JPH078515B2 - How to fasten ceramic and metal - Google Patents
How to fasten ceramic and metalInfo
- Publication number
- JPH078515B2 JPH078515B2 JP5910086A JP5910086A JPH078515B2 JP H078515 B2 JPH078515 B2 JP H078515B2 JP 5910086 A JP5910086 A JP 5910086A JP 5910086 A JP5910086 A JP 5910086A JP H078515 B2 JPH078515 B2 JP H078515B2
- Authority
- JP
- Japan
- Prior art keywords
- bolt
- metal
- ceramic
- plunger
- tip pressing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/46—Means for plasticising or homogenising the moulding material or forcing it into the mould
- B29C45/58—Details
- B29C45/586—Injection or transfer plungers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/02—Transfer moulding, i.e. transferring the required volume of moulding material by a plunger from a "shot" cavity into a mould cavity
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Injection Moulding Of Plastics Or The Like (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は例えば半導体の樹脂封着用トランスファー成形
機などに使用される金属製プランジャー本体と、セラミ
ック製先端加圧部とを締結する方法に関するものであ
る。Description: TECHNICAL FIELD The present invention relates to a method for fastening a metal plunger main body and a ceramic tip pressing portion used in, for example, a semiconductor resin sealing transfer molding machine. is there.
従来の技術 第２図はトランスファー成形機の使用状態を示す要部断
面図である。2. Description of the Related Art FIG. 2 is a sectional view of an essential part showing a usage state of a transfer molding machine.
第２図において、スリーブ１は上金型６と該上金型６を
加熱するための熱板５とに挿入され、前記スリーブ１の
外周に突設されたフランジ３によって位置決めして固定
されている。プランジャー２はスリーブ１内に摺動自在
に嵌入されており、スリーブ１内に装入されて溶融した
樹脂４を押出して下金型７側の樹脂流路８からキャビテ
ィ９に充填し、該キャビティ９内に予め挿入してあった
半導体の樹脂封着を行う。In FIG. 2, a sleeve 1 is inserted into an upper mold 6 and a heating plate 5 for heating the upper mold 6, and is positioned and fixed by a flange 3 projecting on the outer circumference of the sleeve 1. There is. The plunger 2 is slidably fitted in the sleeve 1, and the resin 4 which is loaded in the sleeve 1 and melted is extruded to fill the cavity 9 from the resin flow path 8 on the lower mold 7 side. The resin that has been previously inserted into the cavity 9 is sealed with resin.
一般に半導体の封着に使用される樹脂４には石英ガラス
粉末やアルミナ粉末などの無機フイラーが多量に添加さ
れているために、プランジャー２により樹脂４の押出し
作業を継続して行なうと、冷間金型鋼SKD−11を焼入
れ、焼戻しをし、さらにその表面に硬質クロムメッキを
施したプランジャーであっても、スリーブ１の内壁との
摺動面や底部が著しく摩耗する。もちろん、スリーブ１
の内壁も摩耗する。Generally, a large amount of an inorganic filler such as quartz glass powder or alumina powder is added to the resin 4 used for sealing the semiconductor, so that if the resin 2 is continuously extruded by the plunger 2, it will not cool. Even with a plunger in which the inter-die steel SKD-11 is hardened and tempered, and the surface of which is hard chrome plated, the sliding surface with the inner wall of the sleeve 1 and the bottom are significantly worn. Of course, sleeve 1
The inner wall of the wears too.
そして、スリーブやプランジャーが摩耗すると、成形時
にスリーブとプランジャーとの間隙から樹脂が洩れて十
分な加圧ができなかったり、空気の巻き込みを起こした
りして半導体封着部分にボイドが生成し、半導体製品の
不良に結びつく。When the sleeve or plunger wears, the resin may leak from the gap between the sleeve and the plunger during molding, and sufficient pressure may not be applied, or air may be trapped and voids may be generated in the semiconductor sealing part. , Leads to defective semiconductor products.
そこで、耐摩耗性に優れたサイアロンなどのセラミック
製プランジャーを用いることが考えられる。しかし、単
体のセラミック製プランジャーは高価であるばかりでな
く、成形機本体への取付に難点があるので、第１図の要
部断面図に示すように、スリーブの内壁と摺動する先端
加圧部10をサイアロンなどのセラミックで形成し、該先
端加圧部10にボルト11が挿通できる孔10aを設け、一方
プランジャー本体12は鍛鋼SCM440などの金属で形成し、
該プランジャー本体12にねじ孔を設け、前記先端加圧部
10の上端面10bとプランジャー本体12の下端面12aとを当
接させ、ボルト11をねじ込んで締結する接合型のプラン
ジャーが挙げられる。Therefore, it is conceivable to use a ceramic plunger such as sialon having excellent wear resistance. However, the single ceramic plunger is not only expensive, but also difficult to mount on the molding machine body. Therefore, as shown in the cross-sectional view of the main part of FIG. The pressure portion 10 is formed of ceramic such as sialon, the tip pressure portion 10 is provided with a hole 10a through which the bolt 11 can be inserted, while the plunger body 12 is formed of metal such as forged steel SCM440,
The plunger body 12 is provided with a screw hole, and the tip pressing portion is provided.
An example is a joining type plunger in which the upper end surface 10b of 10 and the lower end surface 12a of the plunger body 12 are brought into contact with each other and the bolt 11 is screwed in and fastened.
発明が解決しようとする問題点 上述のようなセラミック製先端加圧部10と金属製プラン
ジャー本体12をボルト11で締結した接合型のプランジャ
ーが高温下で使用される場合には、ボルト11と先端加圧
部10の熱膨脹係数の差によって、ボルトがゆるんでく
る。また、加圧後プランジャーを引抜くときには、引抜
力（矢印Ｆ）によってボルト11が伸びて接合部にすきま
ができてがたが生じる原因となる。これらによって締結
の機能を発揮しなくなり、先端加圧部10が破壊したりす
る。これを防止するために、先端加圧部10の上端面10b
かプランジャー本体12の下端面に接着剤を塗布する方法
を併用するとか、ボルト11の締付トルクを増加させる方
法が考えられるが、接着剤を併用すると、プランジャー
本体12から先端加圧部10を分解取外すことが難しく、ボ
ルト11の締付けトルクを増加させることは、人手作業の
場合、締付け結果のバラツキが大きいという問題点があ
る。Problems to be Solved by the Invention When a junction type plunger in which the ceramic tip pressing portion 10 and the metal plunger body 12 are fastened with the bolt 11 as described above is used under high temperature, the bolt 11 The bolt comes loose due to the difference in the coefficient of thermal expansion between the tip end pressurizing section 10. Further, when the plunger is pulled out after the pressurization, the pulling force (arrow F) causes the bolt 11 to expand, resulting in a clearance at the joint portion and rattling. Due to these, the fastening function is not exerted, and the tip pressing unit 10 is broken. In order to prevent this, the upper end surface 10b of the tip pressing unit 10
A method of applying adhesive to the lower end surface of the plunger main body 12 or a method of increasing the tightening torque of the bolt 11 may be considered. It is difficult to disassemble and remove 10, and increasing the tightening torque of the bolt 11 has a problem that in the case of manual work, there are large variations in the tightening result.
問題点を解決するための手段 上記問題点を解決するためになされた本発明の方法は、
セラミックと金属製ボルトとの熱膨脹係数の差により発
生する前記ボルトのゆるみ量と、使用時に発生する引抜
力による前記ボルトの伸び量との和で示される該ボルト
の総伸び量を、前記ボルトを所定温度に加熱することに
よって予め与えた後、セラミックと金属を金属製ボルト
によって締結する方法である。そして、例えば、前記セ
ラミックはトランスファー成形機用プランジャーの先端
加圧部であり、前記金属は先端加圧部と接合される金属
製プランジャー本体であり、両者を金属製ボルトで締結
する場合に用いる。Means for Solving Problems The method of the present invention made to solve the above problems is
The total amount of elongation of the bolt, which is represented by the sum of the amount of loosening of the bolt caused by the difference in coefficient of thermal expansion between the ceramic and the metal bolt and the amount of elongation of the bolt due to the pulling force generated during use, It is a method in which the ceramic and the metal are fastened to each other by heating them to a predetermined temperature and then fastened with metal bolts. Then, for example, the ceramic is a tip pressing portion of a plunger for a transfer molding machine, the metal is a metal plunger body joined to the tip pressing portion, and when both are fastened with a metal bolt. To use.
作用 セラミックと金属を金属製ボルトにより締結する場合、
金属製ボルトによる軸方向の適正な締結力を変動するこ
となく容易に安定して得ることができる。Action When fastening ceramic and metal with metal bolts,
An appropriate fastening force in the axial direction by the metal bolt can be easily and stably obtained without fluctuation.
実施例 以下、本発明の実施例を図面に基づいて説明する。Embodiment An embodiment of the present invention will be described below with reference to the drawings.
半導体の樹脂封着用トランスファー成形機に使用される
接合型のプランジャーの要部断面図である第１図につい
て、本発明を適用する。このプランジャーは、セラミッ
ク製の先端加圧部10と金属製プランジャー本体12がボル
ト11で締結されており、約200℃の温度で使用され、か
つ前記先端加圧部10に引抜力がかかる構造になってい
る。The present invention is applied to FIG. 1 which is a cross-sectional view of a main part of a joining type plunger used in a transfer molding machine for resin sealing of semiconductors. In this plunger, a ceramic tip pressing part 10 and a metal plunger body 12 are fastened with bolts 11, are used at a temperature of about 200 ° C., and a pulling force is applied to the tip pressing part 10. It is structured.
本発明は、使用時の温度において発生する先端加圧部10
とボルト11の熱膨脹の差およびその時に発生する引抜力
に相当するボルト11の伸び量を、ボルト11を加熱し、予
め与えておくものである。今、使用時の温度と室温との
温度差をΔＴ、先端加圧部10とボルト11の熱膨脹係数を
それぞれαｓ、αｍ、先端加圧部10に設けたボルト孔10
a部分の厚さをｌとすると、温度上昇によるボルト11の
ゆるみ量Δl1は Δl1＝ΔＴ・ｌ・（αｍ−αｓ） …（１） で示される。The present invention is directed to the tip pressing unit 10 that is generated at the temperature during use.
The amount of expansion of the bolt 11 corresponding to the difference in thermal expansion between the bolt 11 and the bolt 11 and the pulling force generated at that time is given by heating the bolt 11. Now, the temperature difference between the temperature in use and room temperature is ΔT, the thermal expansion coefficients of the tip pressing portion 10 and the bolt 11 are αs and αm, respectively, and the bolt hole 10 provided in the tip pressing portion 10
Assuming that the thickness of the portion a is l, the loosening amount Δl 1 of the bolt 11 due to the temperature rise is represented by Δl 1 = ΔT · l · (αm-αs) (1).
また、使用時におけるプランジャーの引抜力をＦとし、
ボルト11の断面積と弾性係数をそれぞれＡ、Ｅとする
と、引抜力Ｆによるボルト11の伸び量Δl2は F/A＝Ｅ・Δl2/l の関係があるので、 Δl2＝Ｆ・l/A・Ｅ ……（２） で示される。Also, the pulling force of the plunger during use is F,
Assuming that the cross-sectional area and elastic modulus of the bolt 11 are A and E, respectively, the expansion amount Δl 2 of the bolt 11 due to the pulling force F has a relationship of F / A = E ・ Δl 2 / l, so Δl 2 = F ・ l / A ・ E …… (2)
従ってボルトの総伸び量Δｌは Δｌ＝Δl1＋Δl2 ……（３） となる。Therefore, the total amount of elongation Δl of the bolt is Δl = Δl 1 + Δl 2 (3).
ボルト11を加熱する温度をTxとすると、 Δｌ＝Tx・ｌ・αｍ の関係があるので、 Tx＝Δl/l・αｍ となり、実際に加熱する温度即ち所定温度Ｔは、 Ｔ≧Tx＋室温（20℃） ……（４） として得られる。Assuming that the temperature for heating the bolt 11 is Tx, there is a relationship of Δl = Tx · l · αm, so Tx = Δl / l · αm, and the actual heating temperature, that is, the predetermined temperature T is T ≧ Tx + room temperature (20 ℃) …… (4)
従って、Tx以上の温度にボルト11を加熱してΔｌ以上の
伸び量を予め与えておけば、使用状態ではボルト11はゆ
るまないことになる。Therefore, if the bolt 11 is heated to a temperature of Tx or higher and an elongation amount of Δl or higher is given in advance, the bolt 11 will not loosen in use.
本実施例では、セラミック製先端加圧部10にサイアロン
を用い、金属製プランジャー本体12に鍛鋼SCM440を使用
した。またボルト11の材質はプランジャー本体12と同一
の鍛鋼SCM440を用いた。ボルト11は所定温度Ｔ＝300℃
に加熱してΔｌ＝0.036mmの伸び量を与えた状態で、先
端加圧部10の孔10aを挿通してボルト11の雄ねじ部をプ
ランジャー本体12の雌ねじ部に軽く結付けて螺合させ
た。In this example, sialon was used for the ceramic tip pressing portion 10, and forged steel SCM440 was used for the metal plunger body 12. The bolt 11 was made of the same forged steel SCM440 as the plunger body 12. Bolt 11 has a predetermined temperature T = 300 ℃
While heating at 0 ° C and giving an expansion amount of Δl = 0.036mm, insert the male screw part of the bolt 11 into the female screw part of the plunger body 12 by inserting it through the hole 10a of the tip pressure part 10 and screw it. It was
なお、このように設定した諸条件は次の通りである。The various conditions set in this way are as follows.
使用温度と室温の差 ΔＴ＝180℃ サイアロンの熱膨脹係数 αｓ＝3.0×10-6 ボルトの 〃 αｍ＝1.3×10-6 ボルトのサイアロン挿入部長さ ｌ＝10mm プランジャーの引抜力 Ｆ＝6000Kg ボルトの断面積 Ａ＝157mm2 ボルトの弾性係数 Ｅ＝2.1×104Kg/mm2 発明の効果 以上述べたように、本発明によればセラミックと金属を
金属製ボルトにより締結する場合、金属製ボルトによる
軸方向の適正な締結力を得ることができるので、例えば
トランスファー成形機用プランジャーに適用した場合、
使用時に金属製ボルトがゆるんで、セラミック製先端加
圧部が破壊するという事故を防止することができる。Difference between operating temperature and room temperature ΔT = 180 ℃ Thermal expansion coefficient of sialon αs = 3.0 × 10 -6 〃 αm = 1.3 × 10 -6 bolt sialon insertion length l = 10mm Plunger withdrawal force F = 6000Kg bolt Cross-sectional area A = 157 mm 2 Elastic coefficient of bolt E = 2.1 × 10 4 Kg / mm 2 Effect of the invention As described above, according to the present invention, when the ceramic and the metal are fastened with the metallic bolt, the metallic bolt is used. Since it is possible to obtain an appropriate fastening force in the axial direction, when applied to a plunger for a transfer molding machine, for example,
It is possible to prevent an accident in which the metal-made bolt is loosened during use and the ceramic tip pressing portion is broken.
また、金属製プランジャー本体へのセラミック製先端加
圧部の取付、取外しが容易にできる。Further, the ceramic tip pressing portion can be easily attached to and detached from the metal plunger body.
第１図はセラミック製先端加圧部と金属製プランジャー
本体を金属製ボルトにより締結したトランスファー成形
機用プランジャーの要部断面図、第２図はトランスファ
ー成形機の使用状態を示す要部断面図である。 10…セラミック製先端加圧部、11…金属製ボルト、12…
金属製プランジャー本体。FIG. 1 is a sectional view of a main part of a plunger for a transfer molding machine, in which a ceramic tip pressing portion and a metal plunger main body are fastened with a metal bolt, and FIG. It is a figure. 10 ... Ceramic tip pressure part, 11 ... Metal bolt, 12 ...
Metal plunger body.
Claims (2)
の差により発生する前記ボルトのゆるみ量と、使用時に
発生する引抜力による前記ボルトの伸び量との和で示さ
れる該ボルトの総伸び量を、前記ボルトを所定温度に加
熱することによって予め与えた後、セラミックと金属を
金属製ボルトにより締結することを特徴とするセラミッ
クと金属の締結方法。1. A total elongation amount of the bolt, which is represented by a sum of a loosening amount of the bolt caused by a difference in coefficient of thermal expansion between a ceramic bolt and a metal bolt and an extension amount of the bolt due to a pulling force generated during use. The method of fastening a ceramic and a metal is characterized in that the ceramic and the metal are fastened with a metallic bolt after the bolt is heated in advance to a predetermined temperature.
プランジャーの先端加圧部であり、前記金属は先端加圧
部に接合される金属製プランジャー本体である特許請求
の範囲第１項記載のセラミックと金属の締結方法。2. The ceramic according to claim 1, wherein the ceramic is a tip pressing portion of a plunger for a transfer molding machine, and the metal is a metal plunger body joined to the tip pressing portion. And metal fastening method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5910086A JPH078515B2 (en) | 1986-03-19 | 1986-03-19 | How to fasten ceramic and metal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5910086A JPH078515B2 (en) | 1986-03-19 | 1986-03-19 | How to fasten ceramic and metal |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62216711A JPS62216711A (en) | 1987-09-24 |
| JPH078515B2 true JPH078515B2 (en) | 1995-02-01 |
Family
ID=13103574
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5910086A Expired - Lifetime JPH078515B2 (en) | 1986-03-19 | 1986-03-19 | How to fasten ceramic and metal |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH078515B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007077513A1 (en) | 2006-01-04 | 2007-07-12 | Nanopowers S.A. | Artificial contractile tissue |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH049716U (en) * | 1990-05-16 | 1992-01-28 | ||
| US8312612B2 (en) | 2002-04-11 | 2012-11-20 | Blue Sky Vision Partners, Llc | Refurbished punch tip and method for manufacture and refurbishing |
| US7033156B2 (en) | 2002-04-11 | 2006-04-25 | Luka Gakovic | Ceramic center pin for compaction tooling and method for making same |
| JP5701195B2 (en) * | 2011-10-31 | 2015-04-15 | 京セラ株式会社 | Plunger |
-
1986
- 1986-03-19 JP JP5910086A patent/JPH078515B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007077513A1 (en) | 2006-01-04 | 2007-07-12 | Nanopowers S.A. | Artificial contractile tissue |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62216711A (en) | 1987-09-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |