JPH0759283B2 - Degassing / defoaming device - Google Patents

Description

TECHNICAL FIELD The present invention relates to an apparatus for treating a coating solution for improving the coating quality when the photosensitive coating solution is applied by a coating apparatus, and more specifically, the coating solution. The present invention relates to a degassing / defoaming device used in a treatment apparatus for a coating liquid in order to simultaneously remove dissolved air and fine bubbles contained in the coating liquid before being coated.

[Conventional technology]

In general, some liquids require the removal of air and air bubbles contained in the liquid during application. For example, when a photosensitive coating liquid for a photosensitive material is applied to a substrate by a coating device while containing dissolved air and air bubbles, depending on the coating device, precipitation of dissolved air in the photosensitive coating liquid or a normal coating may occur. In this case, since vertical streaks due to bubbles contained in the photosensitive coating liquid cause failure due to bubbles on the coating surface such as pinholes, it is impossible to form a uniform photosensitive film on the base material, It is necessary to remove air and air bubbles contained in the photosensitive coating liquid.

Conventionally, as a method for coping with this, there are many known methods for first removing air dissolved in a liquid (referred to as deaeration), but a typical example thereof is a method of placing the liquid under reduced pressure. As an example thereof, Japanese Patent Publication No. 51-35259,
JP-A-56-147605, JP-A-56-76213, JP-A-49-9
There are known devices disclosed in Japanese Patent Laid-Open No. 7003 and Japanese Patent Laid-Open No. 50-159469.

There is also a method of using a porous polymer membrane, examples of which include JP-A-51-28261, JP-A-54-123785, JP-A-55-121806, and JP-A-57-165007. JP-A-58-8140
The method or device disclosed in the publications such as No. 4 and the like are known.

On the other hand, remove bubbles contained in the liquid (called defoaming)
Many methods are known. When a photosensitive coating liquid is used as a device for performing such defoaming treatment, conventionally,
Japanese Patent Publication No. 47-6835, Japanese Patent Publication No. 57-6365, and Japanese Patent Publication No. 51392
74, JP 59-69108, JP 59-92003, JP
There are known ultrasonic defoaming (referred to as ultrasonic treatment) devices disclosed in Japanese Patent Application Laid-Open Nos. 59-156405 and 61-50608.

[Problems to be Solved by the Invention]

However, among the former degassing methods, the method of placing the liquid under reduced pressure can remove the air dissolved in the liquid, but the phenomenon occurs that fine bubbles are generated in the liquid. In addition, in the method using the porous polymer film, no bubbling phenomenon is observed when treating the photosensitive coating liquid, but
It is not possible to remove inflow bubbles of μm. Therefore, although these methods and devices can remove the air dissolved in the liquid, it is extremely difficult to remove the air bubbles depending on the size. Therefore, the fine bubbles generated as described above, the bubbles formed by combining them, and the bubbles contained in the liquid are applied to the substrate by a coating device when a photosensitive coating liquid is used, for example. Then, there arises a problem that a uniform photosensitive film cannot be formed.

The latter defoaming method can remove the air bubbles contained in the photosensitive coating solution, but cannot remove the air dissolved in the solution. Since the air dissolved in the defoamed photosensitive coating liquid is saturated or supersaturated, for example, when the liquid temperature of the photosensitive coating liquid rises or a shearing force is applied, the dissolved air is precipitated. However, there is a problem that a uniform photosensitive film cannot be formed when it is applied to a substrate.

Further, a porous polymer membrane tube (hereinafter referred to as a tube) is used, a photosensitive coating solution is passed through the tube, and the outside of the tube is depressurized to simultaneously dissolve dissolved air and fine bubbles in the photosensitive coating solution. The tube to be removed (Japanese Patent Application No. 62-832)
In 2), the removal capacity varies depending on the raw material used during molding and the conditions such as molecular weight, wall thickness, porosity, and pore size. Generally, the raw material used and molecular weight are determined within the range where liquid permeation does not occur. For example, the higher the porosity of the tube, the larger the pore diameter, and the thinner the wall, the higher the removal capacity, and there is an advantage that the throughput per unit length of the tube can be increased.

However, in such a tube, when a photosensitive coating liquid having a high viscosity is used, or when the pressure loss in the flow path following the tube is large, the pressure in the tube rises and the photosensitive coating liquid is The tube may burst before penetrating the tube wall.

If the length of the tube is increased in order to increase the amount of treatment, the pressure loss may increase, and the tube may eventually burst.

In order to prevent the tubes from bursting and to increase the amount of photosensitive coating solution to be processed, it is possible to arrange multiple tubes in parallel to form a module, but the tubes that make up the module should be considered as follows. I can.

That is, once the tube is determined, there is an optimum tube length for obtaining the most efficient degree of degassing at a certain throughput. For example, when the total length of the tubes is the same and the number of short tubes is plural in parallel at the same throughput, the degree of degassing is low. In addition, when one long tube is used, if it is too long, a phenomenon occurs in which the degree of degassing does not increase for the length. This is because the tube can be efficiently degassed for a certain length, but if it is longer than that, the liquid with less dissolved air will have to be further degassed. This is probably because the efficiency drops.

Therefore, in order to increase the throughput as described above, it is effective to use a module that bundles the tubes of the optimum length. However, depending on the structure of the module or the housing and placement of the tubes, it may Since the photosensitive coating solution flowing in the different flow states does not provide the desired degassing capacity for the module as a whole, and if the degassing efficiency is reduced or multiple tubes are in contact with each other, the tubes will be degassed. If the effective outer surface area is reduced, the degassing efficiency is also reduced, and if there is a tube in which the photosensitive coating solution does not flow properly among multiple tubes, cleaning is performed when switching to another photosensitive coating solution. Requires a great deal of labor, time, and cleaning liquid, or when the photosensitive coating liquid or cleaning liquid is discarded, it is difficult to smoothly flow out due to gravity and remains in the tube. Therefore, there are various drawbacks in that not only a large amount of the coating solution is required when changing to a photosensitive coating solution after cleaning, but also in the case of the expensive coating solution, it becomes a loss and is economically disadvantageous. ing.

The present invention has been made based on the above circumstances, and an object thereof is to simultaneously remove dissolved air and fine bubbles present in a photosensitive coating liquid and prevent coating failure caused by the dissolved air and fine bubbles. Then, in the degassing / defoaming treatment apparatus of the photosensitive coating liquid for forming a uniform photosensitive film on the substrate, the above various drawbacks are eliminated, the rupture of the tube is prevented, and the degassing efficiency is increased. It is to provide a degassing / defoaming device that is efficient and economical in cleaning.

[Means and Actions for Solving the Problems]

The above-described object of the present invention is to apply the prepared photosensitive coating solution containing dissolved air and fine bubbles to the inside of the porous polymer film composite tube before coating the prepared photosensitive coating solution on a substrate by a coating device. A degassing / defoaming device for the photosensitive coating liquid, which simultaneously removes dissolved air and fine bubbles in the photosensitive coating liquid while pressing the photosensitive coating liquid while depressurizing the outside of the tube. Characterized in that the porous polymer membrane composite tubes of the present invention are made to contact in parallel in a plane and spirally wound around a cylindrical body, and the inlet and outlet of the photosensitive coating liquid are provided at both ends of the cylindrical body. It is achieved by the degassing / defoaming device.

The above object of the present invention can be more effectively achieved when the rising gradient of a large number of the porous polymer membrane composite tubes spirally wound in the degassing / defoaming apparatus is 4 ° or more.

The above-mentioned object of the present invention is similarly achieved even in the case where the plurality of porous polymer membrane composite tubes are arranged in parallel and planarly contacted and further stacked thereon in multiple stages. It

The porous polymer membrane composite tube in the present invention is a porous polymer membrane tube used as a degassing / defoaming separation membrane, and a porous membrane made of a reinforcing polymer material is provided on the outside thereof. The porous polymer membrane of the reinforcing material has an apparent wall thickness of 0.3 to 1.5 mm, a porosity of 5 to 30%, and an average pore diameter of 1 to 10 μm. It is desirable to use polytetrafluoroethylene resin or polyethylene resin as the material (Japanese Patent Application No. 62-315276).

When the multiple porous polymer membrane composite tubes of the present invention are planarly contacted and spirally wound around a cylindrical body, the rising gradient of the winding is 4 ° or more in consideration of washing. It is desirable to have a rising slope. When the photosensitive coating solution inlets and outlets are vertically provided at both ends of the cylindrical body, it is desirable that the lower end is an inlet and the upper end is a coating solution outlet.

In the present invention, it is preferable that the cylindrical body around which the composite tube is spirally wound has a large number of holes of 2-10 mm in order to reduce the weight of the apparatus and reduce the pressure.

In the present invention, when a plurality of composite tubes are brought into contact with each other in a plane in parallel, or when they are further stacked and provided in multiple stages, a method of bundling them and putting them together in a string-like shape may be used. A guide may be provided spirally around the cylindrical body, and a number of composite tubes may be provided along the guide.

In the present invention, pressurizing the photosensitive coating liquid passing through the inside of the tube has an effect of eliminating fine bubbles in the coating liquid by dissolving and disappearing in the deaerated coating liquid.

That is, the degassing / defoaming apparatus of the present invention can simultaneously perform degassing and defoaming treatment with a porous polymer membrane composite tube before applying the photosensitive coating liquid, and the treated coating liquid In addition to satisfying the essential specifications of the photosensitive material that a uniform photosensitive film is obtained,
When a large number of composite tubes are used, the flow in each tube is made uniform and a large amount of processing can be performed efficiently, and smooth discharge is possible during switching and cleaning, reducing labor, time, cost, etc. The greatest feature is that the device can be made to operate.

In general, the conventional degassing / defoaming apparatus A using a porous polymer membrane tube has a flow sheet as shown in FIG. 4, and the porous polymer membrane tube through which the liquid to be degassed / defoamed passes. 1. A decompression chamber 2 containing 1 therein, a vacuum pump 5 that detects the degree of vacuum by a pressure sensor 3 and activates or deactivates by a control circuit 4, and a liquid delivery system for a liquid to be deaerated and defoamed. ing. When the gas and fine bubbles dissolved in the liquid 6 are removed by the degassing / defoaming device A, the liquid is adjusted by adjusting the valve 8 while maintaining the pressure in the decompression chamber 2 in a depressurized state within a predetermined range. 6
Is passed through the tube at a predetermined speed while being pressurized with a pump 7.

When degassing a gas dissolved in a liquid, we define "degassing degree" as a word that expresses the degree of degassing, and when the amount of dissolved gas being degassed is high, the degree of degassing is high. When the amount is low, the degree of deaeration is called low.

Regarding the tube among the factors that affect the degree of degassing, the smaller the inner diameter, the smaller wall thickness, and the larger the contact area with the liquid, the easier the gas is degassed.

On the other hand, the higher the degree of vacuum in the decompression chamber 2 is, the more easily it is degassed, but the liquid may pass through depending on the hole diameter and porosity of the tube. In this case, the higher the surface tension of the liquid, the smaller the hole diameter and the porosity of the tube, and the lower the porosity, the less likely the liquid is to permeate. Therefore, the liquid permeation through the tube is closely related to the pressure difference between the inside and the outside of the tube and the surface tension of the liquid, if the material of the tube, the hole diameter and the porosity are determined.

As long as the liquid does not penetrate the tube,
When the inner diameter and the wall thickness are the same, the degree of degassing is determined by the degree of vacuum in the decompression chamber. However, the longer the tube, the higher the degree of deaeration, but on the contrary, the pressure loss of the liquid to be deaerated in the tube becomes large, and this pressure loss must be taken into consideration. Next, regarding the liquid to be degassed, the smaller the flow rate of the liquid, the more easily it is degassed. This can be understood from the fact that the longer the residence time of the liquid in the tube, the easier it is to degas. If the residence time is the same, the higher the flow velocity in the tube, the easier it is to degas. Further, the lower the viscosity of the liquid is, the more easily it is degassed. This can be understood from the fact that the film thickness on the tube wall is thin and the diffusion coefficient is large.

On the other hand, the fine bubbles existing in the liquid are removed while passing through the tube, depending on their size.

The degree of defoaming depends on how close the inner walls of the tube are to the fine bubbles present in the liquid to be defoamed if the material, thickness and inner diameter of the tube, the vacuum degree of the decompression chamber, the flow rate of the liquid, and the viscosity are determined. To be done.

So far, I have described the case of passing liquid through the tube,
In the case of a photosensitive coating liquid, when the viscosity is high or the pressure loss in the flow path following the tube is large, excessive pressure may be applied to the tube and it may exceed the withstand pressure of the tube and burst. The treatment of the coating solution may become impossible.

Therefore, when processing the photosensitive coating liquid, it is important to reduce the pressure loss in the flow path following the tube, and to reduce the pressure loss in the tube. It is necessary to increase pressure resistance.

As a means for this, there is a method of providing a reinforcing material on the outside of the tube, but at this time, it is necessary to have a structure that does not impair the processing capacity of the tube as much as possible.

From the above viewpoint, the reinforcing material provided on the outside of the tube generally has a porous structure, and the material thereof is preferably a polymeric material.

The pressure resistance of a composite tube for degassing and defoaming in which a reinforcing material is provided outside the tube depends almost entirely on the reinforcing material.

In such a porous polymer membrane composite tube, even if a plurality of tubes are brought into contact with each other, only the outer reinforcing material comes into contact with the outer surface area of the inner tube for substantially degassing and defoaming. Therefore, the degassing / defoaming efficiency at that point is not lowered.

It should be noted that pressurizing the photosensitive coating liquid inside the tube in which the degassing treatment and the defoaming treatment are simultaneously performed means that the inflowing bubbles are dissolved in the degassed photosensitive coating liquid and the defoaming treatment is performed. The depressurizing ability can be improved, and the degree of pressurization is preferably 0.5 kg / cm ² gauge pressure or more.

In the present invention, the method of decompressing the outside of the composite tube may be any method, and the pressure in the case of the photosensitive coating liquid is usually
300 Torr to 1 Torr is preferable.

In this way, a tube with poor pressure resistance even if it has degassing / defoaming ability is provided with a porous reinforcing material having a structure that does not impair the degassing / defoaming ability on the outside thereof. This makes it possible to increase the pressure resistance and maintain the degassing and defoaming ability even when the pressure applied to the tube becomes high, and it also removes fine bubbles in the photosensitive coating liquid. Not only can the effect of being able to dissolve and disappear in the sprayed coating solution be created and the degassing / defoaming ability can be increased, but even if the composite tubes are brought into contact with each other, degassing / defoaming efficiency can be improved. Since it does not decrease, a compact device can be obtained when a plurality of tubes are used for planar treatment to form a module for treating a large amount of photosensitive coating liquid. However, when modularizing a large number of porous polymer membrane composite tubes in parallel, degassing / defoaming efficiency may be reduced depending on how the tubes are arranged, and a great deal of labor is required in switching and cleaning. , It takes time and money.

Therefore, in the present invention, the composite tubes are arranged in parallel and in planar contact with each other and spirally wound around a cylindrical body, and at this time, the tubes have a rising slope of 4 ° or more. Further, the inventors have invented a degassing / defoaming device in which a multiplicity of porous polymer membrane composite tubes, which are in parallel and in planar contact, are further stacked and provided in multiple stages. In order to fix these tubes, a guide is spirally provided around the cylinder,
It is also possible to use, for example, a cylindrical body in which the composite tube is spirally wound and provided with a large number of holes. In this way, by producing a modular degassing / defoaming device that can process a large amount of photosensitive coating liquid, it is compact and prevents degassing / defoaming efficiency from deteriorating and switching. A device that enables smooth discharge even during cleaning and can greatly reduce labor, time, cost, etc. can be provided.

Next, an embodiment of the degassing / defoaming apparatus according to the present invention will be described with reference to FIG. However, the present invention is not limited to this embodiment.

The degassing / defoaming device 9 shown in FIG. 1 has a guide 10 and a large number of holes.
As shown in FIG. 2 (a), a cylindrical body 12 having a plurality of porous polymer membranes, which are in parallel with each other and planarly contacted in parallel, are stacked on top of each other to form a multi-stage structure. The module 14 in which the composite tube 13 has a rising gradient and is spirally wound, the decompression chamber 15, the inlet 16a of the coating liquid, the outlet 16b,
It is composed of an exhaust pipe 17, a vacuum pump 18, a pressure sensor 19, and a control circuit 20, and the module 14 is built in a decompression chamber 15.

The inlets / outlets 21a and 21b of the composite tube 13 are opened to the inlet 16a and the outlet 16b of the coating 22 liquid, respectively. The decompression chamber 15 is evacuated by the vacuum pump 18 through the exhaust pipe 17, and the pressure sensor 19
The desired vacuum degree is maintained by the control circuit 20. The coating liquid 22a is supplied from the coating liquid inlet 16a under a pressure of 0.5 kg / cm ² or more, is guided to the inlet 21a of the composite tube, and the cylindrical body 12
While passing through a composite tube 13 consisting of a large number of spirally wound ones with an inner diameter of about 6 mm, the coating liquid
The dissolved air in 22a is deaerated, reaches the coating liquid outlet 16b of the module 14, and becomes the deaerated coating liquid 22b. The dissolved air removed while passing through the module 14 lowers the vacuum degree of the decompression chamber 15, at which time the pressure sensor 19 detects the vacuum degree, and the control circuit 20 operates the vacuum pump 18, The decompression chamber 15 is maintained at a desired degree of vacuum.

In the spiral porous polymer membrane composite tube forming the module 14, as shown in FIG. 2 (b), the separating tube 24 is made of polytetrafluoroethylene resin and has an inner diameter of 6 mm and a meat A thickness of 0.25 mm is used, but in order to improve the pressure resistance and prevent the degassing ability from decreasing due to the contact of the tube 24, the outside of this tube is made of polytetrafluoroethylene resin and has a porous structure. A reinforcing tube 23 made of a material is provided to form a composite body.

Although the pressure resistance of the degassing / defoaming composite tube in which the reinforcing tube 23 is provided outside the separating tube 24 depends almost on the strength of the reinforcing tube 23, the apparent wall thickness of the reinforcing tube 23 is 0.2 to 2mm, preferably 0.3 to 1.5mm, porosity 3 to
40%, preferably 5 to 30%, and the average pore size is 0.5 to 20 μm, preferably 1 to 10 μm.

Needless to say, the composite tube 13 in which the separation tube 24 and the reinforcing tube 23 are integrated is included in the range of the porous polymer membrane composite tube 13.

FIG. 3 shows a flow sheet of an experimental apparatus for confirming the above effect. In the figure, 25 is a preparation tank, 26 is a pump, and 9
Is a degassing / defoaming device that houses the composite tube, and 27 is a valve. The photosensitive coating liquid 22 is sucked by the pump 26 from the preparation tank 25 provided with the stirrer 28 and supplied to the degassing / defoaming device 9. At this time, the outside of the composite tube 13 installed in the degassing / defoaming device 9 is placed under reduced pressure by a vacuum pump 18 (not shown) as shown in FIG.

Therefore, a valve 27 for pressurization is attached to the outlet side of the degassing / defoaming device 9 and a pressure gauge 29 is installed between the pump 26 and the degassing / defoaming device 9.

The photosensitive coating liquid flowing out from the outlet side of the pressurizing valve 27 is sampled in order to check the degree of deaeration and the ability to replace bubbles with dissolved air.

This is intended to evaluate the degassing ability of the degassing / foaming device and the cleaning property of the device.

〔Example〕

One embodiment of the present invention will be described below, but the present invention is not limited to this embodiment.

Example-1 A composition shown in Table 1 was obtained by using an experimental apparatus in which a degassing / defoaming apparatus containing a degassing / defoaming composite tube as shown in FIG. 1 was arranged as shown in FIG. Then, the photosensitive coating liquid (liquid temperature 20 ° C.) was treated.

Degassing / defoaming equipment specifications and conditions (1) External vacuum degree of composite tube 50 Torr ± 2 Torr (2) Composite tube a. Separation tube Material: Polytetrafluoroethylene resin Inner diameter: 6 mm Wall thickness: 0.25 mm b. Reinforcement Tube material: Polytetrafluoroethylene resin Inner diameter: 6.5 mm Thickness: 0.8 mm (Apparent) Porosity: 25% Average diameter: 1 to 2 μm Pressure applied to degassing / defoaming device 9 is 0.5 kg / cm ^When the processing amount of the photosensitive coating liquid is changed under the above conditions with ² gauge pressure, the pressure valve 27 is opened to check the degassing degree of the photosensitive coating liquid degassed by the degassing / defoaming device. Fig. 5 shows the results of sampling the degassed liquid from the side pipe and measuring the dissolved oxygen concentration with a dissolved oxygen concentration meter. The degassing / defoaming apparatus 9 uses a large number of composite tubes, but the results are calculated for each composite tube.

"Relative dissolved air content" is defined as follows as a word that represents the degree of degassing.

Relative dissolved air content of 100% means that when the liquid to be degassed is thoroughly stirred at a certain temperature (20 ° C in this case), the dissolved air is saturated, and the dissolved oxygen concentration is measured by a dissolved oxygen concentration meter. Regarding the amount of dissolved air in the degassed liquid, the degassed liquid is brought to the same temperature as the liquid containing saturated dissolved air before degassing (in this case, 20 ° C.), and the dissolved oxygen concentration is also the same. Is measured with a dissolved oxygen concentration meter, and the value at this time is expressed as a relative value for a liquid having a relative dissolved air content of 100%, and is referred to as a relative dissolved air content and displayed as a percentage. Therefore, it can be said that the smaller the relative dissolved air amount, the higher the degassing degree.

Next, the degassing / defoaming device 9 is removed, and one composite tube molded in the same manner as the composite tube used in the device 9 is added to the inside of the tube with an experimental device (not shown) in which it is set. The pressure is changed by the valve 27, and the pressure at which the coating liquid permeates and the pressure at which the composite tube bursts are examined.The pressure at which the coating liquid permeates is about 6.0 kg / cm ² gauge pressure,
The pressure at which the tube bursts was approximately 10 kg / cm ² gauge pressure.

Comparative Example-1 Degassing degree under the same conditions as in Example-1 except that one composite tube was used in place of the multiple composite tubes housed in the degassing / defoaming apparatus in Comparative Example-1. Was measured. The results are also shown in FIG.

In FIG. 5, the example shows almost the same relative dissolved air amount as compared with the comparative example of the conventional method with respect to the degassing amount, but when the total degassing amount by a large number is large, it is clear. The relative dissolved air amount is much smaller than that of the comparative example. Immediately many effects come out.

Example-2 In the experimental apparatus arranged as shown in FIG. 3, a degassing / defoaming apparatus containing a large number of degassing / defoaming composite tubes as shown in FIG. The depressurizing chamber is enlarged after the liquid-removing valves 30 and 31 are installed between 26 and the inlet side pipe of the degassing / defoaming device 9 to process the photosensitive coating liquid having the composition and physical properties shown in Table 3. The pressure was released, and the pump was stopped to stop the process.

Next, a liquid removal valve provided in the inlet pipe of the degassing / defoaming device 9.
As a result of opening 31 and measuring the amount of the photosensitive coating liquid flowing out,
The calculated values of the amount held in the degassing / defoaming device 9 and the pipes were almost the same.

Also, a drain valve provided between the preparation tank 25 and the pump 26.
After opening 30, the photosensitive coating liquid in the preparation tank 25 and the pipe was discharged, and then the photosensitive coating liquid in the preparation tank 25 and the pipe was discharged, and then the preparation tank 25 was washed. Next, the valves 30 and 31 other than the pressurizing valve 27 are closed, and the mixture of methyl ethyl ketone and methyl cellosolve acetate is added to the tank.
25, the pump 26 was operated, and in order to check the washing property of the composite tube, the liquid started to flow out from the outlet pipe of the pressurizing valve 27 and was sampled at the same time, and the absorbance was measured by a spectrophotometer. Results are shown in FIG.

Comparative Example-2 In Example-2, the cleaning property was the same as in Example-2 except that the cylindrical body in the degassing / defoaming apparatus was removed, and a large number of the tubes were simply stored so as not to be broken. The sample was sampled to check the absorbance, and the absorbance was measured with a spectrophotometer. The results are also shown in FIG. The liquid was also removed by the liquid removal valve 31 provided in the inlet pipe of the degassing / defoaming device 9.

From the above experimental example, as can be seen from FIG. 5, the deaerating capacity of the degassing / defoaming device modularized using a large number of porous polymer membrane composite tubes was compared with that of a single composite tube. It is a little bad, but there is almost no change, and it can be seen that mass processing is effectively performed by modularizing a large number of books.

Further, it can be seen from FIG. 6 that the degassing / defoaming apparatus of the present invention has an extremely good cleaning property and can shorten the cleaning time as compared with the conventional one.

〔The invention's effect〕

As described above, according to the present invention, the photosensitive coating solution containing dissolved air and fine bubbles is passed through the inside of the porous polymer membrane composite tube before the prepared photosensitive coating solution is applied to the substrate by the coating device. In a degassing / defoaming apparatus for a photosensitive coating liquid, which simultaneously removes dissolved air and fine bubbles in the photosensitive coating liquid while depressurizing the outside of the tube and pressurizing the photosensitive coating liquid, A porous polymer membrane composite tube is arranged in parallel in parallel with each other and spirally wound around a cylindrical body, and the photosensitive coating solution is provided at both ends of the cylindrical body. By the degassing / defoaming device, or by the above-mentioned degassing / defoaming device in which a plurality of the porous polymer membrane composite tubes in parallel and in planar contact are further stacked and provided in multiple stages. , Prevent the tube from bursting, Since the amount of treatment can be increased and the pressure loss when the photosensitive coating liquid passes through a large number of tubes can be reduced and the flow state of the photosensitive coating liquid in each tube can be made the same, The degassing efficiency increases, and even if a large number of the tubes come in contact with each other, the degassing capacity does not decrease. Further, when the photosensitive coating liquid is discharged, it can be discharged with almost no retention, and when switching to another photosensitive coating liquid, cleaning can be performed in an extremely short time, so that efficiency and economy of cleaning can be improved. Is
This has contributed to the improvement of product yield and productivity.

The following can be enumerated as embodiments of the present invention.

(1) Degassing according to claim 1, 2 or 3, characterized in that a guide for fixing the plurality of tubes arranged in a spiral multistage is provided spirally around the cylindrical body.・ Defoaming device.

(2) The degassing / defoaming according to claim 1, 2 or 3 characterized in that the cylindrical body in which the tube is spirally wound has a large number of holes having a diameter of 2 to 10 mm. apparatus.

(3) The degassing / defoaming apparatus according to claim 1, 2 or 3, wherein the tube comprises a separation membrane and a porous body provided on the outside thereof and made of a polymer material. .

(4) The degassing / defoaming apparatus according to claim 1, 2 or 3, wherein the porous polymer membrane composite tube uses a polytetrafluoroethylene resin.

[Brief description of drawings]

FIG. 1 is a side sectional view of a schematic explanation of one embodiment of a degassing / defoaming apparatus of the present invention, and FIG. 2 is a partial enlarged view for explaining the composite tube wound around a cylindrical body in FIG. A side sectional view (a) and a sectional view of the composite tube (b), FIG. 3 is a schematic explanatory view of an embodiment of an experimental apparatus of the present invention, and FIG. 4 is a tube made of a conventional porous polymer membrane. Degassing used
The general | schematic schematic explanatory drawing of a defoaming apparatus, FIG. 5 and FIG. 6 is Example-1, Comparative example-1, Example-2, Comparative example-2, respectively.
It is a figure which shows the experimental result in. 9 …… Degassing / defoaming device 10 …… Guide, 11 …… Pore 12 …… Cylinder 13 …… Porous polymer membrane composite tube 14 …… Module, 15 …… Decompression chamber 22a, 22b …… Coating Liquid 23 …… Reinforcement tube 24 …… Separation tube 26 …… Pump

Claims (3)

[Claims] 1. A photosensitive coating liquid containing dissolved air and fine bubbles is passed through the inside of a porous polymer membrane composite tube before the prepared photosensitive coating liquid is coated on a substrate by a coating device. In the degassing / defoaming apparatus for a photosensitive coating liquid, which simultaneously removes dissolved air and fine bubbles in the photosensitive coating liquid while depressurizing the outside of the tube and pressurizing the photosensitive coating liquid, a large number of the porous Degassing, characterized in that a qualitative polymer membrane composite tube is arranged in parallel in parallel with each other and spirally wound around a cylindrical body, and the inlet and outlet of the photosensitive coating liquid are provided at both ends of the cylindrical body.・ Defoaming device. 2. The degassing / defoaming apparatus according to claim 1, wherein a large number of the spirally wound porous polymer membrane composite tubes have a rising slope of 4 ° or more. 3. The multi-layered porous polymer membrane, wherein the composite tubes are provided in parallel in a plane and in contact with each other, and are stacked in multiple stages. )
Alternatively, the degassing / defoaming device according to (2).