JPH0774406A - Polarized fine particle-loaded electromagnetic strain material - Google Patents

Polarized fine particle-loaded electromagnetic strain material

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Publication number
JPH0774406A
JPH0774406A JP5022078A JP2207893A JPH0774406A JP H0774406 A JPH0774406 A JP H0774406A JP 5022078 A JP5022078 A JP 5022078A JP 2207893 A JP2207893 A JP 2207893A JP H0774406 A JPH0774406 A JP H0774406A
Authority
JP
Japan
Prior art keywords
fine particles
polarized
base material
material layer
fine particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5022078A
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Japanese (ja)
Other versions
JP3413498B2 (en
Inventor
Akihiro Fujimura
明宏 藤村
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Individual
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Individual
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Priority to JP02207893A priority Critical patent/JP3413498B2/en
Publication of JPH0774406A publication Critical patent/JPH0774406A/en
Application granted granted Critical
Publication of JP3413498B2 publication Critical patent/JP3413498B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PURPOSE:To acquire a polarized fine particle-loaded electromagnetic strain material which expands and contracts at high strain rate by dispersing a number of non- spherical fine particles polarized electrically or magnetically in an elastic substrate material such as plastic and rubber aligning a polarization direction in a fixed direction. CONSTITUTION:A soft base material layer 1 comprised of non-foaming soft urethane resin, etc., has a number of electric polarization fine particles 2 dispersed therein. The polarized fine particle 2 is a rotated ellipse body comprised of a ferrodielectric such as PZT and tilts about 45 deg. to right and left directions, and its left upper end is polarized to positive charge and its right lower end polarizes to negative charge. An electrode layer 3 having expansion and contraction property in right and left directions is attached to an upper surface of the base material layer 1 and a similar electrode layer 4 is attached to a lower surface thereof. When a positive voltage is applied to the electrode layer 3 and a negative voltage is applied to the electrode layer 4, each polarization fine particle 2 rotates about 45 deg.. Following the rotation, the base material layer 1 is affected by an elastic substance constituting the base material layer 1 fixing to a periphery of each fine particle and it expands right and left, thus reducing a thickness.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】 本発明は電場または磁場をか
ければ、高い歪み率で伸縮する電磁気歪み材料に関する
ものである。
TECHNICAL FIELD The present invention relates to an electromagnetic strain material which expands and contracts at a high strain rate when an electric field or a magnetic field is applied.

【0002】[0002]

【従来の技術】 従来、PZT・水晶・ポリ弗化ビニ
リデン・その他の電歪材料(圧電体)が知られている
が、電歪量はごく小さく、最大級のPZTでも0.1%
程度、伸縮するに過ぎず、大きな動きを得るためには、
伸縮方向の異なる2枚を張り合わせ、湾曲させなければ
ならない。従って、人工筋肉として、ロボット内に入れ
て用いる等の用途には適さない。
2. Description of the Related Art Conventionally, PZT, quartz, polyvinylidene fluoride, and other electrostrictive materials (piezoelectric materials) have been known, but the amount of electrostriction is very small, and even the largest PZT has 0.1%.
Only to expand and contract, to get a big movement,
Two sheets with different directions of expansion and contraction must be attached and curved. Therefore, it is not suitable for use as an artificial muscle such as being put in a robot.

【0003】ニッケル・その他の磁歪材料についても、
ほぼ同様である。
Regarding nickel and other magnetostrictive materials,
It is almost the same.

【0004】[0004]

【発明が解決しようとする課題】 本発明は、加えた
電場や磁場に対する歪率(伸縮率)が大きく、最大歪率
が10%を越える値にもし得る、電気歪み材料または磁
気歪み材料を得る。
The present invention provides an electrostrictive material or a magnetostrictive material which has a large strain rate (expansion / contraction rate) with respect to an applied electric field or magnetic field and can have a maximum strain rate of more than 10%. .

【0005】[0005]

【課題を解決するための手段】 楕円形・円柱形・円
盤形・その他の非球形をなし、電気的または磁気的に分
極した微粒子を、プラスチック・ゴム・その他の弾性基
材中に多数、一定方向に分極方向をそろえて分散させて
成る、分極微粒子入り電磁気歪み材料を造り、解決す
る。
[Means for Solving the Problems] A large number of electrically or magnetically polarized fine particles having an elliptical shape, a cylindrical shape, a disk shape, or other non-spherical shape, which are electrically or magnetically polarized, are fixed in a plastic, rubber, or other elastic base material. We will solve the problem by producing an electromagnetically strained material containing polarized fine particles, which is made by aligning and aligning the polarization direction.

【0006】[0006]

【実施例】 図1は本発明を実施した分極微粒子入り
軟質電歪(電気歪み)材料の一部の拡大縦断面図。図2
はその平面図である。1は厚さ(上下幅)0.1mm程
度の非発泡の軟質ウレタン樹脂・塩化ビニール樹脂・種
々のゴム等から成る軟質基材層。2はその中に多数分散
している電気的分極微粒子で、その長径は3μm、短径
は1μm程度の円柱形に近い楕円形(回転楕円体)を
し、PZT等の強誘電体から成り、左右方向に対して4
5°程度傾斜し、左上端が正電荷、右下端が負電荷に分
極しており、基材層1の見かけの容積中の数10%の容
積をしめている。3は基材層1の上面に取り付けた厚さ
1μm程度の左右方向に伸縮性のある電極層。4は基材
層1の下面に取り付けた3と同様の電極層である。
EXAMPLE FIG. 1 is an enlarged vertical sectional view of a part of a soft electrostrictive (electrostrictive) material containing polarized fine particles according to the present invention. Figure 2
Is a plan view thereof. Reference numeral 1 is a soft base material layer having a thickness (upper and lower width) of about 0.1 mm and made of non-foaming soft urethane resin, vinyl chloride resin, various rubbers and the like. 2 is a large number of electrically polarized fine particles dispersed therein, and has an elliptic shape (spheroid) close to a cylinder with a major axis of 3 μm and a minor axis of about 1 μm, and is made of a ferroelectric substance such as PZT, 4 for left and right
It is tilted about 5 °, the upper left end is polarized positively and the lower right end is negatively charged, and occupies several 10% of the apparent volume of the base material layer 1. Reference numeral 3 denotes an electrode layer attached to the upper surface of the base material layer 1 and having a thickness of about 1 μm and having elasticity in the left-right direction. 4 is an electrode layer similar to 3 attached to the lower surface of the base material layer 1.

【0007】5は電極層3または4中の金属部分で、ア
ルミニウム・銅・金・クローム・その他の金属から成る
ジグザグ線を多数平行に並べ、相互間を所々、橋をかけ
てつないだ一種の網形をしており、線の幅は1μm程度
である。6は炭素や金属の微粒子を含む導電性接着剤の
露出部である。次に、この動作について説明する。
Reference numeral 5 denotes a metal portion in the electrode layer 3 or 4, which is a kind of a plurality of zigzag lines made of aluminum, copper, gold, chrome, and other metals arranged in parallel and connected to each other by a bridge in places. It has a mesh shape and the line width is about 1 μm. Reference numeral 6 is an exposed portion of the conductive adhesive containing fine particles of carbon or metal. Next, this operation will be described.

【0008】電極層3に100V程度の正電圧、4に負
電圧を、図示しないリード線を通じてかけると、両電極
間に生ずる電場により、各分極微粒子2の左上端は電極
3から斥力を受け、電極4から引力を受けて下がり、右
下端は逆の力を受けて上がり、45°程度回転し、ほぼ
長軸が水平になる。この回転に伴い、各微粒子の周囲に
固着している基材層を構成する弾性物質に引きずられ、
基材層1の左右長は伸び、厚みは減少する。
When a positive voltage of about 100 V and a negative voltage of 4 are applied to the electrode layer 3 through a lead wire (not shown), the upper left end of each polarized fine particle 2 receives a repulsive force from the electrode 3 due to an electric field generated between both electrodes. It receives an attractive force from the electrode 4 and descends, and the lower right end receives an opposite force and rises, rotates about 45 °, and its major axis becomes horizontal. Along with this rotation, dragged by the elastic material that constitutes the base material layer fixed around each fine particle,
The left-right length of the base material layer 1 extends and the thickness decreases.

【0009】今、各微粒子2の見かけの左右幅を2μ
m、上下幅も2μmとし、それが水平になった場合、左
右幅は1.5倍になり、上下幅は0.5倍になり、基材
層1の左右長と厚みに大きな影響を及ぼし、10%以上
左右長は増し、厚みは減る。基材層1が左右に伸びれ
ば、電極層3と4も同様に伸びるが、電極3と4を構成
するジグザグ形の金属線5は左右に伸縮し得るので、断
裂する事はない。
Now, the apparent horizontal width of each fine particle 2 is 2 μm.
m, the vertical width is also 2 μm, and when it is horizontal, the horizontal width is 1.5 times and the vertical width is 0.5 times, greatly affecting the horizontal length and thickness of the base material layer 1. Left and right length increases and thickness decreases by 10% or more. If the base material layer 1 extends to the left and right, the electrode layers 3 and 4 also extend, but the zigzag-shaped metal wire 5 forming the electrodes 3 and 4 can expand and contract to the left and right, so that it does not break.

【0010】電極3と4の電位差を0にすれば、基材層
1の弾性により、各微粒子2は元の位置に復帰し、左右
長と厚みも復帰する。電極3と4にかける電圧を正負逆
転すれば、各微粒子2の左上端は電極3の負電荷に引か
れ、右下端は電極4の正電荷に引かれ、回転し、ほぼ垂
直に立ち、基材層1の左右長は減少し、厚みは増す。
When the potential difference between the electrodes 3 and 4 is set to 0, each fine particle 2 returns to its original position due to the elasticity of the base material layer 1, and the left-right length and thickness also return. If the voltage applied to the electrodes 3 and 4 is reversed, the upper left end of each particle 2 will be attracted by the negative charge of the electrode 3, and the lower right end will be attracted by the positive charge of the electrode 4, and will rotate and stand almost vertically. The lateral length of the material layer 1 decreases and the thickness increases.

【0011】電極3に正、4に負の電圧がかかった場
合、一定値以上の電位差になれば、各微粒子2は水平状
態より更に回転し、左右長はかえって減少し、厚みは増
してくる。逆の電圧をかけた場合、各微粒子2が、ほぼ
垂直に到った後、それ以上の電圧をかけても、基材層1
の左右長と厚みは変化しない(飽和)。
When positive and negative voltages are applied to the electrodes 3 and the potential difference exceeds a certain value, the fine particles 2 rotate further from the horizontal state, the left-right length decreases rather, and the thickness increases. . When a reverse voltage is applied, even if each fine particle 2 reaches almost vertical and then a higher voltage is applied, the base material layer 1
The horizontal length and thickness of the do not change (saturation).

【0012】図1に示すような構造を持つ厚さ0.1m
m、左右幅20cm、前後長数10mの電歪材料ベルト
に、左右幅40cm、厚さ0.01mm程度の丈夫な合
成繊維の布またはフィルムを、両端が10cmずつはみ
出すように重ね、ゴム糊で固めながら、巻き上げ、前後
幅5cm程度の半円筒形の人工筋肉にし、両端から突出
している布やフィルムをしぼって人工の腱にし、ロボッ
ト内の人工骨格につなぎ、電極3、4に加える電圧を制
御し、人工筋肉を適度に収縮させ、ロボットの腕を動か
すのに用いる等する。
With a structure as shown in FIG. 1, a thickness of 0.1 m
m, width 20 cm, length 10 cm, electrostrictive material belt 40 cm width, 0.01 mm thick synthetic fiber cloth or film overlaid so that both ends protrude by 10 cm, with rubber glue While hardening, roll up to make a semi-cylindrical artificial muscle with a width of about 5 cm, squeeze the cloth or film protruding from both ends to make an artificial tendon, connect it to the artificial skeleton in the robot, and apply a voltage to the electrodes 3, 4. It is used to control and contract the artificial muscles appropriately and move the robot arm.

【0013】なお、腱に相当する布等は中間部を16c
m程度省略し、左右幅12cm程度の物の縁のみ、圧電
材料ベルトに重ねるようにしてもよい。直径1mm程度
の金属心の周囲に、外径が3mm程度になるように巻き
付け、後に心を抜き取り、内空のある細い人工筋肉を造
り、これを多数束ね、外から触われば柔らかく感じられ
るようにしてもよい。
The cloth corresponding to the tendon has a middle portion 16c.
It is also possible to omit about m and overlap only the edge of an object having a width of about 12 cm on the piezoelectric material belt. Wrap around a metal core with a diameter of about 1 mm so that the outer diameter is about 3 mm, and then pull out the core to create a thin artificial muscle with an inner space, bundle a large number of these and feel it to feel soft from the outside You may

【0014】両端にのみ、腱となる糸を入れたゴムひ
も、ウレタンフォーム製のひも等を用い、その周囲に電
歪材料を巻き付け、しなやかな人工筋肉にしてもよい。
このウレタンフォームの心に水または粘性の高いシリコ
ーンオイル・その他を含ませ、漏れないように両端は塞
ぎ、手触りが生体の筋肉に近ずくようにしてもよい。
A flexible elastic muscle may be formed by using a rubber cord having a thread serving as a tendon only at both ends, a cord made of urethane foam, or the like, and wrapping an electrostrictive material around the cord.
Water or highly viscous silicone oil or the like may be contained in the core of the urethane foam, and both ends may be closed so as not to leak, so that the feel of the body may be close to the muscle of the living body.

【0015】基材層1の厚みを0.1mmより大きくし
たり、あるいは、小さくしてもよい。材質も、ポリエチ
レン、その他のプラスチック、発泡率の低いウレタン樹
脂、その他に代えてもよい。分極微粒子2の形を円柱
形、円盤形、その他の形に代えたり、サイズや材料、混
合率等を任意に選んだり、微粒子2の表面に、微粒子2
の材質とは異なる非分極性の材質から成る被膜をかぶ
せ、基材層の原料に混和させる際、微粒子同しが電気的
な引力でつながって均一な分散をさまたげる事が起こり
にくくなるようにする等してもよい。
The thickness of the base material layer 1 may be larger or smaller than 0.1 mm. The material may be replaced with polyethylene, other plastics, urethane resin having a low foaming rate, or the like. The shape of the polarized fine particles 2 may be changed to a cylindrical shape, a disk shape, or any other shape, and the size, material, mixing ratio, etc. may be arbitrarily selected.
When a coating made of a non-polarizable material different from that of the above is applied and mixed with the raw material of the base material layer, it becomes difficult for the fine particles to connect with each other by an electric attractive force and prevent uniform dispersion. You may do the same.

【0016】電極層3、4を基材層1に付けず、硬質金
属板で造った2枚の電極間に微粒子入りの基材層1を置
き、伸縮させてもよい。耐久磁石材料で磁気分極(磁
化)した微粒子2を造り、基材層1から離れた所に設け
た磁気コイルの通電を制御し、伸縮させてもよい。ある
いは、図3に示すような微小コイルを多数、基材層1上
にプリント配線し、それに通電して伸縮させてもよい。
Instead of attaching the electrode layers 3 and 4 to the base material layer 1, the base material layer 1 containing fine particles may be placed between two electrodes made of a hard metal plate to expand and contract. Fine particles 2 that are magnetically polarized (magnetized) with a durable magnet material may be formed, and the energization of a magnetic coil provided at a location apart from the base material layer 1 may be controlled to expand and contract. Alternatively, a large number of minute coils as shown in FIG. 3 may be printed on the base material layer 1 and energized to expand and contract.

【0017】図3は基材層1上にプリント配線した磁気
コイル7を示す平面図である。コイル7の描く円の直径
は層1の厚み程度とする。線の重なり部は絶縁体で隔絶
されている。コイルの総巻き数は非常に多く、かなり強
い磁場を造る事ができる。(一つのコイル内から下向き
の磁力線がでると、その周囲には上向きの磁力線が生ず
るので、後述の微粒子2の長軸が左右方向または上下方
向にそろった物を用いる事が望ましい。)もちろん、基
材層1から離れた部に設けた磁気コイルにより磁場を造
り、伸縮させてもよい。
FIG. 3 is a plan view showing the magnetic coil 7 printed on the base material layer 1. The diameter of the circle drawn by the coil 7 is about the thickness of the layer 1. The overlapping part of the wire is separated by an insulator. The total number of turns of the coil is very large, and it is possible to create a fairly strong magnetic field. (If a downward magnetic force line emerges from within one coil, an upward magnetic force line is generated around it, so it is desirable to use a fine particle 2 whose major axis described later is aligned in the left-right direction or the vertical direction.) Of course, A magnetic field may be created and expanded by a magnetic coil provided in a portion apart from the base material layer 1.

【0018】微粒子2の左上端がn極で、右下端がs極
の場合、磁場が上から下に向く時、微粒子は左回転し、
逆向きであれば、右回転し、基材層1の左右長は伸び、
あるいは、縮む。次に、網状の電極3の製法の例を記
す。まず、基材層1の表面に、炭素の微粒子を含む導電
性塗料を薄く塗り、電気メッキにより、その上に金属層
を1μm程度に形成させる。(蒸着やスパッタリングを
用いてもよい。)ついで、ホトレジストを塗り、マスク
をかけて露光し、ホトエッチングの手法で図2のような
形に仕上げる。
When the upper left end of the fine particles 2 is the n pole and the lower right end is the s pole, when the magnetic field is directed from the top to the bottom, the fine particles rotate to the left,
If it is in the opposite direction, it rotates to the right and the lateral length of the base material layer 1 extends,
Or shrink. Next, an example of a method of manufacturing the mesh electrode 3 will be described. First, a conductive coating material containing carbon fine particles is thinly applied to the surface of the base material layer 1 and a metal layer is formed thereon to a thickness of about 1 μm by electroplating. (Evaporation or sputtering may be used.) Then, a photoresist is applied, a mask is used for exposure, and a photo-etching technique is used to finish the shape as shown in FIG.

【0019】あるいは、薄いプラスチックフィルム上に
厚さ1μm程度の金属メッキ層を造り、ホトエッチング
で網状にし、基材層に導電性接着剤を塗り、その上に金
属面をかぶせて接着する。(プラスチックフィルムは残
してもよいし、溶剤で除去してもよい。)基材層1を作
動時の伸長方向に引き伸ばした状態で、金等の展性の優
れた金属をメッキしたり、導電性塗料を塗り、原長に復
帰させ、基材が引き伸ばされた場合でも、それらの層に
亀裂が生じないようにすれば、電極層を網状にしなくて
もよい。
Alternatively, a metal plating layer having a thickness of about 1 μm is formed on a thin plastic film, formed into a net by photoetching, a base material layer is coated with a conductive adhesive, and a metal surface is covered on the conductive adhesive for adhesion. (The plastic film may be left or may be removed with a solvent.) With the base material layer 1 stretched in the stretching direction during operation, a metal having excellent malleability such as gold is plated, or conductive Even if the base material is stretched by applying a conductive paint and the base material is stretched so that cracks do not occur in those layers, the electrode layer does not have to be reticulated.

【0020】網状電極を張り付ける際、基材層を引っ張
っておいてもよい。細い金属線や炭素繊維でメリヤス編
み、その他の布を造り、基材層を引っ張った状態で、そ
れらの布を張り付け、電極層に用いてもよい。磁気コイ
ル7を造る場合、ホトエッチングで、まず、C字形の金
属リングを多数造り、次に、線が重なる部分の上にホト
レジストを付け、ついで、残る金属線部をホトエッチン
グで形成させ、図3の状態にする。絶縁層を挟みなが
ら、数巻きのコイルを重ねてもよい。
When the reticulated electrode is attached, the base material layer may be pulled. You may use it for an electrode layer by making a knitting or other cloth with thin metal wires or carbon fibers and sticking those cloths with the base material layer stretched. When the magnetic coil 7 is manufactured, a large number of C-shaped metal rings are first formed by photoetching, then photoresist is attached on the portions where the lines overlap, and then the remaining metal line portions are formed by photoetching. Set to state 3. You may stack several turns of coil, sandwiching an insulating layer.

【0021】あるいは、絶縁材で被覆した金属細線で単
層のソレノイドコイルを造り、基材層1上に接着剤を塗
り、その上にソレノイドコイルを加圧しながら張り付
け、図3の状態にしてもよい。楕円形の微粒子2の長軸
方向をすべて水平方向にそろえた場合、電極3を正荷電
にすれば、微粒子2の左端が上がり、右端が下がり、基
材層1の左右長は縮み、厚みは増す。電極3を負荷電に
すれば、微粒子2の左端が下がり、右端は上がるが、伸
縮状態は前に同じである。従って、伸びる動作のない電
歪材料になる。
Alternatively, a single-layer solenoid coil is made of a fine metal wire coated with an insulating material, an adhesive is applied on the base material layer 1, and the solenoid coil is adhered onto the base layer 1 while applying pressure to the state shown in FIG. Good. When all the major axis directions of the elliptical fine particles 2 are aligned in the horizontal direction, if the electrode 3 is positively charged, the left end of the fine particles 2 goes up and the right end goes down, and the lateral length of the base material layer 1 shrinks and the thickness is Increase. When the electrode 3 is negatively charged, the left end of the particles 2 goes down and the right end goes up, but the expansion and contraction state is the same as before. Therefore, it becomes an electrostrictive material having no stretching action.

【0022】微粒子2をすべて上下方向にそろえた場
合、電極3が正または負荷電すれば、微粒子2はランダ
ムに回転し、基材層1の厚みは減り、左右長と前後長は
伸びる。それは厚みは増さず、面積が変化するのみの電
歪材料になる。(実際には微粒子の回転方向がそろう傾
向が生ずる。その性質は微粒子の分布密度、その他の条
件の影響を受けて定まる。)分極微粒子2が球形の場
合、電場により、周囲の基材を引きずって回転するが、
球体の上下・左右・前後等で相殺され、基材層1の伸縮
には、ほとんど影響しない。そこで、微粒子2は非球形
で、楕円形・円柱形・円盤形・立方形・その他の形にす
る。
When all the fine particles 2 are aligned in the vertical direction and the electrode 3 is positively or negatively charged, the fine particles 2 are randomly rotated, the thickness of the base material layer 1 is reduced, and the horizontal length and the front-back length are extended. It becomes an electrostrictive material that does not increase in thickness but only changes in area. (Actually, the rotation directions of the fine particles tend to be aligned. Their properties are determined by the distribution density of the fine particles and other conditions.) When the polarized fine particles 2 are spherical, the surrounding base material is dragged by the electric field. Rotates,
These are offset by the top, bottom, left, right, front and back of the sphere, and have almost no effect on the expansion and contraction of the base material layer 1. Therefore, the fine particles 2 are non-spherical, and have an elliptical shape, a cylindrical shape, a disk shape, a cubic shape, or any other shape.

【0023】分極方向は粒子の長径方向がよいが、短径
方向等でもさしつかえない。例えば、立方形の微粒子の
左右面が分極し、上下面を水平にそろえて並んでいる場
合、電場により左面が上がる方向に回転すれば、各粒子
の左上縁と、右下縁の距離は長いので、基材層1の厚み
は増す事になる。磁性の分極微粒子を用いた場合、アル
ミニウム合金等、低融点の金属溶融液中にキューリー温
度が高い磁気分極微粒子を分極させ、外部磁場を作用さ
せた状態で、冷却し、別方向の磁場を加えれば、微粒子
が回転し、基材金属の厚みや長さを変化させ得る物にな
る。
The direction of polarization is preferably in the major axis direction of the particles, but may be in the minor axis direction or the like. For example, when the left and right surfaces of cubic particles are polarized and the upper and lower surfaces are aligned horizontally, if the left surface is rotated by the electric field in a direction that raises the left surface, the distance between the upper left edge and the lower right edge of each particle is long. Therefore, the thickness of the base material layer 1 is increased. When magnetic polarized fine particles are used, magnetic polarized fine particles with a high Curie temperature are polarized in a low melting point metal melt such as an aluminum alloy, cooled with an external magnetic field applied, and a magnetic field in another direction is applied. For example, the fine particles rotate, and the thickness and length of the base metal can be changed.

【0024】基材層1中に大きさや形の異なる数種の微
粒子を分極方向をそろえて混入させてもよい。基材層1
の容積に対する分極微粒子2の総容積比は任意に選び得
るが、各微粒子が基材層中で適度に回転できなければな
らないので、あまり大きくしてはならない。
Several kinds of fine particles having different sizes and shapes may be mixed in the base material layer 1 with their polarization directions aligned. Base material layer 1
The total volume ratio of the polarized fine particles 2 with respect to the volume can be selected arbitrarily, but it should not be made too large because each fine particle must be able to rotate appropriately in the substrate layer.

【0025】次に図4に従い分極微粒子2の製造法の例
を説明する。図4は楕円形分極微粒子製造装置の縦断面
図で、8はヒーターを内蔵し、1000℃以上に加熱さ
れたセラミック製の円筒管。9はその下方の非加熱の円
筒形セラミック管。10、11は数万Vの直流電圧をか
けた電極である。管8の上方から粒度2μm程度の不定
形または球形のPZT・その他の強融電体の微粒子(粉
末)を落下させると、微粒子は管内の熱気で溶融し、各
粒子が表面張力で球形化し、管9内に入り、電極10、
11による電場で分極し、かつ、両極に引かれて楕円形
に変形して落下し、冷気により冷却し、楕円形で分極し
たまま、固化する。
Next, an example of a method for producing the polarized fine particles 2 will be described with reference to FIG. FIG. 4 is a vertical cross-sectional view of the elliptical polarized fine particle production apparatus, and 8 is a ceramic cylindrical tube having a built-in heater and heated to 1000 ° C. or higher. 9 is an unheated cylindrical ceramic tube below it. Reference numerals 10 and 11 are electrodes to which a DC voltage of tens of thousands of volts is applied. When an indefinite or spherical PZT fine particle (powder) of other strong melting material having a particle size of about 2 μm is dropped from above the tube 8, the fine particle is melted by the hot air in the tube, and each particle is spherical due to surface tension, Enter the tube 9 and the electrode 10,
It is polarized by the electric field due to 11, and is drawn by both poles to be deformed into an elliptical shape and falls, cooled by cold air, and solidified while being polarized in the elliptical shape.

【0026】電極10、11の代わりに、磁気コイルを
設け、磁石材料の微粒子を管8内に落として溶融し、表
面張力で球形化し、管9内の強磁場で楕円形化し、か
つ、磁気分極させ、楕円形の磁化微粒子を得てもよい。
強融電体や強磁性体の超微粒子を熱可塑性樹脂に混合
し、粉末化して直径2μm程度の微粒子にし、数100
℃の管8内を落下させ、樹脂を球形化し、管9内で分極
させ、冷却・固化してもよい。
A magnetic coil is provided in place of the electrodes 10 and 11, and fine particles of the magnet material are dropped into the tube 8 to be melted, and are made spherical by the surface tension, and are made elliptical by the strong magnetic field in the tube 9, and the magnetic It may be polarized to obtain elliptical magnetized fine particles.
Ultra-fine particles of strong-fusion electric material or ferromagnetic material are mixed with a thermoplastic resin and powdered into fine particles having a diameter of about 2 μm.
Alternatively, the resin may be dropped into the tube 8 at a temperature of ℃ to make it spherical, and the resin may be polarized in the tube 9 to be cooled and solidified.

【0027】この場合、熱硬化性樹脂の半重合体を用
い、同様の結果を得てもよい。これらの粒子を箱に入
れ、あるいは、油・水等の液体中に入れ、適度に加熱
し、電磁場をかけ、長時間保持し、分極を強化してもよ
い。図5は別の分極微粒子の製造装置の縦断面図であ
る。12はセラミック製の加熱シリンダー。13はシリ
ンダーに連なるノズル。14は金属製のピストン。1
5、16は金属製のローラー。17、18はカッターで
ある。
In this case, a similar result may be obtained by using a semi-polymer of thermosetting resin. These particles may be put in a box, or put in a liquid such as oil or water, heated appropriately, and subjected to an electromagnetic field to be held for a long time to strengthen the polarization. FIG. 5 is a vertical sectional view of another apparatus for producing polarized fine particles. 12 is a ceramic heating cylinder. 13 is a nozzle connected to the cylinder. 14 is a metal piston. 1
5 and 16 are metal rollers. 17 and 18 are cutters.

【0028】シリンダー12内にポリ弗化ビニリデン
(PVDF)・その他の延伸方向、または印加電場方向
に分極する高分子圧電材料を入れ、溶融し、ピストン1
4で押し、ノズル13から線状にして押し出し、高速回
転するローラー15、16間に挟んで延伸し、直径数μ
mの繊維にし、カッター17、18で挟んで円柱形また
は円盤形に切断する。(繊維の方向は気流等で整えれば
よい。)延伸による分極に加えて、ピストン14と、ロ
ーラー15、16に加える電圧による横方向の電場によ
り、繊維は長軸方向に分極し、断片も同方向の分極を持
つ。
Polyvinylidene fluoride (PVDF) and other polymer piezoelectric materials that are polarized in the direction of stretching or the direction of the applied electric field are placed in the cylinder 12 and melted, and the piston 1
4, extruded in a linear shape from the nozzle 13, sandwiched between the rollers 15 and 16 rotating at high speed, and stretched to have a diameter of several μ.
m fibers, sandwiched by cutters 17 and 18 and cut into a cylindrical shape or a disk shape. (The direction of the fibers may be adjusted by an airflow etc.) In addition to the polarization by stretching, the fibers are polarized in the long axis direction by the electric field in the lateral direction due to the voltage applied to the piston 14 and the rollers 15 and 16, and the fragments are also formed. Has polarization in the same direction.

【0029】シリンダー12内に強融電体や強磁性体の
超微粒子を含む熱可塑性樹脂を入れ、横方向の電場や磁
場をかけつつ延伸し、切断し、上記と同様の円盤や円柱
を得てもよい。(延伸の際、微粒子は長軸方向に姿勢を
変える傾向もある。)ノズル13中に細いノズルを入
れ、それから導電ゴムを押し出し、導電ゴムの周囲に微
粒子入りの基材層がかぶった物を造り、その外面に後に
導電塗料を塗るか、ノズルを三重にし、一挙に外面に導
電層のかぶった物を得てもよい。(長い物は人工筋繊維
として用いる等する。)中心のノズルから導電粒子や連
続コイル状金属線の入ったゴム、金属メッキした合成繊
維の糸等から成る心を押し出しつつ、時々その周囲に分
極微粒子入り基材層を押し出してかぶせ、生体の筋肉に
おける腱繊維に対応させ得る、心の露出部を切断し、外
面を適度に絶縁被覆し、一方のリード線にも用い、筋繊
維に対応する微粒子入り基材層の外面に導電性の柔軟な
接着剤を塗り、生体の種々の外形をなす筋肉の筋繊維の
走行をまねて多数接合し、複雑な形の人工筋肉を得ても
よい。(筋繊維対応部の長さも色々にする。)ノズル1
3の形を変え、四角柱や六角柱の物を造ってもよい。
A thermoplastic resin containing ultrafine particles of a strong fusion electric substance or a ferromagnetic substance is put in the cylinder 12, and stretched and cut while applying a transverse electric field or magnetic field to obtain a disk or a cylinder similar to the above. May be. (At the time of stretching, the fine particles also tend to change their postures in the long axis direction.) A thin nozzle is put in the nozzle 13, and then conductive rubber is extruded, so that the base material layer containing fine particles is covered around the conductive rubber. It is also possible to fabricate and then apply a conductive paint to the outer surface of the structure, or triple the nozzles to obtain a product having a conductive layer on the outer surface at once. (A long object is used as an artificial muscle fiber.) While pushing out a core made of rubber containing conductive particles, continuous coiled metal wire, metal-plated synthetic fiber thread, etc. from the center nozzle, sometimes polarize around it. It is possible to extrude the base material layer containing fine particles to cover the tendon fibers in the muscles of the living body, cut the exposed part of the heart, moderately insulate the outer surface, and also use it for one of the lead wires, corresponding to the muscle fibers A conductive flexible adhesive may be applied to the outer surface of the base material layer containing fine particles, and a large number of joints may be joined by imitating the running of muscle fibers of muscles having various outer shapes of the living body to obtain an artificial muscle having a complicated shape. (The length of the portion corresponding to the muscle fiber is also various.) Nozzle 1
You can change the shape of 3 and make a square or hexagonal prism.

【0030】なお、これらの製法で得た分極微粒子を本
発明以外の用途に用いてもよいし、その他の製法で得た
分極微粒子を本発明に用いてもよい。次に、図1、図2
等で説明した本発明の電歪材料の用い方の2・3の例を
追加する。図6は奇数積層板の上面図。図7は偶数積層
板の上面図。図8はそれらの積層体の正面図である。
The polarized fine particles obtained by these production methods may be used for purposes other than the present invention, and the polarized fine particles obtained by other production methods may be used in the present invention. Next, FIG. 1 and FIG.
A few examples of how to use the electrostrictive material of the present invention described in the above are added. FIG. 6 is a top view of the odd laminated plate. FIG. 7 is a top view of the even laminated plate. FIG. 8 is a front view of those laminated bodies.

【0031】19は図1、2に示すような厚さ0.1m
m程度の分極微粒子入り電歪材料。20はその上に塗布
した導電性接着剤で、その左前縁はやや突出している。
21は19と逆極性の電歪材料で、22はその上に付け
た導電性接着剤で、その右前縁はやや突出している。こ
のような接着剤付電歪材料19から成る奇数積層板の上
に、偶数積層板21を交互に多数重ねて一体化し、図8
のような積層体にする。各導電性接着剤の左前縁は上下
連なって電極23になり、22の右前縁は連なって電極
24になる。
Reference numeral 19 indicates a thickness of 0.1 m as shown in FIGS.
Electrostrictive material containing polarized fine particles of about m. Reference numeral 20 denotes a conductive adhesive applied on the surface of which a left front edge is slightly projected.
Reference numeral 21 is an electrostrictive material having a polarity opposite to that of 19, reference numeral 22 is a conductive adhesive applied thereon, and its right front edge is slightly projected. A large number of even-numbered laminated plates 21 are alternately stacked and integrated on the odd-numbered laminated plates made of such an electrostrictive material 19 with an adhesive, as shown in FIG.
It is made into a laminated body like. The left front edge of each conductive adhesive is vertically connected to form an electrode 23, and the right front edge of 22 is connected to form an electrode 24.

【0032】この電極23と24に電圧をかければ、伸
縮し、強い力を出す。図9の簡素化した正面図に示すよ
うに、横幅が2倍の電歪材料19と21を二つ折りにし
て重ね、導電性接着剤で接触面を接着し、一体化しても
よい。この場合、奇数層19の左縁(曲がり角)と、隅
数層21の右縁(曲がり角)とにリード線をつなぎ、両
層が共に同方向に伸縮するように極性を選ぶ。
When a voltage is applied to the electrodes 23 and 24, they expand and contract to generate a strong force. As shown in the simplified front view of FIG. 9, electrostrictive materials 19 and 21 each having a double lateral width may be folded and overlapped, and the contact surfaces may be bonded with a conductive adhesive to be integrated. In this case, lead wires are connected to the left edge (bent corner) of the odd layer 19 and the right edge (bent corner) of the corner layer 21 and the polarities are selected so that both layers expand and contract in the same direction.

【0033】なお、積層体を造る方法として、長く連続
した1枚の圧電材料膜を、導電性接着剤を両面に塗って
ジグザグに折り曲げ、接着し、一体化してもよい。図1
0は圧電式バルブの平面図。図11はその正面図であ
る。25は直径2mm程度の硬質ゴム製円柱。26はそ
の周囲にかぶさっている軟質ゴム管。27、28はそれ
らの前端の対向面をつないでいる架橋。29は図1、図
2に示す電歪材料膜を幅2mm程度に切り、絶縁性接着
剤を付けて、コイル状に重ね巻きした電歪材料コイル。
30、31はその電極に連なるリード線である。
As a method for producing a laminated body, one long continuous piezoelectric material film may be coated on both sides with a conductive adhesive, bent in a zigzag manner, adhered, and integrated. Figure 1
0 is a plan view of the piezoelectric valve. FIG. 11 is a front view thereof. 25 is a hard rubber cylinder having a diameter of about 2 mm. Numeral 26 is a soft rubber tube covering the surrounding area. 27 and 28 are bridges connecting the facing surfaces of their front ends. Reference numeral 29 is an electrostrictive material coil obtained by cutting the electrostrictive material film shown in FIGS. 1 and 2 into a width of about 2 mm, applying an insulating adhesive, and winding the film in a coil shape.
Reference numerals 30 and 31 are lead wires connected to the electrodes.

【0034】前端から軟質ゴム管26中に流体を流す
と、円柱25との間に流れるが、リド線30、31に通
電すると、コイル29は短縮し、ゴム管26の内面が円
柱25に接近し、流れる流体の流動抵抗が増す。加える
電圧を加減すれば、流量を適度に制御したり、流れを止
めてしまう事もできる。
When a fluid is flown from the front end into the soft rubber tube 26, it flows between it and the cylinder 25, but when the lid wires 30 and 31 are energized, the coil 29 is shortened and the inner surface of the rubber tube 26 approaches the cylinder 25. However, the flow resistance of the flowing fluid increases. By adjusting the applied voltage, the flow rate can be controlled appropriately or the flow can be stopped.

【0035】ゴム管26の外面に金属リングをはめ、円
柱25を圧電材料製にし、加える電圧で、その直径を伸
縮し、流量の制御を行なってもよい。図12はコンピュ
ーター用点字二次元ディスプレイの櫛形素子の一部の平
面図。図13はその正面図である。32は全左右長が3
00mm余り、前後幅が3mm、上下幅が30mm程度
の硬質プラスチック基板で、その前後面には櫛形の凹み
が付いている。33はその左端に開けた貫通孔(実際に
は右端にも同様の貫通孔がある。)34は櫛形電歪材料
板で、図6〜8に記すような積層板を櫛形にカットした
物で、その前後の厚みは1mm、櫛の歯の長さは10m
mで、歯数は合計100本左右に並び、下部は連なって
おり、その後面は各歯ごとにリード線を兼ねた導電性接
着剤層35、36、37等の上端を介し、基板32に固
着している。38は各歯の上端に、マッチの軸に取り付
けられた火薬のように、かぶさっている、接触感を強め
るためにガラス粉等を加えたプラスチックから成る触知
突起。39は圧電板34の下面に導電性接着剤で張り付
けた、各歯のアース電極に連なる金属電極板である。
A metal ring may be fitted on the outer surface of the rubber tube 26, the cylinder 25 may be made of a piezoelectric material, and its diameter may be expanded or contracted by the applied voltage to control the flow rate. FIG. 12 is a plan view of a part of a comb-shaped element of a braille two-dimensional display for a computer. FIG. 13 is a front view thereof. 32 has a total left and right length of 3
It is a hard plastic substrate having a length of about 00 mm, a front-back width of 3 mm, and a top-bottom width of about 30 mm. Reference numeral 33 denotes a through hole formed at the left end thereof (actually, there is a similar through hole at the right end as well.) 34 denotes a comb-shaped electrostrictive material plate, which is formed by cutting a laminated plate as shown in FIGS. , The thickness before and after that is 1 mm, and the length of the teeth of the comb is 10 m
m, the total number of teeth is 100 on the left and right, and the lower part is continuous, and the rear surface is connected to the substrate 32 through the upper ends of the conductive adhesive layers 35, 36, 37 etc. which also serve as lead wires for each tooth. It is stuck. Numeral 38 is a tactile projection made of plastic with glass powder or the like added to the upper end of each tooth like a gunpowder attached to the shaft of a match to enhance the feeling of contact. Reference numeral 39 is a metal electrode plate which is attached to the lower surface of the piezoelectric plate 34 with a conductive adhesive and is connected to the ground electrodes of the teeth.

【0036】このような素子を前後方向に100枚並べ
れば、縦×横に、100×100本の触知突起38が並
ぶコンピューター用点字ディスプレイとなる。それらは
左右の貫通孔33に通したネジで一体化され、各触知突
起の下方の歯に連なるリード線35〜37、その他のリ
ード線はコンピューターの出力回路に連なり、CRTデ
ィスプレイの1ドットまたは数ドットに1個の触知突起
が対応する。
By arranging 100 such elements in the front-rear direction, a braille display for a computer is formed in which 100 × 100 tactile protrusions 38 are arranged vertically and horizontally. They are integrated by screws that pass through the left and right through holes 33, lead wires 35 to 37 connected to the lower teeth of each tactile projection, and the other lead wires are connected to the output circuit of the computer, and one dot of the CRT display or One tactile protrusion corresponds to several dots.

【0037】各触知突起38に連なるリード線35〜3
7のいずれかに通電すれば、その上方の1本の歯が1m
m程度上に伸び、基板32上に0.7mm程度突出し、
点字の1点となり、点字で記した1頁を表示したり、図
形やテレビカメラで撮った風景等を表示したりする事が
できる。この触知突起38を充分長くし、伸縮距離も大
きく取れば、その伸縮度を制御する事により、レリーフ
状の立体形状を表示する事もできる。
Lead wires 35 to 3 connected to the tactile protrusions 38.
When one of the 7 is energized, one tooth above it is 1 m
extends about m and protrudes about 0.7 mm above the substrate 32,
It becomes one point of Braille, and it is possible to display one page written in Braille, and to display figures, landscapes taken by a TV camera, and the like. If the tactile projection 38 is made sufficiently long and the expansion / contraction distance is set large, the relief-like three-dimensional shape can be displayed by controlling the expansion / contraction degree.

【0038】触知突起38を基盤32の上面に予め突出
させておき、その直径もやや大きくしておき、非通電
時、各突起の上端がほぼ平面をなすようにしてもよい。
櫛形板34は幅300mm、厚さ0.1mm、前後長2
00mm程度の圧電材料膜の表裏面に、幅2mm程度の
間を置いて、100本の電極を設けた分極微粒子入り圧
電材料膜を、20mmピッチでジグザグ折りにしたり、
巻いたりし、接着剤で一体化した積層体を用い、歯の間
隙に相当する部分を打ち抜いて造る。
The tactile protrusions 38 may be made to project in advance from the upper surface of the base 32, and their diameters may be made slightly larger so that the upper ends of the respective protrusions are substantially flat when not energized.
The comb-shaped plate 34 has a width of 300 mm, a thickness of 0.1 mm, and a front-rear length of 2
A piezoelectric material film containing polarized fine particles having 100 electrodes provided on the front and back surfaces of a piezoelectric material film of about 00 mm with a width of about 2 mm is zigzag-folded at a pitch of 20 mm.
Using a laminated body that is rolled and integrated with an adhesive, the portion corresponding to the tooth gap is punched out.

【0039】あるいは、直径0.5mm、上下長20m
mの銅線の上半部に、表裏面に一様に電極を付けた上下
幅20mmの圧電フィルムを、銅線に接する部分は導電
性接着剤を付け、他は絶縁性接着剤を付けて巻き付け、
外径を1mmにした物を多数造り、2mmの間隔を置
き、100本並べ、共通電極にする上下幅10mm、左
右幅300mmの金属板を導電性接着剤で前後に張り付
ける等して造る。
Alternatively, the diameter is 0.5 mm and the vertical length is 20 m.
On the upper half of the copper wire of m, a piezoelectric film having a width of 20 mm with electrodes uniformly attached on the front and back surfaces is attached with a conductive adhesive on the portion in contact with the copper wire, and with an insulating adhesive on the other. Winding around
A large number of objects having an outer diameter of 1 mm are produced, 100 pieces are arranged at intervals of 2 mm, and a metal plate having a vertical width of 10 mm and a horizontal width of 300 mm to be a common electrode is attached to the front and back with a conductive adhesive.

【0040】再び、分極微粒子の製造法について記す。
図14は引き臼型分極微粒子製造装置の縦断面図であ
る。40は底面の中央側がやや高くなっているヒーター
入りのセラミック製桶形上部ミル。41は上面はその底
面に開けた穴。42は上面が平らなヒーター入りセラミ
ック製下部ミル。43は金属製の軸。44は下部ミルの
周囲を囲む円筒形の金属電極である。(軸43に近いほ
ど、ミルの温度を高くしてもよい。)上部ミル40の上
に直径2μm程度の強融電体微粒子を入れ、上部ミル4
0を図示しないモーターで回すと、微粒子は穴41から
落ち、内側が、やや広がった、下部ミル42との間に入
り、上下のミルの熱で軟化し、かつ、両者の透き間をこ
ろがる間に、円柱形に変形し、直径1μm程度の円柱に
なり、下部ミル42の周囲に落下する。(時々、上部ミ
ルを少し逆転してもよい。)軸43と電極44との間に
は高電圧をかけるため、微粒子は分極し、ミルの外へ出
る事になる。
The method for producing polarized fine particles will be described again.
FIG. 14 is a vertical sectional view of a pulling mill type polarized fine particle manufacturing apparatus. 40 is a ceramic trough-shaped upper mill with a heater whose center side of the bottom surface is slightly higher. 41 is a hole formed on the bottom surface of the top surface. 42 is a ceramic lower mill with a flat top surface and a heater. 43 is a metal shaft. Reference numeral 44 is a cylindrical metal electrode surrounding the lower mill. (The closer to the axis 43, the higher the temperature of the mill may be.) On the upper mill 40, the fine particles of strong fusion electric substance having a diameter of about 2 μm are put, and the upper mill 4
When 0 is rotated by a motor (not shown), the fine particles fall from the hole 41, enter the lower mill 42 where the inside spreads slightly, soften by the heat of the upper and lower mills, and roll between the two gaps. Then, it is transformed into a cylindrical shape and becomes a cylindrical shape having a diameter of about 1 μm, and falls around the lower mill 42. (Sometimes, the upper mill may be slightly reversed.) Since a high voltage is applied between the shaft 43 and the electrode 44, the fine particles are polarized and go out of the mill.

【0041】なお、電極44と軸43を磁極にし、強磁
性体の微粒子を円柱形にしながら磁化してもよい。2本
の加熱セラミックローラー間に微粒子を通し、ローラー
の軸方向に電場または磁場をかけ、円柱形の分極微粒子
を得てもよい。図15は分極微粒子入り圧電材料膜の製
造装置の一例を示す正面図である。
The electrodes 44 and the shaft 43 may be used as magnetic poles, and the ferromagnetic fine particles may be magnetized while having a cylindrical shape. Fine particles may be passed between two heated ceramic rollers and an electric field or magnetic field may be applied in the axial direction of the rollers to obtain cylindrical polarized fine particles. FIG. 15 is a front view showing an example of an apparatus for manufacturing a piezoelectric material film containing polarized fine particles.

【0042】45、46は圧延ロール。47はその上方
からロール間に送り込まれる、熱可塑性ポリウレタン樹
脂中に電気分極微粒子を分散させた、170℃程度に加
熱され、軟化している素材。48はロール間を通り、厚
さ0.1mm程度のフィルムになった素材。49、50
は傾斜した電極である。ロール間を通過して、なお軟化
状態のフィルム48に電極49、50の電場が作用し、
内部の分極微粒子の姿勢がそろい、分極方向が斜めにそ
ろう。かつ、図示しない送風機により、冷風がフィルム
48の下方に送られ、フィルムは固化し、図1、図2に
記す基材層1に分極微粒子2が分散した物が得られる。
45 and 46 are rolling rolls. Reference numeral 47 is a material in which electrically polarized fine particles are dispersed in a thermoplastic polyurethane resin which is fed between the rolls from above, and which is heated to about 170 ° C. and softened. 48 is a material that passes between the rolls and becomes a film with a thickness of about 0.1 mm. 49, 50
Is an inclined electrode. After passing between the rolls, the electric field of the electrodes 49 and 50 acts on the softened film 48,
The orientation of the polarized fine particles inside is the same, and the polarization directions are diagonal. Moreover, cool air is blown below the film 48 by a blower (not shown), the film is solidified, and a product in which the polarized fine particles 2 are dispersed in the base material layer 1 shown in FIGS. 1 and 2 is obtained.

【0043】素材47に二液混合型の樹脂、その他を用
いてもよい。硬化反応促進のため、熱や放射線を加えて
もよい。電極49、50の位置や形を変えれば、微粒子
2の分極方向を任意の方向に変える事ができる。電極4
9、50を用いる代わりに、磁気コイルを用い、磁気分
極微粒子の方向を制御してもよい。
The material 47 may be a two-component mixed resin or the like. Heat or radiation may be applied to accelerate the curing reaction. By changing the positions and shapes of the electrodes 49 and 50, the polarization direction of the fine particles 2 can be changed to an arbitrary direction. Electrode 4
Instead of using 9, 50, a magnetic coil may be used to control the direction of the magnetically polarized fine particles.

【0044】45、46の下方にも延伸用のローラーを
設け、円柱形微粒子の方向を延伸により、上下方向にそ
ろえてもよい。電気的に分極した微粒子と、磁気的に分
極した微粒子を、一つの基材層1中に、分極方向を一つ
にそろえるか、別個にそろえて入れ、電場と磁場に反応
し、伸縮するようにしてもよい。
A stretching roller may be provided below 45 and 46 so that the cylindrical fine particles are oriented in the vertical direction by stretching. The electrically polarized fine particles and the magnetically polarized fine particles are put in one substrate layer 1 so that the polarization directions thereof are aligned with each other or separately, so that they are expanded and contracted in response to an electric field and a magnetic field. You may

【0045】この場合、硬質プラスチック中に両者の超
微粒子を加え、両微粒子の分極方向を一つにそろえる
か、別個にそろえ、分極微粒子2に造り、基材層1中に
入れてもよい。あるいは、PZTと、それより融点の高
い強磁性体の微粒子を混和し、PZTを解かして固め、
両者の混じった直径2μm程度の微粉にし、電磁場と磁
場を同時に印加しつつ、図4に示す装置等で、分極微粒
子にしてもよい。
In this case, both ultrafine particles may be added to the hard plastic, and the polarization directions of both fine particles may be aligned to one, or may be aligned separately to form polarized fine particles 2 and put in the base material layer 1. Alternatively, PZT and fine particles of a ferromagnetic material having a higher melting point are mixed, PZT is dissolved and solidified,
Fine particles having a diameter of about 2 μm, which are a mixture of the both, may be formed into polarized fine particles by using an apparatus shown in FIG.

【0046】基材層1の見かけの容積に対する分極微粒
子2の総容積の比率を任意に選ぶ事ができるが、各微粒
子が基材層中で、適度に回転できる必要があるので、非
常に比率を大きく取る事はできない。VTRやテープレ
コーダーの磁気ヘッドと、記録テープのトラックとの位
置ずれがテープの駆動中によく起こるが、磁気ヘッド
と、それを取り付けている土台との間に、厚さ1mm程
度の上記の電歪材料積層体を接着して挿入しておき、ヒ
ードバック回路でその厚みを変え、ヘッドをトラックに
適合し得るようにできるが、そのような場合には、電歪
材料に多数の小貫通孔を開けておくか、発泡率50%程
度のウレタンフォームを基材に用いる等しなければなら
ない。均質な材料なら、その厚みが10%増減すれば、
左右長も同程度増減しなければならないが、接着されて
いると動けない。しかし、多孔性であれば、横方向の伸
縮は空胞の伸縮で吸収される事になる。
The ratio of the total volume of the polarized fine particles 2 to the apparent volume of the base material layer 1 can be arbitrarily selected, but since each fine particle needs to be able to rotate appropriately in the base material layer, the ratio is extremely high. Can not be taken large. The magnetic head of the VTR or tape recorder and the track of the recording tape are often misaligned while the tape is being driven. However, between the magnetic head and the base on which it is mounted, the above-mentioned voltage of about 1 mm is used. The strained material laminate can be bonded and inserted, and its thickness can be changed by a hideback circuit so that the head can be adapted to the track. In such a case, many small through holes are formed in the electrostrictive material. It must be left open, or urethane foam with a foaming rate of about 50% must be used as the base material. If it is a homogeneous material, if its thickness increases or decreases by 10%,
The left and right length must be increased or decreased to the same extent, but they cannot move if they are glued. However, if it is porous, lateral expansion and contraction will be absorbed by expansion and contraction of vacuoles.

【0047】分極微粒子を基材中に加えた物では、形を
用い、加圧成型や射出成型を行ない得るが、型はセラミ
ックや耐熱性のプラスチック、常時性金属(磁気微粒子
用)等を用い、成型時に外部から電磁場をかけ、微粒子
の方向をそろえる必要がある。磁気微粒子の場合には、
型の材料中に、いくつかの電磁石を仕込み、成型品の部
分によって、分極方向を変えてもよい。そのようにして
人形を造り、いくつかの電磁石を仕込んだケース中に入
れ、磁場の方向や強さを切り替え、おどりをおどらせる
事もできる。
For a product in which polarized fine particles are added to the base material, pressure molding or injection molding can be performed by using a shape, but a ceramic, heat resistant plastic, permanent metal (for magnetic fine particles) or the like is used as the mold. , It is necessary to apply an electromagnetic field from the outside during molding to align the directions of the particles. In the case of magnetic particles,
Several electromagnets may be charged in the material of the mold, and the polarization direction may be changed depending on the part of the molded product. You can make a doll in this way, put it in a case with several electromagnets, switch the direction and strength of the magnetic field, and dance.

【0048】電気分極微粒子の場合でも、一つの型の中
に多数の電極板を仕込み、場所により分極方向を変えて
成型すればよい。透明板で被覆した6枚の透明電極で造
った人形ケースに入れ、任意の電極間に電圧をかけ、お
どらせればよい。成型の際、まず、一方向にそろえたい
部分のみを含む型で成型し、分極方向をそろえ、型から
取り出した上、次のかたに入れ、別の分極方向にそろえ
る追加分を加えて成型する事を反復してもよい。
Even in the case of electrically polarized fine particles, a large number of electrode plates may be charged in one mold, and the polarization direction may be changed depending on the location. It can be placed in a doll case made of 6 transparent electrodes covered with transparent plates, and a voltage can be applied between the electrodes to make them dance. When molding, first mold with a mold that contains only the part that you want to align in one direction, align the polarization direction, take it out of the mold, put it in the next person, and add an additional component that aligns with another polarization direction You may repeat things.

【0049】外部から電磁誘導で充電し得る蓄電池や制
御回路、生体内の神経のインパルス等を入力とし得る制
御回路等を内蔵した人工筋肉を造り、欠損した筋肉の代
わりに生体内に移植してもよい。図1、2等に記す分極
微粒子入りの材料に外力で歪みをかけ、生ずる誘導電圧
や誘導電流を利用してもよい。
An artificial muscle containing a storage battery and a control circuit that can be charged by electromagnetic induction from the outside, a control circuit that can receive impulses of nerves in the living body, etc. is built and transplanted into the living body instead of the defective muscle. Good. It is also possible to use an induced voltage or an induced current generated by applying strain to the material containing polarized fine particles shown in FIGS.

【0050】従来の電歪材料を用いた種々の製品中に、
本発明の電歪材料を応用してもよい。その他、種々の設
計が可能である。
In various products using conventional electrostrictive materials,
The electrostrictive material of the present invention may be applied. In addition, various designs are possible.

【0051】[0051]

【発明の効果】 本発明を実施すれば、従来の電歪材
料や磁歪材料に比べ、印加した電場や磁場に対する歪み
率が格段に大きく、ロボット用人工筋肉、軟質材料で構
成される流体制御弁、コンピューター用点字二次元ディ
スプレイ、レリーフ状三次元ディスプレイ、その他に利
用して便利な、分極微粒子入り電磁気歪み材料が得られ
る等の利点が生ずる。
Effects of the Invention According to the present invention, the strain rate with respect to an applied electric field or magnetic field is remarkably large as compared with the conventional electrostrictive material or magnetostrictive material, and a fluid control valve composed of an artificial muscle for robot or a soft material. , A Braille two-dimensional display for computers, a relief-shaped three-dimensional display, and the like, which is convenient and can be used to obtain an electromagnetic strain material containing polarized fine particles.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明を実施した分極微粒子入り軟質電歪材
料の一部の拡大縦断面図。
FIG. 1 is an enlarged longitudinal sectional view of a part of a soft electrostrictive material containing polarized fine particles according to the present invention.

【図2】 その平面図。FIG. 2 is a plan view thereof.

【図3】 基材層1上にプリント配線した磁気コイル7
を示す平面図。
FIG. 3 A magnetic coil 7 having printed wiring on a base material layer 1.
FIG.

【図4】 楕円形分極微粒子の製造装置の縦断面図。FIG. 4 is a vertical sectional view of an apparatus for producing elliptical polarized fine particles.

【図5】 別の分極微粒子の製造装置の縦断面図。FIG. 5 is a vertical sectional view of another apparatus for producing polarized fine particles.

【図6】 電歪材料積層体の奇数積層板の平面図。FIG. 6 is a plan view of an odd laminated plate of an electrostrictive material laminated body.

【図7】 偶数積層板の平面図。FIG. 7 is a plan view of an even laminated plate.

【図8】 積層体の正面図。FIG. 8 is a front view of the laminated body.

【図9】 二つ折りの積層板の積層体の簡素化した正面
図。
FIG. 9 is a simplified front view of a laminate of two-fold laminate plates.

【図10】 圧電式バルブの平面図。FIG. 10 is a plan view of a piezoelectric valve.

【図11】 その正面図。FIG. 11 is a front view thereof.

【図12】 コンピューター用点字二次元ディスプレイ
の櫛形素子の一部の平面図。
FIG. 12 is a plan view of a part of a comb-shaped element of a computer Braille two-dimensional display.

【図13】 その正面図。FIG. 13 is a front view thereof.

【図14】 引き臼型分極微粒子製造装置の縦断面図。FIG. 14 is a vertical cross-sectional view of a pulling mill type polarized fine particle manufacturing apparatus.

【図15】 分極微粒子入り圧電材料膜の製造装置の正
面図。
FIG. 15 is a front view of an apparatus for manufacturing a piezoelectric material film containing polarized fine particles.

【符号の説明】[Explanation of symbols]

1 軟質基材層。 2 分極微粒子。 3 電極層。 4 電極層。 5 電極3、4の金属部分。 6 導電性接着剤の露出部。 7 基材層1上にプリント配線した磁気コイル。 8 ヒーター内蔵の加熱円筒管。 9 常温のセラミック製円筒管。 10 電圧印加電極。 11 電圧印加電極。 12 加熱シリンダー。 13 ノズル。 14 ピストン。 15 ローラー。 16 ローラー。 17 カッター。 18 カッター。 19 電歪材料。 20 導電性接着剤。 29 電歪材料製コイル。 32 硬質プラスチック基板。 34 櫛形電歪材料板。 38 触知突起。 40 ヒーター入り上部ミル。 42 ヒーター入り下部ミル。 43 金属製の電極兼用の軸。 44 円筒電極。 45 圧延ローラー。 46 圧延ローラー。 47 分極微粒子入りの熱で軟化した圧電材料素材。 48 フィルム化された素材。 49 傾斜した電圧印加電極。 50 傾斜した電圧印加電極。 1 Soft base material layer. 2 Polarized fine particles. 3 electrode layers. 4 electrode layers. 5 Metal parts of electrodes 3 and 4. 6 Exposed part of conductive adhesive. 7 Magnetic coil with printed wiring on the base material layer 1. 8 Heating cylindrical tube with built-in heater. 9 Room temperature ceramic cylindrical tube. 10 Voltage application electrode. 11 Voltage application electrode. 12 heating cylinder. 13 nozzles. 14 pistons. 15 rollers. 16 rollers. 17 Cutter. 18 Cutter. 19 Electrostrictive material. 20 Conductive adhesive. 29 Coil made of electrostrictive material. 32 Hard plastic substrate. 34 Comb-shaped electrostrictive material plate. 38 Tactile protrusion. 40 Upper mill with heater. 42 Lower mill with heater. 43 A shaft made of metal that also serves as an electrode. 44 Cylindrical electrode. 45 rolling roller. 46 Rolling roller. 47 Heat-softened piezoelectric material containing finely polarized particles. 48 Filmized material. 49 Inclined voltage application electrode. 50 inclined voltage application electrode.

─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───

【手続補正書】[Procedure amendment]

【提出日】平成5年8月12日[Submission date] August 12, 1993

【手続補正1】[Procedure Amendment 1]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】特許請求の範囲[Name of item to be amended] Claims

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【特許請求の範囲】[Claims]

【手続補正2】[Procedure Amendment 2]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0020】 網状電極を張り付ける際、基材層を
引っ張っておいてもよい。細い金属線や炭素繊維でメリ
ヤス編み、その他の布を造り、基材層を引っ張った状態
で、それらの布を張り付け、電極層に用いてもよい。磁
気コイル7を造る場合、ホトエッチングで、まず、C字
形の金属リングを多数造り、次に、線が重なる部分の上
に絶縁体層を付け、ついで、残る金属線部をホトエッチ
ングで形成させ、図3の状態にする。絶縁層を挟みなが
ら、数巻きのコイルを重ねてもよい。
When the reticulated electrode is attached, the base material layer may be pulled. You may use it for an electrode layer by making a knitting or other cloth with thin metal wires or carbon fibers and sticking those cloths with the base material layer stretched. When the magnetic coil 7 is manufactured, a large number of C-shaped metal rings are first formed by photoetching, then an insulating layer is attached on the portions where the lines overlap, and then the remaining metal line portions are formed by photoetching. , The state of FIG. You may stack several turns of coil, sandwiching an insulating layer.

【手続補正3】[Procedure 3]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0026】 電極10、11に加える電圧を低周波
または高周波の交流にし、落下中の微粒子を空気中で回
転させ、電極10または11の一方に引かれ、微粒子が
管8または9の内面に付着するのを防いでもよい。電極
10、11の代わりに、磁気コイルを設け、磁石材料の
微粒子を管8内に落として溶融し、表面張力で球形化
し、管9内の強磁場で楕円形化し、かつ、磁気分極さ
せ、楕円形の磁化微粒子を得てもよい。強融電体や強磁
性体の超微粒子を熱可塑性樹脂に混合し、粉末化して直
径2μm程度の微粒子にし、数100℃の管8内を落下
させ、樹脂を球形化し、管9内で分極させ、冷却・固化
してもよい。この超微流子の分散媒となる熱可塑性樹脂
の代わりに低融点のガラス、セラミック、水ガラス、そ
の他を用いてもよい。
The voltage applied to the electrodes 10 and 11 is changed to a low-frequency or high-frequency alternating current, the falling particles are rotated in the air, and the particles are attracted to one of the electrodes 10 or 11, and the particles adhere to the inner surface of the tube 8 or 9. You may prevent it. A magnetic coil is provided instead of the electrodes 10 and 11, and fine particles of a magnet material are dropped into the tube 8 to be melted, and are spherically formed by surface tension, and are made elliptical by a strong magnetic field in the tube 9, and magnetically polarized, Elliptical magnetized fine particles may be obtained. Ultra-fine particles of strong electric conductor or ferromagnetic material are mixed with thermoplastic resin and powdered into fine particles having a diameter of about 2 μm, which are dropped in a tube 8 at several 100 ° C. to make the resin spherical, and polarized in the tube 9. And may be cooled and solidified. Glass having a low melting point, ceramics, water glass, or the like may be used in place of the thermoplastic resin that serves as the dispersion medium for the ultrafine particles.

【手続補正4】[Procedure amendment 4]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0050】 従来の電歪材料を用いた種々の製品中
に本発明の電歪材料を応用してもよい。ネオジウム磁石
鋼等を用いた磁気分極微粒子入りの、直径1mm以下の
細長いゴムひも等の周囲に、ごく細いエナメル銅線のコ
イルを伸縮可能に巻き付け、コイルに通電すれば、ゴム
ひも等がコイルと共に伸縮するようにしてもよい。軟質
ゴムや、発泡率50%程度のウレタンフォーム等の中
に、円柱形等の分極微粒子を長軸方向を面と平行にする
か、45°に傾斜させて入れ、表裏面に電極を取り付け
た物は、一種のコンデンサーにもなる。この場合、電圧
をかければ、各微粒子に誘導分極が起こり、自発分極が
増減する通常のコンデンサーと同動作のほかに、微粒子
の傾斜変化が加わり、静電容量が増加する。この材料に
外力を加えて伸縮させれば、大きなピエゾ電圧を発生す
る圧電素子になるが、硬い絶縁円柱にこの材料を巻き付
け、その外側に今一つ巻き付け、内部の物、または、外
部の物に電圧を加えて伸縮させ、他者にピエゾ電気を発
生させ、一種の変圧機のような作用をさせてもよい。ル
チル(酸化チタン)の柱状微粒子と、酸化鉛・酢酸鉛そ
の他の鉛塩類、酸化ジルコニウム・硝酸ジルコニウムそ
の他のジルコニウム塩類等の微粉とを、アルコールその
他の有機溶剤中、アルコールと水の混合液中、水素ガス
その他のかん元剤、酸素ガスその他の酸化剤、水酸化カ
リウムその他の触媒等を含む水中、純水中等に分散さ
せ、高温・高圧を加え、柱状酸化チタン微粒子に鉛とジ
ルコニウム原子を化合させ、PZTの柱状微粒子を得て
もよい。(図14に示すようなミルの間に挟んで引き、
円柱形化したルチルを原料に用いてもよい。)図15に
示す分極微粒子入り電歪材料等の製造装置において、ロ
ール45、46間を通って薄層化した分極微粒子入り溶
融樹脂フィルム48が、変形するのを防ぐため、ロール
45、46の数m下方に同様のローラーを置き、上下の
ローラー間にテフロン等の、耐熱性で、冷却固化したフ
ィルム48をはがし易い材料で表面を被覆したエンドレ
スベルトをかけ、溶融したフィルム48が液状のまま、
電極49、50間を通りつつ、冷却固化し、下方でエン
ドレスベルト間からはがれて行くようにしてもよい。あ
るいは、一つのエンドレスベルトの外面にフィルム48
の溶融液を付着させ、電極間を通しつつ、冷却してもよ
い。あるいは、表面に電極層3、4を取り付けた2枚の
ごく薄い耐熱性合成樹脂フィルムをくり出し、シート4
7とフィルム48の左右面に接触させ、ロール45、4
6間を下方に通過させ、電極3、4の付いた一体化物を
得てもよい。その他種々の設計変更が可能である。
The electrostrictive material of the present invention may be applied to various products using conventional electrostrictive materials. A coil of a very thin enameled copper wire can be stretchably wound around a long and narrow rubber cord with a diameter of 1 mm or less containing magnetically polarized fine particles using neodymium magnet steel, etc., and if the coil is energized, the rubber cord etc. You may make it expand and contract. Polarized fine particles such as cylinders were placed in soft rubber or urethane foam with a foaming ratio of about 50% with the long axis direction parallel to the plane or inclined at 45 °, and electrodes were attached to the front and back surfaces. The thing becomes a kind of condenser. In this case, if a voltage is applied, induced polarization occurs in each particle, and in addition to the same operation as a normal capacitor in which spontaneous polarization increases or decreases, the tilt change of the particle is added and the capacitance increases. If an external force is applied to this material to expand and contract it becomes a piezoelectric element that generates a large piezo voltage, but this material is wrapped around a hard insulating cylinder and then wrapped around the outside again to apply a voltage to the inside or outside thing. It may be expanded and contracted to generate piezo electric power for others to act as a kind of transformer. Columnar fine particles of rutile (titanium oxide) and fine powders of lead oxide, lead acetate and other lead salts, zirconium oxide, zirconium nitrate and other zirconium salts, etc. in alcohol and other organic solvents, in a mixture of alcohol and water, Hydrogen and other oxidizing agents, oxygen gas and other oxidizing agents, potassium hydroxide and other catalysts, etc. are dispersed in water, pure water, etc., and high temperature and high pressure are applied to combine lead and zirconium atoms into the columnar titanium oxide fine particles. Then, the PZT columnar fine particles may be obtained. (Pull it between mills as shown in Figure 14,
Cylindrical rutile may be used as a raw material. ) In the apparatus for manufacturing electrostrictive material containing polarized fine particles shown in FIG. 15, in order to prevent the molten resin film 48 containing polarized fine particles thinned through between the rolls 45 and 46 from being deformed, A similar roller is placed a few meters below, and an endless belt whose surface is coated with a material such as Teflon that easily peels off the heat-resistant cooled and solidified film 48 such as Teflon is applied, and the molten film 48 remains liquid. ,
It may be cooled and solidified while passing between the electrodes 49 and 50, and may be peeled off from between the endless belts below. Alternatively, the film 48 is attached to the outer surface of one endless belt.
Alternatively, the molten liquid may be attached and cooled while passing between the electrodes. Alternatively, two very thin heat-resistant synthetic resin films with the electrode layers 3 and 4 attached to the surface are rolled out, and the sheet 4
7 and the left and right sides of the film 48, and the rolls 45, 4
It is also possible to pass between 6 and downward to obtain an integrated product with electrodes 3 and 4. Other various design changes are possible.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 楕円形・円柱形・円盤形・その他の非
球形をなし、粒子形状の一定方向に、電気的または磁気
的に分極させた多数の微粒子を、プラスチック・ゴム・
金属・その他の弾性材料中に、分極方向を一定方向にそ
ろえて分散させて成る、分極微粒子入り電磁気歪み材
料。
1. A large number of fine particles electrically or magnetically polarized in a certain direction of the particle shape, which are in the shape of an ellipse, a cylinder, a disk, or other non-spherical shape, are made of plastic, rubber, or the like.
Electromagnetic strain material containing polarized fine particles, which is made by dispersing the polarization direction in a fixed direction in a metal or other elastic material.
【請求項2】 表面に電極または磁気コイルを取り付
けるか、表面から離れた部に電極または磁気コイルを設
けて成る、分極微粒子入り電磁気歪み材料システム。
2. An electromagnetic strain material system containing polarized fine particles, comprising an electrode or a magnetic coil attached to the surface, or an electrode or a magnetic coil provided at a portion distant from the surface.
【請求項3】 電磁場内において強誘電体または強磁
性体の微粒子を加熱・軟化させ、ついで、冷却・硬化さ
せるか、線状に延伸し、切断し、楕円形・円柱形・円盤
形等にする、請求項1に記載の材料に用いる分極微粒子
の製法。
3. Ferroelectric or ferromagnetic fine particles are heated and softened in an electromagnetic field and then cooled or hardened, or linearly stretched and cut into an elliptical, cylindrical or discoid shape. A method for producing polarized fine particles used for the material according to claim 1.
JP02207893A 1993-01-13 1993-01-13 Electromagnetic strain material containing polarized fine particles Expired - Fee Related JP3413498B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP02207893A JP3413498B2 (en) 1993-01-13 1993-01-13 Electromagnetic strain material containing polarized fine particles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP02207893A JP3413498B2 (en) 1993-01-13 1993-01-13 Electromagnetic strain material containing polarized fine particles

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JP3413498B2 JP3413498B2 (en) 2003-06-03

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JP2005347364A (en) * 2004-06-01 2005-12-15 National Institute Of Advanced Industrial & Technology Extendible and contractible piezoelectric element
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Publication number Priority date Publication date Assignee Title
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JP2005347364A (en) * 2004-06-01 2005-12-15 National Institute Of Advanced Industrial & Technology Extendible and contractible piezoelectric element
JP2008047693A (en) * 2006-08-16 2008-02-28 Konica Minolta Medical & Graphic Inc Piezoelectric material, manufacturing method therefor, ultrasonic search unit, and manufacturing method therefor
JP2008053527A (en) * 2006-08-25 2008-03-06 Nsk Ltd Dielectric rubber laminate, and its manufacturing method
JP2010177571A (en) * 2009-01-30 2010-08-12 Tokai Rubber Ind Ltd Method of manufacturing dielectric material and dielectric film manufactured therefrom
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