JPH0732381A - Manufacture of composite precision molding and molds thereof - Google Patents

Manufacture of composite precision molding and molds thereof

Info

Publication number
JPH0732381A
JPH0732381A JP20038793A JP20038793A JPH0732381A JP H0732381 A JPH0732381 A JP H0732381A JP 20038793 A JP20038793 A JP 20038793A JP 20038793 A JP20038793 A JP 20038793A JP H0732381 A JPH0732381 A JP H0732381A
Authority
JP
Japan
Prior art keywords
reaction
fine particles
mold
molded product
molded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20038793A
Other languages
Japanese (ja)
Other versions
JP2844158B2 (en
Inventor
Haruo Tomono
晴夫 友野
Takeshi Miyazaki
健 宮崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP20038793A priority Critical patent/JP2844158B2/en
Publication of JPH0732381A publication Critical patent/JPH0732381A/en
Application granted granted Critical
Publication of JP2844158B2 publication Critical patent/JP2844158B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Moulds For Moulding Plastics Or The Like (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)

Abstract

PURPOSE:To eliminate a molding defect due to curing shrinkage in a reaction curable resin molded form integrally molded with a board. CONSTITUTION:Small amounts of fine particles 4 having flexibility are placed near four corners of a periphery for surrounding a cavity 11 of molds 10. Then, ultraviolet reaction curable liquidlike resin 12 is so filled in the cavity 11 and its periphery as to be brought into contact with the particles 4. After a transparent glass board 3 is superposed, it is emitted with an ultraviolet ray 13 to cure the resin 12, and the resin in which the particles 4 having flexibility are embedded and molded near a periphery is molded integrally with the board 3. After the resin molding 2 is completely cured, it is released from the molds 10 to obtain a microlens 1.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、小径非球面レンズ、マ
イクロレンズ、レンズアレー、回折格子等の光学部品
や、高精度の寸法精度が要求される精密部品等に用いら
れる複合型精密成形品の製造方法およびその成形型に関
するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a composite precision molded product used for optical components such as small-diameter aspherical lenses, microlenses, lens arrays, diffraction gratings, and precision components requiring high dimensional accuracy. And a molding die thereof.

【0002】[0002]

【従来の技術】従来、ガラス基板に光硬化型樹脂や熱硬
化型樹脂の硬化物を一体成形した複合型光学部品の製造
方法としては、次に説明する方法が提案されている。
2. Description of the Related Art Conventionally, the following method has been proposed as a method for manufacturing a composite optical component in which a cured product of a photocurable resin or a thermosetting resin is integrally molded on a glass substrate.

【0003】(イ)ガラス基板の表面をシランカップリ
ング材で処理することによって有機化合物に対して活性
化しておき、このガラス基板と所望の形状をもつ型とを
透明な有機高分子の半重合物を介して重ね合わせたの
ち、前記有機高分子の半重合物を重合させる方法(特開
昭54−6006号公報参照)。
(A) The surface of the glass substrate is activated with respect to an organic compound by treating it with a silane coupling agent, and the glass substrate and a mold having a desired shape are semi-polymerized with a transparent organic polymer. A method of polymerizing a semi-polymerized product of the above-mentioned organic polymer after superposing them through the materials (see JP-A-54-6006).

【0004】(ロ)レンズ基材の表面に液状の活性エネ
ルギー線硬化型樹脂を供給したのち、前記活性エネルギ
ー線硬化型樹脂側から非球面型体にて型締し、ついで活
性エネルギー線の照射によって前記活性エネルギー線硬
化型樹脂を硬化させたのち離型する成形工程を少なくと
も2回繰返す方法(特開平1−171932号公報参
照)。
(B) After supplying liquid active energy ray-curable resin to the surface of the lens substrate, the active energy ray-curable resin side is clamped with an aspherical body, and then the active energy ray is irradiated. A method of repeating the molding step of curing the active energy ray-curable resin and then releasing the resin at least twice (see JP-A-1-171923).

【0005】[0005]

【発明が解決しようとする課題】しかし上記従来の技術
のうち(イ)は、基板に対して有機高分子層の厚み偏差
の大きいもの、例えば中心厚みが100μ以上、外径が
0.2〜数mm程度のマイクロレンズを成形する場合等
においては、有機高分子の硬化収縮に起因する体積収縮
によって、ヒケ、歪み、気泡混入等の成形不良が発生す
るという問題点がある。
However, among the above-mentioned conventional techniques, (a) is one in which the thickness deviation of the organic polymer layer with respect to the substrate is large, for example, the center thickness is 100 μm or more, and the outer diameter is 0.2 to. In the case of molding a microlens of about several mm, there is a problem that molding shrinkage such as sink mark, distortion, and inclusion of air bubbles occurs due to volume shrinkage due to curing shrinkage of the organic polymer.

【0006】また、(ロ)は、上述した(イ)の有する
体積収縮に起因する成形不良は発生しなくなるものの、
上述のような成形工程を少なくとも2回繰返し行う必要
があるため、成形に長時間かかるとともに、高価な非球
面型体の使用頻度が高いために非球面型体1個当たりの
成形可能数量が少なくなるので、製造コストが高くなる
という問題点がある。
In addition, in (b), although molding defects due to the volume contraction of (a) described above do not occur,
Since it is necessary to repeat the above-mentioned molding process at least twice, it takes a long time to mold, and the number of moldings per aspherical mold is small due to the high frequency of use of expensive aspherical molds. Therefore, there is a problem that the manufacturing cost becomes high.

【0007】本発明は、上記従来の技術の有する問題点
に鑑みてなされたものであって、基板に一体成形された
反応硬化型樹脂成形物に硬化収縮に起因するヒケ、歪
み、気泡混入等の成形不良が発生しない高精度な複合型
精密成形品の製造方法およびその成形型を実現すること
を目的とするものである。
The present invention has been made in view of the above-mentioned problems of the prior art. The reaction-curable resin molded product integrally molded on the substrate has sink marks, distortions, air bubbles, etc. due to curing shrinkage. It is an object of the present invention to provide a method for producing a highly precise composite precision molded article that does not cause defective molding and a molding die thereof.

【0008】[0008]

【課題を解決するための手段】上記目的を達成するため
に、本発明の複合型精密成形品の製造方法は、基板に反
応硬化型樹脂成形物を一体成形する複合型精密成形品の
製造方法であって、前記反応硬化型樹脂成形物の形状に
対して反転した形状のキャビティ部を設けた成形型を用
い、前記成形型のキャビティ部が設けられた面の周辺部
近傍に柔軟性をもつ微粒子を載置する工程の前または後
に、前記キャビティ部に反応硬化型液状樹脂を充填し、
そののち前記反応硬化型液状樹脂上に基板を重ね合わせ
てこれを覆い、ついで前記反応硬化型液状樹脂を硬化さ
せることによって周辺部近傍に前記微粒子が埋込成形さ
れた反応硬化型樹脂成形物を基板に一体成形したのち、
これを前記成形型から離型することを特徴とするもので
ある。
In order to achieve the above object, a method for producing a composite precision molded article according to the present invention is a method for producing a composite precision molded article in which a reaction-curable resin molded article is integrally molded on a substrate. And using a molding die having a cavity portion having a shape that is the inverse of the shape of the reaction-curable resin molding, and having flexibility near the periphery of the surface of the molding die on which the cavity portion is provided. Before or after the step of placing the fine particles, the cavity is filled with a reaction curable liquid resin,
After that, a substrate is overlaid on the reaction-curable liquid resin to cover it, and then the reaction-curable liquid resin is cured to form a reaction-curable resin molded product in which the fine particles are embedded and molded in the vicinity of the peripheral portion. After integrally molding on the board,
It is characterized in that this is released from the molding die.

【0009】また、上記製造方法において、離型後、基
板に一体成形された反応硬化型樹脂成形物の周辺部近傍
の柔軟性をもつ微粒子が埋込成形されている部分を基板
とともに切除するものである。
Further, in the above-mentioned manufacturing method, after the mold is released, the portion of the reaction-curable resin molded product integrally molded with the substrate, in which the flexible fine particles are embedded and molded, is cut off together with the substrate. Is.

【0010】さらに、柔軟性をもつ微粒子は、弾性率が
1×105 kg/cm2 以下の材料からなるものとした
り、粒径1乃至1000μの略球状粒子とすると効果的
である。
Further, it is effective that the fine particles having flexibility are made of a material having an elastic modulus of 1 × 10 5 kg / cm 2 or less, or substantially spherical particles having a particle size of 1 to 1000 μm.

【0011】上記複合型精密成形品の製造方法の実施に
用いる複合型精密成形品の成形型は、基板に反応硬化型
樹脂成形物を一体成形する複合型精密成形品の製造に用
いる成形型であって、前記反応硬化型樹脂成形物の形状
に対して反転した形状のキャビティ部と、前記キャビテ
ィ部が設けられた面の周辺部近傍に載置される柔軟性を
もつ微粒子の位置を固定保持するための前記微粒子の粒
径よりも小さい高さの突起部を突設したことを特徴とす
るものである。
The molding die of the composite precision molding used for carrying out the method for manufacturing the composite precision molding is the molding die used for manufacturing the composite precision molding in which the reaction-curable resin molding is integrally molded on the substrate. The shape of the reaction-curable resin molded product is inverted with respect to the cavity, and the position of the flexible particles placed near the periphery of the surface on which the cavity is provided is fixed and held. In order to achieve this, a protrusion having a height smaller than the particle diameter of the fine particles is provided so as to project.

【0012】[0012]

【作用】反応硬化型樹脂成形物の周辺部近傍に埋込成形
される柔軟性を有する微粒子が、反応硬化型樹脂の硬化
収縮に起因する体積収縮量に見合って変形して、基板と
成形型とが接近するため、ヒケ、歪み、気泡混入等の成
形不良が発生しない。
[Function] The flexible fine particles to be embedded and molded in the vicinity of the peripheral portion of the reaction-curable resin molded product are deformed corresponding to the volume shrinkage amount caused by the curing shrinkage of the reaction-curable resin, and the substrate and the molding die. Since and are close to each other, molding defects such as sink marks, distortion, and inclusion of bubbles do not occur.

【0013】[0013]

【実施例】本発明の実施例を図面に基づいて説明する。Embodiments of the present invention will be described with reference to the drawings.

【0014】図1は、複合型精密成形品の製造方法の第
1実施例の各工程を示す説明図である。
FIG. 1 is an explanatory view showing each step of the first embodiment of the method for producing a composite precision molded product.

【0015】工程の説明の前に使用する成形型について
説明すると、図1に示すように、型10はガラス、金
属、プラスチック等からなるものであって、複合型精密
成形品であるマイクロレンズ1の形状に対して反転した
形状のキャビティ部11を有し、このキャビティ部11
は研磨や切削加工等により所定の光学面精度に仕上げら
れている。
Before describing the steps, the molding die used will be described. As shown in FIG. 1, the die 10 is made of glass, metal, plastic, or the like, and is a microlens 1 which is a composite precision molding. Has a cavity portion 11 having an inverted shape with respect to the shape of
Is finished to a predetermined optical surface accuracy by polishing, cutting, or the like.

【0016】 図1の(a)に示すように、型10の
キャビティ部11を囲む周辺部の4隅近傍に柔軟性をも
つ微粒子4を少量載置する。
As shown in FIG. 1A, a small amount of flexible fine particles 4 is placed in the vicinity of the four corners of the peripheral portion surrounding the cavity 11 of the mold 10.

【0017】 そののち、図1の(b)に示すよう
に、キャビティ部11およびそのまわりに紫外線硬化型
の反応硬化型液状樹脂12を柔軟性をもつ微粒子4に接
するようにディスペンサー等を用いて充填する。
After that, as shown in FIG. 1B, a dispenser or the like is used so that the ultraviolet curable reaction curable liquid resin 12 is in contact with the cavity 11 and the periphery thereof to the flexible fine particles 4. Fill.

【0018】 ついで図1の(c)に示すように、透
明なガラス製の基板3を紫外線硬化型の前記反応硬化型
液状樹脂12の図示上面を覆うように重ね合わせたの
ち、紫外線13を照射して前記反応硬化型液状樹脂12
を硬化させて、周辺部近傍に柔軟性をもつ微粒子4が埋
込成形された反応硬化型樹脂成形物2を基板3に一体成
形する。このとき、前記反応硬化型樹脂成形物2には硬
化収縮が起るが、前記柔軟性をもつ微粒子4がスペーサ
の如く作用するため、図4に示すように、基板3と型1
0とによって押圧されて変形し、前記硬化収縮による体
積収縮量に見合う距離だけ基板3と型10とが接近す
る。このため、前記反応硬化型樹脂成形物2にヒケ等の
成形不良が発生しない。
Then, as shown in FIG. 1 (c), a transparent glass substrate 3 is superposed so as to cover the upper surface of the ultraviolet curable reaction-curable liquid resin 12 shown in the figure, and then ultraviolet rays 13 are irradiated. Then, the reaction-curable liquid resin 12
Is cured, and the reaction-curable resin molded product 2 in which the fine particles 4 having flexibility are embedded and molded in the vicinity of the peripheral portion is integrally molded on the substrate 3. At this time, curing shrinkage occurs in the reaction-curable resin molded product 2, but since the fine particles 4 having flexibility act as spacers, as shown in FIG.
It is pressed by 0 and deforms, and the substrate 3 and the mold 10 are brought close to each other by a distance commensurate with the volume contraction amount due to the curing contraction. Therefore, molding defects such as sink marks do not occur in the reaction-curable resin molded product 2.

【0019】 上記の工程後、前記反応硬化型樹脂
成形物2が完全に硬化したら、型10から離型して図1
の(d)に示すマイクロレンズ1を得る。
After the above-mentioned steps, when the reaction-curable resin molded product 2 is completely cured, it is released from the mold 10 and the mold is removed.
The microlens 1 shown in (d) is obtained.

【0020】 さらに場合によっては、の工程後、
反応硬化型樹脂成形物2の周辺部近傍の前記微粒子4が
埋込成形されている部分を基板3とともに切除すると、
図1の(e)に示すような外観良好なマイクロレンズ1
aを得ることができる。
Further, in some cases, after the step of
When the portion in which the fine particles 4 are embedded and formed in the vicinity of the peripheral portion of the reaction-curable resin molded product 2 is cut out together with the substrate 3,
A microlens 1 having a good appearance as shown in FIG.
a can be obtained.

【0021】次に上記製造方法の第2実施例について説
明する。
Next, a second embodiment of the above manufacturing method will be described.

【0022】本変形例は、上記図1に示す製造方法の各
工程中の上記の工程と上記の工程とを逆に行うもの
であって、図2の(a)に示すように、型20のキャビ
テイ部21およびその周辺部に紫外線硬化型の液状の反
応硬化型液状樹脂22を充填したのち、図2の(b)に
示すように、キャビティ部21の周辺部の前記反応硬化
型樹脂22の周辺部の4隅に接するように微粒子4を載
置する点が異なるのみであって、その後の図2の(c)
乃至(e)に示す工程は、上記ないしの工程と同様
であるので説明は省略する。
In this modification, the above steps and the above steps in each step of the manufacturing method shown in FIG. 1 are performed in reverse, and as shown in FIG. After filling the cavity portion 21 and its peripheral portion with an ultraviolet curable liquid reaction curable liquid resin 22, as shown in FIG. 2B, the reaction curable resin 22 in the peripheral portion of the cavity portion 21 is filled. 2c, except that the fine particles 4 are placed so as to be in contact with the four corners of the peripheral portion of FIG.
The steps shown in (e) to (e) are the same as the steps described above, and thus the description thereof is omitted.

【0023】本発明において、柔軟性を有する微粒子
は、種々の公知の無機材料、有機材料が使用できる。
In the present invention, as the fine particles having flexibility, various known inorganic materials and organic materials can be used.

【0024】その柔軟性は指標として弾性率(E)を用
いた場合、1×105 kg/cm2以下が好ましく、
0.5×105 kg/cm2 以下がより好ましい。該弾
性率の試験方法としては、規格化された方法、たとえば
ASTM規格のD638、D743、D747(「プラ
スチックハンドブック」1969年朝倉書店p.669
〜679参照)等を適宜用いる。
When the elastic modulus (E) is used as an index, the flexibility is preferably 1 × 10 5 kg / cm 2 or less,
It is more preferably 0.5 × 10 5 kg / cm 2 or less. The elastic modulus test method is a standardized method, for example, ASTM standards D638, D743, and D747 ("Plastic Handbook" 1969, Asakura Shoten, p. 669).
~ 679) etc. are used appropriately.

【0025】弾性率が1×105 kg/cm2 以上であ
れば、後述する硬化収縮による体積収縮量を柔軟性をも
つ微粒子により吸収する効果が薄れ、結果として転写不
良などの成形不良が生じる。弾性率が1×105 kg/
cm2 以下の柔軟性をもつ微粒子の材料としては公知の
合成高分子材料が好適に用いられる。
When the elastic modulus is 1 × 10 5 kg / cm 2 or more, the effect of absorbing the volumetric shrinkage due to curing shrinkage, which will be described later, by the fine particles having flexibility is weakened, resulting in defective molding such as transfer failure. . Elastic modulus is 1 × 10 5 kg /
A known synthetic polymer material is preferably used as the material of the fine particles having a flexibility of cm 2 or less.

【0026】合成高分子材料としては、例えば、スチレ
ン、塩化ビニル、アクリロニトリル、酢酸ビニル、アク
リル酸エステル類、メタクリル酸エステル類などのビニ
ル系モノマーの単一重合体及び/または共重合体、スチ
レン−ブタジエン共重合体、メチルメタクリレート−ブ
タジエン共重合体などのブタジエン系共重合体、ポリエ
チレンやポリプロピレンなどのオレフィン系樹脂、ポリ
アミド、ポリカーボネート、ポリテトラフルオロエチレ
ン、シリコン樹脂などの熱可塑性樹脂や、フェノール樹
脂、エポキシ樹脂、ウレタン樹脂等の熱硬化性樹脂、ブ
タジエンゴム、ニトリルゴム、アクリルゴム、シリコン
ゴム等のエラストマー樹脂があげられ、また上述の代表
的な樹脂の弾性率は公知である。
Examples of the synthetic polymer material include homopolymers and / or copolymers of vinyl monomers such as styrene, vinyl chloride, acrylonitrile, vinyl acetate, acrylic acid esters, methacrylic acid esters, and styrene-butadiene. Copolymers, butadiene-based copolymers such as methylmethacrylate-butadiene copolymer, olefin-based resins such as polyethylene and polypropylene, thermoplastic resins such as polyamide, polycarbonate, polytetrafluoroethylene and silicone resin, phenolic resins, epoxies Examples thereof include thermosetting resins such as resins and urethane resins, and elastomer resins such as butadiene rubber, nitrile rubber, acrylic rubber, and silicone rubber, and the elastic moduli of the above-mentioned representative resins are known.

【0027】形状としては、球、だ円球、立方体、直方
体、円すい、異形状等いかなるものでもよいが球形状が
寸法精度がよく、また寸法精度がそろっているものが容
易に入手しやすい。
The shape may be any shape such as a sphere, an ellipsoid, a cube, a rectangular parallelepiped, a cone, and an irregular shape, but the spherical shape has high dimensional accuracy, and those having uniform dimensional accuracy are easily available.

【0028】大きさとしては、例えば略球状粒子の場
合、粒径1〜1000μm程度が成形精度を保つために
好ましい。すなわち、1μm以下では反応硬化型樹脂の
層が薄くなり過ぎるため、後述する硬化収縮に起因する
体積収縮を吸収しきれず、成形不良が生じ、1000μ
m以上では反応硬化型樹脂の絶対量が大きくなり、それ
に伴い収縮体積の絶対量も大きくなり微粒子による吸収
効果が薄れる。好ましくは粒径10〜500μmがよ
い。
Regarding the size, for example, in the case of substantially spherical particles, a particle size of about 1 to 1000 μm is preferable in order to maintain molding accuracy. That is, when the thickness is 1 μm or less, the layer of the reaction-curable resin becomes too thin, so that the volume shrinkage due to the curing shrinkage, which will be described later, cannot be completely absorbed, resulting in defective molding.
When it is m or more, the absolute amount of the reaction-curable resin becomes large, and accordingly, the absolute amount of shrinkage volume also becomes large, and the absorption effect of the fine particles is weakened. The particle size is preferably 10 to 500 μm.

【0029】さらに、柔軟性をもつ微粒子と反応硬化型
樹脂成形物の屈折率が等しい材料を選択すれば外観が良
好となる。
Further, the appearance can be improved by selecting a material having the same refractive index as the fine particles having flexibility and the reaction-curable resin molded product.

【0030】反応硬化型液状樹脂としては、紫外線硬化
型液状樹脂やこれ以外に、熱硬化型または常温硬化型の
エポキシ樹脂シリコン樹脂、ポリエステル、ポリウレタ
ン等を用い、紫外線以外の活性エネルギー線、たとえば
赤外線、可視光線、電子線、X線等を用いてもよい。樹
脂材料としてはウレタンアクリレート、エポキシアクリ
レート、ポリエステルアクリレート、ポリエーテルアク
リレート等のアクリル系モノマーや、エポキシ、シリコ
ン、ポリエステル、ウレタン系モノマーなどに光開始剤
を混合した、単一組成物あるいは数種のモノマーをブレ
ンドした混合組成物があげられる。
As the reaction-curable liquid resin, an ultraviolet-curable liquid resin or a heat-curable or room-temperature-curable epoxy resin silicone resin, polyester, polyurethane or the like is used, and active energy rays other than ultraviolet rays such as infrared rays are used. Alternatively, visible light, electron beams, X-rays, etc. may be used. As the resin material, acrylic monomer such as urethane acrylate, epoxy acrylate, polyester acrylate, and polyether acrylate, and a single composition or several kinds of monomers in which a photoinitiator is mixed with epoxy, silicon, polyester, urethane monomer and the like. A mixed composition obtained by blending

【0031】また、基板としては、ガラス板、金属板、
プラスチック板等を用いることができる。
As the substrate, a glass plate, a metal plate,
A plastic plate or the like can be used.

【0032】柔軟性をもつ微粒子を載置するための供給
方法としては、ピンセットに保持して供給する方法、ホ
ッパーの落下口より落下させる方法、ノズルよりエアー
とともに流出する方法がある。またこれらの方法に代え
て、図3に示すように、上述したディスペンサーとは別
の第2のディスペンサー100を用いて、予め反応硬化
型液状樹脂に柔軟性をもつ微粒子4を混入した混合物を
滴下する方法を採用すると微粒子4の取扱いが簡便とな
る。
As a supplying method for placing the fine particles having flexibility, there are a method of holding and supplying the fine particles with tweezers, a method of dropping from a drop opening of a hopper, and a method of flowing out together with air from a nozzle. As an alternative to these methods, as shown in FIG. 3, a second dispenser 100 different from the above-mentioned dispenser is used to drop a mixture of reaction-curing liquid resin and fine particles 4 having flexibility in advance. By adopting this method, handling of the fine particles 4 becomes simple.

【0033】さらに、柔軟性をもつ微粒子を載置する位
置は、型のキャビティ部が形成された面上の少なくとも
キャビティを中心とした対角線上の2箇所、またはそれ
以上の数箇所であればよく、好ましくは図1のように4
箇所程度であれば基板を覆いかぶせたとき、基板の傾き
が発生せず反応硬化型液状樹脂層の厚みが均一になるの
で好ましい。
Further, the flexible fine particles may be placed at two positions on the surface of the mold on which the cavity is formed, at least on a diagonal line centered on the cavity, or at several positions. , Preferably 4 as in FIG.
It is preferable that the number of positions is such that when the substrate is covered, the inclination of the substrate does not occur and the thickness of the reaction-curable liquid resin layer becomes uniform.

【0034】ここで、本発明に係る複合型精密成形品の
成形型の変形例について説明する。
Here, a modified example of the molding die of the composite precision molding according to the present invention will be described.

【0035】図5の(a)に示す型200のキャビティ
部201が形成された面の周辺部近傍に柔軟性をもつ微
粒子4の粒径よりも小さい高さの山形の突起部200a
を突設したもの、図5の(b)に示す型300のキャビ
ティ部301が形成された面の周辺部近傍に間隔をおい
て突設された柔軟性をもつ微粒子4の粒径よりも小さい
高さの一対の上面が平らな突起部300a,300bを
設けたもの、図5の(c)に示す型400のキャビティ
部401が形成された面の周辺部近傍に柔軟性をもつ微
粒子4の粒径よりも小さい高さの上面が平らな突起部4
00aを設けたものがあり、これら突起部200a,3
00a,300b,400aは、柔軟性をもつ微粒子4
を載置すべき部位にそれぞれ設けておくことで、前記微
粒子4を正確に固定保持することができる。
A mountain-shaped protrusion 200a having a height smaller than the particle size of the fine particles 4 having flexibility near the periphery of the surface of the mold 200 shown in FIG. 5A where the cavity 201 is formed.
Smaller than the particle size of the flexible fine particles 4 projecting at intervals in the vicinity of the peripheral portion of the surface of the mold 300 in which the cavity portion 301 is formed as shown in FIG. 5B. The protrusions 300a and 300b having a pair of flat upper surfaces are provided, and the flexible fine particles 4 are formed in the vicinity of the periphery of the surface of the mold 400 shown in FIG. Projection 4 with a flat upper surface that is smaller than the particle size
00a is provided, and these protrusions 200a, 3
00a, 300b, 400a are fine particles 4 having flexibility.
The fine particles 4 can be accurately fixed and held by arranging each of them on the portion to be mounted.

【0036】本発明に係る複合型成形品としては、上記
各実施例のマイクロレンズ以外に、図6の(a)に示す
基板33に凹凸の繰返し形状をもつ反応硬化型樹脂成形
物32を一体成形した回折格子31、図6の(b)に示
す基板43に山形の繰返し形状をもつ反応硬化型樹脂成
形物42を一体成形したブレーズド格子41、図6の
(c)に示す基板53に多数の半球状の突出部をもつ反
応硬化型樹脂成形物52を一体成形したレンズアレー5
1がある。
As the composite type molded article according to the present invention, in addition to the microlenses of the above-mentioned respective embodiments, a reaction-curable resin molded article 32 having a repetitive concave and convex shape is integrally formed on a substrate 33 shown in FIG. 6 (a). The molded diffraction grating 31, the blazed grating 41 integrally formed with the substrate 43 shown in FIG. 6 (b) and the reaction-curable resin molded product 42 having a mountain-shaped repeating shape, and the substrate 53 shown in FIG. Lens array 5 integrally formed with a reaction-curable resin molding 52 having a hemispherical protrusion
There is one.

【0037】またこの他に、図7の(a)に示す基板6
3に一つの山形形状をもつ反応硬化型樹脂成形物62を
一体成形した反射プリズム61、図7の(b)に示す基
板73に溝形形状をもつ反応硬化型樹脂成形物72を一
体成形したプリンタのインキノズル用溝部品71、図7
の(c)に示す基板83に一つの凹部をもつ反応硬化型
樹脂成形物82を一体成形した凹レンズ81、図7の
(d)に示す基板83の両面にそれぞれ反応硬化型樹脂
成形物82a,82bを一体成形した基板の両面に反応
硬化型樹脂成形物をもつ部品91等がある。
In addition to this, the substrate 6 shown in FIG.
In FIG. 3, a reflection prism 61 integrally formed with a reaction-curable resin molded product 62 having one chevron shape, and a reaction-curable resin molded product 72 having a groove shape are integrally molded with a substrate 73 shown in FIG. 7B. Groove component 71 for printer ink nozzle, FIG.
The concave lens 81 integrally formed with the reaction-curable resin molded product 82 having one recess on the substrate 83 shown in (c) of FIG. 7, the reaction-curable resin molded product 82a on both surfaces of the substrate 83 shown in FIG. There is a component 91 or the like having a reaction-curable resin molded product on both surfaces of a substrate integrally molded with 82b.

【0038】(実施例1)型材質をリン青銅とし、直径
1.8mm、曲率半径1.6mm、面精度がニュートン
リング1本以下の図1に示すような型を精密切削加工法
により作成した。
Example 1 Phosphor bronze was used as a mold material, and a mold having a diameter of 1.8 mm, a radius of curvature of 1.6 mm and a surface accuracy of one Newton ring or less was prepared by a precision cutting method as shown in FIG. .

【0039】次に粘度が3500cpsのウレタンアク
リレート系紫外線硬化型液状樹脂を、図2の(a)に示
すように型のキャビティ部内およびその周辺部に滴下充
填し、さらに粒径100μmのポリスチレン微粒子(D
uke社製、商品名:ポリスチレンDVB、弾性率:
3.5×104 kg/cm2 )を、図2の(b)に示す
ように周辺部近傍4箇所に10〜20個設置した。その
のち、あらかじめ表面をシランカップリング剤で前処理
されたされた透明で厚み1mmのガラス基板をその上に
覆い、照度が30mw/cm2 の紫外線を2分間照射
し、前記樹脂を硬化させた。
Next, as shown in FIG. 2 (a), a urethane acrylate-based UV-curable liquid resin having a viscosity of 3500 cps is dropped and filled in the cavity of the mold and its peripheral portion, and polystyrene fine particles having a particle diameter of 100 μm ( D
Made by uke, trade name: polystyrene DVB, elastic modulus:
As shown in FIG. 2B, 10 to 20 3.5 × 10 4 kg / cm 2 ) were installed at four locations in the vicinity of the peripheral portion. After that, a transparent glass substrate having a thickness of 1 mm, the surface of which was pretreated with a silane coupling agent, was covered thereover, and the resin was cured by irradiating with ultraviolet rays having an illuminance of 30 mw / cm 2 for 2 minutes. .

【0040】次に離型を行い、図2の(d)に示すよう
な複合型成形品であるマイクロレンズを得た。面精度を
測定したところ、ニュートン1本であり、良好な転写性
を示した。
Next, the mold was released to obtain a microlens as a composite molded product as shown in FIG. 2 (d). When the surface accuracy was measured, it was one Newton, which showed good transferability.

【0041】(実施例2)型材質をアルミニウムとし、
断面形状が200μm角、長さが10mmの図7の
(b)に示すような溝形状の反転形状をもつ型を精密切
削加工法により作成した。
(Example 2) The mold material is aluminum,
A mold having a cross-sectional shape of 200 μm square and a length of 10 mm and having an inverted shape of the groove shape as shown in FIG. 7B was prepared by the precision cutting method.

【0042】次に実施例1と同様な紫外線硬化型液状樹
脂を型のキャビティ部内およびその周辺部に滴下充填
し、さらに、架橋ポリメチルメタクリレート粒子を分級
してして得られた、平均粒径300μmの柔軟性をもつ
微粒子(弾性率:3.2×104 kg/cm2 )を、周
辺部4箇所に10〜20個設置した。あらかじめ表面を
シランカップリング剤で前処理された透明で厚み1mm
のガラス基板をその上に覆い、照度が30mw/cm2
の紫外線を2分間照射し、キャビティ内の前記樹脂を硬
化させた。
Next, an average particle diameter obtained by dropping and filling the same ultraviolet curable liquid resin as in Example 1 into the cavity of the mold and its peripheral portion and further classifying the crosslinked polymethylmethacrylate particles 10 to 20 fine particles having a flexibility of 300 μm (elastic modulus: 3.2 × 10 4 kg / cm 2 ) were installed at four peripheral portions. Transparent and pre-treated on the surface with silane coupling agent, thickness 1mm
The glass substrate of is covered on it, and the illuminance is 30 mw / cm 2
Of the ultraviolet rays for 2 minutes to cure the resin in the cavity.

【0043】次に離型を行い、図7の(b)に示すよう
な複合型成形品であるプリンタのインキノズル用溝部品
を得た。顕微鏡による表面観察により良好な転写性を示
していることがわかった。
Next, the mold is released to obtain a groove part for an ink nozzle of a printer, which is a composite molded product as shown in FIG. 7 (b). It was found from the surface observation with a microscope that the good transferability was exhibited.

【0044】(比較例1)実施例1とまったく同様な型
および紫外線硬化型液状樹脂を用い、図8の(a)のよ
うに前記樹脂502を型500のキャビティ部501内
いっぱいに滴下充填し、あらかじめ表面をシランカップ
リング剤で前処理された透明で厚み1mmのガラス基板
503で覆い、図8の(b)のように30mw/cm2
の紫外線504を2分間照射し、離型を行い、図8の
(c)のような複合型凸レンズ505を得た。レンズ面
にヒケ不良の発生が観察され、面精度を測定したとこ
ろ、ニュートン20本以上であり、転写性が悪かった。
(Comparative Example 1) The same mold and ultraviolet curable liquid resin as in Example 1 were used, and the resin 502 was dropped and filled into the cavity 501 of the mold 500 as shown in FIG. 8A. The surface is covered with a transparent glass substrate 503 having a thickness of 1 mm which is pretreated with a silane coupling agent, and 30 mw / cm 2 as shown in FIG. 8B.
Ultraviolet ray 504 of No. 2 was irradiated for 2 minutes to perform mold release, and a compound type convex lens 505 as shown in FIG. 8C was obtained. Occurrence of sink marks was observed on the lens surface, and the surface accuracy was measured. As a result, it was 20 or more Newton, and the transferability was poor.

【0045】(比較例2)実施例2とまったく同様な型
および紫外線硬化型液状樹脂を用い、これを型のキャビ
ティ部内いっぱいに滴下充填し、あらかじめ表面をシラ
ンカップリング剤で前処理された透明で厚み1mmのガ
ラス基板で覆い、30mw/cm2 の紫外線を2分間照
射し、離型を行い、図7の(b)に示すようなプリンタ
のインキノズル用溝部品を得た。顕微鏡による表面観察
により、直径0.2mm程度のヒケ不良の発生が数個観
察され、転写性が悪いことが示された。
(Comparative Example 2) The same mold and UV curable liquid resin as in Example 2 were used, and the liquid was filled dropwise into the cavity of the mold, and the surface was pretreated with a silane coupling agent. Was covered with a glass substrate having a thickness of 1 mm, irradiated with ultraviolet rays of 30 mw / cm 2 for 2 minutes, and released from the mold to obtain a groove part for an ink nozzle of a printer as shown in FIG. 7B. By observing the surface with a microscope, several defects of sink marks having a diameter of about 0.2 mm were observed, showing that the transferability was poor.

【0046】(比較例3)実施例2とまったく同様な型
および紫外線硬化型液状樹脂を用い、該樹脂を型のキャ
ビティ部内およびその周辺部に滴下充填し、さらに、ソ
ーダライムガラス粒子を分級して得られた平均粒径30
0μmの微粒子(弾性率:7.0×105kg/cm
2 )を、型周辺部4箇所に10〜20個設置した。つい
で、あらかじめ表面をシランカップリング剤で前処理さ
れた透明で厚み1mmのガラス基板で覆い、30mw/
cm2 の紫外線を2分間照射し、離型を行い、図7の
(b)に示すようなプリンタのインキノズル用溝部品を
得た。顕微鏡による表面観察により、直径0.1mm程
度のヒケ不良の発生が多数個観察され、転写性が悪いこ
とが示された。
(Comparative Example 3) The same mold and ultraviolet curable liquid resin as in Example 2 were used, and the resin was dropped and filled in and around the cavity of the mold, and soda lime glass particles were classified. Average particle size obtained by 30
Fine particles of 0 μm (elastic modulus: 7.0 × 10 5 kg / cm
2 ) were installed at 4 locations around the mold in an amount of 10 to 20 pieces. Then, the surface is covered with a transparent glass substrate having a thickness of 1 mm which has been pretreated with a silane coupling agent in advance, and 30 mw /
UV rays of cm 2 were irradiated for 2 minutes to perform mold release, and a groove part for an ink nozzle of a printer as shown in FIG. 7B was obtained. By observing the surface with a microscope, a large number of defective sink marks having a diameter of about 0.1 mm were observed, showing that the transferability was poor.

【0047】[0047]

【発明の効果】本発明によれば、成形された複合型精密
成形品には、反応硬化型樹脂の硬化収縮に起因するヒ
ケ、歪み、気泡混入等の成形不良が発生せず、良好な転
写精度を有するため、厚み変化の大きい反応硬化型樹脂
成形物をもつ複合型精密成形品であっても、精度よくし
かも簡単に製造することができる。
EFFECTS OF THE INVENTION According to the present invention, a molded composite precision molded article is free from molding defects such as sink marks, distortion, and air bubble inclusion due to curing shrinkage of the reaction-curable resin, and good transfer is achieved. Since it has accuracy, even a composite precision molded product having a reaction-curable resin molded product with a large change in thickness can be manufactured accurately and easily.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の複合型精密部品の製造方法の第1実施
例の各工程を示す説明図である。
FIG. 1 is an explanatory view showing each step of a first embodiment of a method for manufacturing a composite precision component of the present invention.

【図2】本発明の複合型精密部品の製造方法の第2実施
例の各工程を示す説明図である。
FIG. 2 is an explanatory view showing each step of the second embodiment of the method for manufacturing a composite precision component of the present invention.

【図3】柔軟性をもつ微粒子の供給方法の一例を示す説
明図である。
FIG. 3 is an explanatory diagram showing an example of a method of supplying flexible particles.

【図4】本発明における硬化収縮に対する柔軟性をもつ
微粒子の体積収縮吸収原理を示す説明図である。
FIG. 4 is an explanatory diagram showing the principle of volumetric shrinkage absorption of fine particles having flexibility with respect to curing shrinkage in the present invention.

【図5】本発明に係る成形型の変形例の主要部を示す模
式部分断面図である。
FIG. 5 is a schematic partial cross-sectional view showing a main part of a modified example of the molding die according to the present invention.

【図6】本発明に係る複合型精密部品の他の例を示す模
式断面図である。
FIG. 6 is a schematic cross-sectional view showing another example of the composite precision component according to the present invention.

【図7】本発明に係る複合型精密部品の他の例を示す模
式断面図である。
FIG. 7 is a schematic cross-sectional view showing another example of the composite precision component according to the present invention.

【図8】従来の複合型成形品の製造方法の工程を示す説
明図である。
FIG. 8 is an explanatory view showing the steps of a conventional method for manufacturing a composite-type molded product.

【符号の説明】[Explanation of symbols]

1,1a マイクロレンズ 2,32 反応硬化型樹脂成形物 3 基板 4 微粒子 10,20,200,300,400 型 11,21,201,301,401 キャビティ部 12,22 反応硬化型液状樹脂 100 第2のディスペンサ 200a,300a,300b,400a 突起部 1,1a Microlens 2,32 Reaction curable resin molded product 3 Substrate 4 Fine particles 10,20,200,300,400 Type 11,2,201,301,401 Cavity 12,22 Reaction curable liquid resin 100 Second Dispensers 200a, 300a, 300b, 400a Projections

フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 B29L 11:00 Continuation of front page (51) Int.Cl. 6 Identification code Office reference number FI technical display area B29L 11:00

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 基板に反応硬化型樹脂成形物を一体成形
する複合型精密成形品の製造方法であって、 前記反応硬化型樹脂成形物の形状に対して反転した形状
のキャビティ部を設けた成形型を用い、前記成形型のキ
ャビティ部が設けられた面の周辺部近傍に柔軟性をもつ
微粒子を載置する工程の前または後に、前記キャビティ
部に反応硬化型液状樹脂を充填し、そののち前記反応硬
化型液状樹脂上に基板を重ね合わせてこれを覆い、つい
で前記反応硬化型液状樹脂を硬化させることによって周
辺部近傍に前記微粒子が埋込成形された反応硬化型樹脂
成形物を基板に一体成形したのち、これを前記成形型か
ら離型することを特徴とする複合型精密成形品の製造方
法。
1. A method of manufacturing a composite precision molded product, wherein a reaction-curable resin molded product is integrally molded on a substrate, wherein a cavity portion having a shape inverted from the shape of the reaction-curable resin molded product is provided. Using a mold, before or after the step of placing the fine particles having flexibility in the vicinity of the peripheral portion of the surface of the mold is provided with a reaction-curable liquid resin in the cavity, After that, a substrate is placed on the reaction-curable liquid resin to cover it, and then the reaction-curable liquid resin is cured to form a reaction-curable resin molded product in which the fine particles are embedded and molded in the vicinity of the periphery. A method for producing a precision molding of a composite type, which comprises: integrally molding into a mold and then releasing the mold from the mold.
【請求項2】 柔軟性をもつ微粒子を載置する代わり
に、前記微粒子と反応硬化型液状樹脂の混合物を載置す
ることを特徴とする請求項1記載の複合型精密成形品の
製造方法。
2. The method for producing a composite precision molded article according to claim 1, wherein a mixture of the fine particles and a reaction-curable liquid resin is placed instead of placing the fine particles having flexibility.
【請求項3】 柔軟性をもつ微粒子は、弾性率が1×1
5 kg/cm2 以下の材料からなることを特徴とする
請求項1または2記載の複合型精密成形品の製造方法。
3. The elastic fine particles have a modulus of elasticity of 1 × 1.
The method for producing a composite precision molded article according to claim 1 or 2, which is made of a material having a weight of 0 5 kg / cm 2 or less.
【請求項4】 柔軟性をもつ微粒子が、粒径1乃至10
00μの略球状粒子であることを特徴する請求項1ない
し3いずれか1項記載の複合型精密成形品の製造方法。
4. The flexible fine particles have a particle size of 1 to 10.
The method for producing a composite precision molded article according to any one of claims 1 to 3, wherein the method is a substantially spherical particle having a size of 00μ.
【請求項5】 離型後、基板に一体成形された反応硬化
型樹脂成形物の周辺部近傍の柔軟性をもつ微粒子が埋込
成形されている部分を基板とともに切除することを特徴
とする請求項1ないし4いずれか1項記載の複合型精密
成形品の製造方法。
5. After releasing from the mold, a portion of the reaction-curable resin molded product integrally molded with the substrate, in which the flexible fine particles are embedded and molded, is cut off together with the substrate. Item 5. A method for producing a composite precision molded article according to any one of Items 1 to 4.
【請求項6】 基板に反応硬化型樹脂成形物を一体成形
する複合型精密成形品を製造するための成形型であっ
て、 前記反応硬化型樹脂成形物の形状に対して反転した形状
のキャビティ部と、前記キャビティ部が設けられた面の
周辺部近傍に載置される柔軟性をもつ微粒子の位置を固
定保持するための前記微粒子の粒径よりも小さい高さの
突起部を突設したことを特徴とする複合型精密成形品の
成形型。
6. A mold for producing a composite precision molded product, wherein a reaction-curable resin molded product is integrally molded on a substrate, wherein the cavity has a shape inverted from the shape of the reaction-curable resin molded product. And a projection having a height smaller than the particle size of the fine particles for fixing and holding the position of the flexible fine particles placed in the vicinity of the peripheral portion of the surface provided with the cavity portion. Molds for composite precision molded products characterized by the following.
JP20038793A 1993-07-20 1993-07-20 Method for producing composite-type precision molded product and molding die thereof Expired - Fee Related JP2844158B2 (en)

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Application Number Priority Date Filing Date Title
JP20038793A JP2844158B2 (en) 1993-07-20 1993-07-20 Method for producing composite-type precision molded product and molding die thereof

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JPH0732381A true JPH0732381A (en) 1995-02-03
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Cited By (8)

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WO1998020560A1 (en) * 1996-11-05 1998-05-14 Kureha Kagaku Kogyo Kabushiki Kaisha Plastic lidding material for solid-state image pickup element package and method for manufacturing the same
EP0932056A2 (en) * 1998-01-21 1999-07-28 Micro Optics Company Ltd. Planar microlens array and method of manufacturing same
WO2002053345A1 (en) * 2000-12-22 2002-07-11 Nippon Sheet Glass Co., Ltd. Article having predetermined surface shape and method for preparing the same
JP2006007765A (en) * 2004-05-28 2006-01-12 Asahi Rubber:Kk Manufacturing process of lens for semiconductor optical device
US7622181B2 (en) 2000-11-30 2009-11-24 Nikon Corporation Resin-cemented optical element, mold therefor, fabrication process thereof, and optical article
JP2012125946A (en) * 2010-12-13 2012-07-05 National Printing Bureau Pattern forming body and reproduction method using the same
JP2015522440A (en) * 2012-05-02 2015-08-06 ヘレーウス ノーブルライト ゲゼルシャフト ミット ベシュレンクテルハフツングHeraeus Noblelight GmbH Method for manufacturing optical module having silicone optical system, optical module and use thereof
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Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998020560A1 (en) * 1996-11-05 1998-05-14 Kureha Kagaku Kogyo Kabushiki Kaisha Plastic lidding material for solid-state image pickup element package and method for manufacturing the same
EP0932056A2 (en) * 1998-01-21 1999-07-28 Micro Optics Company Ltd. Planar microlens array and method of manufacturing same
EP0932056A3 (en) * 1998-01-21 1999-11-24 Micro Optics Company Ltd. Planar microlens array and method of manufacturing same
US6366406B1 (en) 1998-01-21 2002-04-02 Micro Optics Co., Ltd. Planar microlens array and method of manufacturing same
US7931833B2 (en) 2000-11-30 2011-04-26 Nikon Corporation Resin-cemented optical element, mold therefor, fabrication process thereof, and optical article
US7622181B2 (en) 2000-11-30 2009-11-24 Nikon Corporation Resin-cemented optical element, mold therefor, fabrication process thereof, and optical article
US6740366B2 (en) 2000-12-22 2004-05-25 Nippon Sheet Glass Co., Ltd. Article having predetermined surface shape and method for preparing the same
CN100343037C (en) * 2000-12-22 2007-10-17 日本板硝子株式会社 Article having predetermined surface shape and method for preparing the same
WO2002053345A1 (en) * 2000-12-22 2002-07-11 Nippon Sheet Glass Co., Ltd. Article having predetermined surface shape and method for preparing the same
JP2006007765A (en) * 2004-05-28 2006-01-12 Asahi Rubber:Kk Manufacturing process of lens for semiconductor optical device
JP2012125946A (en) * 2010-12-13 2012-07-05 National Printing Bureau Pattern forming body and reproduction method using the same
JP2015522440A (en) * 2012-05-02 2015-08-06 ヘレーウス ノーブルライト ゲゼルシャフト ミット ベシュレンクテルハフツングHeraeus Noblelight GmbH Method for manufacturing optical module having silicone optical system, optical module and use thereof
JP2017043104A (en) * 2012-05-02 2017-03-02 ヘレーウス ノーブルライト ゲゼルシャフト ミット ベシュレンクテル ハフツングHeraeus Noblelight GmbH Method for manufacturing optical module having silicone optical system, optical module and use thereof
US11052754B2 (en) 2018-12-15 2021-07-06 Yachiyo Industry Co., Ltd. Fuel tank

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