JPH07314359A - Follow-up device for manipulator, and control thereof - Google Patents

Abstract

PURPOSE:To achieve high precision follow-up of a work route even in high speed work by calculating correction information based on a real teaching route when acuated at a desired speed to a displayed route, and work feature point positions obtained by detected position information from a sensor, and correcting the teaching route. CONSTITUTION:A sensor 2 moves prior to an effector 11, and a work 13 is observed in order by commands at a constant cyclic period from a sensor controller 5 to detect work route points to be sent to a coordinates exchange/ memory part (memory part) 12. The memory part 12 converts feature points in a reference coordinates system using position information of the feature points calculated by the sensor controller 5, and position information of the effector 11 obtained based on joint position information theta1-6 of a manipulator 1 at the time of detection by the sensor 2 to be memorized. A correction quantity generating part 6 forms correction information based on data in the memory part 12 and a real teaching route generated by a real teaching route generating part 19 at the time of off-line to be outputted to a route correcting part 15, which then corrects the route.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention detects a machining path on a workpiece to be machined by a sensor, and based on the information and correction information calculated from actual teaching path information traced by an effector. The present invention relates to a manipulator follow-up device for making an effector mounted on a manipulator follow a machining path with high accuracy by sequentially correcting a given teach path, and a control method thereof.

[0002]

2. Description of the Related Art A technique of causing a manipulator to follow a machining path using a sensor is considered to be the most important technique for performing work in an environment with uncertainty, and many studies have been conducted.

For example, a space curve tracing control of an industrial robot (Asada, Hanafusa, Transactions of the Society of Instrument and Control Engineers, No. 16)
Vol. 5, No. 5, pp126-132, 1980) uses the offline path information for the purpose of assisting the feedback control by the sensor, designing the compensator of the control system with the machining path as the a priori information, and the effect of the sensor feedback control. Are considering.

In recent years, a technique of correcting an operation command based on pre-teached data with sensor data has been introduced, making the most of the proven advantage of the teaching reproduction system.

Typical prior art relating to this type of device or a device similar thereto is, for example, the following. That is, in the laser vision sensor for welding robots [Hirai, Shibata, (Hitachi, Ltd.), Detection and control in arc welding, Welding Society, 1990], the welding line position detected by the vision sensor is used in advance. A method of modifying the taught path is shown.

A conventional technique will be described below with reference to the drawings. FIG. 5A is a block diagram showing the configuration of the related art, and FIG. 5B is a diagram showing a route correction process. In the figure,
A is a control device, 1 is an articulated manipulator, 2 is a sensor mounted on the tip of the manipulator 1, 3 is a welding torch,
Reference numeral 4 is a teaching data input unit, 5 is a sensor controller, 6 is a correction amount generation unit, 7 is a correction unit, 8 is a servo unit, 9 is an amplifier, and 10 is a welding line.

In FIG. 5A, the teaching data is input from the teaching data input unit 4 so that the sensor 2 always precedes the welding torch 3, and the teaching path is preset based on the teaching data.

When the manipulator 1 starts to operate according to the teaching path, the sensor 2 detects a point on the welding line 10 and sends a detection signal to the sensor controller 5.

The correction amount generation unit 6 calculates the correction amount of the manipulator 1 from the detected position information from the sensor controller 5 and the position information of the welding torch 3.

The correction unit 7 generates a correction route from the correction amount of the correction amount generation unit 6 and the teaching data, and controls the manipulator 1 based on the correction route.

The process of generating the correction path in the correction unit 7 will be described with reference to FIG. Weld feature points M _i (i =
Welding torch 3 based on 1,2,3, ..., n) position and teaching path
From the position of the welding characteristic point M _i, and when the welding torch 3 passes the point where the distance is the minimum,
The teaching route is translated and a corrected route is generated.

[0012]

However, the above-mentioned conventional technique has the following problems. In the above-mentioned conventional technique, the corrected route information is calculated and generated using only the detected position information and the taught route.

However, in general, the actual teaching path traced by the effector does not coincide with the teaching path due to the dynamics or the limit of the operation speed. Particularly, as the target speed becomes higher, the teaching path and the actual teaching path are It is widely known that the error of is actualized.

For this reason, in general, a measure is taken so that the teaching data is created in advance so as to be shifted from the machining path so that the actual teaching path follows the vicinity on the machining path.

In this case, however, the teaching route and the actual teaching route differ not only in the position / orientation but also in the route length. Therefore, the teaching route is corrected by the correction information calculated by associating only the teaching route and the machining route. However, it was impossible to obtain sufficient accuracy with the method. As a result, when the conventional technique is introduced into a work that requires a high follow-up speed, a fatal defect that an error between a machining characteristic position and a machining path becomes apparent occurs.

Here, the main objects of the present invention are as listed below. A first object of the present invention is to provide a manipulator follow-up device and a control method for the manipulator, which make it possible to cause the machining means to follow the machining path with high accuracy even during high-speed work.

A second object of the present invention is to provide a teaching path when an operation command value consisting of a teaching path and a target speed given in advance is given to an articulated manipulator in a work requiring a high speed target speed. On the other hand, it is difficult to make the effector follow the path with high accuracy by the method of correcting the taught path with the detected position information due to the error in the actual teaching path traced by the effector as the processing means. A follower device for a manipulator and a control method therefor are provided.

Other objects of the present invention will become apparent from the description, drawings, and particularly the claims.

[0019]

The solution of the above-mentioned problems can be achieved by adopting the novel characteristic constitution means and methods listed below by the present invention. That is, the first feature of the device of the present invention is a processing means for processing an object, a detection means installed near the processing means for detecting processing path information on the object, the processing means and the detection means. Which includes a multi-joint manipulator that corrects the operation command of the manipulator determined based on teaching data given in advance based on the position information of the processing target detected by the detection means, while the processing path is changed to the processing path in real time. In a tracking device having a control means for moving a manipulator so that the processing means can follow freely, in the control means, a teaching data input section for inputting the teaching data, and a detection means controller for processing a signal from the sensor when online,
A coordinate conversion / memory unit that processes position / orientation information of each joint that has a servo of the manipulator and that converts / detects a detection signal from the detection means controller into coordinate system data when online, and the teaching data when offline. A real route data memory unit that detects and stores information about an actual teaching route that is traced by the processing means that is actually operated based on the above, and a route correspondence that associates the teaching route according to the teaching data with the actual teaching route. Section, an actual teaching path generation section that generates actual teaching path data from the data accumulated in the corresponding path section, and a coordinate conversion / memory conversion section from the coordinate conversion / memory section using a signal from the actual teaching path generation section when online. The correction amount generation unit that calculates the correction amount of the system data and the correction data determined from the teaching data of the teaching data input unit when offline A function relating to a teaching path is generated and output to the path corresponding unit, and the processing means trajectory is directly calculated and output from the function, and the teaching path function corrected by a signal from the correction amount generating unit is used online. A tracking unit for a manipulator, comprising: a correction unit that calculates and outputs a target trajectory of the processing means.

The second feature of the device of the present invention is that the processing means for processing the object, the detection means installed near the processing means for detecting processing path information on the object, the processing means and the detection means. A multi-joint manipulator for holding is provided, and the operation command of the manipulator determined on the basis of teaching data given in advance is corrected on the basis of the position information of the processing target detected by the detection means while the processing path is changed in real time. In a tracking device having a control means for moving a manipulator so as to follow the processing means, a teaching data input section for inputting the teaching data to the control means, and a detection means for processing a signal from the detection means when online. The controller and the servo of the manipulator have their own position / posture information of each joint and online. The coordinate conversion / memory unit for converting / storing the detection signal from the detection means controller into coordinate system data, and the information regarding the actual teaching path traced by the processing means actually operated based on the teaching data when offline are stored in the servo. An actual path data memory unit that detects and stores each cycle, a path correspondence unit that associates the teaching path according to the teaching data with the actual teaching path, and the coordinate conversion / memory by a signal from the path correspondence unit when online. Correction amount generation unit for calculating the correction amount of the transformed coordinate system data from the unit, and a function related to the teaching route determined from the teaching data of the teaching data input unit when offline, and output to the route corresponding unit. At the same time, the processing means trajectory is calculated and output directly from the function, and is corrected by the signal from the correction amount generation unit when online. A correction unit for the serial taught path function calculates outputs a target trajectory of the processing means, a manipulator for a follow-up device including a.

A third feature of the device of the present invention is that the correction unit in the first or second feature of the present invention generates a function relating to the teach route determined from the teaching data of the teaching data input unit. A speed function generation unit, a path correction unit that calculates and determines the correction of the teaching path function by signals from the teaching path / speed function generation unit and the correction amount generation unit when online, and the teaching path / speed function generation unit when offline. And a trajectory generating section for calculating and outputting a target trajectory of the processing means from the route correcting section when the signal is directly transmitted from the manipulator.

A fourth characteristic of the device of the present invention is that the processing means and the detecting means in the first, second or third characteristic of the device of the present invention respectively include a welding torch and a position as an effector for performing the processing. The tracking device for a manipulator, which is a visual sensor as a sensor capable of detecting an angle.

The first feature of the method of the present invention is to include a processing means for processing an object, a detection means installed near the processing means for detecting processing path information on the object, the processing means and the detection means. In the multi-joint manipulator to be held, the operation command of the manipulator determined based on the teaching data given in advance is corrected based on the position information of the processing target detected by the detection means while the processing is performed on the processing path in real time. When driving the manipulator so as to follow the means, the actual teaching path traced by the machining means when the manipulator is operated with an operation command value consisting of a teaching path determined from the teaching data and a target speed, and The actual teaching path corresponding to the teaching point in each teaching path by associating the teaching path based on the teaching data. Of the actual teaching path function in advance, and the correction information calculated by associating the detected position information obtained in time series from the detecting means when the work is executed with the points on the actual teaching path function. A follow-up control method for a manipulator, in which the teaching path is sequentially corrected.

The second feature of the method of the present invention is that the processing means for processing the object, the detection means installed near the processing means for detecting the processing route information on the object, the processing means and the detection means. In the multi-joint manipulator to be held, the operation command of the manipulator determined based on the teaching data given in advance is corrected based on the position information of the processing target detected by the detection means while the processing is performed on the processing path in real time. In driving the manipulator so as to follow the means, a point on the actual teaching path traced by the machining means when the manipulator is operated with an operation command value consisting of a teaching path determined from the teaching data and a target speed. And a point on the teaching route based on the teaching data are associated in advance, and when the work is performed, A plurality of detection position information obtained series, wherein the real teaching a point on the path, the correspondence manipulator tracking control method in calculating the correction information obtained by sequentially modifying the teaching path by.

The third feature of the method of the present invention is the position / orientation in which the operation command value in the first or second feature of the method of the present invention is calculated from the machining start point using the path length as a parameter based on the teaching data. Is a follow-up control method for a manipulator, which is a teaching path function value and a target velocity function value regarding, and is expressed by a coefficient matrix of a cubic function that guarantees the continuity of the second derivative with respect to the path length.

The fourth characteristic of the method of the present invention is that the correspondence between the actual teaching path and the teaching path in the first, second or third characteristic of the method of the present invention is such that expansion / contraction of the actual teaching path length with respect to the teaching path length. The ratio is calculated, the path length of the actual teaching path corresponding to the path length to each teaching point is calculated using the expansion / contraction rate, and the position and orientation of the closest point on the actual teaching path at that time are determined. Further, it is a follow-up control method for a manipulator, which calculates an actual teaching path function corresponding to a teaching path function using the proximity point group data.

The fifth feature of the method of the present invention is that the point on the actual teaching path associated with the teaching path in the first, second, third or fourth feature of the method of the present invention is an articulated manipulator. Is a follow-up control method for manipulators, which is detected for each servo cycle of each joint.

The sixth characteristic of the method of the present invention is that the detected position information of the detecting means and the points on the actual teaching path in the first, second, third, fourth or fifth characteristic of the method of the present invention are used. Correspondence is first made by using the position information of the characteristic points on the machining path of a constant cycle based on the detection of the detecting means, and the position information of the processing means obtained from the joint position information of the multi-joint manipulator at the time of the detection. The position vector of the feature point on the machining path is converted into a vector of the reference coordinate system, and then the translational component of both positions and the vertical axis of the reference coordinate system around the feature point vector group and the actual teaching data are used. In the manipulator follow-up control method, a correction amount is calculated for each corresponding point from the error between the machining path and the actual teaching path for the rotation component.

[0029]

Since the present invention takes the novel means and method as described above, the processing feature points obtained from the actual teaching path when the teaching path is operated at the target speed and the detected position information from the sensor. By calculating the correction information from the position and correcting the teaching route, it is possible to follow the high-speed work with high accuracy.

[0030]

[Device example]

(Device Example 1) A first device example of the present invention will be described with reference to the drawings. FIG. 1 is a block diagram illustrating an offline process of the present device example, FIG. 2 is a block diagram illustrating an online process of the present device example, and FIG. 3 is a diagram illustrating a method of associating a teaching route and an actual teaching route. .

In FIG. 1 and FIG. 2, B is a manipulator follow-up device of the present device example, Ca is a control device as a control means when offline, Cb is a control device as a control means when online, and 7a 'is offline. Time correction unit, 7b 'is an online correction unit, 11 is an effector as a machining means, 12 is a coordinate conversion / memory unit, 13 is a work piece, 1
4 is a teaching route / speed function generating unit, 15 is a route correcting unit when online, 16 is a trajectory generating unit, 17 is an actual route data memory unit when offline, 18 is a route corresponding unit when offline, 19 is an actual teaching route It is a generator. Note that FIG.
The same blocks as those in the conventional example shown by are denoted by the same reference numerals to avoid duplication of description.

(Method Example 1) The specification of the present apparatus example has such a concrete embodiment. Next, the execution procedure of the first method example of the present invention applied to the present apparatus example will be sequentially described. First, teaching data is created. here,
The position ^ω p _{T, j} of the teaching point on the machining path discretely arranged on the machining work 13 model as CAD data and the posture ^ω
Teaching data relating to R _{T, j and} teaching data relating to the target speed, respectively, ^ω T _{T, j} , v _{T, j} (j = 1,2,3,
, N) is input from the teaching data input unit 4. that time,
The teaching data is given so that the visual sensor 2 as a suitable example of the detecting means always precedes the effector 11. However, the left shoulder subscript ω is a reference coordinate system display.

Next, in the teaching path / speed function generator 14,
Teaching data ^ω T sent from the teaching data input unit 4
_{Based on T, j} , v _{T, j} , the path length s from the processing start point
Teaching path function P related to position / orientation with parameter as parameter
_T (s) and the target speed function V (s) are generated, and these teaching data ^ω T _{T, j} , v _{T, j} and teaching information P are generated.
_{The T} (s) and V (s) are stored in the teaching path / speed function generation unit 14.

Specifically, P _T (s) and V (s) are path lengths s
It is expressed by a coefficient matrix of a cubic function that guarantees the continuity of the second derivative with respect to.

As a result, the continuity of the absolute values of the three-dimensional position and velocity / acceleration of the teaching trajectory L (t) with respect to the time t generated from the teaching path function and the target velocity function is guaranteed.

As a result, when the manipulator 1 is operated at a low speed, the manipulator 1 moves on the work 13 along the piecewise teaching trajectory P _T (s) from s = s _{j −1} to s = s _j . The effector 11 is controlled to be positioned on the processing path in a predetermined relative position and orientation.

Further, the teaching trajectory L (t) is operated as a command value to the manipulator 1.

[Outer 1] (L = 0, 1, ..., M) is detected for each servo cycle and stored in the actual path data memory unit 17.

Based on the taught route function P _T (s) and the actual route data stored in the actual route data memory unit 17, the route correspondence unit 1
8, the teaching route and the actual teaching route are associated with each other,

[Outside 2]

A procedure for associating the teaching route with the actual teaching route will be described with reference to FIG. In the figure, 20 is a route created by teaching data, 21 is the teaching data, and 22 is a machining route.

[0040]

[Outside 3] Position vector,

[Outside 4] It is a position component.

[0041]

[Outside 5]

[Outside 6]

First, the path length s _max from the work start point to the work end point is calculated from the teaching data by the following equation (1).

[Equation 1]

[0043]

[Outside 7] Calculated from

[Equation 2]

Then, according to the equations (1) and (2), the expansion / contraction ratio α of the path length is

[Equation 3] Ask by.

Using this expansion / contraction rate α, the actual teaching path corresponding to the path length sj to each teaching point

[Outside 8]

[Equation 4] Calculated by

[Outside 9] The position and posture at that time

[Outside 10]

[Outside 11]

After the above processing is performed offline, the manipulator 1 is operated to execute the online work described below. In the online work, the sensor 2 held by the manipulator 1 is the effector 1 as shown in FIG.
The sensor 2 moves prior to 1, and the sensor 2 sequentially observes the workpiece 13 using triangulation according to a command of a constant cycle from the sensor controller 5 as a detecting means controller, and detects a machining path point.

For example, when the machining path cross section is V-shaped, the path cross section is approximated by two straight lines forming the V-shape. Then, the positions of the intersecting corners are determined as the feature points aimed at by the effector 11, and the coordinate conversion and the position information of the feature points are performed.
It is sent to the memory unit 12.

In the coordinate conversion / memory unit 12, the position information of the feature points calculated by the sensor controller 5 and the sensor 2 are detected.
Joint position information of the manipulator 1 at the time of detection θ _m (
Using the position information of the effector 11 obtained from m = 1, 2, ... 6), the characteristic points on the machining path are converted into the reference coordinate system and stored. That stores converts the position vector ^s p _c of feature points in the vector ^omega p _c of the reference coordinate system.

These feature point vector groups ^ω _{pc, i} , ..., Which are obtained at each detection cycle of the sensor 2

[Outside 12] The correction amount generation unit 6 calculates the correction amount in real time.

Specifically, regarding the translational component of the position and the rotational component around the Z _ω axis which is the vertical direction of the reference coordinate system,
Processing path on the processing workpiece 13

[Outside 13]

[Outside 14] The calculation algorithm of the correction amount is as follows.

(I) Correspondence between actual teaching route and machining route Any point corresponding to actual teaching route and machining route

[Outside 15] The following relationship holds.

[Equation 5]

Here, T _CT is a correction function for mapping the teaching path to the machining path, and the correction amount is not calculated.

[Outside 16] Position information of teaching data,

[Equation 6]

[Equation 7] And the correction information

[Equation 8] Express.

[0053]

[Outside 17]

[Outside 18] Since the detection cycle of the visual sensor 2 is sufficiently short, it is possible to perform a linear approximation for each detection point,

[Equation 9] Becomes

[Outside 19] Is possible.

(Ii) Calculation of Correction Matrix T _AT First, the translational component p _x , is obtained by associating two sets of points on the actual teaching path and the machining path using the associating method of the previous item (i).
Calculate p _y and p _z . On the machining route from the detected position information from the sensor 2

[Outside 20]

[Equation 10]

[Equation 11] Is obtained.

From equations (10) and (11),

[Equation 12]

[Equation 13]

[Equation 14] However, p _z is calculated in consideration of the detection error.

Next, the rotation components R ₁₁ and R ₂₁ are obtained. The following rotating elements are obtained from the equations (11), (12) and (13).

[Outside 21]

[Equation 15]

[Equation 16]

[0057]

[Outside 22]

[Outside 23]

[Equation 17]

[Equation 18]

[0058]

[Outside 24] This is a case where the teaching route matches the direction of Z _ω , and T _CT cannot be calculated only by the position information, but in actual work, such a special route rarely exists over a long section. Sufficient accuracy can be secured by moving the manipulator 1 according to.

(Iii) Sequential estimation of the correction matrix T _{M, i} The correction matrix T _{C T} obtained for each detection has a different value due to the influence of errors and noise generated during the detection. Therefore, in order to improve the reliability of the correction matrix, the optimum correction information is calculated using a plurality of pieces of correction information.

[0060]

[Outside 25] T _{CT, k} (k = i- (N-1), i- (N-1) +
1, ..., i), and the least squares method of each detected position information,

[Outside 26]

T _{M, i}

[Formula 19] far.

Then, the translational component p _{M, i} is

[Equation 20]

[Equation 21]

[Equation 22] Becomes

Therefore, the rotation component R _{M, i} is

[Equation 23]

[Equation 24]

[Equation 25]

[Equation 26] Becomes

As a result of the above, the optimum transformation matrix T obtained
The route correction unit 15 in the correction unit 7 uses _{M and i} to perform the correction work of the teaching route function. In this case, as described in Japanese Patent Application No. 59122 of 1994 by the present applicant, considering not only the position but also the reliability in the sensor data,
It is also possible to calculate the optimum conversion matrix.

As described above, the teaching path function P (s) is stored in the path / velocity function generating unit 14 in the form of a coefficient matrix, and T _{M, i} is stored for the position component of the coefficient matrix. The corrected path P ′ (s) is sequentially calculated for each detection cycle of the sensor 2 by causing R _{M, i} to act on the attitude component, and the corrected path P ′ (s) is sent to the trajectory generation unit 16 together with the teaching speed function V (s). Send out.

In the trajectory generator 16, the corrected path P '(s)
And the teaching speed function V (s) are used to generate a target speed L (t) that the effector 11 should follow. Furthermore, the target joint trajectory θ _dm (m = 1, 2, ..., 6) is calculated for each servo cycle by solving L (t) expressed in the reference coordinate system by inverse kinematics, and the target trajectory is calculated in the servo unit 8. And the joint position information θ _m of the manipulator 1, the motion command value of the manipulator 1 is sent to the amplifier unit 9.

According to the above procedure, the amplifier section 9 gives a driving force to the manipulator 1 based on the motion command value to carry out the work. In this embodiment, m = 1, ..., 6
Although the calculation / control method for the manipulator 1 limited to 6 degrees of freedom has been described, it goes without saying that the manipulator having other degrees of freedom can also be controlled by the same calculation / control method.

(Device Example 2) A second device example of the present invention will be described with reference to the drawings. FIG. 4 is a system block diagram showing the configuration of this apparatus example. In the figure, B'is a follow-up device for a manipulator of the present device example, Cb 'is an off-line control device, 7
Reference numeral b ″ is a correction unit. Incidentally, the same blocks as those of the first device example shown in FIG.

(Method Example 2) The execution processing procedure of the second method example of the present invention applied to the present apparatus example will be described. In this device example, the offline process shown in FIG. 1 is commonly used, and when the actual teaching data and the detected position information are simply associated in the online process, the actual teaching closest to the machining path length calculated from the detected position information is performed. The difference is that the correction information is calculated with the data as the corresponding points, except that the procedure is executed by following the same procedure as in the first method example, and even in this case, the correction function is applied to the teaching path. The same effect as the case can be obtained.

[0070]

As described above, according to the present invention, since no highly reliable operation command correcting means is provided as in the prior art, highly accurate path following of the effector is obstructed. It is possible to provide a highly reliable and highly accurate follow-up device for manipulators and a follow-up control method.

[Brief description of drawings]

FIG. 1 is a block diagram of a system configuration for explaining an off-line operation of a first device example of the present invention.

FIG. 2 is a block diagram of a system configuration for explaining an online operation of the above.

FIG. 3 is a schematic diagram illustrating a procedure for associating a teaching route and an actual teaching route in the first method example of the present invention.

FIG. 4 is a system block diagram showing a second device example of the present invention.

FIG. 5 is a system block diagram showing a conventional technical configuration.

[Explanation of symbols]

 A ... Control device B, B '... Tracking device Ca ... Offline control device Cb, Cb' ... Online control device 1 ... Manipulator 2 ... Sensor 3 ... Welding torch 4 ... Teaching data input unit 5 ... Sensor controller 6 ... Correction amount Generation unit 7, 7a ', 7b', 7b "... Correction unit 8 ... Servo unit 9 ... Amplifier 10 ... Welding line 11 ... Effector 12 ... Coordinate conversion / memory unit 13 ... Machining work 14 ... Teaching path / speed function generation unit 15 ... Route correction unit 16 ... Trajectory generation unit 17 ... Actual route data memory unit 18 ... Route correspondence unit 19 ... Actual teaching route generation unit 20 ... Route created by teaching data 21 ... Teaching data 22 ... Machining route

Claims (10)

[Claims] 1. A processing means for processing an object, a detection means installed near the processing means for detecting processing path information on the object, and an articulated manipulator for holding the processing means and the detection means. , A manipulator capable of following the machining means in a machining path in real time while correcting an operation command of the manipulator determined based on teaching data given in advance based on the position information of the machining object detected by the detection means. In a tracking device having a control means for moving the control means, each of the control means has a teaching data input section for inputting the teaching data, a detection means controller for processing a signal from the sensor when online, and a servo for the manipulator. It processes the position / posture information of each joint, and when it is online, A coordinate conversion / memory unit for converting and storing the detection signals into coordinate system data, and information on an actual teaching path traced by the processing means actually operated based on the teaching data when offline is detected and stored for each servo cycle. An actual route data memory unit, a route corresponding unit that associates the teaching route according to the teaching data with the actual teaching route, and an actual teaching route generation that generates actual teaching route data from the data accumulated in the route corresponding unit. Section, a correction amount generation section that calculates the correction amount of the coordinate coordinate data from the coordinate conversion / memory section with a signal from the actual teaching path generation section when online, and teaching data of the teaching data input section when offline Generates a function related to the teaching path determined from the above, outputs it to the path corresponding section, and directly outputs the machining means trajectory from the function. , Manipulator tracking device, characterized in that from the taught path functions fixed by a signal from the correction amount generating section when online and a correction unit that calculates outputs a target trajectory of the processing means. 2. A processing means for processing an object, a detection means installed near the processing means for detecting processing path information on the object, and an articulated manipulator for holding the processing means and the detection means. , So as to cause the machining means to follow the machining path in real time while correcting the operation command of the manipulator determined based on the teaching data given in advance based on the position information of the machining object detected by the detection means. In a tracking device having control means for moving a manipulator, a teaching data input section for inputting the teaching data, a detection means controller for processing a signal from the detection means when online, and a servo for the manipulator are provided in the control means. It processes the position / orientation information of each joint it has, and when online, it uses the detection means control. A coordinate conversion / memory unit that converts / stores the detection signal from the roller into coordinate system data, and detects information about the actual teaching path traced by the machining means that has actually operated based on the teaching data when offline at each servo cycle. An actual route data memory unit to store, a route correspondence unit that associates the teaching route according to the teaching data with the actual teaching route, and a signal from the route corresponding unit when online, the coordinate conversion / conversion from the memory unit. A correction amount generation unit that calculates a correction amount of coordinate system data, and a function related to the teaching route determined from the teaching data of the teaching data input unit when offline, and outputs the function to the route corresponding unit and from the function. The processing means trajectory is directly calculated and output, and directly from the teaching path function corrected by the signal from the correction amount generation unit when online. A manipulator tracking device comprising: a correction unit that calculates and outputs a target trajectory of the processing means. 3. The teaching section / velocity function generating section, which generates a function relating to the teaching path determined from the teaching data of the teaching data input section, and the teaching path / velocity function generating section and the correction amount generation when online. A path correction unit that calculates and determines the correction of the teaching path function based on a signal from the unit, and a direct signal from the teaching path speed function generation unit when offline, and a target trajectory of the processing means from the path correction unit when online The tracking device for a manipulator according to claim 1 or 2, further comprising: a trajectory generation unit that outputs the trajectory. 4. The processing means and the detection means are a welding torch as an effector for performing processing and a visual sensor as a sensor capable of detecting a position and an angle, respectively. Tracking device for the manipulator described. 5. A processing means for processing an object, a detection means installed near the processing means for detecting processing path information on the object, and an articulated manipulator holding the processing means and the detection means in advance. The manipulator so as to cause the machining means to follow the machining path in real time while correcting the operation command of the manipulator determined based on the given teaching data based on the position information of the machining object detected by the detection means. When driving the manipulator, an actual teaching path traced by the processing means when the manipulator is operated with an operation command value consisting of a teaching path determined from the teaching data and a target speed, and the teaching path based on the teaching data. By associating the above-mentioned teaching points with each other, the actual teaching points in the actual teaching paths corresponding to the teaching points in the respective teaching paths are associated with each other. A number is created in advance, and the teaching path is sequentially corrected with the correction information calculated by associating the detected position information obtained in time series from the detecting means when the work is executed with the points on the actual teaching path function, A tracking control method for a manipulator, which is characterized in that 6. A processing means for processing an object, a detection means installed near the processing means for detecting processing path information on the object, and an articulated manipulator holding the processing means and the detection means in advance. The manipulator is configured to cause the machining means to follow the machining path in real time while correcting the operation command of the manipulator determined based on the given teaching data based on the position information of the machining target detected by the detection means. In driving, the point based on the teaching data and the point on the actual teaching path traced by the processing means when the manipulator is operated with the operation command value consisting of the teaching path determined from the teaching data and the target speed. Correspondence with points on the teaching path is performed in advance, and when performing work, a plurality of time-series data obtained from the detection means is obtained. And position information output, said a point on the actual teaching path, the modifying successively the teaching path correction information calculated by the association, manipulator tracking control method characterized by. 7. The operation command value is a teaching path function value and a target speed function value related to a position / orientation calculated from a machining start point using a path length as a parameter based on teaching data, and is a second derivative of the path length. It is expressed by a coefficient matrix of a cubic function that guarantees even continuity.
Alternatively, the manipulator follow-up control method according to the sixth aspect. 8. Correspondence between the actual teaching path and the teaching path is obtained by obtaining the expansion / contraction ratio of the actual teaching path length to the teaching path length, and using the expansion / contraction ratio, the path of the actual teaching path corresponding to the path length up to each teaching point. The length is calculated to determine the position and orientation of the closest point in the actual teaching path at that time, and finally the actual teaching path function corresponding to the teaching path function is calculated using the adjacent point group data. The tracking control method for a manipulator according to claim 5, 6, or 7. 9. The point on the actual teaching path, which is associated with the teaching path, is detected for each servo cycle provided in each joint of the multi-joint manipulator. Tracking control method for manipulators. 10. Correspondence between the detected position information of the detecting means and the points on the actual teaching route is as follows. First, the position information of the characteristic points on the machining route of a constant cycle based on the detection of the detecting means and the detection time The position vector of the feature point on the machining path is converted into a vector of the reference coordinate system by using the position information of the machining means obtained from the joint position information of the multi-joint manipulator of A correction amount is calculated for each corresponding point from the error between the machining path and the actual teaching path for the translational component at both positions and the rotational component about the vertical axis of the reference coordinate system using the teaching data. The manipulator follow-up control method according to claim 5, 6, 7, 8 or 9.