JPH0743108A - Optical displacement gauge - Google Patents

Optical displacement gauge

Info

Publication number
JPH0743108A
JPH0743108A JP18958893A JP18958893A JPH0743108A JP H0743108 A JPH0743108 A JP H0743108A JP 18958893 A JP18958893 A JP 18958893A JP 18958893 A JP18958893 A JP 18958893A JP H0743108 A JPH0743108 A JP H0743108A
Authority
JP
Japan
Prior art keywords
focusing lens
gravity
center
displacement
movable part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18958893A
Other languages
Japanese (ja)
Other versions
JP3317310B2 (en
Inventor
Yoshiharu Kuwabara
義治 桑原
Osamu Nara
治 奈良
Tadashi Iwamoto
正 岩本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Mitsutoyo Kiko Co Ltd
Original Assignee
Mitutoyo Corp
Mitsutoyo Kiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp, Mitsutoyo Kiko Co Ltd filed Critical Mitutoyo Corp
Priority to JP18958893A priority Critical patent/JP3317310B2/en
Publication of JPH0743108A publication Critical patent/JPH0743108A/en
Application granted granted Critical
Publication of JP3317310B2 publication Critical patent/JP3317310B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)

Abstract

PURPOSE:To maintain stability during a motion at high speed and acceleration by keeping the center of gravity of a whole moving section including a focusing lens, on the line of force of a drive system. CONSTITUTION:A moving section 40 has an approximately rectangular frame 41 and a focusing lens 20 is fixed to the lower end thereof. In addition, the section 40 is held, so as to be freely movable along a displacement measurement direction with a pair of parallel leaf springs 60, relative to a displacement gauge body 8. The center of gravity G of the whole of the section 40 is virtually positioned on the line of force WL of a drive system formed out of a drive coil 62 and a magnet 64 as a pair. According to this construction, an actuator when driven at high acceleration, is not dislocated due to moment around the center of gravity G of the moving section 40. The actuator can thus be controlled with high accuracy at the time of measuring a measurement object under displacement at high speed. Furthermore, the optical axis OA of the lens 20 is kept within a plane including the flexed section of the parallel leaf springs 60 at the side of the moving section 40, thereby enabling the dislocation of the lens 20 from the optical axis OA due to disturbances, to be kept approximately at zero.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、光学式変位計に係り、
特に、フロッピーディスクドライバのピックアップの追
従制御や、表面粗さ計の測定ヘッドに用いるのに好適
な、合焦用レンズを含む可動部を高精度で制御すること
が可能な光学式変位計に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical displacement meter,
In particular, the present invention relates to an optical displacement meter that is suitable for use in the follow-up control of a pickup of a floppy disk driver and a movable head including a focusing lens, which is suitable for use in a measurement head of a surface roughness meter. Is.

【0002】[0002]

【従来の技術】例えば、出願人が実開平5−34512
で開示したように、変位計本体8に固定されたレーザ光
源10と、測定対象物12上に、該レーザ光源10から
の光を合焦させる、例えば偏光ビームスプリッタ14、
コリメータレンズ16、合焦用レンズ20を含む合焦光
学系と、測定対象物12からの反射光により、合焦用レ
ンズ20と測定対象物12との基準距離からのずれを検
出するための、例えば1/4波長板24、結像レンズ2
6、ビームスプリッタ28、受光素子32A、32Bを
含む検出光学系と、合焦用レンズ20と駆動用のコイル
46(又はマグネット44)及びリニアエンコーダ48
のスケール50が一体的に取付けられた可動部40と、
検出光学系からの信号に基づいて、前記可動部40を、
合焦用レンズ20と測定対象物12との距離が基準距離
となるように駆動する駆動回路とを備えた光学式変位計
が知られている。
2. Description of the Related Art For example, the applicant of the present invention has a utility model of Japanese Utility Model Application No. 5-34512
As disclosed in 1), the laser light source 10 fixed to the displacement meter main body 8 and the light from the laser light source 10 are focused on the measurement target 12, for example, a polarization beam splitter 14,
A focusing optical system including the collimator lens 16 and the focusing lens 20 and reflected light from the measurement target 12 are used to detect a deviation from the reference distance between the focusing lens 20 and the measurement target 12, For example, a quarter wave plate 24, an imaging lens 2
6, a beam splitter 28, a detection optical system including the light receiving elements 32A and 32B, a focusing lens 20, a driving coil 46 (or a magnet 44), and a linear encoder 48.
A movable part 40 integrally attached with a scale 50 of
Based on the signal from the detection optical system, the movable portion 40,
2. Description of the Related Art There is known an optical displacement meter including a drive circuit that drives a focusing lens 20 and a measurement object 12 so that the distance between them becomes a reference distance.

【0003】又、特開平4−366711や特開平5−
89480には、合焦用レンズの光軸とリニアスケール
を同軸に配置して、アッベ誤差が発生しないようにした
ものが開示されている。
Further, Japanese Patent Laid-Open No. 4-366711 and Japanese Patent Laid-Open No. 5-36611.
89480 discloses an optical axis of a focusing lens and a linear scale which are coaxially arranged so that an Abbe error does not occur.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、特開平
4−366711は、静的な精度を重視したものであ
り、測定対象物の高速な動きに追従させるためには、可
動部の高速、高加速度運動時の安定性を考える必要があ
る。
However, Japanese Patent Laid-Open No. 4-366711 emphasizes static accuracy, and in order to follow the high-speed movement of the measuring object, high-speed and high-acceleration of the movable part. It is necessary to consider stability during exercise.

【0005】アクチュエータを高速で動かす場合、その
駆動力の作用線(力線)と可動部の重心がずれている
と、そこに重心回りのモーメントが発生し、制御不能と
なったり、不安定になってしまうという問題点を有して
いた。
When the actuator is moved at a high speed, if the line of action of the driving force (line of force) and the center of gravity of the movable portion are deviated, a moment around the center of gravity is generated, which makes control uncontrollable or unstable. It had a problem that it would become.

【0006】本発明は、前記従来の問題点を解消するべ
くなされたもので、高速、高加速度運動時の安定性を確
保することが可能なアクチュエータ機構を備えた光学式
変位計を提供することを第1の目的とする。
The present invention has been made to solve the above-mentioned conventional problems, and provides an optical displacement gauge provided with an actuator mechanism capable of ensuring stability during high-speed and high-acceleration movements. Is the first purpose.

【0007】本発明は、又、アクチュエータの可動部を
平行板ばね機構で保持するようにしした際の測定誤差を
防止することが可能なアクチュエータ機構を備えた光学
式変位計を提供することを第2の目的とする。
The present invention also provides an optical displacement gauge having an actuator mechanism capable of preventing a measurement error when the movable portion of the actuator is held by the parallel leaf spring mechanism. The purpose is 2.

【0008】[0008]

【課題を解決するための手段】本発明は、光学式変位計
において、測定対象物の表面に対向配置される合焦用レ
ンズと、該合焦用レンズを保持する可動部と、該可動部
を変位測定方向に移動自在に保持する平行板ばね機構
と、前記可動部を非接触で駆動するための駆動系と、前
記可動部の測定方向変位を検出するエンコーダとを備
え、前記合焦用レンズを含む可動部全体の重心位置が、
実質的に、前記駆動系の力線上に存在するようにして、
前記第1の目的を達成したものである。
According to the present invention, in an optical displacement meter, a focusing lens arranged to face a surface of an object to be measured, a movable portion holding the focusing lens, and the movable portion. A parallel leaf spring mechanism for movably holding the movable part in the displacement measuring direction, a drive system for driving the movable part in a non-contact manner, and an encoder for detecting the displacement of the movable part in the measuring direction. The position of the center of gravity of the entire movable part, including the lens,
Substantially so that it exists on the line of force of the drive system,
The first object is achieved.

【0009】本発明は、又、同様な光学式変位計におい
て、前記合焦用レンズの光軸が、実質的に、前記平行板
ばねの可動部側変曲部を含む面内に存在するようにし
て、前記第2の目的を達成したものである。
According to the present invention, in a similar optical displacement gauge, the optical axis of the focusing lens is substantially in the plane including the inflection part on the movable part side of the parallel leaf spring. Thus, the second object is achieved.

【0010】[0010]

【作用】本第1発明においては、図2に例示する如く、
合焦用レンズ20を含む可動部40全体の重心Gの位置
が、実質的に、例えば1対の駆動コイル62とマグネッ
ト64で構成される駆動系の力線WL上に存在するよう
にしたので、アクチュエータ駆動時に、可動部重心G回
りのモーメントによる位置ずれが発生しないため、高速
で変位する測定対象物の測定時に、高精度でアクチュエ
ータの制御が可能となる。
In the first aspect of the present invention, as illustrated in FIG.
Since the position of the center of gravity G of the entire movable portion 40 including the focusing lens 20 is substantially on the force line WL of the drive system including the pair of drive coils 62 and the magnet 64, for example. Since the displacement due to the moment around the center of gravity G of the movable portion does not occur when the actuator is driven, it is possible to control the actuator with high accuracy when measuring an object to be measured that is displaced at high speed.

【0011】なお、図2のように、可動部を、例えば2
板の平行な板ばね60で構成される平行板ばね機構を用
いて保持すると、図2のように板ばねの変曲部Iと合焦
用レンズ20の光軸OAがずれていた場合、セットに外
乱が加わったとき、変曲部I回りのモーメントが発生す
る。このとき、変曲部Iと光軸OAのずれをl 、モーメ
ントによる回転量をΔθとすると、図5に示す如く、Δ
θが0に近いときは、次式に示す如く、l Δθだけ測定
対象物の表面位置と合焦用レンズの光軸のずれが発生
し、これがそのまま測定誤差となる恐れがある。
It should be noted that, as shown in FIG.
When the plate is held by using the parallel leaf spring mechanism constituted by the leaf springs 60 parallel to each other, when the inflection portion I of the leaf spring and the optical axis OA of the focusing lens 20 are deviated as shown in FIG. When a disturbance is applied to, a moment around the inflection portion I is generated. At this time, if the deviation between the inflection portion I and the optical axis OA is l and the rotation amount due to the moment is Δθ, as shown in FIG.
When θ is close to 0, the surface position of the object to be measured and the optical axis of the focusing lens deviate by l Δθ as shown in the following equation, and this may cause a measurement error.

【0012】[0012]

【数1】 [Equation 1]

【0013】そこで、本第2発明では、図8に例示する
如く、合焦用レンズ20の光軸OAが、実質的に、平行
板ばね70の可動部側変曲部IMを含む面内に存在する
ようにして、前記外乱による合焦用レンズの光軸からの
ずれ量を、無視できるレベルまで小さくし、外乱による
測定データの誤差を抑えるようにしたものである。
Therefore, in the second aspect of the present invention, as illustrated in FIG. 8, the optical axis OA of the focusing lens 20 is substantially in the plane including the movable portion side inflection portion IM of the parallel leaf spring 70. As a result, the amount of deviation of the focusing lens from the optical axis due to the disturbance is reduced to a negligible level, and the error in the measurement data due to the disturbance is suppressed.

【0014】[0014]

【実施例】以下、図面を参照して、本発明の実施例を詳
細に説明する。
Embodiments of the present invention will now be described in detail with reference to the drawings.

【0015】本発明の第1実施例は、図2乃至図4に示
す如く、測定対象物の表面に対向配置される合焦用レン
ズ20と、該合焦用レンズ20を保持する鏡筒22を含
む可動部40と、該可動部40を変位測定方向(図2の
上下方向)に移動自在に保持する2枚の平行な板ばね6
0を含む平行板ばね機構と、前記可動部40を非接触で
駆動するための方形リング状の駆動コイル62及びマグ
ネット64を含む駆動系と、前記可動部40の測定変位
を検出するための、前記可動部40に固定されたリニヤ
スケール50とを備え、前記合焦用レンズ20を含む可
動部全体の重心Gの位置が、前記駆動系の力線WL上に
存在するようにされている。
In the first embodiment of the present invention, as shown in FIGS. 2 to 4, the focusing lens 20 is arranged to face the surface of the object to be measured, and the lens barrel 22 for holding the focusing lens 20. And a pair of parallel leaf springs 6 for holding the movable portion 40 movably in the displacement measuring direction (vertical direction in FIG. 2).
A parallel leaf spring mechanism including 0, a drive system including a rectangular ring-shaped drive coil 62 and a magnet 64 for driving the movable portion 40 in a non-contact manner, and for detecting a measured displacement of the movable portion 40, The linear scale 50 fixed to the movable portion 40 is provided so that the position of the center of gravity G of the entire movable portion including the focusing lens 20 is on the force line WL of the drive system.

【0016】前記可動部40は、略方形状のフレーム4
1を有し、該フレーム41の下端に前記合焦用レンズ2
0が固定され、上端に前記スケール50が固定されてい
る。この可動部40は、更に、一対の平行な板ばね60
により、変位計本体8に対して変位測定方向(図2の上
下方向)に移動自在に保持されている。
The movable portion 40 is a frame 4 having a substantially rectangular shape.
1, and the focusing lens 2 is provided at the lower end of the frame 41.
0 is fixed, and the scale 50 is fixed to the upper end. The movable portion 40 further includes a pair of parallel leaf springs 60.
Thus, it is held movably in the displacement measuring direction (vertical direction in FIG. 2) with respect to the displacement meter main body 8.

【0017】前記合焦用レンズ20の直後には、ビーム
スプリッタ(図示省略)が配置され、合焦用レンズ20
を通過した光の一部を、鏡筒22に空けられた光取出窓
42(図4)から側方へ取出して、合焦用レンズ20と
測定対象物12との基準距離からのずれを検出する検出
光学系(図示省略)に導くようにされている。
A beam splitter (not shown) is arranged immediately after the focusing lens 20, and the focusing lens 20 is provided.
Part of the light that has passed through is extracted laterally from the light extraction window 42 (FIG. 4) provided in the lens barrel 22, and the deviation from the reference distance between the focusing lens 20 and the measurement target 12 is detected. To a detection optical system (not shown).

【0018】前記スケール50は、可動部40の重心G
回りの慣性モーメントを小さくするため、フレーム41
の可動部重心G側にオフセットして固定されている。
The scale 50 has a center of gravity G of the movable portion 40.
In order to reduce the moment of inertia of rotation, the frame 41
It is offset and fixed to the movable portion center of gravity G side.

【0019】前記平行板ばね60は、図6に示すような
展開形状を有し、変曲部形成用切欠き60A及び側面の
折曲部60Bによって、中央部の剛性が高められると共
に、変曲部Iが板ばねの有効長両端に近い位置にくるよ
うにされている。図において、60Cはねじ止め用穴で
ある。
The parallel leaf spring 60 has a developed shape as shown in FIG. 6, and the notch 60A for forming the bent portion and the bent portion 60B on the side surface enhance the rigidity of the central portion and also bend the bent portion. The part I is arranged so as to come close to both ends of the effective length of the leaf spring. In the figure, 60C is a screwing hole.

【0020】前記可動部フレーム41の左側(合焦用レ
ンズ20の反対側)には、駆動系の方形リング状駆動コ
イル62の右端が固定されている。
The right end of a rectangular ring-shaped drive coil 62 of the drive system is fixed to the left side of the movable part frame 41 (the side opposite to the focusing lens 20).

【0021】一方、前記マグネット64は、図7に示す
如く、変位計本体8に固定されたE字状コア66の両端
部内側に、前記駆動コイル62と近接するように固定さ
れている。又、コア66の中央部66Cは、前記駆動コ
イル62内を挿通するようにされている。
On the other hand, as shown in FIG. 7, the magnets 64 are fixed inside the both ends of the E-shaped core 66 fixed to the displacement meter body 8 so as to be close to the drive coil 62. Further, the central portion 66C of the core 66 is adapted to be inserted through the inside of the drive coil 62.

【0022】この実施例のように、駆動コイル62を可
動部40に固定した場合には、可動部質量が小さくでき
て、高速移動が可能であり、好都合である。なお、逆
に、マグネットを可動部40に取付けても構わないこと
は明らかである。
When the drive coil 62 is fixed to the movable part 40 as in this embodiment, the mass of the movable part can be reduced, and high-speed movement is possible, which is convenient. On the contrary, it is obvious that the magnet may be attached to the movable portion 40.

【0023】本実施例においては、合焦用レンズ20を
含む可動部40全体の重心Gの位置が、駆動系の力線W
L上に存在するようにしたので、アクチュエータの高加
速度駆動時に、可動部重心回りのモーメントによる位置
ずれが発生することがなく、高速で変位する測定対象物
の測定時に、高精度でアクチュエータを制御することが
できる。
In the present embodiment, the position of the center of gravity G of the entire movable portion 40 including the focusing lens 20 is determined by the force line W of the drive system.
Since it exists on L, the actuator is controlled with high accuracy when measuring the object to be displaced at a high speed without causing displacement due to the moment around the center of gravity of the movable part when the actuator is driven at high acceleration. can do.

【0024】次に、本発明の第2実施例を詳細に説明す
る。
Next, the second embodiment of the present invention will be described in detail.

【0025】この第2実施例は、前記第1実施例と同様
の光学式変位計において、図8乃至図10に示す如く、
合焦用レンズ20の光軸OAが、平行板ばね70の可動
部側変曲部IMを含む面内に存在するようにしたもので
ある。
The second embodiment is an optical displacement meter similar to the first embodiment, as shown in FIGS. 8 to 10.
The optical axis OA of the focusing lens 20 exists in the plane including the movable portion side inflection portion IM of the parallel leaf spring 70.

【0026】このため、平行板ばね70には、図11に
示す如く、第1実施例と同様の変曲部形成用切欠き70
A及び折曲部70Bに加えて、可動部側変曲部IM付近
に、合焦用レンズ20の鏡筒22を挿通するための円状
の開口70Cが形成されている。なお、本実施例におい
ては、固定側変曲部IFにも円状の開口70Dが形成さ
れ、板ばねの屈曲性能が高められているが、固定側変曲
部IF側の開口70Bは省略したり、他の形状とするこ
とも可能である。図において、70Eは、開口70C、
70Dに形成された、変曲部形成用切欠きである。
Therefore, as shown in FIG. 11, the parallel leaf spring 70 has a notch 70 for forming an inflection portion similar to that of the first embodiment.
In addition to A and the bent portion 70B, a circular opening 70C for inserting the lens barrel 22 of the focusing lens 20 is formed near the movable portion side inflection portion IM. In this embodiment, a circular opening 70D is also formed in the fixed side inflection portion IF to improve the bending performance of the leaf spring, but the opening 70B on the fixed side inflection portion IF side is omitted. Alternatively, other shapes are possible. In the figure, 70E is an opening 70C,
It is a notch for forming an inflection portion formed in 70D.

【0027】他の点については、前記第1実施例と同様
であるので、説明は省略する。
Since the other points are the same as those of the first embodiment, the description thereof will be omitted.

【0028】本実施例においては、合焦用レンズ20の
光軸0Aが、平行板ばね70の可動部側変曲部IMを含
む面内に存在するので、図5に対応する図12及び次式
に示す如く、外乱による合焦用レンズの光軸からのずれ
量をほぼ0とすることができる。
In the present embodiment, the optical axis 0A of the focusing lens 20 exists in the plane including the movable portion side inflection portion IM of the parallel leaf spring 70, so that FIG. As shown in the equation, the amount of deviation from the optical axis of the focusing lens due to disturbance can be made almost zero.

【0029】[0029]

【数2】 [Equation 2]

【0030】本実施例においては、合焦用レンズ20の
光軸OAが平行板ばね70の可動部側変曲部IMを含む
面内に存在するだけでなく、合焦用レンズ20を含む可
動部40全体の重心Gの位置が、駆動系の力線WL上に
存在するようにしているので、外乱による合焦用レンズ
20のずれ量をほぼ0として、外乱による測定データの
誤差を抑えることができるだけでなく、駆動時の重心回
りのモーメントの発生も抑えて、振動特性も改善され
る。
In the present embodiment, not only the optical axis OA of the focusing lens 20 exists within the plane including the movable portion side inflection portion IM of the parallel leaf spring 70, but also the focusing lens 20 is movable. Since the position of the center of gravity G of the entire portion 40 exists on the force line WL of the drive system, the deviation amount of the focusing lens 20 due to the disturbance is set to almost 0, and the error in the measurement data due to the disturbance is suppressed. Not only is it possible to suppress the occurrence of a moment around the center of gravity during driving, but vibration characteristics are also improved.

【0031】なお、第2実施例においては、駆動力の作
用線WLとアクチュエータ可動部の重心Gを必ずしも一
致させなくてもよい。
In addition, in the second embodiment, the line of action WL of the driving force and the center of gravity G of the actuator movable portion do not necessarily have to coincide with each other.

【0032】なお、前記実施例においては、いずれも、
対物レンズが可動とされていたが、測定範囲を広げたい
場合には、例えば大口径の対物レンズを固定し、合焦用
に小形のリレーレンズを動かしてもよい。
In each of the above embodiments,
Although the objective lens is supposed to be movable, if it is desired to widen the measuring range, for example, a large aperture objective lens may be fixed and a small relay lens may be moved for focusing.

【0033】[0033]

【発明の効果】以上説明した通り、第1発明によれば、
駆動時の重心回りのモーメントの発生を抑えて、振動特
性を改善することができ、アクチュエータの高速、高加
速度運動時の安定性を向上することができる。
As described above, according to the first invention,
Generation of a moment around the center of gravity during driving can be suppressed, vibration characteristics can be improved, and stability of the actuator during high-speed, high-acceleration motion can be improved.

【0034】又、第2発明によれば、外乱が加わった場
合の測定対象物と合焦用レンズの光軸のずれ量を、無視
できるレベルにまで小さくすることができ、外乱による
測定データの誤差を抑えることができる。
According to the second aspect of the invention, the amount of deviation of the optical axis between the object to be measured and the focusing lens when a disturbance is applied can be reduced to a negligible level, and the measurement data of the disturbance can be obtained. The error can be suppressed.

【図面の簡単な説明】[Brief description of drawings]

【図1】従来の光学式変位計の一例の構成を示す断面図FIG. 1 is a sectional view showing a configuration of an example of a conventional optical displacement meter.

【図2】本発明に係る光学式変位計の第1実施例の要部
構成を示す断面図
FIG. 2 is a cross-sectional view showing a main part configuration of a first embodiment of an optical displacement meter according to the present invention.

【図3】図2のIII −III 線に沿う横断面図3 is a cross-sectional view taken along the line III-III in FIG.

【図4】図2の右側面図FIG. 4 is a right side view of FIG.

【図5】第1実施例の問題点を説明するための線図FIG. 5 is a diagram for explaining the problems of the first embodiment.

【図6】第1実施例で用いらていれる板ばねの形状を示
す展開図
FIG. 6 is a development view showing the shape of a leaf spring used in the first embodiment.

【図7】同じく駆動系の構成を示す断面図FIG. 7 is a sectional view showing a structure of a drive system of the same.

【図8】本発明に係る光学式変位計の第2実施例の要部
構成を示す断面図
FIG. 8 is a cross-sectional view showing the main configuration of a second embodiment of the optical displacement meter according to the present invention.

【図9】図8の底面図9 is a bottom view of FIG.

【図10】図8のX −X 線に沿う縦断面図FIG. 10 is a vertical sectional view taken along line XX of FIG.

【図11】第2実施例で用いられている板ばねの形状を
示す展開図
FIG. 11 is a development view showing the shape of a leaf spring used in the second embodiment.

【図12】第2実施例の効果を説明するための線図FIG. 12 is a diagram for explaining the effect of the second embodiment.

【符号の説明】[Explanation of symbols]

12…測定対象物 20…合焦用レンズ 40…可動部 50…スケール G…可動部重心 WL…駆動系力線 OA…光軸 60、70…平行板ばね I…板ばね変曲部 IM…板ばね可動部側変曲部 62…駆動コイル 64…マグネット 66…コア 12 ... Object to be measured 20 ... Focusing lens 40 ... Movable part 50 ... Scale G ... Movable part center of gravity WL ... Driving system force line OA ... Optical axis 60, 70 ... Parallel leaf spring I ... Leaf spring inflection part IM ... Plate Spring flexible part side inflection part 62 ... Drive coil 64 ... Magnet 66 ... Core

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】測定対象物の表面に対向配置される合焦用
レンズと、 該合焦用レンズを保持する可動部と、 該可動部を変位測定方向に移動自在に保持する平行板ば
ね機構と、 前記可動部を非接触で駆動するための駆動系と、 前記可動部の測定方向変位を検出するエンコーダとを備
え、 前記合焦用レンズを含む可動部全体の重心位置が、実質
的に、前記駆動系の力線上に存在することを特徴とする
光学式変位計。
1. A focusing lens arranged to face the surface of an object to be measured, a movable part for holding the focusing lens, and a parallel leaf spring mechanism for movably holding the movable part in a displacement measuring direction. A driving system for driving the movable part in a non-contact manner, and an encoder for detecting a displacement in the measurement direction of the movable part, wherein the center of gravity of the entire movable part including the focusing lens is substantially An optical displacement meter, which is present on the line of force of the drive system.
【請求項2】測定対象物の表面に対向配置される合焦用
レンズと、 該合焦用レンズを保持する可動部と、 該可動部を変位測定方向に移動自在に保持する平行板ば
ね機構と、 前記可動部を非接触で駆動するための駆動系と、 前記可動部の測定方向変位を検出するエンコーダとを備
え、 前記合焦用レンズの光軸が、実質的に、前記平行板ばね
の可動部側変曲部を含む面内に存在することを特徴とす
る光学式変位計。
2. A focusing lens arranged to face the surface of an object to be measured, a movable part for holding the focusing lens, and a parallel leaf spring mechanism for movably holding the movable part in a displacement measuring direction. A driving system for driving the movable portion in a non-contact manner, and an encoder for detecting a displacement in the measurement direction of the movable portion, wherein the optical axis of the focusing lens is substantially the parallel leaf spring. An optical displacement meter characterized by being present in a plane including an inflection part on the movable part side.
JP18958893A 1993-07-30 1993-07-30 Optical displacement meter Expired - Fee Related JP3317310B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18958893A JP3317310B2 (en) 1993-07-30 1993-07-30 Optical displacement meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18958893A JP3317310B2 (en) 1993-07-30 1993-07-30 Optical displacement meter

Publications (2)

Publication Number Publication Date
JPH0743108A true JPH0743108A (en) 1995-02-10
JP3317310B2 JP3317310B2 (en) 2002-08-26

Family

ID=16243842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18958893A Expired - Fee Related JP3317310B2 (en) 1993-07-30 1993-07-30 Optical displacement meter

Country Status (1)

Country Link
JP (1) JP3317310B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007218881A (en) * 2006-02-20 2007-08-30 Konica Minolta Opto Inc Shape measuring apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007218881A (en) * 2006-02-20 2007-08-30 Konica Minolta Opto Inc Shape measuring apparatus

Also Published As

Publication number Publication date
JP3317310B2 (en) 2002-08-26

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