JPH076716A - X-ray measuring device - Google Patents

Abstract

PURPOSE:To easily change an X-ray incident position to an article-to-be- measured. CONSTITUTION:A electron beam 14 emitted from an electron gun 13 is focused by an electrostastic lens 32, and in a focused electron beam 14, an incident point to a positive electrode 15 is made changeable by an electrostatic deflection plate 31. The electron beam 14 radiated onto the positive electrode 15, and an X-ray 16 generated from the radiating point is inputted to an article-to-be- measured 19 on the extended line of a directrix connecting the radiating point and a slit 24. An X-ray reflected from the article-to-be-measured 19 is measured by an X-ray detector 25. The incident point of the X-ray 16 to the article-to-be- measured 19 can be changed by changing the incident point of the electron beam 14 to the positive electrode 15.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention irradiates an anode with an electron beam to generate X-rays, irradiates an object to be measured through a slit for narrowing the X-rays, and measures X-ray reflectance, for example.
The present invention relates to a line measuring device.

[0002]

2. Description of the Related Art In a measuring device using X-rays, when used in a soft X-ray region having a long wavelength even in the X-ray region,
Since the X-ray has a low material transmittance and a large attenuation, it is necessary to perform the measurement in vacuum. A conventional X-ray measuring apparatus is shown in FIG. 2. An electron beam generating unit 12 is connected to an X-ray generating chamber 11, and an electron beam 14 generated from an electron gun 13 in the electron beam generating unit 12 is an X-ray generating chamber 11. The anode 15 in the inside is irradiated, and X-rays 16 peculiar to the anode material are generated from the anode 15. The X-ray generation chamber 11 is connected to the measurement chamber 18 through a connecting pipe 17. Measuring chamber 1
An object to be measured 19 is arranged in the unit 8. A gate valve 21 is provided in the connecting pipe 17, and the X-ray generation chamber 11 and
Suction port 2 independent of measurement chamber 18
A vacuum can be drawn from each of 2, 23.

A slit 2 for narrowing X-rays in the middle of the connecting pipe 17.
4 is provided, and the X-rays 16 generated from the anode 15 that have passed through the slit 24 are irradiated to the object to be measured 19. That is, the X-ray 16 is incident on the intersection of the object to be measured 19 on the extension of the straight line connecting the slit 24 and the irradiation point of the electron beam 14 on the anode 15. DUT 19
The X-rays 16 ′ that have been incident on and are reflected thereby are detected by the X-ray detector 25. In this way, the X of the DUT 19 is measured.
The linear reflectance can be measured. Such a measurement is used, for example, for measuring the reflectance of a multilayer film reflecting mirror for X-rays. Other than the measurement of reflectance, the same measurement is performed by irradiating X-rays.

[0004]

Problem to be Solved by the Invention For example, 120 × 120
When measuring the reflectance of a relatively large reflecting mirror such as mm, it is necessary to measure not only one point but the reflectance of several points of the reflecting mirror. DUT 1 in other cases
Not only one point but also the number of points where X-rays may be irradiated for measurement. In such a case, conventionally, the position of the object to be measured 19 is moved and measured. In order to release the vacuum on the measurement chamber 18 side,
The object to be measured 19 was moved, then evacuated, and another portion of the object to be measured 19 was irradiated with X-rays. That is, it is necessary to release the vacuum, move the object to be measured, and evacuate each time the X-ray irradiation point of the object to be measured 19 is changed, which makes the measurement difficult. Further, the object to be measured can be moved by a vacuum motor or the like without releasing the vacuum state on the chamber 18 side, but in this case the apparatus becomes complicated and expensive.

[0005]

According to the present invention, there is provided the deflection means capable of deflecting the electron beam to change the irradiation position on the anode surface.

[0006]

1 shows an embodiment of the present invention, in which parts corresponding to those in FIG. 2 are designated by the same reference numerals. In this embodiment, an electrostatic deflection plate 31 is provided as a means for deflecting the electron beam 14. That is, the deflector plate 31 includes the electron gun 13 and the anode 1.
It is provided between 5 and. In this example, a focusing means 32 for focusing the electron beam 14 between the deflecting plate 31 and the electron gun 13, and in this example, an electrostatic lens is used so that the electron beam 14 has the smallest thickness on the anode 15. To be This focusing means 32
The electron beam 14 focused by is deflected two-dimensionally by the deflection plate 31, and the irradiation point on the anode 15 can be changed.

Due to this structure, the deflection plate 3
When the irradiation point of the electron beam 14 with respect to the anode 15 is changed from the position shown in FIG. 2A to the position shown in FIG. 1A by controlling the voltage applied to the anode 15, the anode 15
2A is different from the case of FIG. 2A in that the extension line of the line connecting the irradiation point with respect to and the slit 24 intersects with the DUT 19. That is, the irradiation point of the X-ray on the object to be measured 19 is changed. Therefore, without moving the DUT 19,
The X-ray irradiation point can be performed by controlling the voltage applied to the deflection plate 31.

[0008]

As described above, according to the present invention, by deflecting the electron beam and changing the irradiation point to the anode,
The point of incidence of X-rays on the DUT can be changed, and there is no need to move the DUT in a vacuum or release the vacuum to move it. The incident position on the top can be changed

[Brief description of drawings]

FIG. 1A is a plan view showing an embodiment of the present invention, and B is a side view showing an X-ray generation section thereof.

FIG. 2A is a plan view showing a conventional X-ray measuring apparatus, and B is a side view showing an X-ray generating unit thereof.

Claims (1)

[Claims] 1. An X-ray is produced by irradiating the anode with an electron beam emitted from the cathode.
In an X-ray measuring apparatus for generating an electron beam and irradiating an object to be measured through a slit for narrowing the X-ray, a deflection means capable of deflecting the electron beam to change the irradiation position on the anode surface is provided. An X-ray measuring device characterized in that