JPH0741975Y2 - Variable capacity valve - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of use] The present invention relates to a variable capacity valve which is provided between devices or in the middle of a pipe line and which is removable.

[Prior Art] Conventionally, there is a variable capacity valve provided between devices, for example, between a vacuum container and a diffusion pump, or in a pipeline.

A variable displacement pump is used mainly for controlling a pumping speed of a diffusion pump of vacuum equipment such as a semiconductor manufacturing apparatus.

Such a variable capacity valve is shown in FIG.

FIG. 2 shows a butterfly-type variable displacement valve, in which a disc-shaped valve element 3 is provided via a support shaft 4 inside a valve body 1 which also serves as a conduit and has connecting flanges 2 at both ends. Body 1
The support shaft 4 is connected to an actuator 5 so as to be rotatable about an axis orthogonal to the axis.
The actuator 5 rotates the valve body 3 via the support shaft 4. The rotation of the valve body 3 changes the aperture ratio and controls the throttle state.

In the figure, 6 is a shaft seal.

[Problems to be Solved by the Invention] The above-described variable capacity valve must be detachable for maintenance. For that reason,
In the conventional variable capacity valve, the bellows joint 7 is provided between the variable capacity valve and the device to which it is attached. Therefore, when a conventional variable capacity valve is to be mounted, there is a problem in that an extra mounting space is required for the bellows joint, which increases the size of the device, and a bellows joint with a large pipe diameter is expensive. It was a cause of cost increase.

In view of such circumstances, the present invention aims to provide a variable capacity valve that can be attached to and detached from a device or the like without separately providing a bellows joint.

[Means for Solving the Problem] The present invention provides a movable flange slidably attached to at least one end of a valve body, which can be closely attached to a flange of a device to which a variable displacement valve is attached, and retracts from an end face of the one end. A flange is provided at the position where the head of the push bolt is screwed into the movable flange, and the base end of the push bolt is rotatably and undetachably fitted to the flange. By rotating the bolt, the movable flange can be moved toward and away from the flange of the device, or a movable flange that can be in close contact with the flange of the device to which the variable capacity valve is attached,
At least one end of the valve body is slidably provided, a flange is provided at a position retracted from the end face of the one end, and a tip end of a push bolt in which left and right reverse screws are engraved at the tip end portion and the base end portion It is characterized in that the movable flange is screwed into the movable flange and the base end portion is screwed into the flange portion so that the movable flange can be moved toward and away from the flange of the device by the rotation of the push bolt.

[Operation] During installation and removal work, the push bolt is rotated to shorten the total length of the variable capacity valve, and when the variable capacity valve is fixed, the push bolt is rotated in the opposite direction to extend the entire length of the variable capacity valve and the movable flange is Stick it to the mating flange.

[Embodiment] An embodiment of the present invention will be described below with reference to the drawings.

In FIG. 1, the same components as those shown in FIG. 2 are designated by the same reference numerals.

A connecting flange 2 is provided at one end of the valve body 1, and a flange 14 is provided at a position retracted from the other end by a required distance. A movable flange 8 is slidably provided at the other end, and an O-ring 9 is interposed between the movable flange 8 and the valve body 1 to seal the two.

A screw hole 10 is formed at a position where the circumference of the movable flange 8 is equally divided (for example, 6), and a push bolt 11 is provided in the screw hole 10.
Screw one end of the. Further, a hole 12 is formed in the flange portion 14 at a position facing the screw hole 10 of the movable flange 8, and the hole 12 is formed.
The other end of the push bolt 11 is rotatably fitted to.

A head portion 11a is formed in the middle of the push bolt 11,
The head portion 11a contacts the collar portion 14.

13 is a retaining ring.

The operation will be described below.

When installing this variable capacity valve, press the
11 is rotated to draw the movable flange 8 toward the valve body 1 side,
Make the total length of the variable capacity valve shorter than the mounting dimension L.

The connecting flange 2 is fixed to the flange of the counterpart device by a bolt (not shown), and then the push bolts 11 are sequentially rotated, and the movable flange 8 is pushed out by a screw action,
The movable flange 8 is closely fixed to a mating flange (not shown).

When the variable capacity valve is removed, the above procedure may be reversed.

The movable flange 8 may be fixed by a means different from the means for moving and contacting the movable flange 8 with the push bolts 11. That is, the number of push bolts 11 is reduced, fixing bolts are arranged between the push bolts 11, and the movable flange 8 is fixed to a mating flange (not shown) by the bolts.

Further, although the other end of the push bolt is rotatably fitted to the flange portion in the above-described embodiment, a reverse screw may be formed on the one end and screwed into the flange portion.

Further, although the movable flange is provided only at one end in the above-mentioned embodiment, it goes without saying that it may be provided at both ends.

[Advantages of the Invention] As described above, according to the present invention, it is possible to attach and detach a variable capacity valve without using a bellows joint, and it is possible to downsize the device and reduce the manufacturing cost. Can be demonstrated.

[Brief description of drawings]

FIG. 1 is a schematic sectional view showing an embodiment of the present invention, and FIG. 2 is a schematic sectional view showing a conventional example. Reference numeral 1 is a valve body, 3 is a valve body, 14 is a collar portion, and 8 is a movable flange.

Claims (2)

[Scope of utility model registration request] 1. A movable flange, which is in close contact with a flange of a device to which a variable capacity valve is attached, is slidably provided on at least one end of a valve body, and a flange is provided at a position retracted from an end face of the one end. The tip of a push bolt having a head partway is screwed into the movable flange, and the base end of the push bolt is rotatably and undetachably fitted to the flange, and the movable flange is rotated by the rotation of the push bolt. A variable displacement valve characterized in that it can be moved closer to and away from the flange of the device. 2. A movable flange, which is in close contact with a flange of a device to which a variable capacity valve is attached, is slidably provided on at least one end of a valve body, and a flange is provided at a position retracted from an end face of the one end. The front end of the push bolt having left and right reverse screws engraved at the front end and the base end is screwed into the movable flange, and the base end is screwed into the flange, and the movable flange is rotated by the rotation of the push bolt. A variable displacement valve characterized in that it can be moved closer to and away from the flange of the device.