JPH07326649A - Remote control system of semiconductor manufacturing equipment - Google Patents

Abstract

PURPOSE:To constitute a system at a low cost without installing special software in accordance with each ion implanter, in a remote controller, by operating an implanter main body with coordinate data. CONSTITUTION:When an ion implanter I1 is operated from a remote controller 1, communication with the ion implanter I1 is selected by a communication switching part 8. According to the demand from a command issuing part 8, a screen data taking-in part 30 transmits image data which are displayed on a CRT 25. Thereby the same screen data as the screen data which are displayed on a man-machine interface 21 are displayed on the remote controller 1. When coordinate data inputted in a touch panel 5 are transmitted and synthesized with the screen data by using a video RAM 28, a control part 22 controls an implanter main body 23, on the basis of the synthesized data. The man-machine interface 21 transmits the screen data which are changed as the result of control.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor manufacturing apparatus remote control system for controlling a semiconductor manufacturing apparatus such as an ion implantation apparatus at a position separated from an apparatus body.

[0002]

2. Description of the Related Art An ion implantation apparatus or the like in a semiconductor manufacturing line has a control apparatus for performing control operations such as inputting implantation conditions. The control device is usually provided in the device body, but in order to realize an operation at a position separated from the device body, a remote controller 51 is provided as shown in FIG. The remote controller 51 is typically an injector controller 52 and an RS23.
It is connected one-to-one via the 2C cable 53.

More specifically, as shown in FIG. 6, the injection device controller 52 includes a machine host computer (hereinafter referred to as a machine host) 54, a sequence controller 55, a beam controller 56, and an end station controller 57. And are provided. A CRT 58 and a keyboard 59 are connected to the machine host 54, and each of them displays a control screen and inputs keys. Each of the controllers 55 to 57 is connected to the machine host 54 via the RS232C cable 60 ...
1 is connected.

On the other hand, the remote controller 51 comprises a controller body 62, a keyboard 63 and a CRT 64.

In the system configured as described above, in the remote controller 51, the controller body 62 constantly monitors the input of the keyboard 63. If there is that input, the entered key code is
RS232C cable 5 by controller body 62
3 to the machine host 54. This key code is treated in the same manner as the input from the keyboard 59 for the machine host 54.

When the machine host 54 acquires the operating condition based on the key code, the operating condition is notified from the machine host 54 to the controllers 55 to 57. When the operation mode of the system is designated as the full-auto mode, the machine host 54 instructs the controllers 55 to 57 to that effect to complete the startup of the system. And after the system startup is completed,
Injection is started according to a command from the machine host 54.

Machine host 54 in the above system
Serves as a command tower for each of the controllers 55 to 57. The operator starts up the system by using the control panel provided in the injection device main body 61.

In the above system, the input from the keyboard 63 of the remote controller 51 is transmitted to the machine host 5
Since it is configured to be performed in the same manner as the input from the keyboard 59 of No. 4, the remote control of the ion implantation apparatus by the remote controller 51 can be easily performed.

[0009]

Generally, a semiconductor manufacturing line is automated and a cassette containing wafers is transferred to an ion implanter by a transfer robot. It is located facing the machine room (rear surface). In addition, a plurality of ion implanters are usually provided in a semiconductor manufacturing line, and the types of the ion implanters are often different. Therefore, there is a demand for a system capable of intensively monitoring and operating a plurality of ion implanters as described above at a place separated from them.

However, in the conventional system, since the remote controller 51 and the implanter controller 52 are connected in a one-to-one relationship, it is impossible to centrally control a plurality of ion implanters as described above. . In order to eliminate such an inconvenience, as shown in FIG. 7, a system having a configuration in which the ion implanters 71 to 73 and the remote controller 74 are connected via a switch 75 such as a relay can be considered.

In this system, the connection of the switch 75 is switched by a switching signal from the remote controller 74, and any one of the ion implanters 71 to 73 is selected and connected to the remote controller 74. Thereby, the remote controller 74 and the ion implanter 7
The CRT signal (screen data) and the key code can be communicated with 1 to 73.

However, in the above system, in order to perform different processing for each of the ion implanters 71 to 73, it is necessary to incorporate software having specifications corresponding to each of the ion implanters 71 to 73. In addition, the above system includes a remote controller 74 and each of the ion implanters 71 to 73.
The RS232C cable 76 for connecting to and is limited in distance, and also the transmission distance of the CRT signal is limited.

The present invention has been made in view of the above circumstances, and a system can be inexpensively constructed without requiring remote control software for each semiconductor manufacturing apparatus (ion implantation apparatus). It is intended to provide a remote control device.

[0014]

In order to solve the above-mentioned problems, a remote control system for a semiconductor manufacturing apparatus according to the present invention comprises:
Screen information generating means for generating screen information provided with setting points for setting the control contents of the semiconductor manufacturing apparatus by inputting coordinates, and screen information generated by the screen information generating means, and displaying the above on the screen. A plurality of semiconductor manufacturing devices having a first display device provided with a first coordinate input means for inputting coordinates of a set location, and these semiconductor manufacturing devices are centrally controlled at distant positions, and the screen information is also provided. And a remote control device provided with a second display device having a second coordinate input means for inputting the coordinates of the above-mentioned set location on the screen are connected so as to be able to communicate with each other. The remote control device includes a communication selecting unit that selects communication with any one of the semiconductor manufacturing devices,
Screen information requesting means for requesting screen information displayed on the first display device, and coordinates for transmitting the coordinates input by the second coordinate input means as coordinate information to the semiconductor manufacturing device selected by the communication selecting means. On the other hand, the semiconductor manufacturing apparatus has a screen information transmitting means for transmitting the screen information displayed on the first display device to the remote control device based on a request from the screen information requesting means. A control means for controlling the semiconductor manufacturing apparatus based on the control content related to the coordinates input by the first coordinate input means and the coordinates transmitted from the coordinate information transmission means. I am trying.

[0015]

In the above arrangement, the screen information generated by the screen information generating means is displayed on the first display device. On the screen, the control contents correspond to the coordinates.
Therefore, when the coordinates are input by the first coordinate input means, the control means controls the semiconductor manufacturing apparatus with the control content according to the coordinates.

On the other hand, when communication with any one of the semiconductor manufacturing devices is selected by the communication selecting means on the remote control device side, the screen information requesting means displays the semiconductor manufacturing device on the first display device. Screen information is requested. Then, the above screen information is transmitted to the remote control device by the screen information transmitting means on the semiconductor manufacturing device side, and is displayed on the second display device of the remote control device. This allows
A screen having the same contents as the first display device will be displayed on the second display device.

When the operator inputs the coordinates on the screen from the second coordinate input means, the coordinates are transmitted to the semiconductor manufacturing apparatus by the coordinate information transmitting means. On the side of the semiconductor manufacturing apparatus, the control means controls the semiconductor manufacturing apparatus based on the control content related to the coordinates.

As described above, according to the above configuration, it is possible to operate the remote control device while looking at the screen of the content displayed on the first display device. Moreover, since the semiconductor manufacturing apparatus is controlled based on the coordinates on the screen, the operator can easily execute the control simply by inputting the coordinates on the screen displayed on the second display device. That is,
With the above configuration, by simply exchanging screen information and coordinate information between each semiconductor manufacturing device and the remote control device,
Since it is designed to control semiconductor manufacturing equipment,
It is not necessary to incorporate software that performs different processing for each model of the semiconductor manufacturing device into the remote control device.

[0019]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The following will describe one embodiment of the present invention with reference to FIGS.

The remote control system according to this embodiment is shown in FIG.
As shown in, a plurality of ion implantation apparatus I ₁ ~I _n as a semiconductor manufacturing device, and a remote controller 1 as a remote control device, the ion implantation apparatus I ₁ ~
I _n and the remote controller 1 is connected to each other via an interface cable 2. The interface cable 2 is a communication path capable of TCP / IP communication.

The remote controller 1 includes a controller body 3 and a CRT 4 as a second display device, and a touch panel 5 is provided on a display section (not shown) of the CRT 4.
Is attached. The touch panel 5 as the second coordinate input means has a transparent entire surface so that the screen displayed on the display unit can be seen through, and the two electrodes facing each other are pressed and brought into contact with each other to input the coordinates of the position. It is configured to do.

On the other hand, the controller body 3 is a video RA.
It has an M6, a coordinate extracting unit 7, a communication switching unit 8, a command issuing unit 9, and a transmitting / receiving unit 10.

The video RAM 6 is a memory for storing information to be displayed, and supplies the information to the CRT 4. The coordinate extraction unit 7 extracts the coordinates input on the touch panel 5 as an electric signal (coordinate information). The coordinate information output from the coordinate extracting unit 7 is input to the video RAM 6 and the command issuing unit 9.

The communication switching section 8 switches the communication via the transceiver unit 10 is adapted to select either one of the communication of the ion implanter I ₁ ~I _n, as a communication selection means It has a function.

The communication switching unit 8 makes the ion implanters I _{1 to} I _n correspond to individual communication channels, and displays a screen for selecting the channels on the video RA.
The display is set to be displayed on the CRT 4 through M6, and each channel is selected by the touch panel 5. That is, according to the communication switching unit 8 of this configuration, when there is an input from the touch panel 5, the transmission / reception unit 10 is controlled so that the communication channel corresponding to the coordinates is selected. The above-mentioned communication channels and the ion implantation apparatus I ₁ ~I _n individually are associated in advance, are registered in a memory (not shown) or the like.

The command issuing unit 9 uses the ion implanter I ₁
Is adapted to issue a coordinate transmission command for transmitting a screen request command and the coordinate information for requesting screen information will be described later with respect ~I _n. That is, the command issuing unit 9 has a function as a screen information requesting unit and a coordinate information transmitting unit. The command issuing unit 9 also issues a screen request command when communication is selected by the communication switching unit 8 and the communication partner is determined.

The transmitter / receiver 10 includes a controller body 3 and
The ion implanters I _{1 to} I _n are adapted to communicate with a man-machine interface 21 described later.
The transmission / reception unit 10 is configured to switch the communication path by the communication switching unit 8 as described above and selectively connect to the transmission / reception unit 31 described later. In addition, the transceiver 10
The protocol processing required for TCP / IP communication is performed on the transmission data, and the original data is extracted from the reception data subjected to the protocol processing.

The coordinate extracting unit 7, the communication switching unit 8 and the command issuing unit 9 are functional modules realized by a CPU (not shown) executing a predetermined program.

On the other hand, the ion implantation apparatus I ₁ ~I _n, (in the figure, M / I) man-machine interface 21, a control unit 22, and a injection unit main body 23. The man-machine interface 21 is shown in detail in FIG. 1 only for the ion implanter I ₁ for convenience.

The man-machine interface 21 includes a machine body 24 and a CRT 25 as a first display device, and a touch panel 26 is attached to a display section (not shown) of the CRT 25. The touch panel 26 as the first coordinate input means is configured to input the coordinates of the pressed position similarly to the touch panel 5. In addition, the machine body 24 includes a screen data generator 27 and a video RAM 2
8, a coordinate extraction unit 29, a screen data acquisition unit 30, and a transmission / reception unit 31.

The screen data generator 27 is used for the injection device main body 2
A screen for setting conditions for controlling 1 and displaying processing results is generated.
It is composed of a UI (Graphic User Interface).
The above-mentioned screen is in a window format, and the setting location for setting the control content is configured so that the setting items can be input at the coordinates of the position, and the coordinates are the coordinates input on the touch panel 26. Is being used. For example, the parameters such as the dose amount are changed by changing the parameters by a constant amount each time the coordinates of each set location are input.

The video RAM 28, like the video RAM 6, is a memory for storing information to be displayed, and stores the screen data generated by the screen data generating section 27. When the video RAM 28 receives the coordinate transmission command from the command issuing unit 9 received by the transmitting / receiving unit 31, the video RAM 28 synthesizes the coordinate information with the stored screen data.

The coordinate extracting unit 29, like the coordinate extracting unit 7,
The coordinates from the touch panel 26 are extracted as an electric signal (coordinate information), and the coordinate information is stored in a video RAM.
28.

Upon receiving the screen request command from the command issuing unit 9 received by the transmitting / receiving unit 31, the screen data capturing unit 30 captures the screen data from the video RAM 28 and sends it to the transmitting / receiving unit 31. . That is, the screen data acquisition unit 30 has a function as a screen information transmission unit. The transmission / reception unit 31 is a unit that communicates with the controller main body 3, and specifically performs protocol processing similar to the transmission / reception unit 10.

The screen data generator 27 and the coordinate extractor 2
The CPU 9 and the screen data acquisition unit 30 are functional modules implemented by a CPU (not shown) executing a predetermined program.

As shown in FIG. 2, the control unit 22 as a control means has a fully automatic controller 41, an injection controller 42, a waveform shaper 43, and a power supply controller 44.
, Vacuum controllers 45 and 46, and an end station controller 47. The fully automatic controller 41, the power supply controller 44, the vacuum controller 45, and the end station controller 47 are
It is network-connected to the man-machine interface 21.

The full-auto controller 41 is designed to perform full-auto control such as control of the implanter main body 24 and start and stop of the ion source. The implantation controller 42 controls the implantation such as dose count and beam current monitoring. The waveform shaper 43 shapes the voltage waveform applied to the electrostatic scanner and the Q lens into an appropriate shape. The waveform shaper 43 is connected to the injection controller 42, and is configured to notify the injection controller 42 of information such as an abnormality that has occurred in the waveform shaper 43. In addition, the injection controller 42 and the waveform shaper 4
3 is network-connected to the fully automatic controller 41.

The power supply controller 42 is used for the injection device main body 2
4 controls the power supply unit that supplies power to each unit. The vacuum controllers 45 and 46 are configured to control a vacuum exhaust system such as a vacuum pump of the injection device main body 24. The vacuum controller 46 is the vacuum controller 4
5 is connected as a subordinate and functions as a local controller. The end station controller 47
The wafer transfer and the implantation process in the end station of the implantation apparatus body 24 are controlled.

In performing the implantation control in the above-mentioned configuration, when the operation is performed on the side of the ion implanter I ₁ , the screen data generated by the screen data generator 27 is the video R.
It is stored in the AM 28 and the screen data is displayed on the CRT 25. Therefore, when an arbitrary position on the touch panel 26 is pressed by the operator's operation, the coordinates of the position are extracted by the coordinate extracting unit 29 and are taken into the video RAM 28 as coordinate data (coordinate information) and combined with the screen data. It Then, the synthetic data is CR
In addition to being displayed at T25, the control unit 22 controls the injection device main body 23 based on the combined data in the video RAM 28.
Is controlled.

On the other hand, when the remote controller 1 is operated, the communication switching section 8 switches the communication path of the transmitting / receiving section 10. At this time, for example, when the communication with the ion implanter I ₁ is selected, the command issuing unit 9 issues a screen request command. The screen request command is transmitted by the transmission / reception unit 10 as shown in FIG.
/ IP header is added and transmitted.

The screen request command is the ion implanter I ₁
When received by the transmitting / receiving unit 31 of the screen data capturing unit 30
Sent to. Upon receiving the screen request command, the screen data acquisition unit 31 acquires the screen data currently displayed on the CRT 25, which is stored in the video RAM 28. Then, the screen data is transferred to the TCP / I, as shown in FIG.
The P header and the screen response command are added and transmitted through the transmitting / receiving unit 31.

The above screen response command is sent and received by the transmitting / receiving unit 10.
When received, the screen data is extracted and the video R
The data is stored in AM6 and the screen data is displayed on CRT4. As a result, the remote controller 1 can operate the ion implanter I ₁ while monitoring the same screen displayed on the ion implanter I ₁ side.

When the operator presses a desired portion of the touch panel 5 in the remote controller 1, the coordinates of that position are extracted by the coordinate extracting unit 7 and are taken into the video RAM 6 as coordinate data to be combined with the screen data. And is given to the command issuing unit 9. Then, the coordinate data is transmitted by the command issuing unit 9 through the transmitting / receiving unit 10 with the TCP / IP header and the coordinate transmission command added, as shown in (c) of FIG.

The coordinate transmission command is the ion implanter I ₁
When it is received by the transmitting / receiving unit 31, the coordinate data only is extracted and loaded into the video RAM 28. Video ram
At 28, the coordinate data and the screen data are combined, and the combined data is given to the control unit 22 and the CRT 25. As a result, the CRT 25 displays a screen in which the operating point at the coordinates is marked. Further, the control unit 22 controls the injection device main body 23 based on the combined data.

The result of the control is the injection device main body 23.
From the control unit 22 to the video RAM 28,
It is added to the screen data in the video RAM 28. This screen data is displayed on the CRT 25 as a changed screen after the operation, and the screen data importing unit 30 adds a TCP / IP header and a screen response command as shown in FIG. It is transmitted through the transmitting / receiving unit 31.

The above screen response command is sent and received by the transmitting / receiving unit 10.
When received, the screen data is extracted and the video R
The data is stored in AM6 and the screen data is displayed on CRT4. As a result, in the remote controller 1, the CRT 4 displays a screen changed as a result of the control of the implanter main body 23 performed on the side of the ion implanter I ₁ .

Next, the transition of the processing performed as described above will be described with reference to the state transition diagram of FIG.

First, when communication with the ion implanter I ₁ is selected by the remote controller 1, the remote controller 1 requests screen data from the man-machine interface 21. Man-machine interface 21
When receiving this request, sends the screen data currently displayed. The remote controller 1 receives and displays the screen data.

Thereafter, the remote controller 1 periodically requests the man-machine interface 21 for I / O data. This request is made using the same command as the above-mentioned screen data request. Further, the I / O data is screen data changed by the processing by the operation on the side of the ion implanter I ₁ , and is provided and displayed on the remote controller 1 upon request.

Furthermore, when the operator operates the touch panel 5 on the remote controller 1 side, the coordinates indicating the operation position are displayed on the man-machine interface 21.
Sent to. Then, the man-machine interface 21
Then, the display screen is changed according to the processing result of the injection device main body 23 according to the above coordinates. Then, the changed screen data is transmitted and displayed on the man-machine interface 21 side.

[0051] As described above, in the remote control system according to the present embodiment is adapted to perform communication by selecting any one from the ion implantation apparatus I ₁ ~I _n by the remote controller 1. In the above remote control system, the same screen as the screen displayed on the man-machine interface 21 is displayed on the remote controller 1 side. Furthermore, in the above remote control system, an ion implantation apparatus I ₁ ~I _n similarly to controller body by the coordinate data 2 in the remote controller 1
The operation of 3 is performed.

[0052] With such a feature point can remotely control a plurality of ion implantation apparatus I ₁ ~I _n in the remote controller 1 one. While watching the screen on the remote controller 1 side, the man-machine interface 21
The same operation as the operation in can be performed. Further, by operating the implanter main body 23 according to the coordinate data, the ion implantation device I _{1 is} added to the remote controller _1.
There is no need to incorporate a special software in accordance with each ~I _n.

In this embodiment, the first and second
Although the touch panels 5 and 26 were used as the coordinate input means,
The first and second coordinate input means is not limited to this, and may be an input device such as a tablet or a mouse for inputting coordinates.

[0054]

As described above, in the remote control system for a semiconductor manufacturing apparatus of the present invention, screen information generating means for generating screen information provided with setting points for setting the control contents of the semiconductor manufacturing apparatus by inputting coordinates. And a first display device provided with first coordinate input means for displaying the screen information generated by the screen information generating means and for inputting the coordinates of the above-mentioned set location on the screen. A second display device having a device and a second coordinate input means for centrally controlling the semiconductor manufacturing device at a distant position, displaying the screen information, and inputting coordinates of the set position on the screen. Is connected so that they can communicate with each other, and the remote control device is a communication selector that selects communication with any one of the semiconductor manufacturing devices. Screen information requesting means for requesting screen information displayed on the first display device, and coordinates input by the second coordinate input means as coordinate information to the semiconductor manufacturing device selected by the communication selecting means. On the other hand, the semiconductor manufacturing apparatus transmits the screen information displayed on the first display device to the remote control device based on the request from the screen information requesting device. And a control means for controlling the semiconductor manufacturing apparatus based on the control content related to the coordinates input by the first coordinate input means and the coordinates transmitted from the coordinate information transmission means. Is.

As a result, one of the plurality of semiconductor manufacturing apparatuses is selected to communicate with the remote control apparatus, so that the plurality of semiconductor manufacturing apparatuses can be controlled by one remote control apparatus. Further, since the screen displayed on the first display device is displayed on the second display device, the operator can operate while viewing the screen of the content displayed on the first display device on the remote control device side. Furthermore, since the semiconductor manufacturing apparatus is controlled based on the coordinates on the screen, the operator can easily execute the control simply by inputting the coordinates on the screen displayed on the second display device.

That is, in the above structure, the semiconductor manufacturing apparatus is controlled only by exchanging screen information and coordinate information between each semiconductor manufacturing apparatus and the remote control apparatus. It is not necessary to incorporate software that performs different processing for each device type into the remote control device. Therefore, the semiconductor manufacturing apparatus configured as described above can perform remote control by the remote control device regardless of the model.

Therefore, if the remote control system for a semiconductor manufacturing apparatus according to the present invention is adopted, there is an effect that the system can be constructed at low cost without the need for remote control software for each semiconductor manufacturing apparatus.

[Brief description of drawings]

FIG. 1 is a block diagram showing a configuration of a remote control system according to an embodiment of the present invention.

FIG. 2 is a block diagram showing a configuration of a control unit in the remote control system of FIG.

3 is an explanatory diagram showing a communication format of data transmitted and received between an ion implantation device and a remote controller in the remote control system of FIG.

4 is a state transition diagram showing a procedure of communication performed in the remote control system of FIG.

FIG. 5 is a block diagram showing a schematic configuration of a conventional remote control system.

6 is a block diagram showing a detailed configuration of the remote control system of FIG.

FIG. 7 is a block diagram showing the configuration of another conventional remote control system.

[Explanation of symbols]

1 Remote Controller (Remote Control Device) 4 CRT (Second Display Device) 5 Touch Panel (Second Coordinate Input Means) 8 Communication Switching Section (Communication Selection Means) 9 Command Issuing Section (Screen Information Requesting Means, Coordinate Information Sending Means) 21 man-machine interface 22 control unit (control means) 25 CRT (first display device) 26 touch panel (the first coordinate input means) 27 screen data generating section (screen information generating means) I ₁ ~I _n ion implantation apparatus (semiconductor manufacturing apparatus )

Claims (1)

[Claims] Claim: What is claimed is: 1. A screen information generating means for generating screen information provided with setting points for setting control contents of a semiconductor manufacturing apparatus by inputting coordinates, and screen information generated by the screen information generating means, and A first coordinate input means is provided for inputting the coordinates of the above-mentioned setting location on the screen.
A second semiconductor manufacturing apparatus having a display device, and controlling the semiconductor manufacturing apparatuses centrally at positions separated from each other, displaying the screen information, and inputting the coordinates of the set location on the screen. A remote control device provided with a second display device having coordinate input means is connected so as to communicate with each other, and the remote control device selects communication with any one of the semiconductor manufacturing devices. Communication selecting means, screen information requesting means for requesting screen information displayed on the first display device, and semiconductor selected by the communication selecting means with the coordinates input by the second coordinate input means as coordinate information. While having coordinate information transmitting means for transmitting to the manufacturing apparatus, the semiconductor manufacturing apparatus is displayed on the first display device based on a request from the screen information requesting means. And screen information transmission means for transmitting the screen information to the remote control device,
Control means for controlling the semiconductor manufacturing apparatus based on the control content related to the coordinates input by the first coordinate input means and the coordinates transmitted from the coordinate information transmission means. Remote control system for semiconductor manufacturing equipment.