JPH0758501A - Joint method for rf cavity resonator - Google Patents

Joint method for rf cavity resonator

Info

Publication number
JPH0758501A
JPH0758501A JP22641393A JP22641393A JPH0758501A JP H0758501 A JPH0758501 A JP H0758501A JP 22641393 A JP22641393 A JP 22641393A JP 22641393 A JP22641393 A JP 22641393A JP H0758501 A JPH0758501 A JP H0758501A
Authority
JP
Japan
Prior art keywords
contact
cavity resonator
cavity
entire circumference
welding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP22641393A
Other languages
Japanese (ja)
Inventor
Toshihiro Kawasumi
敏広 川澄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP22641393A priority Critical patent/JPH0758501A/en
Publication of JPH0758501A publication Critical patent/JPH0758501A/en
Withdrawn legal-status Critical Current

Links

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  • Non-Disconnectible Joints And Screw-Threaded Joints (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Waveguide Connection Structure (AREA)

Abstract

PURPOSE:To provide an RF cavity resonator jointing method that sure vacuum seal performance, proper RF contact face pressure and a jointing force with high stiffness are obtained at a jointing part of an RF cavity resonator. CONSTITUTION:Flat contact faces 3a, 3b, slightly recessed narrow grooves 4a, 4b and much recessed wide grooves 5a, 5b are formed over an entire circumference of a ridge face of cavities 2a, 2b to be jointed from the inner circumferential side. Then the contact faces 3a, 3b are butted to implement RF contact, a diaphragm 6a(6b) is fitted to the narrow groove 6a(6b) and continuous entire circumference welding 7 is applied to the entire circumference of the outer ridges to make vacuum sealing and plural tabs 8 are inserted between the wide grooves 5a, 5b on the circumference and welding 9 is applied to both end ridges to obtain jointing stiffness and a contact pressure.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、空洞壁面に電流が流れ
るRFモードで使用されるRF空洞共振器の空洞同士の
結合に適用されるRF空洞共振器結合方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an RF cavity resonator coupling method applied to coupling between cavities of an RF cavity resonator used in an RF mode in which a current flows through a cavity wall surface.

【0002】[0002]

【従来の技術】従来、RF空洞共振器における空洞同士
を結合するにあたっては、図2(A)縦断面図,(B)
側面図,(C)拡大図に示すように、RF空洞共振器1
を構成するため結合しようとする空洞2a,2bの対向
する端縁面間に金属ガスケット12を介装して、外縁の
フランジ13a,13b同士をボルト14及びナット1
5で締結し、その締結力を利用し金属ガスケット12に
真空シール荷重とRFコンタクト圧力を与える構造を得
る方法と、図3(A)縦断面図,(B)側面図,(C)
拡大図に示すように、結合しようとする空洞2a,2b
の対向する端縁面に互いに係合するRFコンタクト面1
7を形成して、外周縁に全周連続溶接18を施し、溶接
による真空シール及び溶接の縮み力を利用した構造的結
合力とRFコンタクト圧力を与える構造を得る方法とが
採られている。
2. Description of the Related Art Conventionally, when coupling cavities in an RF cavity resonator, a longitudinal sectional view of FIG.
As shown in the side view and the enlarged view of (C), the RF cavity resonator 1
The metal gasket 12 is interposed between the facing edge surfaces of the cavities 2a, 2b to be combined to form the flanges 13a, 13b of the outer edges and the bolts 14 and the nuts 1.
5, a method for obtaining a structure for applying a vacuum seal load and an RF contact pressure to the metal gasket 12 by utilizing the fastening force, and FIG. 3 (A) longitudinal sectional view, (B) side view, (C)
As shown in the enlarged view, the cavities 2a and 2b to be combined are formed.
RF contact surfaces 1 engaging each other on opposite edge surfaces of the
7 is formed and continuous welding 18 is applied to the outer peripheral edge to obtain a structure for applying a vacuum sealing by welding and a structural coupling force utilizing the shrinkage force of the welding and an RF contact pressure.

【0003】しかしながら図2の方法では、図(C)に
示すように端縁面間に隙間16があり、空洞壁面を流れ
る電流はこの隙間16の壁面とガスケット面に流れるた
め、隙間16を持たない空洞構造に比較してRF損失が
大きい。また図3の方法では、全周連続溶接18による
空洞接合が空洞2a,2bの真空シール,RFコンタク
ト,空洞締結の3つの機能を発揮しなければならない
が、3つの機能を満足する溶接条件を確立するのは至難
である。そして溶接による結合が強すぎればRFコンタ
クト面17部に変形を起こし、弱ければRFコンタクト
圧力が得られなくなり、どちらの場合にもRF損失の増
大,RF位相ずれを生ずる。
However, in the method of FIG. 2, there is a gap 16 between the edge surfaces as shown in FIG. 2C, and the current flowing through the wall surface of the cavity flows between the wall surface of this gap 16 and the gasket surface, so that there is a gap 16. The RF loss is large as compared with the hollow structure. Further, in the method of FIG. 3, the cavity joining by the all-round continuous welding 18 must exhibit the three functions of the vacuum seal of the cavities 2a and 2b, the RF contact, and the cavity fastening, but welding conditions satisfying the three functions are required. It is very difficult to establish. If the welding connection is too strong, the RF contact surface 17 is deformed, and if it is weak, the RF contact pressure cannot be obtained. In either case, the RF loss increases and the RF phase shift occurs.

【0004】[0004]

【発明が解決しようとする課題】本発明は、このような
事情に鑑みて提案されたもので、RF空洞共振器の結合
部において、確実な真空シール性と適正なRFコンタク
ト面圧及び剛性の高い締結力を得ることができるRF空
洞共振器結合方法を提供することを目的とする。
SUMMARY OF THE INVENTION The present invention has been proposed in view of the above circumstances, and provides a reliable vacuum sealing property and an appropriate RF contact surface pressure and rigidity at the coupling portion of the RF cavity resonator. It is an object of the present invention to provide an RF cavity resonator coupling method capable of obtaining a high fastening force.

【0005】[0005]

【課題を解決するための手段】そのために本発明は、結
合しようとする空洞の端縁面の全周に内周側からフラッ
トなコンタクト面,少し凹んだ狭溝部,より多く凹んだ
広溝部の3部分を形成し、上記コンタクト面同士を突合
わせてRFコンタクトを行い、上記狭溝部にそれぞれダ
イヤフラムを取付けて互いの外縁同士に全周連続溶接を
施して真空シールを行い、更に上記広溝部同士間に周上
複数個のタブを差渡して両端縁に溶接を施して結合剛性
及びコンタクト圧力を得ることを特徴とする。
Therefore, according to the present invention, a flat contact surface, a slightly recessed narrow groove portion, and a more recessed wide groove portion are provided from the inner peripheral side along the entire circumference of the end surface of the cavity to be joined. 3 parts are formed, RF contact is made by abutting the contact surfaces with each other, diaphragms are attached to the narrow groove portions, and outer edges of the narrow groove portions are continuously welded all around to perform vacuum sealing. It is characterized in that a plurality of tabs are provided on the circumference and welded to both end edges to obtain a joint rigidity and a contact pressure.

【0006】[0006]

【作用】本発明RF空洞共振器結合方法においては、空
洞内周面に近い部分に形成されるフラットなコンタクト
面に接触率がより高くなる精度及び粗さを与えることに
より、空洞結合部の適正なRFコンタクト面圧を得るこ
とができる。そして結合しようとする空洞の狭溝部に内
縁が予め溶接されたダイヤフラムの外縁同士を全周連続
溶接して、空洞の真空シールを行う。このときダイヤフ
ラムは薄いため、この溶接によって他の部分に変形を与
えるような力は発生しない。但しダイヤフラムの形状及
び厚さは大気圧により座屈しないものであることが必要
である。その上でタブの端縁と広溝部の間に僅かな隙間
を与えておき、複数個のタブを広溝部に溶接し、その溶
接縮みを利用して空洞同士を締結するとともに、タブの
溶接縮みが空洞接触面にRFコンタクト面圧を与える。
なお溶接するタブの大きさ,数量,溶け込みの深さは空
洞供試体にて事前に条件を確立しておく。
In the RF cavity resonator coupling method of the present invention, the flatness of the cavity coupling portion is improved by providing the flat contact surface formed in the portion close to the cavity inner peripheral surface with accuracy and roughness such that the contact rate becomes higher. A high RF contact surface pressure can be obtained. Then, the outer edges of the diaphragm, the inner edge of which is previously welded to the narrow groove portion of the cavity to be joined, are continuously welded around the entire circumference, and the cavity is vacuum-sealed. At this time, since the diaphragm is thin, a force that deforms other parts is not generated by this welding. However, the shape and thickness of the diaphragm must not buckle under atmospheric pressure. After that, leave a slight gap between the edge of the tab and the wide groove part, weld a plurality of tabs to the wide groove part, and use the welding shrinkage to fasten the cavities together and weld shrinkage of the tab. Applies RF contact surface pressure to the cavity contact surface.
The size, quantity, and penetration depth of the tabs to be welded should be established in advance in the cavity specimen.

【0007】[0007]

【実施例】本発明RF空洞共振器結合方法の一実施例を
図面について説明すると、図1は本方法の要領を説明
し、同図(A)はRF空洞共振器の部分縦断面図、同図
(B)は側断面図、同図(C)は(A)のC部拡大図、
同図(D)は(A)のD矢視図である。上図において、
RF空洞共振器1を構成するため結合しようとする空洞
2a,2bには、結合部端縁面の全周にそれぞれ、内周
側からフラットなコンタクト面3a,3b,少し凹んだ
狭溝部4a,4b,より多く凹んだ広溝部5a,5bが
形成されており、各狭溝部4a,4bにはそれぞれダイ
ヤフラム6a,6bがその内縁を予め溶接付けされてい
る。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the RF cavity resonator coupling method of the present invention will be described with reference to the drawings. FIG. 1 illustrates the outline of the method, and FIG. 1A is a partial longitudinal sectional view of the RF cavity resonator. FIG. 2B is a side sectional view, FIG. 2C is an enlarged view of a portion C of FIG.
FIG. 3D is a view from the direction of arrow D of FIG. In the above figure,
In the cavities 2a and 2b to be coupled to form the RF cavity resonator 1, contact surfaces 3a and 3b that are flat from the inner peripheral side, narrow groove portions 4a that are slightly recessed from the inner peripheral side, respectively, along the entire circumference of the edge surface of the coupling portion. 4b, wide groove portions 5a, 5b that are more recessed are formed, and diaphragms 6a, 6b are welded in advance to the inner edges of the narrow groove portions 4a, 4b, respectively.

【0008】このような空洞2a,2b同士を結合する
にあたっては、結合部端縁面を対向させコンタクト面3
a,3b同士を突合わせてRFコンタクトを行い、まず
狭溝部4a,4bに予め溶接されたダイヤフラム6a,
6bの外縁に全周連続溶接7を施して真空シールを行
う。このときダイヤフラム6a,6bは充分薄肉である
ため、全周連続溶接7による溶接縮みによりコンタクト
面3a,3bの接触面を変形させる引き付け力は発生し
ない。次いでダイヤフラム6a,6bの接合部の真空リ
ークテストを行い、溶接に欠陥がないことを確認したの
ち、空洞2a,2bにRF入力アンテナ10及びRF検
出プローブ11を取付け、RF空洞共振器1としての性
能を点検するためのQファクタ測定のセットアップを行
う。
In coupling the cavities 2a and 2b with each other, the edge surfaces of the coupling portion are opposed to each other and the contact surface 3 is formed.
a and 3b are butted against each other to make an RF contact, and first, the diaphragm 6a, which is pre-welded to the narrow groove portions 4a and 4b,
The outer periphery of 6b is continuously welded around the entire circumference 7 and vacuum-sealed. At this time, since the diaphragms 6a and 6b are sufficiently thin, the contraction caused by the continuous welding 7 does not generate an attractive force that deforms the contact surfaces of the contact surfaces 3a and 3b. Next, after performing a vacuum leak test on the joint portion of the diaphragms 6a and 6b and confirming that there is no defect in the welding, the RF input antenna 10 and the RF detection probe 11 are attached to the cavities 2a and 2b, and the RF cavity resonator 1 is formed. Set up Q-factor measurements to check performance.

【0009】次に構成されRF空洞共振器1のQファク
タを計測しながら、広溝部5a,5b内に全周にわたり
複数個のタブ8を差渡して、両端縁と広溝部5a,5b
とに溶接9を施す。タブ8が広溝部5a,5bに溶接9
され溶融部が冷えて固まるときに、その収縮により空洞
2a,2bは互いに引き付け合い、この空洞2a,2b
を引き付ける力はコンタクト面3a,3bに接触面圧を
与える力ともなる。しかしてタブ8の溶接溶け込み深
さ,タブ8の大きさ,タブ8の数により引き付け力が変
化し、コンタクト面3a,3bの表面粗さ,平面度及び
タブ8の引き付け力により接触率が変化するが、この変
化する要素は事前に供試体により条件設定しておき、空
洞2a,2bの締結力を強めるには、コンタクト面3
a,3bの接触面積を広げ、タブ8の数を増すか又はタ
ブ8のサイズを大きくするかその溶接溶け込みを深くす
ることとし、どれを選ぶかは空洞2a,2bの大きさに
応じ決める。なお所定のQ値を得るまでタブ8を溶接す
る。
Next, while measuring the Q factor of the RF cavity resonator 1 constructed as described above, a plurality of tabs 8 are provided over the entire circumference in the wide groove portions 5a, 5b so that both end edges and the wide groove portions 5a, 5b are formed.
Weld 9 to. The tab 8 is welded 9 to the wide groove portions 5a and 5b.
When the molten portion cools and solidifies, the cavities 2a and 2b attract each other due to the contraction, and the cavities 2a and 2b are attracted to each other.
Is also a force that applies contact surface pressure to the contact surfaces 3a and 3b. Therefore, the attraction force changes depending on the weld penetration depth of the tab 8, the size of the tab 8, the number of tabs 8, and the contact rate varies depending on the surface roughness and flatness of the contact surfaces 3a and 3b and the attraction force of the tab 8. However, in order to strengthen the fastening force of the cavities 2a and 2b by setting conditions for these changing elements in advance by the test piece, the contact surface 3
The contact areas of a and 3b are expanded, the number of tabs 8 is increased, or the size of tabs 8 is increased or the weld penetration is deepened. Which is selected depends on the size of the cavities 2a and 2b. The tab 8 is welded until a predetermined Q value is obtained.

【0010】かくしてこの結合方法によれば、全金属製
であるため真空特性が優れ、またガスケットを介しない
で電流が流れるためRF損失が少なく、更に締結力が制
御できるためRFコンタクト部の変形によるRF位相ず
れや放電の心配の非常に少ない安定したRF空洞共振器
を得ることができる。
Thus, according to this coupling method, since it is made of all metal, the vacuum characteristic is excellent, and the current flows without passing through the gasket, so that the RF loss is small and the fastening force can be controlled. It is possible to obtain a stable RF cavity resonator with very little fear of RF phase shift or discharge.

【0011】[0011]

【発明の効果】要するに本発明によれば、結合しようと
する空洞の端縁面の全周に内周側からフラットなコンタ
クト面,少し凹んだ狭溝部,より多く凹んだ広溝部の3
部分を形成し、上記コンタクト面同士を突合わせてRF
コンタクトを行い、上記狭溝部にそれぞれダイヤフラム
を取付けて互いの外縁同士に全周連続溶接を施して真空
シールを行い、更に上記広溝部同士間に周上複数個のタ
ブを差渡して両端縁に溶接を施して結合剛性及びコンタ
クト圧力を得ることにより、RF空洞共振器の結合部に
おいて、確実な真空シール性と適正なRFコンタクト面
圧及び剛性の高い締結力を得ることができるRF空洞共
振器結合方法を得るから、本発明は産業上極めて有益な
ものである。
In summary, according to the present invention, the contact surface which is flat from the inner peripheral side, the narrow groove portion which is slightly recessed, and the wide groove portion which is more recessed are formed along the entire circumference of the edge surface of the cavity to be joined.
Form a part and butt the contact surfaces together and RF
Make a contact, attach a diaphragm to each of the narrow grooves, perform continuous welding around the outer edges of each other, and perform vacuum sealing.Furthermore, place a plurality of tabs on the circumference between the wide grooves, and attach to both edges. An RF cavity resonator capable of obtaining a reliable vacuum sealing property, an appropriate RF contact surface pressure, and a fastening force with high rigidity at a coupling portion of an RF cavity resonator by performing welding to obtain a coupling rigidity and a contact pressure. The present invention is extremely industrially beneficial because it provides a coupling method.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明RF空洞共振器結合方法の一実施例を示
し、同図(A)は本方法によって結合されたRF空洞共
振器の部分縦断面図、同図(B)は側断面図、同図
(C)は(A)のC部拡大図、同図(D)は(A)のD
矢視図である。
1A and 1B show an embodiment of an RF cavity resonator coupling method according to the present invention, wherein FIG. 1A is a partial vertical sectional view of an RF cavity resonator coupled by this method, and FIG. , (C) is an enlarged view of part C in (A), and (D) is D in (A).
FIG.

【図2】従来のRF空洞共振器結合方法を示し、同図
(A)はRF空洞共振器の部分縦断面図、同図(B)は
側面図、同図(C)は(A)のC部拡大図である。
2A and 2B show a conventional RF cavity resonator coupling method, wherein FIG. 2A is a partial vertical cross-sectional view of the RF cavity resonator, FIG. 2B is a side view, and FIG. It is a C section enlarged view.

【図3】従来の他の結合方法を示し、同図(A)はRF
空洞共振器の部分縦断面図、同図(B)は側面図、同図
(C)は(A)のC部拡大図である。
FIG. 3 shows another conventional coupling method, in which FIG.
FIG. 2B is a side view and FIG. 2C is an enlarged view of part C of FIG. 3A.

【符号の説明】[Explanation of symbols]

1 RF空洞共振器 2a,2b 空洞 3a,3b コンタクト面 4a,4b 狭溝部 5a,5b 広溝部 6a,6b ダイヤフラム 7 全周連続溶接 8 タブ 9 溶接 10 RF入力アンテナ 11 RF検出プローブ 1 RF cavity resonator 2a, 2b Cavity 3a, 3b Contact surface 4a, 4b Narrow groove part 5a, 5b Wide groove part 6a, 6b Diaphragm 7 Full circumference continuous welding 8 Tab 9 Welding 10 RF input antenna 11 RF detection probe

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 結合しようとする空洞の端縁面の全周に
内周側からフラットなコンタクト面,少し凹んだ狭溝
部,より多く凹んだ広溝部の3部分を形成し、上記コン
タクト面同士を突合わせてRFコンタクトを行い、上記
狭溝部にそれぞれダイヤフラムを取付けて互いの外縁同
士に全周連続溶接を施して真空シールを行い、更に上記
広溝部同士間に周上複数個のタブを差渡して両端縁に溶
接を施して結合剛性及びコンタクト圧力を得ることを特
徴とするRF空洞共振器結合方法。
1. A flat contact surface, a narrow groove portion that is slightly recessed, and a wide groove portion that is recessed more are formed on the entire circumference of the edge surface of the cavity to be joined, and the contact surfaces are joined to each other. To make RF contact, attach diaphragms to the narrow grooves, and continuously weld the outer edges of each other all around to perform vacuum sealing. Further, insert a plurality of tabs on the circumference between the wide grooves. An RF cavity resonator coupling method, characterized in that the both ends are welded together to obtain coupling rigidity and contact pressure.
JP22641393A 1993-08-19 1993-08-19 Joint method for rf cavity resonator Withdrawn JPH0758501A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22641393A JPH0758501A (en) 1993-08-19 1993-08-19 Joint method for rf cavity resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22641393A JPH0758501A (en) 1993-08-19 1993-08-19 Joint method for rf cavity resonator

Publications (1)

Publication Number Publication Date
JPH0758501A true JPH0758501A (en) 1995-03-03

Family

ID=16844736

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22641393A Withdrawn JPH0758501A (en) 1993-08-19 1993-08-19 Joint method for rf cavity resonator

Country Status (1)

Country Link
JP (1) JPH0758501A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6078465A (en) * 1997-08-25 2000-06-20 Hitachi, Ltd. Disk device and removable magnetic disk device with electrically separated circuit portions for improved electro-magnetic compatibility
US10772167B2 (en) 2018-02-26 2020-09-08 Communications & Power Industries Llc Waveguide flange system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6078465A (en) * 1997-08-25 2000-06-20 Hitachi, Ltd. Disk device and removable magnetic disk device with electrically separated circuit portions for improved electro-magnetic compatibility
US6292326B1 (en) 1997-08-25 2001-09-18 Hitachi, Ltd. Disk device and removable magnetic disk device with electrically separated circuit portions for improved electro-magnetic compatibility
US10772167B2 (en) 2018-02-26 2020-09-08 Communications & Power Industries Llc Waveguide flange system

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