JPH0758815B2 - Gas laser equipment - Google Patents
Gas laser equipmentInfo
- Publication number
- JPH0758815B2 JPH0758815B2 JP60171561A JP17156185A JPH0758815B2 JP H0758815 B2 JPH0758815 B2 JP H0758815B2 JP 60171561 A JP60171561 A JP 60171561A JP 17156185 A JP17156185 A JP 17156185A JP H0758815 B2 JPH0758815 B2 JP H0758815B2
- Authority
- JP
- Japan
- Prior art keywords
- laser device
- gas laser
- resonator
- spherical
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Lasers (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Laser Surgery Devices (AREA)
- Radiation-Therapy Devices (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は加工用，医療用としてのガスレーザ装置に関す
るものである。TECHNICAL FIELD The present invention relates to a gas laser device for processing and medical purposes.
従来の技術 従来のガスレーザ装置の共振器は第２図に示すように内
部に油冷したメインパイプ１の両端部にメインフランジ
2,17を取付け、前記メインフランジ２に絶縁物を介して
カソード３を設け、さらに前記メインパイプ１の取付脚
４に絶縁用ガイシ５を介してアノードブロック６を取付
け、このアノードブロック６にレーザ管ホルダ７を固定
し、カソード３とレーザ管ホルダ７の間にレーザ管８を
取付けている。このレーザ管８は左右前後に8,9,10,11
と配置し、レーザ管８と９、またレーザ管10と11をそれ
ぞれ一直線上に置くことが、レーザ光線の直進性を活か
し、安定した高出力レーザ光を取出すために必要不可欠
となる。2. Description of the Related Art As shown in FIG. 2, a resonator of a conventional gas laser device has main flanges at both ends of a main pipe 1 internally oil-cooled.
2, 17 are mounted, a cathode 3 is provided on the main flange 2 via an insulator, and an anode block 6 is further mounted on a mounting leg 4 of the main pipe 1 via an insulating insulator 5, and a laser is attached to the anode block 6. The tube holder 7 is fixed, and the laser tube 8 is attached between the cathode 3 and the laser tube holder 7. This laser tube 8 is 8,9,10,11 on the left and right
It is indispensable to arrange the laser tubes 8 and 9 and the laser tubes 10 and 11 on a straight line, respectively, in order to take out stable high-power laser light by utilizing the straightness of the laser beam.
一般的に、ガスレーザ装置は第３図ａに示すように共振
器部は筐体12の内部13に置き、筐体12の外面は防塵，美
観のために、パネル14で密閉している。Generally, in the gas laser device, as shown in FIG. 3A, the resonator portion is placed in the inside 13 of the housing 12, and the outer surface of the housing 12 is sealed with a panel 14 for dustproof and aesthetic purposes.
ガスレーザ装置の運転に伴なって前記アノード部，カソ
ード部等が発熱し、さらに熱伝導でメインパイプ１も発
熱するので、メインフランジは第２図，第３図ｃに示す
ように右端のメインフランジ２は筐体12の固定脚15にボ
ルト16で固定し、左端のメインフランジ17は第２図，第
３図ｂに示すように円柱状のロッド18を固定脚19に固定
されたＶ溝付ブロック20の上に置き、メインパイプ１の
熱膨張を吸収し、レーザ管の直線配置を保っている。With the operation of the gas laser device, the anode part, the cathode part, etc. generate heat, and the main pipe 1 also generates heat due to heat conduction, so that the main flange is the main flange at the right end as shown in FIGS. 2 and 3c. 2 is fixed to the fixed leg 15 of the housing 12 with a bolt 16, and the main flange 17 at the left end has a V-shaped groove in which a cylindrical rod 18 is fixed to the fixed leg 19 as shown in FIGS. 2 and 3b. It is placed on the block 20 to absorb the thermal expansion of the main pipe 1 and maintain the linear arrangement of the laser tubes.
発明が解決しようとする問題点 第４図に示すようにメインフランジの固定脚15,19を溶
接固定している筐体12のベース22は内部側を加熱され、
内側に凸状に熱歪を生じる。その結果、固定側のメイン
フランジ２は右方向に回転し、ロッド18がＶ溝付ブロッ
クから浮き上がりメインフランジ１が片持梁となり、約
70〜100Kgの自重のため曲がりを生ずる。レーザ装置の
運転中、装置内部温度上昇が40〜50degにおいてロッド1
8の浮き上がりを実測すると50〜65μｍになり、温度上
昇とともに増加する。室温状態でレーザ管配置を一直線
にしたものが、前記の温度変化とともに一直線でなくな
り、レーザ出力が順次低下することになる。レーザ出力
の低下率は従来のレーザ装置においてはベース22の板厚
を4.5〜6mmとすると6.5〜4.2％にも達し、最低出力を定
格出力とするために最大出力を前記低下率を補う程度以
上に高めなければならない。Problems to be Solved by the Invention As shown in FIG. 4, the base 22 of the housing 12 to which the fixing legs 15 and 19 of the main flange are welded and fixed is heated on the inner side,
Heat distortion occurs in a convex shape inside. As a result, the main flange 2 on the fixed side rotates to the right, the rod 18 floats up from the V-grooved block, and the main flange 1 becomes a cantilever beam.
Due to its own weight of 70-100 Kg, bending occurs. During operation of the laser device, rod 1
When the uplift of No. 8 is measured, it becomes 50 to 65 μm, which increases as the temperature rises. What is obtained by aligning the laser tubes in a straight line at room temperature is not aligned with the above temperature change, and the laser output is gradually reduced. In the conventional laser device, the reduction rate of the laser output reaches 6.5 to 4.2% when the thickness of the base 22 is 4.5 to 6 mm, and the maximum output is more than the level that compensates the above reduction rate to make the minimum output the rated output. Must be raised to
問題点を解決するための手段 上記問題点を解決するため、本発明のガスレーザ装置
は、一端のロッドをスライド軸受とし、他端のメインフ
ランジは球面軸受を介して固定脚の上に置き、球面軸受
のボールを固定脚の穴に入れる構造とし、共振器全体が
前後左右に位置が決まりながら上下には自由であるもの
とする。Means for Solving the Problems In order to solve the above problems, in the gas laser device of the present invention, the rod at one end is a slide bearing, and the main flange at the other end is placed on a fixed leg via a spherical bearing to form a spherical surface. The structure is such that the ball of the bearing is inserted into the hole of the fixed leg, and the entire resonator can be freely moved up and down while the position is determined in front, back, left and right.
作用 上記構成により筐体の熱歪が生じても球面軸受、スライ
ド軸受で受けられた共振器は左右とも常に軸受に接し、
メインパイプが片持梁の状態とならず、共振器全体が移
動することはあっても共振器が変形することはなく、レ
ーザ管の一直線状態は機内温度上昇に関連なく常に安定
する。The resonators received by the spherical bearings and slide bearings are always in contact with the bearings on the left and right even if thermal distortion of the housing occurs due to the above configuration,
The main pipe is not in the state of a cantilever, the resonator does not deform even if the entire resonator moves, and the linear state of the laser tube is always stable regardless of the temperature rise inside the machine.
実 施 例 以下、本発明の実施例について説明する。Examples Examples of the present invention will be described below.
なお、従来例と同一構成物に対し、同一番号を付し説明
を省略する。The same components as those of the conventional example are designated by the same reference numerals and the description thereof will be omitted.
第１図に示すように、一端のメインフランジ17は円柱状
のロッド18を、固定脚19に固定されたＶ溝付ブロック20
の上に置いてある。他端のメインフランジ２は球面軸受
23を介して固定脚15の上に置き、球面軸受23のボールを
固定脚の穴24に入れてある。As shown in FIG. 1, the main flange 17 at one end has a cylindrical rod 18 and a V-grooved block 20 fixed to a fixed leg 19.
It is placed on top of. Main flange 2 at the other end is a spherical bearing
The ball of the spherical bearing 23 is placed in the hole 24 of the fixed leg via the hole 23 of the spherical bearing 23.
上記構成により、共振器全体が前後左右に位置が決まり
ながら上下には自由である。With the above configuration, the entire resonator can be freely moved up and down while the positions are determined in the front, rear, left and right.
なお、球面軸受23の替わりに球面金属体，円錐金属体等
の球面状金属体であってもよい。Instead of the spherical bearing 23, a spherical metal body such as a spherical metal body or a conical metal body may be used.
そして、具体例として、球面軸受23を２個用い、円柱状
ロッド18を含めた３点支持構成として、前記と同様の運
転を行ったところ、ロッド18の浮き上がりは５〜15μｍ
となり、レーザ出力の低下率は2.1〜1.5％となった。As a specific example, when two spherical bearings 23 are used and a three-point support structure including the cylindrical rod 18 is performed and the same operation as above is performed, the floating of the rod 18 is 5 to 15 μm.
And the reduction rate of the laser output was 2.1 to 1.5%.
発明の効果 以上のように、本発明のガスレーザ装置は、共振器の一
方端部における２個の球面軸受とそれらを個々に受ける
丸穴により、筐体ベースの平面変位の影響を防止し、
共振器の縦横位置ずれを防止し、さらに共振器の他方
端部における１個のＶ字形スライド軸受により、前記筐
体ベースの平面変位の影響を防止しながら、筐体ベー
スと共振器の軸方向熱膨脹差を吸収するという３つの機
能により、筐体の熱歪を生じても共振器は常に軸受に接
し、共振器が変形することはなく、レーザ管の一直線状
態は常に安定である。EFFECTS OF THE INVENTION As described above, the gas laser device of the present invention prevents the influence of the plane displacement of the housing base by the two spherical bearings at one end of the resonator and the circular holes individually receiving them.
The vertical and horizontal displacement of the resonator is prevented, and the one V-shaped slide bearing at the other end of the resonator prevents the plane displacement of the housing base from affecting the axial direction of the housing base and the resonator. Due to the three functions of absorbing the difference in thermal expansion, the resonator is always in contact with the bearing even if thermal strain occurs in the housing, the resonator is not deformed, and the linear state of the laser tube is always stable.
第１図a,b,cはそれぞれ本発明の一実施例を示すガスレ
ーザ装置の正面図，左側面図，右側面図、第２図は従来
のガスレーザ装置の要部斜視図、第３図a,b,cはそれぞ
れ同ガスレーザ装置の正面図，左側面図，右側面図、第
４図は熱歪を受けた状態の従来のガスレーザ装置の正面
図、第５図は熱歪を受けた状態の本発明の実施例におけ
るガスレーザ装置の正面図である。 １……メインパイプ、2,17……メインフランジ、３……
カソード、６……アノード、8,9,10,11……レーザ管、1
2……筐体、18……ロッド、20……Ｖ溝付ブロック、22
……筺体ベース。1a, 1b, 1c are front views, left side views and right side views of a gas laser device according to an embodiment of the present invention, and FIG. 2 is a perspective view of a main part of a conventional gas laser device, and FIG. , b, c are front view, left side view and right side view of the same gas laser device, respectively. FIG. 4 is a front view of a conventional gas laser device in the state of being subjected to thermal strain, and FIG. FIG. 3 is a front view of the gas laser device according to the embodiment of the present invention. 1 …… Main pipe, 2,17 …… Main flange, 3 ……
Cathode, 6 ... Anode, 8,9,10,11 ... Laser tube, 1
2 …… Case, 18 …… Rod, 20 …… V grooved block, 22
…… Housing base.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭56−51885（ＪＰ，Ａ) 特開 昭59−52887（ＪＰ，Ａ) 特開 昭62−18780（ＪＰ，Ａ) ─────────────────────────────────────────────────── ─── Continuation of front page (56) References JP-A-56-51885 (JP, A) JP-A-59-52887 (JP, A) JP-A-62-18780 (JP, A)
Claims (1)
球面状金属体とし、他方端部を１個のＶ字形スライド軸
受とし、前記球面軸受または球面状金属体に対しては丸
穴を、スライド軸受に対してはＶ字形溝をレーザ装置筐
体にそれぞれ設け、前記共振器を前記レーザ装置筐体に
取付けたガスレーザ装置。1. A resonator is provided with two spherical bearings or a spherical metal body at one end and one V-shaped slide bearing at the other end, and the spherical bearing or the spherical metal body is rounded. A gas laser device in which a hole and a V-shaped groove for a slide bearing are respectively provided in a laser device housing, and the resonator is attached to the laser device housing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60171561A JPH0758815B2 (en) | 1985-08-02 | 1985-08-02 | Gas laser equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60171561A JPH0758815B2 (en) | 1985-08-02 | 1985-08-02 | Gas laser equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6231183A JPS6231183A (en) | 1987-02-10 |
| JPH0758815B2 true JPH0758815B2 (en) | 1995-06-21 |
Family
ID=15925417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60171561A Expired - Lifetime JPH0758815B2 (en) | 1985-08-02 | 1985-08-02 | Gas laser equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0758815B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002198591A (en) * | 2000-12-25 | 2002-07-12 | Miyachi Technos Corp | Laser oscillating system |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5651885A (en) * | 1979-10-05 | 1981-05-09 | Hitachi Ltd | Laser device |
| JPS5952887A (en) * | 1982-09-20 | 1984-03-27 | Hitachi Ltd | Laser generator |
| JPS6218780A (en) * | 1985-07-17 | 1987-01-27 | Nec Corp | Gas laser device |
-
1985
- 1985-08-02 JP JP60171561A patent/JPH0758815B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6231183A (en) | 1987-02-10 |
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