JPH0760955A - Ink jet recording head and ink jet recorder equipped with the recording head - Google Patents

Ink jet recording head and ink jet recorder equipped with the recording head

Info

Publication number
JPH0760955A
JPH0760955A JP21403193A JP21403193A JPH0760955A JP H0760955 A JPH0760955 A JP H0760955A JP 21403193 A JP21403193 A JP 21403193A JP 21403193 A JP21403193 A JP 21403193A JP H0760955 A JPH0760955 A JP H0760955A
Authority
JP
Japan
Prior art keywords
heating
recording head
resistor
ink
ink jet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21403193A
Other languages
Japanese (ja)
Other versions
JP3157964B2 (en
Inventor
Akira Asai
朗 浅井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP21403193A priority Critical patent/JP3157964B2/en
Publication of JPH0760955A publication Critical patent/JPH0760955A/en
Application granted granted Critical
Publication of JP3157964B2 publication Critical patent/JP3157964B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Ink Jet (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

PURPOSE:To obtain a recording head having a novel heating element wherein heating distribution on a surface of a resistor is equalized and its recorder by a method wherein a heating resistor has a heating part of an approximately circularly annular or fan-like annular surface shape, and its thickness is varied inversely proportional to a distance in a radial direction from a central point of the surface shape. CONSTITUTION:When voltage is impressed by making a current (I) flow radially along a radial direction of a heating resistor, a thickness d (r) of a heating part of the heating resistor is varied inversely proportional to a radial distance (r) from a center of a surface shape. Thereby, a current density i (r) at any point on the heating part at a radial distance (r) apart from the center comes to be as given by the formula (I). In the formula theta is an angle of a fan-like annulus (2pi in the case of a circular annulus). Relation between 'the resistivity (rho) of the resistor and a heating value q (r) per unit time unit area is as given by the formula II. Therefore, the formula III is obtained.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【産業上の利用分野】本発明は、熱エネルギーを利用し
たインクジェット記録ヘッドと、この記録ヘッドを記録
手段として有するインクジェット記録装置とに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet recording head utilizing heat energy and an ink jet recording apparatus having this recording head as recording means.

【０００２】[0002]

【従来の技術】熱エネルギーを利用して液体を加熱・沸
騰させて気泡を発生させることによって液滴を噴出（吐
出）して記録を行うインクジェット記録方式は、高解
像、高速印字が可能で、記録品位も高く、低騒音であ
り、しかもモノクロのみならずカラー画像記録が容易に
行え、普通紙等にも記録ができ、さらに記録ヘッドや装
置全体の小型化が容易であるといった優れた特徴をもっ
ている。この方式のインクジェット記録方式において
は、液体を加熱するための発熱素子が必要である。図５
および図６は、従来の発熱素子を具備したインクジェッ
ト式記録ヘッドの概略的構成を説明するための図であ
る。参照符号１０は記録ヘッド、１１はベース・プレー
ト、１２は基板、１３はノズル樹脂、１４はオリフィ
ス、１５は薄膜抵抗体、１５′はヒーター（発熱部）、
１６は電極、１７はガラス天板、１８は保護膜、１９は
耐キャビテーション膜、２０はフィルター、そして２１
はノズルである。こられの図から明らかなように従来の
発熱素子（電気熱変換体）は、例えば一様の膜厚を有す
る短冊状（長方形）の薄膜抵抗体１５と、この薄膜抵抗
体１５の長手方向に沿って対向かつ一定距離離間するよ
うにして薄膜抵抗体１５上に配置された２本の電極１６
とからなる。２本の電極の長手方向自由端によって挟ま
れた薄膜抵抗体１５上の領域が発熱部１５′としてノズ
ル２１内のインクを瞬間的に加熱してオリフィス１４か
らインク滴を吐出させるものである。このような構成か
らなる発熱素子は、発熱部１５′が均一な厚さを有し、
かつ長方形状の表面を有することから、一様な発熱分布
が得られるという特徴がある。2. Description of the Related Art An ink jet recording method in which a liquid is ejected (discharged) by heating and boiling a liquid by using thermal energy to generate bubbles and recording is possible with high resolution and high speed printing. Excellent characteristics such as high recording quality, low noise, easy color image recording not only in monochrome but also on plain paper, and easy downsizing of the recording head and the entire device. I have In this type of ink jet recording system, a heating element for heating the liquid is required. Figure 5
And FIG. 6 is a diagram for explaining a schematic configuration of an ink jet recording head including a conventional heating element. Reference numeral 10 is a recording head, 11 is a base plate, 12 is a substrate, 13 is nozzle resin, 14 is an orifice, 15 is a thin film resistor, 15 'is a heater (heat generating portion),
16 is an electrode, 17 is a glass top plate, 18 is a protective film, 19 is an anti-cavitation film, 20 is a filter, and 21
Is a nozzle. As is apparent from these figures, the conventional heating element (electrothermal converter) is, for example, a strip-shaped (rectangular) thin film resistor 15 having a uniform film thickness and a thin film resistor 15 in the longitudinal direction. Two electrodes 16 arranged on the thin film resistor 15 so as to face each other and be separated by a certain distance.
Consists of. A region on the thin film resistor 15 sandwiched by the free ends of the two electrodes in the longitudinal direction serves as a heat generating portion 15 ′ that instantaneously heats the ink in the nozzle 21 to eject an ink droplet from the orifice 14. In the heating element having such a structure, the heating portion 15 'has a uniform thickness,
In addition, since it has a rectangular surface, it has a characteristic that a uniform heat generation distribution can be obtained.

【０００３】[0003]

【発明が解決しようとする課題】記録ヘッドを設計する
場合、様々な形の抵抗体を用いることが可能であるなら
ば、様々な要求に応じた記録ヘッドの設計が可能となろ
う。しかし、従来のように、一様な膜厚の発熱素子を用
いた場合、長方形以外の形状の抵抗体を用いると、抵抗
体表面の発熱分布が一様とならないという問題が生じ
る。例えば、特公昭59-21943号および特開昭62-201254
号には、階調記録を実現するためにそのような抵抗体が
提案されているが、抵抗体表面の発熱分布が一様となら
ないため、抵抗体表面の一部分からこの表面に接するイ
ンク液の沸騰が開始されるので、特定部分に熱ストレス
が集中して抵抗体の耐久性を低下させたり、気泡成長の
安定性が悪くなる等の問題点があった。さらに、特公平
2-3349号に開示された抵抗体は、耐久性向上のために発
熱素子上において気泡が消滅する部分に導電性領域を設
けるが、長方形以外の形状からなる従来の抵抗体では発
熱分布が生じてしまうという問題点があった。In designing a recording head, if various types of resistors can be used, it will be possible to design the recording head according to various requirements. However, when a heating element having a uniform film thickness is used as in the conventional case, when a resistor having a shape other than a rectangular shape is used, there is a problem that the heat generation distribution on the surface of the resistor is not uniform. For example, JP-B-59-21943 and JP-A-62-201254.
No. 6, although such a resistor is proposed in order to realize gradation recording, since the heat generation distribution on the resistor surface is not uniform, the ink liquid contacting this surface from a part of the resistor surface Since boiling starts, heat stress concentrates on a specific portion, which deteriorates the durability of the resistor and deteriorates the stability of bubble growth. Furthermore,
The resistor disclosed in 2-3349 is provided with a conductive region in a portion where bubbles disappear on the heating element for improving durability, but a conventional resistor having a shape other than a rectangle causes heat generation distribution. There was a problem that it would end up.

【０００４】そこで、本発明は、抵抗体表面の発熱分布
が一様となるような新規の発熱素子を有する記録ヘッド
及び該記録ヘッドを具備した記録装置を提供することを
目的とする。Therefore, it is an object of the present invention to provide a recording head having a novel heating element such that the distribution of heat generation on the surface of the resistor is uniform, and a recording apparatus equipped with the recording head.

【０００５】[0005]

【課題を解決するための手段】上記課題を解決するため
に、本発明にもとづく記録ヘッドは、出口からインクを
吐出するためにインクに膜沸騰を生じさせるための熱エ
ネルギを発生する発熱抵抗体と、該発熱抵抗体に接続し
た一対の配線電極とで構成される発熱素子を有するイン
クジェット記録ヘッドにおいて、発熱抵抗体は概略円環
または扇環の表面形状の発熱部を有し、また発熱部の厚
さは前記表面形状の中心点から径方向の距離に反比例し
て変化していることを特徴とする。さらに、本発明にも
とづく記録装置は、このような新規の記録ヘッドを有す
るもので、該記録ヘッドを用いて画像情報を被記録媒体
に記録することを特徴とする。In order to solve the above-mentioned problems, a recording head according to the present invention has a heating resistor for generating heat energy for causing film boiling in ink for discharging ink from an outlet. And a heating element composed of a pair of wiring electrodes connected to the heating resistor, the heating resistor has a heating portion having a substantially circular or fan-shaped surface shape, and the heating portion Is changed in inverse proportion to the radial distance from the center point of the surface shape. Further, the recording apparatus according to the present invention has such a novel recording head, and is characterized by recording image information on a recording medium using the recording head.

【０００６】[0006]

【作用】発熱抵抗体の半径方向に沿って放射状に電流
（Ｉ）が流れるようにして電圧を印加すると、発熱抵抗
体の発熱部の厚さ（ｄ（ｒ））は表面形状の中心から径
方向の距離（ｒ）に反比例して変化するようにして形成
されているので、中心から径方向へ距離ｒだけ離れた発
熱部上の任意の点における電流密度（ｉ（ｒ））は、When the voltage is applied so that the current (I) flows radially along the radial direction of the heating resistor, the thickness (d (r)) of the heating portion of the heating resistor is measured from the center of the surface shape. Since it is formed so as to change in inverse proportion to the distance (r) in the direction, the current density (i (r)) at an arbitrary point on the heat generating portion radially separated from the center by the distance r is

【０００７】[0007]

【数１】 [Equation 1]

【０００８】となる。ここで、θは扇環の張る角度（円
環の場合は２π）である。抵抗体の抵抗率（ρ）と、単
位時間単位面積あたりの発熱量（ｑ（ｒ））との関係
は、[0008] Here, θ is an angle formed by the fan ring (2π in the case of a circular ring). The relationship between the resistivity (ρ) of the resistor and the heat generation amount (q (r)) per unit time per unit area is

【０００９】[0009]

【数２】 q(r)＝ i(r)2ρd(r) (2) であるから、[Number 2] because it is q (r) = i (r ) 2 ρd (r) (2),

【００１０】[0010]

【数３】 [Equation 3]

【００１１】となる。[0011]

【００１２】したがって、ｄ（ｒ）がｒ2 に反比例して
いれば、ｑ（ｒ）は場所によらず一定となる。ただし、
（３）式が妥当であるための条件として、ｄ（ｒ2 ）＜
ｄ（ｒ1 ）＜ｒ2 −ｒ1 を要する。ここでｒ1 は内側周
囲部の半径、ｒ2 は外側周縁部の半径である。Therefore, if d (r) is inversely proportional to r 2 , q (r) will be constant regardless of location. However,
As a condition for the expression (3) to be valid, d (r 2 ) <
d (r 1 ) <r 2 −r 1 is required. Here, r 1 is the radius of the inner peripheral portion, and r 2 is the radius of the outer peripheral portion.

【００１３】[0013]

【実施例】以下、図面を参照して本発明の実施例を詳細
に説明する。Embodiments of the present invention will now be described in detail with reference to the drawings.

【００１４】＜実施例１＞図１および図２は、本発明に
もとづく円環状の発熱部を有する発熱素子１の一実施例
を示すものである。厚さ５２５μｍのSi基板２上に、厚
さ２．５μｍの表面酸化層３を形成した後、スパッタリ
ングとエッチングとによって、厚さ０．５μｍのＡｌ電
極４、厚さ１．０μｍの絶縁層５、中心点０から径方向
の距離ｒに反比例した厚さ（０．４μｍ〜０．１μｍ）
の薄膜ＨｆＢ2 抵抗層６、厚さ０．５μｍのＡｌ電極
７、厚さ１．０μｍのＳｉＯ2 絶縁層８、そして厚さ
０．５μｍのＴａ保護層９を形成したものである。発熱
素子の発熱部６ａは円環状で、内側周縁部の半径は２０
μｍ、外側周縁部の半径は４０μｍである。本実施例で
は、余泡は中心点Ｏにて消滅するので、発熱部６ａへの
影響を与えない。従って、耐久性，発泡安定性の面で好
ましい効果がある。<Embodiment 1> FIGS. 1 and 2 show an embodiment of a heating element 1 having an annular heating portion according to the present invention. After forming a surface oxide layer 3 having a thickness of 2.5 μm on a Si substrate 2 having a thickness of 525 μm, an Al electrode 4 having a thickness of 0.5 μm and an insulating layer 5 having a thickness of 1.0 μm are formed by sputtering and etching. , The thickness inversely proportional to the radial distance r from the center point 0 (0.4 μm to 0.1 μm)
Of the thin film HfB 2 resistance layer 6, the Al electrode 7 having a thickness of 0.5 μm, the SiO 2 insulating layer 8 having a thickness of 1.0 μm, and the Ta protective layer 9 having a thickness of 0.5 μm. The heat generating portion 6a of the heat generating element has an annular shape, and the inner peripheral edge has a radius of 20.
μm, and the radius of the outer peripheral portion is 40 μm. In this embodiment, the residual bubbles disappear at the center point O, so that they do not affect the heat generating portion 6a. Therefore, there are favorable effects in terms of durability and foaming stability.

【００１５】＜実施例２＞図３および図４は、本発明に
もとづく扇環状の発熱部を有する発熱素子の一実施例を
示すものである。厚さ５２５μｍのＳｉ基板１上に、厚
さ２．５μｍの表面酸化層２を形成した後、スパッタリ
ングとエッチングとによって、厚さ０．５μｍのＡｌ電
極３、厚さ１．０μｍの絶縁層４、中心点０から径方向
の距離ｒに反比例した厚さ（０．４μｍ〜０．１μｍ）
のＨｆＢ2 抵抗層５、厚さ０．５μｍのＡｌ電極６、厚
さ１．０μｍのＳｉＯ2 絶縁層７、そして厚さ０．５μ
ｍのＴａ保護層８を形成したものである。発熱素子の発
熱部６ａは扇環状（扇角θ）で、内側周縁部の半径は２
０μｍ、外側周縁部の半径は４０μｍである。ここでは
θ＝９０。の場合を図示伏、θ≧１８０。とすれば実施
例１と同様、耐久性，発泡安定性がさらに向上する。<Embodiment 2> FIGS. 3 and 4 show an embodiment of a heating element having a fan-shaped heating portion according to the present invention. After forming a surface oxide layer 2 having a thickness of 2.5 μm on a Si substrate 1 having a thickness of 525 μm, an Al electrode 3 having a thickness of 0.5 μm and an insulating layer 4 having a thickness of 1.0 μm are formed by sputtering and etching. , The thickness inversely proportional to the radial distance r from the center point 0 (0.4 μm to 0.1 μm)
HfB 2 resistance layer 5, 0.5 μm thick Al electrode 6, 1.0 μm thick SiO 2 insulating layer 7, and 0.5 μm thick
m of the Ta protective layer 8 is formed. The heat generating portion 6a of the heat generating element is fan-shaped (fan angle θ), and the radius of the inner peripheral edge is 2
The radius of the outer peripheral portion is 0 μm, and the radius is 40 μm. Here, θ = 90. In the case of No., θ ≧ 180. Then, similarly to Example 1, the durability and foaming stability are further improved.

【００１６】（その他）なお、本発明は、特にインクジ
ェット記録方式の中でも、インク吐出を行わせるために
利用されるエネルギとして熱エネルギを発生する手段
（例えば電気熱変換体やレーザ光等）を備え、前記熱エ
ネルギによりインクの状態変化を生起させる方式の記録
ヘッド、記録装置において優れた効果をもたらすもので
ある。かかる方式によれば記録の高密度化，高精細化が
達成できるからである。(Others) In particular, the present invention includes means (for example, an electrothermal converter or a laser beam) for generating heat energy as energy used for ejecting ink, particularly in the ink jet recording system. The present invention brings about excellent effects in a recording head and a recording apparatus of the type in which the state of ink is changed by the heat energy. This is because such a system can achieve high density recording and high definition recording.

【００１７】その代表的な構成や原理については、例え
ば、米国特許第４７２３１２９号明細書，同第４７４０
７９６号明細書に開示されている基本的な原理を用いて
行うものが好ましい。この方式は所謂オンデマンド型，
コンティニュアス型のいずれにも適用可能であるが、特
に、オンデマンド型の場合には、液体（インク）が保持
されているシートや液路に対応して配置されている電気
熱変換体に、記録情報に対応していて核沸騰を越える急
速な温度上昇を与える少なくとも１つの駆動信号を印加
することによって、電気熱変換体に熱エネルギを発生せ
しめ、記録ヘッドの熱作用面に膜沸騰を生じさせて、結
果的にこの駆動信号に一対一で対応した液体（インク）
内の気泡を形成できるので有効である。この気泡の成
長，収縮により吐出用開口を介して液体（インク）を吐
出させて、少なくとも１つの滴を形成する。この駆動信
号をパルス形状とすると、即時適切に気泡の成長収縮が
行われるので、特に応答性に優れた液体（インク）の吐
出が達成でき、より好ましい。このパルス形状の駆動信
号としては、米国特許第４４６３３５９号明細書，同第
４３４５２６２号明細書に記載されているようなものが
適している。なお、上記熱作用面の温度上昇率に関する
発明の米国特許第４３１３１２４号明細書に記載されて
いる条件を採用すると、さらに優れた記録を行うことが
できる。With regard to its typical structure and principle, see, for example, US Pat. Nos. 4,723,129 and 4740.
What is done using the basic principles disclosed in 796 is preferred. This method is a so-called on-demand type,
It can be applied to any of the continuous type, but especially in the case of the on-demand type, it can be applied to the sheet holding the liquid (ink) or the electrothermal converter arranged corresponding to the liquid path. By applying at least one drive signal corresponding to the recording information and giving a rapid temperature rise exceeding nucleate boiling, heat energy is generated in the electrothermal converter, and film boiling is caused on the heat acting surface of the recording head. Liquid (ink) corresponding to this drive signal in a one-to-one correspondence
It is effective because bubbles can be formed inside. Due to the growth and contraction of the bubbles, the liquid (ink) is ejected through the ejection opening to form at least one droplet. It is more preferable to make this drive signal into a pulse shape, because the bubble growth and contraction are immediately and appropriately performed, so that the ejection of the liquid (ink) with excellent responsiveness can be achieved. As the pulse-shaped drive signal, those described in US Pat. Nos. 4,463,359 and 4,345,262 are suitable. If the conditions described in US Pat. No. 4,313,124 of the invention relating to the rate of temperature rise on the heat acting surface are adopted, more excellent recording can be performed.

【００１８】記録ヘッドの構成としては、上述の各明細
書に開示されているような吐出口，液路，電気熱変換体
の組合せ構成（直線状液流路または直角液流路）の他に
熱作用部が屈曲する領域に配置されている構成を開示す
る米国特許第４５５８３３３号明細書，米国特許第４４
５９６００号明細書を用いた構成も本発明に含まれるも
のである。加えて、複数の電気熱変換体に対して、共通
するスリットを電気熱変換体の吐出部とする構成を開示
する特開昭５９−１２３６７０号公報や熱エネルギの圧
力波を吸収する開孔を吐出部に対応させる構成を開示す
る特開昭５９−１３８４６１号公報に基いた構成として
も本発明の効果は有効である。すなわち、記録ヘッドの
形態がどのようなものであっても、本発明によれば記録
を確実に効率よく行うことができるようになるからであ
る。As the constitution of the recording head, in addition to the combination constitution of the ejection port, the liquid passage, and the electrothermal converter (the linear liquid passage or the right-angled liquid passage) as disclosed in the above-mentioned respective specifications. US Pat. No. 4,558,333, US Pat. No. 4,558,333, which discloses a configuration in which a heat acting portion is arranged in a bending region.
The structure using the specification of No. 59600 is also included in the present invention. In addition, Japanese Unexamined Patent Publication No. 59-123670 discloses a configuration in which a common slit is used as a discharge portion of the electrothermal converter for a plurality of electrothermal converters, and an opening for absorbing a pressure wave of thermal energy is provided. The effect of the present invention is effective even if the configuration corresponding to the ejection portion is disclosed in JP-A-59-138461. That is, according to the present invention, recording can be surely and efficiently performed regardless of the form of the recording head.

【００１９】さらに、記録装置が記録できる記録媒体の
最大幅に対応した長さを有するフルラインタイプの記録
ヘッドに対しても本発明は有効に適用できる。そのよう
な記録ヘッドとしては、複数記録ヘッドの組合せによっ
てその長さを満たす構成や、一体的に形成された１個の
記録ヘッドとしての構成のいずれでもよい。Furthermore, the present invention can be effectively applied to a full-line type recording head having a length corresponding to the maximum width of a recording medium which can be recorded by the recording apparatus. Such a recording head may have a configuration that satisfies the length by a combination of a plurality of recording heads or a configuration as one recording head integrally formed.

【００２０】加えて、上例のようなシリアルタイプのも
のでも、装置本体に固定された記録ヘッド、あるいは装
置本体に装着されることで装置本体との電気的な接続や
装置本体からのインクの供給が可能になる交換自在のチ
ップタイプの記録ヘッド、あるいは記録ヘッド自体に一
体的にインクタンクが設けられたカートリッジタイプの
記録ヘッドを用いた場合にも本発明は有効である。In addition, even in the case of the serial type as in the above example, the recording head fixed to the main body of the apparatus or the electrical connection to the main body of the apparatus and the ink from the main body of the apparatus by being attached to the main body of the apparatus. The present invention is also effective when a replaceable chip-type recording head that can be supplied or a cartridge-type recording head in which an ink tank is integrally provided in the recording head itself is used.

【００２１】また、本発明の記録装置の構成として、記
録ヘッドの吐出回復手段、予備的な補助手段等を付加す
ることは本発明の効果を一層安定できるので、好ましい
ものである。これらを具体的に挙げれば、記録ヘッドに
対してのキャッピング手段、クリーニング手段、加圧或
は吸引手段、電気熱変換体或はこれとは別の加熱素子或
はこれらの組み合わせを用いて加熱を行う予備加熱手
段、記録とは別の吐出を行なう予備吐出手段を挙げるこ
とができる。Further, as the constitution of the recording apparatus of the present invention, it is preferable to add an ejection recovery means of the recording head, a preliminary auxiliary means and the like because the effect of the present invention can be further stabilized. Specifically, heating is performed by using a capping unit, a cleaning unit, a pressure or suction unit for the recording head, an electrothermal converter or a heating element other than this, or a combination thereof. Examples thereof include a preliminary heating unit for performing the discharge and a preliminary discharge unit for performing discharge different from the recording.

【００２２】また、搭載される記録ヘッドの種類ないし
個数についても、例えば単色のインクに対応して１個の
みが設けられたものの他、記録色や濃度を異にする複数
のインクに対応して複数個数設けられるものであっても
よい。すなわち、例えば記録装置の記録モードとしては
黒色等の主流色のみの記録モードだけではなく、記録ヘ
ッドを一体的に構成するか複数個の組み合わせによるか
いずれでもよいが、異なる色の複色カラー、または混色
によるフルカラーの各記録モードの少なくとも一つを備
えた装置にも本発明は極めて有効である。Regarding the type or number of recording heads to be mounted, for example, only one is provided corresponding to a single color ink, or a plurality of inks having different recording colors and densities are supported. A plurality of pieces may be provided. That is, for example, the recording mode of the recording apparatus is not limited to the recording mode of only the mainstream color such as black, but it may be either the recording head is integrally formed or a plurality of combinations may be used. The present invention is also extremely effective for an apparatus provided with at least one of full-color recording modes by color mixing.

【００２３】さらに加えて、以上説明した本発明実施例
においては、インクを液体として説明しているが、室温
やそれ以下で固化するインクであって、室温で軟化もし
くは液化するものを用いてもよく、あるいはインクジェ
ット方式ではインク自体を３０℃以上７０℃以下の範囲
内で温度調整を行ってインクの粘性を安定吐出範囲にあ
るように温度制御するものが一般的であるから、使用記
録信号付与時にインクが液状をなすものを用いてもよ
い。加えて、熱エネルギによる昇温を、インクの固形状
態から液体状態への状態変化のエネルギとして使用せし
めることで積極的に防止するため、またはインクの蒸発
を防止するため、放置状態で固化し加熱によって液化す
るインクを用いてもよい。いずれにしても熱エネルギの
記録信号に応じた付与によってインクが液化し、液状イ
ンクが吐出されるものや、記録媒体に到達する時点では
すでに固化し始めるもの等のような、熱エネルギの付与
によって初めて液化する性質のインクを使用する場合も
本発明は適用可能である。このような場合のインクは、
特開昭５４−５６８４７号公報あるいは特開昭６０−７
１２６０号公報に記載されるような、多孔質シート凹部
または貫通孔に液状又は固形物として保持された状態
で、電気熱変換体に対して対向するような形態としても
よい。本発明においては、上述した各インクに対して最
も有効なものは、上述した膜沸騰方式を実行するもので
ある。In addition, in the above-described embodiments of the present invention, the ink is described as a liquid, but an ink that solidifies at room temperature or lower and that softens or liquefies at room temperature may be used. Or, in the inkjet system, it is common to control the temperature of the ink itself within the range of 30 ° C. or higher and 70 ° C. or lower to control the temperature so that the viscosity of the ink is within the stable ejection range. Sometimes, a liquid ink may be used. In addition, the temperature rise due to thermal energy is positively prevented by using it as the energy of the state change of the ink from the solid state to the liquid state, or in order to prevent the evaporation of the ink, it is solidified and heated in the standing state. You may use the ink liquefied by. In any case, by applying thermal energy such as ink that is liquefied by applying thermal energy according to the recording signal and liquid ink is ejected, or that begins to solidify when it reaches the recording medium. The present invention can be applied to the case where an ink having a property of being liquefied for the first time is used. In this case, the ink is
JP-A-54-56847 or JP-A-60-7
As described in Japanese Patent No. 1260, it may be configured to face the electrothermal converter in a state of being held as a liquid or a solid in the concave portion or the through hole of the porous sheet. In the present invention, the most effective one for each of the above-mentioned inks is to execute the above-mentioned film boiling method.

【００２４】さらに加えて、本発明インクジェット記録
装置の形態としては、コンピュータ等の情報処理機器の
画像出力端末として用いられるものの他、リーダ等と組
合せた複写装置、さらには送受信機能を有するファクシ
ミリ装置の形態を採るもの等であってもよい。In addition, as a form of the ink jet recording apparatus of the present invention, in addition to the one used as an image output terminal of an information processing apparatus such as a computer, a copying apparatus combined with a reader or the like, and a facsimile apparatus having a transmitting / receiving function are provided. It may be a form or the like.

【００２５】[0025]

【発明の効果】以上説明したように、本発明にもとづく
発熱素子は、薄膜抵抗体と該薄膜抵抗体に接続した一対
の電極とからなる発熱素子において、薄膜抵抗体は表面
形状が概略円環状または扇環状の発熱部を有し、また発
熱部の厚さは表面形状の中心から径方向への距離に反比
例して変化するようにして形成されたものなので、発熱
量は場所によらず一定となるため、発熱部表面から一斉
に沸騰が始まり、気泡成長の安定性、発熱素子の耐久性
を保つことが可能となる。As described above, the heating element according to the present invention is a heating element comprising a thin film resistor and a pair of electrodes connected to the thin film resistor, and the thin film resistor has a substantially annular surface shape. Alternatively, it has a fan-shaped heat generating part, and the thickness of the heat generating part is formed so as to change in inverse proportion to the distance from the center of the surface shape in the radial direction, so the amount of heat generated is constant regardless of location. Therefore, it is possible to start boiling all at once from the surface of the heat generating portion, and maintain the stability of bubble growth and the durability of the heat generating element.

【図面の簡単な説明】[Brief description of drawings]

【図１】本発明にもとづく円環状の発熱部を有する発熱
素子の一実施例の概略的構成を説明するための平面図で
ある。FIG. 1 is a plan view for explaining a schematic configuration of an embodiment of a heating element having an annular heating portion according to the present invention.

【図２】図１のII-II 線に沿う断面図である。FIG. 2 is a sectional view taken along line II-II in FIG.

【図３】本発明にもとづく扇環状の発熱部を有する発熱
素子の一実施例の概略的構成を説明するための平面図で
ある。FIG. 3 is a plan view for explaining a schematic configuration of an example of a heating element having a fan-shaped heating portion according to the present invention.

【図４】図３のIV-IV 線に沿う断面図である。FIG. 4 is a sectional view taken along line IV-IV in FIG.

【図５】従来の発熱素子の概略的構成を説明するための
斜視図である。FIG. 5 is a perspective view for explaining a schematic configuration of a conventional heating element.

【図６】図５のVI-VI 線に沿う断面図である。6 is a sectional view taken along line VI-VI of FIG.

【符号の説明】[Explanation of symbols]

１ 基板 ２ 表面酸化層 ３ Ａｌ電極 ４ 絶縁層 ５ ＨｆＢ2 抵抗層 ６ Ａｌ電極 ７ 絶縁層 ８ Ｔａ保護層 ９ 発熱部1 substrate 2 surface oxide layer 3 Al electrode 4 insulating layer 5 HfB 2 resistance layer 6 Al electrode 7 insulating layer 8 Ta protective layer 9 heat generating part

Claims (2)

【特許請求の範囲】[Claims] 【請求項１】 吐出口からインクを吐出するために前記
インクに膜沸騰を生じさせるための熱エネルギを発生す
る発熱抵抗体と、該発熱抵抗体に接続した一対の配線電
極とで構成される発熱素子を有するインクジェット記録
ヘッドにおいて、 前記発熱抵抗体は概略円環または扇環の表面形状の発熱
部を有し、また前記発熱部の厚さは前記表面形状の中心
点から径方向の距離に反比例して変化していることを特
徴とするインクジェット記録ヘッド。1. A heating resistor for generating heat energy for causing film boiling in the ink for ejecting the ink from an ejection port, and a pair of wiring electrodes connected to the heating resistor. In an ink jet recording head having a heating element, the heating resistor has a heating portion having a substantially circular or fan-shaped surface shape, and the thickness of the heating portion is a radial distance from a center point of the surface shape. An ink jet recording head characterized in that it changes in inverse proportion. 【請求項２】 画像情報を被記録媒体に記録するインク
ジェット記録装置において、 吐出口からインクを吐出するために前記インクに膜沸騰
を生じさせるための熱エネルギを発生する発熱抵抗体
と、該発熱抵抗体に接続した一対の配線電極とで構成さ
れる発熱素子を有するインクジェット記録ヘッドが設け
られており、前記発熱抵抗体は概略円環または扇環の表
面形状の発熱部を有し、また前記発熱部の厚さは前記表
面形状の中心点から径方向の距離に反比例して変化して
いることを特徴とするインクジェット記録装置。2. An ink jet recording apparatus for recording image information on a recording medium, a heating resistor for generating heat energy for causing film boiling in the ink for ejecting the ink from an ejection port, and the heat generation. An ink jet recording head having a heating element composed of a pair of wiring electrodes connected to a resistor is provided, and the heating resistor has a heating portion having a substantially circular or fan-shaped surface shape. The inkjet recording apparatus is characterized in that the thickness of the heat generating portion changes in inverse proportion to the radial distance from the center point of the surface shape.
JP21403193A 1993-08-30 1993-08-30 INK JET PRINT HEAD, INK JET PRINTING APPARATUS HAVING THE PRINT HEAD Expired - Fee Related JP3157964B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21403193A JP3157964B2 (en) 1993-08-30 1993-08-30 INK JET PRINT HEAD, INK JET PRINTING APPARATUS HAVING THE PRINT HEAD

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21403193A JP3157964B2 (en) 1993-08-30 1993-08-30 INK JET PRINT HEAD, INK JET PRINTING APPARATUS HAVING THE PRINT HEAD

Publications (2)

Publication Number Publication Date
JPH0760955A true JPH0760955A (en) 1995-03-07
JP3157964B2 JP3157964B2 (en) 2001-04-23

Family

ID=16649134

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Link
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