JPH0732612B2 - Ultrasonic motor rotor rotation angle measuring device - Google Patents
Ultrasonic motor rotor rotation angle measuring deviceInfo
- Publication number
- JPH0732612B2 JPH0732612B2 JP63071237A JP7123788A JPH0732612B2 JP H0732612 B2 JPH0732612 B2 JP H0732612B2 JP 63071237 A JP63071237 A JP 63071237A JP 7123788 A JP7123788 A JP 7123788A JP H0732612 B2 JPH0732612 B2 JP H0732612B2
- Authority
- JP
- Japan
- Prior art keywords
- rotation angle
- rotor
- stator
- ultrasonic motor
- phase difference
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 claims description 17
- 238000006073 displacement reaction Methods 0.000 claims description 14
- 230000002093 peripheral effect Effects 0.000 claims description 13
- 239000000523 sample Substances 0.000 claims description 13
- 238000001514 detection method Methods 0.000 claims description 10
- 239000000919 ceramic Substances 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/14—Drive circuits; Control arrangements or methods
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、進行波型超音波モータのステータ外周面の進
行波とその表面振動変位を非接触で検出する光学式微小
振動センサを利用した超音波モータのロータ回転角度測
定装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of use] The present invention utilizes an optical micro-vibration sensor that detects a traveling wave on the outer peripheral surface of a stator of a traveling-wave ultrasonic motor and its surface vibration displacement in a non-contact manner. The present invention relates to a rotor rotation angle measuring device for an ultrasonic motor.
超音波振動により回転力を得る超音波モータは、小型・
軽量、低速・大トルクという特徴を持っているため、ダ
イレクトドライブモータ、精密位置決めモータ等のアク
チュエータとして非常に着目されている。Ultrasonic motors that obtain rotational force by ultrasonic vibration are small
Due to its characteristics of light weight, low speed and large torque, it has attracted a great deal of attention as an actuator for direct drive motors and precision positioning motors.
しかしながら超音波モータを上記目的で使用する場合、
フィードバック制御を行なうため、通常ロータの回転角
度を測定するために独立にロータリーエンコーダーを設
ける必要があり、装置の小型化及びコストの低減等にお
いて問題があった。However, when using the ultrasonic motor for the above purpose,
Since the feedback control is performed, it is usually necessary to provide a rotary encoder independently to measure the rotation angle of the rotor, which causes a problem in downsizing of the device and cost reduction.
本発明は上述の点に鑑みてなされたもので、上記問題点
を除去し、独立したロータリーエンコーダを設けること
なく、ロータの回転角度を測定可能とした超音波モータ
のロータ回転角度測定装置を提供することにある。The present invention has been made in view of the above points, and provides a rotor rotation angle measuring device for an ultrasonic motor capable of measuring the rotation angle of a rotor without providing the above-mentioned problems and providing an independent rotary encoder. To do.
上記課題を解決するため本発明は、進行波型の超音波モ
ータのロータの回転角度を測定するロータ回転角度測定
装置において、第１図に示すようにステータ２の外周面
の超音波振動進行波に伴う表面振動変位を検出するため
の光学式微小振動センサ６と、ロータ１と一体に回転す
る光学式微小振動センサ６のプローブ光集光レンズ系
（反射ミラー８、集光レンズ９、反射ミラー10）と、ス
テータ２の外周部の表面変位検出部のステータ表面上に
設けたプローブ光反射膜16と、ステータ２の外周部に超
音波振動進行波を励振するための圧電素子駆動信号と光
学式微小振動センサからの出力信号との位相差を検出す
る位相差検出回路13と、位相差検出回路13で検出した位
相差によりロータ回転角度を算出する回転角度演算部15
とを具備することを特徴とする。In order to solve the above problems, the present invention relates to a rotor rotation angle measuring device for measuring the rotation angle of a rotor of a traveling wave type ultrasonic motor, as shown in FIG. Optical micro-vibration sensor 6 for detecting the surface vibration displacement accompanying the rotation, and the probe light condensing lens system (reflection mirror 8, condensing lens 9, reflection mirror) of the optical micro-vibration sensor 6 rotating integrally with the rotor 1. 10), the probe light reflection film 16 provided on the stator surface of the surface displacement detecting portion on the outer peripheral portion of the stator 2, and the piezoelectric element drive signal and the optical signal for exciting the ultrasonic vibration traveling wave on the outer peripheral portion of the stator 2. Phase difference detection circuit 13 for detecting the phase difference from the output signal from the micro vibration sensor, and a rotation angle calculation unit 15 for calculating the rotor rotation angle based on the phase difference detected by the phase difference detection circuit 13.
And is provided.
上記の如く、超音波モータのロータ回転角度測定装置を
構成することにより、ステータ外周面の進行波を一種の
分度器と考え、その表面振動変位を検出することによっ
て、超音波モータの外形寸法を殆ど大きくすることな
く、ロータとステータの相対回転角度を測定することが
可能となる。As described above, by constructing the rotor rotation angle measuring device of the ultrasonic motor, the traveling wave on the outer peripheral surface of the stator is considered as a kind of protractor, and by detecting the surface vibration displacement, the external dimensions of the ultrasonic motor are almost It is possible to measure the relative rotation angle between the rotor and the stator without increasing the size.
以下、本発明の実施例を図面に基づいて説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第１図は本発明に係る超音波モータのロータ回転角度測
定装置の構成を示すブロック図である。同図において、
１は超音波モータのロータ、２は超音波モータのリング
状のステータ、３はステータ２の外周面に進行波を発生
させる圧電セラミックス素子である。４は前記圧電セラ
ミックス素子３の駆動信号発生回路、５は前記駆動信号
発生回路回路からの駆動信号を適当なレベルに増幅する
圧電セラミックス素子３の駆動回路である。６は前記ス
テータ２の外周面に生じる進行波の表面振動変位を光学
的に非接触で検出する光学式微小振動センサの本体、７
は前記光学式微小振動センサ本体６からのプローブレー
ザ光である。このプローブレーザ光７は中空のロータ１
の軸中を通り、先ず反射ミラー８によって光路がロータ
１の円板外周に向けられ、次にステータ２の表面におい
て、プローブレーザ光７をスポット状に集光させるため
の集光レンズ９を通り、最後に反射ミラー10によってプ
ローブレーザ光７がステータ表面に対して垂直に入射す
るように90゜光路が変換される。これら反射ミラー８、
集光レンズ９及び反射ミラー10はロータ１に埋め込み固
定され、ロータ１と一体に回転する。FIG. 1 is a block diagram showing the configuration of a rotor rotation angle measuring device for an ultrasonic motor according to the present invention. In the figure,
Reference numeral 1 is a rotor of an ultrasonic motor, 2 is a ring-shaped stator of the ultrasonic motor, and 3 is a piezoelectric ceramic element for generating a traveling wave on the outer peripheral surface of the stator 2. Reference numeral 4 is a drive signal generation circuit for the piezoelectric ceramic element 3, and 5 is a drive circuit for the piezoelectric ceramic element 3, which amplifies the drive signal from the drive signal generation circuit circuit to an appropriate level. Reference numeral 6 is a main body of an optical micro-vibration sensor that optically detects a surface vibration displacement of a traveling wave generated on the outer peripheral surface of the stator 2 in a non-contact manner.
Is the probe laser light from the optical microvibration sensor body 6. This probe laser beam 7 is used for the hollow rotor 1
First, the optical path is directed to the outer circumference of the disk of the rotor 1 by the reflection mirror 8 and then passes through a condenser lens 9 for condensing the probe laser light 7 in a spot shape on the surface of the stator 2. Finally, the 90 ° optical path is converted by the reflection mirror 10 so that the probe laser beam 7 is incident perpendicularly to the stator surface. These reflection mirrors 8,
The condenser lens 9 and the reflection mirror 10 are embedded and fixed in the rotor 1, and rotate integrally with the rotor 1.
上記光学式微小振動センサ本体６としては、例えば特願
昭62−79213号に開示されたものを用いる。光学式微小
振動センサ本体６によって検出された進行波表面振動変
位信号11は、増幅回路12で適当なレベルに増幅され、位
相差検出回路13に送られる。この位相差検出回路13では
前記駆動信号発生回路４からの参照信号14を受け取り、
この参照信号14と光学式微小振動センサ６で検出された
進行波表面振動変位信号11との間の位相差が測定され
る。これらの測定データは回転角度演算部15に送られ、
最終的にはロータ１の回転角度が算出される。以下、上
記構成の本発明に係る超音波モータのロータ回転角度測
定装置で回転角度算出する方法を説明する。As the optical microvibration sensor body 6, for example, the one disclosed in Japanese Patent Application No. 62-79213 is used. The traveling wave surface vibration displacement signal 11 detected by the optical micro-vibration sensor main body 6 is amplified to an appropriate level by the amplifier circuit 12 and sent to the phase difference detection circuit 13. The phase difference detection circuit 13 receives the reference signal 14 from the drive signal generation circuit 4,
The phase difference between the reference signal 14 and the traveling wave surface vibration displacement signal 11 detected by the optical micro-vibration sensor 6 is measured. These measurement data are sent to the rotation angle calculation unit 15,
Finally, the rotation angle of the rotor 1 is calculated. Hereinafter, a method of calculating the rotation angle by the rotor rotation angle measuring device for the ultrasonic motor according to the present invention having the above-described configuration will be described.
今、ステータ２の外周面のある点にプローブレーザ光７
のスポットが位置し、その点での参照信号14と進行波表
面振動変位信号11との間の位相差をΦ０（但し｜Φ0|≦
180゜）とする。そして、今のロータ１の回転角度を仮
の基準角度とすると、この基準角度からの相対角度θ
は、 θ＝（Φ−Φ０）×λ／（360×Ｒ）（度） …（１） で与えられる。ここでΦ（度）はロータ１の新しい回転
角度における位相差、λは進行波の波長、Ｒは進行波の
表面振動変位の検出点半径である。Now, the probe laser beam 7 is applied to a point on the outer peripheral surface of the stator 2.
Is located, and the phase difference between the reference signal 14 and the traveling wave surface vibration displacement signal 11 at that point is Φ 0 (however, | Φ 0 | ≦
180 °). Then, assuming that the current rotation angle of the rotor 1 is a temporary reference angle, the relative angle θ from this reference angle
Is given by θ = (Φ−Φ 0 ) × λ / (360 × R) (degrees) (1). Here, Φ (degree) is the phase difference at the new rotation angle of the rotor 1, λ is the wavelength of the traveling wave, and R is the detection point radius of the surface vibration displacement of the traveling wave.
検出信号の信号対雑音比が高い場合、その参照信号に対
する位相差の測定精度は一周期360゜の数百分の１から1
/1000程度は比較的容易に得られる。今例えばステータ
外周面に100λの進行波が生じているとすれば、ロータ
１の角度測定分解能は1/（100×1000）となり、非常に
高分解能の角度測定が可能となる。When the signal-to-noise ratio of the detection signal is high, the measurement accuracy of the phase difference with respect to the reference signal is from several hundredths of one cycle 360 °
/ 1000 is relatively easy to obtain. If, for example, a traveling wave of 100λ is generated on the outer peripheral surface of the stator, the angle measurement resolution of the rotor 1 becomes 1 / (100 × 1000), which enables angle measurement with extremely high resolution.
なお、Φの参照番号に対する進み遅れ（ロータ１の回転
方向）の判別は、参照番号として互いに90゜位相の異な
る２つの参照番号を用意し、この２つの参照番号に対す
る検出変位信号の位相差測定を行なうことによって可能
である。また、進行波の伝搬波長λは、使用するステー
タ２、圧電セラミックス素子３の特性によって異なる。
相対角度θを独立に他の高精度角度センサで校正するこ
とによって逆に得るのが望ましい。In order to determine the lead / lag (rotation direction of the rotor 1) with respect to the reference number of Φ, two reference numbers having 90 ° different phases are prepared as reference numbers, and the phase difference measurement of the detected displacement signal with respect to these two reference numbers is performed. This is possible by doing Further, the propagation wavelength λ of the traveling wave varies depending on the characteristics of the stator 2 and the piezoelectric ceramic element 3 used.
It is desirable to obtain the reverse by independently calibrating the relative angle θ with another high precision angle sensor.
ステータ２の外周部表面のプローブレーザ光７の焦点近
傍の全円周部は、プローブレーザ光７の反射率を高める
ため、例えば保護膜MgF2付きのアルミニウム蒸着膜で作
ったレーザ光反射膜16が付されている。In order to enhance the reflectance of the probe laser light 7, the entire circumference of the outer peripheral surface of the stator 2 near the focus of the probe laser light 7 is made of, for example, a laser light reflection film 16 made of an aluminum vapor deposition film with a protective film MgF 2. Is attached.
なお、本発明に係る超音波モータのロータ回転角度測定
装置は上記実施例の構成に限定されるものではなく、い
くつかの変形が考えられる。例えば、光学式微小振動セ
ンサ６からの反射ミラー８へのプローブレーザ光７の導
光に偏波面保存光ファイバーを用いることができる。こ
のようにすれば、超音波モータと光学式微小振動センサ
６が分離され、外見上超音波モータの寸法を殆ど大きく
することなくロータ１の回転角度を測定することが可能
となる。It should be noted that the rotor rotation angle measuring device for an ultrasonic motor according to the present invention is not limited to the configuration of the above-described embodiment, and some modifications can be considered. For example, a polarization-maintaining optical fiber can be used to guide the probe laser light 7 from the optical microvibration sensor 6 to the reflection mirror 8. With this configuration, the ultrasonic motor and the optical micro-vibration sensor 6 are separated from each other, and the rotation angle of the rotor 1 can be measured without increasing the size of the ultrasonic motor in appearance.
以上説明したように本発明によれば、従来のように独立
にロータリーエンコーダ或いはそれに準じるエンコーダ
をステータやロータと別体に設けることなく、ステータ
外周面の進行波を一種の分度器と考え、その表面振動変
位を検出することによって、超音波モータの外形寸法を
殆ど大きくすることなく、ロータとステータの相対回転
角度を測定できる優れた効果が得られる。As described above, according to the present invention, the traveling wave on the outer peripheral surface of the stator is considered as a kind of protractor without independently providing a rotary encoder or an encoder similar thereto as in the conventional case separately from the stator and the rotor, and its surface By detecting the vibration displacement, it is possible to obtain an excellent effect that the relative rotation angle between the rotor and the stator can be measured without increasing the outer dimensions of the ultrasonic motor.
第１図は本発明に係る超音波モータのロータ回転角度測
定装置の構成を示すブロック図である。 図中、１……ロータ、２……ステータ、３……圧電セラ
ミックス素子、４……駆動信号発生回路、５……駆動回
路、６……光学式微小振動センサ本体、７……プローブ
レーザ光、８……反射ミラー、９……集光レンズ、10…
…反射ミラー、11……進行波表面振動変位信号、12……
増幅回路、13……位相差検出回路、14……参照信号、15
……回転角度演算部。FIG. 1 is a block diagram showing the configuration of a rotor rotation angle measuring device for an ultrasonic motor according to the present invention. In the figure, 1 ... Rotor, 2 ... Stator, 3 ... Piezoelectric ceramic element, 4 ... Drive signal generation circuit, 5 ... Drive circuit, 6 ... Optical microvibration sensor body, 7 ... Probe laser light , 8 ... Reflecting mirror, 9 ... Condensing lens, 10 ...
… Reflecting mirror, 11 …… traveling wave surface vibration displacement signal, 12 ……
Amplifier circuit, 13 ... Phase difference detection circuit, 14 ... Reference signal, 15
...... Rotation angle calculator.
Claims (1)
度を測定するロータ回転角度測定装置において、 ステータ外周面の超音波振動進行波に伴う表面振動変位
を検出するための光学式微小振動センサと、 ロータと一体に回転する前記光学式微小振動センサのプ
ローブ光集光レンズ系と、 前記ステータ外周部の表面変位検出部のステータ表面上
に設けたプローブ光反射膜と、 前記ステータ外周面に超音波振動進行波を励振するため
の圧電素子駆動信号と前記光学式微小振動センサからの
出力信号との位相差を検出する位相差検出回路と、 該位相差検出回路で検出した位相差によりロータ回転角
度を算出する回転角度算出手段とを具備することを特徴
とする超音波モータのロータ回転角度測定装置。1. A rotor rotation angle measuring device for measuring a rotation angle of a rotor of a traveling wave type ultrasonic motor, wherein an optical micro-vibration for detecting a surface vibration displacement accompanying an ultrasonic vibration traveling wave on an outer peripheral surface of a stator. A sensor, a probe light condensing lens system of the optical micro-vibration sensor that rotates integrally with the rotor, a probe light reflection film provided on the stator surface of the surface displacement detection portion of the stator outer peripheral portion, and the stator outer peripheral surface A phase difference detection circuit for detecting the phase difference between the piezoelectric element drive signal for exciting the ultrasonic vibration traveling wave and the output signal from the optical micro-vibration sensor, and the phase difference detected by the phase difference detection circuit. A rotor rotation angle measuring device for an ultrasonic motor, comprising: a rotation angle calculating means for calculating a rotor rotation angle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63071237A JPH0732612B2 (en) | 1988-03-25 | 1988-03-25 | Ultrasonic motor rotor rotation angle measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63071237A JPH0732612B2 (en) | 1988-03-25 | 1988-03-25 | Ultrasonic motor rotor rotation angle measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01243862A JPH01243862A (en) | 1989-09-28 |
| JPH0732612B2 true JPH0732612B2 (en) | 1995-04-10 |
Family
ID=13454889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63071237A Expired - Fee Related JPH0732612B2 (en) | 1988-03-25 | 1988-03-25 | Ultrasonic motor rotor rotation angle measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0732612B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108512338B (en) * | 2018-04-09 | 2024-03-19 | 西安创联超声技术有限责任公司 | Integrated high-precision high-torque rotary traveling wave ultrasonic motor system |
| CN109590494B (en) * | 2018-11-28 | 2020-09-04 | 河南理工大学 | Design method of ultrasonic buckling lathe tool |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6258886A (en) * | 1985-09-04 | 1987-03-14 | Matsushita Electric Ind Co Ltd | Ultrasonic motor |
| JPS62254668A (en) * | 1986-04-28 | 1987-11-06 | Olympus Optical Co Ltd | Ultrasonic motor |
-
1988
- 1988-03-25 JP JP63071237A patent/JPH0732612B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6258886A (en) * | 1985-09-04 | 1987-03-14 | Matsushita Electric Ind Co Ltd | Ultrasonic motor |
| JPS62254668A (en) * | 1986-04-28 | 1987-11-06 | Olympus Optical Co Ltd | Ultrasonic motor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01243862A (en) | 1989-09-28 |
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| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |