JPH07320262A - Device for producing magnetic recording medium - Google Patents

Device for producing magnetic recording medium

Info

Publication number
JPH07320262A
JPH07320262A JP6108798A JP10879894A JPH07320262A JP H07320262 A JPH07320262 A JP H07320262A JP 6108798 A JP6108798 A JP 6108798A JP 10879894 A JP10879894 A JP 10879894A JP H07320262 A JPH07320262 A JP H07320262A
Authority
JP
Japan
Prior art keywords
lubricant
film
recording medium
magnetic
vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6108798A
Other languages
Japanese (ja)
Inventor
Noriyuki Kitaori
典之 北折
Osamu Yoshida
修 吉田
Hirohide Mizunoya
博英 水野谷
Shigemi Wakabayashi
繁美 若林
Akira Shiga
章 志賀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kao Corp
Original Assignee
Kao Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kao Corp filed Critical Kao Corp
Priority to JP6108798A priority Critical patent/JPH07320262A/en
Publication of JPH07320262A publication Critical patent/JPH07320262A/en
Pending legal-status Critical Current

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  • Coating Apparatus (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To simplify a producing process, to reduce the cost and to obtain a high quality magnetic recording medium by disposing a vacuum vessel, a spongy roll and a lubricant feeding means around a lubricant applying means. CONSTITUTION:A 1st vacuum vessel A and a 2nd vacuum vessel B communicate with each other through a path and the vessel B and a 3rd vacuum vessel C communicate with each other through a path. A metallic magnetic film is first formed on a PET film 1 as a substrate by a diagonal vapor depositing means in the vessel A. A protective film of glassy carbon is formed on the magnetic film by CVD in the vessel B. The film 1 is then allowed to run into the vessel C under evacuation and brought into contact with a heating roll 2. A lubricant soln. is applied to the protective film on the film 1 with an applying device 3.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、磁気記録媒体の製造装
置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium manufacturing apparatus.

【0002】[0002]

【発明の背景】磁気テープ等の磁気記録媒体において
は、高密度記録化の要請から、非磁性支持体上に設けら
れる磁性層として、バインダ樹脂を用いた塗布型のもの
ではなく、バインダ樹脂を用いない金属薄膜型のものが
提案されている。すなわち、真空蒸着、スパッタリング
あるいはイオンプレーティングといった乾式メッキ手段
により磁性層を構成した磁気記録媒体が提案されている
ことは周知の通りである。そして、この種の磁気記録媒
体は磁性体の充填密度が高いことから、高密度記録に適
したものである。
BACKGROUND OF THE INVENTION In a magnetic recording medium such as a magnetic tape, due to a demand for high density recording, a binder resin is not used as a magnetic layer provided on a non-magnetic support, instead of a coating type using a binder resin. A metal thin film type that is not used has been proposed. That is, it is well known that a magnetic recording medium having a magnetic layer formed by a dry plating means such as vacuum deposition, sputtering or ion plating has been proposed. Since the magnetic recording medium of this type has a high packing density of magnetic material, it is suitable for high-density recording.

【0003】ところで、この種の金属薄膜型の磁気記録
媒体にあっても、走行性の観点から表面に潤滑剤が塗布
されている。そして、これまでにあっては、真空槽から
一端取り出し、塗布型の磁気記録媒体の磁性塗料の塗布
に際して用いられていた塗布手段と同様な手段、例えば
ダイ塗工やグラビア塗工による手段が採用されて潤滑剤
が塗布されている。
Incidentally, even in this kind of metal thin film type magnetic recording medium, a lubricant is applied to the surface from the viewpoint of running property. Then, until now, the same means as the coating means used for applying the magnetic coating material to the coating type magnetic recording medium, for example, die coating or gravure coating, has been adopted. Then, the lubricant is applied.

【0004】しかしながら、上記のような潤滑剤塗布手
段は、磁性層の形成が真空槽内で行われる一方、潤滑剤
の塗布は大気中で行われているものであるから、製造工
程が複雑で、煩瑣なものとなり、コストが高く付いてい
ることが次第に判って来た。かつ、大気中に取り出して
潤滑剤の塗布を行う方式は、潤滑剤が塗布されるまでの
間に大気中の湿気(水分)が金属磁性膜に付着し、これ
による耐久性の劣化の心配がある。更には、水分が金属
磁性膜に付着していると、潤滑剤が均一に付き難く、
又、のりも悪いことが判って来た。
However, in the above lubricant applying means, the formation of the magnetic layer is performed in the vacuum chamber, while the application of the lubricant is performed in the atmosphere, so that the manufacturing process is complicated. However, it gradually became clear that it was complicated and costly. In addition, in the method of applying lubricant after taking it out into the atmosphere, moisture (moisture) in the atmosphere may adhere to the metal magnetic film before the lubricant is applied, which may cause deterioration of durability. is there. Furthermore, if water adheres to the metal magnetic film, it is difficult to evenly attach the lubricant,
Also, it has become clear that the glue is bad.

【0005】[0005]

【発明の開示】前記の問題点についての検討が鋭意押し
進められて行った結果、潤滑剤の塗布も真空槽内で行わ
れるようにすれば、磁性層の形成に引き続いて潤滑剤の
塗布を連続して実施できるようになり、製造工程をそれ
だけ簡略化でき、コストの低廉化が図れ、更には耐久性
の低下や潤滑剤の付着度やのりの問題点も解決されるで
あろうとの啓示を得るに至った。
DISCLOSURE OF THE INVENTION As a result of intensive investigations on the above problems, if the lubricant is applied in a vacuum chamber, the lubricant is applied continuously after the formation of the magnetic layer. Reminder that the manufacturing process can be simplified, the cost can be reduced, and the problems such as lower durability and lubricant adhesion and glue will be solved. I got it.

【0006】このような観点から本発明が達成されたも
のであり、本発明の目的は、製造工程が簡略化でき、コ
ストの低廉化が図れ、更には高品質な磁気記録媒体を提
供することである。この本発明の目的は、真空雰囲気下
において支持体上に金属薄膜を設ける手段と、真空雰囲
気下において前記金属薄膜上に潤滑剤を塗布する手段と
を有する磁気記録媒体の製造装置であって、前記潤滑剤
塗布手段は、真空槽と、この真空槽に配設された海面状
ロール体と、この海面状ロール体に潤滑剤を供給する潤
滑剤供給手段とを具備することを特徴とする磁気記録媒
体の製造装置によって達成される。
The present invention has been achieved from such a viewpoint, and an object of the present invention is to provide a high-quality magnetic recording medium which can simplify the manufacturing process, can reduce the cost. Is. An object of the present invention is a magnetic recording medium manufacturing apparatus having means for providing a metal thin film on a support in a vacuum atmosphere, and means for applying a lubricant on the metal thin film in a vacuum atmosphere, The lubricant applying means includes a vacuum tank, a sea surface roll body arranged in the vacuum tank, and a lubricant supply means for supplying a lubricant to the sea surface roll body. This is achieved by an apparatus for manufacturing a recording medium.

【0007】尚、海面状ロール体に対して膜厚制御用ロ
ールが更に設けられてなるものが好ましい。本発明の磁
気記録媒体における支持体は、例えば非磁性のものであ
り、この支持体はPET等のポリエステル、ポリアミ
ド、ポリイミド、ポリスルフォン、ポリカーボネート、
ポリプロピレン等のオレフィン系の樹脂、セルロース系
の樹脂、塩化ビニル系の樹脂といった高分子材料、ガラ
スやセラミック等の無機系材料が用いられる。
It is preferable that the sea surface roll body is further provided with a film thickness control roll. The support in the magnetic recording medium of the present invention is, for example, a non-magnetic support, and the support is polyester such as PET, polyamide, polyimide, polysulfone, polycarbonate,
An olefin resin such as polypropylene, a cellulose resin, a polymer material such as a vinyl chloride resin, or an inorganic material such as glass or ceramic is used.

【0008】そして、この支持体の一面側には、蒸着手
段やスパッタ手段といった乾式メッキ手段によって金属
薄膜型の磁性膜が設けられる。金属磁性膜を構成する磁
性粒子の材料としては、例えばFe,Co,Ni等の金
属の他に、Co−Ni合金、Co−Pt合金、Co−N
i−Pt合金、Fe−Co合金、Fe−Ni合金、Fe
−Co−Ni合金、Fe−Co−B合金、Co−Ni−
Fe−B合金、Co−Cr合金、あるいはこれらにAl
等の金属を含有させたもの等が用いられる。尚、金属磁
性膜の成膜時には酸化性ガスなどが供されていて、金属
磁性膜の表面層には酸化膜からなる保護層が形成される
ことが好ましい。
A metal thin film type magnetic film is provided on one surface side of the support by dry plating means such as vapor deposition means and sputtering means. Examples of the material of the magnetic particles that form the metal magnetic film include metals such as Fe, Co, and Ni, as well as Co—Ni alloys, Co—Pt alloys, and Co—N.
i-Pt alloy, Fe-Co alloy, Fe-Ni alloy, Fe
-Co-Ni alloy, Fe-Co-B alloy, Co-Ni-
Fe-B alloy, Co-Cr alloy, or Al in these
Those containing a metal such as are used. Incidentally, it is preferable that an oxidizing gas or the like is supplied at the time of forming the metal magnetic film, and a protective layer made of an oxide film is formed on the surface layer of the metal magnetic film.

【0009】更に、この金属磁性膜上に、必要に応じて
カーボン膜と言った保護膜が設けられる。支持体の他面
側にはバックコート膜が蒸着手段のような乾式メッキ手
段で設けられる。このバックコート膜を構成する金属粒
子の材料としては、例えばAl,Zn,Sn,Ni,A
g,Fe,Tiなどの金属が用いられる。又、Cu−A
l−X(但し、XはMn,Fe,Niの群の中から選ば
れる一つ、若しくは二つ以上)系合金、Al−Si系合
金、Ti合金等が用いられる。尚、Cu−Al−X(但
し、XはMn,Fe,Niの群の中から選ばれる一つ、
若しくは二つ以上)系合金におけるCu含有量は70〜
90at%、Al含有量は8〜25at%、Mn含有量
が0〜4at%で、Fe含有量が0〜5at%で、Ni
含有量が0〜4at%であることが好ましい。又、Al
−Si系合金におけるAl含有量は15〜70at%、
Si含有量が15〜70at%であることが好ましい。
このバックコート膜の成膜時にはO元素、N元素あるい
はC元素などの成分を有する反応性ガスなどが供されて
いて、金属薄膜は酸化物、窒化物あるいは炭化物に一部
が変成される。
Further, a protective film such as a carbon film is provided on the metal magnetic film, if necessary. A back coat film is provided on the other surface side of the support by dry plating means such as vapor deposition means. Examples of the material of the metal particles forming the back coat film include Al, Zn, Sn, Ni, A
Metals such as g, Fe and Ti are used. Also, Cu-A
1-X (where X is one or more selected from the group consisting of Mn, Fe and Ni) based alloys, Al-Si based alloys, Ti alloys and the like are used. Incidentally, Cu-Al-X (where X is one selected from the group of Mn, Fe and Ni,
(Or two or more) -based alloy has a Cu content of 70-
90 at%, Al content 8 to 25 at%, Mn content 0 to 4 at%, Fe content 0 to 5 at%, Ni
The content is preferably 0 to 4 at%. Also, Al
The Al content in the -Si alloy is 15 to 70 at%,
The Si content is preferably 15 to 70 at%.
At the time of forming the back coat film, a reactive gas having a component such as an O element, an N element or a C element is supplied, and the metal thin film is partially transformed into an oxide, a nitride or a carbide.

【0010】真空雰囲気下において支持体上に金属薄膜
(磁性膜あるいはバックコート膜)が設けられた後、こ
の金属薄膜が大気に晒される前に、真空雰囲気下におい
て金属薄膜上に潤滑剤が塗布される。この際に用いられ
る潤滑剤としては、例えば-(C(R)F-CF2-O)p - (但し、
RはF,CF3 ,CH3 などの基)、特にHOOC-CF2(O-C
2F4)p (OCF2) q -OCF2-COOH,F-(CF2CF2CF2O)n -CF2CF2
COOH と言ったようなカルボキシル基変性パーフロオロ
ポリエーテル(分子量2000〜5000)、HOCH2-CF
2(O-C2F4) p (OCF2) q-OCF2-CH2OH ,HO-(C2H4-O) m -C
H2-(O-C2F4) p (OCF2) q -OCH2-(OCH2CH2)n -OH ,F-(C
F2CF2CF2O)n -CF2CF2CH2OHと言ったようなアルコール変
性パーフロオロポリエーテル(分子量2000〜500
0)等が挙げられる。具体的には、モンテカチーニ社の
FOMBLIN Z DIACやFOMBLIN Z
DOL、ダイキン工業社のデムナムSA等がある。
After the metal thin film (magnetic film or back coat film) is provided on the support in a vacuum atmosphere and before the metal thin film is exposed to the atmosphere, a lubricant is applied to the metal thin film in a vacuum atmosphere. To be done. Examples of the lubricant used at this time include-(C (R) F-CF 2 -O) p- (however,
R is a group such as F, CF 3 and CH 3 ), especially HOOC-CF 2 (OC
2 F 4 ) p (OCF 2 ) q -OCF 2 -COOH, F- (CF 2 CF 2 CF 2 O) n -CF 2 CF 2
Carboxyl group-modified perfluoropolyether such as COOH (molecular weight 2000-5000), HOCH 2 -CF
2 (OC 2 F 4 ) p (OCF 2 ) q -OCF 2 -CH 2 OH, HO- (C 2 H 4 -O) m -C
H 2- (OC 2 F 4 ) p (OCF 2 ) q -OCH 2- (OCH 2 CH 2 ) n -OH, F- (C
F 2 CF 2 CF 2 O) n -CF 2 CF 2 CH 2 OH Alcohol-modified perfluoropolyether (molecular weight 2000-500
0) and the like. Specifically, Montecatini's FOMBLIN Z DIAC and FOMBLIN Z
Examples include DOL and Daikin Industries' Demnum SA.

【0011】潤滑剤は希釈剤によって所望の濃度(例え
ば、0.01〜10wt%)に希釈されている。希釈剤
としては、例えばアウジモント社のGALDEN、ある
いはモンテカチーニ社のガルデンのようなパーフルオロ
ポリエーテル系の希釈剤が用いられる。この真空雰囲気
下における金属薄膜上への潤滑剤の塗布には、真空槽に
配設された海面状ロール体と、この海面状ロール体に潤
滑剤を供給する潤滑剤供給手段とを具備する塗布装置が
用いられる。そして、潤滑剤の厚さが10〜50Åとな
るよう塗布される。
The lubricant is diluted with a diluent to a desired concentration (for example, 0.01 to 10 wt%). As the diluent, for example, GALDEN manufactured by Ausimont or Galden manufactured by Montecatini can be used. The coating of the lubricant on the metal thin film in this vacuum atmosphere is performed by providing a sea surface roll body arranged in a vacuum tank and a lubricant supply means for supplying a lubricant to the sea surface roll body. The device is used. Then, the lubricant is applied so as to have a thickness of 10 to 50 Å.

【0012】以下、具体的な実施例を挙げて説明する。A specific embodiment will be described below.

【0013】[0013]

【実施例】図1は、本発明になる磁気記録媒体の製造装
置の一実施例を示す全体の概略図である。各図中、Aは
磁性層形成用の第1の真空槽、Bはガラス状カーボン保
護膜形成用の第2の真空槽、Cは潤滑剤の塗布が行われ
る第3の真空槽である。尚、第1の真空槽Aと第2の真
空槽B、又、第2の真空槽Bと第3の真空槽Cは連絡通
路を介してつながっている。
DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is an overall schematic view showing an embodiment of a magnetic recording medium manufacturing apparatus according to the present invention. In each drawing, A is a first vacuum tank for forming a magnetic layer, B is a second vacuum tank for forming a glassy carbon protective film, and C is a third vacuum tank for applying a lubricant. The first vacuum tank A and the second vacuum tank B, and the second vacuum tank B and the third vacuum tank C are connected via a communication passage.

【0014】先ず、第1の真空槽A内において、金属磁
性膜が支持体上に斜め蒸着手段により設けられる。すな
わち、第1の真空槽A内を10-4〜10-6Torr程度
の真空度に排気した後、抵抗加熱、高周波加熱、電子ビ
ーム加熱などによりCo−Ni(80−20at%)磁
性金属を蒸発させ、PETフィルム上に0.04〜2μ
m厚さ、例えば1600Å厚さ蒸着させて金属磁性膜を
形成する。
First, in the first vacuum chamber A, a metal magnetic film is provided on a support by oblique vapor deposition means. That is, after evacuating the inside of the first vacuum chamber A to a vacuum degree of about 10 −4 to 10 −6 Torr, Co—Ni (80-20 at%) magnetic metal is removed by resistance heating, high frequency heating, electron beam heating, or the like. Evaporate, 0.04-2μ on PET film
A metal magnetic film is formed by vapor deposition with a thickness of, for example, 1600Å.

【0015】引き続き、第2の真空槽B内において、C
VD手段により金属磁性膜上にガラス状カーボンからな
る100Å厚さの保護膜が設けられる。この後、すなわ
ち金属磁性膜が、その上に保護膜が設けられたPETフ
ィルム1が、1〜10-4Torr程度の真空度に排気さ
れている第3の真空槽C内に走行(走行速度30m/m
in)して来て、加熱ロール2に添接される。
Subsequently, in the second vacuum chamber B, C
A 100Å-thick protective film made of glassy carbon is provided on the metal magnetic film by the VD means. After this, that is, the metal magnetic film, the PET film 1 on which the protective film is provided travels in the third vacuum chamber C where the vacuum is exhausted to a degree of vacuum of about 1 to 10 −4 Torr (travel speed). 30 m / m
in) and come into contact with the heating roll 2.

【0016】この加熱ロール2に添接されたPETフィ
ルム1上の保護膜に対して潤滑剤溶液が塗布装置3によ
って塗布される。塗布装置3は、PETフィルム1を挟
んで加熱ロール2に圧着している芯金4a表面に海面体
4bが設けられた海面状ロール体5と、海面体4bが浸
かっている潤滑剤溶液6と、この潤滑剤溶液6を入れて
いる容器7と、この容器7に潤滑剤溶液を供給するポン
プ8とからなっている。更に、塗布する厚さを制御する
為、海面状ロール体5に対して膜厚制御用ロール9が設
けられている。
A lubricant solution is applied by a coating device 3 to the protective film on the PET film 1 attached to the heating roll 2. The coating device 3 includes a sea surface roll body 5 in which a sea surface body 4b is provided on the surface of a core metal 4a that is pressed against a heating roll 2 with a PET film 1 interposed therebetween, and a lubricant solution 6 in which the sea surface body 4b is immersed. A container 7 containing the lubricant solution 6 and a pump 8 for supplying the lubricant solution to the container 7. Further, a film thickness control roll 9 is provided for the sea surface roll body 5 in order to control the thickness to be applied.

【0017】尚、本実施例では、潤滑剤としてモンテカ
チーニ社のFOMBLIN Z DIACが用いられ、
希釈剤としてモンテカチーニ社のガルデンを用い、希釈
した潤滑剤溶液が用いられる。そして、潤滑剤が10Å
厚さとなるように塗布される。10は乾燥用の加熱ラン
プであり、塗布装置3によって潤滑剤層が塗布された
後、加熱ランプ10によって、例えば100℃の温度に
加熱される。これにより、潤滑剤の結着性が高めると共
に、乾燥が促進される。
In this embodiment, FOMBLIN Z DIAC manufactured by Montecatini is used as the lubricant.
Galden from Montecatini is used as the diluent and a diluted lubricant solution is used. And the lubricant is 10Å
It is applied to have a thickness. Reference numeral 10 denotes a heating lamp for drying, which is coated with the lubricant layer by the coating device 3 and then heated by the heating lamp 10 to a temperature of 100 ° C., for example. This enhances the binding property of the lubricant and promotes the drying.

【0018】そして、乾燥した後、巻取側ロール11に
巻き取り、8mm幅にスリットして8mmVTR用の磁
気テープを得た。上記のようにして得られた磁気テープ
について、市販の摩擦係数測定装置を用いて摩擦係数を
調べた処、0.20であった。又、ミナト電子製のジッ
ターメーターを用いてジッターを調べた処、50μsで
あった。
After drying, the tape was wound on a winding-side roll 11 and slit into a width of 8 mm to obtain a magnetic tape for 8 mm VTR. The coefficient of friction of the magnetic tape obtained as described above was 0.20 when examined with a commercially available friction coefficient measuring device. Moreover, when the jitter was examined using a jitter meter manufactured by Minato Electronics, it was 50 μs.

【0019】図2は、本発明になる磁気記録媒体の製造
装置の他の実施例を示す要部の概略図である。前記実施
例にあっては、海面状ロール体5表面の海面体4bが潤
滑剤溶液6に浸かっている構成のものであったが、芯金
4aを円筒状に構成すると共に、その表面に多数の孔4
cを構成し、この芯金4aに潤滑剤溶液を供給するよう
にしておけば、この孔4cを介して表面の海面体4bに
潤滑剤溶液が供給されるようになる。
FIG. 2 is a schematic view of a main part showing another embodiment of the magnetic recording medium manufacturing apparatus according to the present invention. In the above-mentioned embodiment, the sea surface member 4b on the surface of the sea surface roll member 5 is soaked in the lubricant solution 6, but the core metal 4a is formed in a cylindrical shape, and a large number thereof are formed on the surface thereof. Hole 4
If c is configured and the lubricant solution is supplied to the core metal 4a, the lubricant solution is supplied to the surface sea surface body 4b through the hole 4c.

【0020】従って、このような構成にしておくと、真
空雰囲気下における潤滑剤溶液の無駄な蒸散が少なくな
る。尚、図2の装置を用いて得られた磁気テープについ
て、市販の摩擦係数測定装置を用いて摩擦係数を調べた
処、0.19であった。又、ミナト電子製のジッターメ
ーターを用いてジッターを調べた処、49μsであっ
た。
Therefore, with such a structure, wasteful evaporation of the lubricant solution in a vacuum atmosphere is reduced. The coefficient of friction of the magnetic tape obtained by using the apparatus of FIG. 2 was 0.19 when examined by using a commercially available apparatus for measuring coefficient of friction. Further, when the jitter was examined using a jitter meter manufactured by Minato Electronics, it was 49 μs.

【0021】これに対して、保護膜が設けられた後、こ
れを大気中に取り出し、そして通常のグラビア塗工によ
って潤滑剤溶液を塗布し、前記実施例と同様な8mmV
TR用の磁気テープを得た。そして、このものについて
摩擦係数を調べた処、0.35であり、又、ジッターを
調べた処、70μsであった。更に、このものは潤滑剤
の塗布ムラの問題も認められた。しかしながら、上記実
施例の装置を用いて得られた磁気テープにはかかる問題
もなかった。
On the other hand, after the protective film is provided, the protective film is taken out into the atmosphere, and the lubricant solution is applied by the usual gravure coating, and the same 8 mmV as in the above embodiment is applied.
A magnetic tape for TR was obtained. The friction coefficient of this product was 0.35, and the jitter was 70 μs. Further, this product has a problem of uneven coating of the lubricant. However, the magnetic tape obtained by using the apparatus of the above embodiment has no such problem.

【0022】尚、上記実施例では、金属磁性膜上に潤滑
剤を塗布する場合について説明したものであるが、本発
明の装置は金属薄膜型のバックコート膜上に潤滑剤を塗
布する場合についても利用できるものである。又、連続
成膜にて行ったが、磁性層(又は保護層あるいはバック
コート層)成膜後に、潤滑層成膜用の真空槽に移し替え
て成膜しても良い。
In the above embodiment, the case where the lubricant is applied to the metal magnetic film has been described. However, the apparatus of the present invention applies to the case where the lubricant is applied to the metal thin film type back coat film. Is also available. Further, although the continuous film formation is performed, after the magnetic layer (or the protective layer or the back coat layer) is formed, the film may be transferred to a vacuum chamber for forming the lubricating layer and formed.

【0023】[0023]

【効果】本発明によれば、走行特性及び再生特性に優れ
た高品質な磁気記録媒体が簡単、かつ、低廉なコストで
得られる。
According to the present invention, a high-quality magnetic recording medium excellent in running characteristics and reproducing characteristics can be obtained easily and at low cost.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明になる磁気記録媒体の製造装置の概略説
明図
FIG. 1 is a schematic explanatory view of a magnetic recording medium manufacturing apparatus according to the present invention.

【図2】本発明になる磁気記録媒体の製造装置の他の実
施例の要部の概略図
FIG. 2 is a schematic view of a main part of another embodiment of the magnetic recording medium manufacturing apparatus according to the present invention.

【符号の説明】[Explanation of symbols]

A 磁性層形成用の第1の真空槽 C 潤滑剤の塗布が行われる第3の真空槽 1 PETフィルム 2 加熱ロール 3 塗布装置 4a 芯金 4b 海面体 4c 孔 5 海面状ロール体 6 潤滑剤溶液 7 容器 8 ポンプ 9 膜厚制御用ロール 10 加熱ランプ A First vacuum tank for forming magnetic layer C Third vacuum tank to which lubricant is applied 1 PET film 2 Heating roll 3 Coating device 4a Core metal 4b Sea surface body 4c Hole 5 Sea surface roll body 6 Lubricant solution 7 Container 8 Pump 9 Film Thickness Control Roll 10 Heating Lamp

───────────────────────────────────────────────────── フロントページの続き (72)発明者 若林 繁美 栃木県芳賀郡市貝町大字赤羽2606 花王株 式会社情報科学研究所内 (72)発明者 志賀 章 栃木県芳賀郡市貝町大字赤羽2606 花王株 式会社情報科学研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Shigemi Wakabayashi Inventor Shigemi Wakabayashi 2606 Akabane, Kaiga-cho, Haga-gun, Tochigi Kao Co., Ltd.Institute of Information Science (72) Inventor Akira Shiga 2606 Akabane, Kaiga-cho, Haga-gun, Tochigi Kao Company Information Science Laboratory

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 真空雰囲気下において支持体上に金属薄
膜を設ける手段と、真空雰囲気下において前記金属薄膜
上に潤滑剤を塗布する手段とを有する磁気記録媒体の製
造装置であって、 前記潤滑剤塗布手段は、真空槽と、この真空槽に配設さ
れた海面状ロール体と、この海面状ロール体に潤滑剤を
供給する潤滑剤供給手段とを具備することを特徴とする
磁気記録媒体の製造装置。
1. An apparatus for manufacturing a magnetic recording medium, comprising: a means for providing a metal thin film on a support in a vacuum atmosphere; and a means for applying a lubricant on the metal thin film in a vacuum atmosphere. The agent coating means includes a vacuum tank, a sea surface roll body arranged in the vacuum tank, and a lubricant supply means for supplying a lubricant to the sea surface roll body. Manufacturing equipment.
【請求項2】 海面状ロール体に対して膜厚制御用ロー
ルが設けられてなることを特徴とする請求項1の磁気記
録媒体の製造装置。
2. The apparatus for manufacturing a magnetic recording medium according to claim 1, wherein a roll for film thickness control is provided on the sea surface roll body.
JP6108798A 1994-05-23 1994-05-23 Device for producing magnetic recording medium Pending JPH07320262A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6108798A JPH07320262A (en) 1994-05-23 1994-05-23 Device for producing magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6108798A JPH07320262A (en) 1994-05-23 1994-05-23 Device for producing magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH07320262A true JPH07320262A (en) 1995-12-08

Family

ID=14493756

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6108798A Pending JPH07320262A (en) 1994-05-23 1994-05-23 Device for producing magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH07320262A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022139917A (en) * 2021-03-12 2022-09-26 プライムプラネットエナジー&ソリューションズ株式会社 Active material layer forming device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022139917A (en) * 2021-03-12 2022-09-26 プライムプラネットエナジー&ソリューションズ株式会社 Active material layer forming device

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