JPH0759283B2 - Degassing / defoaming device - Google Patents
Degassing / defoaming deviceInfo
- Publication number
- JPH0759283B2 JPH0759283B2 JP14063388A JP14063388A JPH0759283B2 JP H0759283 B2 JPH0759283 B2 JP H0759283B2 JP 14063388 A JP14063388 A JP 14063388A JP 14063388 A JP14063388 A JP 14063388A JP H0759283 B2 JPH0759283 B2 JP H0759283B2
- Authority
- JP
- Japan
- Prior art keywords
- degassing
- tube
- coating liquid
- defoaming
- photosensitive coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Degasification And Air Bubble Elimination (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は感光性塗布液を塗布装置で塗布する際、塗布品
質を改良するための該塗布液の処理装置に関し、さらに
詳しくは該塗布液が塗布される前に該塗布液中に含まれ
る溶存空気および微細気泡を同時に除去するため該塗布
液の処理装置に用いられる脱気・脱泡装置に関するもの
である。TECHNICAL FIELD The present invention relates to an apparatus for treating a coating solution for improving the coating quality when the photosensitive coating solution is applied by a coating apparatus, and more specifically, the coating solution. The present invention relates to a degassing / defoaming device used in a treatment apparatus for a coating liquid in order to simultaneously remove dissolved air and fine bubbles contained in the coating liquid before being coated.
一般にある種の液体は、塗布に際しては該液体中に溶存
する空気および含有される気泡を除去することが必要で
ある。例えば感光材料用の感光性塗布液は溶存空気おら
び気泡が含まれたまま塗布装置により基材に塗布される
と、塗布装置によっては該感光性塗布液中の溶存空気の
析出や、通常の場合には該感光性塗布液に含まれる気泡
によって縦すじ、ピンホール等塗布面に気泡による故障
を生じ基材に均一な感光膜を形成することができないた
め、基材に塗布される前に該感光性塗布液中に溶存する
空気および含有される気泡を除去することが必要であ
る。In general, some liquids require the removal of air and air bubbles contained in the liquid during application. For example, when a photosensitive coating liquid for a photosensitive material is applied to a substrate by a coating device while containing dissolved air and air bubbles, depending on the coating device, precipitation of dissolved air in the photosensitive coating liquid or a normal coating may occur. In this case, since vertical streaks due to bubbles contained in the photosensitive coating liquid cause failure due to bubbles on the coating surface such as pinholes, it is impossible to form a uniform photosensitive film on the base material, It is necessary to remove air and air bubbles contained in the photosensitive coating liquid.
従来これに対処する方法として先ず液体中に溶存する空
気の除去(脱気と呼ぶ)を行うための方法としては多数
知られているが、その代表的な例は該液体を減圧下に置
く方法であり、その例としては、特公昭51−35259号,
特開昭56−147605号,特開昭56−76213号,特開昭49−9
7003号,特開昭50−159469号等の公報に開示されている
装置が知られている。Conventionally, as a method for coping with this, there are many known methods for first removing air dissolved in a liquid (referred to as deaeration), but a typical example thereof is a method of placing the liquid under reduced pressure. As an example thereof, Japanese Patent Publication No. 51-35259,
JP-A-56-147605, JP-A-56-76213, JP-A-49-9
There are known devices disclosed in Japanese Patent Laid-Open No. 7003 and Japanese Patent Laid-Open No. 50-159469.
また多孔質性高分子膜を用いる方法もあり、その例とし
ては、特開昭51−28261号,特開昭54−123785号,特開
昭55−121806号,特開昭57−165007号,特開昭58−8140
4号,等の公報に開示されている方法あるいは装置が知
られている。There is also a method of using a porous polymer membrane, examples of which include JP-A-51-28261, JP-A-54-123785, JP-A-55-121806, and JP-A-57-165007. JP-A-58-8140
The method or device disclosed in the publications such as No. 4 and the like are known.
他方液体中に含有される気泡を除去する(脱泡と呼ぶ)
方法は多数知られている。このような脱泡処理を行うた
めの装置としては感光性塗布液を用いる場合は、従来、
特公昭47−6835号,特公昭57−6365号,特開昭53−1392
74号,特開昭59−69108号,特開昭59−92003号,特開昭
59−156405号,特開昭61−50608号等の公報に開示され
ている超音波脱泡(超音波処理と呼ぶ)装置が知られて
いる。On the other hand, remove bubbles contained in the liquid (called defoaming)
Many methods are known. When a photosensitive coating liquid is used as a device for performing such defoaming treatment, conventionally,
Japanese Patent Publication No. 47-6835, Japanese Patent Publication No. 57-6365, and Japanese Patent Publication No. 51392
74, JP 59-69108, JP 59-92003, JP
There are known ultrasonic defoaming (referred to as ultrasonic treatment) devices disclosed in Japanese Patent Application Laid-Open Nos. 59-156405 and 61-50608.
しかしながら前者の脱気方法のうち、該液体を減圧下に
置く方法は該液体中に溶存する空気を除去することは出
来ても、微細気泡が該液体中に発生するという現象が起
きている。又多孔質性高分子膜による方法では、感光性
塗布液を処理する場合発泡現象は見られないが、数100
μmの流入気泡を除去することは出来ない。従ってこれ
らの方法および装置は該液体中に溶存する空気を除去す
ることは出来ても、大きさにもよるが気泡を除去するこ
とは極めて困難である。従って、上記のようにして生成
した微細気泡およびそれらが合体して出来た気泡や、該
液体中に含有された気泡は例えば感光性塗布液を用いる
場合には塗布装置により基材に塗布されると,均一な感
光膜を形成することが出来ないという問題が起こる。However, among the former degassing methods, the method of placing the liquid under reduced pressure can remove the air dissolved in the liquid, but the phenomenon occurs that fine bubbles are generated in the liquid. In addition, in the method using the porous polymer film, no bubbling phenomenon is observed when treating the photosensitive coating liquid, but
It is not possible to remove inflow bubbles of μm. Therefore, although these methods and devices can remove the air dissolved in the liquid, it is extremely difficult to remove the air bubbles depending on the size. Therefore, the fine bubbles generated as described above, the bubbles formed by combining them, and the bubbles contained in the liquid are applied to the substrate by a coating device when a photosensitive coating liquid is used, for example. Then, there arises a problem that a uniform photosensitive film cannot be formed.
また後者の脱泡方法は該感光性塗布液中に含有される気
泡は除去出来ても、該液中に溶存する空気を除去するこ
とは出来ない。脱泡処理された該感光性塗布液はその中
に溶存する空気が飽和あるいは過飽和になっているので
例えば該感光性塗布液の液温が上昇したり、剪断力が加
わると溶存した空気が析出し、基材に塗布した時に均一
な感光膜を形成することが出来ないという問題が起こ
る。The latter defoaming method can remove the air bubbles contained in the photosensitive coating solution, but cannot remove the air dissolved in the solution. Since the air dissolved in the defoamed photosensitive coating liquid is saturated or supersaturated, for example, when the liquid temperature of the photosensitive coating liquid rises or a shearing force is applied, the dissolved air is precipitated. However, there is a problem that a uniform photosensitive film cannot be formed when it is applied to a substrate.
更に、多孔質性高分子膜チューブ(以下チューブとい
う)を用い、その中を感光性塗布液を通し、該チューブ
の外側を減圧して、該感光性塗布液中の溶存空気および
微細気泡を同時に除去する該チューブ(特願昭62−832
2)は、成形時に用いる原料の素材および分子量,肉
厚,空孔率,孔径などの条件によりその除去能力が異な
り、一般に液体の透過が起らない範囲では、用いる原料
の素材,分子量が決まれば、該チューブの空孔率は高い
ほど、孔径は大きいほど、肉厚は薄いほど除去能力は高
くなり、該チューブの単位長さ当りの処理量を多くする
ことが出来るというメリットがある。Further, a porous polymer membrane tube (hereinafter referred to as a tube) is used, a photosensitive coating solution is passed through the tube, and the outside of the tube is depressurized to simultaneously dissolve dissolved air and fine bubbles in the photosensitive coating solution. The tube to be removed (Japanese Patent Application No. 62-832)
In 2), the removal capacity varies depending on the raw material used during molding and the conditions such as molecular weight, wall thickness, porosity, and pore size. Generally, the raw material used and molecular weight are determined within the range where liquid permeation does not occur. For example, the higher the porosity of the tube, the larger the pore diameter, and the thinner the wall, the higher the removal capacity, and there is an advantage that the throughput per unit length of the tube can be increased.
しかしながらこのようなチューブは粘度の高い感光性塗
布液を用いた場合や、該チューブのあとに続く流路での
圧力損失が大きい場合には、チューブ内の圧力が上り該
感光性塗布液が該チューブ壁を透過する前にチューブが
破裂することがある。However, in such a tube, when a photosensitive coating liquid having a high viscosity is used, or when the pressure loss in the flow path following the tube is large, the pressure in the tube rises and the photosensitive coating liquid is The tube may burst before penetrating the tube wall.
また処理量を多くするため、チューブを長くすると圧力
損失が大きくなったりしてついには同様にチューブの破
裂が起こることがある。If the length of the tube is increased in order to increase the amount of treatment, the pressure loss may increase, and the tube may eventually burst.
チューブの破裂を防止し、感光性塗布液の処理量を多く
する場合には多数のチューブを並列にし、モジュール化
する方法が考えられるが、モジュールを構成するチュー
ブについては次のように考えることが出来る。In order to prevent the tubes from bursting and to increase the amount of photosensitive coating solution to be processed, it is possible to arrange multiple tubes in parallel to form a module, but the tubes that make up the module should be considered as follows. I can.
即ちチューブが決まれば、ある処理量において、最も効
率的な脱気程度を得るための最適なチューブの長さが存
在する。例えば、同じ処理量において、チューブの全長
を同じにした時、多数の短いチューブを複数本並列にし
た場合は脱気程度は低くなる。又長いチューブを1本用
いた場合、長すぎると、長さの割には脱気程度が高くな
らないという現象が起こる。これはチューブはある長さ
までは効率的に脱気することが出来るが、それ以上の長
さになると、溶存する空気が少なくなった液をさらに脱
気しなければならないようになるので長さの割には効率
が落ちるためと考えられる。That is, once the tube is determined, there is an optimum tube length for obtaining the most efficient degree of degassing at a certain throughput. For example, when the total length of the tubes is the same and the number of short tubes is plural in parallel at the same throughput, the degree of degassing is low. In addition, when one long tube is used, if it is too long, a phenomenon occurs in which the degree of degassing does not increase for the length. This is because the tube can be efficiently degassed for a certain length, but if it is longer than that, the liquid with less dissolved air will have to be further degassed. This is probably because the efficiency drops.
従って前述のように処理量を多くするために、最適な長
さのチューブを束にしたモジュールが有効であるが、モ
ジュールの構造あるいはチューブの収納,配置によって
は、複数本のチューブのそれぞれの中を流れる感光性塗
布液の流動状態が異なるためモジュール全体として所望
の脱気能力が得られず、脱気効率が低下したり,複数本
のチューブ同士が接触していると、チューブの脱気に有
効な外表面積が減じられ、同様に脱気効率が低下した
り、さらに複数本のチューブのうちかなり感光性塗布液
の流動が悪いチューブが存在すると、別の感光性塗布液
に切換える時の洗浄において多大な労力,時間及び洗浄
液を要したり,あるいは感光性塗布液や洗浄液の廃却に
おいては、重力によるスムーズな流出が困難となりチュ
ーブの中に残存するため、特に洗浄後、感光性塗布液に
切換える時多量の該塗布液が必要となるばかりでなく高
価な該塗布液の場合はそれがロスとなり経済的に不利と
なるという諸々の欠点を有している。Therefore, in order to increase the throughput as described above, it is effective to use a module that bundles the tubes of the optimum length. However, depending on the structure of the module or the housing and placement of the tubes, it may Since the photosensitive coating solution flowing in the different flow states does not provide the desired degassing capacity for the module as a whole, and if the degassing efficiency is reduced or multiple tubes are in contact with each other, the tubes will be degassed. If the effective outer surface area is reduced, the degassing efficiency is also reduced, and if there is a tube in which the photosensitive coating solution does not flow properly among multiple tubes, cleaning is performed when switching to another photosensitive coating solution. Requires a great deal of labor, time, and cleaning liquid, or when the photosensitive coating liquid or cleaning liquid is discarded, it is difficult to smoothly flow out due to gravity and remains in the tube. Therefore, there are various drawbacks in that not only a large amount of the coating solution is required when changing to a photosensitive coating solution after cleaning, but also in the case of the expensive coating solution, it becomes a loss and is economically disadvantageous. ing.
本発明は以上の如き事情に基づいてなされたものであっ
て、その目的は感光性塗布液中に存在する溶存空気およ
び微細気泡を同時に除去し、溶存空気および微細気泡に
より発生する塗布故障を防止し、基材に均一な感光膜を
形成するための該感光性塗布液の脱気・脱泡処理装置に
おいて上記種々の欠点を解消し、チューブの破裂を防止
し、脱気効率を上昇させ、洗浄の際の能率化,経済化を
計った脱気・脱泡装置を提供することにある。The present invention has been made based on the above circumstances, and an object thereof is to simultaneously remove dissolved air and fine bubbles present in a photosensitive coating liquid and prevent coating failure caused by the dissolved air and fine bubbles. Then, in the degassing / defoaming treatment apparatus of the photosensitive coating liquid for forming a uniform photosensitive film on the substrate, the above various drawbacks are eliminated, the rupture of the tube is prevented, and the degassing efficiency is increased. It is to provide a degassing / defoaming device that is efficient and economical in cleaning.
かかる本発明の上記目的は、調製した感光性塗布液を塗
布装置により基材に塗布する前に、溶存空気および微細
気泡を含む該感光性塗布液を多孔質性高分子膜複合チュ
ーブの内側に通し、該チューブの外側を減圧すると共
に、該感光性塗布液を加圧しながら該感光性塗布液中の
溶存空気および微細気泡を同時に除去する感光性塗布液
の脱気・脱泡装置において、多数本の多孔質性高分子膜
複合チューブを並列に平面的に接触させて円筒体の周囲
に螺旋状に巻き、該円筒体の両端部に該感光性塗布液の
出入口を設けたことを特徴とする脱気・脱泡装置により
達成される。The above-described object of the present invention is to apply the prepared photosensitive coating solution containing dissolved air and fine bubbles to the inside of the porous polymer film composite tube before coating the prepared photosensitive coating solution on a substrate by a coating device. A degassing / defoaming device for the photosensitive coating liquid, which simultaneously removes dissolved air and fine bubbles in the photosensitive coating liquid while pressing the photosensitive coating liquid while depressurizing the outside of the tube. Characterized in that the porous polymer membrane composite tubes of the present invention are made to contact in parallel in a plane and spirally wound around a cylindrical body, and the inlet and outlet of the photosensitive coating liquid are provided at both ends of the cylindrical body. It is achieved by the degassing / defoaming device.
本発明の上記目的は前記脱気・脱泡装置において螺旋状
に巻く多数本の該多孔質性高分子膜複合チューブの立ち
上がり勾配が4゜以上であることによってより効果的に
達成される。The above object of the present invention can be more effectively achieved when the rising gradient of a large number of the porous polymer membrane composite tubes spirally wound in the degassing / defoaming apparatus is 4 ° or more.
本発明の上記目的は更に該多数本の多孔質性高分子膜複
合チューブが並列に平面的に接触させたものを更にその
上に重ねて多段に設けたものである場合においても同様
に達成される。The above-mentioned object of the present invention is similarly achieved even in the case where the plurality of porous polymer membrane composite tubes are arranged in parallel and planarly contacted and further stacked thereon in multiple stages. It
本発明における多孔質性高分子膜複合チューブとは、脱
気・脱泡の分離膜として用いられる多孔質性高分子膜チ
ューブがその外側に補強用の高分子材料からなる多孔質
性膜を設けたものをいい、補強材の多孔質性高分子膜は
そのみかけの肉厚は0.3〜1.5mm,空孔率が5〜30%,平
均孔径が1〜10μmであり、補強材の高分子材料素材と
してはポリ四フッ化エチレン樹脂又はポリエチレン樹脂
を用いることが望ましい(特願昭62−315276)。The porous polymer membrane composite tube in the present invention is a porous polymer membrane tube used as a degassing / defoaming separation membrane, and a porous membrane made of a reinforcing polymer material is provided on the outside thereof. The porous polymer membrane of the reinforcing material has an apparent wall thickness of 0.3 to 1.5 mm, a porosity of 5 to 30%, and an average pore diameter of 1 to 10 μm. It is desirable to use polytetrafluoroethylene resin or polyethylene resin as the material (Japanese Patent Application No. 62-315276).
本発明における該多数本の多孔質性高分子膜複合チュー
ブを平面的に接触させて円筒体の周囲に螺旋状に巻く場
合、巻きの立上がり勾配としては洗浄時のことを考える
と4゜以上の立上り勾配を有することが望ましい。又該
円筒体の両端部に該感光性塗布液の出入口を上下に設け
る場合には下端を入口,上端を塗布液出口にすることが
望ましい。When the multiple porous polymer membrane composite tubes of the present invention are planarly contacted and spirally wound around a cylindrical body, the rising gradient of the winding is 4 ° or more in consideration of washing. It is desirable to have a rising slope. When the photosensitive coating solution inlets and outlets are vertically provided at both ends of the cylindrical body, it is desirable that the lower end is an inlet and the upper end is a coating solution outlet.
本発明において複合チューブが螺旋状に巻かれる円筒体
は2−10mmの多数の孔を有するものを用いると装置軽量
化及び減圧運転上好ましい。In the present invention, it is preferable that the cylindrical body around which the composite tube is spirally wound has a large number of holes of 2-10 mm in order to reduce the weight of the apparatus and reduce the pressure.
本発明において多数本の複合チューブを並列に平面的に
接触させたり、更にそれらを積み重ねて多段に設けたり
する場合、それらを束ねて紐状のものでまとめる方法を
用いてもよいが、該チューブを安定させるガイドを螺旋
状に該円筒体の周囲に設けてそれに沿って多数の複合チ
ューブを設けてもよい。In the present invention, when a plurality of composite tubes are brought into contact with each other in a plane in parallel, or when they are further stacked and provided in multiple stages, a method of bundling them and putting them together in a string-like shape may be used. A guide may be provided spirally around the cylindrical body, and a number of composite tubes may be provided along the guide.
本発明において該チューブの内側を通る該感光性塗布液
を加圧するということは、該塗布液中の微細気泡を脱気
された該塗布液中の溶解消滅させるという効果を有す
る。In the present invention, pressurizing the photosensitive coating liquid passing through the inside of the tube has an effect of eliminating fine bubbles in the coating liquid by dissolving and disappearing in the deaerated coating liquid.
すなわち本発明の脱気・脱泡装置は感光性塗布液を塗布
する前に、多孔質性高分子膜複合チューブにより脱気お
よび脱泡処理を同時におこさせることが出来、処理され
た該塗布液を基材に塗布した場合、均一な感光膜が得ら
れるという感光材料の本質的仕様を満すのみでならず、
多数本の該複合チューブを用いた時、各チューブ内の流
動を均一にし、大量の処理を効率よく出来、さらに切
換,洗浄時においてはスムーズな排出が可能となり、労
力,時間,費用等を低減させた装置にすることが可能で
あることに最大の特徴がある。That is, the degassing / defoaming apparatus of the present invention can simultaneously perform degassing and defoaming treatment with a porous polymer membrane composite tube before applying the photosensitive coating liquid, and the treated coating liquid In addition to satisfying the essential specifications of the photosensitive material that a uniform photosensitive film is obtained,
When a large number of composite tubes are used, the flow in each tube is made uniform and a large amount of processing can be performed efficiently, and smooth discharge is possible during switching and cleaning, reducing labor, time, cost, etc. The greatest feature is that the device can be made to operate.
一般に従来の多孔質性高分子膜チューブによる脱気・脱
泡装置Aは第4図に示すようなフローシートとなってお
り、脱気・脱泡すべき液体を通す多孔質性高分子膜チュ
ーブ1が内蔵された減圧室2と、この真空度を圧力セン
サー3によって検出して制御回路4によって作動あるい
は停止させる真空ポンプ5と、脱気・脱泡すべき液体の
送液系とによって構成されている。上記脱気・脱泡装置
Aによって液体6に溶存する気体および微細気泡を除去
する場合には、減圧室2の圧力を所定の範囲の減圧状態
に保持しながら、バルブ8を調節することにより液体6
をポンプ7を用い加圧しながらチューブ内を所定の速度
で通過させる。In general, the conventional degassing / defoaming apparatus A using a porous polymer membrane tube has a flow sheet as shown in FIG. 4, and the porous polymer membrane tube through which the liquid to be degassed / defoamed passes. 1. A decompression chamber 2 containing 1 therein, a vacuum pump 5 that detects the degree of vacuum by a pressure sensor 3 and activates or deactivates by a control circuit 4, and a liquid delivery system for a liquid to be deaerated and defoamed. ing. When the gas and fine bubbles dissolved in the liquid 6 are removed by the degassing / defoaming device A, the liquid is adjusted by adjusting the valve 8 while maintaining the pressure in the decompression chamber 2 in a depressurized state within a predetermined range. 6
Is passed through the tube at a predetermined speed while being pressurized with a pump 7.
液体中に溶存する気体を脱気する時、脱気される量の程
度を表す言葉として「脱気度」を定義し、脱気される溶
存気体が多い時は脱気度が高いと呼び、少ない時は脱気
度が低いと呼ぶことにする。When degassing a gas dissolved in a liquid, we define "degassing degree" as a word that expresses the degree of degassing, and when the amount of dissolved gas being degassed is high, the degree of degassing is high. When the amount is low, the degree of deaeration is called low.
脱気度に影響を及ぼす要因のうちチューブについて言え
ば、内径はより小さく、肉厚はより薄く、液体との接触
面積はより大きい方が脱気されやすい。Regarding the tube among the factors that affect the degree of degassing, the smaller the inner diameter, the smaller wall thickness, and the larger the contact area with the liquid, the easier the gas is degassed.
一方、減圧室2内の真空度は高いほど脱気されやすい
が、チューブの孔径,空孔率によっては液体が透過する
場合がある。この場合、液体の表面張力が高いほど、チ
ューブの孔径,空孔率から言うと孔径は小さいほど、空
孔率も低いほど、液体の透過は起りにくい。従ってチュ
ーブからの液体透過は、チューブの材質,孔径および空
孔率が決まればチューブ内外の圧力差,液体の表面張力
と密接な関係がある。On the other hand, the higher the degree of vacuum in the decompression chamber 2 is, the more easily it is degassed, but the liquid may pass through depending on the hole diameter and porosity of the tube. In this case, the higher the surface tension of the liquid, the smaller the hole diameter and the porosity of the tube, and the lower the porosity, the less likely the liquid is to permeate. Therefore, the liquid permeation through the tube is closely related to the pressure difference between the inside and the outside of the tube and the surface tension of the liquid, if the material of the tube, the hole diameter and the porosity are determined.
液体がチューブを透過しない範囲で、チューブの材質,
内径,肉厚を同じにした場合、脱気度は減圧室内の真空
度で決定される。しかしながらチューブは長いほど脱気
度は高くなるが、逆に脱気すべき液体のチューブ内での
圧力損失が大きくなるので、この圧力損失を充分考慮に
入れなければならない。次に脱気すべき液体について言
えば液体の流量は少ないほど脱気されやすい。これは液
体のチューブ内での滞留時間が長いほど脱気されやすい
ことから理解出来る。又滞留時間が同じであれば、チュ
ーブ内を流れる流速が大きいほど脱気されやすい。さら
に液体の粘度は低い方が脱気されやすい。これはチュー
ブ壁での境膜層の厚みが薄くなることや拡散係数が大き
くなることから理解出来る。As long as the liquid does not penetrate the tube,
When the inner diameter and the wall thickness are the same, the degree of degassing is determined by the degree of vacuum in the decompression chamber. However, the longer the tube, the higher the degree of deaeration, but on the contrary, the pressure loss of the liquid to be deaerated in the tube becomes large, and this pressure loss must be taken into consideration. Next, regarding the liquid to be degassed, the smaller the flow rate of the liquid, the more easily it is degassed. This can be understood from the fact that the longer the residence time of the liquid in the tube, the easier it is to degas. If the residence time is the same, the higher the flow velocity in the tube, the easier it is to degas. Further, the lower the viscosity of the liquid is, the more easily it is degassed. This can be understood from the fact that the film thickness on the tube wall is thin and the diffusion coefficient is large.
一方該液体中に存在する微細気泡はその大きさにもよる
が、チューブの中を通過する間に除去される。On the other hand, the fine bubbles existing in the liquid are removed while passing through the tube, depending on their size.
脱泡の程度はチューブの材質,肉厚および内径,減圧室
の真空度,液体の流量,粘度が決まれば脱泡すべき液体
中に存在する微細気泡がチューブの内壁にいかに接近す
るかに影響される。The degree of defoaming depends on how close the inner walls of the tube are to the fine bubbles present in the liquid to be defoamed if the material, thickness and inner diameter of the tube, the vacuum degree of the decompression chamber, the flow rate of the liquid, and the viscosity are determined. To be done.
以上チューブの中に液体を通す場合について述べたが、
感光性塗布液の場合、その粘度が高かったり、チューブ
のあとに続く流路での圧力損失が大きくなったりする時
にはチューブには過度の圧力が加わりチューブの耐圧力
を超え、破裂することがあり、該塗布液の処理が不可能
になることがある。So far, I have described the case of passing liquid through the tube,
In the case of a photosensitive coating liquid, when the viscosity is high or the pressure loss in the flow path following the tube is large, excessive pressure may be applied to the tube and it may exceed the withstand pressure of the tube and burst. The treatment of the coating solution may become impossible.
従って、感光性塗布液を処理する時、チューブのあとに
続く流路の圧力損失を小さくしたり、チューブでの圧力
損失を小さくすることが重要であるが、それが困難な場
合は、チューブの耐圧力性を高める必要がある。Therefore, when processing the photosensitive coating liquid, it is important to reduce the pressure loss in the flow path following the tube, and to reduce the pressure loss in the tube. It is necessary to increase pressure resistance.
この手段としてチューブの外側に補強材を設ける方法が
あるが、この時チューブの処理能力を出来るだけ損なわ
ない構造にする必要がある。As a means for this, there is a method of providing a reinforcing material on the outside of the tube, but at this time, it is necessary to have a structure that does not impair the processing capacity of the tube as much as possible.
上記の観点よりチューブの外側に設ける補強材は一般的
には多孔質性の構造が好ましく、その素材としては高分
子材料が好ましい。From the above viewpoint, the reinforcing material provided on the outside of the tube generally has a porous structure, and the material thereof is preferably a polymeric material.
補強材をチューブの外側に設けた脱気・脱泡用複合チュ
ーブの耐圧性はほとんど補強材に依存する。The pressure resistance of a composite tube for degassing and defoaming in which a reinforcing material is provided outside the tube depends almost entirely on the reinforcing material.
このようにした多孔質性高分子膜複合チューブは複数の
チューブを接触させても、外側に設けた補強材が接触す
るのみで、脱気・脱泡を実質的に行なう内側のチューブ
の外表面積を減少させることはないので、その点におけ
る脱気・脱泡効率を低下させることはない。In such a porous polymer membrane composite tube, even if a plurality of tubes are brought into contact with each other, only the outer reinforcing material comes into contact with the outer surface area of the inner tube for substantially degassing and defoaming. Therefore, the degassing / defoaming efficiency at that point is not lowered.
なお脱気処理および脱泡処理が同時におこなわれている
チューブの内側の感光性塗布液を加圧することは、流入
気泡が脱気をされている該感光性塗布液に溶解され、脱
泡処理されるという効果をも生み、脱泡能力もあげるこ
とができ、その加圧程度は0.5kg/cm2ゲージ圧以上が好
ましい。It should be noted that pressurizing the photosensitive coating liquid inside the tube in which the degassing treatment and the defoaming treatment are simultaneously performed means that the inflowing bubbles are dissolved in the degassed photosensitive coating liquid and the defoaming treatment is performed. The depressurizing ability can be improved, and the degree of pressurization is preferably 0.5 kg / cm 2 gauge pressure or more.
本発明において複合チューブの外側を減圧する方法はい
かなる方法でもよく、感光性塗布液の場合の圧力は通常
300Torr〜1Torrが好ましい。In the present invention, the method of decompressing the outside of the composite tube may be any method, and the pressure in the case of the photosensitive coating liquid is usually
300 Torr to 1 Torr is preferable.
このようにして、脱気・脱泡能力を有していても耐圧力
性に劣るチューブは、その外側に脱気・脱泡能力を損な
わない構造の該多孔質性の補強材を設け複合チューブと
することにより、耐圧力性を高めることが出来、チュー
ブに加わる圧力が高くなってもその脱気・脱泡能力の維
持が可能となるのみならず、感光性塗布液中の微細気泡
を脱気された該塗布液中へ溶解消滅させることが出来る
という効果も生み出すし脱気・脱泡能力を増大させるこ
とが出来るばかりでなく、複合チューブを互いに接触さ
せても脱気・脱泡効率を低下させることがないので、大
量の感光性塗布液の処理のために複数本のチューブを用
いて平面的に接触させてモジュールを形成した場合に
は、コンパクトな装置にすることが出来る。しかしなが
ら多数本の多孔質性高分子膜複合チューブを並列に配す
るモジュール化においては、該チューブの配し方によっ
ては、脱気・脱泡効率が低下したり、切換,洗浄におい
て、多大の労力,時間,費用等を要する。In this way, a tube with poor pressure resistance even if it has degassing / defoaming ability is provided with a porous reinforcing material having a structure that does not impair the degassing / defoaming ability on the outside thereof. This makes it possible to increase the pressure resistance and maintain the degassing and defoaming ability even when the pressure applied to the tube becomes high, and it also removes fine bubbles in the photosensitive coating liquid. Not only can the effect of being able to dissolve and disappear in the sprayed coating solution be created and the degassing / defoaming ability can be increased, but even if the composite tubes are brought into contact with each other, degassing / defoaming efficiency can be improved. Since it does not decrease, a compact device can be obtained when a plurality of tubes are used for planar treatment to form a module for treating a large amount of photosensitive coating liquid. However, when modularizing a large number of porous polymer membrane composite tubes in parallel, degassing / defoaming efficiency may be reduced depending on how the tubes are arranged, and a great deal of labor is required in switching and cleaning. , It takes time and money.
そこで本発明は、該複合チューブを並列に平面的に接触
させて円筒体の周囲に螺旋状に巻き、この時該チューブ
は4゜以上の立ち上がり勾配をもたす。さらに該多数本
多孔質性高分子膜複合チューブを並列に平面的に接触さ
せたものを更にその上に重ねて多段に設けることを行う
脱気・脱泡装置を発明した。又これらのチューブを固定
するのに該円筒体の周囲にガイドを螺旋状に設けたり、
該複合チューブが螺旋状に巻かれている円筒体に多数の
孔を設けたものを用いる等を行うことも出来る。このよ
うにして、大量の感光性塗布液の処理を可能としたモジ
ュール化された脱気・脱泡装置を製作することによっ
て、コンパクトでしかも脱気・脱泡効率の低下を防止す
ると共に切替・洗浄時においてもスムーズな排出が可能
となり、労力,時間,費用等の大巾な低減が可能となる
装置にすることが出来る。Therefore, in the present invention, the composite tubes are arranged in parallel and in planar contact with each other and spirally wound around a cylindrical body, and at this time, the tubes have a rising slope of 4 ° or more. Further, the inventors have invented a degassing / defoaming device in which a multiplicity of porous polymer membrane composite tubes, which are in parallel and in planar contact, are further stacked and provided in multiple stages. In order to fix these tubes, a guide is spirally provided around the cylinder,
It is also possible to use, for example, a cylindrical body in which the composite tube is spirally wound and provided with a large number of holes. In this way, by producing a modular degassing / defoaming device that can process a large amount of photosensitive coating liquid, it is compact and prevents degassing / defoaming efficiency from deteriorating and switching. A device that enables smooth discharge even during cleaning and can greatly reduce labor, time, cost, etc. can be provided.
次に本発明に係わる脱気・脱泡装置の実施態様を第1図
によって説明する。但し本発明は本実施例に限定される
ものではない。Next, an embodiment of the degassing / defoaming apparatus according to the present invention will be described with reference to FIG. However, the present invention is not limited to this embodiment.
第1図に示す脱気・脱泡装置9はガイド10及び多数の孔
11を有する円筒体12のまわりに第2図(a)に示すよう
に、並列に平面的に接触したものを更にその上に重ねて
多段に設けた多孔質性高分子膜からなる多数本の複合チ
ューブ13が立ち上がり勾配を有し螺旋状に巻きつけられ
たモジュール14、減圧室15,塗布液の入口16a,出口16b,
排気管17,真空ポンプ18,圧力センサー19,および制御回
路20で構成され、モジュール14は減圧室15の中に内蔵さ
れている。The degassing / defoaming device 9 shown in FIG. 1 has a guide 10 and a large number of holes.
As shown in FIG. 2 (a), a cylindrical body 12 having a plurality of porous polymer membranes, which are in parallel with each other and planarly contacted in parallel, are stacked on top of each other to form a multi-stage structure. The module 14 in which the composite tube 13 has a rising gradient and is spirally wound, the decompression chamber 15, the inlet 16a of the coating liquid, the outlet 16b,
It is composed of an exhaust pipe 17, a vacuum pump 18, a pressure sensor 19, and a control circuit 20, and the module 14 is built in a decompression chamber 15.
該複合チューブ13の出入口21a,21bはそれぞれ塗布22液
の入口16a,出口16bに開口している。減圧室15は真空ポ
ンプ18により排気管17を通り排気され、圧力センサー19
および制御回路20により所望の真空度に保たれる。塗布
液22aは塗布液入口16aより0.5kg/cm2以上に加圧されて
供給され、該複合チューブの入口21aへ導かれ円筒体12
にスパイラル状に巻かれた1本の内径6mm程度の多数本
よりなる複合チューブ13の中を通過する間に、該塗布液
22aの中の溶存空気は脱気され、モジュール14の塗布液
出口16bへと到達し、脱気された塗布液22bとなる。モジ
ュール14の中を通過する間に除去された溶存空気は減圧
室15の真空度を低下させるが、この時圧力センサー19が
真空度を検出して、制御回路20により真空ポンプ18を作
動させ、減圧室15を所望の真空度に保つようにする。The inlets / outlets 21a and 21b of the composite tube 13 are opened to the inlet 16a and the outlet 16b of the coating 22 liquid, respectively. The decompression chamber 15 is evacuated by the vacuum pump 18 through the exhaust pipe 17, and the pressure sensor 19
The desired vacuum degree is maintained by the control circuit 20. The coating liquid 22a is supplied from the coating liquid inlet 16a under a pressure of 0.5 kg / cm 2 or more, is guided to the inlet 21a of the composite tube, and the cylindrical body 12
While passing through a composite tube 13 consisting of a large number of spirally wound ones with an inner diameter of about 6 mm, the coating liquid
The dissolved air in 22a is deaerated, reaches the coating liquid outlet 16b of the module 14, and becomes the deaerated coating liquid 22b. The dissolved air removed while passing through the module 14 lowers the vacuum degree of the decompression chamber 15, at which time the pressure sensor 19 detects the vacuum degree, and the control circuit 20 operates the vacuum pump 18, The decompression chamber 15 is maintained at a desired degree of vacuum.
なおモジュール14を形成するスパイラル状多孔質性高分
子膜複合チューブは、第2図(b)に示すように,分離
用チューブ24はその材質がポリ四フッ化エチレン樹脂で
あり、内径6mm,肉厚は0.25mmのものが用いられている
が、耐圧力性を向上させると共に該チューブ24の接触に
よる脱気能力の低下を防止するため、このチューブの外
側にポリ四フッ化エチレン樹脂製の多孔質体よりなる補
強用チューブ23を設け、複合体としている。In the spiral porous polymer membrane composite tube forming the module 14, as shown in FIG. 2 (b), the separating tube 24 is made of polytetrafluoroethylene resin and has an inner diameter of 6 mm and a meat A thickness of 0.25 mm is used, but in order to improve the pressure resistance and prevent the degassing ability from decreasing due to the contact of the tube 24, the outside of this tube is made of polytetrafluoroethylene resin and has a porous structure. A reinforcing tube 23 made of a material is provided to form a composite body.
補強用チューブ23を分離用チューブ24の外側に設けた脱
気・脱泡用複合チューブの耐圧性はほとんど補強用チュ
ーブ23の強度に依存するが、補強用チューブ23のみかけ
の肉厚は0.2〜2mm,好ましくは0.3〜1.5mm,空孔率は3〜
40%,好ましくは5〜30%,平均孔径は0.5〜20μm,好
ましくは1〜10μmが望ましい。Although the pressure resistance of the degassing / defoaming composite tube in which the reinforcing tube 23 is provided outside the separating tube 24 depends almost on the strength of the reinforcing tube 23, the apparent wall thickness of the reinforcing tube 23 is 0.2 to 2mm, preferably 0.3 to 1.5mm, porosity 3 to
40%, preferably 5 to 30%, and the average pore size is 0.5 to 20 μm, preferably 1 to 10 μm.
なお、分離用チューブ24と補強用チューブ23を一体化し
た複合チューブ13を用いても多孔質性高分子膜複合チュ
ーブ13の範囲に含まれることは言うまでもない。Needless to say, the composite tube 13 in which the separation tube 24 and the reinforcing tube 23 are integrated is included in the range of the porous polymer membrane composite tube 13.
第3図は上記効果を確認するための実験装置のフローシ
ートを示すもので図中25は調製タンク、26はポンプ、9
は該複合チューブを収納した脱気・脱泡装置、27はバル
ブである。感光性塗布液22はポンプ26により撹拌機28が
設けられた調製タンンク25から吸引され脱気・脱泡装置
9に供給される。この時脱気・脱泡装置9内に設置され
た複合チューブ13の外側は第1図に示すように真空ポン
プ18(図示せず)により減圧下に置かれる。FIG. 3 shows a flow sheet of an experimental apparatus for confirming the above effect. In the figure, 25 is a preparation tank, 26 is a pump, and 9
Is a degassing / defoaming device that houses the composite tube, and 27 is a valve. The photosensitive coating liquid 22 is sucked by the pump 26 from the preparation tank 25 provided with the stirrer 28 and supplied to the degassing / defoaming device 9. At this time, the outside of the composite tube 13 installed in the degassing / defoaming device 9 is placed under reduced pressure by a vacuum pump 18 (not shown) as shown in FIG.
しかして脱気・脱泡装置9の出側に加圧用のバルブ27を
ポンプ26と脱気・脱泡装置9の間には圧力計29をそれぞ
れとりつけてある。Therefore, a valve 27 for pressurization is attached to the outlet side of the degassing / defoaming device 9 and a pressure gauge 29 is installed between the pump 26 and the degassing / defoaming device 9.
なお加圧用バルブ27の出側から流出する感光性塗布液は
脱気度及び泡から溶存空気への置換性を調べるためサン
プリングされる。The photosensitive coating liquid flowing out from the outlet side of the pressurizing valve 27 is sampled in order to check the degree of deaeration and the ability to replace bubbles with dissolved air.
これにより脱気・脱泡装置の脱気能力及び装置の洗浄性
を評価しようとするものである。This is intended to evaluate the degassing ability of the degassing / foaming device and the cleaning property of the device.
以下本発明の1実施例について説明するが、本発明は本
実施例のみに限定されるものではない。One embodiment of the present invention will be described below, but the present invention is not limited to this embodiment.
実施例−1 第1図に示すような脱気・脱泡用複合チューブを収納し
た脱気・脱泡装置を第3図に示すように配した実験装置
を用いて、第1表に示す組成と物性の感光性塗布液(液
温20℃)の処理を実施した。Example-1 A composition shown in Table 1 was obtained by using an experimental apparatus in which a degassing / defoaming apparatus containing a degassing / defoaming composite tube as shown in FIG. 1 was arranged as shown in FIG. Then, the photosensitive coating liquid (liquid temperature 20 ° C.) was treated.
脱気・脱泡装置の仕様及び条件 (1)複合チューブ外真空度 50Torr±2Torr (2)複合チューブ a.分離用チューブ 材質:ポリ四フッ化エチレン樹脂 内径:6mm 肉厚:0.25mm b.補強用チューブ 材質:ポリ四フッ化エチレン樹脂 内径:6.5mm 肉厚:0.8mm(みかけの) 空孔率:25% 平均口径:1〜2μm 脱気・脱泡装置9に加える圧力を0.5kg/cm2ゲージ圧と
し上記条件にて感光性塗布液の処理量を変化させた場
合、脱気・脱泡装置で脱気された感光性塗布液の脱気度
を調べるため、加圧用バルブ27の出側の配管から脱気液
をサンプリングし,溶存酸素濃度を溶存酸素濃度計で測
定した結果を第5図に示す。脱気・脱泡装置9では多数
の複合チューブを用いているが、複合チューブ1本当り
に換算した結果としている。 Degassing / defoaming equipment specifications and conditions (1) External vacuum degree of composite tube 50 Torr ± 2 Torr (2) Composite tube a. Separation tube Material: Polytetrafluoroethylene resin Inner diameter: 6 mm Wall thickness: 0.25 mm b. Reinforcement Tube material: Polytetrafluoroethylene resin Inner diameter: 6.5 mm Thickness: 0.8 mm (Apparent) Porosity: 25% Average diameter: 1 to 2 μm Pressure applied to degassing / defoaming device 9 is 0.5 kg / cm When the processing amount of the photosensitive coating liquid is changed under the above conditions with 2 gauge pressure, the pressure valve 27 is opened to check the degassing degree of the photosensitive coating liquid degassed by the degassing / defoaming device. Fig. 5 shows the results of sampling the degassed liquid from the side pipe and measuring the dissolved oxygen concentration with a dissolved oxygen concentration meter. The degassing / defoaming apparatus 9 uses a large number of composite tubes, but the results are calculated for each composite tube.
脱気度を表す言葉として「相対溶存空気量」を次のよう
に定義する。"Relative dissolved air content" is defined as follows as a word that represents the degree of degassing.
相対溶存空気量100パーセントとは、ある温度(この場
合は20℃)で脱気すべき液体を充分撹拌し、溶存空気を
飽和させ、溶存酸素濃度を溶存酸素濃度計で測定した時
にそれが示す値を言い、脱気された液体の溶存空気量に
ついては、該脱気液体を脱気される前の飽和溶存空気含
有の液体と同じ温度(この場合は20℃)にし、同様に溶
存酸素濃度を溶存酸素濃度計で測定し、この時の値を相
対溶存空気量100パーセントの液に対する相対値として
表し、相対溶存空気量と呼びパーセントで表示する。従
って相対溶存空気量が小さいほど、脱気度は高いと言え
る。Relative dissolved air content of 100% means that when the liquid to be degassed is thoroughly stirred at a certain temperature (20 ° C in this case), the dissolved air is saturated, and the dissolved oxygen concentration is measured by a dissolved oxygen concentration meter. Regarding the amount of dissolved air in the degassed liquid, the degassed liquid is brought to the same temperature as the liquid containing saturated dissolved air before degassing (in this case, 20 ° C.), and the dissolved oxygen concentration is also the same. Is measured with a dissolved oxygen concentration meter, and the value at this time is expressed as a relative value for a liquid having a relative dissolved air content of 100%, and is referred to as a relative dissolved air content and displayed as a percentage. Therefore, it can be said that the smaller the relative dissolved air amount, the higher the degassing degree.
次に脱気・脱泡装置9をとり除き、該装置9で使われて
いる複合チューブと同様にして成形された1本の複合チ
ューブをセットした実験装置(図示せず)でチューブ内
に加える圧力をバルブ27により変化させて、該塗布液が
透過する圧力及び該複合チューブが破裂する圧力を調べ
たところ、塗布液透過の圧力は約6.0kg/cm2ゲージ圧、
チューブの破裂する圧力は約10kg/cm2ゲージ圧であっ
た。Next, the degassing / defoaming device 9 is removed, and one composite tube molded in the same manner as the composite tube used in the device 9 is added to the inside of the tube with an experimental device (not shown) in which it is set. The pressure is changed by the valve 27, and the pressure at which the coating liquid permeates and the pressure at which the composite tube bursts are examined.The pressure at which the coating liquid permeates is about 6.0 kg / cm 2 gauge pressure,
The pressure at which the tube bursts was approximately 10 kg / cm 2 gauge pressure.
比較例−1 実施例−1において、脱気・脱泡装置内に収納された多
数の複合チューブの代りに1本の複合チューブを用いた
以外は実施例−1と同様の条件で脱気度を測定した。結
果を同様に第5図に示す。Comparative Example-1 Degassing degree under the same conditions as in Example-1 except that one composite tube was used in place of the multiple composite tubes housed in the degassing / defoaming apparatus in Comparative Example-1. Was measured. The results are also shown in FIG.
第5図において脱気処理量に対し実施例は従来方法の比
較例と比較して殆ど同じ相対溶存空気量を示している
が、多数本による全体の脱気処理量が多くなる場合は明
らかに相対溶存空気量は比較例に比して格段に小さい価
になる。即多数本の効果が出てくる。In FIG. 5, the example shows almost the same relative dissolved air amount as compared with the comparative example of the conventional method with respect to the degassing amount, but when the total degassing amount by a large number is large, it is clear. The relative dissolved air amount is much smaller than that of the comparative example. Immediately many effects come out.
実施例−2 第1図に示すような多数の脱気・脱泡用複合チューブを
収納した脱気・脱泡装置を、第3図に示すように配した
実験装置において、調製タンク25とポンプ26の間及び脱
気・脱泡装置9の入側配管に夫々液抜きバルブ30,31を
設け、第3表に示す組成と物性の感光性塗布液の処理を
実施した後、減圧室を大気圧に解放すると共に、ポンプ
を停止し処理を停止した。Example-2 In the experimental apparatus arranged as shown in FIG. 3, a degassing / defoaming apparatus containing a large number of degassing / defoaming composite tubes as shown in FIG. The depressurizing chamber is enlarged after the liquid-removing valves 30 and 31 are installed between 26 and the inlet side pipe of the degassing / defoaming device 9 to process the photosensitive coating liquid having the composition and physical properties shown in Table 3. The pressure was released, and the pump was stopped to stop the process.
次に脱気・脱泡装置9の入側配管に設けた液抜きバルブ
31を開け、流出する感光性塗布液の量を測定した結果、
脱気・脱泡装置9及び配管にホールドアップされる量を
計算した値とほぼ一致した。Next, a liquid removal valve provided in the inlet pipe of the degassing / defoaming device 9.
As a result of opening 31 and measuring the amount of the photosensitive coating liquid flowing out,
The calculated values of the amount held in the degassing / defoaming device 9 and the pipes were almost the same.
また調製タンク25とポンプ26の間に設けた液抜きバルブ
30を開け、調製タンク25及び配管中の感光性塗布液を排
出したのち該調製タンクン25及び配管中の感光性塗布液
を排出したのち該調製タンク25を洗浄した。次に加圧用
バルブ27以外のバルブ30,31を閉め,メチルエチルケト
ン及びメチルセルソルブアセテートの混合液を該タンク
25に投入し、ポンプ26を作動させ、該複合チューブの洗
浄性をみるため加圧用バルブ27の出側配管より液が流出
し始めると同時にサンプリングし、分光々度計により吸
光度を測定した。結果を第6図に示す。Also, a drain valve provided between the preparation tank 25 and the pump 26.
After opening 30, the photosensitive coating liquid in the preparation tank 25 and the pipe was discharged, and then the photosensitive coating liquid in the preparation tank 25 and the pipe was discharged, and then the preparation tank 25 was washed. Next, the valves 30 and 31 other than the pressurizing valve 27 are closed, and the mixture of methyl ethyl ketone and methyl cellosolve acetate is added to the tank.
25, the pump 26 was operated, and in order to check the washing property of the composite tube, the liquid started to flow out from the outlet pipe of the pressurizing valve 27 and was sampled at the same time, and the absorbance was measured by a spectrophotometer. Results are shown in FIG.
比較例−2 実施例−2において、脱気・脱泡装置内の円筒体をとり
除き、多数の該チューブに折れがないように単に収納し
た以外は実施例−2と同様の条件で洗浄性をみるための
サンプリングをし、分光々度計により吸光度を測定し
た。結果を同様に第6図に示す。尚脱気脱泡装置9の入
側管に設けた液抜バルブ31により液抜きも実施しておい
た。Comparative Example-2 In Example-2, the cleaning property was the same as in Example-2 except that the cylindrical body in the degassing / defoaming apparatus was removed, and a large number of the tubes were simply stored so as not to be broken. The sample was sampled to check the absorbance, and the absorbance was measured with a spectrophotometer. The results are also shown in FIG. The liquid was also removed by the liquid removal valve 31 provided in the inlet pipe of the degassing / defoaming device 9.
以上の実験例から、第5図からわかるように多数の多孔
質性高分子膜複合チューブを用いモジュール化した脱気
・脱泡装置の脱気処理能力は、一本の複合チューブと比
較した場合多少悪いがほとんど変りがなく、多数本をモ
ジュール化することにより大量処理が効果よく行なわれ
ることがわかる。From the above experimental example, as can be seen from FIG. 5, the deaerating capacity of the degassing / defoaming device modularized using a large number of porous polymer membrane composite tubes was compared with that of a single composite tube. It is a little bad, but there is almost no change, and it can be seen that mass processing is effectively performed by modularizing a large number of books.
さらに第6図から本発明の脱気・脱泡装置は洗浄性は極
めて良く、従来に比して洗浄時間の短縮も出来ることが
わかる。Further, it can be seen from FIG. 6 that the degassing / defoaming apparatus of the present invention has an extremely good cleaning property and can shorten the cleaning time as compared with the conventional one.
以上述べたように本発明は調製した感光性塗布液を塗布
装置により基材に塗布する前に溶存空気および微細気泡
を含む該感光性塗布液を多孔質性高分子膜複合チューブ
の内側に通し、該チューブの外側を減圧すると共に該感
光性塗布液を加圧しながら該感光性塗布液中の溶存空気
及び微細気泡を同時に除去する感光性塗布液の脱気・脱
泡装置において、多数の該多孔質性高分子膜複合チュー
ブを並列に平面的に接触させて円筒体の周囲に螺旋状に
巻き、該円筒体の両端部に該感光性塗布液の出入口を設
けたことを特徴とする脱気・脱泡装置によって、又該多
数本の多孔性高分子膜複合チューブが並列に平面的に接
触させたものを更にその上に重ねて多段に設けた前記記
載の脱気・脱泡装置によって、チューブの破裂を防止
し、該感光性塗布液の処理量を多くししかも該感光性塗
布液が多数の該チューブ内を通る時の圧力損失を小さく
すると共に各チューブの中の該感光性塗布液の流動状態
を同じようにすることが出来るので、脱気効率は上昇し
て、多数の該チューブが接触しても同様脱気処理能力の
低下を起こさない。また該感光性塗布液の排出において
はほとんど滞留なく排出可能となりさらに別の感光性塗
布液に切換えする時には極めて短い時間での洗浄により
可能となるので、洗浄の際の能率化・経済化が果され、
それによって、製品得率の向上,生産性の向上に寄与す
ることが出来た。As described above, according to the present invention, the photosensitive coating solution containing dissolved air and fine bubbles is passed through the inside of the porous polymer membrane composite tube before the prepared photosensitive coating solution is applied to the substrate by the coating device. In a degassing / defoaming apparatus for a photosensitive coating liquid, which simultaneously removes dissolved air and fine bubbles in the photosensitive coating liquid while depressurizing the outside of the tube and pressurizing the photosensitive coating liquid, A porous polymer membrane composite tube is arranged in parallel in parallel with each other and spirally wound around a cylindrical body, and the photosensitive coating solution is provided at both ends of the cylindrical body. By the degassing / defoaming device, or by the above-mentioned degassing / defoaming device in which a plurality of the porous polymer membrane composite tubes in parallel and in planar contact are further stacked and provided in multiple stages. , Prevent the tube from bursting, Since the amount of treatment can be increased and the pressure loss when the photosensitive coating liquid passes through a large number of tubes can be reduced and the flow state of the photosensitive coating liquid in each tube can be made the same, The degassing efficiency increases, and even if a large number of the tubes come in contact with each other, the degassing capacity does not decrease. Further, when the photosensitive coating liquid is discharged, it can be discharged with almost no retention, and when switching to another photosensitive coating liquid, cleaning can be performed in an extremely short time, so that efficiency and economy of cleaning can be improved. Is
This has contributed to the improvement of product yield and productivity.
本発明の実施態様として更に以下が列挙できる。The following can be enumerated as embodiments of the present invention.
(1) 螺旋状に多段に設けた複数の該チューブを固定
するガイドを螺旋状に該円筒体の周囲に設けたことを特
徴とする特許請求の範囲第1,2又は3項記載の脱気・脱
泡装置。(1) Degassing according to claim 1, 2 or 3, characterized in that a guide for fixing the plurality of tubes arranged in a spiral multistage is provided spirally around the cylindrical body.・ Defoaming device.
(2) 該チューブが螺旋状に巻かれている該円筒体は
直径2〜10mmの多数の孔を有することを特徴とする特許
請求の範囲第1,2又は3孔記載の脱気・脱泡装置。(2) The degassing / defoaming according to claim 1, 2 or 3 characterized in that the cylindrical body in which the tube is spirally wound has a large number of holes having a diameter of 2 to 10 mm. apparatus.
(3) 該チューブは分離膜及びその外側に高分子材料
からなる多孔質体を設けたものからなることを特徴とす
る特許請求の範囲第1,2又は3項記載の脱気・脱泡装
置。(3) The degassing / defoaming apparatus according to claim 1, 2 or 3, wherein the tube comprises a separation membrane and a porous body provided on the outside thereof and made of a polymer material. .
(4) 該多孔質性高分子膜複合チューブがポリ四フッ
化エチレン樹脂を用いることを特徴とする特許請求の範
囲第1,2又は3項記載の脱気・脱泡装置。(4) The degassing / defoaming apparatus according to claim 1, 2 or 3, wherein the porous polymer membrane composite tube uses a polytetrafluoroethylene resin.
第1図は本発明の脱気・脱泡装置の1実施例の概略説明
の側面断面図、第2図は第1図において円筒体に巻かれ
ている該複合チューブを説明するための部分拡大側面断
面図(a)及び該複合チューブの断面図(b)、第3図
は本発明の実験装置の実施例の概略説明図、第4図は従
来の多孔質性高分子膜からなるチューブを用いた脱気・
脱泡装置の一般的な概略説明図、第5図及び第6図はそ
れぞれ実施例−1,比較例−1及び実施例−2,比較例−2
における実験結果を示す図である。9 ……脱気・脱泡装置 10……ガイド、11……孔 12……円筒体13 ……多孔質性高分子膜複合チューブ 14……モジュール、15……減圧室 22a,22b……塗布液 23……補強用チューブ 24……分離用チューブ 26……ポンプFIG. 1 is a side sectional view of a schematic explanation of one embodiment of a degassing / defoaming apparatus of the present invention, and FIG. 2 is a partial enlarged view for explaining the composite tube wound around a cylindrical body in FIG. A side sectional view (a) and a sectional view of the composite tube (b), FIG. 3 is a schematic explanatory view of an embodiment of an experimental apparatus of the present invention, and FIG. 4 is a tube made of a conventional porous polymer membrane. Degassing used
The general | schematic schematic explanatory drawing of a defoaming apparatus, FIG. 5 and FIG. 6 is Example-1, Comparative example-1, Example-2, Comparative example-2, respectively.
It is a figure which shows the experimental result in. 9 …… Degassing / defoaming device 10 …… Guide, 11 …… Pore 12 …… Cylinder 13 …… Porous polymer membrane composite tube 14 …… Module, 15 …… Decompression chamber 22a, 22b …… Coating Liquid 23 …… Reinforcement tube 24 …… Separation tube 26 …… Pump
Claims (3)
材に塗布する前に、溶存空気および微細気泡を含む該感
光性塗布液を多孔質性高分子膜複合チューブの内側に通
し、該チューブの外側を減圧すると共に該感光性塗布液
を加圧しながら該感光性塗布液中の溶存空気及び微細気
泡を同時に除去する感光性塗布液の脱気・脱泡装置にお
いて、多数本の該多孔質性高分子膜複合チューブを並列
に平面的に接触させて円筒体の周囲に螺旋状に巻き、該
円筒体の両端部に該感光性塗布液の出入口を設けたこと
を特徴とする脱気・脱泡装置。1. A photosensitive coating liquid containing dissolved air and fine bubbles is passed through the inside of a porous polymer membrane composite tube before the prepared photosensitive coating liquid is coated on a substrate by a coating device. In the degassing / defoaming apparatus for a photosensitive coating liquid, which simultaneously removes dissolved air and fine bubbles in the photosensitive coating liquid while depressurizing the outside of the tube and pressurizing the photosensitive coating liquid, a large number of the porous Degassing, characterized in that a qualitative polymer membrane composite tube is arranged in parallel in parallel with each other and spirally wound around a cylindrical body, and the inlet and outlet of the photosensitive coating liquid are provided at both ends of the cylindrical body.・ Defoaming device.
複合チューブの立ち上がり勾配が4゜以上であることを
特徴とする請求項(1)記載の脱気・脱泡装置。2. The degassing / defoaming apparatus according to claim 1, wherein a large number of the spirally wound porous polymer membrane composite tubes have a rising slope of 4 ° or more.
が並列に平面的に接触させたものを更にその上に重ねて
多段に設けたものであることを特徴とする請求項(1)
又は(2)記載の脱気・脱泡装置。3. The multi-layered porous polymer membrane, wherein the composite tubes are provided in parallel in a plane and in contact with each other, and are stacked in multiple stages. )
Alternatively, the degassing / defoaming device according to (2).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14063388A JPH0759283B2 (en) | 1988-06-09 | 1988-06-09 | Degassing / defoaming device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14063388A JPH0759283B2 (en) | 1988-06-09 | 1988-06-09 | Degassing / defoaming device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01310705A JPH01310705A (en) | 1989-12-14 |
JPH0759283B2 true JPH0759283B2 (en) | 1995-06-28 |
Family
ID=15273228
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14063388A Expired - Fee Related JPH0759283B2 (en) | 1988-06-09 | 1988-06-09 | Degassing / defoaming device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0759283B2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9370734B2 (en) * | 2013-06-26 | 2016-06-21 | Idex Health & Science, Llc | Fluid degassing module with helical membrane |
CN111424306B (en) * | 2020-04-13 | 2021-02-19 | 厦门通富微电子有限公司 | Bubble stripping device and electroplating solution electroplating system |
-
1988
- 1988-06-09 JP JP14063388A patent/JPH0759283B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH01310705A (en) | 1989-12-14 |
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