JPH0739930B2 - Rotor position detector - Google Patents

Rotor position detector

Info

Publication number
JPH0739930B2
JPH0739930B2 JP62113343A JP11334387A JPH0739930B2 JP H0739930 B2 JPH0739930 B2 JP H0739930B2 JP 62113343 A JP62113343 A JP 62113343A JP 11334387 A JP11334387 A JP 11334387A JP H0739930 B2 JPH0739930 B2 JP H0739930B2
Authority
JP
Japan
Prior art keywords
pole
rotating body
main pole
position detector
coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62113343A
Other languages
Japanese (ja)
Other versions
JPS63277902A (en
Inventor
俊介 中浦
学 谷口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koyo Seiko Co Ltd
Original Assignee
Koyo Seiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koyo Seiko Co Ltd filed Critical Koyo Seiko Co Ltd
Priority to JP62113343A priority Critical patent/JPH0739930B2/en
Publication of JPS63277902A publication Critical patent/JPS63277902A/en
Publication of JPH0739930B2 publication Critical patent/JPH0739930B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Description

【発明の詳細な説明】 産業上の利用分野 この発明は、回転体の位置検出器、さらに詳しくは、た
とえば磁気軸受装置のロータなどの半径方向の変位を検
出するインダクタンス検知式非接触位置検出器に関す
る。
Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a position detector for a rotating body, and more particularly, an inductance detection type non-contact position detector for detecting radial displacement of, for example, a rotor of a magnetic bearing device. Regarding

従来の技術とその問題点 この種の位置検出器として、第2図に示すようなものが
知られている。
2. Related Art and Its Problems As a position detector of this kind, one shown in FIG. 2 is known.

第2図は、回転体(10)と、その周囲に等間隔をおいて
配置された4個の位置検出器(11)とを示し、各位置検
出器(11)は次のように構成されている。すなわち、回
転体(10)の周囲の円環状のポール連結部材(12)が同
心状に配置されており、ポール連結部材(12)の内面を
円周方向に4等分する位置に回転体(10)側に突出した
メインポール(13)が一体に形成されるとともに、各メ
インポール(13)の両側のポール連結部材(12)の内面
に回転体(10)側に突出したサブポール(14)が一体に
形成されている。メインポール(13)にはコイル(15)
が巻かれており、同図に破線で示すように、メインポー
ル(13)から回転体(10)、両側のサブポール(14)お
よびポール連結部材(12)を通ってメインポール(13)
に戻る環状磁路(A)が形成される。これにより1個の
位置検出器(11)が構成され、各検出器(11)におい
て、メインポール(13)と回転体(10)の距離が変化し
たときのインダクタンスの変化を電気量として取出し、
これによりメインポール(13)に対する回転体(10)の
半径方向の変位を検出する。そして、4個の検出器(1
1)の出力信号を公知の適宜な方法で処理することによ
り、回転体(10)の互いに直交する2つの半径方向の位
置が検出される。
FIG. 2 shows a rotating body (10) and four position detectors (11) arranged at equal intervals around the rotating body, and each position detector (11) is configured as follows. ing. That is, the circular pole connecting member (12) around the rotating body (10) is concentrically arranged, and the rotating body (at the position where the inner surface of the pole connecting member (12) is divided into four equal parts in the circumferential direction. The main pole (13) protruding toward the 10) side is integrally formed, and the sub pole (14) protruding toward the rotating body (10) is formed on the inner surface of the pole connecting member (12) on both sides of each main pole (13). Are integrally formed. Coil (15) on the main pole (13)
As shown by the broken line in the figure, the main pole (13) passes from the main pole (13) through the rotating body (10), the sub-poles (14) on both sides, and the pole connecting member (12).
To form an annular magnetic path (A). With this, one position detector (11) is configured, and in each detector (11), the change in the inductance when the distance between the main pole (13) and the rotating body (10) changes is extracted as an electric quantity,
This detects the radial displacement of the rotating body (10) with respect to the main pole (13). And four detectors (1
By processing the output signal of 1) by a known appropriate method, two radial positions of the rotating body (10) orthogonal to each other are detected.

ところで、上記のような従来の位置検出器(11)では、
メインポール(13)はポール連結部材(12)の内面から
直角に突出し、かつその幅は各部分において一定であ
る。また、コイル(15)はメインポール(13)に一様に
巻かれており、その幅も各部分において一定である。さ
らに、サブポール(14)もポール連結部材(12)の内面
から直角に突出し、その幅は各部分において一定であ
る。ところが、コイル(15)の幅およびサブポール(1
4)の幅がそれぞれ一定であるから、サブポール(14)
は回転体(10)側ではコイル(15)に接近しているが、
ポール連結部材(12)側ではコイル(15)から離れてい
る。このため、磁路(A)が遠回りして長くなり、磁気
抵抗が大きくなる。そして、磁気抵抗が大きいため、検
出器自体の検出出力が小さく、とくに磁気軸受装置に用
いたときに、S/N比および温度特性が悪く、検出精度が
悪くなるという問題がある。すなわち、磁気軸受を構成
する電磁石や高周波モータの発生する磁界の影響を受け
て、検出器の出力中のノイズ成分が大きくなり、また、
高周波モータなどの発生する熱の影響を受けて、検出器
の出力中の温度変化による変動成分が大きくなる。そし
て、検出器の出力を増幅することにより、上記のノイズ
成分や温度変化による変動成分も増幅され、検出精度が
悪くなる。
By the way, in the conventional position detector (11) as described above,
The main pole (13) projects at a right angle from the inner surface of the pole connecting member (12), and its width is constant in each part. The coil (15) is evenly wound around the main pole (13) and its width is constant in each portion. Further, the sub pole (14) also projects at a right angle from the inner surface of the pole connecting member (12), and its width is constant in each part. However, the width of the coil (15) and the sub pole (1
Since the widths of 4) are constant, the sub pole (14)
Is close to the coil (15) on the rotating body (10) side,
It is separated from the coil (15) on the side of the pole connecting member (12). For this reason, the magnetic path (A) is detoured and lengthened, and the magnetic resistance increases. Further, since the magnetic resistance is large, the detection output of the detector itself is small, and particularly when used in a magnetic bearing device, the S / N ratio and temperature characteristics are poor, and the detection accuracy is poor. That is, the noise component in the output of the detector becomes large under the influence of the magnetic field generated by the electromagnet that constitutes the magnetic bearing and the high-frequency motor, and
Due to the influence of heat generated by the high frequency motor and the like, the fluctuation component due to the temperature change during the output of the detector becomes large. Then, by amplifying the output of the detector, the noise component and the fluctuation component due to temperature change are also amplified, and the detection accuracy deteriorates.

この発明の目的は、上記の問題を解決し、磁気抵抗をで
きるだけ小さくでき、よってS/N比および温度特性を向
上させることができる回転体の位置検出器を提供するこ
とにある。
An object of the present invention is to solve the above problems and to provide a position detector for a rotating body, which can reduce the magnetic resistance as much as possible, thereby improving the S / N ratio and the temperature characteristic.

問題点を解決するための手段 この発明による回転体の位置検出器は、 回転体の周囲に配置されたポール連結部材に回転体側に
突出したメインポールとメインポールの両側から回転体
側に突出したサブポールが設けられ、メインポールにコ
イルが巻かれて、メインポールから回転体、サブポール
およびポール連結部材を通ってメインポールに戻る磁路
が形成されるようになされた回転体の位置検出器におい
て、 サブポールのメインポール側の面が、対向するメインポ
ールの面に平行にコイルに接近して形成され、磁路が短
くなっていることを特徴とするものである。
Means for Solving the Problems A position detector for a rotating body according to the present invention comprises a main pole protruding toward the rotating body and a sub pole protruding from both sides of the main pole toward a rotating body on a pole connecting member arranged around the rotating body. Is provided, a coil is wound around the main pole, and a magnetic path returning from the main pole to the main pole through the rotary body, the subpole, and the pole connecting member is formed. The main pole side surface of the is formed in parallel with the surface of the opposing main pole and close to the coil, and the magnetic path is short.

作用 サブポールのメインポール側の面が、対向するメインポ
ールの面に平行にコイルに接近して形成され、磁路が短
くなっているので、磁気抵抗が小さくなり、検出器自体
の検出出力が大きくなる。このため、磁気軸受装置など
に用いても、S/N比および温度特性が良く、出力を大き
く増幅する必要がないので、ノイズ成分や温度変化によ
る変動成分の増幅度も小さくなり、検出精度が向上す
る。
Action The main pole side surface of the sub-pole is formed close to the coil parallel to the surface of the main pole facing it, and the magnetic path is short, so the magnetic resistance is small and the detection output of the detector itself is large. Become. Therefore, even when used in magnetic bearing devices, etc., the S / N ratio and temperature characteristics are good, and there is no need to greatly amplify the output, so the amplification of noise components and fluctuation components due to temperature changes is also small, and detection accuracy is high. improves.

実施例 第1図はこの発明の実施例を示し、従来例と同じ部分に
は同一の符号を付している。
Embodiment FIG. 1 shows an embodiment of the present invention, in which the same parts as those in the conventional example are designated by the same reference numerals.

サブポール(14)の対向するメインポール(13)の外面
およびコイル(15)の外面と平行になり、かつコイル
(15)に接近するように、サブポール(14)の幅はポー
ル連結部材(12)側にいくにつれて徐々に大きくなって
いる。他は従来例の場合と同様である。
The width of the sub-pole (14) is parallel to the outer surface of the main pole (13) and the outer surface of the coil (15) facing the sub-pole (14), and the width of the sub-pole (14) is close to the coil (15). It is getting bigger as it goes to the side. Others are the same as in the conventional example.

この実施例の位置検出器(11)では、磁路(A)はサブ
ポール(14)のコイル(15)側の面(14a)に近い部分
を通って形成される。そして、この面(14a)がコイル
(15)と平行でかつコイル(15)に接近しているので、
従来のものに比べて磁路(A)が短くなり、その分だけ
磁気抵抗が小さくなる。このため、位置検出器(11)自
体の検出出力が大きくなり、磁気軸受装置などに用いて
も、S/N比および温度特性が良く、出力を大きく増幅す
る必要がないので、ノイズ成分や温度変化による変動成
分の増幅度も小さくなり、検出精度が向上する。
In the position detector (11) of this embodiment, the magnetic path (A) is formed through a portion of the subpole (14) near the coil (15) side surface (14a). Since this surface (14a) is parallel to the coil (15) and is close to the coil (15),
The magnetic path (A) is shorter than that of the conventional one, and the magnetic resistance is correspondingly reduced. For this reason, the detection output of the position detector (11) itself becomes large, and even if it is used in a magnetic bearing device, the S / N ratio and temperature characteristics are good, and it is not necessary to greatly amplify the output, so noise components and temperature The amplification degree of the fluctuation component due to the change is also reduced, and the detection accuracy is improved.

上記実施例では、4個の位置検出器(11)のポール連結
部材(12)が一体円環状をなしているが、ポール連結部
材(12)は位置検出器(11)ごとに分割されていてもよ
い。
In the above-mentioned embodiment, the pole connecting members (12) of the four position detectors (11) are formed into an integral annular shape, but the pole connecting members (12) are divided for each position detector (11). Good.

発明の効果 この発明の回転体の位置検出器によれば、サブポールの
メインポール側の面が、対向するメインポールの面に平
行にコイルに接近して形成され、磁路が短くなっている
ので、磁気抵抗が小さくなり、これにより、検出器自体
の検出出力が大きくなり、磁気軸受装置などに用いた場
合でも、S/N比および温度特性が良く、検出精度が向上
する。
EFFECTS OF THE INVENTION According to the position detector for a rotating body of the present invention, the surface of the sub pole on the main pole side is formed close to the coil parallel to the surface of the opposing main pole, and the magnetic path is shortened. As a result, the magnetic resistance becomes small, and the detection output of the detector itself becomes large, and the S / N ratio and temperature characteristics are good even when used in a magnetic bearing device, etc., and the detection accuracy is improved.

【図面の簡単な説明】[Brief description of drawings]

第1図はこの発明の実施例を示す回転体とその位置検出
器の横断面図、第2図は従来例を示す第1図相当の図面
である。 (10)……回転体、(11)……位置検出器、(12)……
ポール連結部材、(13)……メインポール、(14)……
サブポール、(14a)……面、(15)……コイル、
(A)……磁路。
FIG. 1 is a cross-sectional view of a rotating body and its position detector showing an embodiment of the present invention, and FIG. 2 is a drawing corresponding to FIG. 1 showing a conventional example. (10) …… Rotating body, (11) …… Position detector, (12) ……
Pole connecting member, (13) …… Main pole, (14) ……
Sub-pole, (14a) ... surface, (15) ... coil,
(A) ... Magnetic path.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】回転体の周囲に配置されたポール連結部材
に回転体側に突出したメインポールとメインポールの両
側から回転体側に突出したサブポールが設けられ、メイ
ンポールにコイルが巻かれて、メインポールから回転
体、サブポールおよびポール連結部材を通ってメインポ
ールに戻る磁路が形成されるようになされた回転体の位
置検出器において、 サブポールのメインポール側の面が、対向するメインポ
ールの面に平行にコイルに接近して形成され、磁路が短
くなっていることを特徴とする回転体の位置検出器。
1. A pole connecting member arranged around a rotating body is provided with a main pole projecting toward the rotating body and a sub pole projecting toward the rotating body from both sides of the main pole. In a position detector of a rotating body in which a magnetic path returning from the pole to the main pole through the rotating body, the subpole, and the pole connecting member is formed, the main pole side surface of the subpole is the surface of the opposing main pole. A position detector for a rotating body, characterized in that the magnetic path is formed in parallel with and close to the coil, and the magnetic path is shortened.
JP62113343A 1987-05-08 1987-05-08 Rotor position detector Expired - Fee Related JPH0739930B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62113343A JPH0739930B2 (en) 1987-05-08 1987-05-08 Rotor position detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62113343A JPH0739930B2 (en) 1987-05-08 1987-05-08 Rotor position detector

Publications (2)

Publication Number Publication Date
JPS63277902A JPS63277902A (en) 1988-11-15
JPH0739930B2 true JPH0739930B2 (en) 1995-05-01

Family

ID=14609840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62113343A Expired - Fee Related JPH0739930B2 (en) 1987-05-08 1987-05-08 Rotor position detector

Country Status (1)

Country Link
JP (1) JPH0739930B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0435232B1 (en) * 1989-12-29 1995-05-17 Ebara Corporation Inductance-type displacement sensor having resistance to external magnetic fields
JP2006177834A (en) * 2004-12-24 2006-07-06 Jtekt Corp Rolling bearing unit having sensor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5967404A (en) * 1982-09-24 1984-04-17 Seiko Instr & Electronics Ltd Detector of radial displacement of rotary body

Also Published As

Publication number Publication date
JPS63277902A (en) 1988-11-15

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