JPH078735B2 - Heat reflective coating glass - Google Patents
Heat reflective coating glassInfo
- Publication number
- JPH078735B2 JPH078735B2 JP24830485A JP24830485A JPH078735B2 JP H078735 B2 JPH078735 B2 JP H078735B2 JP 24830485 A JP24830485 A JP 24830485A JP 24830485 A JP24830485 A JP 24830485A JP H078735 B2 JPH078735 B2 JP H078735B2
- Authority
- JP
- Japan
- Prior art keywords
- glass
- coating
- molybdenum silicide
- heat
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000011521 glass Substances 0.000 title claims description 26
- 239000011248 coating agent Substances 0.000 title claims description 25
- 238000000576 coating method Methods 0.000 title claims description 25
- YXTPWUNVHCYOSP-UHFFFAOYSA-N bis($l^{2}-silanylidene)molybdenum Chemical compound [Si]=[Mo]=[Si] YXTPWUNVHCYOSP-UHFFFAOYSA-N 0.000 claims description 15
- 229910021344 molybdenum silicide Inorganic materials 0.000 claims description 15
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 239000010408 film Substances 0.000 description 12
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 230000007797 corrosion Effects 0.000 description 6
- 238000005260 corrosion Methods 0.000 description 6
- 238000002834 transmittance Methods 0.000 description 6
- 239000002253 acid Substances 0.000 description 5
- 239000003513 alkali Substances 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 4
- 235000011114 ammonium hydroxide Nutrition 0.000 description 4
- 239000011651 chromium Substances 0.000 description 4
- 229910052750 molybdenum Inorganic materials 0.000 description 4
- 239000011733 molybdenum Substances 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 239000005357 flat glass Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910016006 MoSi Inorganic materials 0.000 description 1
- -1 W or Cr Chemical compound 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 208000037998 chronic venous disease Diseases 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 239000013065 commercial product Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000004299 exfoliation Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Surface Treatment Of Glass (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明は住宅，ビルあるいは自動車用窓などに用いられ
る熱線反射硝子に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a heat ray reflective glass used in windows of houses, buildings, automobiles and the like.
［従来の技術］ 直射日光など熱線の入射防止あるいは外観上の美観をも
たせるため建築物あるいは車両の窓に熱線反射硝子が用
いられるようになった。従来の熱線反射硝子は通常の板
硝子に、主にスパッタリングにより金属クロム被膜を形
成し、熱線反射膜を被覆した熱線反射硝子が用いられて
いる。[Prior Art] Heat ray-reflecting glass has come to be used for windows of buildings or vehicles in order to prevent the incidence of heat rays such as direct sunlight or to give the appearance a beautiful appearance. As the conventional heat ray reflective glass, a heat ray reflective glass in which a metal chromium coating film is mainly formed by sputtering on a normal plate glass and the heat ray reflective film is coated is used.
［発明が解決しようとする問題点］ 熱線反射硝子が有すべき条件は、光の透過を遮断するも
のであるが窓内の明るさをある程度保つ必要があり、光
透過率は約30％程度確保する必要がある。このため、そ
の被膜は薄膜であることを要し、また、光を遮断する以
外に環境雰囲気に含まれる酸，アルカリに対する耐蝕
性，および硝子に付着した汚れを洗浄する際の清掃具に
よる被膜の剥離あるいはスリ傷の発生に対する抵抗力な
どが必要である。従来の金属被膜は、遮光性，耐蝕性に
ついては満足すべき特質を備えているが、清掃具の摩擦
により被覆の損傷を受け易いという欠点を有している。[Problems to be Solved by the Invention] The condition that heat ray reflective glass should have is that it blocks light transmission, but it is necessary to maintain the brightness in the window to some extent, and the light transmittance is about 30%. It is necessary to secure it. For this reason, the coating needs to be a thin film, and in addition to blocking light, it has corrosion resistance to acids and alkalis contained in the ambient atmosphere, and the coating of a coating with a cleaning tool for cleaning dirt adhering to glass. It is necessary to have resistance to peeling or scratches. The conventional metal coating has satisfactory properties with respect to light-shielding property and corrosion resistance, but has a drawback that the coating is easily damaged by the friction of the cleaning tool.
本発明の目的は上記実情に鑑み、被膜の耐損傷性を向上
した熱線反射硝子を提供することである。In view of the above situation, an object of the present invention is to provide a heat ray reflective glass with improved damage resistance of the coating.
［問題点を解決するための手段］ 本発明は、硝子と付着力の強い珪素を主成分とし、耐蝕
性に優れ高硬度で耐久損傷性にも優れるモリブデンシリ
サイドを熱線反射被膜として用いることを特徴とするも
のである。[Means for Solving Problems] The present invention is characterized by using molybdenum silicide, which is mainly composed of glass and silicon having a strong adhesive force, and which has excellent corrosion resistance, high hardness and durability damage, as a heat ray reflective coating. It is what
モリブデンシリサイドは、一般に普及している被覆製造
設備であるDCスパッタ装置でも放電可能な導電性ターゲ
ットである。Molybdenum silicide is a conductive target that can be discharged even by a DC sputtering device, which is a widely used coating manufacturing facility.
本発明におけるモリブデンシリサイドの組成は金属間化
合物として化学量論的な組成であるMoSi2.0で表わされ
る組成、すなわち重量％でSiが36.8％含有される組成を
中心とする組成であることが被膜の局所的バラツキを防
ぐ上から好ましい。硝子との密着性を保つためにSiは30
wt％以上が望ましく、一方、Siが40wt％を越えると化学
的な安定性が乏しくなるので、本発明におけるSiの含有
量は30〜40wt％の間とすることが望ましい。The composition of molybdenum silicide in the present invention is a composition represented by MoSi 2.0 which is a stoichiometric composition as an intermetallic compound, that is, a composition centered on a composition containing 36.8% of Si by weight%. It is preferable from the viewpoint of preventing local variations. Si is 30 to maintain adhesion with glass
The content of Si in the present invention is preferably in the range of 30 to 40 wt% because the chemical stability becomes poor when Si exceeds 40 wt%.
また、本発明において、上記被膜としてはモリブデンシ
以外の耐蝕金属のシリサイド、例えばW,Crなども利用で
き、被膜形成方法も他のPVDあるいはCVD処理方法による
こともできる。Further, in the present invention, a silicide of a corrosion-resistant metal other than molybdenum, such as W or Cr, can be used as the coating, and the coating can be formed by another PVD or CVD treatment method.
［実施例］ 以下実施例に基づいて本発明を詳細に説明する。[Examples] The present invention will be described in detail based on the following examples.
金属モリブデンおよび珪素を混合し、プラズマアーク溶
解炉により溶解した合金を粉砕し、その粉末をHIPによ
り成形し、次いで直径70mm,厚み3mmの円板に加工し、Cu
製バッキングプレートに接着して得られたスパッタリン
グターゲット５個をモリブデンシリサイド被膜の形成に
供した。得られた５個ターゲット試料の珪素含有量は、
重量比で、それぞれ26.5％,30.2％,37.0％,39.9％およ
び45.0％であった。被膜を付着せしめる硝子試料として
は、板厚が3mmの市販窓硝子を幅50mm,長さ50mmに切断し
たものを用いた。Metallic molybdenum and silicon are mixed, the alloy melted by a plasma arc melting furnace is crushed, the powder is shaped by HIP, and then processed into a disk with a diameter of 70 mm and a thickness of 3 mm, and Cu
Five sputtering targets obtained by adhering to a backing plate made of metal were used for forming a molybdenum silicide film. The silicon content of the obtained five target samples is
The weight ratios were 26.5%, 30.2%, 37.0%, 39.9% and 45.0%, respectively. As the glass sample to which the coating film was attached, a commercially available window glass with a plate thickness of 3 mm was cut into a width of 50 mm and a length of 50 mm.
また、比較に用いたクロム被膜の熱反射被覆硝子は厚み
3mmの市販品である。Also, the thickness of the chrome-coated heat-reflecting coating glass used for comparison was
It is a 3 mm commercial product.
上記のごとく準備したモリブデンシリサイドターゲット
を、２極DCスパッタ装置を用いて硝子基板上にスパッタ
しモリブデンシリサイド被膜を形成した。得られた被膜
の厚さはそれぞれ50,200,350Åであった。The molybdenum silicide target prepared as described above was sputtered on a glass substrate using a two-pole DC sputtering device to form a molybdenum silicide film. The thickness of the obtained coating was 50,200,350Å, respectively.
次に、これらの被覆硝子を希硫酸，希アンモニア水に常
温で３ケ月間浸漬し耐蝕性試験を行い、耐蝕性試験後の
試料を市販の硝子洗浄剤を用い市販の硝子洗浄用ワイパ
ーで洗浄して被膜の損傷を調査した。また、併せて日光
の透過率を測定した。Next, these coated glasses are immersed in dilute sulfuric acid and dilute aqueous ammonia for 3 months at room temperature to carry out a corrosion resistance test, and the samples after the corrosion resistance test are washed with a commercially available glass cleaning wiper using a commercially available glass cleaning agent. The damage of the coating was investigated. In addition, the transmittance of sunlight was also measured.
これらの結果を第１表〜第４表に示す。The results are shown in Tables 1 to 4.
希硫酸に３ケ月浸漬後のモリブデンシリサイド被膜損傷
試験結果を示す第１表、および希アンモニア水に３ケ月
浸漬後のモリブデンシリサイド被膜損傷試験結果を示す
第２表から明らかなように、珪素30wt％未満を含有する
モリブデンシリサイド被膜のものでは、酸，アルカリの
いずれの液体に浸漬後も、ワイパーの摩耗で被膜の剥離
を生ずる。これは、遊離のモリブデンを生じても、モリ
ブデンは希硫酸に対し抵抗力があるので、珪素不足によ
る硝子への付着力の不足と考えられる。珪素40wt％を越
えると、希アンモニア水で剥離が発生するが、これは過
剰遊離珪素がアルカリに弱いためと考えられる。したが
って、本発明における珪素含有量としては酸，アルカリ
のいずれに対しても抵抗力のある30〜40wt％が望まし
い。As is clear from Table 1 showing the damage test result of molybdenum silicide film after dipping in dilute sulfuric acid for 3 months and Table 2 showing the damage test result of molybdenum silicide film after dipping in dilute ammonia water for 3 months, In the case of a molybdenum silicide coating film containing less than 5%, the coating film peels off due to the wear of the wiper even after being dipped in either an acid or alkali liquid. This is considered to be due to lack of adhesion to glass due to lack of silicon, because molybdenum has resistance to dilute sulfuric acid even if free molybdenum is produced. When the content of silicon exceeds 40 wt%, exfoliation occurs in dilute aqueous ammonia, which is considered to be due to excess free silicon being weak against alkali. Therefore, the silicon content in the present invention is preferably 30 to 40 wt% which is resistant to both acid and alkali.
一方、希硫酸および希アンモニア水に３ケ月浸漬後のク
ロム被膜損傷試験結果と日光透過率を示す第３表から明
らかなように、Cr被膜のものは酸，アルカリいずれの場
合にもスリ傷を発生する。これは純金属の軟質性による
ものと考えられる。 On the other hand, as is clear from Table 3 showing the results of the chromium coating damage test after immersion in diluted sulfuric acid and diluted ammonia water for 3 months and the sunlight transmittance, the Cr coating has scratches in both acid and alkali. Occur. This is considered to be due to the softness of pure metal.
また、モリブデンシリサイド被膜硝子の日光透過率を示
す第４表より、モリブデンシリサイドの日光透過率を約
30％とするには膜厚50〜300Åが好ましいといえる。 In addition, from Table 4 showing the sunlight transmittance of molybdenum silicide coated glass, the sunlight transmittance of molybdenum silicide is approximately
It can be said that a film thickness of 50 to 300Å is preferable to achieve 30%.
［発明の効果］ 以上のごとく、モリブデンシリサイド薄膜を硝子の被膜
とすることにより酸，アルカリのいずれの浸蝕に対して
も抵抗力があり、硝子被膜の清掃時の損傷の起りにく
い、また適度な光透過率を有する従来のCr被膜による熱
線反射被膜硝子より優れたものを得ることができる。 [Effects of the Invention] As described above, by using a molybdenum silicide thin film as a glass film, it is resistant to erosion by both acid and alkali, and is less likely to be damaged during cleaning of the glass film. It is possible to obtain a heat-reflecting coating glass having a light transmittance which is superior to that of the conventional heat-reflecting coating glass.
Claims (3)
を硝子表面に被覆することを特徴とする熱線反射被覆硝
子。1. A heat-ray-reflecting coated glass comprising a glass surface coated with molybdenum silicide as a heat-ray reflecting coating.
グにより形成することを特徴とする特許請求の範囲第
（１）項記載の熱線反射被覆硝子。2. The heat ray reflective coating glass according to claim 1, wherein the molybdenum silicide film is formed by sputtering.
300Åであることを特徴とする特許請求の範囲第（１）
項記載の熱線反射被覆硝子。3. The molybdenum silicide coating has a thickness of 50 to 50.
Claim (1) characterized in that it is 300Å
The heat ray-reflecting coated glass according to the item.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24830485A JPH078735B2 (en) | 1985-11-06 | 1985-11-06 | Heat reflective coating glass |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24830485A JPH078735B2 (en) | 1985-11-06 | 1985-11-06 | Heat reflective coating glass |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62108751A JPS62108751A (en) | 1987-05-20 |
| JPH078735B2 true JPH078735B2 (en) | 1995-02-01 |
Family
ID=17176081
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24830485A Expired - Lifetime JPH078735B2 (en) | 1985-11-06 | 1985-11-06 | Heat reflective coating glass |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH078735B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4058822B2 (en) * | 1997-09-30 | 2008-03-12 | 住友金属鉱山株式会社 | Selective permeable membrane coating solution, selective permeable membrane and selective permeable multilayer membrane |
| DE102012106518A1 (en) * | 2012-07-18 | 2014-01-23 | H2 Solar Gmbh | Coating of substrates with silicides and their oxides |
-
1985
- 1985-11-06 JP JP24830485A patent/JPH078735B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62108751A (en) | 1987-05-20 |
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