JPH0758385A - Supersonic gas laser generator - Google Patents

Abstract

PURPOSE:To prevent the occurrence of start failure by equipping a supersonic gas laser generator with first and second shutter devices which break the communication between first and second laser cavities and a gas circulation body. CONSTITUTION:First and second shutter devices 18 and 19 are provided in the vicinity of each opening 2a and 2b of a gas circulation body leading to first and second laser cavities 9a and 9b. The openings 2a and 2b are closed before start time by operating each shutter device 18 and 19. This is so made to open the openings 2a and 2b when supersonic laser gas 7 begins to circulate inside the gas circulation body 1 so as to generate a light. Accordingly, shock waves pass smoothly through the gas circulation body 1, and the laser gas circulates at supersonic speed, so the start of a supersonic gas laser device can be performed easily.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a supersonic gas laser generator.

[0002]

2. Description of the Related Art FIG. 3 shows an example of a conventional supersonic gas laser generator. Reference numeral 1 denotes a gas distributor having a hollow structure, and openings 2a and 2b face each other at predetermined positions of the gas distributor 1. It is provided to do.

A supersonic gas generation source (not shown) including a nozzle and a gas generator is connected to one end A side of the gas flow body 1, and the other end B of the gas flow body 1 is connected.
A diffuser (not shown) is connected to the side end portion.

Reference numeral 3a is a hollow laser cavity having one end closed and the other end open. The laser cavity 3a is attached to the outer side of the gas flow body 1 such that the open end faces the opening 2a. ing.

Reference numeral 3b denotes a hollow laser cavity having both ends opened, and the laser cavity 3b is attached to an outer portion of the gas flow body 1 so that one end faces the opening 2b.

Reference numeral 4a is a total reflection mirror, 4b is a semi-transmission mirror,
The total reflection mirror 4a is arranged inside the laser cavity 3a such that its reflection surface faces the opening 2a, and the semi-transmission mirror 4b is arranged inside the laser cavity 3b so that its reflection surface faces the opening 2b. The laser resonator 5 is composed of the total reflection mirror 4a and the semi-transmission mirror 4b.

In the above supersonic gas laser generator,
A laser gas (N
₍₂ , CO ₂ , H ₂ O, etc.) rapidly expands to generate light.

This light is transmitted through the total reflection mirror 4a and the semi-transmission mirror 4
amplified by the laser resonator 5 composed of b,
Laser light 8 is output from the semitransparent mirror 4b toward the outside of the gas flow body 1.

In the supersonic gas laser generator as shown in FIG. 3, when the output of the laser beam 8 is increased, the light intensity is improved, and the semitransparent mirror 4b formed of zinc selenium or the like is thermally damaged. Occurs.

Therefore, in recent years, it has been considered to apply an aerodynamic means for the purpose of maintaining the airtightness of the gas flow body 1 without providing the semitransparent mirror 4b.

FIG. 4 is a sectional view showing the outline of a supersonic gas laser generator which maintains the gas tightness of the gas flow body 1 by aerodynamic means.

Reference numeral 9a denotes a first laser cavity having a hollow structure, one end of which is closed and the other end of which is open. The laser cavity 9a has a gas flow body with its open end facing the opening 2a of the gas flow body 1. 1 is attached to the outer part.

Reference numeral 10a is a total reflection mirror (concave mirror), and the total reflection mirror 10a is arranged inside the first laser cavity 9a such that the reflection surface faces the opening 2a.

Reference numeral 9b denotes a hollow second laser cavity having both ends opened. The laser cavity 9b has an outer portion of the gas flow body 1 such that one of the open ends faces the opening 2b of the gas flow body 1. Is attached to.

Reference numeral 10b is a feedback mirror, 10c is a scraper mirror, and the feedback mirror 10b is arranged inside the second laser cavity 9b so as to face the total reflection mirror 10a. Also, scraper mirror 1
0c is the total reflection mirror 10a and the feedback mirror 10b.
And the second laser cavity 9b so that the light from the total reflection mirror 10a is incident on the feedback mirror 10b and a part of the light is reflected in a direction different from that of the total reflection mirror 10a. Is located inside the
The total reflection mirror 10a, the feedback mirror 10b, and the scraper mirror 10c constitute an unstable laser resonator 11.

Reference numeral 12 denotes a condenser mirror, which condenses the laser light 8 reflected by the scraper mirror 10c from the other end of the second laser cavity 9b toward the outside. It is arranged inside the cavity 9b.

Reference numeral 13 denotes an aerodynamic window forming body having a hollow structure with both ends opened. The aerodynamic window forming body 13 is provided with a seal fluid inlet 14a and a seal fluid outlet 14b at an intermediate portion, and one of the open ends is the first The second laser cavity 9b is connected to the other of the open ends of the laser cavity 9b.

Reference numeral 15 denotes a collimator mirror, which reflects the laser beam 8 reflected by the condenser mirror 12 and passing through the aerodynamic window forming body 13 in a direction different from that of the condenser mirror 12. Is supported by the collimating mirror support 16.

When operating the supersonic gas laser generator shown in FIG. 4, the sealing fluid 17 is circulated at a high speed from the sealing fluid inlet 14a to the sealing fluid outlet 14b, and the aerodynamic window forming body 13 is caused by the sealing fluid 17. The one end side and the other end side are aerodynamically sealed, and the laser gas 7 is caused to flow into the gas flow body 1 at a supersonic speed to generate laser light 8.

[0020]

However, in the above-described supersonic gas laser generator which maintains the airtightness of the gas flow body 1 by the aerodynamic means shown in FIG.
Since the second laser cavities 9a and 9b are formed and opened on both sides of the gas flow body 1, when the laser gas 7 is introduced into the gas flow body 1 at supersonic speed,
There is concern that the shock wave may not pass through smoothly and the laser gas 7 may not flow at supersonic speed, resulting in a startup failure.

In addition, the first laser cavity 9a and the second laser cavity 9a
If there is an internal pressure difference between the laser cavity 9b and the laser cavity 9b, the total reflection mirror 10a, the feedback mirror 10b, and the scraper mirror 10c that form the unstable laser resonator 11 vibrate, and a predetermined laser output cannot be obtained. There was a problem that there was.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a supersonic gas laser generator capable of oscillating stable and high-power laser light without causing a start failure. Is.

[0023]

According to a first aspect of the present invention, a gas flow body having a hollow structure, a first laser cavity having a hollow structure having one end closed and the other open end communicating with the gas flow body, and both ends thereof are provided. Is formed by a second laser cavity having a hollow structure, one end of which is open and one end of which is in communication with the gas flow body, and a mirror disposed inside the first laser cavity and the second laser cavity, and A supersonic laser generator including a laser resonator that oscillates a laser beam toward the outside of the second laser cavity, and an aerodynamic sealing device connected to an opening end of the second laser cavity on the side opposite to the gas flow body. A first shutter device capable of blocking the communication between the opening end of the first laser cavity and the gas flow body, and the communication between one opening end of the second laser cavity and the gas flow body. And a pressure balance pipe communicating the first and second laser cavities with each other. In the second invention, the supersonic gas laser generation according to the first invention is provided. In the device, a pressure detector for detecting static pressure inside the gas flow body, a pressure detector for detecting pressure inside the first laser cavity, and a pressure detector for detecting pressure inside the second laser cavity, A shutter control device for activating each of the first and second shutter devices based on the pressure detection signal from each of the pressure detectors and the preset value input in advance is provided.

[0024]

According to the first aspect of the invention, the first and second shutter devices for cutting off the communication between the first and second laser cavities and the gas distributor are provided for the supersonic gas flowing into the gas distributor. Eliminate the adverse effects of laser cavities. In the second invention, the first and second pressure detection signals from the pressure detector of the gas flow body and the pressure detectors of the first and second laser cavities and the preset value are input. A shutter control device that can operate each shutter device operates each shutter device at an optimal operation timing when starting the supersonic gas laser generator, and opens the communication between the first and second laser cavities and the gas flow body. To do.

[0025]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a sectional view showing an outline of an example of the supersonic gas laser generator of the first invention. In the figure, the same parts as those in FIG.

In the supersonic gas laser generator of the first invention, a first shutter device 18 is provided in the vicinity of the opening 2a of the gas flow body 1 of the first laser cavity 9a, and the first laser cavity is provided by the shutter device 18. The second shutter device 19 is formed so that the communication between the opening end of 9a and the gas flow body 1 can be blocked or opened, and a second shutter device 19 is provided in the vicinity of the opening 2b of the gas flow body 1 of the second laser cavity 9b. The shutter device 19 is formed so as to block or open the communication between the opening end of the second laser cavity 9b and the gas flow body 1, and communicates both the first and second laser cavities 9a and 9b. The pressure balance pipe 20 is provided.

When operating the supersonic gas laser generator shown in FIG. 1, the sealing fluid 17 is circulated at a high speed from the sealing fluid inlet 14a to the sealing fluid outlet 14b, and the sealing fluid 17 causes the aerodynamic window forming member 13 to operate. Aerodynamically seals one end side and the other end side, and operates the first shutter device 18 and the second shutter device 19 in a direction of closing the openings 2a and 2b, and the first laser cavity 9a.
Then, the communication between the second laser cavity 9b and the gas flow body 1 is cut off, and the respective internal pressures of the first laser cavity 9a and the second laser cavity 9b are balanced via the pressure balance pipe 20. When supersonic laser gas 7 is guided from the sonic gas generation source (not shown) to the gas flow body 1 through the supersonic nozzle, light is generated.

At the same time, at the same time, the first shutter device 18 and the second shutter device 19 are operated so as to open the openings 2a and 2b, and the first laser cavity 9a and the second laser cavity 9b and the gas are discharged. When the flow body 1 is quickly communicated with, the light passes through the openings 2a and 2b and is amplified by the unstable laser resonator 11 including the total reflection mirror 10a, the feedback mirror 10b, and the scraper mirror 10c. Laser light 8 is output from the scraper mirror 10c to the outside of the collimator mirror support 16 via the condenser mirror 12 and the collimator mirror 15.

According to the above, each opening 2 of the gas flow body 1 communicating with the first and second laser cavities 9a, 9b.
First and second shutter devices 18 and 19 are provided near a and 2b, respectively, and the shutter devices 18 and 19 are actuated to close the openings 2a and 2b before starting the gas flow body. Since the supersonic laser gas 7 circulates in 1 and the openings 2a and 2b can be opened when light starts to be generated, the shock wave smoothly passes through the gas circulation body 1 and the laser gas 7 is generated. Since the fluid is distributed at supersonic speed, the supersonic gas laser generator can be easily started.

Further, since the pressure balance pipe 20 for communicating the first and second laser cavities 9a and 9b is provided, the internal pressures of the laser cavities 9a and 9b are balanced, so that the unstable laser resonator is provided. It is possible to obtain a predetermined laser output without vibrating the total reflection mirror 10a, the feedback mirror 10b, and the scraper mirror 10c that form part 11.

FIG. 2 is a sectional view showing an outline of an example of the supersonic gas laser generator of the second invention. In the figure, the same parts as those in FIG.

In the supersonic gas laser generator of the second invention, in addition to the supersonic gas laser generator of the first invention shown in FIG. 1, the static pressure (Ps1) (Ps) inside the gas flow body 1 is added.
The pressure detectors 21 and 22 for detecting 2) are arranged at predetermined positions in the gas flow body 1, and the pressure detector 23 for detecting the pressure value (Pc1) inside the first laser cavity 9a is the first laser. A pressure detector 24, which is arranged at a predetermined position in the cavity 9a and detects the pressure value (Pc2) inside the second laser cavity 9b, is arranged in the second laser cavity 9b, and each of the pressure detectors described above is arranged. Based on the pressure detection signals from 21, 22, 23, and 24 and the preset input values,
A shutter control device 25 capable of transmitting a control signal is provided, an electromagnetic switching valve 26 that operates in response to a control signal transmitted by the shutter control device 25 is connected to the first shutter device 18, and a similar electromagnetic switching valve 27 is connected. It is connected to the second shutter device 19.

When the supersonic gas laser generator shown in FIG. 2 is operated, the seal fluid 17 is circulated at a high speed from the seal fluid inlet 14a to the seal fluid outlet 14b, and the aerodynamic window forming body 13 is caused by the seal fluid 17. The one end side and the other end side are aerodynamically sealed, and the shutter control device 25 opens the first shutter device 18 and the second shutter device 19 through the electromagnetic switching valves 26 and 27.
2b is operated to close the first laser cavity 9a and the second laser cavity 9b and the gas flow body 1
First, the communication with the
Laser cavity 9a and second laser cavity 9b
When the laser gas 7 is guided from the supersonic gas generation source (not shown) to the gas flow body 1 through the supersonic nozzle after balancing the internal pressures of the above, light is generated when the laser gas is rapidly expanded.

At this time, the internal static pressure value (Ps1) (Ps) of the gas flow body 1 (Ps1) (Ps) which is detected by the pressure detectors 21 and 22 arranged in the gas flow body 1 and is transmitted to the shutter control device 25.
2), and the first and second laser cavities 9a, 9b
The laser cavities 9 which are detected by the pressure detectors 23 and 24 disposed inside and are transmitted to the shutter control device 25.
Only when the internal pressure values (Pc1) and (Pc2) of a and 9b satisfy the preset pressure values, the shutter control device 25 opens the electromagnetic switching valves 26 and 27. A control signal is emitted.

Each electromagnetic switching valve 2 that has received the control signal
6, 27 actuate the first shutter device 18 and the second shutter device 19 in the direction of opening the openings 2a, 2b,
When the first laser cavity 9a and the second laser cavity 9b and the gas flow body 1 are quickly communicated with each other, the light passes through the openings 2a and 2b, and the total reflection mirror 10a, the feedback mirror 10b, and the scraper mirror. Amplified by the unstable laser resonator 11 composed of 10c,
Laser light 8 is output from the scraper mirror 10c to the outside of the collimator mirror support 16 via the condenser mirror 12 and the collimator mirror 15.

According to the above, each opening 2 of the gas flow body 1 communicating with the first and second laser cavities 9a, 9b.
a and 2b near the first and second shutter devices 18,
19 is provided, and the openings 2a and 2b are closed before starting by operating the respective shutter devices 18 and 19, and when the laser gas 7 becomes supersonic in the gas flow body 1, gas flow Internal static pressure value of body 1 (Ps1) (Ps
2), and the first and second laser cavities 9a, 9b
Only when the internal pressure values (Pc1) and (Pc2) of the above satisfy the preset condition of each pressure value, the shutter control device 25 opens each electromagnetic switching valve 26, 27 to "open". Since the control signal is formed so that the shock wave always passes through the gas flow body 1 reliably and smoothly, and the laser gas 7 flows at supersonic velocity, the supersonic gas laser generator can be stably started. Further, since the operation timings of the shutter devices 18 and 19 are always controlled reliably, the reliability of stable operation of the unstable laser resonator 11 is improved.

The present invention is not limited to the above-mentioned embodiments, and it goes without saying that various modifications can be made without departing from the gist of the present invention.

[0039]

According to the supersonic gas laser generator of the present invention, various excellent effects as described below can be obtained.

I) In the first aspect of the invention, since the shutter device capable of blocking / opening the communication between the gas flow body and each of the first and second laser cavities is provided, the shock wave smoothly passes through the gas flow body, Since the supersonic gas circulates at supersonic speed, the supersonic gas laser generator can be easily started.

II) Further, since the pressure balancing pipes that connect the laser cavities are provided, the respective internal pressures of the two laser cavities are balanced, so that the laser resonator does not vibrate and a predetermined laser output can be obtained. .

III) In the second invention, the internal static pressure value of the gas flow body and the internal pressure value of each laser cavity are
Since the shutter control device sends an "open" control signal to each electromagnetic switching valve only when the preset pressure value setting conditions are satisfied, the operation of each shutter device Timing is always controlled reliably,
Therefore, the reliability of the stable operation of the laser resonator is improved, and more stable starting can be surely performed.

[Brief description of drawings]

FIG. 1 is a cross-sectional view schematically showing an embodiment of a supersonic gas laser generator of the first invention.

FIG. 2 is a sectional view showing the outline of an embodiment of a supersonic gas laser generator of the second invention.

FIG. 3 is a sectional view schematically showing an example of a conventional supersonic gas laser generator.

FIG. 4 is a sectional view schematically showing another example of a conventional supersonic gas laser generator.

[Explanation of symbols]

 1 Gas Flow Body 9a Laser Cavity 9b Laser Cavity 11 Unstable Laser Resonator (Laser Resonator) 13 Aerodynamic Window Former (Aerodynamic Sealing Device) 18 Shutter Device 19 Shutter Device 20 Pressure Balance Piping 21 Pressure Detector 22 Pressure Detector 23 Pressure Detector 24 Pressure Detector 25 Shutter Control Device

Claims (2)

[Claims] 1. A hollow-structured gas flow body, a first laser cavity having a hollow structure, one end of which is closed and the other open end of which is in communication with the gas flow body; both ends of which are open; It is formed by a hollow second laser cavity communicating with the gas flow body, and a mirror arranged inside the first laser cavity and the second laser cavity, and extends toward the outside of the second laser cavity. A supersonic gas laser generator comprising a laser resonator for oscillating a laser beam and an aerodynamic sealing device connected to an opening end of the second laser cavity on the side opposite to the gas flow body, wherein the opening end of the first laser cavity is provided. And a gas shutter, and a first shutter device capable of blocking communication between the gas distributor and the second shutter capable of blocking communication between one opening end of the second laser cavity and the gas distributor. A supersonic gas laser generator, comprising: a device; and a pressure balance pipe that communicates the first and second laser cavities. 2. A pressure detector for detecting static pressure inside the gas flow body, a pressure detector for detecting pressure inside the first laser cavity, and a pressure detector for detecting pressure inside the second laser cavity. And a shutter control device that operates each of the first and second shutter devices based on a pressure detection signal from each of the pressure detectors and a preset value that has been input in advance. 1. The supersonic gas laser generator described in 1.