JPH0740454A - Film forming apparatus - Google Patents

Abstract

PURPOSE:To control the inside air conditions without deleteriously affecting undried coated films and render the quality of products stable by preventing the inside contamination by allowing each flow rate to be the same between an exhaust nozzle and an air supply nozzle, and supplying the quantity of air from the air supply nozzle equal to the quantity of intake from the exhaust nozzle. CONSTITUTION:The apparatus is to form a synthetic resin film or ceramics sheet on a belt-like base material running from the front part to the rear part of the apparatus main body. A plurality of nozzle assemblies 26 are arranged on the longitudinal direction of the belt-like base material 22 on the upper side of a traveling path of the belt-like base material 22. Extended from the lower end to the rearward and slantingly downward direction of a partition wall 30 is a blowing porous plate 32 as a blowing port in the air supply nozzle K. Also, an intake porous plate 34 as an air intake in the exhaust nozzle H extends from the lower end to the forward and slantingly downward direction of the partition 30. The angle (internal angle) defined by both the porous plates 32, 34 is a chevron-shaped one, e.g. to preferably be 120 degrees.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film forming apparatus, a so-called casting machine.

[0002]

2. Description of the Related Art Based on FIG. 6, a conventional film forming apparatus (100)
Will be explained. In the figure, reference numeral (102) is a strip-shaped substrate made of, for example, a synthetic resin film or a metal thin plate.
This belt-shaped substrate (102) is a conveyor (104) that runs in parallel with it.
Allows the device main body (101) to pass from the inlet (106) at the front part through the inside of the device main body (101) to the outlet (10) at the rear part.
It is transported to 8).

In front of the apparatus body (101), a coating room (11
0) is arranged. Coating equipment (112) in coating room (110)
Thus, the coating liquid (T) consisting of the solvent and the synthetic resin or the ceramics is applied to the running belt-shaped substrate (102) with a uniform thickness.

Therefore, the undried coating film (M) containing the solvent is carried by the conveyor (104) to the inside of the apparatus main body (101) while being placed on the strip-shaped substrate (102).

An air supply nozzle (115) inside the apparatus body (101) is provided with an air supply fan (P1), a heating means (N) and a filter (F). Device body (101)
The solvent in the undried coating film (M) carried inside the
It is heated by the heating means (N) and is separated from the coating film (M) as steam by the hot air supplied from the air supply nozzle (115). As a result, the undried coating film (M)
Is gradually dried (formed into a film) to become a ceramic sheet or a synthetic resin film, and is carried out from the apparatus main body (101).

In order to discharge the solvent vapor emitted from the undried coating film (M) to the outside of the apparatus body (101), as shown in the figure, it is exhausted to the ceiling portion (101a) of the apparatus body (101). A nozzle (116) is provided. That is, the exhaust nozzle (116)
By installing an intake fan (P2) on the
The air in the (101) is sucked and discharged to the outside, and at the same time, the solvent vapor discharged from the coating film (M) is about to be discharged to the outside.

[0007]

[Problems to be Solved by the Invention] A film forming apparatus (1
00) had the following problems. In the film forming apparatus (100), an amount of heated air commensurate with the amount sucked from the exhaust nozzle (116) must be supplied to the inside of the apparatus main body from the air supply nozzle (115). If the balance between supply and exhaust is not appropriate, the device body where the strip-shaped substrate (102) goes in and out
Air flows in and is replenished or flows out through a small gap in the inlet (106) of the (101), the outlet (108) and the opening / closing door (not shown). That is, with the operation of the device,
Air flows in and out from the coating chamber (110) and the rear drying chamber (118) that is continuous to the rear of the apparatus body (101).

It is well known that when the undried coating film (M) is directly hit with air, wrinkles and cracks are likely to occur on the surface of the hit portion. As described above, the air flowing in through the inlet (106) comes into direct contact with the coating film (M), which causes deterioration of the quality of the product (ceramic sheet).

Further, since there are few controllable parts of the air, it is difficult to control the state of the air (temperature, humidity, flow direction, etc.) inside the apparatus main body (101), and it is not possible to prevent pollution. The product quality was not stable.

[0010]

[Means for Solving the Problems] Therefore, the following means were taken in order to solve the above problems. The film forming apparatus of the present invention is an apparatus for molding a synthetic resin film or a ceramic sheet on a belt-shaped base material running from the front part to the rear part of the apparatus main body, above the traveling path of the belt-shaped base material, A plurality of nozzle assemblies are arranged in a row in the longitudinal direction of the strip-shaped substrate, the nozzle assembly includes an air supply nozzle and an exhaust nozzle provided in parallel with the air supply nozzle, and the air supply nozzle is provided at a lower portion. The blowout perforated plate is provided as an air outlet, the exhaust nozzle is provided with an intake perforated plate as an air intake port at a lower portion, and both the perforated plates have an air flow space between the two perforated plates. They are arranged in a V shape.

According to a second aspect of the present invention, it is preferable that the nozzle assembly is installed so that the exhaust nozzle of the nozzle assembly is disposed in front of the air supply nozzle in the main body of the apparatus.

It is preferable that the nozzle assembly is provided so as to be able to move up and down.

[0013]

In the film forming apparatus of the present invention, a medium such as air or heated air corresponding to the amount sucked from the exhaust nozzle is supplied from the air supply nozzle to the inside of the apparatus main body through the blowout perforated plate. can do.

The solvent vapor released from the undried coating film as it is dried merges with the air supplied from the air supply nozzle and flowing through the air flow space toward the exhaust nozzle, and together with the air, the perforated porous plate is used. Is sucked from the exhaust nozzle and discharged to the outside.

As described above, by making the flow rates in both nozzles substantially the same, there is no possibility that air will flow in from the inlet, outlet, etc. of the apparatus main body through which the belt-shaped base material enters and leaves. Further, it becomes possible to set the conditions of the air to be supplied from the air supply nozzle into the main body of the apparatus, such as temperature and humidity, to an optimum state in advance and then supply the air into the main body of the apparatus. As a result, it becomes possible to control the state of the air inside the apparatus body. Furthermore, the air that has passed through the filter can be supplied, and the inside of the apparatus main body can be kept clean.

By arranging a plurality of nozzle assemblies each consisting of the exhaust nozzles and the air supply nozzles, the flow rate of air can be reduced for each nozzle assembly. Since it is better not to apply air to the undried coating film, if the air flow rate is reduced for each nozzle assembly, there is less possibility that the undried coating film will be hit with air. Leads to quality improvement.

An air inlet in the exhaust nozzle,
By forming the air outlet of the air supply nozzle with a perforated plate (blowing perforated plate, suction perforated plate) respectively, the air supply and the air exhaust by the exhaust nozzle and the air supply nozzle are in the form of strips. It becomes uniform in the width direction of the base material.

The perforated plate which can be used in the present invention is not particularly limited, and a plate having a large number of through small holes penetrating straight in the thickness direction, a plate having a large number of small penetrating holes extending while curving and branching irregularly, and the like. Can be mentioned.

By arranging the both porous plates in a V-shape when viewed from the side, the air supplied from the air supply nozzle can be sucked into the exhaust nozzle without hitting the undried coating film. As mentioned above, if air is applied to the undried coating film, wrinkles and cracks are likely to occur on the contacted surface,
By arranging both porous plates in a C shape in side view, the air supplied from the air supply nozzle flows in the air flow space between both porous plates, and there is a possibility that the undried coating film may be directly contacted with air. The number is even smaller, and there is no worry of wrinkles or cracks.

The angle (internal angle) formed by the two perforated plates is not particularly limited, but is preferably 80 to 160 degrees in that wrinkles and cracks can be remarkably prevented. More preferably, it is 100 to 140 degrees. If the angle is less than 80 degrees, the solvent vapor uptake efficiency decreases, and if it exceeds 160 degrees, the air supplied from the air supply nozzle has a high possibility of hitting the undried coating film.

According to a second aspect of the present invention, the nozzle assembly is arranged such that the exhaust nozzle is located in front of the air supply nozzle, so that air in a direction opposite to the running direction of the strip-shaped substrate is provided. A flow (counterflow) is generated between the nozzle assembly and the strip-shaped substrate. As a result, the released solvent vapor can be efficiently taken into the exhaust nozzle and discharged to the outside.

If the nozzle assembly is provided so as to be able to move up and down, it is possible to independently adjust the air flow according to the amount of the solvent, in other words, according to the degree of drying. For example, if the amount of solvent is large, it is possible to raise the nozzle assembly and release it from the undried coating film, and if the amount of solvent is small, it is possible to lower the nozzle assembly to bring it closer to the coating film.

There is no particular limitation on the method of raising and lowering the nozzle assembly, and a method of using a rack and a pinion, a method of using a string or a metal wire and a pulley, and an expanding / contracting means such as a hydraulic cylinder or an air cylinder. A known method such as a method of using may be used.

[0024]

EXAMPLES An example of the film forming apparatus (10) of the present invention will be described below with reference to FIGS. In the figure, the code (1
2) is the device body. An inlet (16) and an outlet (18) through which a belt-shaped base material described later comes in and out are provided at the front and rear of the device body (12).

Reference numeral (20) is a coating room arranged in front of the apparatus main body (12). A coating device (20a) is arranged inside the coating chamber (20). By the coating device (20a), the coating liquid (T) composed of the solvent and the ceramics is applied to the upper surface of the strip-shaped substrate with a uniform thickness.

The belt-shaped base material (22) is run by an endless belt (24) which runs in parallel with the belt-shaped base material (22), and a undried coating film (M) of the coating liquid (T) is placed on the upper surface thereof. Head to the entrance (16) of the device body (12).

As the strip-shaped substrate (22) further travels, the coating film (M) on the strip-shaped substrate (22) enters the inside of the device body (12) through the inlet (16) of the device body (12), After exit (1
Go out from 8).

Heated air (which is not always heated and may be normal air) is fed from the air supply nozzle (48) and the coating film (M) is dried with hot air.
As a result, the solvent in the coating film (M) is evaporated and released as a solvent vapor. As the solvent evaporates, the coating film (M) gradually dries and becomes the target ceramic sheet.

The solvent vapor released from the undried coating film (M) is the nozzle assembly (2) disposed above the strip-shaped substrate (22).
After being sucked by 6), it is discharged to the outside of the device body (12).

As shown in FIG. 1, a plurality of nozzle assemblies (26) are arranged in the longitudinal direction of the strip-shaped base material (22) above the running path of the strip-shaped base material (22). It is set up. In the nozzle assembly (26), reference numeral (28) is a hollow rectangular parallelepiped bottomless box. Inside the box (28), as clearly shown in FIGS. 2 and 4, a partition wall (30) extends downward from the central portion in the front-rear direction. With this partition (30) as a boundary, the rear side is an air supply nozzle (K).
And the front side becomes the exhaust nozzle (H).

A blow-out perforated plate (32) forming an air outlet in the air supply nozzle (K) extends rearward and obliquely below the lower end of the partition wall (30), and the lower end portion of the partition wall (30). A suction porous plate (34) forming an air suction port in the exhaust nozzle (H) extends further forward and obliquely downward. In the case of this embodiment, the angle (internal angle) formed by both porous plates (32) and (34) is 120 degrees.

Punching plates (36) (38) each having a large number of through holes extend from the vertical center of the partition wall (30) in the front-rear direction.

The top plate (40) of the box (28) is provided with an air supply port (42) at the rear part and an exhaust port (44) at the front part. An air supply pipe (48) is connected to the air supply port (42) through a bellows type expandable joint (46). On the other hand, the exhaust pipe (50) is also connected to the exhaust port (44) through a bellows type expandable joint (47). Both the air supply pipe (48) and the exhaust pipe (50) penetrate the ceiling plate (12a) of the apparatus body (12) in the thickness direction.

An air supply pipe (4) extending from each nozzle assembly (26)
8) is a first main pipe (52) having a filter (F), a heating device (N), and an intake fan (P1) at the end on the air intake side.
It communicates with. That is, the suction fan (P1)
The outside air is taken into the first main pipe (52) through the filter (F) and heated by the heating means (N) (temperature about 50 ° C., dew point temperature 0 to −10 ° C.). It flows into the air supply pipe (48). Then, the gas is supplied into the air supply nozzle (K) through the air supply port (42).

The exhaust pipe (50) extending from each nozzle assembly (26) has an exhaust fan (P2) at the end on the air blowing side.
It communicates with the second main pipe (54) provided with. That is, the operation of the discharge fan (P2) causes the nozzle assembly (2
The air inside the exhaust nozzle (H) in 6) is sucked, flows inside the exhaust pipe (50), is taken into the second main pipe (54), and is then discharged.

The air flowing through the air supply pipe (48) and flowing into the air supply nozzle (K) in the nozzle assembly (26) passes through the punching plate (36) and the blowout perforated plate (32) as indicated by the arrow. Pass one by one. The air that has passed through the blow-out perforated plate (32) receives suction from the exhaust nozzle (H), so that the air flows through the air flow space (33) between the blow-out perforated plate (32) and the suction perforated plate (34). The strip-shaped substrate (22) flows in a direction opposite to the running direction (at this time, the velocity of the air flow is 1 m / sec or less), and then the suction porous plate (34) and the punching plate (3
8) is sequentially passed and taken into the exhaust nozzle (H). The air taken into the exhaust nozzle (H) flows inside the exhaust pipe (50) as described above, and then flows into the second main pipe (5).
4) It is taken in and then discharged.

The solvent vapor released from the undried coating film (M) merges with the air flowing in the air flow space (33) and together from the suction porous plate (34) in the exhaust nozzle (H), and It is discharged to the outside of the device body (12).

The nozzle assembly (26) in this embodiment
Are mounted so that they can be raised and lowered. That is, the distance between the strip-shaped base material (22) and the blowout porous plate (32) or the suction porous plate (34) can be adjusted. Hereinafter, that point will be described.

As clearly shown in FIG. 3, the lifting rods (56) and (56) extend upward from the left and right sides of the box body (28) of the nozzle assembly (26), respectively, and the apparatus main body ( It penetrates the ceiling plate (12a) in 12). The upper half of each of the elevating rods (56) is a rack (58) that meshes with a pinion described later (see FIG. 5).

Reference numeral (60) is a rotary shaft extending in the width direction of the strip-shaped substrate (22), and is used for the rack (5) of the lifting rod (56).
The pinion (62) that meshes with 8) is mounted on the shaft. Further, a handle (64) for facilitating rotation of the rotating shaft (60) is attached.

When the handle (64) is turned, the rotary shaft (60) is rotated, and the pinion (62) axially attached to the rotary shaft (60) is simultaneously rotated.
With the rotation of the pinion (62), the pinion (62)
A pair of left and right lifting rods (56, 56) meshing with the upper and lower members move up and down, and the nozzle assembly (26) moves up and down.

It is not always necessary to provide the nozzle assembly (26) so that it can be moved up and down, but by doing so, the air flow can be adjusted according to the amount of solvent contained, in other words, the degree of drying. Is possible because it can be independently performed. For example, if the amount of solvent is large, the nozzle assembly (26)
Is raised and released from the undried coating film (M), and if the amount of the solvent is small, the nozzle assembly (26) is lowered to bring it closer to the coating film (M). Also, as the solvent approaches the outlet (18) of the device body (12), the amount of solvent contained therein is already released and decreases,
Correspondingly, the nozzle assembly (26) can be adjusted so that the nozzle assembly (26) becomes lower as it gets closer to the outlet (18).

Further, in the present embodiment, the air supplied to the inside of the apparatus main body (12) is preheated, but the present invention is not limited to this, and the unheated air may be supplied. Further, heating means may be provided below the strip-shaped base material (22).

[0044]

According to the film forming apparatus of the present invention, by making the flow rates of the exhaust nozzle and the air supply nozzle substantially the same, an amount of air corresponding to the amount sucked from the exhaust nozzle is supplied. Since it is supplied from the nozzle for use, there is no possibility of inflow and outflow of air from the inlet, outlet, etc. of the apparatus main body through which the strip-shaped base material enters and leaves. As a result, there is no fear that the undried coating film is adversely affected. In addition, it becomes possible to control the air condition inside the main unit,
It is also possible to prevent internal contamination.

By arranging a plurality of nozzle assemblies each consisting of the exhaust nozzles and the air supply nozzles, the flow rate of air can be reduced for each nozzle assembly, and the air inside the apparatus main body can be reduced. The state of can be finely adjusted,
It leads to improvement of product quality. By configuring the air intake port of the exhaust nozzle and the air outlet port of the air supply nozzle by a perforated plate, air supply and exhaust by the exhaust nozzle and the air supply nozzle,
It becomes uniform in the width direction of the strip-shaped substrate. Also, by arranging both perforated plates in a C shape in side view,
Air can be supplied from the air supply nozzle without being applied to the undried coating film and can be sucked into the exhaust nozzle.

In the film forming apparatus of the second aspect, since the air flow (counter flow) in the direction opposite to the traveling direction of the strip-shaped substrate is generated between the nozzle assembly and the strip-shaped substrate,
The discharged solvent vapor can be efficiently taken into the exhaust nozzle.

In the film forming apparatus of claim 3, since the height of the nozzle assembly can be adjusted, the air flow can be adjusted according to the amount of the solvent contained, in other words, the degree of drying. It will be possible.

[Brief description of drawings]

FIG. 1 is a vertical cross-sectional view of a film forming apparatus according to an embodiment of the present invention seen from a side surface.

FIG. 2 is an enlarged view of a part of the previous figure.

3 is a front vertical cross-sectional view of the film forming apparatus of FIG.

FIG. 4 is an enlarged perspective view of a nozzle assembly.

FIG. 5 is a partially enlarged view showing an example of a lifting mechanism for a nozzle assembly.

FIG. 6 is a vertical cross-sectional view of a conventional film forming apparatus viewed from a side surface.

[Explanation of symbols]

 10 ... Film forming device 12 ... Device main body 22 ... Strip base material 26 ... Nozzle assembly 32 ... Blow-off perforated plate 34 ... Suction perforated plate H ... Exhaust nozzle K ... Air supply nozzle

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Daisuke Horii, 101, Kawai-machi, Kawai-machi, Kita-Katsuragi-gun, Nara 1 Hirano Techseed Co., Ltd. (72) Hiroshi Shimada, 1 Kawai-cho, 101, Kawai-cho, Nara, Japan 1 Share (72) Inventor, Fumikazu Tagami, 1 Horiyamashita, Hinoyamashita, Hadano-city, Kanagawa Prefecture, General Computer Division, Hitate Manufacturing Co., Ltd. (72) Takumi Yasunaga, 1 Horiyamashita, Hadano, Kanagawa Computer Division (72) Inventor Masaaki Sato, 292 Yoshida-cho, Totsuka-ku, Yokohama, Kanagawa Pref., Hitachi, Ltd.

Claims (3)

[Claims] 1. An apparatus for molding a synthetic resin film or a ceramic sheet on a belt-shaped base material that runs from a front part to a rear part of an apparatus main body, wherein a plurality of nozzles are provided above a traveling path of the belt-shaped base material. An assembly is arranged in a row in the longitudinal direction of the strip-shaped substrate, the nozzle assembly is composed of an air supply nozzle and an exhaust nozzle arranged in parallel with the air supply nozzle, and the air supply nozzle is a blown perforated plate at a lower portion. Is provided as an air outlet, the exhaust nozzle is provided with a suction perforated plate at the lower portion as an air intake, and both the perforated plates have an airflow space between the both perforated plates, and are A film forming apparatus, which is arranged in a letter shape. 2. The nozzle assembly is installed so that an exhaust nozzle in the nozzle assembly is arranged in front of an air supply nozzle in an apparatus main body. The film forming apparatus described. 3. The film forming apparatus according to claim 1, wherein the nozzle assembly is provided so as to be movable up and down.