JPH073483B2 - Silver mirror - Google Patents
Silver mirrorInfo
- Publication number
- JPH073483B2 JPH073483B2 JP60125210A JP12521085A JPH073483B2 JP H073483 B2 JPH073483 B2 JP H073483B2 JP 60125210 A JP60125210 A JP 60125210A JP 12521085 A JP12521085 A JP 12521085A JP H073483 B2 JPH073483 B2 JP H073483B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- silver
- mirror
- alloy
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
- C03C17/3663—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties specially adapted for use as mirrors
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/78—Coatings specially designed to be durable, e.g. scratch-resistant
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明は、耐久性の向上された銀鏡、特に銀の裏面鏡に
関するものである。TECHNICAL FIELD The present invention relates to a silver mirror having improved durability, and more particularly to a silver back mirror.
［従来の技術］ 反射率の高い金属を、真空プロセスによってガラス、プ
ラスチック等の基体上に形成させ、鏡とすることは、よ
く知られている。特に、反射率の高い鏡が必要な場合に
は銀又はアルミニウムが用いられるが、なかでも、銀の
反射率が可視から赤外の波長域において最も高く、反射
率の点からは最も好ましい。しかし、銀膜には、 （１）膜が軟く傷がつきやすい。[Prior Art] It is well known that a metal having high reflectance is formed on a substrate such as glass or plastic by a vacuum process to form a mirror. In particular, silver or aluminum is used when a mirror having high reflectance is required. Among them, silver has the highest reflectance in the visible to infrared wavelength range, and is most preferable in terms of reflectance. However, (1) the silver film is soft and easily scratched.
（２）温度、湿度の変化に弱く、劣化しやすい。(2) Sensitive to changes in temperature and humidity and easy to deteriorate.
（３）基体との付着力が弱く、はがれやすい。(3) Adhesion to the substrate is weak and it is easy to peel off.
等の欠点がある。このため、適当な保護層を銀膜の上に
形成して、（１）、（２）の欠点を緩和してやることが
望ましい。また、（３）の欠点をなくすために、基体に
適当な下地処理をしてやることが望ましい。There are drawbacks such as. Therefore, it is desirable to form an appropriate protective layer on the silver film to alleviate the defects (1) and (2). Further, in order to eliminate the drawback of (3), it is desirable to subject the substrate to an appropriate surface treatment.
［発明が解決しようとする問題点］ 本発明はかかる点に着目したものであり、前述したよう
な欠点を解消し、耐久性の優れた銀鏡、特に銀の裏面鏡
を提供することを目的とするものである。[Problems to be Solved by the Invention] The present invention focuses on such points, and an object thereof is to solve the above-mentioned drawbacks and to provide a silver mirror having excellent durability, particularly a silver back mirror. To do.
［問題点を解決するための手段］ 本発明は前述の目的を達成すべくなされたものであり、
基体面と反射膜である800〜2000Åの銀膜との間にNi−C
r合金膜又はZrO2膜又はIn2O3膜を10〜100Åの膜厚で接
着層として介在させ、更に上記銀膜上に順次100〜5000
ÅのNi−Cr合金膜と1000〜10000ÅのSiO2膜とが保護層
として設けられてなる、付着力、耐久性に優れた銀鏡、
特に銀の裏面鏡を提供するものである。[Means for Solving Problems] The present invention has been made to achieve the above-mentioned object,
Ni-C between the substrate surface and the reflective film 800-2000Å silver film
An r alloy film, a ZrO 2 film, or an In 2 O 3 film is interposed as an adhesive layer with a film thickness of 10 to 100Å, and further 100 to 5000 on the silver film in sequence.
Å Ni-Cr alloy film and 1000 to 10000Å SiO 2 film provided as a protective layer, a silver mirror with excellent adhesion and durability,
In particular, it provides a silver back mirror.
以下、本発明を更に詳細に説明する。Hereinafter, the present invention will be described in more detail.
第１図は、本発明の実施例に係る銀鏡の断面図を示した
ものであり、図において、１は基体、２は銀膜、３はNi
−Cr合金膜、４はSiO2膜、５は接着層を示す。第１図
は、ガラス、プラスチック、セラミック等の透明性の高
い材料からなる板状の基体１面上に反射膜としての膜厚
800Å〜2000Åの真空蒸着法、スパッタリング法等の真
空プロセスにより形成された銀膜２と、その上に保護層
としてNi−Cr合金膜及びSiO2膜とを順次形成してなる表
面の耐久性の向上された銀鏡を示したものであり、基体
１面上に基体面の銀膜との付着力を高めるためにNi−Cr
合金膜、又はZrO2膜、又はIn2O3膜を接着層５として形
成してなる表面の耐久性及び銀膜の付着性の改善された
銀鏡を示したものである。FIG. 1 is a sectional view of a silver mirror according to an embodiment of the present invention, in which 1 is a substrate, 2 is a silver film, and 3 is Ni.
-Cr alloy film, 4 is a SiO 2 film, and 5 is an adhesive layer. FIG. 1 shows a film thickness as a reflective film on the surface of a plate-shaped substrate 1 made of a highly transparent material such as glass, plastic and ceramics.
A silver film 2 formed by a vacuum process such as a vacuum deposition method of 800 Å to 2000 Å, a sputtering method, etc., and a Ni-Cr alloy film and a SiO 2 film as a protective layer formed on the silver film 2 are sequentially formed to improve durability. It shows an improved silver mirror, and Ni-Cr is used to enhance the adhesive force with the silver film on the substrate surface on the substrate 1 surface.
1 shows a silver mirror having an alloy film, a ZrO 2 film, or an In 2 O 3 film formed as an adhesive layer 5 with improved surface durability and silver film adhesion.
銀鏡の銀膜の表面の保護層に要求される第一の特性は硬
さである。銀膜の形成時の基体温度は、高反射率を得る
ために室温から通常100℃程度であることが望ましいた
め、保護層もこの程度の温度で高硬度の得られる膜材料
である必要がある。そのような膜材料として、最も広く
知られているのはSiO2である。ところが、SiO2膜は銀膜
とのなじみが悪く、膜厚を大きくしていくと、SiO2膜固
有の圧縮応力のため、銀膜との界面から剥離してしま
う。The first property required for the protective layer on the surface of the silver film of the silver mirror is hardness. The substrate temperature at the time of forming the silver film is preferably from room temperature to about 100 ° C. in order to obtain a high reflectance, so the protective layer also needs to be a film material that can obtain high hardness at this temperature. . SiO 2 is the most widely known as such a film material. However, the SiO 2 film has a poor compatibility with the silver film, and when the film thickness is increased, the SiO 2 film is separated from the interface with the silver film due to the compressive stress peculiar to the SiO 2 film.
そこで本発明においては、銀膜とSiO2膜の間にこの両者
との付着性のよいNi−Cr合金膜を介在させることによ
り、全体として耐久性の高い銀鏡、特に銀の裏面鏡を実
現したのである。Therefore, in the present invention, by interposing a good Ni-Cr alloy film of adhesion between the two during the silver film and the SiO 2 film, silver mirror durable overall, especially to achieve back-surface mirror of silver Of.
銀鏡の上のNi−Cr合金膜としては、NiとCrを主成分とし
て含む合金、特にNiを10〜90wt％、Crを10〜90wt％含む
合金、であればよく、特に、鉄を含んでもかまわない
（例えば、インコネル）。The Ni-Cr alloy film on the silver mirror may be an alloy containing Ni and Cr as main components, particularly an alloy containing 10 to 90 wt% of Ni and 10 to 90 wt% of Cr, and may particularly include iron. It doesn't matter (eg Inconel).
かかるNi−Cr合金膜は銀膜とSiO2膜の付着力の向上に効
果的であり、また、耐久性が高いので最適である。この
Ni−Cr合金膜は銀膜と同じく真空プロセスによって形成
され、その厚みとしては100Å〜5000Å、好ましくは300
Å〜2000Å、の範囲にあることが、耐久性と経済性の点
から望ましい。100Åより薄い場合には銀膜とSiO2膜の
付着力の向上に効果的でなくなり好ましくない、また、
5000Åより厚い場合にはNi−Cr合金膜自体の内部応力に
より付着力が低下することと経済性の点から好ましくな
い。Such Ni-Cr alloy film is effective in improving the adhesion of the silver film and the SiO 2 film, also, it is optimal because of its high durability. this
The Ni-Cr alloy film is formed by a vacuum process like the silver film and has a thickness of 100Å to 5000Å, preferably 300Å.
It is desirable that it is in the range of Å ~ 2000Å, from the viewpoint of durability and economy. If it is thinner than 100Å, it is not preferable because it is not effective in improving the adhesive force between the silver film and the SiO 2 film.
If the thickness is more than 5000Å, the internal stress of the Ni-Cr alloy film itself lowers the adhesive force and is not preferable from the economical point of view.
また、SiO2膜も、銀膜及びNi−Cr合金膜と同じ真空プロ
セスによって形成され、その厚みとしては1000〜10000
Å、好ましくは2000〜5000Å、の範囲にあることが、耐
久性の点から望ましい。1000Åより薄すぎると耐久性、
特に耐擦傷性が弱くなり、また、10000Åより厚すぎる
と、内部応力により、剥離が発生しやすくなる。The SiO 2 film is also formed by the same vacuum process as the silver film and the Ni-Cr alloy film, and has a thickness of 1000 to 10000.
Å, preferably 2000 to 5000Å, is desirable from the viewpoint of durability. If it is thinner than 1000Å, it will be durable.
In particular, the scratch resistance is weakened, and if the thickness is more than 10000Å, peeling easily occurs due to internal stress.
以上のように、銀膜の保護層としてNi−Cr合金膜とSiO2
膜を積層することにより、耐久性に優れた銀鏡、特に銀
の裏面鏡を得ることができる。As described above, the Ni--Cr alloy film and the SiO 2 film are used as the protective layer of the silver film.
By stacking the films, a silver mirror having excellent durability, particularly a silver back mirror can be obtained.
更に、銀膜と基体との付着力を改善する必要がある。そ
こで、本発明者らは、種々の材料をこの界面における接
着層として探索した結果、Ni−Cr合金、ZrO2、In2O3が
目的に適う材料であることを見出した。なお、接着層と
して用いられるNi−Cr合金も、前述した保護層の一部と
して用いられるNi−Cr合金と同種のものが使用される。Furthermore, it is necessary to improve the adhesion between the silver film and the substrate. Then, as a result of searching various materials as an adhesive layer at this interface, the present inventors have found that Ni—Cr alloy, ZrO 2 , and In 2 O 3 are suitable materials. The Ni-Cr alloy used as the adhesive layer is the same as the Ni-Cr alloy used as a part of the protective layer described above.
基体面と銀膜との間に付着力向上のために介在させるNi
−Cr合金膜、ZrO2膜、又はIn2O3膜からなる接着層は銀
膜及び前述の保護層と同じ真空プロセスにより形成する
ことができ、その膜厚は100Å以下、好ましくは50Å以
下で、また、10Å以上である。これ以上の膜厚とする
と、裏面鏡としての反射率が損なわれてしまい、また、
10Åより薄いと付着性向上に効果的でなくなるからであ
る。Ni to be interposed between the substrate surface and the silver film to improve the adhesion.
-The adhesive layer made of a Cr alloy film, a ZrO 2 film, or an In 2 O 3 film can be formed by the same vacuum process as the silver film and the above-mentioned protective layer, and the film thickness is 100 Å or less, preferably 50 Å or less. , Again, 10 Å or more. When the film thickness is larger than this, the reflectance as a backside mirror is impaired, and
This is because if it is thinner than 10Å, it will not be effective in improving the adhesiveness.
この接着層の存在により、銀膜の基体への付着力が良好
となり、前述の保護層と組み合わせれば、全体として、
付着力が良好で、しかも耐久性に優れる銀鏡、特に銀の
裏面鏡を実現することができる。The presence of this adhesive layer improves the adhesion of the silver film to the substrate, and when combined with the above-mentioned protective layer, the overall
It is possible to realize a silver mirror having good adhesion and excellent durability, especially a silver back mirror.
［実施例］ 実施例１ フローガラス板からなる基体（寸法50mm×60mm×2mm）
を真空槽内に設置し、２×10-5Torr以下に排気し、電子
ビーム加熱真空蒸着法によりNi−Cr合金（Ni:80wt％、C
r:20wt％）、Ag、Ni−Cr合金（Ni:80wt％、Cr:20wt
％）、SiO2をこの順に真空蒸着し、上記基体上にNi−Cr
合金膜、銀膜、Ni−Cr合金膜、SiO2膜の順に形成した。
この時、基体温度は100℃とした。基体と銀膜との間の
接着層のNi−Cr合金膜の厚みは約20Å、他の層の膜厚は
銀膜が約1500Å、Ni−Cr合金膜が約1000Å、SiO2膜が約
3000Åとなるようにした。こうして得られた第１図のよ
うな構成の銀の裏面鏡をサンプル１とした。[Example] Example 1 A substrate made of a flow glass plate (size: 50 mm x 60 mm x 2 mm)
Placed in a vacuum chamber, evacuated to 2 × 10 -5 Torr or less, and electron beam heating vacuum deposition method was used to deposit Ni-Cr alloy (Ni: 80wt%, C
r: 20wt%), Ag, Ni-Cr alloy (Ni: 80wt%, Cr: 20wt
%) And SiO 2 are vacuum-deposited in this order, and Ni-Cr is deposited on the substrate.
The alloy film, the silver film, the Ni—Cr alloy film, and the SiO 2 film were formed in this order.
At this time, the substrate temperature was 100 ° C. The thickness of the Ni-Cr alloy film of the adhesive layer between the substrate and the silver film is about 20Å, the thickness of the other layers is about 1500Å for the silver film, about 1000Å for the Ni-Cr alloy film, and about 2 for the SiO 2 film.
I set it to 3000Å. The silver rear-view mirror having the structure as shown in FIG.
実施例２ 基体と銀膜との間の接着層を約30ÅのZrO2膜とした以外
は実施例１と同様にして銀の裏面鏡を作成し、サンプル
２とした。Example 2 A silver backside mirror was prepared in the same manner as in Example 1 except that the adhesive layer between the substrate and the silver film was a ZrO 2 film having a thickness of about 30Å, and Sample 2 was prepared.
実施例３ 基体と銀膜との間の接着層を約30ÅのIn2O3膜とした以
外は実施例１と同様にして銀の裏面鏡を作成し、サンプ
ル３とした。Example 3 A silver backside mirror was prepared in the same manner as in Example 1 except that the adhesive layer between the substrate and the silver film was an In 2 O 3 film having a thickness of about 30 liters.
比較例 実施例１と同様にして、同上のフロートガラス基体上に
Agを蒸着した。得られた銀膜の膜厚は約1500Åであっ
た。これをサンプル４とした。Comparative Example The same procedure as in Example 1 was carried out on the above float glass substrate.
Ag was vapor-deposited. The thickness of the obtained silver film was about 1500Å. This was designated as Sample 4.
上記の各サンプル１〜４を次の耐久性試験に供した。Each of the above samples 1 to 4 was subjected to the following durability test.
（１）耐擦傷試験；事務用消しゴムに1kg/cm2の荷重を
かけ20往復膜面をこすった後表面を目視した。(1) Scratch resistance test: A load of 1 kg / cm 2 was applied to an office eraser, and after rubbing 20 reciprocating membrane surfaces, the surface was visually observed.
（２）耐湿試験;50℃、95％RH雰囲気中に３日間放置し
た後表面を目視した。また、550nmにおける反射率を測
定した。(2) Moisture resistance test: The surface was visually observed after standing in an atmosphere of 50 ° C. and 95% RH for 3 days. Also, the reflectance at 550 nm was measured.
（３）テープ試験；セロハンテープを膜面に強く貼り付
け、勢よくはがした時の膜の剥離を調べた。(3) Tape test: Cellophane tape was strongly adhered to the film surface, and the peeling of the film when peeled off vigorously was examined.
上記した耐久性試験を行なった結果を表１に示す。The results of the above durability test are shown in Table 1.
［発明の効果］ 以上の結果から、本発明による保護層を備えた銀鏡が耐
擦傷性及び耐湿度性において優れた性能を有することが
明らかである。また、付着力においても優れた性能を有
することが明らかである。 [Effects of the Invention] From the above results, it is clear that the silver mirror provided with the protective layer according to the present invention has excellent performance in scratch resistance and humidity resistance. It is also clear that it has excellent performance in terms of adhesion.
本発明の銀鏡の製造は、全てのプロセスを同一の真空プ
ロセス（例えば真空蒸着法、スパッタリング法等）によ
り行なうことが可能であり、製造上大変好ましい。In the production of the silver mirror of the present invention, all the processes can be performed by the same vacuum process (for example, a vacuum vapor deposition method, a sputtering method, etc.), which is very preferable in terms of production.
第１図は、本発明の銀鏡の一実施例を示す概略断面図で
ある。 図において、１は基体、２は銀膜、３はNi−Cr合金膜、
４はSiO2膜、５は接着層を示している。FIG. 1 is a schematic sectional view showing an embodiment of the silver mirror of the present invention. In the figure, 1 is a substrate, 2 is a silver film, 3 is a Ni-Cr alloy film,
4 is a SiO 2 film, and 5 is an adhesive layer.
Claims (1)
が形成されてなる銀鏡において、銀膜と基体との間にNi
−Cr合金膜、ZrO2膜、又はIn2O3膜からなる10〜100Åの
膜厚の接着層が介在され、上記銀膜上に順次、100〜500
0ÅのNi−Cr合金膜と1000〜10000ÅのSiO2膜とが保護層
として形成されてなることを特徴とする銀鏡。1. A silver mirror having a silver film having a thickness of 800 to 2000 liters formed on a substrate as a reflective film, wherein Ni is provided between the silver film and the substrate.
-An adhesive layer having a thickness of 10 to 100 Å consisting of a Cr alloy film, a ZrO 2 film, or an In 2 O 3 film is interposed, and 100 to 500 sequentially on the silver film.
A silver mirror, comprising a 0Å Ni-Cr alloy film and a 1000 to 10000Å SiO 2 film formed as protective layers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60125210A JPH073483B2 (en) | 1985-06-11 | 1985-06-11 | Silver mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60125210A JPH073483B2 (en) | 1985-06-11 | 1985-06-11 | Silver mirror |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61284703A JPS61284703A (en) | 1986-12-15 |
| JPH073483B2 true JPH073483B2 (en) | 1995-01-18 |
Family
ID=14904604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60125210A Expired - Fee Related JPH073483B2 (en) | 1985-06-11 | 1985-06-11 | Silver mirror |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH073483B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011145438A1 (en) | 2010-05-19 | 2011-11-24 | 日本電気硝子株式会社 | Reflection member |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5201926A (en) * | 1987-08-08 | 1993-04-13 | Leybold Aktiengesellschaft | Method for the production of coated glass with a high transmissivity in the visible spectral range and with a high reflectivity for thermal radiation |
| DE3869270D1 (en) * | 1987-08-08 | 1992-04-23 | Leybold Ag | METHOD FOR PRODUCING WINDOWS WITH HIGH TRANSMISSION BEHAVIOR IN THE VISIBLE SPECTRAL AREA AND WITH HIGH REFLECTION BEHAVIOR FOR HEAT RADIATION, AND WINDOWS PRODUCED BY THE PROCESS. |
| JPH01279201A (en) * | 1988-05-02 | 1989-11-09 | Mitsui Toatsu Chem Inc | Reflecting body |
| DE4301463A1 (en) * | 1993-01-20 | 1994-07-21 | Wissenschaftlich Tech Optikzen | Process for coating mirrors with high reflectivity and mirrors with a coating |
| CA2120877A1 (en) * | 1993-04-28 | 1994-10-29 | Jesse D. Wolfe | Durable first and second surface mirrors |
| US6416194B1 (en) * | 1999-02-11 | 2002-07-09 | Turkiye Sise Ve Cam Fabrikalari A.S. | Thermostable back-surface mirrors |
| JP2007147667A (en) * | 2005-11-24 | 2007-06-14 | Optorun Co Ltd | Silver mirror |
| JP6302688B2 (en) * | 2014-02-03 | 2018-03-28 | ジオマテック株式会社 | High reflection film, substrate with high reflection film, and method of manufacturing high reflection film |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5689702A (en) * | 1979-12-21 | 1981-07-21 | Sumitomo Electric Ind Ltd | Laser beam reflecting mirror |
| JPS5942284A (en) * | 1982-09-03 | 1984-03-08 | 株式会社日立製作所 | Master slave type servo manipulator |
-
1985
- 1985-06-11 JP JP60125210A patent/JPH073483B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011145438A1 (en) | 2010-05-19 | 2011-11-24 | 日本電気硝子株式会社 | Reflection member |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61284703A (en) | 1986-12-15 |
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Legal Events
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| LAPS | Cancellation because of no payment of annual fees |