JPH0762507B2 - pipe - Google Patents
pipeInfo
- Publication number
- JPH0762507B2 JPH0762507B2 JP61052667A JP5266786A JPH0762507B2 JP H0762507 B2 JPH0762507 B2 JP H0762507B2 JP 61052667 A JP61052667 A JP 61052667A JP 5266786 A JP5266786 A JP 5266786A JP H0762507 B2 JPH0762507 B2 JP H0762507B2
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- resin
- ultrapure water
- melt index
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は、ポリエーテルエーテルケトン樹脂よりなる機
械強度、耐熱性、耐薬品性、耐水性に優れ、かつ有機物
等の溶出の少ないパイプに関する。TECHNICAL FIELD The present invention relates to a pipe made of a polyetheretherketone resin, which is excellent in mechanical strength, heat resistance, chemical resistance, and water resistance, and which elutes little organic matter.
（従来の技術） 従来、半導体製造分野で使用される超純水用のプラスチ
ック製パイプには、硬質塩化ビニル樹脂（硬質塩ビと略
す）、ポリビニリデンフルオライド樹脂PVdF樹脂と略
す）およびテトラフルオロエチレン〜パーフルオロアル
キルビニルエーテル共重合体樹脂（PFA樹脂と略す）が
広く用いられていた。(Prior Art) Conventionally, plastic pipes for ultrapure water used in the semiconductor manufacturing field include hard vinyl chloride resin (abbreviated as hard PVC), polyvinylidene fluoride resin and PVdF resin, and tetrafluoroethylene. ~ Perfluoroalkyl vinyl ether copolymer resin (abbreviated as PFA resin) was widely used.
（発明が解決しようとする問題点） 最近、半導体は高集積化が進み、洗浄に用いられる純水
についても非常に高い純度が要求されている。(Problems to be Solved by the Invention) Recently, semiconductors have been highly integrated, and pure water used for cleaning is also required to have extremely high purity.
反面、純度の高い水を使用する為、従来のプラスチック
製パイプでは溶出した有機物質の為に細菌等による汚染
の問題が生じてきた。この為、純粋を100℃近くまで加
熱して、殺菌することが必要となっている。On the other hand, since high-purity water is used, conventional plastic pipes have a problem of contamination by bacteria and the like due to the eluted organic substances. For this reason, it is necessary to sterilize the pure by heating it to near 100 ° C.
しかるに、従来のプラスチック製パイプに使用されてい
る素材では耐熱性、さらに耐熱水性が不足しており、種
々の問題を生じていた。例えば、硬質塩ビではパイプが
変形する。PVdF樹脂ではパイプが変色し、脆くなる。さ
らに、PFA樹脂ではパイプの形状が変化し、脆くなると
いった問題があった。However, the materials used for the conventional plastic pipes lack heat resistance and hot water resistance, causing various problems. For example, a pipe is deformed in hard PVC. PVdF resin discolors the pipe and makes it brittle. Furthermore, the PFA resin has a problem that the shape of the pipe changes and becomes brittle.
（問題を解決するための手段） 本発明者らは機械強度、耐熱性、耐薬品性、耐水性に優
れ、かつ有機物等の溶出の少ないパイプにつき種々検討
した結果、素材樹脂としてポリエーテルエーテルケトン
樹脂が最適であることを見出し、本発明を完成した。(Means for Solving the Problem) The present inventors have conducted various studies on pipes having excellent mechanical strength, heat resistance, chemical resistance, water resistance, and little elution of organic substances, etc. The inventors have found that a resin is optimal and have completed the present invention.
すなわち、本発明は、半導体製造分野で使用される超純
水用のプラスチック製パイプにおいて、当該パイプが、
次式（１）に表される繰り返し構造単位を有し、360
℃、2.16kg荷重の条件下で測定したメルトインデックス
の値が１〜5g/10minの範囲にあることを特徴とするポリ
エーテルエーテルケトン樹脂を主体としてなる超純水用
プラスチック製パイプである。That is, the present invention is a plastic pipe for ultrapure water used in the semiconductor manufacturing field, wherein the pipe is
Having a repeating structural unit represented by the following formula (1), 360
A plastic pipe for ultrapure water, which is mainly composed of a polyetheretherketone resin, characterized in that the melt index value measured under the condition of ° C and 2.16 kg load is in the range of 1 to 5 g / 10 min.
本発明で用いられるポリエーテルエーテルケトン樹脂と
しては、式（１）で表される繰返し単位を有する結晶性
の熱可塑性芳香族系樹脂である。 The polyether ether ketone resin used in the present invention is a crystalline thermoplastic aromatic resin having a repeating unit represented by the formula (1).
本発明において、ASTM D1238に準じ、360℃、2.16Kg荷
重条件下で測定したメルトインデックスが１〜5g/10min
の範囲のポリエーテルエーテルケトンが好ましく用いら
れる。なお、本発明の目的を損なわない範囲で少量の充
填材、硝子繊維、炭素繊維、チタン酸カリ繊維等の繊維
補強材と混合して用いることも出来る、上記したポリエ
ーテルエーテルケトン樹脂は、射出成形法、押出成形
法、トランスファー成形法等公知の成形方法によりパイ
プに成形することが出来る。 In the present invention, according to ASTM D1238, the melt index measured under 360 ° C., 2.16 kg load condition is 1 to 5 g / 10 min.
Polyether ether ketone in the range of is preferably used. In addition, a small amount of filler, glass fiber, carbon fiber, potassium titanate fiber, or the like can be mixed and used as a fiber reinforcing material within the range of not impairing the object of the present invention. The pipe can be molded by a known molding method such as a molding method, an extrusion molding method, or a transfer molding method.
（実施例） 以下、実施例により本発明を説明する。(Examples) Hereinafter, the present invention will be described with reference to Examples.
実施例１ ポリエーテルエーテルケトンとして英国ICI社製PEEK450
G（商品名）（メルトインデックス2.8g/10min）をパイ
プ押出成形機によりシリンダー温度390℃で外径32mm、
肉厚3mmのパイプを成形した。Example 1 PEEK450 manufactured by British ICI as a polyether ether ketone
G (trade name) (melt index 2.8 g / 10 min) was pipe extruded at a cylinder temperature of 390 ° C and an outer diameter of 32 mm,
A pipe with a wall thickness of 3 mm was molded.
子のようにして得られたパイプを、長さ5cmに切断し、
トリクレン、メタノール、純水で順次洗浄した後、23℃
および60℃の純水に侵漬した。７日間放置後、（株）島
津製作所製TOTAL ORGANIC CARBONANALYZER“TOC500形”
（商標）を用いてパイプを侵漬した純水の全有機炭素量
（TOCと略す）を測定したところそれぞれ3.2ppm、5.0pp
mであった。また上記と同様に長さ5cmに切断したパイプ
をオートクレーブ中にて、120℃の純水に７日間侵漬し
た後、表面状態を観察したが、クラック、われ等は見ら
れなかった。Cut the pipe obtained as a child to a length of 5 cm,
After sequentially washing with trichlene, methanol and pure water, 23 ℃
And immersed in pure water at 60 ° C. After leaving for 7 days, TOTAL ORGANIC CARBONANALYZER “TOC500 type” manufactured by Shimadzu Corporation
The total organic carbon content (abbreviated as TOC) of the pure water in which the pipe was soaked with (trademark) was measured to be 3.2 ppm and 5.0 pp, respectively.
It was m. A pipe cut into a length of 5 cm in the same manner as above was immersed in pure water at 120 ° C for 7 days in an autoclave, and then the surface condition was observed, but no cracks or cracks were found.
さらに、上記の得られたパイプを、引っ張り速度5mm/mi
nの条件下で測定した。結果を表−１に示す。Furthermore, the pipe obtained above was pulled at a pulling speed of 5 mm / mi.
It was measured under the condition of n. The results are shown in Table-1.
比較例１ 硬質塩ビよりなる外径32mm 肉厚3mmのパイプを使用し、
実施例１と同様の方法により23℃および60℃の純水に侵
漬し、全有機炭素量を測定したところそれぞれ3.2ppm、
14.0ppmであった。Comparative Example 1 Using a pipe made of hard PVC with an outer diameter of 32 mm and a wall thickness of 3 mm,
In the same manner as in Example 1, the sample was immersed in pure water at 23 ° C. and 60 ° C. and the total amount of organic carbon was measured to be 3.2 ppm,
It was 14.0 ppm.
このパイプをさらに実施例１と同じくオートクレーブ中
にて、120℃の純水に侵漬したところパイプが変形し使
用に耐えなかった。When this pipe was further immersed in pure water at 120 ° C. in an autoclave as in Example 1, the pipe was deformed and could not be used.
比較例２ メルトインデックス0.4g/10minのポリエーテルエーテル
ケトンを選択した以外は実施例１と同様にして、外径32
mm、肉厚3mmのパイプを成形した。しかし樹脂の溶融粘
度が高いために押出し抵抗が大きくパイプの吐出が安定
しなかった。そのため、パイプの内外面は微弱なスジが
認められ、表面の光沢も悪く概観は粗悪なものでしかな
かった。また、得られたパイプを実施例１と同様の方法
で引張強度を測定し、結果を表−１に示す。Comparative Example 2 An outer diameter of 32 was obtained in the same manner as in Example 1 except that polyether ether ketone having a melt index of 0.4 g / 10 min was selected.
mm, wall thickness 3 mm was molded. However, since the melt viscosity of the resin was high, the extrusion resistance was large and the discharge of the pipe was not stable. Therefore, slight streaks were observed on the inner and outer surfaces of the pipe, and the surface had poor gloss and the appearance was poor. The tensile strength of the obtained pipe was measured by the same method as in Example 1, and the results are shown in Table 1.
「比較例３ メルトインデックス7.6g/10minのポリエーテルエーテル
ケトンを選択した以外は実施例１と同様の方法で、外径
32mm、肉厚3mmのパイプを成形した。得られたパイプの
表面状態は良好であったが、表−１に示すごとく、実施
例１と同様の方法で測定した引張強度が小さく、機械強
度が不充分なものであった。[Comparative Example 3] The same procedure as in Example 1 was carried out except that polyetheretherketone having a melt index of 7.6 g / 10 min was selected.
A pipe with a thickness of 32 mm and a thickness of 3 mm was molded. The surface condition of the obtained pipe was good, but as shown in Table 1, the tensile strength measured by the same method as in Example 1 was small and the mechanical strength was insufficient.
（発明の効果） 本発明の、ポリエーテルエーテルケトン樹脂よりなるパ
イプは機械強度、耐熱製、耐薬品性、耐水性に優れ、か
つ有機物の溶出が少なく、半導体製造分野で使用される
超純水用のパイプとして好のましいものである。 (Effect of the invention) The pipe made of polyetheretherketone resin of the present invention has excellent mechanical strength, heat resistance, chemical resistance, water resistance, and little elution of organic substances, and is ultrapure water used in the field of semiconductor manufacturing. It's a good pipe for a car.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭59−64708（ＪＰ，Ａ) 特開 昭59−145896（ＪＰ，Ａ) ─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-59-64708 (JP, A) JP-A-59-145896 (JP, A)
Claims (1)
ラスチック製パイプにおいて、当該パイプが、次式
（１）に表される繰り返し単位を有し、360℃、2.16kg
荷重の条件下で測定したメルトインデックスの値が１〜
5g/10minの範囲にあることを特徴とするポリエーテルエ
ーテルケトン樹脂を主体としてなる超純水用プラスチッ
ク製パイプ。 1. A plastic pipe for ultrapure water used in the semiconductor manufacturing field, the pipe having a repeating unit represented by the following formula (1), 360 ° C., 2.16 kg.
The value of the melt index measured under load is 1 to
A plastic pipe for ultrapure water that is mainly composed of polyetheretherketone resin, which is in the range of 5 g / 10 min.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61052667A JPH0762507B2 (en) | 1986-03-12 | 1986-03-12 | pipe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61052667A JPH0762507B2 (en) | 1986-03-12 | 1986-03-12 | pipe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62215186A JPS62215186A (en) | 1987-09-21 |
| JPH0762507B2 true JPH0762507B2 (en) | 1995-07-05 |
Family
ID=12921222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61052667A Expired - Lifetime JPH0762507B2 (en) | 1986-03-12 | 1986-03-12 | pipe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0762507B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02143095A (en) * | 1988-11-22 | 1990-06-01 | Mitsui Toatsu Chem Inc | Material of heat exchanger |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5864708A (en) * | 1981-10-12 | 1983-04-18 | 三菱電機株式会社 | Electrically insulatingly coated conduit for electrode of electrically heating hydrocarbon underground resources |
| JPS59145896A (en) * | 1983-02-09 | 1984-08-21 | 三菱電機株式会社 | Electrode support conduit for electrical heating of underground hydrocarbon resources |
-
1986
- 1986-03-12 JP JP61052667A patent/JPH0762507B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62215186A (en) | 1987-09-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |