JPH0782397A - Hydrophilic and lipophilic film and preparation thereof - Google Patents

Hydrophilic and lipophilic film and preparation thereof

Info

Publication number
JPH0782397A
JPH0782397A JP5231402A JP23140293A JPH0782397A JP H0782397 A JPH0782397 A JP H0782397A JP 5231402 A JP5231402 A JP 5231402A JP 23140293 A JP23140293 A JP 23140293A JP H0782397 A JPH0782397 A JP H0782397A
Authority
JP
Japan
Prior art keywords
film
inorganic hard
hydrophilic
lipophilic
hard film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5231402A
Other languages
Japanese (ja)
Other versions
JP3397215B2 (en
Inventor
Yusuke Takada
祐助 高田
Ichiro Nakayama
一郎 中山
Sanemori Soga
眞守 曽我
Kazufumi Ogawa
小川  一文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP23140293A priority Critical patent/JP3397215B2/en
Publication of JPH0782397A publication Critical patent/JPH0782397A/en
Application granted granted Critical
Publication of JP3397215B2 publication Critical patent/JP3397215B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Materials Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Composite Materials (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Laminated Bodies (AREA)
  • Materials Applied To Surfaces To Minimize Adherence Of Mist Or Water (AREA)

Abstract

PURPOSE:To obtain a hydrophilic and lipophilic film excellent in antifogging ability, etc., by forming an inorganic hard film on a plastic film, forming minute unevenness on the surface and forming a chemisorbing monomolecular film on the surface. CONSTITUTION:This film is prepared by forming an inorganic hard film 12 on a plastic film 11, forming minute unevenness 13 with appropriate roughness by etching the surface through plasma discharge in a gas containing C and F, and forming a chemisorbing monomolecular film 14 on the surface. Thus, there is provided a functional film that has a good transparency, excellent hydrophilic and lipophilic properties and a surface strength sufficient for practical use. When a molecule having methylene groups in the main chain and trichlorosilane groups at the ends is used as a chemisorbing agent by way of example, the -OH and silyl groups on the surface of the inorganic hard film are dehydrochlorinated and fixed by a covalent bond.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、機能性を高めたプラス
チックフィルム及びその製造方法に関するものである。
さらに詳しくは、車のリヤウインドウの内側やヘルメッ
トのシールの内側等に貼りつける防曇フィルムとして用
いる親水親油性フィルム及びその製造方法に関するもの
である。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plastic film having enhanced functionality and a method for producing the same.
More specifically, the present invention relates to a hydrophilic / lipophilic film used as an anti-fog film attached to the inside of a rear window of a vehicle, the inside of a seal of a helmet, or the like, and a method for producing the same.

【0002】[0002]

【従来の技術】親水親油性を持つためには、その表面張
力を水または油の表面張力よりも高くすることが必要に
なる。一般に親水性を持つフィルムとしては実用的には
水に対する接触角で20度程度以下が望ましい。従来の
親水親油性フィルムとしては、ポリエステルフィルムな
どの汎用フィルムの表面に親水性コーティング剤を塗装
することにより親水性を付与することが一般的に行なわ
れている。
2. Description of the Related Art In order to have hydrophilic lipophilicity, it is necessary to make its surface tension higher than that of water or oil. Generally, a hydrophilic film having a contact angle with water of about 20 degrees or less is practically desirable. As a conventional hydrophilic / lipophilic film, it is generally practiced to impart hydrophilicity by coating a hydrophilic coating agent on the surface of a general-purpose film such as a polyester film.

【0003】[0003]

【発明が解決しようとする課題】しかしながら従来の親
水親油性フィルムはコーティング膜と基体とは単にアン
カー効果のみで密着されているに過ぎないため、耐環境
性、表面強度(耐久性)の面で劣ってしまう。
However, in the conventional hydrophilic / lipophilic film, the coating film and the substrate are simply adhered to each other only by the anchor effect, so that in view of environment resistance and surface strength (durability). Inferior.

【0004】また、本発明者等は超親水親油状態を得る
方法として、フィルム表面の形態的効果とコーティング
膜が持つ材料的親水親油性効果とを組み合わせた親水親
油性フィルムも試作したがフィルム表面強度が実用的強
度を得るまでには至らなかった。
As a method for obtaining the superhydrophilic lipophilic state, the present inventors have also made a trial of a hydrophilic lipophilic film which combines the morphological effect of the film surface and the material hydrophilic lipophilic effect of the coating film. The surface strength did not reach the practical strength.

【0005】本発明は、前記従来の問題を解決するた
め、フィルムの透明性を維持し、超親水性を持ち、更
に、実用強度に耐える表面強度を併せ持った低コストな
親水親油性フィルムを提供することを目的とする。
In order to solve the above-mentioned conventional problems, the present invention provides a low-cost hydrophilic / lipophilic film which maintains transparency of the film, has superhydrophilicity, and has surface strength capable of withstanding practical strength. The purpose is to do.

【0006】[0006]

【課題を解決するための手段】上記の目的を達成するた
めに本発明は、プラスチックフィルムとプラスチックフ
ィルム上の少なくとも片面に微少な凹凸を形成した無機
硬質膜と無機硬質膜上の微小な凹凸上にシロキサン結合
を介して形成させたフッ素を含む化学吸着単分子膜とか
ら構成されている。
In order to achieve the above object, the present invention provides a plastic film, an inorganic hard film on which at least one surface of a plastic film is formed with minute unevenness, and a fine unevenness on the inorganic hard film. And a chemisorption monomolecular film containing fluorine formed through a siloxane bond.

【0007】また前記構成においては、無機硬質膜がシ
リコンを含む酸化物および/または、窒化物であること
が好ましい。また、前記構成においては、無機硬質膜の
膜厚が、0.02〜10μm であることが好ましい。
In the above structure, it is preferable that the inorganic hard film is an oxide and / or a nitride containing silicon. Further, in the above structure, the thickness of the inorganic hard film is preferably 0.02 to 10 μm.

【0008】また、前記構成においては、無機硬質膜の
凹凸の粗さは、0.01〜0.3μm であることが好ま
しい。更に、前記構成においては、プラスチック裏面に
粘着剤が塗布されていることが好ましい。
Further, in the above structure, the roughness of the unevenness of the inorganic hard film is preferably 0.01 to 0.3 μm. Further, in the above structure, it is preferable that the back surface of the plastic is coated with an adhesive.

【0009】次に本発明の第1番目の親水親油性フィル
ムの製造方法は、プラスチックフィルムの少なくとも片
面に無機硬質膜を形成する工程と、前記無機硬質膜の表
面をC及びFを含むガス中でプラズマ放電処理を行い、
微小な凹凸を形成する工程と、前記凹凸に形成した無機
硬質膜表面を少なくとも酸素を含むガスでプラズマ放電
処理を行い、凹凸表面を親水性にする工程と、凹凸に形
成された無機硬質膜を表面上に形成した前記プラスチッ
クフィルムを少なくとも2つのクロロシリル基を含む化
合物を非水系の溶媒に溶解した溶液に浸漬し、前記無機
硬質膜の凹凸表面に化学吸着単分子膜をシロキサン結合
を介して形成させる工程とからなるという構成を備えた
ものである。
Next, the first method for producing a hydrophilic / lipophilic film of the present invention comprises a step of forming an inorganic hard film on at least one side of a plastic film, and the surface of the inorganic hard film in a gas containing C and F. Plasma discharge treatment with
A step of forming fine irregularities, a step of subjecting the surface of the inorganic hard film formed on the irregularities to a plasma discharge treatment with a gas containing at least oxygen to make the surface of the irregularities hydrophilic, and the inorganic hard film formed on the irregularities. The plastic film formed on the surface is immersed in a solution in which a compound containing at least two chlorosilyl groups is dissolved in a non-aqueous solvent to form a chemisorption monomolecular film on the uneven surface of the inorganic hard film via a siloxane bond. And a step of performing

【0010】次に本発明の第2番目の親水親油性フィル
ムの製造方法は、プラスチックフィルムの少なくとも片
面に無機硬質膜を形成する工程と、前記無機硬質膜の表
面をC及びFを含むガス中でプラズマ放電処理を行い、
微小な凹凸を形成する工程と、前記凹凸に形成した無機
硬質膜表面を少なくとも酸素を含むガスでプラズマ放電
処理を行い、凹凸表面を親水性にする工程と、凹凸に形
成した無機硬質膜を表面上に形成した前記プラスチック
フィルムを少なくとも2つのクロロシリル基を含む化合
物、もしくは、前記化合物を溶剤で希釈した溶液をガス
状にし、そのガス状雰囲気中で気相により前記無機硬質
膜の凹凸表面に化学吸着膜をシロキサン結合を介して形
成させる工程とからなるという構成を備えたものであ
る。
Next, a second method for producing a hydrophilic / lipophilic film of the present invention comprises a step of forming an inorganic hard film on at least one side of a plastic film, and a step of forming the surface of the inorganic hard film in a gas containing C and F. Plasma discharge treatment with
A step of forming minute irregularities, a step of subjecting the surface of the inorganic hard film formed on the irregularities to a plasma discharge treatment with a gas containing at least oxygen to make the surface of the irregularities hydrophilic, and a surface of the inorganic hard film formed on the irregularities A compound containing at least two chlorosilyl groups or a solution obtained by diluting the compound with a solvent is made into a gas state in the plastic film formed above, and the uneven surface of the inorganic hard film is chemically formed by a gas phase in the gaseous atmosphere. And a step of forming an adsorption film through a siloxane bond.

【0011】[0011]

【作用】本発明の構成によれば、フィルム表面上を直接
微小な凹凸にあらすのではなく、フィルム上に無機硬質
膜を形成し、その表面を微小に凹凸にすることにより、
無機硬質膜がフィルム表面強度の弱さを補い、かつ、無
機硬質膜の微小な凹凸が優れた親水親油性効果を発揮さ
せることができる。また、微小な凹凸は0.01〜0.
3μmの粗さであるために、光透過性に優れており、フ
ィルムの透明性を妨げることもない。さらには、無機硬
質膜表面とフッ素を含む化学吸着膜とがシロキサン結合
を介して形成されているので、優れた親水親油性、耐候
性、表面強度を持った、透明性のある親水親油性フィル
ムとすることができる。
According to the structure of the present invention, an inorganic hard film is formed on the film, and the surface is made finely uneven, instead of directly making the surface of the film finely uneven.
The inorganic hard film can make up for the weakness of the film surface strength, and the fine irregularities of the inorganic hard film can exert an excellent hydrophilic and lipophilic effect. Further, the minute unevenness is 0.01 to 0.
Since it has a roughness of 3 μm, it has excellent light transmittance and does not interfere with the transparency of the film. Furthermore, since the surface of the inorganic hard film and the chemical adsorption film containing fluorine are formed through the siloxane bond, a transparent hydrophilic lipophilic film having excellent hydrophilic and lipophilic properties, weather resistance and surface strength. Can be

【0012】また、無機硬質膜の膜厚が、0.02〜1
0μmという本発明の好ましい構成によれば、膜の可視
光域での光透過性を妨げることもない。また、無機硬質
膜がシリコンを含む酸化膜、または、窒化膜である本発
明の好ましい構成によれば、微小な凹凸を比較的簡単に
形成することができる。
The inorganic hard film has a thickness of 0.02 to 1
According to the preferable constitution of the present invention of 0 μm, the light transmittance of the film in the visible light region is not hindered. Further, according to the preferable configuration of the present invention in which the inorganic hard film is an oxide film containing silicon or a nitride film, minute irregularities can be formed relatively easily.

【0013】さらに、フィルム裏面に粘着剤が塗布され
ているという本発明の好ましい構成によれば、粘着する
べき基材に簡単に張り付けることができる。次本発明の
第1〜2番目の製造方法によれば、前記本発明の親水親
油性フィルムを効率よく合理的に製造できる。
Further, according to the preferable constitution of the present invention in which the back surface of the film is coated with the adhesive, it can be easily attached to the substrate to be adhered. Next, according to the first to second production methods of the present invention, the hydrophilic lipophilic film of the present invention can be efficiently and rationally produced.

【0014】[0014]

【実施例】【Example】

(実施例1)以下、本発明の第1の実施例について図面
を参照しながら説明する。図1は本発明の親水親油性フ
ィルムの構成図である。図2は第1図の一部Bを分子レ
ベルまで拡大した図である。
(Embodiment 1) Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a constitutional view of the hydrophilic / lipophilic film of the present invention. FIG. 2 is an enlarged view of part B of FIG. 1 to the molecular level.

【0015】図1において、11は100μm厚みのポ
リエチレンテレフタレート(PET)フィルム、12は
PETフィルム11上に形成された厚さ2μm酸化シリ
コン膜、13は酸化シリコン12上に形成された微小な
凹凸、14は化学吸着単分子膜である。
In FIG. 1, 11 is a 100 μm-thick polyethylene terephthalate (PET) film, 12 is a 2 μm-thick silicon oxide film formed on the PET film 11, and 13 is minute unevenness formed on the silicon oxide 12. Reference numeral 14 is a chemisorption monomolecular film.

【0016】最初に、親水親油性フィルムの作製手順に
ついて述べる。まずPETフィルム11を真空容器内に
いれ、0.4Paに保持したアルゴンガス中で、RF放
電電力400WでSiO2 ターゲットをスパッタし、P
ETフィルム11上に2μm厚の酸化シリコン膜12を
形成した。
First, the procedure for producing the hydrophilic / lipophilic film will be described. First, the PET film 11 is placed in a vacuum container, and an SiO 2 target is sputtered with an RF discharge power of 400 W in an argon gas held at 0.4 Pa to obtain P
A 2 μm thick silicon oxide film 12 was formed on the ET film 11.

【0017】次に、酸化シリコン膜12表面をC及びF
を含むガスをPET11の表面にシャワー状に供給しな
がら、放電電力150Wのプラズマ放電を用いて酸化シ
リコン12上をエッチングし、微小な凹凸13を形成し
た。この時エッチング時間3分で微小な凹凸13の粗さ
は0.2μmであり、フィルムの透明性は失われなかっ
た。次に、微小な、凹凸13上の表面を活性(親水)化
させるため,5Paに保持した酸素を含むガス中で、R
F放電電力100Wで、5分のプラズマ処理を行った。
このようにして処理されたフィルムを容器から取り出
し、シクロヘキサンの溶媒で希釈した1×10-2Mol
/l濃度の両末端にクロロシラン基を含む化合物(化
1)の溶液中に10分浸漬した。
Next, the surface of the silicon oxide film 12 is subjected to C and F.
While supplying a gas containing the above to the surface of PET 11 in a shower shape, the silicon oxide 12 was etched using a plasma discharge with a discharge power of 150 W to form minute irregularities 13. At this time, the roughness of the fine irregularities 13 was 0.2 μm after the etching time was 3 minutes, and the transparency of the film was not lost. Next, in order to activate (hydrophilic) the surface of the minute unevenness 13, the surface of R
A plasma treatment was performed for 5 minutes with an F discharge power of 100 W.
The film thus treated was taken out of the container and diluted with a solvent of cyclohexane to obtain 1 × 10 -2 Mol.
It was immersed for 10 minutes in a solution of a compound (Chemical formula 1) containing chlorosilane groups at both ends at a concentration of 1 / l.

【0018】[0018]

【化1】 [Chemical 1]

【0019】すると、微小な凹凸13が形成されている
酸化シリコン膜12表面は酸素を含んだプラズマ処理に
よって親水化されているため、表面での(化2)の結合
が形成され、化合物(化1)による化学吸着単分子膜1
4が形成された(図2)。
Then, since the surface of the silicon oxide film 12 on which the minute irregularities 13 are formed is hydrophilized by the plasma treatment containing oxygen, the bond of (Chemical Formula 2) is formed on the surface, and the compound (Chemical Formula 2) is formed. Chemisorption monolayer 1)
4 was formed (Fig. 2).

【0020】[0020]

【化2】 [Chemical 2]

【0021】すなわち、化学吸着剤として例えば主鎖に
メチレン基、両末端にトリクロロシラン基を有する分子
を用いると、無機硬質膜表面の−OH基と一方の分子の
シリル基とが脱塩化水素反応し、共有結合によって固定
される。他方のシリル基は空気中の水分などによって加
水分解され、末端が水酸基となって親水性が発揮され
る。一方化学吸着分子の主鎖はメチレン基であるため、
親油性が発揮される。また、化学吸着膜はオングストロ
ームないしナノメーターレベルの厚さであるので、透明
性にも優れる。
That is, when, for example, a molecule having a methylene group in the main chain and a trichlorosilane group at both ends is used as the chemical adsorbent, the --OH group on the surface of the inorganic hard film and the silyl group of one molecule are dehydrochlorinated. And are fixed by covalent bonds. The other silyl group is hydrolyzed by moisture in the air, etc., and the terminal becomes a hydroxyl group to exhibit hydrophilicity. On the other hand, the main chain of chemisorption molecule is methylene group,
Lipophilicity is exhibited. Further, since the chemisorption film has a thickness of angstrom or nanometer level, it has excellent transparency.

【0022】このようにしてできた親水親油性フィルム
の親水性、親油性、透明性の評価を行うため、水・ヘキ
サデカンに対する接触角、透過率について測定した。比
較サンプルとして、親水性コーティング剤{”Siコー
トT2”(大八化学工業製シリコン系ハードコート
剤)}を塗布したPETフィルム、無処理のPETフィ
ルム、化学吸着膜のみを形成したPETフィルム、微小
凹凸が形成されたフィルム表面に化学吸着単分子膜を形
成させたPETフィルムにも同様に測定した。
In order to evaluate the hydrophilicity, lipophilicity and transparency of the hydrophilic / lipophilic film thus produced, the contact angle to water / hexadecane and the transmittance were measured. As a comparative sample, a PET film coated with a hydrophilic coating agent {"Si Coat T2" (a silicon-based hard coating agent manufactured by Daihachi Chemical Industry Co., Ltd.)}, an untreated PET film, a PET film on which only a chemical adsorption film is formed, and a minute film The same measurement was performed on a PET film having a chemisorption monomolecular film formed on the surface of the film having irregularities.

【0023】測定結果を(表1)に示す。The measurement results are shown in (Table 1).

【0024】[0024]

【表1】 [Table 1]

【0025】この(表1)から明らかなように、本実施
例1により作製した親水親油性フィルムは親水性、透明
性、表面強度の面で優れた機能性フィルムであることが
わかった。
As is clear from this (Table 1), it was found that the hydrophilic / lipophilic film produced in Example 1 was a functional film excellent in hydrophilicity, transparency and surface strength.

【0026】また、本実施例1で作製した親水親油性フ
ィルムと、比較例の親水性コーティング剤を塗布したP
ETフィルムを室温(25℃)放置、高湿度雰囲気中
(40℃、95%)放置、大気暴露などの各環境試験に
かけると、本実施例品は1000時間までは親水親油性
が損なわれず、耐環境性についても十分満足行くもので
あったが、比較例品は高湿度雰囲気中放置試験、大気暴
露試験で500時間までに特性劣化があった。
Further, the hydrophilic / lipophilic film prepared in this Example 1 and P coated with the hydrophilic coating agent of Comparative Example were applied.
When the ET film is left at room temperature (25 ° C.), in a high humidity atmosphere (40 ° C., 95%), and subjected to various environmental tests such as atmospheric exposure, the product of this example does not lose its hydrophilic and lipophilic properties up to 1000 hours. Although the environmental resistance was also sufficiently satisfactory, the comparative example product deteriorated in characteristics in a high humidity atmosphere leaving test and an atmospheric exposure test by 500 hours.

【0027】(実施例2)親水親油性フィルムの作製手
順について図面を参照しながら説明する。図3は本発明
の親水親油性フィルムを作製するための化学吸着膜形成
装置の外略図である。図3において、21は酸化シリコ
ン膜が形成されたPETフィルム、25は真空容器、2
6は密閉容器、27は密閉容器26に入っている両末端
がクロロシラン基からなる化合物(化1)、28は密閉
容器のコックである。
Example 2 A procedure for producing a hydrophilic / lipophilic film will be described with reference to the drawings. FIG. 3 is a schematic view of a chemical adsorption film forming apparatus for producing the hydrophilic / lipophilic film of the present invention. In FIG. 3, 21 is a PET film on which a silicon oxide film is formed, 25 is a vacuum container, 2
Reference numeral 6 is a closed container, 27 is a compound (Chemical Formula 1) in which both ends are contained in the closed container 26 (chemical formula 1), and 28 is a cock of the closed container.

【0028】実施例1と同様にPETフィルム21上に
2μm の酸化シリコン膜を成膜後、その酸化シリコン膜
表面に0.2μmの粗さの微小な凹凸を形成し、その表
面を酸素ガスを含んだプラズマ放電処理で活性(親水)
化する。次に、真空容器25内を1×10-3Paになる
まで排気する。密閉容器26のコック28を開き両末端
がクロロシランからなる化合物(化1)27の原液を気
化させる。
After depositing a 2 μm silicon oxide film on the PET film 21 in the same manner as in Example 1, minute irregularities having a roughness of 0.2 μm are formed on the surface of the silicon oxide film, and the surface is exposed to oxygen gas. Activated (hydrophilic) by included plasma discharge treatment
Turn into. Next, the inside of the vacuum container 25 is evacuated to 1 × 10 −3 Pa. The cock 28 of the closed container 26 is opened to vaporize the stock solution of the compound (Formula 1) 27 having chlorosilane at both ends.

【0029】すると、プラズマ処理を行った酸化シリコ
ン膜表面が親水化されているため、気化した化合物(化
1)と酸化シリコン膜表面とで(化2)の結合が形成さ
れ、化合物(化1)を含む化学吸着単分子膜が形成され
る。
Then, since the surface of the silicon oxide film subjected to the plasma treatment is hydrophilized, a bond of (chemical formula 2) is formed between the vaporized compound (chemical formula 1) and the surface of the silicon oxide film, and the compound (chemical formula 1) is formed. ) Containing a chemisorption monolayer.

【0030】このようにして得られた親水親油性フィル
ムを実施例1で作製した親水親油性フィルムと比較した
ところ、特性的には全く差がなかった。すなわち、実施
例1と同様に撥水性、透明性、表面強度、耐環境性の面
で優れた機能性フィルムであった。
The hydrophilic / lipophilic film thus obtained was compared with the hydrophilic / lipophilic film prepared in Example 1, and there was no difference in characteristics. That is, it was a functional film excellent in terms of water repellency, transparency, surface strength, and environment resistance as in Example 1.

【0031】また同時に、同じ真空容器で一括して膜形
成までもできるため、工程時間の短縮、低コスト化も実
現可能となる。 (実施例3)親水親油性フィルムの作製手順について説
明する。
At the same time, it is possible to collectively form a film in the same vacuum container, so that the process time can be shortened and the cost can be reduced. (Example 3) A procedure for producing a hydrophilic lipophilic film will be described.

【0032】図4は本発明の第3の実施例であるシロキ
サン単分子膜を形成した後の酸化シリコン表面を分子レ
ベルまで拡大した断面概念図である。図5は本発明の第
3の実施例であるフッ素を含んだ化学吸着単分子膜を形
成した後の酸化シリコン表面を分子レベルまで拡大した
断面概念図である。
FIG. 4 is a sectional conceptual view in which the surface of silicon oxide after forming the siloxane monomolecular film which is the third embodiment of the present invention is enlarged to the molecular level. FIG. 5 is a conceptual cross-sectional view in which the surface of silicon oxide after forming the chemisorption monomolecular film containing fluorine according to the third embodiment of the present invention is enlarged to the molecular level.

【0033】図4において、32はPETフィルム上に
形成された酸化シリコン膜、39はシロキサン単分子膜
である。図5において、34は化学吸着単分子膜であ
る。
In FIG. 4, 32 is a silicon oxide film formed on the PET film, and 39 is a siloxane monomolecular film. In FIG. 5, 34 is a chemisorption monomolecular film.

【0034】実施例1と同様に、PETフィルム上に2
μmの酸化シリコン膜32を成膜後、その酸化シリコン
膜32表面に0.2μmの粗さの微小な凹凸33を形成
し、その表面を酸素ガスを含んだプラズマ処理で活性
(親水)化する。次に、シクロヘキサンの溶媒で希釈し
た2×10-2Mol/l濃度のSiCl4 の溶液中に1
0分浸漬する。
As in Example 1, 2 on the PET film.
After forming the silicon oxide film 32 having a thickness of μm, minute irregularities 33 having a roughness of 0.2 μm are formed on the surface of the silicon oxide film 32, and the surface is activated (hydrophilic) by a plasma treatment containing oxygen gas. . Then, 1 in a solution of 2 × 10 -2 Mol / l concentration of SiCl 4 diluted with cyclohexane solvent.
Soak for 0 minutes.

【0035】すると、酸化シリコン膜32表面は酸素を
含んだプラズマ処理によって親水化されているため、表
面で脱塩酸反応が生じ、(化3)、(化4)、のように
分子が−SiO−結合を介して表面に固定される。
Then, since the surface of the silicon oxide film 32 is made hydrophilic by the plasma treatment containing oxygen, a dehydrochlorination reaction occurs on the surface, and the molecules are converted to --SiO 2 as in (Chemical Formula 3) and (Chemical Formula 4). -Fixed to the surface via a bond.

【0036】[0036]

【化3】 [Chemical 3]

【0037】[0037]

【化4】 [Chemical 4]

【0038】その後、非水系の溶媒、例えば、シクロヘ
キサンで洗浄して、さらに水で洗浄すると、フィルムと
反応していないSiCl4 分子は除去され、図4に示す
ように下記(化5)(化6)などのシロキサン単分子膜
39が化学結合した状態で得られる。
After that, when washed with a non-aqueous solvent such as cyclohexane and further washed with water, SiCl 4 molecules which have not reacted with the film are removed, and as shown in FIG. It is obtained in a state where the siloxane monomolecular film 39 such as 6) is chemically bonded.

【0039】[0039]

【化5】 [Chemical 5]

【0040】[0040]

【化6】 [Chemical 6]

【0041】次に、シクロヘキサンの溶媒で希釈した1
×10-2Mol/l濃度のクロロシラン基を含む化合物
(化1)の溶液中に10分浸漬する。すると、微小な凹
凸33が形成されている酸化シリコン膜表面32は、上
述の化学処理で多数の水酸基を含んでいるので、表面で
脱塩酸反応が生じ、(化2)の結合が生成され、化合物
(化2)による化学吸着単分子膜34が形成される(図
5)。
Next, 1 diluted with a solvent of cyclohexane
It is immersed for 10 minutes in a solution of a compound (Chemical Formula 1) containing a chlorosilane group at a concentration of × 10 -2 Mol / l. Then, since the silicon oxide film surface 32 on which the minute irregularities 33 are formed contains a large number of hydroxyl groups by the above-mentioned chemical treatment, a dehydrochlorination reaction occurs on the surface and a bond of (Chemical Formula 2) is generated, A chemisorption monomolecular film 34 is formed by the compound (Chemical Formula 2) (FIG. 5).

【0042】また、この膜は実施例1に比べて高密度に
形成できた。本実施例と実施例1で作製した親水親油性
フィルムを比較したところ、透明性、表面強度、耐環境
性は全く同じで、親水性については、実施例1の親水親
油性フィルムよりもさらに優れたものであった。
Further, this film could be formed with a higher density than in Example 1. When the hydrophilic and lipophilic films produced in this example and Example 1 were compared, the transparency, surface strength and environment resistance were exactly the same, and the hydrophilicity was even better than that of the hydrophilic and lipophilic film of Example 1. It was a thing.

【0043】なお実施例2において、密閉容器から気化
させる溶液を化合物(化1)の原液としたが、非水系の
溶媒、例えばシクロヘキサンなどで希釈した溶液であっ
ても何ら効果は変わらない。
In Example 2, the solution to be vaporized from the closed container was the stock solution of the compound (Chemical formula 1), but the effect does not change even if the solution is diluted with a non-aqueous solvent such as cyclohexane.

【0044】また実施例2で、クロロシラン系化合物の
分子量が大きくなる、すなわち、炭素の数が大きくなる
と蒸発しにくくなるが、原液を適度に加熱することで対
応できる。しかし、直鎖状の場合では炭素の数が25程
度までが好ましい。
In Example 2, when the molecular weight of the chlorosilane compound becomes large, that is, when the number of carbons becomes large, it becomes difficult to evaporate, but it can be dealt with by appropriately heating the stock solution. However, in the case of a straight chain, the number of carbon atoms is preferably up to about 25.

【0045】なお、実施例1、または、2、または、3
において、吸着させる化合物に化合物(化1)、SiC
4 を用いたが、他のクロロシラン基を含む化合物、例
えば、SiHCl3 、SiH2 Cl2 、Cl−(SiC
2 O)n −SiCl3 (nは整数)、Cl3 Si−
(CH2 n −SiCl3 (nは整数)など、またはそ
れらの混合物であっても同様の効果を得ることができ
る。
Incidentally, the embodiment 1 or 2, or 3,
In, the compound to be adsorbed is compound (Chemical formula 1), SiC
l 4 was used, but other chlorosilane group-containing compounds such as SiHCl 3 , SiH 2 Cl 2 , Cl- (SiC
l 2 O) n -SiCl 3 (n is an integer), Cl 3 Si-
(CH 2) n -SiCl 3 ( n is an integer) can obtain the same effect even like, or mixtures thereof.

【0046】また無機硬質膜の表面の粗さは、本実施例
品は0.2μmとしたが0.01μm以下になると十分
な親水性が得られなくなり、また、0.3μmを越える
と無機硬質膜の表面の機械的強度が極力弱くなるばかり
か、透明性も悪くなるため、好ましくは0.01〜0.
3μmである。
The surface roughness of the inorganic hard film was 0.2 μm in this example, but when it was 0.01 μm or less, sufficient hydrophilicity could not be obtained. The mechanical strength of the surface of the film is not only weakened as much as possible, but also the transparency is deteriorated.
It is 3 μm.

【0047】また、本実施例で、酸化シリコン膜の厚み
を2μmとしたが、0.02μmより薄くなると十分な
微小凹凸の形成ができなくなる。すなわち十分な親水親
油性が得られなくなり、10μmを越えるとフィルムの
持つ柔軟性が失われるばかりか、膜の付着力が極端に悪
くなるので、好ましくは0.02〜10μmである。
In the present embodiment, the thickness of the silicon oxide film is set to 2 μm, but if it is thinner than 0.02 μm, it becomes impossible to form sufficient minute irregularities. That is, sufficient hydrophilicity and lipophilicity cannot be obtained, and if the thickness exceeds 10 μm, not only the flexibility of the film is lost but also the adhesive force of the film is extremely deteriorated, so that the thickness is preferably 0.02 to 10 μm.

【0048】また、本実施例では、無機硬質膜として酸
化シリコン膜を使用したが、他の無機系の酸化物、窒化
物、硫化物などでも同様の効果が得られる。しかし、膜
表面の微小突起形成の容易さから、シリコンを含む酸化
膜、及び/または窒化膜であるのが好ましい。
In this embodiment, the silicon oxide film is used as the inorganic hard film, but other inorganic oxides, nitrides, sulfides and the like can also be used to obtain the same effect. However, an oxide film containing silicon and / or a nitride film is preferable from the viewpoint of easy formation of fine protrusions on the film surface.

【0049】さらに、無機硬質膜の作製方法は、スパッ
タに限定されるものではない。また、本実施例では、P
ETフィルムを使用したが、他のプラスチックフィル
ム、例えば、ポリイミド系フィルム、ポリアミド系フィ
ルム、ポリエチレンフィルム、ポリプロピレンフィル
ム、ポリカーボネートフィルム、3フッ化塩化エチレン
などでも同様の結果が得られることは言うまでもない。
Further, the method for producing the inorganic hard film is not limited to sputtering. Further, in this embodiment, P
Although the ET film was used, it goes without saying that similar results can be obtained with other plastic films such as polyimide film, polyamide film, polyethylene film, polypropylene film, polycarbonate film, and trifluorochloroethylene.

【0050】さらに、本発明のフィルム裏面に粘着剤を
つけておけば、光学特性にも影響せず、粘着するべき基
材に簡単に貼つけることができる。なお、粘着剤の表面
には剥離シートを存在させてもよい。
Further, if an adhesive is attached to the back surface of the film of the present invention, it can be easily attached to the substrate to be adhered without affecting the optical characteristics. A release sheet may be present on the surface of the pressure-sensitive adhesive.

【0051】[0051]

【発明の効果】以上のように本発明は、プラスチックフ
ィルムとそのフィルム上に微小な凹凸を形成した無機硬
質膜と微小な凹凸上にシロキサン結合を介して形成させ
た化学吸着単分子膜からなることにより、きわめて親水
親油効果の高い透明フィルムを得ることができる。ま
た、表面の化学吸着単分子膜が無機硬質膜と化学的に結
合しているため、剥離したり変質したりすることがな
く、耐久性、耐熱性、耐候性、耐摩耗性に優れた親水親
油性フィルムを提供でき、その実用的効果は大きい。
INDUSTRIAL APPLICABILITY As described above, the present invention comprises a plastic film, an inorganic hard film having fine irregularities formed on the film, and a chemisorption monomolecular film formed on the fine irregularities through a siloxane bond. As a result, a transparent film having a very high hydrophilic / lipophilic effect can be obtained. In addition, since the chemisorption monomolecular film on the surface is chemically bonded to the inorganic hard film, it does not peel off or deteriorate, and has excellent durability, heat resistance, weather resistance, and abrasion resistance. A lipophilic film can be provided and its practical effect is great.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例1における親水親油性フィルム
の構成図である。
FIG. 1 is a constitutional view of a hydrophilic / lipophilic film in Example 1 of the present invention.

【図2】本発明の実施例1における図1中のB部を分子
レベルまで拡大した断面図。
FIG. 2 is a cross-sectional view in which a portion B in FIG. 1 in Example 1 of the present invention is enlarged to a molecular level.

【図3】本発明の実施例2における親水親油性フィルム
を作製するための化学吸着膜形成装置の概略図。
FIG. 3 is a schematic view of a chemical adsorption film forming apparatus for producing a hydrophilic / lipophilic film in Example 2 of the present invention.

【図4】本発明の実施例3における親水親油性フィルム
表面を分子レベルまで拡大した断面図。
FIG. 4 is a cross-sectional view in which the surface of the hydrophilic / lipophilic film in Example 3 of the present invention is enlarged to the molecular level.

【図5】図4に示した親水親油性フィルム表面に化学吸
着単分子膜を形成した後の断面図。
5 is a cross-sectional view after forming a chemisorption monolayer on the surface of the hydrophilic / lipophilic film shown in FIG.

【符号の説明】[Explanation of symbols]

11 ポリエチレンテレフタレート(PET)フィルム 12 酸化シリコン膜 13 酸化シリコン膜上の微小な凹凸 14 化学吸着単分子膜 21 ポリエチレンテレフタレート(PET)フィルム 25 真空容器 26 密閉容器 27 クロロシラン基を含む化合物 28 密閉容器のコック 32 酸化シリコン膜 34 化学吸着単分子膜 39 シロキサン単分子膜 11 polyethylene terephthalate (PET) film 12 silicon oxide film 13 minute irregularities on a silicon oxide film 14 chemisorption monomolecular film 21 polyethylene terephthalate (PET) film 25 vacuum container 26 closed container 27 compound containing chlorosilane group 28 cock of closed container 32 silicon oxide film 34 chemisorption monomolecular film 39 siloxane monomolecular film

───────────────────────────────────────────────────── フロントページの続き (72)発明者 小川 一文 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kazufumi Ogawa 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd.

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】 プラスチックフィルムと前記プラスチッ
クフィルム上の少なくとも片面に微小な凹凸を形成した
無機硬質膜と前記無機硬質膜上の微小な凹凸上にシロキ
サン結合を介して形成させた化学吸着単分子膜とからな
る親水親油性フィルム。
1. A plastic film, an inorganic hard film having minute irregularities formed on at least one surface of the plastic film, and a chemisorption monomolecular film formed on the minute irregularities of the inorganic hard film through siloxane bonds. A hydrophilic and lipophilic film consisting of.
【請求項2】 無機硬質膜がシリコンを含む酸化膜及び
窒化膜から選ばれる少なくとも一つの膜である請求項1
に記載の親水親油性フィルム。
2. The inorganic hard film is at least one film selected from an oxide film containing silicon and a nitride film.
The hydrophilic / lipophilic film according to.
【請求項3】 無機硬質膜の膜厚が0.02〜10μm
の範囲である請求項1または2に記載の親水親油性フィ
ルム。
3. The inorganic hard film has a thickness of 0.02 to 10 μm.
The hydrophilic / lipophilic film according to claim 1 or 2, which is in the range.
【請求項4】 微小な凹凸の粗さが0.01〜0.3μ
mの範囲である請求項1記載の親水親油性フィルム。
4. The roughness of fine irregularities is 0.01 to 0.3 μm.
The hydrophilic / lipophilic film according to claim 1, which is in the range of m.
【請求項5】 プラスチックフィルム裏面に粘着剤が塗
布されている請求項1に記載の親水親油性フィルム。
5. The hydrophilic / lipophilic film according to claim 1, wherein an adhesive is applied to the back surface of the plastic film.
【請求項6】 プラスチックフィルムの少なくとも片面
に無機硬質膜を形成する工程と、前記無機硬質膜の表面
をC及びFを含むガス中でプラズマ放電処理を行い、微
小な凹凸を形成する工程と、前記凹凸に形成した無機硬
質膜表面を少なくとも酸素を含むガスでプラズマ放電処
理を行い、凹凸表面を親水性にする工程と、凹凸に形成
された無機硬質膜を表面上に形成した前記プラスチック
フィルムを少なくとも2つのクロロシリル基を含む化合
物を非水系の溶媒に溶解した溶液に浸漬し、前記無機硬
質膜の凹凸表面に化学吸着単分子膜をシロキサン結合を
介して形成させる工程とからなる親水親油性フィルムの
製造方法。
6. A step of forming an inorganic hard film on at least one surface of a plastic film, and a step of subjecting the surface of the inorganic hard film to plasma discharge treatment in a gas containing C and F to form minute irregularities, The inorganic hard film surface formed in the unevenness is subjected to plasma discharge treatment with a gas containing at least oxygen to make the uneven surface hydrophilic, and the plastic film formed on the surface of the inorganic hard film formed in the unevenness A step of immersing a compound containing at least two chlorosilyl groups in a non-aqueous solvent to form a chemisorption monomolecular film on the uneven surface of the inorganic hard film through a siloxane bond. Manufacturing method.
【請求項7】プラスチックフィルムの少なくとも片面に
無機硬質膜を形成する工程と、前記無機硬質膜の表面を
C及びFを含むガス中でプラズマ放電処理を行い、微小
な凹凸を形成する工程と、前記凹凸に形成した無機硬質
膜表面を少なくとも酸素を含むガスでプラズマ放電処理
を行い、凹凸表面を親水性にする工程と、凹凸に形成し
た無機硬質膜を表面上に形成した前記プラスチックフィ
ルムを少なくとも2つのクロロシリル基を含む化合物、
もしくは前記化合物を溶剤で希釈した溶液をガス状に
し、そのガス状雰囲気中で気相により前記無機硬質膜の
凹凸表面に化学吸着膜をシロキサン結合を介して形成さ
せる工程とからなる親水親油性フィルムの製造方法。
7. A step of forming an inorganic hard film on at least one surface of a plastic film, and a step of performing plasma discharge treatment on the surface of the inorganic hard film in a gas containing C and F to form minute irregularities, The inorganic hard film surface formed in the unevenness is subjected to plasma discharge treatment with a gas containing at least oxygen to make the uneven surface hydrophilic, and at least the plastic film formed on the surface of the inorganic hard film formed in the unevenness A compound containing two chlorosilyl groups,
Alternatively, a step of forming a solution of the compound diluted with a solvent into a gas, and forming a chemisorption film on the uneven surface of the inorganic hard film through a siloxane bond in a gas phase in a gas phase through a siloxane bond. Manufacturing method.
JP23140293A 1993-09-17 1993-09-17 Hydrophilic lipophilic film and method for producing the same Expired - Fee Related JP3397215B2 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11286047A (en) * 1998-01-30 1999-10-19 Creavis G Fuer Technol & Innov Mbh Structurized surface, its production, and its use

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04239633A (en) * 1991-01-23 1992-08-27 Matsushita Electric Ind Co Ltd Water and repelling film and manufacture thereof
JPH04288349A (en) * 1991-01-23 1992-10-13 Matsushita Electric Ind Co Ltd Water-repellent and oil-repellent film and its production
JPH05179026A (en) * 1991-04-30 1993-07-20 Matsushita Electric Ind Co Ltd Production of antistatic film

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04239633A (en) * 1991-01-23 1992-08-27 Matsushita Electric Ind Co Ltd Water and repelling film and manufacture thereof
JPH04288349A (en) * 1991-01-23 1992-10-13 Matsushita Electric Ind Co Ltd Water-repellent and oil-repellent film and its production
JPH05179026A (en) * 1991-04-30 1993-07-20 Matsushita Electric Ind Co Ltd Production of antistatic film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11286047A (en) * 1998-01-30 1999-10-19 Creavis G Fuer Technol & Innov Mbh Structurized surface, its production, and its use

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