JPH0768753A - Ink jet recording head - Google Patents

Abstract

PURPOSE:To decrease in size and to increase an ink discharge amount and to accelerate an ink droplet speed as compared with a piezoelectric actuator by using an anti-ferroelectric phase-ferroelectric phase transition material as an actuator of an ink jet recording head. CONSTITUTION:A vibrating plate 13 is connected to a phase transition type actuator 12 to pressurize ink in an ink liquid chamber 15 by an actuator 13 through the plate 13 and to discharge ink droplet 18 from a nozzle 17 to form an image. The actuator 12 is formed of a material in which a strain occurs upon anti-ferroelectric phase-ferroelectric phase transition, thereby obtaining larger volume change rate than that of a conventional piezoelectric material.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet recording head, and more particularly to an ink jet recording head using a phase transition type actuator.

[0002]

2. Description of the Related Art Ink jetting methods for recording heads of ink jet printers include ejecting by utilizing the generation of bubbles due to heat, or ink is supplied by a pump to the recording heads and ink droplets are formed by a piezoelectric material. There are a type of discharging and charging and deflecting the discharged ink droplet, a type of discharging ink by utilizing an electric field attraction force, and a type of discharging ink by simply using a piezoelectric material as an actuator.

An ink jet recording head using a piezoelectric material as an actuator is composed of a nozzle plate, an ink liquid chamber, a vibrating plate, a piezoelectric actuator, etc., and an ink is ejected from the nozzle by the piezoelectric actuator to form an image. This piezoelectric actuator is a phenomenon in which distortion occurs when an electric field is applied to a piezoelectric material, that is,
This utilizes the inverse piezoelectric effect of the piezoelectric material.

FIG. 14 is a diagram showing an example of a conventional ink jet recording head. In the figure, 1 is a substrate, 2 is a piezoelectric material, 3 is a vibrating plate, 4 is a flow path plate, 5 is an ink liquid chamber, 6 Is a nozzle plate, 7 is a nozzle, and 8 is an ink droplet. For example, the piezoelectric material 2 has a piezoelectric constant displaced by d ₃₁ , that is,
It is arranged so as to be displaced in the direction perpendicular to the direction of the electric field, and a recording information signal is applied to the voltage material 2 to pressurize the ink in the ink liquid chamber 5 via the vibrating plate 3 to generate the nozzle 7
The ink droplets 8 are further ejected and recorded on a recording paper (not shown).

FIG. 15 is a diagram showing the electric field induced strain of the piezoelectric material. FIG. 15 (a) shows the polarization direction before voltage is applied to the voltage material 2, and FIG. 15 (b) shows voltage application before voltage application. As is well known, when the elastic wave is a longitudinal wave and the piezoelectric effect is a longitudinal effect, it expands and contracts in parallel with the electric field direction, and when the elastic wave is a longitudinal wave and the piezoelectric effect is a lateral effect. The expansion and contraction is perpendicular to the direction of the electric field. The displacement of this piezoelectric material is determined by the piezoelectric constant, and the rate of change in length is d in the direction perpendicular to the electric field.
It is about -0.03% in the ₃₁ direction, and d in the direction parallel to the electric field.
It is about 0.09% in ₃₃ directions.

[0006]

As described above, the ink jet recording head using the piezoelectric actuator has already been put to practical use. However, as described above, the rate of change of the length of the piezoelectric material is parallel to that of the electrode. It is about -0.03% in the vertical direction and about 0.09% in the direction perpendicular to the electrodes. Thus, in the ink jet recording apparatus, the printing speed can be increased by increasing the ink ejection amount or the ink droplet speed to increase the ink ejection efficiency, and therefore, the material having a larger rate of change in length. Is desired.

In recent years, the size of ink jet printers has tended to decrease year by year. However, in a conventional piezoelectric actuator utilizing the inverse piezoelectric effect of a piezoelectric material, in order to obtain a necessary ink ejection amount and ink drop velocity. The actuator size must be increased, and
Only the recording head could not be miniaturized.

The present invention has been made in view of the above situation, is smaller than an ink jet recording head using a conventional piezoelectric actuator, and has a large ink discharge amount and an ink drop velocity. It is an object of the present invention to provide an inkjet recording head that is fast and has a high printing speed.

[0009]

In order to solve the above-mentioned problems, the present invention provides (1) a vibration plate and a phase-transition-type actuator are joined together, and the ink in the ink liquid chamber is vibrated by the phase-transition-type actuator. An ink jet recording head which presses through a plate and ejects ink from a plurality of nozzles to form an image, wherein the phase transition actuator is made of a material that causes distortion due to an antiferroelectric phase-ferroelectric phase transition. Further, (2) the strain of the material that causes strain due to the antiferroelectric phase-ferroelectric phase transition is caused by a phase transition due to an electric field, and (3) the phase transition type The actuator is formed by laminating thin layers of a material that causes strain associated with the antiferroelectric phase-ferroelectric phase transition, and (4) the phase transition actuator is antiferroelectric phase-ferroelectric phase inversion. A unimorph type actuator in which the same material as or a material other than the material that causes the strain due to the above is laminated, and further, (5) the phase transition actuator causes the strain due to the antiferroelectric phase-ferroelectric phase transition. It is a bimorph type or multimorph type actuator in which two or more materials are laminated, and (6) the ink supplied to the ink liquid chamber is a solid ink liquefied by a heating element. Antiferroelectric phase-
An image is formed by ejecting from a plurality of nozzles by a phase transition type actuator made of a phase transition material that causes a strain associated with the ferroelectric phase transition, and (7) antiferroelectric phase-strong of the phase transition type actuator. Heating the phase transition material by a heating element provided in the vicinity of the dielectric phase transition material, and (8) the vibration plate bonded to the phase transition actuator in a part not bonded to the phase transition actuator. The thickness of the vibrating plate to be joined is thinner than the thickness of the vibrating plate, and (9) the material that causes distortion due to the antiferroelectric phase-ferroelectric phase transition is at least one of lead zirconate and lead stannate. A lead zirconate stannate-based or lead zirconate stannate-titanate-based ceramic containing the above, and (10) an antiferroelectric phase-ferroelectric phase transition material according to (7) above. Forming the Pb ₁ - _0.5Z Nb _{Z [(Zr 1-X, Sn X} ) 1-Y Ti Y ] _1-Z
O ₃ 0 ≦ X ≦ 0.5, 0 ≦ y ≦ 0.1, 0 ≦ Z ≦ 0.0
2 and (11) the composition of the antiferroelectric phase-ferroelectric phase transition material in (7) above is Pb _{1-3 / 2Z} Laz [(Zr _1-X , Sn _X ) _1-Y Ti _Y ] O ₃ 0 ≦ X ≦ 0.5, 0 ≦ y ≦ 0.2, 0 ≦ Z ≦ 0.0
2 and (12) the composition of the antiferroelectric phase-ferroelectric phase transition material in (7) above is Pb _1-X La _X (Zr _1-X , Ti _Y ) _{1-X / 4} O ₃ 0.08 ≦ X ≦ 0.24, 0 ≦ y ≦ 0.85.

[0010]

As an actuator of an ink jet recording head, an antiferroelectric phase-ferroelectric phase transition material is used, which is smaller than a piezoelectric type actuator and moreover,
The ink ejection amount is increased and the ink drop velocity is increased.

[0011]

EXAMPLE The piezoelectric material is anisotropically displaced, whereas the phase transition isotropically displaced. The volume change rate ΔV / V associated with the antiferroelectric phase-ferroelectric phase transition is about one digit or more larger than that of the conventional piezoelectric material, which is an order of magnitude volume change. The change in the piezoelectric material is determined by the piezoelectric constant, and as described above, the rate of change in length is at most about 0.09% in the d ₃₃ direction (direction parallel to the electric field direction).
Approximately -0.03% in ₃₁ directions (direction perpendicular to the electric field direction)
Is. On the other hand, the displacement of the phase change material is about 0.25 to 0.80 in terms of the rate of change of the length in the direction parallel to the electric field direction.
%, And the rate of change in length in the direction perpendicular to the electric field direction is about 0.075 to 0.15%. Therefore, it can be seen that the displacement of the phase change material in the direction perpendicular to the electric field direction and the displacement in the direction parallel to the electric field direction are equal to or more than those of the piezoelectric material.

1 and 2 are views for explaining an embodiment of an ink jet recording head according to the present invention, in which 11 is an actuator support and 12 is a laminated actuator (phase change material). , 13 are diaphragms, 1
4 is fluid resistance, 15 is ink chamber, 16 is nozzle plate, 1
7 is a nozzle, 18 is an ink drop, 19 is a driver IC
Then, in both of the embodiments, as the laminated actuator 12,
An actuator using longitudinal strain due to electric field induction of an antiferroelectric phase-ferroelectric phase transition material is used. In the embodiment shown in FIG. 1, the bottom surface of a laminated actuator 12 is supported by a support 11. In the embodiment shown in FIG. 2, the side surface of the laminated actuator 12 is supported by the support 11. The supporting portion of the phase change material is inactive.

FIGS. 3 and 4 are views showing other examples of the ink jet recording head according to the present invention. These examples utilize the lateral distortion of the laminated actuator 12 induced by the electric field. Since the operation is the same as that of the embodiment shown in FIGS. 1 and 2, the same reference numerals as those of FIGS. 1 and 2 are applied to the parts which perform the same operations as those of the embodiment of FIGS. The description is omitted. In addition,
In order to simplify the explanation, the same reference numerals as those in FIGS. 1 and 2 are given to the portions having the same operations as those in FIGS. 1 and 2.

The ink jet recording head to which the present invention is applied comprises at least an ink liquid chamber 15, a vibrating plate 13, and a phase transition type actuator 12 made of an antiferroelectric phase-ferroelectric phase transition material. The actuator 12 is driven to move the ink in the ink chamber 15 to the nozzle 1
7 is used to form an image. That is,
A voltage is applied to the phase-transition material in accordance with the electric signal obtained by converting the image information, and the phase-transition material is displaced to adjoin the vibrating plate 1.
3 is vibrated, thereby applying pressure to the ink in the ink liquid chamber 15 and ejecting the ink droplet 18 from the nozzle 17. The nozzle is formed by forming the nozzle on the nozzle plate and joining the nozzle plate and the ink liquid chamber forming member, or by forming the nozzle in a part of the ink liquid chamber There is a method of integrating with a plate.

The vibrating plate 13 is also a partition plate which serves as a partition with the ink liquid chamber 15, and is made of a material such as plastic or metal, and if necessary, surface treatment or surface thin film coating is applied. Further, the diaphragm 13 is, as described later,
It does not necessarily have to be a plate shape having a uniform thickness as long as the displacement of the phase change material is efficiently transmitted to the vibration plate and the ink in the ink liquid chamber is ejected.

The phase change material, as shown in FIG.
When an electric field is applied to both ends, distortion occurs due to the antiferroelectric phase-ferroelectric phase transition, and electric field-induced distortion as shown in FIG. 5 is exhibited. Ferroelectric phase transitions of phase change materials include antiferroelectric phase-ferroelectric phase transition, paraelectric phase-ferroelectric phase transition and paraelectric phase-antidielectric phase transition. A larger strain can be obtained by using the phase transition than by using the paraelectric phase-ferroelectric phase transition or the paraelectric phase-anti-dielectric phase transition. Compared with the single-plate type, the layer-type phase-transition material in which thin layers of phase-transition material and electrode layers are alternately laminated requires less voltage for each layer, and as a result, it is possible to drive the phase-transition material at low voltage. is there.

Depending on how to dispose the phase change material, there are cases where it is in contact with the diaphragm vertically, and there are cases where it is arranged in parallel with the diaphragm and in contact with it such as a unimorph type, bimorph type or multimorph type actuator. The unimorph type actuator is a laminate of the same material as the phase change material or another material, and the bimorph and multimorph actuators are the laminate of two or more phase change materials. A laminated phase change material in which the material and the electrode layer are alternately laminated may be used.

FIG. 6 shows a multi-model head of a unimorph type actuator made of a phase change material, and each unimorph type actuator 12a is made by laminating the same material as the phase change material or another material. FIG. 7 is a cross-sectional view of a head using the unimorph type actuator 12a of the phase change material of FIG. FIG. 8 shows a head in which a unimorph type actuator 12a made of a phase change material is used and the direction of the phase change material is parallel to the diaphragm in the stacking direction. In addition,
In FIG. 8B, a spacer 20 is provided between the vibrating plate 13 and the actuator 12a to facilitate the displacement of the actuator 12a in the nozzle direction. FIG. 9 shows a head in which a phase change material bimorph type actuator 12c is used and the phase change material is laminated in a direction perpendicular to the diaphragm.

FIG. 10 is a diagram showing an example of a vibrating plate suitable for carrying out the present invention. As the vibrating plate 13, as described above, a plate-shaped flat plate having a uniform thickness should be used. Although it is also possible, as shown in FIGS. 10A and 10B, if the thickness T ₁ of the diaphragm that is not joined to the phase transition actuator 12 is made thinner than the thickness T ₂ of the joined portion, as shown in FIGS.
As indicated by the broken line in (c), the diaphragm is easily displaced, and can be displaced even at low power.

The present invention is a print head of an ink jet printer which is composed of an ink liquid chamber forming member, a vibration plate, and a phase transition type actuator, and which ejects ink from a nozzle by the phase transition type actuator to form an image, It is mainly composed of a recording head that ejects liquid ink, but by providing a heating element in either the ink supply section or the ink flow path, the ink liquid chamber, or the outside of the ink liquid chamber,
The ink supplied to the ink liquid chamber may be a hot-melt type ink jet recording head by liquefying solid ink by a heating element and ejecting the liquid ink from a plurality of nozzles. Is. Ink ejection efficiency is not significantly different between liquid ink and hot melt ink.

As described above, the phase change material changes isotropically in the vertical and horizontal directions by the electric field induction, so that the volume change rate is large, and when the phase change type actuator is provided in the ink liquid chamber, the distortion due to the phase change is generated. The effect can be fully exerted. Since the hot melt ink has a lower conductivity than liquid ink, especially water-based ink, it can be driven even when provided in the ink liquid chamber.

FIG. 11 is a diagram showing the electric field-induced strain characteristic of the longitudinal strain of the phase change material. FIG.
(B) shows the characteristics at high temperature. This hysteresis curve is shown in FIG. 11 when the temperature is raised to a high temperature of 50 to 100 ° C.
As shown in (b), the electric field returning from the ferroelectric phase to the antiferroelectric phase in the electric field induced strain characteristic shifts to the high electric field side. Therefore, the phase transition type actuator can be driven by the electric signal in which the pulse voltage is superimposed on the offset voltage, and the load on the drive circuit can be reduced, which is suitable for the hot melt type inkjet recording head.

FIG. 12 is a view showing an embodiment of a hot-melt type ink jet recording head. As shown in the figure, a heating element 21 is provided, and the heating element 21 liquefies solid ink. Is. Further, as shown in FIG. 13, the phase change material is heated by the heat generating element 21 provided in the vicinity of the phase change actuator, and the electric field induced strain characteristic of FIG. 11 can be changed from room temperature to high temperature. .

As described above, in the present invention, the phase change material is used in the phase change type actuator which is one of the components of the ink jet recording head for forming an image with the water-based ink and the solid ink. Are lead zirconate stannate titanate-based or lead lanthanum zirconate titanate-based ceramics, whose main chemical formula is Pb.
[(Zr, Sn) Ti] O ₃ or PbLa (Zr,
Ti) O ₃ . Here, if necessary, a small amount of Nb, Bi, La, Sr, etc. may be added to the lead zirconate titanate titanate-based ceramics and the lead lanthanum zirconate titanate-based ceramics.
Those containing Mg are also referred to as lead zirconate stannate titanate-based ceramics or lead lanthanum zirconate titanate-based ceramics.

[Embodiment 1] In the invention of claim 10, the composition of the antiferroelectric phase-ferroelectric phase transition material is Pb _{1 -0.5Z} Nb _Z [(Zr _1-X , Sn _X ) _1-Y Ti _{Y Y.} ] _1-Z
O ₃ 0 ≦ X ≦ 0.5, 0 ≦ y ≦ 0.1, 0 ≦ Z ≦ 0.0
2. An ink jet recording head, characterized in that the composition of the phase change material is Pb _0.99 Nb _0.02 [(Zr _0.5 , Sn _0.5 ) _0.9 Ti _0.1 ].
_In the case of _0.98 O ₃ , X ₃ (displacement in the direction parallel to the electric field direction) is 0.
34%, X ₁ (displacement in the direction perpendicular to the electric field direction)
Was 0.085%.

[Embodiment 2] In the invention of claim 11, the composition of the antiferroelectric phase-ferroelectric phase transition material is Pb _{1-3 / 2Z} Laz [(Zr _1-X , Sn _X ) _1-Y Ti _{Y Y} ] O ₃ 0 ≦ X ≦ 0.5, 0 ≦ y ≦ 0.2, 0 ≦ Z ≦ 0.0
2. An ink jet recording head, characterized in that the composition of the phase change material is Pb _0.97 La _0.02 [(Zr _0.74 , Sn _0.26 ) _0.89 Ti.
_In the case of _0.11 ] O ₃ , X ₃ (displacement in the direction parallel to the electric field direction) was 0.80%, and X ₁ (displacement in the direction perpendicular to the electric field direction) was 0.15%.

[Embodiment 3] In the invention of claim 12, the composition of the antiferroelectric phase-ferroelectric phase transition material is Pb _1-X La _X (Zr _1-X , Ti _Y ) _{1-X / 4} O. ₃ 0.08 ≦ X ≦ 0.24, 0 ≦ y ≦ 0.85 In an inkjet recording head, for example, the composition of the phase change material is Pb _0.88 La _0.12 [(Zr _0.7 , Ti _0.3 ) _0.97 O ₃ , X ₃ (displacement in the direction parallel to the electric field direction) was 0.25%, and X ₁ (displacement in the direction perpendicular to the electric field direction) was 0.075%. .

[0028]

【The invention's effect】

(1) Effects corresponding to Claims 1, 9 to 12: Since the ejection amount of ink increases and the ink drop velocity increases, it becomes possible to manufacture an inkjet printer recording head with a high printing speed. . Further, since the ink can be ejected by the small phase transition type actuator, the recording head can be miniaturized. (2) Effect corresponding to claim 2: By driving the phase transition type actuator by a change in electric field due to application of a pulse voltage or the like, ink droplets are ejected by an electric signal with respect to an input image code, and an inkjet recording image is recorded. can do. (3) Effect corresponding to claim 3: By manufacturing a phase-transition actuator by laminating thin phase-transition materials, the electric field strength for driving the actuator can be reduced and power consumption can be reduced. (4) Effect corresponding to claim 4: A unimorph type actuator in which the same material as the phase change material or another material is laminated has a larger displacement amount than a unimorph type actuator using a conventional voltage material. A large amount of ink is ejected and the printing speed is high. Further, since the ink ejection amount is large, a small unimorph type actuator can be used, and the recording head can be downsized. (5) Effect corresponding to claim 5: The bimorph type or multimorph type actuator in which two or more phase change materials are laminated has a larger displacement than the bimorph type or multimorph type actuator using the conventional piezoelectric material. Therefore, the amount of ejected ink is large and the printing speed is high. Also, since the ink ejection amount is large, a small unimorph type actuator can be used, and the recording head can be miniaturized. (6) Effect corresponding to claim 6: In the hot-melt type ink jet printer, since the ejection amount of ink is large and the ink droplet speed is high, it is possible to manufacture a recording head with high printing speed. become. Further, since the ink can be ejected by the small phase transition type actuator, downsizing of the hot melt type inkjet recording head can be achieved. (7) Effect corresponding to claim 7: In the ink jet recording head, when the phase change material of the actuator is heated, it can be driven by the electric field induced strain characteristic at high temperature. When driven in a heated state, it can be driven by an electric signal in which a pulse voltage is superimposed on an offset voltage, and the load on the drive circuit is reduced, so that it is suitable for an inkjet recording head. (8) Effect corresponding to claim 8: By making the thickness of the joining plate of the portion where the diaphragm is not joined smaller than the thickness of the joining plate of the portion where it is joined, a phase transition type than the force required for displacement of the diaphragm is obtained. The generated force of the actuator becomes stronger, and displacement is possible even at low voltage. In particular, in the phase change material, longitudinal strain and lateral strain occur at the same time. Therefore, the thin portion of the diaphragm having such a shape is displaced in a two-step state and largely displaced corresponding to each strain.

[Brief description of drawings]

FIG. 1 is a diagram showing an example of a stacked actuator that utilizes longitudinal strain of a phase change material induced by an electric field.

FIG. 2 is a diagram showing an example in which the laminated actuator of FIG. 1 is supported on a side surface.

FIG. 3 is a diagram showing an example of a laminated actuator that utilizes lateral strain of a phase change material induced by an electric field.

FIG. 4 is a diagram showing an embodiment in which the laminated actuator of FIG. 3 is supported on a side surface.

FIG. 5 is a diagram showing electric field induced strain of an antiferroelectric phase-ferroelectric phase transition material.

FIG. 6 is a diagram showing an example of a recording head using a unimorph type actuator made of a phase change material.

FIG. 7 is a diagram showing a cross-sectional configuration of FIG.

FIG. 8 is a diagram showing another example of a recording head using a unimorph type actuator.

FIG. 9 is a diagram showing an example of a recording head using a bimorph type actuator.

FIG. 10 is a diagram for explaining an improved example of the diaphragm.

FIG. 11 is a diagram showing electromagnetically induced strain characteristics of a phase change material.

FIG. 12 is a diagram showing an example of a hot melt ink jet recording head.

FIG. 13 is a diagram showing an example of a case where a heating heating element is used in the vicinity of a phase transition actuator.

FIG. 14 is a diagram showing an example of a conventional inkjet recording head.

FIG. 15 is a diagram for explaining electric field induced strain of a piezoelectric material.

[Explanation of symbols]

11 ... Actuator support, 12 ... Laminated actuator (phase change material), 13 ... Vibrating plate, 14 ... Fluid resistance, 15 ... Ink liquid chamber, 16 ... Nozzle plate, 17 ... Nozzle, 18 ... Ink drop, 19 ... Driver IC, 20 ... Spacer, 21 ... Heating element.

 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Yasuo Miyoshi 1-3-6 Nakamagome, Ota-ku, Tokyo Inside Ricoh Co., Ltd.

Claims (12)

[Claims] 1. A vibrating plate and a phase transition type actuator are joined together, and the phase transition type actuator presses the ink in the ink liquid chamber through the vibrating plate and ejects the ink from a plurality of nozzles to form an image. The inkjet recording head according to claim 1, wherein the phase transition type actuator is made of a material that causes distortion due to an antiferroelectric phase-ferroelectric phase transition. 2. The ink jet recording head according to claim 1, wherein the strain of the material that causes strain due to the antiferroelectric phase-ferroelectric phase transition is caused by a phase transition due to an electric field. 3. The ink jet recording head according to claim 1, wherein the phase transition type actuator is formed by laminating thin layers of a material that causes strain due to an antiferroelectric phase-ferroelectric phase transition. . 4. The unimorph type actuator in which the phase change actuator is a unimorph type actuator in which a material that causes strain due to an antiferroelectric phase-ferroelectric phase transition and the same material or another material are laminated. The inkjet recording head according to 1. 5. The bimorph type or multimorph type actuator, wherein the phase transition type actuator is a bimorph type or multimorph type actuator in which two or more materials that generate strain due to an antiferroelectric phase-ferroelectric phase transition are laminated. Inkjet recording head. 6. The ink supplied to the ink liquid chamber is solid ink liquefied by a heating element, and the liquid ink is made of a phase-transition material that causes distortion due to an antiferroelectric phase-ferroelectric phase transition. The hot-melt ink jet recording head according to any one of claims 1 to 5, wherein an image is formed by ejecting from a plurality of nozzles by the phase transition actuator. 7. The phase change material is heated by a heating element provided near the antiferroelectric phase-ferroelectric phase change material of the phase change actuator.
2. The inkjet or hot-melt type inkjet recording head described in any one of 1. 8. The vibration plate bonded to the phase transition actuator is characterized in that the thickness of the vibration plate of the part not bonded to the phase transition actuator is thinner than the thickness of the vibration plate of the bonded part. The inkjet recording head according to any one of 1 to 7. 9. A lead zirconate stannate system or a lead zirconate titanate titanate containing at least one of lead zirconate and lead stannate as the material that causes distortion due to the antiferroelectric phase-ferroelectric phase transition. 9. The inkjet recording head according to claim 1, wherein the inkjet recording head is made of ceramics. 10. The composition of the antiferroelectric phase-ferroelectric phase transition material according to claim 7, wherein the composition is Pb _{1 -0.5Z} Nb _Z [(Zr _1-X , Sn _X ) _1-Y Ti _Y ] _1-Z.
O ₃ 0 ≦ X ≦ 0.5, 0 ≦ y ≦ 0.1, 0 ≦ Z ≦ 0.0
2. An inkjet recording head characterized by being 2. 11. The composition of the antiferroelectric phase-ferroelectric phase transition material according to claim 7, wherein the composition is Pb _{1-3 / 2Z} Laz [(Zr _1-X , Sn _X ) _1-Y Ti _Y ] O ₃₀ ≤X. ≦ 0.5, 0 ≦ y ≦ 0.2, 0 ≦ Z ≦ 0.0
2. An inkjet recording head characterized by being 2. 12. The composition of the antiferroelectric phase-ferroelectric phase transition material according to claim 7, wherein Pb _1-X La _X (Zr _1-X , Ti _Y ) _{1-X / 4} O ₃ 0.08 ≦ X ≦ An ink jet recording head characterized in that 0.24, 0 ≦ y ≦ 0.85.