JPH07318841A - Rotating polygon mirror - Google Patents

Rotating polygon mirror

Info

Publication number
JPH07318841A
JPH07318841A JP13666794A JP13666794A JPH07318841A JP H07318841 A JPH07318841 A JP H07318841A JP 13666794 A JP13666794 A JP 13666794A JP 13666794 A JP13666794 A JP 13666794A JP H07318841 A JPH07318841 A JP H07318841A
Authority
JP
Japan
Prior art keywords
polygon mirror
rotating body
mirror
rotating
mirror surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13666794A
Other languages
Japanese (ja)
Inventor
Koji Takahashi
宏治 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Business Innovation Corp
Original Assignee
Fuji Xerox Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Xerox Co Ltd filed Critical Fuji Xerox Co Ltd
Priority to JP13666794A priority Critical patent/JPH07318841A/en
Publication of JPH07318841A publication Critical patent/JPH07318841A/en
Pending legal-status Critical Current

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  • Mechanical Optical Scanning Systems (AREA)

Abstract

PURPOSE:To provide a rotating polygon mirror used in a laser scanning optical system or the like capable of making noise made in the case of rotation very small. CONSTITUTION:The upper and lower parts of a polygon mirror rotating body 1 are held by thin plate disk members 3, and an inclination part 3a is formed on the periphery of the member 3. The angle theta of the inclination part is set to 0 deg. to 30 deg.. By assembling the rotating polygon mirror having such constitution in the laser scanning optical system and rotating it at specified rotating speed, mirror impulse wave 5 is generated from the corner part of the mirror surface part 2 of the rotating body 1. However, the impulse wave 5 is restrained from being released suddenly to the outside by the inclination part 3a. As a result, the noise made by the rotating body 1 is drastically softened. It is good to form a step-like enlarging part, a curvature enlarging form part or a circular-arc form part instead of the inclination part 3a.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明はレーザ走査光学系等に
用いられる回転多面鏡に関し、特に、その回転時の騒音
を緩和した回転多面鏡に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotary polygon mirror used in a laser scanning optical system or the like, and more particularly to a rotary polygon mirror which reduces noise during rotation.

【0002】[0002]

【従来の技術】従来の回転多面鏡30は、図5(a) 、
(b) に示されているように、その鏡面部31は外周が多
角形状をしている。このため、該回転多面鏡30は高速
で回転すると、その角部32は鏡面部31の周囲の空気
を乱し、騒音33を発生する。ここに、図5(a) は従来
の回転多面鏡30の一例の平面図、同図(b) は側面図を
示す。
2. Description of the Related Art A conventional rotary polygon mirror 30 is shown in FIG.
As shown in (b), the mirror surface portion 31 has a polygonal outer periphery. Therefore, when the rotary polygon mirror 30 rotates at a high speed, the corner portion 32 disturbs the air around the mirror surface portion 31 to generate noise 33. Here, FIG. 5A is a plan view of an example of a conventional rotary polygon mirror 30, and FIG. 5B is a side view thereof.

【0003】この騒音を緩和させる提案は、例えば特開
昭58−139101号公報になされている。この提案
は、図6の回転多面鏡34に示されているように、従来
の回転多面鏡30の鏡面部31の肉厚T1 をT0 (ここ
で、1〜2mm<T0 <T1)と薄くし、これによって
生ずる回転多面鏡34の鏡面部の回転剛性の低下を防止
するために、その両側面に鏡面部の内接円より少し小さ
い円筒状の補強部35を設けたものである。この提案の
回転多面鏡34によれば、回転多面鏡34の肉厚T0 が
薄くなっているため、その鏡面部の角部によって空気が
乱される割合がその分だけ減り、前記騒音を減少させる
ことができる。
A proposal for alleviating this noise is made, for example, in Japanese Patent Application Laid-Open No. 58-139101. In this proposal, as shown in the rotary polygon mirror 34 of FIG. 6, the wall thickness T1 of the mirror surface portion 31 of the conventional rotary polygon mirror 30 is thinned to T0 (here, 1 to 2 mm <T0 <T1). In order to prevent the reduction of the rotational rigidity of the mirror surface portion of the rotary polygon mirror 34 caused by this, a cylindrical reinforcing portion 35 slightly smaller than the inscribed circle of the mirror surface portion is provided on both side surfaces thereof. According to the proposed rotary polygon mirror 34, since the wall thickness T0 of the rotary polygon mirror 34 is thin, the ratio of the air being disturbed by the corners of the mirror surface portion is reduced accordingly and the noise is reduced. be able to.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、回転多
面鏡34の鏡面部の肉厚T0 を薄くするのには限度があ
り、面倒れ補正光学系を用いた鏡面にレーザ光を一度結
像させるものでも、ビーム径を10μmとし、鏡面と光
軸の取付け誤差や加工上の有効反射面幅等を考慮に入れ
ると、回転多面鏡34の鏡面部の肉厚T0 は1〜2mm
位が必要である。この1〜2mm位の厚さを有する回転
多面鏡34に、図6のような円筒状の補強部35を施し
て所定の回転速度で回転させると、発生する騒音は、図
5の回転多面鏡30が発生する騒音よりは小さくなる
が、この騒音の小ささはまだ不十分であるという問題が
あった。
However, there is a limit to reducing the wall thickness T0 of the mirror surface portion of the rotary polygon mirror 34, and the laser light is once focused on the mirror surface using the surface tilt correction optical system. However, if the beam diameter is set to 10 μm and the mounting error between the mirror surface and the optical axis and the effective reflection surface width in processing are taken into consideration, the wall thickness T0 of the mirror surface portion of the rotary polygon mirror 34 is 1 to 2 mm.
Need a place. When the rotating polygon mirror 34 having a thickness of about 1 to 2 mm is provided with a cylindrical reinforcing portion 35 as shown in FIG. 6 and rotated at a predetermined rotation speed, the generated noise is generated by the rotating polygon mirror shown in FIG. Although it is smaller than the noise generated by No. 30, there is a problem that the noise is still insufficient.

【0005】この発明の目的は、前記した従来技術の問
題点を除去し、回転時の騒音を十分に小さくすることが
できるレーザ走査光学系等に用いられる回転多面鏡を提
供することにある。
An object of the present invention is to eliminate the above-mentioned problems of the prior art and to provide a rotary polygon mirror used in a laser scanning optical system or the like which can sufficiently reduce noise during rotation.

【0006】[0006]

【課題を解決するための手段】前記目的を達成するため
に、請求項1の発明は、レーザ走査光学系等に用いられ
る回転多面鏡において、外周部を多角形状の鏡面とした
多面鏡回転体と、該多面鏡回転体の上下両面に固着され
た、該多面鏡回転体と同心でかつ該多面鏡回転体の外接
円より大きい径の薄板円盤部とを具備した点に特徴があ
る。
In order to achieve the above object, the invention of claim 1 is a rotary polygon mirror used in a laser scanning optical system or the like, wherein a polygonal mirror rotating body having an outer peripheral portion having a polygonal mirror surface. And a thin plate disk portion which is fixed to both upper and lower surfaces of the polygon mirror rotating body, is concentric with the polygon mirror rotating body, and has a diameter larger than the circumscribed circle of the polygon mirror rotating body.

【0007】また、請求項2の発明は、前記薄板円盤部
の外径寸法が、前記鏡面部の内接円寸法と外接円寸法と
の差の3倍以上から10倍以下の範囲の値を、該鏡面の
内接円寸法に加えた大きさにした点に特徴がある。
Further, in the invention of claim 2, the outer diameter dimension of the thin plate disk portion has a value in the range of 3 times to 10 times the difference between the inscribed circle dimension and the circumscribed circle dimension of the mirror surface portion. The feature is that the size is set to the size of the inscribed circle of the mirror surface.

【0008】さらに、請求項3の発明は、前記薄板円盤
部の前記多面鏡回転体より外側が、外側に向かって広が
る傾斜部、段状拡大部、湾曲拡大形状部および円弧形状
部のいずれかの形状にした点に特徴がある。
Further, according to the invention of claim 3, any one of an inclined portion, a step-shaped enlarged portion, a curved enlarged shape portion, and an arc-shaped portion of which the outer side of the polygonal disk rotor of the thin plate disk portion spreads outward. The feature is that it is shaped like.

【0009】[0009]

【作用】請求項1〜3の発明によれば、前記回転多面鏡
が所定の高速で回転されると、該回転多面鏡の角部で発
生した鏡面衝撃波が前記薄板円盤部の多面鏡回転体より
外側の対向部により緩和され、騒音の大きさが大きく抑
制される。この結果、静かなレーザ走査光学装置を提供
することができる。
According to the present invention, when the rotary polygon mirror is rotated at a predetermined high speed, a mirror shock wave generated at a corner portion of the rotary polygon mirror causes a polygon mirror rotating body of the thin disk portion. It is mitigated by the outer facing portion, and the noise level is greatly suppressed. As a result, a quiet laser scanning optical device can be provided.

【0010】[0010]

【実施例】以下に、図面を参照して、本発明を詳細に説
明する。図1(a) および(b) は、本発明の一実施例の回
転多面鏡の平面図およびX−X線断面図を示す。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below with reference to the drawings. 1A and 1B are a plan view and a sectional view taken along line XX of a rotary polygon mirror according to an embodiment of the present invention.

【0011】図において、1は多面鏡回転体、2はその
鏡面部を示す。また、3は多面鏡回転体1の両側を挟
む、該多面鏡回転体1の外接円より大きな直径の薄板円
盤部材、4は該回転多面鏡の回転中心を示す。該薄板円
盤部材3の外周部近傍には、図示されているように、外
側に向かって開く方向の傾斜部3aを有している。前記
薄板円盤部材3はプラスチックやアルミ等の軽量で加工
性の良い部材で構成することができる。また、その内面
に、空気振動を吸収又は散乱するような材料、たとえば
表面に凹凸のあるカーボン等をコーティングしてもよ
い。
In the figure, reference numeral 1 is a polygon mirror rotating body, and 2 is a mirror surface portion thereof. Reference numeral 3 denotes a thin disk member that sandwiches both sides of the polygon mirror rotating body 1 and has a diameter larger than the circumscribed circle of the polygon mirror rotating body 1. Reference numeral 4 denotes the rotation center of the rotating polygon mirror. In the vicinity of the outer peripheral portion of the thin plate disk member 3, as shown in the drawing, there is an inclined portion 3a which is open outward. The thin disk member 3 may be made of a material such as plastic or aluminum that is lightweight and has good workability. Further, the inner surface thereof may be coated with a material that absorbs or scatters air vibrations, for example, carbon having irregularities on the surface.

【0012】図のDは該薄板円盤部材3の直径、D1 は
多面鏡回転体1の内接円の直径、D2 は多面鏡回転体1
の外接円の直径、D3 は前記外接円の直径D2 と内接円
の直径D1 との差、D4 は薄板円盤部材3の外周部に傾
斜を付ける曲げ位置の直径である。なお、前記多面鏡回
転体1と薄板円盤部材3の回転中心4は一致するように
構成されている。また、5は鏡面衝撃波、6は該鏡面衝
撃波5の進行方向を示す。
In the figure, D is the diameter of the thin disk member 3, D1 is the diameter of the inscribed circle of the polygon mirror rotating body 1, and D2 is the polygon mirror rotating body 1.
Is the diameter of the circumscribed circle, D3 is the difference between the diameter D2 of the circumscribed circle and the diameter D1 of the inscribed circle, and D4 is the diameter of the bending position where the outer peripheral portion of the thin disk member 3 is inclined. The polygon mirror rotating body 1 and the center of rotation 4 of the thin disk member 3 are configured to coincide with each other. Further, 5 indicates a specular shock wave, and 6 indicates a traveling direction of the specular shock wave 5.

【0013】次に、前記鏡面部2の厚みをT1 、前記薄
板円盤部材3間の最外周部の開口部の寸法をT2 とする
と、前記鏡面部2および薄板円盤部材3の各部の寸法
D、D4 およびT2 は、それぞれ、次のような関係を満
足するように構成されている。
Next, assuming that the thickness of the mirror surface portion 2 is T1 and the size of the opening of the outermost peripheral portion between the thin disk members 3 is T2, the dimension D of each part of the mirror surface portion 2 and the thin disk member 3 is D4 and T2 are each configured to satisfy the following relationship.

【0014】 3×D3 +D1 ≦D≦10×D3 +D1 …(1) D2 ≦D4 ≦D …(2) T1 ≦T2 ≦2×T1 …(3) また、鏡面部2の厚みT1 は約1〜2mmであり、前記
傾斜部3aの曲げ角度Θは0°≦Θ≦30°の条件、好
ましくは10°〜20°の条件を満たす構成になってい
る。また、前記(1) 式のDは、好ましくは、(5×D3
+D1 )〜(8×D3 +D1 )の条件を満たす構成にな
っている。
3 × D3 + D1 ≤D≤10 × D3 + D1 (1) D2 ≤D4 ≤D (2) T1 ≤T2 ≤2 × T1 (3) Further, the thickness T1 of the mirror surface portion 2 is approximately 1 to 1. The bending angle Θ of the inclined portion 3a is 2 mm, and the bending angle Θ is 0 ° ≦ Θ ≦ 30 °, preferably 10 ° to 20 °. Further, D in the formula (1) is preferably (5 × D3
The configuration is such that the conditions of + D1) to (8 * D3 + D1) are satisfied.

【0015】この実施例において、多面鏡回転体1およ
び薄板円盤部材3を所定の回転速度で回転すると、図1
(b) に示されているように多面鏡回転体1の角部によっ
て鏡面衝撃波5が発生する。しかしながら、本実施例に
おいては、多面鏡回転体1の上下の両側の周辺部に薄板
円盤部材3の傾斜部3aが延びているから、前記鏡面衝
撃波5が鏡面部2の周辺から急激に外部に放出されるの
がくい止められる。換言すれば、多面鏡回転体1からそ
の半径方向に遠ざかるに従い、徐々に鏡面衝撃波5は解
放され、かつ薄板円盤部材3で吸収緩和される。この結
果、多面鏡回転体1が回転時に発生する騒音を大きく低
減することができる。
In this embodiment, when the polygon mirror rotating body 1 and the thin disk member 3 are rotated at a predetermined rotation speed,
As shown in (b), the specular shock wave 5 is generated by the corner portion of the polygon mirror rotating body 1. However, in this embodiment, since the inclined portions 3a of the thin plate disk member 3 extend in the peripheral portions on both the upper and lower sides of the polygonal mirror rotating body 1, the specular shock wave 5 suddenly moves from the periphery of the specular surface portion 2 to the outside. The release is stopped. In other words, the mirror shock wave 5 is gradually released and is absorbed and relaxed by the thin disk member 3 as the polygon mirror rotating body 1 is moved away from the polygon mirror rotating body 1 in the radial direction. As a result, noise generated when the polygon mirror rotating body 1 rotates can be greatly reduced.

【0016】次に、本発明の第2実施例を、図2を参照
して説明する。この実施例の特徴は、第1実施例の薄板
円盤部材3の傾斜部3aに変えて、段状拡大部3bを設
けたものである。なお、図2中の図1と同符号は同一ま
たは同等物を示し、寸法D、D1 、D2 、D3 およびD
4 は、前記(1) 〜(3) 式の条件を満たすものとする。
Next, a second embodiment of the present invention will be described with reference to FIG. The feature of this embodiment is that a stepped enlarged portion 3b is provided instead of the inclined portion 3a of the thin disk member 3 of the first embodiment. 2 that are the same as or equivalent to those in FIG. 1 indicate the dimensions D, D1, D2, D3 and D.
It is assumed that 4 satisfies the conditions of the above expressions (1) to (3).

【0017】本実施例においても、多面鏡回転体1を所
定の回転速度で回転すると、鏡面部2の角部によって鏡
面衝撃波5が発生されるが、この鏡面衝撃波5は前記段
状拡大部3bによって急激に外部に放出されるのをくい
止められる。
Also in this embodiment, when the polygon mirror rotating body 1 is rotated at a predetermined rotation speed, the mirror shock wave 5 is generated by the corner portion of the mirror surface portion 2. The mirror shock wave 5 is the stepped expanding portion 3b. The sudden release to the outside can be stopped by.

【0018】次に、本発明の第3実施例を、図3を参照
して説明する。この実施例の特徴は、第1実施例の薄板
円盤部材3の傾斜部3aに変えて、滑らかな湾曲拡大形
状部3cを設けたものである。
Next, a third embodiment of the present invention will be described with reference to FIG. The feature of this embodiment is that a smooth curved enlarged shape portion 3c is provided instead of the inclined portion 3a of the thin disk member 3 of the first embodiment.

【0019】また、図4は本発明の第4実施例を示す。
この実施例の特徴は、第1実施例の薄板円盤部材3の傾
斜部3aに変えて、円弧形状部3dを設けたものであ
る。なお、前記第3、第4実施例において、前記(1) 〜
(3) 式の条件を満たしている。
FIG. 4 shows a fourth embodiment of the present invention.
The feature of this embodiment is that an arc-shaped portion 3d is provided instead of the inclined portion 3a of the thin disk member 3 of the first embodiment. In addition, in the third and fourth embodiments, the above (1) to
The condition of Eq. (3) is satisfied.

【0020】前記第3、第4実施例においても、第1実
施例と同様に、多面鏡回転体1を所定の回転速度で回転
させた時に発生する鏡面衝撃波5が急激に外部に放出さ
れるのを、前記湾曲拡大形状部3cあるいは円弧形状部
3dにより軽減することができる。この結果、多面鏡回
転体1が外部に発生する騒音を大きく緩和することがで
きる。
In the third and fourth embodiments as well, similar to the first embodiment, the mirror shock wave 5 generated when the polygon mirror rotating body 1 is rotated at a predetermined rotation speed is rapidly emitted to the outside. Can be reduced by the curved enlarged shape portion 3c or the arc-shaped portion 3d. As a result, noise generated by the polygon mirror rotating body 1 to the outside can be greatly reduced.

【0021】[0021]

【発明の効果】請求項1の発明によれば、多面鏡回転体
が所定の高速で回転した時に発生する鏡面衝撃波が急激
に外部に放出されるのを抑制することができる。この結
果、多面鏡回転体が発生する騒音を大きく緩和すること
ができるという効果がある。また、簡単かつ安価な手段
で、前記騒音を大きく緩和することができるという効果
がある。
According to the first aspect of the present invention, it is possible to prevent the specular shock wave generated when the polygon mirror rotating body rotates at a predetermined high speed from being suddenly emitted to the outside. As a result, there is an effect that the noise generated by the polygon mirror rotating body can be significantly reduced. Further, there is an effect that the noise can be greatly reduced by a simple and inexpensive means.

【0022】請求項2の発明によれば、薄板円盤部の外
径寸法を、鏡面部の内接円寸法と外接円寸法との差の3
倍以上から10倍以下にされているので、多面鏡回転体
が発生する騒音を、より効果的に緩和することができ
る。
According to the second aspect of the present invention, the outer diameter of the thin plate disk portion is set to the difference of 3 between the inscribed circle dimension and the circumscribed circle dimension of the mirror surface portion.
Since it is set to be not less than 10 times and not more than 10 times, it is possible to more effectively reduce the noise generated by the polygon mirror rotating body.

【0023】また、請求項3の発明によれば、薄板円盤
部の外側が広がる方向に加工されているので、騒音の制
御を効果的に行うことができる。
Further, according to the invention of claim 3, since the outer side of the thin plate disk portion is processed so as to expand, the noise can be effectively controlled.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の第1実施例の平面図とX−X線断面
図である。
FIG. 1 is a plan view and a sectional view taken along line XX of a first embodiment of the present invention.

【図2】 本発明の第2実施例の断面図である。FIG. 2 is a sectional view of a second embodiment of the present invention.

【図3】 本発明の第3実施例の断面図である。FIG. 3 is a sectional view of a third embodiment of the present invention.

【図4】 本発明の第4実施例の断面図である。FIG. 4 is a sectional view of a fourth embodiment of the present invention.

【図5】 従来の多面鏡回転体の平面図と側面図であ
る。
FIG. 5 is a plan view and a side view of a conventional polygon mirror rotating body.

【図6】 従来の多面鏡回転体の騒音を緩和した従来例
の平面図と側面図である。
6A and 6B are a plan view and a side view of a conventional example in which noise of a conventional polygon mirror rotating body is mitigated.

【符号の説明】[Explanation of symbols]

1…多面鏡回転体、2…鏡面部、3…薄板円盤部材、3
a…傾斜部、4…回転中心、5…鏡面衝撃波、6…鏡面
衝撃波の進行方向、3b…段状拡大部、3c…湾曲拡大
形状部、3d…円弧形状部。
1 ... Polyhedral mirror rotating body, 2 ... Mirror surface part, 3 ... Thin disk member, 3
a ... inclined part, 4 ... center of rotation, 5 ... specular shock wave, 6 ... traveling direction of specular shock wave, 3b ... stepped expanded part, 3c ... curved expanded shape part, 3d ... arc shaped part.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 レーザ走査光学系等に用いられる回転多
面鏡において、 外周部を多角形状の鏡面とした多面鏡回転体と、 該多面鏡回転体の上下両面に固着された、該多面鏡回転
体と同心でかつ該多面鏡回転体の外接円より大きい径の
薄板円盤部とを具備し、 回転時に、前記多面鏡回転体の角部から発生する鏡面衝
撃波の発散を前記薄板円盤部の対向部により緩和したこ
とを特徴とする回転多面鏡。
1. A rotary polygon mirror used in a laser scanning optical system or the like, wherein a polygon mirror rotating body having an outer peripheral portion having a polygonal mirror surface, and the polygon mirror rotating member fixed to both upper and lower surfaces of the polygon mirror rotating body. A thin disk part that is concentric with the body and has a diameter larger than the circumscribed circle of the polygonal mirror rotating body. A rotating polygon mirror characterized by being relaxed by a part.
【請求項2】 請求項1の回転多面鏡において、 前記薄板円盤部の外径寸法が、前記鏡面部の内接円寸法
と外接円寸法との差の3倍以上から10倍以下の範囲の
値を、該鏡面の内接円寸法に加えた大きさであることを
特徴とする回転多面鏡。
2. The rotary polygonal mirror according to claim 1, wherein the thin plate portion has an outer diameter in the range of 3 times to 10 times the difference between the inscribed circle dimension and the circumscribed circle dimension of the mirror surface portion. A value obtained by adding a value to the inscribed circle size of the mirror surface.
【請求項3】 請求項1または2の回転多面鏡におい
て、 前記薄板円盤部の前記多面鏡回転体より外側が、外側に
向かって広がる傾斜部、段状拡大部、湾曲拡大形状部お
よび円弧形状部のいずれかの形状であることを特徴とす
る回転多面鏡。
3. The rotary polygonal mirror according to claim 1, wherein an outer side of the thin plate disk portion outside the polygonal mirror rotating body expands outward, an inclined portion, a stepped enlarged portion, a curved enlarged shape portion, and an arc shape. A rotating polygon mirror characterized by having one of the parts.
JP13666794A 1994-05-27 1994-05-27 Rotating polygon mirror Pending JPH07318841A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13666794A JPH07318841A (en) 1994-05-27 1994-05-27 Rotating polygon mirror

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13666794A JPH07318841A (en) 1994-05-27 1994-05-27 Rotating polygon mirror

Publications (1)

Publication Number Publication Date
JPH07318841A true JPH07318841A (en) 1995-12-08

Family

ID=15180681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13666794A Pending JPH07318841A (en) 1994-05-27 1994-05-27 Rotating polygon mirror

Country Status (1)

Country Link
JP (1) JPH07318841A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100444576B1 (en) * 2002-04-25 2004-08-16 삼성전자주식회사 scanner motor having a polygon mirror with a structure for reducing rotation resistance
JP2016029440A (en) * 2014-07-25 2016-03-03 セイコーエプソン株式会社 Wavelength conversion device and manufacturing method thereof, light source device and projector

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100444576B1 (en) * 2002-04-25 2004-08-16 삼성전자주식회사 scanner motor having a polygon mirror with a structure for reducing rotation resistance
JP2016029440A (en) * 2014-07-25 2016-03-03 セイコーエプソン株式会社 Wavelength conversion device and manufacturing method thereof, light source device and projector

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