JPH0756404Y2 - Magnetic shielding structure in the pipe penetration part of the magnetic shield panel unit - Google Patents

Description

[Detailed description of the device]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic shield structure in a pipe penetration portion of a magnetic shield panel unit.

[0002]

2. Description of the Related Art For example, a magnetic shield room is installed in order to shield the magnetism that causes malfunction of electronic equipment in a semiconductor factory. However, when a pipe must be drawn from the outside of the magnetic shield room to the inside, For example,
The walls of the magnetically shielded room are shown in FIG.

In the figure, one side of a panel body made of plywood 22 is fixed to one side of a magnetic shield panel 21 made of permalloy or the like. The other side of the magnetic shield panel 21 faces the outside 23, and the other side of the plywood 22 faces the inside 24.

In the magnetic shield panel 21 and the plywood 22,
An opening hole 25 communicating with the outside 23 and the inside 24 is formed as a sleeve for piping. The pipe 2 is placed in the opening 25.
6 is inserted, and the pipe 26 leads from the outdoor 23 to the indoor 24.

[0005]

However, in the conventional magnetic shield structure in the pipe penetrating portion of the magnetic shield panel unit, the required magnetic field is several at a place apart from the other side 22A of the plywood 22. Milligaus-1
When the outdoor magnetic field is not particularly large at a place of 0 or several milligauss, the leakage of the magnetic field from the opening hole 25 is weak and does not cause a problem so much. As a piping sleeve for passing the piping 26, the opening hole 25 is simply used. It was an open one.

However, although the magnetism hitting the magnetic shield panel 21 propagates along the wall surface of the magnetic shield panel 21, there is an opening hole 25, so that the plywood 22 has a space in the vicinity of the opening hole 25. The other side 22
It will swell from A.

That is, when leakage of magnetism from the opening 25 is unavoidable and weak magnetism is a problem (for example, electron orbit control) (for example, several milligauss or less), a measure for reducing magnetism leakage. Will be required.

The present invention has been made to solve the above-mentioned problems, and an object thereof is to provide a magnetic shield structure in a pipe penetration portion of a magnetic shield panel unit capable of reducing leakage of magnetism from an opening. Is to provide.

[0009]

SUMMARY OF THE INVENTION The present invention provides a magnetic shield panel unit comprising a magnetic shield panel and a panel body having one side fixed to one side of the magnetic shield panel. An opening hole is formed in the panel body that communicates indoors and outdoors.In this opening, a magnetic shield sleeve with a flange part that overlaps the other side near the opening hole of the magnetic shield panel is formed at one end, and the other end is It is characterized in that it is inserted in a state in which it is projected from the other side of the panel body by a predetermined dimension.

[0010]

In the present invention, the pipe is inserted in the magnetic shield sleeve. And since the magnetism propagating in the magnetic shield panel has an opening hole,
Although it swells to the panel body side, since the other end of the magnetic shield sleeve is in a state of protruding from the other side of the panel body by a predetermined dimension, from the vicinity of the opening hole of the magnetic shield panel unit. Magnetic leakage is reduced.

[0011]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows a magnetic shield structure in a pipe penetrating portion of a magnetic shield panel unit according to an embodiment of the present invention.

In the figure, one side 2A of a plywood (panel body) 2 is fixed to one side 1A of a magnetic shield panel 1 made of permalloy or the like. The other one surface 1B of the magnetic shield panel 1 faces the outdoor 3, and the other one surface 2B of the plywood 2 faces the indoor 4.

Magnetic shield panel 1 and panel body 2
An opening hole 5 that communicates with the outside 3 and the inside 4 is formed therein. The thin tube 6 of the magnetic shield sleeve 6 is placed in the opening hole 5.
A is inserted, a flange portion 7 is formed at one end of the magnetic shield sleeve 6 so as to overlap the other one surface 1B near the opening hole 5 of the magnetic shield panel 1, and the other end 6B has a predetermined size on the other side of the plywood 2. It is in a state of being projected from one side 2B. The flange portion 7 is fixed to the magnetic shield panel 1 and the plywood 2 with screws 8.

The other side 2 of the plywood 2 of the thin tube 6A
The protrusion amount D from B is twice or more the radius r of the thin tube 6A. It is said that the larger the protrusion amount D is, the greater the magnetic shield effect is, but the protrusion amount D is determined in consideration of the required magnetic shield effect.

In this embodiment, however, the magnetism that abuts the magnetic shield panel 1 and propagates in the magnetic shield panel 1 has the opening holes 5, so that the opening holes 25 of the plywood 22 are located on the plywood 2 side. Although it swells, the other end 6B of the thin tube 6A of the magnetic shield sleeve 6 is in a state of being protruded from the other one surface 2B of the plywood 2 by a predetermined dimension, so that the opening hole of the magnetic shield panel unit concerned. It is possible to reduce magnetic leakage from around 5.

As a result, it is possible to avoid the adverse effect of magnetic leakage from the inside of the opening hole 5 at a place apart from the magnetic shield panel unit in the room 4. In the present embodiment, the projection amount D of the thin tube 6A from the other surface 2B of the plywood 2 is twice or more the radius of the thin tube 6A, but it is not limited to this condition.

Further, in the present embodiment, the other one surface 1B of the magnetic shield panel 1 faces the outdoor 3 and the other one surface 2B of the plywood 2 faces the indoor 4, but the other one surface of the magnetic shield panel 1 does. The side facing 1B may be indoors and the side facing the other surface 2B of the plywood 2 may be outdoor.

Furthermore, in the present embodiment, permalloy is used as the material of the magnetic shield panel 1, but the material is not limited to this and may be, for example, an amorphous alloy.

[0019]

As described above, according to the present invention,
Since the other end of the magnetic shield sleeve is in a state of protruding from the other side of the panel body by a predetermined size,
The magnetic leakage from the vicinity of the opening of the magnetic shield panel unit can be reduced.

[Brief description of drawings]

FIG. 1 is a cross-sectional view of a magnetic shield structure in a pipe penetration portion of a magnetic shield panel unit according to an embodiment of the present invention.

FIG. 2 is a sectional view of a magnetic shield structure in a pipe penetration portion of a conventional magnetic shield panel unit.

[Explanation of symbols]

 1 Magnetic shield panel 1A One side 1B The other side 2 Plywood 2A One side 2B The other side 3 Outside 4 Indoor 5 Open hole 6 Magnetic shield sleeve 6B Other end 7 Flange

Claims (1)

[Scope of utility model registration request] 1. A magnetic shield panel unit comprising a magnetic shield panel and a panel body having one surface fixed to one surface of the magnetic shield panel, wherein the magnetic shield panel and the panel body communicate with each other indoors and outdoors. A magnetic shield sleeve having a flange portion at one end that overlaps the other surface near the opening hole of the magnetic shield panel is formed in this opening hole, and the other end is the other side of the panel body with a predetermined size. The magnetic shield structure in the pipe penetration part of the magnetic shield panel unit, characterized in that the magnetic shield panel unit is inserted and configured so as to protrude from one side.