JPH074945A - 超音波干渉計 - Google Patents

超音波干渉計

Info

Publication number
JPH074945A
JPH074945A JP6008935A JP893594A JPH074945A JP H074945 A JPH074945 A JP H074945A JP 6008935 A JP6008935 A JP 6008935A JP 893594 A JP893594 A JP 893594A JP H074945 A JPH074945 A JP H074945A
Authority
JP
Japan
Prior art keywords
ultrasonic
wave
waveguide
thin film
reflecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP6008935A
Other languages
English (en)
Japanese (ja)
Inventor
James H Terhune
ジェームス・ハワード・ターハン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of JPH074945A publication Critical patent/JPH074945A/ja
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/07—Analysing solids by measuring propagation velocity or propagation time of acoustic waves
    • G01N29/075—Analysing solids by measuring propagation velocity or propagation time of acoustic waves by measuring or comparing phase angle
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B17/00—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
    • G01B17/02—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness
    • G01B17/025—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness for measuring thickness of coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0258—Structural degradation, e.g. fatigue of composites, ageing of oils
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02854—Length, thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02881—Temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0421—Longitudinal waves

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP6008935A 1993-02-01 1994-01-31 超音波干渉計 Withdrawn JPH074945A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US011560 1987-02-06
US08/011,560 US5373742A (en) 1993-02-01 1993-02-01 Ultrasonic interferometer

Publications (1)

Publication Number Publication Date
JPH074945A true JPH074945A (ja) 1995-01-10

Family

ID=21750932

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6008935A Withdrawn JPH074945A (ja) 1993-02-01 1994-01-31 超音波干渉計

Country Status (4)

Country Link
US (1) US5373742A (enExample)
EP (1) EP0610043A1 (enExample)
JP (1) JPH074945A (enExample)
TW (1) TW238353B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006009036A1 (ja) * 2004-07-16 2006-01-26 National University Corporation Saitama University 超音波干渉縞を用いた形状解析方法及び装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002065068A2 (en) * 2001-01-12 2002-08-22 Protune Corp. Self-aligning ultrasonic sensor system, apparatus and method for detecting surface vibrations
NL1019020C2 (nl) * 2001-09-24 2003-03-25 Tno Endfire-bundelpatroonverwerking voor akoestische interferometer.
EP4151996B1 (en) * 2015-01-14 2025-08-20 Quest Integrity USA, LLC Automatic transducer operating parameter selection

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2183387A5 (enExample) * 1972-05-05 1973-12-14 Radiologie Cie Gle
DE2709686C2 (de) * 1977-03-05 1982-09-09 Krautkrämer, GmbH, 5000 Köln Optisches interferometrisches Verfahren zur berührungslosen Messung der durch Ultraschallwellen verursachten Oberflächenauslenkung eines Prüflings
GB2147102B (en) * 1983-09-23 1987-03-25 Texaco Development Corp Acoustic pulse-echo wall thickness method and apparatus
FR2593909B1 (fr) * 1986-02-03 1991-03-29 Mtm Leader Sarl Mesureur d'epaisseurs de revetements par interferometrie ultrasonore
FR2654508B1 (fr) * 1989-11-14 1992-02-21 Aerospatiale Ste Nat Indle Dispositif et sonde pour mesurer la variation de distance separant les deux faces d'une couche de matiere au moyen d'ultrasons.
US5271274A (en) * 1991-08-14 1993-12-21 The Board Of Trustees Of The Leland Stanford Junior University Thin film process monitoring techniques using acoustic waves

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006009036A1 (ja) * 2004-07-16 2006-01-26 National University Corporation Saitama University 超音波干渉縞を用いた形状解析方法及び装置

Also Published As

Publication number Publication date
EP0610043A1 (en) 1994-08-10
US5373742A (en) 1994-12-20
TW238353B (enExample) 1995-01-11

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Legal Events

Date Code Title Description
A300 Application deemed to be withdrawn because no request for examination was validly filed

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 20010403