JPH0771755B2 - Ion beam processing equipment - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to ion beam micromachining and, more particularly, to an ion beam machining apparatus for reducing the amount of ion beam irradiating other than a work piece to minimize damage to the other work piece. is there.

[0002]

^2. Description of the Related Art With the proposal of a liquid metal ion source with high accuracy (~ 10 ⁶ A / cm ² sr), an ion beam focused on submicrons, which has been impossible in the past, becomes a reality, and its research and development is active. Has become. New fields pioneered by submicron ion beams are ion beam lithography, maskless doping, submicron analysis, etc., but submicron processing becomes possible and new means will be provided in the microfabrication field. became.

FIG. 1 is a block diagram of an example of a conventional ion beam processing apparatus, showing a schematic configuration of an ion beam processing apparatus in which a source (ion generator) 1 is equipped with a liquid metal ion source. is there. The functions of each part will be outlined below. The main part of the apparatus is housed in a vacuum chamber 11 which is evacuated by a vacuum pump 18. A vibration-free ion pump, a cryopump, a soap pump or the like is used as the vacuum pump 18, and the vacuum chamber 11 is maintained at a vacuum degree of 10 ⁷ to 10 ⁸ Torr by the vacuum scene controller 19. Further, since it is an apparatus for performing submicron processing, it is necessary to block vibrations from the floor surface, and the vacuum chamber 11 is installed on a surface plate 16 having a large mass, and they are levitated by an air spring 17. A negative voltage is applied to the extraction electrode 3 with respect to the source 1 to extract the ion beam 2, and an appropriate voltage is applied to the lens electrodes 7, 8 and 9 to focus the ion beam 2 on the target 12.
A voltage is applied to the blanking electrode 5 at a high speed to deflect the ion beam 2, and whether the ion beam 2 passes through the second aperture 6 is switched to turn the ion beam 2 on and off on the target 12.

The first aperture 4 is a blanking electrode 5
It has a role of limiting the ion beam 2 incident between them, lowering the applied voltage required for blanking, and speeding up the blanking. The second aperture 6 also has a role as a blanking aperture and a role as a diffening aperture for determining the beam current reaching the target 12. The optical system controller 24 controls these optical systems. Further, the deflector 10 deflects and scans the ion beam 2, and at this time, the secondary electrons e emitted from the target 12 are transferred to the secondary electron detector 2.
It is detected by 0, amplified by the head amplifier 21, and the CRT 22 is brightness-modulated by the signal. As a result, a scanning ion microscope (Sc
anning Ion Microscope; hereafter S
Call it IM. ), The target 12 can be observed. The SIM is controlled by the SIM controller 23. The voltage applied to the blanking electrode 5 can be controlled by a signal from the SIM controller 23, but the blanking region is a rectangle whose side length is variable, and blanking with a complicated shape cannot be performed. Table 13 and its drive unit 1
4 is equipped with a microcomputer which is controlled by the table controller 15 and which stores the position information of the beam irradiation unit so that the beam irradiation unit can be placed within the SIM screen of 50 μm × 50 μm. The above is the schematic configuration of the ion beam mask processing apparatus. Next, the processing characteristics of this apparatus will be described with reference to the ion beam processing process in FIGS. 2 and 3.

FIG. 2 shows, by way of example, a cylindrical Au on a BN substrate 30 (however, Ta is thinly vapor-deposited on the surface).
3 shows a processing progress process when the pattern 31 is processed by the focused ion beam 2. Beam scanning area 3
2 is the minimum size including the Au pattern 31. Second
FIG. 6A shows a state at the start of beam irradiation. Since the scanning region 32 is a square, the ion beam 2 is also irradiated on the BN substrate 30 at the end thereof. FIG. 2B shows a state in which the processing has progressed to the middle. Since the Au pattern 31 is processed from the outside, the Au pattern 31 remains in the center, and the BN substrate 30 is engraved in the shape of the scanning region 32 in the peripheral scanning region. In FIG. 7C, the Au pattern 31 is removed at the final stage, and the BN substrate 30 has a square hole.

FIG. 3 shows another process example in which the Al wiring 34 on the SiO ₂ 33 is cut. The scanning region 32 of the ion beam 2 is made of Al as shown in FIG.
The width of the wiring 34 is set and the processing is started. At the stage where the processing has proceeded to the same figure (b), since the processing proceeds from the end of the Al wiring 34, the base SiO ₂ 3 is formed at the end of the scanning region 34.
3 is exposed, but the Al wiring 34 remains in the central portion. When the Al wiring 34 is completely cut, it becomes a processed shape in which SiO ₂ 33 is engraved as shown in FIG.

[0007]

As described above, in the ion beam processing, the processing selectivity depending on the object to be processed is small, and especially when the processed portion is on a flat base substrate, the edge of the processed portion is particularly large. Due to the rapid progress of processing in the above, damage to the underlying substrate is unavoidable. Therefore, solving this problem is an essential matter for practical application of ion beam micromachining. SUMMARY OF THE INVENTION It is an object of the present invention to provide an ion beam processing method and apparatus capable of solving the above problems and minimizing damage to a base substrate in ion beam micro processing.

[0008]

First, an ion beam processing apparatus according to the present invention comprises a high-intensity ion source for producing a high-intensity ion beam, and a lens for focusing the high-intensity ion beam produced by the high-intensity ion source. An electrode, a deflection electrode for deflecting and scanning a focused ion beam focused by the lens electrode, and a blanking electrode for irradiating and stopping the focused ion beam, and the sample is irradiated with the focused ion beam for scanning. An ion beam processing apparatus for processing a desired portion to be processed, comprising: detection means for detecting secondary particles emitted from the sample by irradiation scanning with the focused ion beam; and detection by the detection means. A / D conversion means for converting an analog image signal to be converted into a digital image signal, and a digital image signal converted by the A / D conversion means An image memory for storing a display means for displaying said digital image on a CRT screen reads the digital image signal stored in the image memory, the A /
The position of the edge of the processed portion is detected based on the digital image signal converted by the D conversion means, and the focused ion beam of the focused ion beam is detected based on the detected position information of the edge of the processed portion of the processed portion. And a central controller for controlling at least the deflection electrode to control the irradiation scanning range.

[0009]

Next, the operation of the present invention will be described below supplementing them. In order to process only the portion to be processed without damaging the base substrate by the ion beam processing, it is sufficient to grasp the region where the portion to be processed is present and limit the beam irradiation region to that region. If an electron microscope is installed in the ion beam processing device, there is a possibility of in-process monitoring, but in reality, the information on the edge of the processed part detected by the electron microscope is transmitted to the ion beam processing device side. It is not practical because it is difficult to eliminate the positional inconsistency that occurs when the ion beam scanning area is determined. Therefore, in order to accurately detect the processing edge, it is desirable to detect secondary particles such as secondary electrons and secondary ions generated by irradiation of the ion beam that is actually processed. Further, in the ion beam processing, when a work piece on a flat base substrate is processed, the processing speed at the end of the work piece is faster than that at the center part, and thus the work piece is processed from the end, It was revealed that the work piece remained in the central portion even if the base substrate was exposed at the end portion of the beam irradiation region. To solve this problem, there is also a method of changing the scanning speed, beam current, beam converging property, etc. during processing at the center and end of the scanning area, but even if an appropriate condition is obtained, it will not change the workpiece. I can't handle it. By observing the SIM screen during actual processing, it became clear that the residual state of the work piece could be grasped. Therefore, the secondary particles generated by the ion beam irradiation are detected to grasp the residual state of the work piece, the on / off of the blanking voltage is controlled from that information, and the beam is irradiated only to the work piece as much as possible. To prevent damage to the base of the workpiece.

[0010]

Embodiments of the method and apparatus according to the present invention will be described below with reference to the drawings. First, FIG. 4 is a block diagram of an embodiment of the ion beam processing apparatus according to the present invention.
Here, 25 is a processing circuit, 26 is a memory, 27 is a central controller, and other symbols are equivalent to those of the same symbols in FIG. Hereinafter, each part will be outlined. Secondary electrons e generated from the target 12 by the ion beam 2 are detected by the electron detector 20. The detected signal of the secondary electron e is amplified by the head amplifier 21 and guided to the processing circuit 25 having a binarization circuit and an A / D converter,
The digitized signal (data) is stored in the memory 26. The central controller 27 adjusts the amplification factor of the head amplifier 21 at the time of inputting a signal of the secondary electron e, and at the same time,
The binarization threshold of the processing circuit 25 is set. Information obtained by image processing by the central controller 27 can be confirmed on the CRT 22. Further, the optical system controller 24 is instructed to turn on / off the blanking power source at the end of the processed portion judged by the central controller 27. further,
The deflector power source is controlled by the SIM controller 23 to control the scanning range.

FIG. 5 is an explanatory view of the edge detection of the above-mentioned work piece, and shows an electrical work procedure at the time of working in this embodiment. As shown in FIG. 5 (a), SI
When the workpiece 36 such as Au on the BN substrate can be observed in the center of the M screen 35, if a secondary electron current is detected by scanning with one scanning line 37, the same figure (b) is displayed. ) Is obtained. At this stage, 2
Appropriately select the amount of secondary electrons drawn into the secondary electron detector 20, the amplification factor of the head amplifier 21, the subtraction rate of the background current, etc., and adjust each voltage so that the contrast between the processed portion and other portions becomes clear. I'll do it. Therefore, as a result of setting the binarization threshold value 38 at an appropriate place, information converted into a voltage as shown in FIG. In FIG. 7C, the point where the voltage changes from V ₂ to V ₁ (marked with Δ) is the point where the ion beam impinges on the workpiece 36, and the point where the voltage changes from V ₁ to V ₂ (marked with ○). This is the point where the ion beam deviates from the work piece 36. Therefore, if the blanking voltage is turned off at the point of Δ and the blanking voltage is turned on at the point of ○ as shown in FIG. The beam irradiation to the areas other than 36 is eliminated, and the processing with less damage to the underlying substrate is possible.

Here, C during processing shown in FIGS. 6 and 7
The processing progress will be described with reference to the explanatory view of the RT screen.
FIG. 6 shows an actual defect correction process of the X-ray mask. This shows a thin (about 500 Å) Ta vapor-deposited BN substrate on which an Au pattern is formed. When a defect occurs in this pattern,
The defects are indispensable because they are transferred to the wafer one after another and all the parts become defective. The removal process is as follows. The figure (a) is 20 μm × 20
Take a SIM image in the scanning range of μm and store it in the memory 2 once.
It is a figure displayed on CRT22 after having taken in to FIG. While this image is being displayed, the ion beam 2 is blanked so as not to damage the target 12. Further, in order to first display the defect 36 on the screen 35, the result of inspection by the X-ray mask defect inspection apparatus is input to the microcomputer of the table controller 15 of the ion beam processing apparatus to drive the table 13 to determine the defect position. It should be brought to the central axis of the ion beam 2. When the screen 35 in the state shown in FIG. 7A is obtained, the cursor line 39 is moved within the screen to obtain the smallest rectangle surrounding the defect 36. The central controller 27 detects the position of the cursor line 39, transmits a signal surrounded by the cursor line 39 and having a region as a beam scanning range to the SIM controller 23, controls the deflector power supply, and scans the beam once. Obtain the screen shown in FIG. 5th when you get this screen
The beam blanking position is detected by the procedure shown in the figure, and then only the blanking boundary 41 determined there is scanned four times. The scanning speed is 0.5 se for one frame, for example.
If it is about c, it is possible to process the screen information of 256 × 256 picture elements. The state after four scans is shown in FIG. In that state, Au is formed at the center of the scanning area.
The defect 36 remains, and the underlying BN substrate is exposed around the defect. Therefore, the image is stored again, the central controller 27 detects the edge of the remaining defect 36, resets the beam blanking boundary 41, and continues the processing. With this method, the beam scans the underlying BN substrate several times, but it is possible to perform processing in which damage to the BN substrate is extremely small compared to the conventional method.

FIG. 7 shows the Al wiring 4 on SiO ₂ .
2 shows an example of cutting, but the Al wiring 42 to be cut is 20 times as the magnification is gradually increased from a low-magnification SIM image.
The table 13 is controlled to move the target 12 to a position within the beam scanning range of μm × 20 μm. next,
As shown in FIG. 7A, the cursor line 39 is moved in the same manner as in the defect correction procedure for the X-ray mask to determine the beam scanning region. The beam is scanned once in the state of FIG. 7B, the surface shape of the target 12 is stored in memory, and the central controller 27
Detect the processed edge with. However, in this case, it is necessary to determine the cutting width of the wiring by moving the light pen or the cursor line on the screen 35 in the state of FIG. Processing is started from that state, but in the case of cutting the Al wiring 42,
Since the sputter rate of Al is lower than the sputter rate of Au, the processing speed is slow. Therefore, it is sufficient to store the image once in 10 frames, reset the beam blanking boundary 41, and proceed with the processing. The process is shown in FIG.
(C) and (d). Similar to the X-ray mask described above,
By this processing method, it is possible to make damage to the base substrate extremely small.

In the above-described embodiment, the blanking area is determined by the signal of the secondary electron e emitted from the target 12, but as another embodiment, the sample current from the target 12 is directly led to the head amplifier 21, The same effect can be obtained by processing the signal. Eighth basic configuration diagram
Shown in the figure. Each component is equivalent to that shown in FIG. 4, and the signal processing and the like are the same as those of the secondary electron detection in the above-mentioned embodiment. However, if the sample current is monitored, 2
The information on the surface shape of the target 12 becomes more planar as compared with the case where the secondary electrons are monitored, and more accurate processing edge information can be obtained depending on the target to be processed.

The method / apparatus for detecting secondary electrons and sample current described above is effective when the step difference in the target surface shape is relatively large. However, when the step difference on the surface is small and the difference in secondary electron emission ability between the substances on the target is small, as another example, secondary ions other than secondary electrons are detected to perform beam blanking. It is effective to detect the boundary. The basic configuration diagram is shown in FIG. Here, 28 is an energy filter, 29 is a mass spectrometer, 21A is a head amplifier, 25A is a processing circuit,
Reference numeral 26A is a memory, and the other symbols are equivalent to those of the same symbols in FIG. The secondary electron detection system stores the secondary electron image and processes it by the central controller 27 in the same manner as the system path described in FIG.

The secondary ion detection system includes an energy filter 28 that keeps the energy of the secondary ions i emitted from the target 12 constant, a mass spectrometer 29, a head amplifier 21A, and detection information of the secondary ions i. Binarize,
It is composed of a processing circuit 25A for A / D conversion and a memory 26A for secondary ion detection information. The operation is almost the same as the above-mentioned secondary electron detection system. However, while the secondary electron emission capability is on the same order as the beam current incident on the target 12, the secondary ion emission capability is one digit lower than the beam current even for the largest substance, and is generally 2 times lower than the beam current. It is a value 4 digits below the digit. Therefore, in order to increase the detection amount of the secondary ions i, in the present embodiment, 9 frames are scanned and processed in 0.5 sec for each frame, and then 1 frame is scanned in 2 sec to scan the secondary ion image. Repeat the operation of memory and processing. For example, if an X-ray mask is used as the target 12, the mass spectrometer 2
The m / e of 9 can be fixed at 197 to obtain a secondary ion image.

The secondary ion image 35 thus obtained
Is shown in FIG. 10 (a). A clear image cannot be obtained because the amount of detected secondary ions is small. The secondary ion detection amount on the scanning line 37 is also affected by noise as shown in FIG. 7B, and it is difficult to find the edge of the workpiece. Therefore, when the secondary ion detection amount in FIG. 6B is taken in and averaged by the information for each of the two pixels before and after each pixel, the information on the secondary ion amount that is relatively smooth as shown in FIG. Is obtained. Here, when an appropriate binarization threshold value 38 is determined and a 2-aperture value is obtained, it becomes as shown in FIG. Then 2
Similar to the case of detecting secondary electrons, blanking is turned off at the points marked with Δ and blanking is turned on at the points marked with ○ to reduce beam irradiation to areas other than the processed part, and damage to the base substrate is extremely small. It is possible to process without problems in practical use.

Thus, according to the above embodiment,
The first effect is to reduce the beam irradiation to parts other than the processed part,
It is possible to perform high-quality processing with little damage to the underlying substrate. This is because it has a function of tracking the shape change of the workpiece during processing and controlling the beam blanking corresponding to it. The second effect is brought about by this function, and it becomes possible to cope with the shape change and material change of the work piece. Conventionally, the processing data of the target workpiece was accumulated and the optimum processing conditions were determined from it. However, with such a conventional method, there occurs a situation in which it is not possible to cope with variations in the shape of the workpiece. Further, the shape of the work piece changes greatly due to the layout change and the like, but when the substance itself is changed to another one, it is necessary to determine the working conditions again from the beginning. For this,
In-process machining monitoring and control becomes possible, and these problems can be solved.

[0019]

As described above in detail, according to the present invention, it is possible to perform ion beam micro-machining with a minimum damage to the underlying substrate, so that the yield of semiconductor device manufacturing can be improved.
A remarkable effect can be obtained in quality improvement and efficiency improvement.

[Brief description of drawings]

FIG. 1 is a configuration diagram of an example of a conventional ion beam processing apparatus.

FIG. 2 is an explanatory diagram of an ion beam processing process.

FIG. 3 is an explanatory diagram of an ion beam processing process.

FIG. 4 is a configuration diagram of an embodiment of an ion beam processing apparatus according to the present invention.

FIG. 5 is an explanatory diagram of edge detection of the workpiece.

FIG. 6 is an explanatory view of a CRT screen during the processing.

FIG. 7 is an explanatory diagram of a CRT screen during the processing.

FIG. 8 is a configuration diagram of another embodiment of the ion beam processing apparatus according to the present invention.

FIG. 9 is a configuration diagram of another embodiment.

FIG. 10 is an explanatory diagram of other edge detection.

[Explanation of symbols]

 1 Source 2 Ion Beam 3 Extraction Electrode 4 First Aperture 5 Blanking Electrode 6 Second Aperture 7 First Lens Electrode 8 Second Lens Electrode 9 Third Lens Electrode 10 Deflector 11 Vacuum Chamber 12 Target 13 Table 14 Table Drive Unit 15 Table Controller 16 Surface plate 17 Air spring 18 Vacuum pump 19 Vacuum system controller 20 Secondary electron detector 21,21A Head amplifier 22 CRT 23 SIM controller 24 Optical system controller 25, 25A Processing circuit 26, 26A Memory 27 Central controller 28 Energy filter 29 Mass Analyzer 35 CRT screen 36 Workpiece 37 Scan line 38 Binarization threshold 39 Cursor line 40 Au pattern 41 Blanking boundary 42 Al wiring

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Satoshi Hara, 292 Yoshida-cho, Totsuka-ku, Yokohama, Kanagawa, Ltd.Hitachi, Ltd., Institute of Industrial Science (72) Inventor, Miyako 292 Yoshida-cho, Totsuka-ku, Yokohama, Kanagawa Hitachi, Ltd. Production Technology Research Center

Claims (2)

[Claims] 1. A high-brightness ion source for generating a high-brightness ion beam, a lens electrode for focusing the high-brightness ion beam generated by the high-brightness ion source, and a focused ion beam focused by the lens electrode. And a blanking electrode for irradiating and stopping the focused ion beam. An ion beam processing apparatus for irradiating and scanning the focused ion beam to process a desired processed portion on a sample is provided. A detector for detecting secondary particles emitted from the sample by irradiating and scanning the focused ion beam, and an A / D for converting an analog image signal detected by the detector into a digital image signal.
Conversion means, an image memory for storing the digital image signal converted by the A / D conversion means, and display means for reading the digital image signal stored in the image memory and displaying the digital image on a CRT screen, The position of the edge of the processed portion is detected based on the digital image signal converted by the A / D conversion means, and the focusing is performed based on the detected position information of the edge of the processed portion of the processed portion. An ion beam processing apparatus comprising: a central controller that controls at least the deflection electrode to control an irradiation scanning range of an ion beam. 2. The ion beam processing apparatus according to claim 1, wherein the detection means is configured to detect secondary ions and secondary electrons.