算出する。 i=1の時 df(i)=f(i)−{f(i+1)+f(i+
2)}/2 i=2の時 df(i)=f(i)−{f(i−1)+f(i+1)
+f(i+2)}/3 3≦i≦N−2の時 df(i)=f(i)−{f(i−2)+f(i−1)
+f(i+1)+f(i+2)}/4 i=N−1の時 df(i)=f(i)−{f(i−2)+f(i−1)
+f(i+1)}/3 i=Nの時 df(i)=f(i)−{f(i−2)+f(i−
1)/2 図2に示したf(i)を、上記に従って算出したdf
(i)を図3に示す。特徴量変化率df(i)は、0を
中央値として分布する。
The characteristic amount change calculating means 12 is characterized by the characteristic amount f
(I) is processed by the following calculation and
Calculating feature quantity variation df a (i). When i = 1 df (i) = f (i)-{f (i + 1) + f (i +
2)} / 2 When i = 2 df (i) = f (i)-{f (i-1) + f (i + 1)
+ F (i + 2)} / 3 When 3≤i≤N-2 df (i) = f (i)-{f (i-2) + f (i-1)
+ F (i + 1) + f (i + 2)} / 4 When i = N-1 df (i) = f (i)-{f (i-2) + f (i-1)
+ F (i + 1)} / 3 When i = N df (i) = f (i)-{f (i-2) + f (i-
1) } / 2 df calculated according to the above from f (i) shown in FIG.
(I) is shown in FIG. The feature amount change rate df (i) is distributed with 0 as the median value.

【0011】特徴量変化ヒストグラム生成手段13は、
前記特徴量変化算出手段12によって算出された特徴量
変化df(i)を横軸に、その度数を縦軸に持つヒスト
グラムを生成する。図3に示す特徴量変化df(i)を
元に生成したヒストグラムを図4に示す。
The feature amount change histogram generating means 13 is
A histogram having the characteristic amount change df (i) calculated by the characteristic amount change calculating means 12 on the horizontal axis and the frequency on the vertical axis is generated. FIG. 4 shows a histogram generated based on the characteristic amount change df (i) shown in FIG.

【0012】ヒストグラム半値幅算出手段14は、最小
二乗法により、a1、a2を係数とするガウス関数 F(x)=a1・exp(−4・1n2・x2/a22) =a1・exp(−2.773・x2/a22) を、前記特徴量変化ヒストグラム生成手段13によって
生成されたヒストグラムに合わせる。その結果得られる
パラメータa2の値は、合わせたガウス関数の半値幅F
で、その大きさは、特徴量変化率df(i)のばらつき
の大きさを表す。図4に示すヒストグラムにガウス関数
をフィッテングした結果を図5に示す。
The histogram half-value width calculating means 14 uses the least squares method to form a Gaussian function having coefficients a1 and a2: F (x) = a1exp (-41n2x2 / a22) = a1exp (-2 .773 · x2 / a22) to the histogram generated by the feature amount change histogram generation means 13. The value of the parameter a2 obtained as a result is the half-value width F of the combined Gaussian function.
Then, the magnitude represents the magnitude of variation in the feature amount change rate df (i). The result of fitting the Gaussian function to the histogram shown in FIG. 4 is shown in FIG.

【0013】良否判定手段15では、前記ヒストグラム
半値幅算出手段14によって算出された半値幅Γを用い
た以下に示す良否判定方式によって良否判定する。
The quality determination means 15 determines quality by the quality determination method described below using the half width Γ calculated by the histogram half width calculation means 14.

【0014】|df(i)|≦aΓならば 第i番目のサンプルは良品 |df(i)|〉aΓならば 第i番目のサンプルは不良品 ただし、||は絶対値、αは正の実数値である。αは、
良品判定の厳しさを表すパラメータで、その値が大きい
ほど判定が甘く、小さいほど厳しくなる。図6に、α=
1の時の良否判定しきい値Γを点線で示した特徴量変化
df(i)のグラフを示す。7番目の不良品が正しく判
定されているのが分かる。
If | df (i) | ≦ aΓ, the i-th sample is a non-defective product. | Df (i) |> aΓ, the i-th sample is a defective product. However, || is an absolute value and α is a positive value. It is a real value. α is
This is a parameter that represents the severity of the non-defective item determination. The larger the value, the weaker the determination. In FIG. 6, α =
A graph of the characteristic amount change df (i) in which the pass / fail judgment threshold value Γ when 1 is shown by a dotted line is shown. It can be seen that the 7th defective product is correctly determined.

【0015】[0015]

【発明の効果】本発明によれば、検査対象の特徴量のデ
ータ集団の分布のばらつきに応じて良否判定のためのし
きい値を説明するので、従来の固定しきい値による良否
判定に比べ、分布のばらつきが大きい場合でも、正確な
良否判定ができる。
According to the present invention, the threshold value for the quality judgment is explained according to the variation of the distribution of the data population of the feature quantity to be inspected. Even if the variation in the distribution is large, it is possible to accurately determine the quality.

【0016】以上説明した通り、本発明によれば、濃淡
画像による外観検査のような良否判定しきい値決定が困
難な検査における良否判定を安定に行うことが可能とな
る。
As described above, according to the present invention, it is possible to stably carry out the quality judgment in an inspection in which it is difficult to determine a quality judgment threshold value such as an appearance inspection using a grayscale image.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例の構成図である。FIG. 1 is a configuration diagram of an embodiment of the present invention.

【図2】30個の検査対象物を検査した場合の特徴量f
(i)の例を示す図である。
FIG. 2 is a feature amount f when 30 inspection objects are inspected.
It is a figure which shows the example of (i).

【図3】特徴量変化算出手段によって図2に示した特徴
量f(i)を処理して算出した特徴量変化df(i)を
示す図である。
FIG. 3 is a diagram showing a characteristic amount change df (i) calculated by processing the characteristic amount f (i) shown in FIG. 2 by a characteristic amount change calculating means.

【図4】特徴量変化ヒストグラム生成手段によって図3
に示した特徴量変化df(i)を処理して生成した特徴
量変化ヒストグラムを示す図である。
FIG. 4 is a diagram illustrating a feature amount change histogram generation unit of FIG.
It is a figure which shows the feature-value change histogram produced | generated by processing the feature-value change df (i) shown in FIG.

【図5】ヒストグラム半値幅算出手段によって図4に示
した特徴量変化ヒストグラムにガウス関数をフィッテシ
ィングした結果を示す図である。
5 is a diagram showing a result of fitting a Gaussian function to the feature amount change histogram shown in FIG. 4 by a histogram half-value width calculating means.

【図6】ヒストグラム半値幅算出手段によって算出した
α=1の時のしきい値を点線で示した特徴量変化df
(i)を示す図である。
FIG. 6 is a characteristic amount change df indicated by a dotted line with a threshold value when α = 1 calculated by a histogram half-value width calculation means.
It is a figure which shows (i).

【符号の説明】[Explanation of symbols]

11 特徴量入力手段 12 特徴量変化算出手段 13 特徴量変化ヒストグラム生成手段 14 ヒストグラム半値幅算出手段 15 良否判定手段 11 Feature Amount Input Means 12 Feature Amount Change Calculation Means 13 Feature Amount Change Histogram Generation Means 14 Histogram Half Value Width Calculation Means 15 Good / Failure Judgment Means

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 G06T 7/00 ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Internal reference number FI technical display location G06T 7/00

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 濃淡画像による外観検査等の良否判定し
きい値決定が困難な検査における良否判定方式であっ
て、N個の検査対象物を検査し、検査部の画像等から抽
出された特徴量を配列データとして取り込むための特徴
量入力手段と、前記特徴量入力手段と、前記特徴量入力
手段で取り込まれた特徴量のサンプル番号に関する変化
量を算出するための特徴量変化算出手段と、前記特徴量
変化算出手段によって算出された特徴量変化のヒストグ
ラムを生成するための特徴量変化ヒストグラム生成手段
と、前記特徴量変化ヒストグラム生成手段によって生成
されたヒストグラムの半値幅を算出するためのヒストグ
ラム半値幅算出手段と、前記ヒストグラム半値幅算出手
段によって算出された半値幅を元に良否判定を行うため
の良否判定手段とを備えることを特徴とする良否判定方
式。
1. A pass / fail judgment method in an inspection in which it is difficult to determine a pass / fail threshold such as a visual inspection using a grayscale image, wherein N inspection objects are inspected and extracted from an image of an inspection portion or the like. A feature quantity input means for loading the quantity as array data, the feature quantity input means, and a feature quantity change calculation means for calculating a variation quantity related to the sample number of the feature quantity fetched by the feature quantity input means, A feature amount change histogram generation unit for generating a histogram of the feature amount change calculated by the feature amount change calculation unit, and a histogram half for calculating the half width of the histogram generated by the feature amount change histogram generation unit. A price range calculating means and a quality determining means for performing quality determination based on the half width calculated by the histogram half width calculating means. A pass / fail judgment method that is characterized by
JP4290393A 1992-10-28 1992-10-28 Pass / fail judgment method Expired - Fee Related JPH0792441B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4290393A JPH0792441B2 (en) 1992-10-28 1992-10-28 Pass / fail judgment method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4290393A JPH0792441B2 (en) 1992-10-28 1992-10-28 Pass / fail judgment method

Publications (2)

Publication Number Publication Date
JPH06201606A JPH06201606A (en) 1994-07-22
JPH0792441B2 true JPH0792441B2 (en) 1995-10-09

Family

ID=17755434

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4290393A Expired - Fee Related JPH0792441B2 (en) 1992-10-28 1992-10-28 Pass / fail judgment method

Country Status (1)

Country Link
JP (1) JPH0792441B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006078285A (en) * 2004-09-08 2006-03-23 Omron Corp Substrate-inspecting apparatus and parameter-setting method and parameter-setting apparatus of the same
JP4830501B2 (en) * 2005-02-21 2011-12-07 オムロン株式会社 Substrate inspection method and apparatus, and inspection logic setting method and apparatus thereof

Also Published As

Publication number Publication date
JPH06201606A (en) 1994-07-22

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