JPH074477Y2 - Hot isostatic press - Google Patents
Hot isostatic pressInfo
- Publication number
- JPH074477Y2 JPH074477Y2 JP13410589U JP13410589U JPH074477Y2 JP H074477 Y2 JPH074477 Y2 JP H074477Y2 JP 13410589 U JP13410589 U JP 13410589U JP 13410589 U JP13410589 U JP 13410589U JP H074477 Y2 JPH074477 Y2 JP H074477Y2
- Authority
- JP
- Japan
- Prior art keywords
- furnace chamber
- gas
- pressure medium
- concentration
- mixed gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Powder Metallurgy (AREA)
Description
【考案の詳細な説明】 （産業上の利用分野） 本考案は、熱間静水圧加圧装置の改良に関し、さらに具
体的には、炉室内に混合ガスを導入し静水圧加圧するも
のにおいて、混合ガスの濃度をより効率的に制御するた
めの改良に関する。DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention relates to an improvement in a hot isostatic pressurization device, and more specifically, in a device for introducing a mixed gas into a furnace chamber for isostatic pressurization. The present invention relates to an improvement for controlling the concentration of a mixed gas more efficiently.
（従来の技術） 第３図に示す如く、上・下蓋2,3で閉塞されている高圧
容器１の内部に、倒立コップ状の断熱層４とケース５お
よびヒータ６を介して炉室７が形成され、該炉室７内の
被処理体８に、圧媒ガスとして混合ガスを用いて熱間静
水圧加圧処理を行なう技術がある。(Prior Art) As shown in FIG. 3, inside a high-pressure vessel 1 closed by upper and lower lids 2 and 3, a furnace chamber 7 is provided via an inverted cup-shaped heat insulating layer 4, a case 5 and a heater 6. Is formed, and a hot isostatic pressing process is performed on the object 8 in the furnace chamber 7 using a mixed gas as a pressure medium gas.
この従来の技術は、前記混合ガスを前記炉室７に供給す
る圧媒ガス供給手段９と、前記混合ガスを前記炉室７か
ら排出する圧媒ガス排出手段10を有するとともに、前記
炉室７内の混合ガス濃度を検出するガス濃度検出手段11
と前記炉室７内の圧力を検出する圧力検出手段12とを有
し、前記ガス濃度検出手段11により検出されたガス濃度
と前記圧力検出手段12により検出された圧力とに応じ前
記炉室７内の混合ガスの成分の濃度を制御する制御手段
13を備えている。This conventional technique has pressure medium gas supply means 9 for supplying the mixed gas to the furnace chamber 7, and pressure medium gas discharge means 10 for discharging the mixed gas from the furnace chamber 7, and Gas concentration detecting means 11 for detecting the concentration of the mixed gas in the inside
And a pressure detecting means 12 for detecting the pressure in the furnace chamber 7, and the furnace chamber 7 depending on the gas concentration detected by the gas concentration detecting means 11 and the pressure detected by the pressure detecting means 12. Means for controlling the concentration of the components of the mixed gas in the
Equipped with 13.
（考案が解決しようとする課題） 第３図に示す従来の熱間静水圧加圧装置においては、混
合ガスは、ガス供給用主タンク14A,14Bから、コンプレ
ッサ15、ガス供給通路16を通って炉室７に至った後、ケ
ース５の上部に設けられた開口部5Aからケース５と断熱
層４との間の間隙に流出し、断熱層４の内面に沿って下
降し、さらに、断熱層４の下端から断熱層４と高圧容器
１との間の間隙に流出し、高圧容器１の内壁に沿って上
昇し、上蓋２に設けられたガス排出通路17からガス排出
ライン18に排出される。(Problems to be Solved by the Invention) In the conventional hot isostatic pressurization device shown in FIG. 3, the mixed gas passes from the gas supply main tanks 14A and 14B through the compressor 15 and the gas supply passage 16. After reaching the furnace chamber 7, it flows out into the gap between the case 5 and the heat insulating layer 4 through the opening 5A provided in the upper part of the case 5, descends along the inner surface of the heat insulating layer 4, and further the heat insulating layer. It flows out from the lower end of 4 into the gap between the heat insulating layer 4 and the high-pressure container 1, rises along the inner wall of the high-pressure container 1, and is discharged to the gas discharge line 18 from the gas discharge passage 17 provided in the upper lid 2. .
したがって、混合ガスの濃度が低下もしくは上昇し、混
合ガスの濃度を調整するために炉室７に混合ガスを補足
供給する際にも、高圧容器１内のすべてのガスと置換混
合することとなる。Therefore, the concentration of the mixed gas decreases or rises, and even when the mixed gas is supplementarily supplied to the furnace chamber 7 to adjust the concentration of the mixed gas, all the gas in the high-pressure vessel 1 is replaced and mixed. .
ところで、混合ガスの濃度が問題になるのは、被処理体
８が混合ガスと接する炉室７内部の空間のみであるにも
拘らず、第３図に従来技術として示した装置では、混合
ガスの濃度を調整するのに、高圧容器１内のすべてのガ
スと置換混合する必要があるため、多量の混合ガスが必
要とされるだけでなく、混合ガスの濃度を補正するのに
時間がかかるという問題があった。By the way, the concentration of the mixed gas is a problem only in the space inside the furnace chamber 7 where the object to be treated 8 is in contact with the mixed gas, but in the apparatus shown as the prior art in FIG. Since it is necessary to replace and mix with all the gas in the high-pressure vessel 1 in order to adjust the concentration of the mixed gas, not only a large amount of mixed gas is required, but also it takes time to correct the mixed gas concentration. There was a problem.
本考案は、かかる従来技術の問題に鑑み、混合ガスの濃
度調整に必要な混合ガスの量を減少させることができ、
かつ混合ガスの濃度調整の応答性を向上させることがで
きる熱間静水圧加圧装置を提供することを目的とする。The present invention can reduce the amount of the mixed gas necessary for adjusting the concentration of the mixed gas in view of the problems of the related art.
Moreover, it is an object of the present invention to provide a hot isostatic pressing device capable of improving the response of the concentration adjustment of the mixed gas.
（課題を解決するための手段） 本考案は、高圧容器20の内部に断熱層23およびヒータ24
を介して炉室25が形成され、該炉室25内の被処理体Ｅ
に、圧媒ガスとして混合ガスを用いて熱間静水圧加圧処
理をおこなう装置であって、前記混合ガスを前記炉室25
に供給する圧媒ガス供給手段27と、前記混合ガスを前記
炉室25から排出する圧媒ガス排出手段36を有する熱間静
水圧加圧装置において、前述の目的を達成するために、
次の技術的手段を講じている。(Means for Solving the Problems) In the present invention, a heat insulating layer 23 and a heater 24 are provided inside a high-pressure vessel 20.
A furnace chamber 25 is formed through the
In the apparatus for performing hot isostatic pressing using mixed gas as pressure medium gas, the mixed gas is mixed in the furnace chamber 25.
In the hot isostatic pressurizing device having the pressure medium gas supply means 27 for supplying the pressure medium gas and the pressure medium gas discharge means 36 for discharging the mixed gas from the furnace chamber 25, in order to achieve the above-mentioned object,
The following technical measures are taken.
すなわち、本考案は、前記炉室25内上部に開口端32Aが
配された第１の管路32と、前記炉室25内下部に開口端39
Aが配された第２の管路39とを有し、該第１・２管路32,
39のいずれか一方の管路32又は39に前記圧媒ガス供給手
段27が接続されているとともに、他方の管路39又は32に
前記圧媒ガス排出手段36が接続されていることを特徴と
する（請求項（１））。That is, according to the present invention, the first conduit 32 having the opening end 32A disposed in the upper portion of the furnace chamber 25 and the opening end 39 disposed in the lower portion of the furnace chamber 25.
A second conduit 39 in which A is arranged, and the first and second conduits 32,
The pressure medium gas supply means 27 is connected to one of the conduits 32 or 39 of 39, and the pressure medium gas discharge means 36 is connected to the other conduit 39 or 32. (Claim (1)).
また、本考案は、圧媒ガス供給手段27が前記第１の管路
32に接続されているとともに、圧媒ガス排出手段36が前
記第２の管路39に接続されていることを特徴とする（請
求項（２））。Further, in the present invention, the pressure medium gas supply means 27 is provided in the first pipeline.
The pressure medium gas discharging means 36 is connected to the second conduit 39 while being connected to 32 (claim (2)).
更に、本考案は、圧媒ガス排出手段36に、前記炉室25内
の混合ガス濃度を検出するガス濃度検出手段44が接続さ
れていることを特徴とする（請求項（３））。Further, the present invention is characterized in that the pressure medium gas discharging means 36 is connected to a gas concentration detecting means 44 for detecting the concentration of the mixed gas in the furnace chamber 25 (claim (3)).
また、本考案は、圧媒ガス供給手段27と圧媒ガス排出手
段36に、それぞれガス濃度検出手段44,51が接続されて
いることを特徴とする（請求項（４））。Further, the present invention is characterized in that gas concentration detecting means 44 and 51 are connected to the pressure medium gas supplying means 27 and the pressure medium gas discharging means 36, respectively (claim (4)).
（作用） 本考案による熱間静水圧加圧装置では、高圧容器20内部
に断熱層23およびヒータ24を介して形成された炉室25内
に、圧媒ガス供給手段27および圧媒ガス排出手段36の開
口端32A,39Aが配されているので、混合ガスの濃度調整
を炉室25内部の混合ガスのみを置換することでおこなう
ことができ、混合ガスの濃度調整に必要な混合ガスの量
を減少させることができるだけでなく、混合ガスの濃度
調整の応答性を向上させることができる。(Operation) In the hot isostatic pressing apparatus according to the present invention, the pressure medium gas supply means 27 and the pressure medium gas discharge means are provided in the furnace chamber 25 formed inside the high pressure vessel 20 through the heat insulating layer 23 and the heater 24. Since the 36 open ends 32A, 39A are arranged, the concentration of the mixed gas can be adjusted by replacing only the mixed gas in the furnace chamber 25, and the amount of the mixed gas required for the concentration adjustment of the mixed gas. Can be reduced, and the response of the concentration adjustment of the mixed gas can be improved.
また、圧媒ガス供給手段27と圧媒ガス排出手段36の開口
端32A,39Aが、いずれか一方が炉室25の上部に配され、
他方が炉室25の下部に配されているので、混合ガスの給
排により炉室25内で混合ガスの攪拌作用が生じ、炉室25
内部の混合ガスの濃度の均一性がよくなる。このこと
は、混合ガスの一成分の濃度が比較的低濃度であると
き、該混合ガスの一成分の濃度調整の精度をあげるのに
有効である。これは、混合ガスの一成分の濃度が比較的
低濃度であるときには、該成分の濃度の極微量の変化が
製品の品質に影響することが多いから、製品の品質向上
にも寄与できる。Further, the pressure medium gas supply means 27 and the opening ends 32A, 39A of the pressure medium gas discharge means 36, one of which is arranged in the upper part of the furnace chamber 25,
Since the other is arranged in the lower part of the furnace chamber 25, the supply and discharge of the mixed gas causes a stirring action of the mixed gas in the furnace chamber 25, and
The uniformity of the concentration of the mixed gas inside is improved. This is effective in increasing the accuracy of adjusting the concentration of one component of the mixed gas when the concentration of the one component of the mixed gas is relatively low. When the concentration of one component of the mixed gas is relatively low, an extremely slight change in the concentration of the component often affects the quality of the product, which can contribute to the improvement of the quality of the product.
請求項２記載に係わる考案では、圧媒ガス供給手段27を
炉室25上部にその開口端32Aを有する管路32に接続し、
圧媒ガス排出手段36を炉室25下部にその開口端39Aを有
する管路39に接続しているので、圧媒ガスたる混合ガス
が炉室25外部に漏洩する量を少なくすることができ、混
合ガスの濃度調整時における、必要混合ガス量をより少
なくできるとともに、調整制御の応答性をより向上させ
ることができるのである。In the invention according to claim 2, the pressure medium gas supply means 27 is connected to the pipe 32 having the open end 32A at the upper part of the furnace chamber 25,
Since the pressure medium gas discharging means 36 is connected to the pipe 39 having the opening end 39A at the lower portion of the furnace chamber 25, the amount of the mixed gas as the pressure medium gas leaking to the outside of the furnace chamber 25 can be reduced, When adjusting the concentration of the mixed gas, the required mixed gas amount can be further reduced, and the responsiveness of the adjustment control can be further improved.
請求項３に係わる考案では、圧媒ガス排出手段27が炉室
25内にその開口端32Aを有する管路32に接続されてお
り、該圧媒ガス排出手段36に、前記炉室25内の混合ガス
濃度を検出するガス濃度検出手段44が接続されているの
で、第３図に示す従来例のように、混合ガスの濃度検出
手段を別個に設ける必要がなく、装置を簡単安価に構成
することができる。In the invention according to claim 3, the pressure medium gas discharging means 27 is the furnace chamber.
25 is connected to the pipe 32 having its open end 32A, and the pressure medium gas discharging means 36 is connected to the gas concentration detecting means 44 for detecting the concentration of the mixed gas in the furnace chamber 25. Unlike the conventional example shown in FIG. 3, it is not necessary to separately provide a mixed gas concentration detecting means, and the apparatus can be configured simply and inexpensively.
請求項（４）に係わる本考案では、圧媒ガス供給手段27
と圧媒ガス排出手段36に、それぞれガス濃度検出手段4
4,51が接続されているので、ガス濃度検出器55により検
出された炉室25上部のガス濃度と、前記ガス濃度検出器
47により検出された炉室25下部のガス濃度とから補正演
算することで、混合ガスの濃度検出の精度を向上させる
ことができる（請求項（４））。In the present invention according to claim (4), the pressure medium gas supply means 27
And the pressure medium gas discharging means 36 are respectively connected to the gas concentration detecting means 4
Since 4, 51 are connected, the gas concentration in the upper part of the furnace chamber 25 detected by the gas concentration detector 55 and the gas concentration detector
The accuracy of the mixed gas concentration detection can be improved by performing a correction calculation based on the gas concentration in the lower portion of the furnace chamber 25 detected by 47 (claim (4)).
（実施例） 以下、第１図および第２図を参照して本考案の実施例を
詳述する。(Embodiment) An embodiment of the present invention will be described in detail below with reference to FIGS. 1 and 2.
第１図、第２図において、20は高圧容器で、円筒形状と
されていてその上・下開口部には、上蓋21および下蓋22
が嵌合されて気密にされている。In FIGS. 1 and 2, reference numeral 20 denotes a high-pressure container, which has a cylindrical shape and has an upper lid 21 and a lower lid 22 at upper and lower openings thereof.
Are fitted and made airtight.
23は断熱層であり、倒立コップ形状とされていてその内
周にヒータ24を有しており、ここに、高圧容器20の内部
に断熱層23およびヒータ24を介して炉室25が形成されて
おり、該炉室25には処理台26上の被処理体Ｅが配設され
ている。Reference numeral 23 denotes a heat insulating layer, which is formed into an inverted cup shape and has a heater 24 on the inner periphery thereof, in which a furnace chamber 25 is formed inside the high-pressure vessel 20 via the heat insulating layer 23 and the heater 24. In the furnace chamber 25, an object to be processed E on a processing table 26 is arranged.
27は圧媒ガス供給手段であり、例えばO2濃度２％のO2/A
r混合ガスの供給用タンク28およびO2濃度１％のO2/Ar混
合ガスの供給用タンク29とを並設して備え、コンプレッ
サ30を介して下蓋22に形成した供給通路31および第１管
路32を通じて炉室25に圧媒ガスとして混合ガスを供給す
るものである。この圧媒ガス供給手段27の配管には、図
示の如く開閉弁33,34,35が備えられている。27 is a pressure medium gas supply means, for example, O 2 concentration 2% O 2 / A
r A mixed gas supply tank 28 and an O 2 / Ar mixed gas supply tank 29 having an O 2 concentration of 1% are provided in parallel, and a supply passage 31 formed in the lower lid 22 via a compressor 30 and a first The mixed gas is supplied to the furnace chamber 25 through the one conduit 32 as a pressure medium gas. The piping of the pressure medium gas supply means 27 is provided with opening / closing valves 33, 34, 35 as shown in the figure.
36は圧媒ガス排出手段であり、炉室25からの排出ガスを
ガス回収用ボンベ37に回収するもので、下蓋22に形成し
た排出通路38に炉室25に臨む第２管路39を接続するとと
もに、排出通路38に接続された配管ライン上に、開閉弁
40、絞り弁41、減圧弁42および開閉弁43を備えてなる。Reference numeral 36 is a pressure medium gas discharging means for collecting the exhaust gas from the furnace chamber 25 in the gas recovery cylinder 37, and the second passage 39 facing the furnace chamber 25 is provided in the discharge passage 38 formed in the lower lid 22. Along with the connection, the on-off valve is installed on the piping line connected to the discharge passage 38.
40, a throttle valve 41, a pressure reducing valve 42 and an opening / closing valve 43.
ここにおいて、図示の実施例では第１管路32の開口端32
Aは炉室25の上部に配され、この第１管路32に圧媒ガス
供給手段27が接続され、第２管路39の開口端39Aは炉室2
5の下部に配され、この第２管路39に圧媒ガス排出手段3
6が接続されている。Here, in the illustrated embodiment, the opening end 32 of the first conduit 32 is
A is arranged in the upper part of the furnace chamber 25, the pressure medium gas supply means 27 is connected to the first conduit 32, and the opening end 39A of the second conduit 39 is the furnace chamber 2
It is arranged in the lower part of 5, and the pressure medium gas discharging means 3 is connected to the second pipe 39.
6 is connected.
44はガス濃度検出手段であり、圧媒ガス力排出手段36に
おける開閉弁43と減圧弁42との間の配管に、チェック弁
45、絞り弁46を有する配管を接続して、この配管に、ガ
ス濃度検出器47を設けることで、炉室25内のガス濃度を
検出するようしている。Reference numeral 44 is a gas concentration detecting means, and a check valve is provided in the pipe between the opening / closing valve 43 and the pressure reducing valve 42 in the pressure medium gas force discharging means 36.
A pipe having a 45 and a throttle valve 46 is connected, and a gas concentration detector 47 is provided in this pipe to detect the gas concentration in the furnace chamber 25.
48は圧力検出手段であり、圧媒ガス排出手段36の配管ラ
インに、圧力計49を接続することで、炉室25の圧力が検
出可能とされている。Reference numeral 48 is a pressure detecting means, and the pressure in the furnace chamber 25 can be detected by connecting a pressure gauge 49 to the pipe line of the pressure medium gas discharging means 36.
50は制御手段であり、前記ガス濃度検出手段44により検
出されたガス濃度と前記圧力検出手段48により検出され
た圧力とに応じて炉室25内の混合ガスの濃度を制御する
もので、このため、ガス濃度検出器47、圧力計49の各検
出信号がフィードバックされ、これによって各開閉弁3
3,34,35,43の開度が調整可能とされているとともに、コ
ンプレッサ30の圧力等が調整可能とされている。50 is a control means, which controls the concentration of the mixed gas in the furnace chamber 25 according to the gas concentration detected by the gas concentration detection means 44 and the pressure detected by the pressure detection means 48. Therefore, the detection signals of the gas concentration detector 47 and the pressure gauge 49 are fed back, which causes the on-off valves 3
The opening degree of 3,34,35,43 can be adjusted, and the pressure of the compressor 30 and the like can be adjusted.
51は別のガス濃度検出手段であり、圧媒ガス供給手段27
における開閉弁35と供給通路31との間の配管に、開閉弁
52、絞り弁53および減圧弁54を有する配管を接続して、
この配管に、ガス濃度検出器55を設けてなる。51 is another gas concentration detecting means, which is a pressure medium gas supplying means 27
In the pipe between the on-off valve 35 and the supply passage 31 in
52, a throttle valve 53 and a pipe having a pressure reducing valve 54 are connected,
A gas concentration detector 55 is provided in this pipe.
このガス濃度検出手段51を設けることにより、圧媒ガス
供給時以外において、炉室25上方のガス濃度が検出可能
となり、又、このガス濃度検出手段51と前述したガス濃
度検出手段44とで、炉室25の上方と下方のガス濃度が測
定可能となり、炉室25内部のガス濃度をより正確に測定
可能となる。By providing the gas concentration detecting means 51, the gas concentration above the furnace chamber 25 can be detected except when the pressure medium gas is being supplied, and the gas concentration detecting means 51 and the gas concentration detecting means 44 described above, The gas concentration above and below the furnace chamber 25 can be measured, and the gas concentration inside the furnace chamber 25 can be measured more accurately.
次に、前述した実施例の動作を第１図を参照して説明す
る。Next, the operation of the above-described embodiment will be described with reference to FIG.
まず、被処理体Ｅを処理台26に載置し、炉室25内に配置
する。次いで、開閉弁35を開くとともに、コンプレッサ
30を作動させてガスボンベ28,29から混合ガスを第１管
路32を通して炉内に供給する。第１の管路32はその開口
端32Aが炉室25の上部に配されているので、混合ガスは
炉室25の上部から下部に流れ、さらに断熱層23と下蓋22
との間の間隙を通って断熱層23と高圧容器20との間の間
隙Ｂにも充填される。First, the object to be processed E is placed on the processing table 26 and placed in the furnace chamber 25. Next, the on-off valve 35 is opened and the compressor
30 is operated to supply the mixed gas from the gas cylinders 28, 29 into the furnace through the first conduit 32. Since the open end 32A of the first conduit 32 is arranged in the upper part of the furnace chamber 25, the mixed gas flows from the upper part to the lower part of the furnace chamber 25, and the heat insulating layer 23 and the lower lid 22
The gap B between the heat insulating layer 23 and the high-pressure container 20 is also filled through the gap between and.
次いで、コンプレッサ30を作動させることにより炉室25
および間隙Ｂの圧力を上げるとともに、ヒータ24を作動
させ炉室25内の温度を上げて被処理体Ｅに対して熱間静
水圧加圧処理をおこなう。Then, by operating the compressor 30, the furnace chamber 25
Then, the pressure in the gap B is raised, and the heater 24 is operated to raise the temperature in the furnace chamber 25 to perform hot isostatic pressing on the object E to be treated.
この処理中に、被処理体Ｅもしくは炉室25内構造物との
反応等により、混合ガスの濃度が変化した場合、ガス濃
度検出器44によりその変化を検出し、混合ガスの濃度が
低下した場合には、開閉弁33を開け、ガスボンベ28の高
濃度の混合ガスを炉室25に供給し、混合ガスの濃度が上
昇した場合には、開閉弁34を開け、ガスボンベ29の低濃
度の混合ガスを炉室25に供給することで、炉室25内の混
合ガスの濃度を調整するのである。During this process, if the concentration of the mixed gas changes due to reaction with the object to be treated E or the internal structure of the furnace chamber 25, the gas concentration detector 44 detects the change and the concentration of the mixed gas decreases. In this case, the on-off valve 33 is opened, the high-concentration mixed gas of the gas cylinder 28 is supplied to the furnace chamber 25, and when the concentration of the mixed gas rises, the on-off valve 34 is opened and the gas cylinder 29 is mixed at a low concentration. By supplying the gas to the furnace chamber 25, the concentration of the mixed gas in the furnace chamber 25 is adjusted.
熱間静水圧加圧処理中には、前記の混合ガスの濃度調整
とは別に、炉室25内の圧力をも調整する。すなわち、圧
力計49により炉室25内の圧力を検出し、圧力が目標値よ
り高いときは、開閉弁43を開けて混合ガスをガス回収ボ
ンベ37に回収する。一方、圧力が目標値より低いとき
は、開閉弁35を開けて炉室25内に混合ガスを供給するの
である。During the hot isostatic pressing process, the pressure inside the furnace chamber 25 is also adjusted in addition to the concentration adjustment of the mixed gas. That is, the pressure inside the furnace chamber 25 is detected by the pressure gauge 49, and when the pressure is higher than the target value, the on-off valve 43 is opened to collect the mixed gas in the gas recovery cylinder 37. On the other hand, when the pressure is lower than the target value, the on-off valve 35 is opened to supply the mixed gas into the furnace chamber 25.
ここで、熱間静水圧加圧処理中における炉室25内と間隙
Ｂとの間の混合ガスの移動としては、両者の間の圧力差
に起因しておきる程度であり、第３図に示す従来例のよ
うに混合ガスの濃度調整のために混合ガスを両者の間で
移動させることはない。Here, the movement of the mixed gas between the inside of the furnace chamber 25 and the gap B during the hot isostatic pressing is due to the pressure difference between the two, and is shown in FIG. Unlike the conventional example, the mixed gas is not moved between the two for adjusting the concentration of the mixed gas.
静水圧加圧処理終了後には、開閉弁43を開けて、混合ガ
スをガス回収ボンベ37に回収し、炉室25内を減圧する。
このとき、減圧速度は絞り弁41で調整されるのである。After completion of the hydrostatic pressure pressurization process, the on-off valve 43 is opened, the mixed gas is collected in the gas recovery cylinder 37, and the inside of the furnace chamber 25 is depressurized.
At this time, the pressure reducing rate is adjusted by the throttle valve 41.
以上述べた各開閉弁33,34,35,43およびコンプレッサ30
は、圧力計49およびガス濃度検出器47により検出された
圧力と混合ガスの濃度とに基づき、制御手段50により自
動的に制御される。The on-off valves 33, 34, 35, 43 and the compressor 30 described above
Is automatically controlled by the control means 50 based on the pressure detected by the pressure gauge 49 and the gas concentration detector 47 and the concentration of the mixed gas.
以上述べた構成で十分に本考案を実施できるのである
が、第１図に示す実施例では、前述したように、混合ガ
スの濃度検出の精度を向上させるため、ガス濃度検出器
55を設けている。該ガス濃度検出器55は、熱間静水圧加
圧時の適当な時期に、開閉弁35を閉じるとともに、開閉
弁52を開け、該ガス濃度検出器55に炉室25上部の混合ガ
スの濃度を検出するものである。該ガス濃度検出器55に
より検出された炉室25上部のガス濃度と、前記ガス濃度
検出器47により検出された炉室25下部のガス濃度とから
補正演算をすることで、混合ガスの濃度検出の精度を向
上させることができる。Although the present invention can be sufficiently implemented with the above-described configuration, in the embodiment shown in FIG. 1, as described above, the gas concentration detector is used to improve the accuracy in detecting the concentration of the mixed gas.
55 are provided. The gas concentration detector 55 closes the on-off valve 35 and opens the on-off valve 52 at an appropriate time during hot isostatic pressurization, and the gas concentration detector 55 causes the concentration of the mixed gas in the upper part of the furnace chamber 25 to be increased. Is to detect. The concentration of the mixed gas is detected by performing a correction calculation from the gas concentration in the upper part of the furnace chamber 25 detected by the gas concentration detector 55 and the gas concentration in the lower part of the furnace chamber 25 detected by the gas concentration detector 47. The accuracy of can be improved.
なお、本実施例では、ガス濃度検出器47を圧媒ガス排出
手段36に接続しているが、第３図に示す従来例のよう
に、炉室１内部に別個に設けてもよい。In the present embodiment, the gas concentration detector 47 is connected to the pressure medium gas discharging means 36, but it may be separately provided inside the furnace chamber 1 as in the conventional example shown in FIG.
また、圧媒ガス排出手段36に回収ガスボンベ37を設け
ず、大気解放とすることもできるし、第１管路32に圧媒
ガス排出手段36を、第２管路39に圧媒ガス供給手段27
を、それぞれ接続させることもできる。Further, the pressure medium gas discharge means 36 may be opened to the atmosphere without providing the recovery gas cylinder 37, and the pressure medium gas discharge means 36 may be provided in the first conduit 32 and the pressure medium gas supply means may be provided in the second conduit 39. 27
Can also be connected respectively.
（考案の効果） 本考案によれば、混合ガスの濃度調整が炉室内部の混合
ガスのみを置換することでおこなうことができるので、
混合ガスの濃度調整に必要な混合ガスの量を減少させる
ことができるだけでなく、混合ガスの濃度調整を応答性
良くおこなうことができる。(Effect of the Invention) According to the present invention, the concentration of the mixed gas can be adjusted by replacing only the mixed gas in the furnace chamber.
Not only can the amount of the mixed gas required for adjusting the concentration of the mixed gas be reduced, but also the concentration of the mixed gas can be adjusted with good responsiveness.
また、炉室の上・下部に第１管路と第２管路の開口端が
あるので、混合ガスを循環させると攪拌作用が起り、炉
室内部のガス雰囲気を均一にでき、これは比較的濃度で
処理される製品等に関してはごく微量のガス濃度が影響
するためその効果は顕著となる。Also, since there are open ends of the first and second conduits in the upper and lower parts of the furnace chamber, a stirring action occurs when the mixed gas is circulated, and the gas atmosphere inside the furnace chamber can be made uniform. With regard to products etc. which are treated at a specific concentration, the effect becomes remarkable because a very small amount of gas concentration influences.
図面は本考案の実施例と従来例とを示し、第１図は本案
実施例の立面断面図、第２図は第１図Ａ−Ａ線断面図、
第３図は従来例の立面断面図である。 20…高圧容器、23…断熱層、24…ヒータ、25…炉室、27
…圧媒ガス供給手段、32…第１管路、32A…開口端、36
…圧媒ガス排出手段、39…第２管路、39A…開口端、44
…ガス濃度検出手段、48…圧力検出手段。The drawings show an embodiment of the present invention and a conventional example. FIG. 1 is an elevation sectional view of an embodiment of the present invention, FIG. 2 is a sectional view taken along line AA of FIG.
FIG. 3 is an elevation sectional view of a conventional example. 20 ... High-pressure container, 23 ... Heat insulation layer, 24 ... Heater, 25 ... Furnace chamber, 27
... Pressure medium gas supply means, 32 ... First conduit, 32A ... Open end, 36
... Pressure medium gas discharging means, 39 ... Second pipe line, 39A ... Open end, 44
… Gas concentration detecting means, 48… Pressure detecting means.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｆ２７Ｂ 17/00 ３０１ Ｂ ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Internal reference number FI technical display location F27B 17/00 301B
Claims (4)
びヒータ（24）を介して炉室（25）が形成され、該炉室
（25）内の被処理体（Ｅ）に、圧媒ガスとして混合ガス
を用いて熱間静水圧加圧処理をおこなう装置であって、
前記混合ガスを前記炉室（25）に供給する圧媒ガス供給
手段（27）と、前記混合ガスを前記炉室（25）から排出
する圧媒ガス排出手段（36）を有する熱間静水圧加圧装
置において、 前記炉室（25）内上部に開口端（32A）が配された第１
の管路（32）と、前記炉室（25）内下部に開口端（39
A）が配された第２の管路（39）とを有し、該第１・２
管路（32）（39）のいずれか一方の管路（32）又は（3
9）に前記圧媒ガス供給手段（27）が接続されていると
ともに、他方の管路（39）又は（32）に前記圧媒ガス排
出手段（36）が接続されていることを特徴とする熱間静
水圧加圧装置。1. A furnace chamber (25) is formed inside a high-pressure container (20) via a heat insulating layer (23) and a heater (24), and a treatment object (E) in the furnace chamber (25) is formed. A device for performing hot isostatic pressing using a mixed gas as a pressure medium gas,
Hot hydrostatic pressure having a pressure medium gas supply means (27) for supplying the mixed gas to the furnace chamber (25) and a pressure medium gas discharge means (36) for discharging the mixed gas from the furnace chamber (25). In the pressurizing device, the first with the open end (32A) arranged in the upper part of the furnace chamber (25)
And the open end (39) in the lower part of the furnace chamber (25).
A) and a second conduit (39) in which the first and second
One of the pipelines (32) (39) or (3)
The pressure medium gas supply means (27) is connected to 9), and the pressure medium gas discharge means (36) is connected to the other pipeline (39) or (32). Hot isostatic pressing device.
（32）に接続されているとともに、圧媒ガス排出手段
（36）が前記第２の管路（39）に接続されていることを
特徴とする請求項（１）に記載の熱間静水圧加圧装置。2. A pressure medium gas supply means (27) is connected to the first pipeline (32), and a pressure medium gas discharge means (36) is connected to the second pipeline (39). The hot isostatic pressing device according to claim 1, wherein the hot isostatic pressing device is provided.
5）内の混合ガス濃度を検出するガス濃度検出手段（4
4）が接続されていることを特徴とする請求項（１）記
載の熱間静水圧加圧装置。3. The furnace chamber (2) in the pressure medium gas discharge means (36).
5) Gas concentration detection means (4)
4. The hot isostatic pressing device according to claim 1, characterized in that 4) is connected.
段（36）に、それぞれガス濃度検出手段（44）（51）が
接続されていることを特徴とする請求項（１）記載の熱
間静水圧加圧装置。4. The gas concentration detecting means (44) (51) is connected to the pressure medium gas supply means (27) and the pressure medium gas discharge means (36), respectively. The hot isostatic pressing device described.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13410589U JPH074477Y2 (en) | 1989-11-18 | 1989-11-18 | Hot isostatic press |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13410589U JPH074477Y2 (en) | 1989-11-18 | 1989-11-18 | Hot isostatic press |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0373897U JPH0373897U (en) | 1991-07-25 |
| JPH074477Y2 true JPH074477Y2 (en) | 1995-02-01 |
Family
ID=31681468
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13410589U Expired - Fee Related JPH074477Y2 (en) | 1989-11-18 | 1989-11-18 | Hot isostatic press |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH074477Y2 (en) |
-
1989
- 1989-11-18 JP JP13410589U patent/JPH074477Y2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0373897U (en) | 1991-07-25 |
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