JPH0758334B2 - Particle sensor - Google Patents
Particle sensorInfo
- Publication number
- JPH0758334B2 JPH0758334B2 JP61153160A JP15316086A JPH0758334B2 JP H0758334 B2 JPH0758334 B2 JP H0758334B2 JP 61153160 A JP61153160 A JP 61153160A JP 15316086 A JP15316086 A JP 15316086A JP H0758334 B2 JPH0758334 B2 JP H0758334B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric vibrator
- peripheral edge
- piezoelectric
- ridgeline
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Geophysics And Detection Of Objects (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、圧電振動子を用いた粉体、粒体等の有無検知
を行う粉粒体センサに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a powder / particle sensor using a piezoelectric vibrator for detecting the presence / absence of powder, particles, or the like.
従来の技術 近年、発振回路から発振電圧を受けて振動する圧電振動
子に粉体、粒体等の被検知物が接触すると、上記振動子
の振動が停止し、発振出力がなくなる原理を利用したセ
ンサが、粉粒体の有無検知に使われるようになってきた
（「圧電ブザー・発音体最新技術'85年版」編集委員会
編『圧電ブザー・発音体最新技術'85年版』1984年12月2
5日総合技術出版発行第２頁〜第15頁）。2. Description of the Related Art In recent years, when the piezoelectric vibrator vibrating by receiving an oscillating voltage from an oscillating circuit comes in contact with an object to be detected such as powder or granules, the vibration of the vibrator is stopped and the oscillation output is lost. Sensors have come to be used to detect the presence or absence of powder particles ("Piezoelectric buzzer / sound generator latest technology '85 edition" edited by the editorial committee, "Piezoelectric buzzer / sound generator latest technology '85 edition" December 1984. 2
5th, Comprehensive Technology Publishing, pages 2 to 15).
以下に従来の粉粒体センサーの一例について第２図〜第
４図を用いて説明する。Hereinafter, an example of a conventional particulate sensor will be described with reference to FIGS. 2 to 4.
第２図〜第４図に示すように、この粉粒体センサにおい
て、圧電振動子１は非磁性金属からなる薄い円板状の振
動板２とそれに貼着されている板状の圧電磁器素子３と
で構成され、振動板３が一方の電極を兼ね、この圧電素
子３の自由面上に電極が設けられている。そして、振動
板２の周縁部分４が、支持ケース５の開口部分に形成さ
れた段部に接着剤６で支持固定されている。As shown in FIGS. 2 to 4, in this powder / granular sensor, the piezoelectric vibrator 1 is a thin disk-shaped vibrating plate 2 made of a non-magnetic metal and a plate-shaped piezoelectric ceramic element attached to the vibrating plate 2. 3, the vibrating plate 3 also serves as one of the electrodes, and the electrode is provided on the free surface of the piezoelectric element 3. Then, the peripheral edge portion 4 of the diaphragm 2 is supported and fixed to the step portion formed in the opening portion of the support case 5 with the adhesive 6.
以上のように構成された従来の粉粒体センサについて、
以下その動作を説明する。Regarding the conventional powder / particle sensor configured as described above,
The operation will be described below.
圧電振動子１の振動板２の周縁部分４を支持固定するこ
とでその振動の節部を外周方向へ移動させているので、
圧電振動子１が発振回路により基本周波数で発振中にこ
の一次共振よりも高い二次共振が発生すると、振動の節
部は外周部分とその内側の内円部分にも生じるようにな
る。By supporting and fixing the peripheral portion 4 of the vibration plate 2 of the piezoelectric vibrator 1, the nodes of the vibration are moved in the outer peripheral direction.
When a secondary resonance higher than the primary resonance occurs while the piezoelectric vibrator 1 is oscillated at the fundamental frequency by the oscillation circuit, the node portion of the vibration also occurs in the outer peripheral portion and the inner circle portion inside thereof.
発明が解決しようとする問題点 このため、上記センサには、外周部分と内円部分の振動
の位相が180°異なるから、振動が不安定となったり、
粉粒体等が圧電振動子に接触すると基本周波数以外の周
波数で振動して感度が大きく変わったりするなど、特性
にばらつきが生じるという問題があった。Problems to be Solved by the Invention For this reason, in the above sensor, since the vibration phases of the outer peripheral portion and the inner circular portion differ by 180 °, the vibration becomes unstable,
When the granular material or the like comes into contact with the piezoelectric vibrator, it vibrates at a frequency other than the fundamental frequency and the sensitivity greatly changes, which causes a problem in that the characteristics vary.
本発明は、従来のセンサにあった問題が解決し、二次共
振が発生しない、感度特性の安定した粉粒体センサを提
供しようとするものである。The present invention is intended to solve the problems of the conventional sensor, and to provide a granular material sensor having stable sensitivity characteristics in which secondary resonance does not occur.
問題点を解決するための手段 本発明の粉粒体センサは、支持ケースの開口周縁部分
に、内周近傍稜線部分が開口面に対して段差を有する溝
部を形成し、前記稜線部分上に圧電振動子を載置して、
前記支持ケースに圧電振動子を前記弾発的接着剤で接着
され、前記圧電振動子の少なくとも周縁端部を前記溝部
上に延在させたものである。Means for Solving the Problems In the powdery or granular material sensor of the present invention, a groove portion in which a ridgeline portion near the inner circumference has a step with respect to the opening surface is formed in a peripheral edge portion of an opening of a support case, and a piezoelectric element is formed on the ridgeline portion. Place the oscillator,
A piezoelectric vibrator is adhered to the support case with the elastic adhesive, and at least a peripheral edge of the piezoelectric vibrator is extended above the groove.
作用 圧電振動子が稜線部分上に載置されて弾発的接着剤で接
着され、圧電振動子の周縁端部が溝部上に延在している
ことで、稜線部分が圧電振動子の振動の節部となり、圧
電振動子の周縁部分が可動になるため、圧電振動子の中
央部分と周縁部分側とが音響的に隔離することができ
る。Action The piezoelectric vibrator is placed on the ridge line portion and adhered with the elastic adhesive, and the peripheral edge portion of the piezoelectric vibrator extends over the groove portion, so that the ridge line portion can prevent vibration of the piezoelectric vibrator. Since it serves as a node and the peripheral portion of the piezoelectric vibrator is movable, the central portion and the peripheral portion side of the piezoelectric vibrator can be acoustically isolated.
実施例 以下本発明の一実施例について図面を参照しながら説明
する。第１図は本発明の一実施例における粉粒体センサ
の圧電振動子取付部の要部拡大断面図を示す。図におい
て、支持ケース11の一端開口周縁部分に、内周近傍稜線
部分12が開口面13と段差を有するように円周状溝部14が
形成されている。Embodiment One embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is an enlarged cross-sectional view of a main part of a piezoelectric vibrator mounting portion of a powder / particle sensor according to an embodiment of the present invention. In the figure, a circumferential groove portion 14 is formed in a peripheral edge portion of one end opening of the support case 11 so that the ridgeline portion 12 near the inner circumference has a step with the opening surface 13.
この溝部14には、たとえばシリコーン樹脂等よりなる弾
力性のある接着剤15が充填されており、圧電振動子16の
振動板17が稜線部分12上に載置されて、接着保持されて
いる。このとき振動板17周縁部分18の周縁端部が溝部14
上に延在するように配設され、接着剤15により弾発的に
固着されるので、振動板17の周縁部分16が圧電振動子16
の振動に対して柔軟に保持されるようになる。なお、19
は板状圧電振動素子である。The groove portion 14 is filled with an elastic adhesive 15 made of, for example, a silicone resin, and the diaphragm 17 of the piezoelectric vibrator 16 is placed on the ridge line portion 12 and is adhesively held. At this time, the peripheral edge of the vibrating plate 17 peripheral portion 18 is formed into the groove 14
Since it is arranged so as to extend upward and is elastically fixed by the adhesive 15, the peripheral portion 16 of the vibration plate 17 has the piezoelectric vibrator 16
Will be held flexibly against the vibration. 19
Is a plate-shaped piezoelectric vibrating element.
さらに、振動板17の振動の節部20が稜線部分12上となる
ので、圧電振動子16の中央部分と周縁部分18側とは音響
的に隔離されることになり、圧電振動子16の中央部分の
同位相部の共振のみがセンサとしての作用をなすように
なる。Furthermore, since the vibration node 20 of the diaphragm 17 is on the ridge line portion 12, the central portion of the piezoelectric vibrator 16 and the peripheral portion 18 side are acoustically isolated, and the center of the piezoelectric vibrator 16 is separated. Only the resonance of the in-phase part of the part acts as a sensor.
なお、稜線部分12は、開口周縁部分に連続して形成され
ている形状のものに限られるものでなく、複数の突出部
分を同一周上に配置形成したものであってもよい。The ridge line portion 12 is not limited to the shape formed continuously with the peripheral edge portion of the opening, and may have a plurality of protruding portions arranged and formed on the same circumference.
発明の効果 本発明は、支持ケースの開口周縁部分に、内周近傍稜線
が開口面に対して段差を有する溝部を設け、前記稜線上
に圧電振動子を載置して弾発的接着剤で接着され、前記
圧電振動子の少なくとも周縁端部が前記溝部上に延在し
ているので、稜線部分を圧電振動子の節部とすることが
でき、安定した感度特性を維持させることができる、す
こぶる優れた粉粒体センサを実現することができる。EFFECTS OF THE INVENTION The present invention provides a groove portion in which a ridgeline near the inner circumference has a step with respect to an opening surface in a peripheral edge portion of an opening of a support case, and a piezoelectric vibrator is mounted on the ridgeline with an elastic adhesive. Since the piezoelectric vibrator is bonded and at least the peripheral edge of the piezoelectric vibrator extends over the groove, the ridge portion can be a node of the piezoelectric vibrator, and stable sensitivity characteristics can be maintained. It is possible to realize a very excellent particle sensor.
第１図は本発明の一実施例の粉粒体センサの要部断面拡
大図、第２図は従来の粉粒体センサの斜視図、第３図は
第２図のA-A′断面図、第４図はその要部断面拡大図で
ある。 11……支持ケース、12……稜線部分、14……溝部、15…
…接着剤、16……圧電振動子、17……振動板、18……周
縁部分、19……圧電振動素子。FIG. 1 is an enlarged cross-sectional view of a main part of a granular material sensor according to an embodiment of the present invention, FIG. 2 is a perspective view of a conventional granular material sensor, FIG. 3 is a sectional view taken along the line AA ′ of FIG. FIG. 4 is an enlarged cross-sectional view of the relevant part. 11 …… Support case, 12 …… Ridge, 14 …… Groove, 15…
… Adhesive, 16 …… Piezoelectric vibrator, 17 …… Vibrating plate, 18 …… Peripheral part, 19 …… Piezoelectric vibrating element.
Claims (2)
線部分が開口面に対して段差を有する溝部を形成し、前
記稜線部分上に圧電振動子を載置して、前記支持ケース
に圧電振動子を前記弾発的接着剤で接着され、前記圧電
振動子の少なくとも周縁端部を前記溝部上に延在させた
ことを特徴とする粉粒体センサ。1. A groove portion having an inner peripheral ridgeline portion having a step with respect to the opening surface is formed in a peripheral edge portion of an opening of a support case, and a piezoelectric vibrator is mounted on the ridgeline portion to support the support case. A powdery or granular material sensor, wherein a piezoelectric vibrator is adhered with the elastic adhesive, and at least a peripheral edge portion of the piezoelectric vibrator is extended above the groove portion.
成された特許請求の範囲第１項記載の粉粒体センサ。2. The powdery or granular material sensor according to claim 1, wherein the ridgeline portion near the inner circumference is formed by a plurality of projecting portions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61153160A JPH0758334B2 (en) | 1986-06-30 | 1986-06-30 | Particle sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61153160A JPH0758334B2 (en) | 1986-06-30 | 1986-06-30 | Particle sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS638581A JPS638581A (en) | 1988-01-14 |
| JPH0758334B2 true JPH0758334B2 (en) | 1995-06-21 |
Family
ID=15556349
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61153160A Expired - Fee Related JPH0758334B2 (en) | 1986-06-30 | 1986-06-30 | Particle sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0758334B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009198222A (en) * | 2008-02-19 | 2009-09-03 | Mitsumi Electric Co Ltd | Detector |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5792184U (en) * | 1980-11-26 | 1982-06-07 |
-
1986
- 1986-06-30 JP JP61153160A patent/JPH0758334B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS638581A (en) | 1988-01-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |