JPH07320673A - Ion source device - Google Patents

Abstract

PURPOSE:To obtain an ion source device, in which connection and disconnection of a current introducing conductor and a current carrying wiring can be easily performed and which can prevent the generation of accident due to the connection error, by selecting an ion source device having the specified structure. CONSTITUTION:An ion source device, which is provided with two filament current introducing conductors 3 passing through a case of an ion source, female type connectors 13 respectively fixed to the outside end of both the conductors 3, two male type connectors 14 fixed to one insulating plate 16 and to be fitted in the female type connectors 13 for installation, and filament current carrying wirings 5, is selected.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ion source device using a hot filament as a cathode.

[0002]

2. Description of the Related Art A conventional ion source device of this type is shown in FIGS. In those figures, 1
Is a main housing of the ion source device, 2 is a sub housing that is bulged in the main housing 1 and contains a hot filament, and 3 is two filament current introducing conductors that penetrate the upper wall of the sub housing 2. Yes, a filament is attached to the end of the sub-housing 2.
Reference numerals 4 are current introduction terminals attached to the ends of both conductors 3 outside the sub-housing 2.

Reference numeral 5 is a wire for introducing a filament current, 6 is a crimp terminal attached to the tip of the wire 5, 7 is a bolt for attaching the crimp terminal 6 to the current introducing terminal 4, and 8 is a sub-housing having an upper wall 9. A cover covering 2 is a through hole provided on the upper wall 9 through which the two current introducing conductors 3 are drawn out, 11 is a flange at the lower end of the cover 8, and 12 is a flange 11 attached to the main housing 1. It is a bolt.

There is also an apparatus shown in FIGS. 7 and 8. 5 and 6 are different in that the female type connectors 13 are attached to both the current introducing terminals 4, and the male type connectors 14 are attached to the crimping terminals 6 of the wiring 5 with the nuts 15. 14 is fitted in the female connector 13 and can be attached with one touch.

[0005]

In the case of the conventional apparatus shown in FIGS. 5 and 6, when it is necessary to remove the wire 5 from the current introducing conductor 3 during maintenance of the ion source, two bolts per filament are used. 7 must be removed, the ion source becomes large, and the number of filaments increases, it is necessary to remove the wiring 5 that is a multiple of that number.
There is a problem that the work is extremely complicated.

Further, in the case of the device shown in FIGS. 7 and 8, the one-touch connectors 13 and 14 are used, but it is necessary to remove two male connectors 14 per filament, which is troublesome. is there. Furthermore, both devices have the problem of inadvertent connection errors. The present invention has been made in consideration of the above points, and an object of the present invention is to provide an ion source device capable of improving work efficiency and preventing accidents due to connection errors.

[0007]

In order to solve the above-mentioned problems, the ion source device of the present invention comprises two filament current introducing conductors penetrating the housing of the ion source and outer ends of the two conductors. A fixed male connector, two male connectors fixed to one insulating plate and fitted into the female connector, and a filament current-flowing wire connected to both male connectors. It is equipped with and.

[0008]

In the ion source device of the present invention configured as described above, female type connectors are fixed to two current introducing conductors penetrating the housing, and two male type connectors are provided on one insulating plate. Since the filament current conducting wiring is connected to both male and female connectors, the pair of wirings can be connected to and disconnected from both current introducing conductors by one action, which makes attachment and detachment work extremely easy. Yes, you can prevent accidents due to incorrect connections.

Even for a plurality of filaments of a large ion source, if each male connector is fixed to one insulating plate, all wirings can be connected and disconnected at once. become.

[0010]

EXAMPLES Examples will be described with reference to FIGS. 1 to 4. In these drawings, the same reference numerals as those in FIGS. 5 to 8 indicate the same or corresponding ones. (Embodiment 1) FIG. 1 showing Embodiment 1 is different from FIGS. 7 and 8 in the following points.

The bases of a pair of male connectors 14 are inserted into the two through holes of one insulating plate 16, and both connectors 14 and the crimp terminals 6 of a pair of wires 5 are juxtaposed by a nut 15. And a pair of female connectors 14 are simultaneously fitted into and mounted on a pair of female connectors. 1
Of course, a plurality of pairs of male connectors 14 may be attached to each insulating plate 16.

(Embodiment 2) In FIGS. 2 and 3 showing Embodiment 2, instead of the insulating plate 16 and the cover 8 of Embodiment 1, an insulating plate 17 is formed by an upper lid 18 and a cylindrical body 19, A pair of male connectors 14 and a crimping terminal 6 for the wiring 5 on the upper lid 18.
Is mounted with a nut 15, and the sub-housing 2 is mounted with a cylindrical body 19.
To cover the.

In the case of this embodiment, since the insulating plate 17 serves both as the mounting portion of the male connector 14 and the cover of the sub-housing 2, the handling is easy and the working efficiency is improved.

(Embodiment 3) In FIG. 4 showing Embodiment 3, the insulating plate 16 of FIG.
It is formed by the upper lid 22 and the cylindrical body 23 having the above-mentioned structure, and the insulating plate 16 is attached to the upper lid 22 with bolts 24.

[0015]

Since the present invention is configured as described above, it has the following effects. In the ion source device of the present invention, female type connectors 13 are fixed to two current introducing conductors 3 penetrating the housing, and one female insulating plate 16 has two female connectors.
Since each male type connector 14 is fixed and the filament current conducting wiring 5 is connected to each of the male type connectors 14, the pair of wirings 5 is connected to both the current introducing conductors 3 by one action and is also disconnected. It is possible to perform the attachment and detachment work very easily and prevent accidents due to incorrect connection. Further, even if a plurality of filaments of a large-sized ion source are fixed to one insulating plate 14, each male connector 14 is connected and disconnected between all the wirings 5 and the current introducing conductors 3. Can be done once.

[Brief description of drawings]

FIG. 1 is an exploded cutaway front view of a first embodiment of the present invention.

FIG. 2 is an exploded cut front view of a second embodiment of the present invention.

FIG. 3 is a cutaway front view of the connection state of FIG.

FIG. 4 is a cut front view of a third embodiment of the present invention.

FIG. 5 is a cut front view of a conventional example.

FIG. 6 is a plan view of FIG.

FIG. 7 is an exploded cutaway front view of another conventional example.

FIG. 8 is a plan view of FIG.

[Explanation of symbols]

 3 Current introducing conductor 5 Current flow wiring 13 Female connector 14 Male connector 16 Insulation plate

Claims (1)

[Claims] 1. A two filament current introducing conductors penetrating a casing of an ion source, a female connector fixed to the outer ends of the two conductors, and a female connector fixed to one insulating plate. An ion source device comprising two male connectors fitted into and mounted on the connectors, and a filament current conducting wire connected to the male connectors.