JPH0760955A - Ink jet recording head and ink jet recorder equipped with the recording head - Google Patents

Ink jet recording head and ink jet recorder equipped with the recording head

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Publication number
JPH0760955A
JPH0760955A JP21403193A JP21403193A JPH0760955A JP H0760955 A JPH0760955 A JP H0760955A JP 21403193 A JP21403193 A JP 21403193A JP 21403193 A JP21403193 A JP 21403193A JP H0760955 A JPH0760955 A JP H0760955A
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Prior art keywords
heating
resistor
recording head
ink
heat generating
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JP21403193A
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JP3157964B2 (en
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Akira Asai
朗 浅井
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Canon Inc
キヤノン株式会社
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Abstract

PURPOSE:To obtain a recording head having a novel heating element wherein heating distribution on a surface of a resistor is equalized and its recorder by a method wherein a heating resistor has a heating part of an approximately circularly annular or fan-like annular surface shape, and its thickness is varied inversely proportional to a distance in a radial direction from a central point of the surface shape. CONSTITUTION:When voltage is impressed by making a current (I) flow radially along a radial direction of a heating resistor, a thickness d (r) of a heating part of the heating resistor is varied inversely proportional to a radial distance (r) from a center of a surface shape. Thereby, a current density i (r) at any point on the heating part at a radial distance (r) apart from the center comes to be as given by the formula (I). In the formula theta is an angle of a fan-like annulus (2pi in the case of a circular annulus). Relation between 'the resistivity (rho) of the resistor and a heating value q (r) per unit time unit area is as given by the formula II. Therefore, the formula III is obtained.

Description

【発明の詳細な説明】 DETAILED DESCRIPTION OF THE INVENTION

【0001】 [0001]

【産業上の利用分野】本発明は、熱エネルギーを利用したインクジェット記録ヘッドと、この記録ヘッドを記録手段として有するインクジェット記録装置とに関する。 The present invention relates to an ink jet recording head utilizing thermal energy, and to an ink jet recording apparatus having a recording head as the recording means.

【0002】 [0002]

【従来の技術】熱エネルギーを利用して液体を加熱・沸騰させて気泡を発生させることによって液滴を噴出(吐出)して記録を行うインクジェット記録方式は、高解像、高速印字が可能で、記録品位も高く、低騒音であり、しかもモノクロのみならずカラー画像記録が容易に行え、普通紙等にも記録ができ、さらに記録ヘッドや装置全体の小型化が容易であるといった優れた特徴をもっている。 An ink jet recording method of performing ejection (ejection) to the recording liquid droplets by utilizing the Related Art Thermal energy of the liquid by heating and boiling to generate bubbles, the high resolution, enables high-speed printing , recording quality is high, a low noise, yet only a color image recording is easy to not only monochromatic, also the recording on plain paper or the like, excellent such is easier and more recording heads and devices miniaturization of the whole feature it has. この方式のインクジェット記録方式においては、液体を加熱するための発熱素子が必要である。 In the inkjet recording method of this type, it is necessary to heat generating element for heating the liquid. 図5 Figure 5
および図6は、従来の発熱素子を具備したインクジェット式記録ヘッドの概略的構成を説明するための図である。 And Figure 6 is a diagram for explaining a schematic configuration of comprising a conventional heating element an ink jet recording head. 参照符号10は記録ヘッド、11はベース・プレート、12は基板、13はノズル樹脂、14はオリフィス、15は薄膜抵抗体、15′はヒーター(発熱部)、 Reference numeral 10 a recording head, 11 base plate, 12 is a substrate, 13 is a nozzle resin, 14 orifices, 15 thin-15 'a heater (heat generating portion),
16は電極、17はガラス天板、18は保護膜、19は耐キャビテーション膜、20はフィルター、そして21 16 is an electrode, 17 is a glass top plate, 18 protective layer, 19 is anti-cavitation film, 20 is a filter and 21,
はノズルである。 It is a nozzle. こられの図から明らかなように従来の発熱素子(電気熱変換体)は、例えば一様の膜厚を有する短冊状(長方形)の薄膜抵抗体15と、この薄膜抵抗体15の長手方向に沿って対向かつ一定距離離間するようにして薄膜抵抗体15上に配置された2本の電極16 Conventional heating elements from figure Korare As apparent (electrothermal transducers), for example a thin-film resistor 15 of the strip-shaped (rectangular) having a thickness of uniform, in the longitudinal direction of the thin film resistor 15 along opposite and as a space of a fixed distance and disposed on the thin film resistor 15 two electrodes 16
とからなる。 Consisting of. 2本の電極の長手方向自由端によって挟まれた薄膜抵抗体15上の領域が発熱部15′としてノズル21内のインクを瞬間的に加熱してオリフィス14からインク滴を吐出させるものである。 The two areas on the longitudinal thin-film resistor 15 sandwiched by the free end of the electrode is the ink in the nozzle 21 as a heating unit 15 'by instantaneously heating in which ink droplets are ejected from the orifice 14. このような構成からなる発熱素子は、発熱部15′が均一な厚さを有し、 Such heating elements made of construction, heating portion 15 'has a uniform thickness,
かつ長方形状の表面を有することから、一様な発熱分布が得られるという特徴がある。 And since it has a rectangular surface, it is characterized in that a uniform heating distribution.

【0003】 [0003]

【発明が解決しようとする課題】記録ヘッドを設計する場合、様々な形の抵抗体を用いることが可能であるならば、様々な要求に応じた記録ヘッドの設計が可能となろう。 When designing the print head [0005] If it is possible to use resistors of different forms, it would be possible to design a recording head in response to various requests. しかし、従来のように、一様な膜厚の発熱素子を用いた場合、長方形以外の形状の抵抗体を用いると、抵抗体表面の発熱分布が一様とならないという問題が生じる。 However, as in the prior art, when using a heating element of uniform thickness, the use of resistors having a shape other than rectangular, a problem that heat generation distribution of the resistor surface is not uniform is generated. 例えば、特公昭59-21943号および特開昭62-201254 For example, JP-B-59-21943 and JP-A-62-201254
号には、階調記録を実現するためにそのような抵抗体が提案されているが、抵抗体表面の発熱分布が一様とならないため、抵抗体表面の一部分からこの表面に接するインク液の沸騰が開始されるので、特定部分に熱ストレスが集中して抵抗体の耐久性を低下させたり、気泡成長の安定性が悪くなる等の問題点があった。 The issue, although such resistance in order to realize the gradation recording have been proposed, since the heat generation distribution of the resistor surface is not uniform, the ink liquid in contact with the surface from a portion of the resistor surface since boiling is initiated, thermal stress or reduce the durability of the concentrated resistor, the stability of the bubble growth has a problem such as a deteriorated to a particular part. さらに、特公平 In addition, Kokoku
2-3349号に開示された抵抗体は、耐久性向上のために発熱素子上において気泡が消滅する部分に導電性領域を設けるが、長方形以外の形状からなる従来の抵抗体では発熱分布が生じてしまうという問題点があった。 The disclosed resistor No. 2-3349 is provided with a conductive region in a portion bubbles disappeared on heating element for improving durability, heat generation distribution is generated in the conventional resistive body made of a shape other than rectangular there was a problem in that is.

【0004】そこで、本発明は、抵抗体表面の発熱分布が一様となるような新規の発熱素子を有する記録ヘッド及び該記録ヘッドを具備した記録装置を提供することを目的とする。 [0004] Therefore, an object of the present invention that heat generation distribution of the resistor surface to provide a recording apparatus including the recording head and the recording head having a novel heating element such that uniform.

【0005】 [0005]

【課題を解決するための手段】上記課題を解決するために、本発明にもとづく記録ヘッドは、出口からインクを吐出するためにインクに膜沸騰を生じさせるための熱エネルギを発生する発熱抵抗体と、該発熱抵抗体に接続した一対の配線電極とで構成される発熱素子を有するインクジェット記録ヘッドにおいて、発熱抵抗体は概略円環または扇環の表面形状の発熱部を有し、また発熱部の厚さは前記表面形状の中心点から径方向の距離に反比例して変化していることを特徴とする。 In order to solve the above problems SUMMARY OF THE INVENTION The recording head according to the present invention, the heat generating resistor for generating thermal energy for causing film boiling in ink to eject ink from the outlet If, in an ink jet recording head having a heat generating element composed of a pair of wiring electrodes connected to the heat-generating resistor, the heating resistor has a heat generating portion of the surface shape of the outline ring or OgiTamaki, also heating unit the thickness of the characterized in that it varies inversely to the distance from the center point of the radial direction of the surface shape. さらに、本発明にもとづく記録装置は、このような新規の記録ヘッドを有するもので、該記録ヘッドを用いて画像情報を被記録媒体に記録することを特徴とする。 The recording apparatus according to the present invention, those having such a new recording head, characterized by recording image information on a recording medium by using the recording head.

【0006】 [0006]

【作用】発熱抵抗体の半径方向に沿って放射状に電流(I)が流れるようにして電圧を印加すると、発熱抵抗体の発熱部の厚さ(d(r))は表面形状の中心から径方向の距離(r)に反比例して変化するようにして形成されているので、中心から径方向へ距離rだけ離れた発熱部上の任意の点における電流密度(i(r))は、 SUMMARY OF] When voltage is applied as the current flows (I) radially along the radial direction of the heating resistor, the thickness of the heating portion of the heating resistor (d (r)) is the diameter from the center of the surface shape because it is formed so as to vary inversely with the distance in the direction of (r), the current density at any point on the heat generating portion at a distance r from the center in the radial direction (i (r)) is

【0007】 [0007]

【数1】 [Number 1]

【0008】となる。 The [0008]. ここで、θは扇環の張る角度(円環の場合は2π)である。 Here, theta is the angle (2 [pi in the case of ring) spanned by OgiTamaki. 抵抗体の抵抗率(ρ)と、単位時間単位面積あたりの発熱量(q(r))との関係は、 And the resistivity of the resistor ([rho), the relationship between the amount of heat generated per unit time per unit area (q (r)),

【0009】 [0009]

【数2】 q(r)= i(r) 2 ρd(r) (2) であるから、 [Number 2] because it is q (r) = i (r ) 2 ρd (r) (2),

【0010】 [0010]

【数3】 [Number 3]

【0011】となる。 The [0011].

【0012】したがって、d(r)がr 2に反比例していれば、q(r)は場所によらず一定となる。 [0012] Thus, d (r) is if inversely proportional to r 2, q (r) is constant regardless of the location. ただし、 However,
(3)式が妥当であるための条件として、d(r 2 )< (3) As a condition for expression is valid, d (r 2) <
d(r 1 )<r 2 −r 1を要する。 d (r 1) requires a <r 2 -r 1. ここでr 1は内側周囲部の半径、r 2は外側周縁部の半径である。 Wherein r 1 is the radius of the inner periphery portion, r 2 is the radius of the outer periphery.

【0013】 [0013]

【実施例】以下、図面を参照して本発明の実施例を詳細に説明する。 EXAMPLES Hereinafter, with reference to the accompanying drawings illustrating the embodiment of the invention in detail.

【0014】<実施例1>図1および図2は、本発明にもとづく円環状の発熱部を有する発熱素子1の一実施例を示すものである。 [0014] <Embodiment 1> FIGS. 1 and 2 show an embodiment of a heating element 1 having a heat generating portion of the annular according to the present invention. 厚さ525μmのSi基板2上に、厚さ2.5μmの表面酸化層3を形成した後、スパッタリングとエッチングとによって、厚さ0.5μmのAl電極4、厚さ1.0μmの絶縁層5、中心点0から径方向の距離rに反比例した厚さ(0.4μm〜0.1μm) On the Si substrate 2 having a thickness of 525 [mu] m, after the formation of the surface oxide layer 3 having a thickness of 2.5 [mu] m, by a sputtering and etching, a thickness of 0.5 [mu] m Al electrode 4, the thickness of 1.0μm insulating layer 5 the thickness is inversely proportional from the center point 0 to the radial distance r (0.4μm~0.1μm)
の薄膜HfB 2抵抗層6、厚さ0.5μmのAl電極7、厚さ1.0μmのSiO 2絶縁層8、そして厚さ0.5μmのTa保護層9を形成したものである。 The thin film HfB 2 resistive layer 6, Al electrode 7 having a thickness of 0.5 [mu] m, is obtained by forming a SiO 2 insulating layer 8 and the thickness of 0.5 [mu] m Ta protective layer 9, a thickness of 1.0 .mu.m. 発熱素子の発熱部6aは円環状で、内側周縁部の半径は20 Heating portion 6a of the heating element is annular, the radius of the inner peripheral portion 20
μm、外側周縁部の半径は40μmである。 [mu] m, the radius of the outer peripheral portion is 40 [mu] m. 本実施例では、余泡は中心点Oにて消滅するので、発熱部6aへの影響を与えない。 In this embodiment, Yoawa since disappears at the center point O, do not affect to the heating portion 6a. 従って、耐久性,発泡安定性の面で好ましい効果がある。 Therefore, the durability, there is a favorable effect in terms of foam stability.

【0015】<実施例2>図3および図4は、本発明にもとづく扇環状の発熱部を有する発熱素子の一実施例を示すものである。 [0015] <Example 2> FIGS. 3 and 4 show an embodiment of a heating element having a heat generating portion of the fan ring according to the present invention. 厚さ525μmのSi基板1上に、厚さ2.5μmの表面酸化層2を形成した後、スパッタリングとエッチングとによって、厚さ0.5μmのAl電極3、厚さ1.0μmの絶縁層4、中心点0から径方向の距離rに反比例した厚さ(0.4μm〜0.1μm) On the Si substrate 1 having a thickness of 525 [mu] m, after the formation of the surface oxide layer 2 having a thickness of 2.5 [mu] m, by a sputtering and etching, a thickness of 0.5 [mu] m Al electrode 3, having a thickness of 1.0μm insulating layer 4 the thickness is inversely proportional from the center point 0 to the radial distance r (0.4μm~0.1μm)
のHfB 2抵抗層5、厚さ0.5μmのAl電極6、厚さ1.0μmのSiO 2絶縁層7、そして厚さ0.5μ Of HfB 2 resistive layer 5, Al electrode 6 having a thickness of 0.5 [mu] m, a thickness of 1.0 .mu.m SiO 2 insulating layer 7 and the thickness 0.5 [mu],
mのTa保護層8を形成したものである。 It is obtained by forming a Ta protective layer 8 m. 発熱素子の発熱部6aは扇環状(扇角θ)で、内側周縁部の半径は2 Heating portion 6a of the heating element in the fan ring (fan angle theta), the radius of the inner peripheral portion 2
0μm、外側周縁部の半径は40μmである。 0 .mu.m, the radius of the outer peripheral portion is 40 [mu] m. ここではθ=90。 Here, θ = 90. の場合を図示伏、θ≧180。 Shown wipe case, θ ≧ 180. とすれば実施例1と同様、耐久性,発泡安定性がさらに向上する。 Tosureba same manner as in Example 1, the durability, the foaming stability is further improved.

【0016】(その他)なお、本発明は、特にインクジェット記録方式の中でも、インク吐出を行わせるために利用されるエネルギとして熱エネルギを発生する手段(例えば電気熱変換体やレーザ光等)を備え、前記熱エネルギによりインクの状態変化を生起させる方式の記録ヘッド、記録装置において優れた効果をもたらすものである。 [0016] Note (Others) The present invention is, among other ink-jet recording system, comprising means for generating heat energy as energy utilized upon execution of ink discharge (eg, an electrothermal transducer or laser beam) the recording head of the type in which among the inkjet by the thermal energy, is one that results in an excellent effect in a recording apparatus. かかる方式によれば記録の高密度化,高精細化が達成できるからである。 Higher recording According to this method, since higher definition can be achieved.

【0017】その代表的な構成や原理については、例えば、米国特許第4723129号明細書,同第4740 [0017] As the typical arrangement and principle, for example, U.S. Pat. No. 4,723,129, the first 4740
796号明細書に開示されている基本的な原理を用いて行うものが好ましい。 Which can be implemented using the fundamental principle disclosed in 796 Pat it is preferred. この方式は所謂オンデマンド型, This method is the so-called on-demand type,
コンティニュアス型のいずれにも適用可能であるが、特に、オンデマンド型の場合には、液体(インク)が保持されているシートや液路に対応して配置されている電気熱変換体に、記録情報に対応していて核沸騰を越える急速な温度上昇を与える少なくとも1つの駆動信号を印加することによって、電気熱変換体に熱エネルギを発生せしめ、記録ヘッドの熱作用面に膜沸騰を生じさせて、結果的にこの駆動信号に一対一で対応した液体(インク) Can be applied to both of the continuous type, in particular, in the case of the on-demand type apparatus has electrothermal transducers, liquid (ink) is disposed on a sheet or liquid passage that retains by not retaining sheet or liquid passage, the driving signal being enough to provide such a quick temperature rise beyond a nucleate boiling, the heat energy brought occur electrothermal transducer, film boiling on the heat acting surface of the recording head occur allowed, resulting in the corresponding liquid one to one for each of the driving signals (ink)
内の気泡を形成できるので有効である。 It is effective since the bubbles of the inner can be formed. この気泡の成長,収縮により吐出用開口を介して液体(インク)を吐出させて、少なくとも1つの滴を形成する。 Growth of the bubble, the liquid (ink) is ejected through an ejection opening by contraction, at least one droplet is formed. この駆動信号をパルス形状とすると、即時適切に気泡の成長収縮が行われるので、特に応答性に優れた液体(インク)の吐出が達成でき、より好ましい。 When the drive signal has a pulse shape, since immediately the development and contraction of the bubble can be effected in particular discharge of good liquid-responsive (ink), more preferably. このパルス形状の駆動信号としては、米国特許第4463359号明細書,同第4345262号明細書に記載されているようなものが適している。 As the driving signals of such pulse shape, U.S. Patent No. 4463359, such as disclosed in the Specification No. 4345262 it is suitable. なお、上記熱作用面の温度上昇率に関する発明の米国特許第4313124号明細書に記載されている条件を採用すると、さらに優れた記録を行うことができる。 Incidentally, by adopting the condition disclosed in U.S. Pat. No. 4,313,124 of the invention concerning the temperature elevation rate of the heat acting surface, it is possible to achieve better recording.

【0018】記録ヘッドの構成としては、上述の各明細書に開示されているような吐出口,液路,電気熱変換体の組合せ構成(直線状液流路または直角液流路)の他に熱作用部が屈曲する領域に配置されている構成を開示する米国特許第4558333号明細書,米国特許第44 [0018] The structure of the recording head may be as disclosed in the specifications of, liquid channels, in addition to the electrothermal transducers (linear liquid channel or right angle liquid channels) U.S. Patent No. 4558333 which discloses a structure which is disposed in the area where the heat acting section is bent, U.S. Patent No. 44
59600号明細書を用いた構成も本発明に含まれるものである。 Configuration using a 59,600 Pat are also included in the present invention. 加えて、複数の電気熱変換体に対して、共通するスリットを電気熱変換体の吐出部とする構成を開示する特開昭59−123670号公報や熱エネルギの圧力波を吸収する開孔を吐出部に対応させる構成を開示する特開昭59−138461号公報に基いた構成としても本発明の効果は有効である。 In addition, the following structures may be an opening for absorbing pressure wave of common Sho 59-123670 JP and thermal energy the arrangement disclosed that the discharge portion of the slit electrothermal transducers even a configuration to correspond to the discharge section a structure based on JP 59-138461 which discloses the effect of the present invention is effective. すなわち、記録ヘッドの形態がどのようなものであっても、本発明によれば記録を確実に効率よく行うことができるようになるからである。 Thus, irrespective of the type of the recording head, because so according to the present invention, recording can be performed reliably and efficiently.

【0019】さらに、記録装置が記録できる記録媒体の最大幅に対応した長さを有するフルラインタイプの記録ヘッドに対しても本発明は有効に適用できる。 Furthermore, the present invention to a full-line type recording head whose length equals the maximum length corresponding to the recording medium which can be recorded can be effectively applied. そのような記録ヘッドとしては、複数記録ヘッドの組合せによってその長さを満たす構成や、一体的に形成された1個の記録ヘッドとしての構成のいずれでもよい。 As such a recording head, the construction which satisfies its length by a combination of a plurality of recording heads, or the arrangement as a single recording head integrally formed.

【0020】加えて、上例のようなシリアルタイプのものでも、装置本体に固定された記録ヘッド、あるいは装置本体に装着されることで装置本体との電気的な接続や装置本体からのインクの供給が可能になる交換自在のチップタイプの記録ヘッド、あるいは記録ヘッド自体に一体的にインクタンクが設けられたカートリッジタイプの記録ヘッドを用いた場合にも本発明は有効である。 [0020] Additionally, the present invention is applicable to a serial type as in the above example, the ink from the electrical connection and the apparatus main body of the apparatus main body by being mounted recording head fixed to the apparatus main body or to the apparatus main body, a replaceable chip type recording head which supply is enabled, or the recording head itself present invention when an ink tank integrally a cartridge type recording head provided is valid.

【0021】また、本発明の記録装置の構成として、記録ヘッドの吐出回復手段、予備的な補助手段等を付加することは本発明の効果を一層安定できるので、好ましいものである。 Further, as the structure of the recording apparatus of the present invention, discharge recovery means for the recording head, so that auxiliary means, etc. can be further stabilized the effects of the present invention, is preferred. これらを具体的に挙げれば、記録ヘッドに対してのキャッピング手段、クリーニング手段、加圧或は吸引手段、電気熱変換体或はこれとは別の加熱素子或はこれらの組み合わせを用いて加熱を行う予備加熱手段、記録とは別の吐出を行なう予備吐出手段を挙げることができる。 Specific examples of these may include, capping means for the recording head, cleaning means, pressurizing or suction means, heating using another heating element or a combination thereof to the electrothermal transducers or which preliminary heating means for performing, may be mentioned a means for carrying out preliminary ejection of ink independently of the ejection from the recording.

【0022】また、搭載される記録ヘッドの種類ないし個数についても、例えば単色のインクに対応して1個のみが設けられたものの他、記録色や濃度を異にする複数のインクに対応して複数個数設けられるものであってもよい。 Further, the variation of the recording head is mounted, for example, other single corresponding to a single color ink, corresponding to the plurality of ink materials having different recording color or density or it may be provided plural number. すなわち、例えば記録装置の記録モードとしては黒色等の主流色のみの記録モードだけではなく、記録ヘッドを一体的に構成するか複数個の組み合わせによるかいずれでもよいが、異なる色の複色カラー、または混色によるフルカラーの各記録モードの少なくとも一つを備えた装置にも本発明は極めて有効である。 That is, for example not only a printing mode using only a main color such as black recording mode of the recording apparatus, but may be any according to the plurality of colors or a full recording head, different colors of the multi-color color, or even present invention to an apparatus having at least one of each recording mode recording heads is extremely effective.

【0023】さらに加えて、以上説明した本発明実施例においては、インクを液体として説明しているが、室温やそれ以下で固化するインクであって、室温で軟化もしくは液化するものを用いてもよく、あるいはインクジェット方式ではインク自体を30℃以上70℃以下の範囲内で温度調整を行ってインクの粘性を安定吐出範囲にあるように温度制御するものが一般的であるから、使用記録信号付与時にインクが液状をなすものを用いてもよい。 [0023] In addition, in the present invention embodiment described above, while the ink has been described as liquid, an ink which is solid at room temperature or less, be used which softens or liquefies at room temperature well, because in the ink jet system which temperature controlled to be in a stable discharge range the viscosity of the ink by performing the temperature adjustment in the range of less than 70 ° C. 30 ° C. or more ink itself is common, the recording signal is applied sometimes the ink may be such that forms a liquid. 加えて、熱エネルギによる昇温を、インクの固形状態から液体状態への状態変化のエネルギとして使用せしめることで積極的に防止するため、またはインクの蒸発を防止するため、放置状態で固化し加熱によって液化するインクを用いてもよい。 In addition, the Atsushi Nobori due to the thermal energy, to prevent the ink from the solid state actively by consuming it energy state change to the liquid state, or to prevent evaporation of the ink, solidified when left intact heating ink may be used to liquefy by. いずれにしても熱エネルギの記録信号に応じた付与によってインクが液化し、液状インクが吐出されるものや、記録媒体に到達する時点ではすでに固化し始めるもの等のような、熱エネルギの付与によって初めて液化する性質のインクを使用する場合も本発明は適用可能である。 The ink is liquefied by the application of the recording signal producing thermal energy Anyway, and the liquefied ink is discharged, such as already such that start to solidify at the time when it reaches the recording medium, by the application of thermal energy the present invention is also applicable to such an ink material as is liquefied is applicable. このような場合のインクは、 Ink in such a case,
特開昭54−56847号公報あるいは特開昭60−7 JP-A-54-56847 JP or JP-A-60-7
1260号公報に記載されるような、多孔質シート凹部または貫通孔に液状又は固形物として保持された状態で、電気熱変換体に対して対向するような形態としてもよい。 As described in 1260 JP, while being held in a porous sheet recess or a through hole as a liquid or solid, may be in the form such that opposite to electrothermal transducers. 本発明においては、上述した各インクに対して最も有効なものは、上述した膜沸騰方式を実行するものである。 In the present invention, the most effective one for the ink materials described above is the one capable of implementing the film boiling method as described above.

【0024】さらに加えて、本発明インクジェット記録装置の形態としては、コンピュータ等の情報処理機器の画像出力端末として用いられるものの他、リーダ等と組合せた複写装置、さらには送受信機能を有するファクシミリ装置の形態を採るもの等であってもよい。 Furthermore, as the mode of the ink jet recording apparatus may can be employed not only as an image output terminal of an information processing device such as a computer, a copying apparatus combined with reader, a facsimile apparatus having a transmission and receiving function it may be those such as the form.

【0025】 [0025]

【発明の効果】以上説明したように、本発明にもとづく発熱素子は、薄膜抵抗体と該薄膜抵抗体に接続した一対の電極とからなる発熱素子において、薄膜抵抗体は表面形状が概略円環状または扇環状の発熱部を有し、また発熱部の厚さは表面形状の中心から径方向への距離に反比例して変化するようにして形成されたものなので、発熱量は場所によらず一定となるため、発熱部表面から一斉に沸騰が始まり、気泡成長の安定性、発熱素子の耐久性を保つことが可能となる。 As described in the foregoing, the heat generating element according to the present invention, the heating element comprising a pair of electrodes connected to the thin film resistor and the thin film resistor, a thin film resistor surface shape schematic annular or it has a heat generating portion of the fan ring, and since the thickness of the heat generating portion, such those formed so as to vary inversely with the distance from the center of the surface shape in the radial direction, the heat generation amount does not depend on the location constant since the, is simultaneously boiled from the heat generating portion surface begins, it becomes possible to maintain the stability of the bubble growth, the durability of the heat generating element.

【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS

【図1】本発明にもとづく円環状の発熱部を有する発熱素子の一実施例の概略的構成を説明するための平面図である。 1 is a plan view illustrating a schematic configuration of an embodiment of a heating element having a heat generating portion of the annular according to the present invention.

【図2】図1のII-II 線に沿う断面図である。 2 is a sectional view taken along the line II-II of Figure 1.

【図3】本発明にもとづく扇環状の発熱部を有する発熱素子の一実施例の概略的構成を説明するための平面図である。 3 is a plan view illustrating a schematic configuration of an embodiment of a heating element having a heat generating portion of the fan ring according to the present invention.

【図4】図3のIV-IV 線に沿う断面図である。 4 is a sectional view taken along the line IV-IV of FIG.

【図5】従来の発熱素子の概略的構成を説明するための斜視図である。 5 is a perspective view for explaining a schematic configuration of a conventional heating element.

【図6】図5のVI-VI 線に沿う断面図である。 6 is a sectional view taken along the line VI-VI in FIG.

【符号の説明】 DESCRIPTION OF SYMBOLS

1 基板 2 表面酸化層 3 Al電極 4 絶縁層 5 HfB 2抵抗層 6 Al電極 7 絶縁層 8 Ta保護層 9 発熱部 1 substrate 2 surface oxide layer 3 Al electrode 4 insulating layer 5 HfB 2 resistive layer 6 Al electrode 7 insulating layer 8 Ta protective layer 9 heating unit

Claims (2)

    【特許請求の範囲】 [The claims]
  1. 【請求項1】 吐出口からインクを吐出するために前記インクに膜沸騰を生じさせるための熱エネルギを発生する発熱抵抗体と、該発熱抵抗体に接続した一対の配線電極とで構成される発熱素子を有するインクジェット記録ヘッドにおいて、 前記発熱抵抗体は概略円環または扇環の表面形状の発熱部を有し、また前記発熱部の厚さは前記表面形状の中心点から径方向の距離に反比例して変化していることを特徴とするインクジェット記録ヘッド。 And 1. A generates heat energy for causing film boiling in the ink to discharge ink from the discharge ports heating resistor, and a pair of wiring electrodes connected to the heat generating resistor in the ink jet recording head having a heat generating element, wherein the heating resistor has a heat generating portion of the surface shape of the outline ring or OgiTamaki, and the thickness of the heat generating portion in a radial distance from the center point of the surface shape an ink jet recording head is characterized in that inverse proportion to changing.
  2. 【請求項2】 画像情報を被記録媒体に記録するインクジェット記録装置において、 吐出口からインクを吐出するために前記インクに膜沸騰を生じさせるための熱エネルギを発生する発熱抵抗体と、該発熱抵抗体に接続した一対の配線電極とで構成される発熱素子を有するインクジェット記録ヘッドが設けられており、前記発熱抵抗体は概略円環または扇環の表面形状の発熱部を有し、また前記発熱部の厚さは前記表面形状の中心点から径方向の距離に反比例して変化していることを特徴とするインクジェット記録装置。 2. A jet printing apparatus for printing an image information on a recording medium, a heating resistor for generating thermal energy for causing film boiling in the ink to discharge ink from the discharge ports, the heat generating a pair of wiring electrodes connected to the resistor ink jet recording head is provided with heating elements constituted by said heat generating resistor has a heat generating portion of the surface shape of the outline ring or OgiTamaki and said an ink jet recording apparatus the thickness of the heat-generating portion, characterized in that it varies inversely to the distance from the center point of the radial direction of the surface shape.
JP21403193A 1993-08-30 1993-08-30 An ink jet recording head, an ink jet recording apparatus having the recording head Expired - Fee Related JP3157964B2 (en)

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