JPH075300A - Holder of vacuum optical element - Google Patents

Abstract

PURPOSE:To accurately adjust the position and posture by supporting a cylinder fixed with an optical element using three linear guides for each plane which are provided on the periphery along with the two planes vertical to the axis of a short pipe for vacuum, and operating the linear guides outside of the vacuum. CONSTITUTION:Three linear guides 2 are fixed at each of two locations of circumference 3 of a short pipe 1 rotation-symmetrically in the plane vertical to the axis of a holder short pipe 1 and a cylinder 6 containing a Walter mirror 5 is supported with 6 in-total linear guides 2. Then two upper linear guides 2 are loosen to remove from the cylinder 6, the tip position of 4 lower linear guides 2 are adjusted and the cylinder 6 and the Walter mirror 5 are moved to an arbitrary direction vertical to the short pipe 1 axis. And the posture of the cylinder 6 and the Walter mirror are changed to direct to an arbitrary direction. By this method, the position and posture of the optical element is easily adjusted with high accuracy, the adjustment does not deviate during the use and is hardly affected by vibration.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to an X-ray optical instrument such as an X-ray microscope for holding an optical element such as a zone plate or a Walter mirror in a vacuum container at a predetermined position in a predetermined direction. The present invention relates to a holder for a vacuum optical element used in.

[0002]

2. Description of the Related Art Conventionally, when holding an optical element in a vacuum container, for example, in an X-ray microscope, as shown in FIG. 4, a vacuum XYZ stage 42 is provided on a side surface of a holder short tube 41.
The optical element 45 on the rod protruding from the stage.
By installing (zone plate in Fig. 4),
The optical element 45 is movable in the three-dimensional direction. In this case, adjustment of the direction in which the optical element 45 faces is performed by the holder short tube 4
The bellows pipes 43 are attached to both sides of No. 1 and the inclination of the holder short pipe 41 is adjusted. Alternatively, as shown in FIG. 5, three linear introduction machines 52 are provided on each of the outer surfaces of the cage short tube 51 along the two surfaces perpendicular to the axis,
A cylinder 56, to which an optical element 55 (Wolter mirror in FIG. 5) is attached, is supported by a straight line introduction device 52 to move the holder short tube 51 in a direction perpendicular to the axis and to adjust the direction in which the optical element 56 faces. It was In this case, the movement in the axial direction is caused by the cage short tube 5.
It was performed by attaching the bellows tubes 53 to both sides of 1 and moving the holder short tube 51.

[0003]

In all of the above-mentioned holding methods, since the bellows tube is deformable, the degree of freedom that is insufficient only by the operation in vacuum is compensated. The adjustment of the position of the optical element and the direction in which the optical element faces requires precise adjustment on the order of micrometers. However, in the method using the bellows tube, the bellows tube has elastic force, and since the inside of the bellows tube is a vacuum, the load of atmospheric pressure is applied to the bellows tube, so it is very difficult to make precise adjustments, and it is necessary to repeat trial and error only after repeated trial and error. It was a situation in which high accuracy was obtained.

Further, since the short pipe is always loaded, there is a problem that the adjustment is gradually changed and the readjustment is required. Further, in the method using the XYZ stage, there is a problem that the optical element is attached to the tip of the rod member, so that it is unstable and easily affected by vibration. An object of the present invention is to solve such a problem. That is, according to the present invention, the position and orientation (direction in which the optical element) of the optical element can be easily adjusted with high precision, the adjustment does not change during use, and the position and orientation of the optical element are not easily affected by vibration. An object is to provide an element holder.

[0005]

Therefore, the present invention provides
“At least a short tube for vacuum, three straight line introduction machines provided on the outer circumference of the short tube along two surfaces perpendicular to the axis of the short tube, and shafts on both end surfaces of the short tube. A vacuum optical element holder (claim 1) comprising a connection port with another short pipe provided in a shifted state, and a linear introduction device provided on one or both end surfaces of the short pipe (claim 1) ". .

[0006]

According to the present invention, the cylinder having the optical element mounted thereon is supported by the straight line introducing machines each having three surfaces provided on the outer periphery of the short tube along the two surfaces perpendicular to the axis of the vacuum short tube. By operating the straight line introducing machine from outside the vacuum, the movement of the optical element in the direction perpendicular to the axis of the short tube and the posture adjustment of the element can be precisely performed. By operating the straight line introducing machine attached in parallel to the axis of the short pipe from outside the vacuum, the movement in the axial direction can be performed accurately.

Since the vacuum optical element holder of the present invention does not use the bellows tube, the force for moving the short tube does not act and the adjustment does not change during use. Further, since the cylinder to which the optical element is attached is fixed by pressing it from the surroundings, the optical element is stably maintained in the position and the direction in which the optical element is oriented, and is hardly affected by vibration. By shifting the optical axis from the central axis of the holder short tube, the holder short tube is not made too thick. For example, the connecting short pipe is ICF70 size, and the straight line introducing machine is ICF3.
When installed with 4 flanges, the cage short tube is ICF15
It was 2 sizes. That is, the volume occupied by the holder short tube was about half, and the load on the vacuum exhaust pump was reduced. When the axis is not displaced, the cage short tube has an ICF203 size.

[0008]

EXAMPLE A first example is shown in FIGS. FIG. 2 is a sectional view of FIG. Three linear introduction machines 2 are attached rotationally symmetrically in a plane perpendicular to the axis of the cage short tube 1 at two locations on the outer circumference of the cage short tube 1, respectively. Cage short tube 1
A cylinder 6 accommodating the Walter mirror 5 is supported by a total of six straight line introducing machines 2 on an axis different from the axis. Loosen the upper two linear guides to separate the tips of the linear guides from the cylinder 6 and adjust the positions of the lower four linear guides to move the cylinder 6 and the water mirror 5 to the holder short tube. It can be moved in any direction perpendicular to the 1 axis. Further, the postures of the cylinder 6 and the Walter mirror 5 can be changed to point in arbitrary directions.

In this way, the cage short pipe 1 is inserted through the eccentric two-hole flange 9, the eccentric flange 9'and the flange 4.
The axis of the wolter mirror 5 was aligned with the axis of the short tube 3 connected to both ends of the. This common axis becomes the optical axis. The axial position adjustment of the cylinder 6 and the Walter mirror 5 was performed by moving the projection 7 of the cylinder 6 via the concave member 8 at the tip, using the straight line introducing machine 2'connected by the flange 4 '. . After the adjustment of the position and direction of the Walter mirror 5 was completed, the Walter mirror 5 was fixed by pressing the cylinder 6 with the upper two linear introduction machines.

FIG. 3 shows a second embodiment. The zone plate 35 was attached to the end surface of the cylinder 36, and the position and orientation were adjusted in the same manner as in the Walter mirror of the first embodiment.

[0011]

According to the present invention, the position and orientation of the optical element can be easily adjusted with high accuracy, and the adjustment does not change during use. Furthermore, the position and orientation of the optical element are less likely to be affected by vibration.

[Brief description of drawings]

FIG. 1 is a diagram showing an embodiment in which the present invention is used for holding a Walter mirror.

FIG. 2 is a view of the embodiment of FIG. 1 cut at the center and viewed from the right side.

FIG. 3 is a diagram showing an embodiment in which the present invention is used for holding a zone plate.

FIG. 4 is a diagram showing an example of holding a zone plate by a conventional optical element holding method using an XYZ stage.

FIG. 5 is a diagram showing an example of holding a Walter mirror by a conventional optical element holding method using a straight line introduction machine.

[Explanation of symbols]

1, 31, 41, 51 Retainer short tube (vacuum short tube) 2, 2 ', 32, 32', 52 Straight line introduction machine 3, 33 Connection short tube 4, 34, 44 Vacuum flange (for example, ICF70) 4 ', 34', 54 Vacuum flange (eg ICF3
4) 5,55 Walter mirror (an example of optical element) 6, 36, 66 Cylinder 7, 37 Protrusion 8, 38 Concave member 9, 39 Eccentric 2-hole flange (IC) which is an example of a connection port
F152 size) Eccentric flange (ICF, which is an example of 9 ', 39' connection port
152 size) 35, 45 zone plate (an example of optical element) 42 XYZ stage 43, 53 bellows tube and above

Claims (1)

[Claims] 1. A short tube for vacuum, at least three straight line introduction machines provided on the outer circumference of the short tube along two surfaces perpendicular to the axis of the short tube, and both ends of the short tube. A connection portion with another short pipe provided on the surface, a connection port whose axis is offset from the short pipe provided at the connection portion, and a straight line introduction machine provided on one or both end faces of the short pipe, Vacuum optical element holder consisting of.