JPH07311938A - Production of magnetic recording medium - Google Patents

Production of magnetic recording medium

Info

Publication number
JPH07311938A
JPH07311938A JP10032694A JP10032694A JPH07311938A JP H07311938 A JPH07311938 A JP H07311938A JP 10032694 A JP10032694 A JP 10032694A JP 10032694 A JP10032694 A JP 10032694A JP H07311938 A JPH07311938 A JP H07311938A
Authority
JP
Japan
Prior art keywords
water
substrate
recording medium
cleaning
magnetic recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10032694A
Other languages
Japanese (ja)
Other versions
JP3206296B2 (en
Inventor
Kazuo Futamura
和男 二村
Masahiko Yokouchi
昌彦 横内
Yoshiaki Ishizawa
義明 石澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP10032694A priority Critical patent/JP3206296B2/en
Publication of JPH07311938A publication Critical patent/JPH07311938A/en
Application granted granted Critical
Publication of JP3206296B2 publication Critical patent/JP3206296B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Cleaning By Liquid Or Steam (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To eliminate defect on the surface of a substrate caused by contaminants or the residue of alkaline detergent or surfactant by employing electrolyzed water in place of pure water for cleaning the surface of the nonmagnetic substrate of a magnetic recording medium. CONSTITUTION:When an electrolyzed water, i.e., an oxidative water (anode 2 water) or a reductive water (cathode 3 water) produced through electrolysis of water is employes as a cleaning water for the nonmagnetic substrate of a magnetic recording medium, the cleaning power is enhanced significantly by the oxidative or reductive properties thereof. Consequently, even if an alkaline detergent or a surfactant is used only a small quantity or it is not used at all, contaminants including oily contaminants can be removed effectively from the surface of the substrate. This method provides sufficient cleanliness for the substrate of magnetic recording medium.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、磁気記録媒体の製造
方法に関し、詳しくは磁気記録媒体の非磁性基体の洗浄
方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a magnetic recording medium, and more particularly to a method for cleaning a non-magnetic substrate of a magnetic recording medium.

【0002】[0002]

【従来の技術】近年、コンピュータなどの情報処理装置
の外部記憶装置として固定磁気ディスク装置が多く用い
られている。このような固定磁気ディスク装置に用いら
れる磁気記録媒体は、一般に、非磁性基体上に、非磁性
金属下地層,強磁性合金からなる薄膜磁性層,保護層,
潤滑層が順次設けられて構成されている。
2. Description of the Related Art In recent years, fixed magnetic disk devices have been widely used as external storage devices for information processing devices such as computers. A magnetic recording medium used in such a fixed magnetic disk device generally includes a non-magnetic substrate, a non-magnetic metal underlayer, a thin-film magnetic layer made of a ferromagnetic alloy, a protective layer,
A lubricating layer is sequentially provided and configured.

【0003】非磁性基体としては、通常、アルミニウム
合金からなる基板上に無電解メッキ法でNi−P層を形
成した基体が用いられる。この基体の表面は平滑に加工
された後、良好な磁気特性を得るために、テクスチャー
加工が施されて微細な凹凸からなるテクスチャーが形成
される。その上に、非磁性金属下地層として,例えばC
rがスパッタ法で成膜形成されるが、膜厚均一で均質な
層を形成するためには基体表面を充分に清浄化しておく
ことが重要である。そのため、従来、基体には、スパッ
タ成膜を行う前に、精密洗浄,例えば,純水中でN2
バブリングしながら洗浄して表面加工に使用した研磨剤
などを除去した後、温純水にアルカリ性洗剤を加えた洗
浄液による脱脂洗浄,温純水シャワー洗浄,純水シャワ
ー洗浄を行い、さらに超純水シャワー洗浄を行った後、
IPAを用いた蒸気乾燥を行う、など極めて程度の高い
洗浄が施されてきた。
As the non-magnetic substrate, a substrate formed of an aluminum alloy on which a Ni-P layer is formed by electroless plating is usually used. After the surface of this substrate is processed to be smooth, in order to obtain good magnetic properties, it is subjected to texture processing to form a texture having fine irregularities. On top of that, as a non-magnetic metal underlayer, for example, C
Although r is formed into a film by a sputtering method, it is important to sufficiently clean the surface of the substrate in order to form a uniform layer having a uniform film thickness. Therefore, conventionally, the substrate is subjected to precision cleaning, for example, cleaning with bubbling N 2 in pure water to remove the polishing agent used for the surface processing before the sputter film formation, and then the hot pure water is made alkaline. After degreasing cleaning with a cleaning solution containing detergent, warm pure water shower cleaning, pure water shower cleaning, and ultrapure water shower cleaning,
Extremely high degree of cleaning has been performed such as steam drying using IPA.

【0004】これらの洗浄には、フィルター濾過および
紫外線殺菌処理を行った純水や、さらに純水中のイオン
を除去した超純水が用いられる。しかしながら、水は多
くの物質に対して高い溶解力を有し洗浄液として優れて
いるが、極性の少ない油性の物質に対しては溶解力がな
く洗浄効力がない。そのために、上述のように、温純水
にアルカリ性の洗剤と適当な界面活性剤を加えて油性の
物質の洗浄能力を付与した洗浄液で洗浄し、その後純水
や超純水で洗浄することが行われてきた。
For these cleanings, pure water which has been filtered and sterilized by ultraviolet rays, and ultrapure water from which ions in the pure water have been removed are used. However, although water has a high dissolving power for many substances and is excellent as a cleaning liquid, it has no dissolving power for oily substances having a low polarity and has no cleaning effect. For that purpose, as described above, washing is performed with a washing liquid having an ability to wash oily substances by adding an alkaline detergent and a suitable surfactant to warm pure water, and then washing with pure water or ultrapure water. Came.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、油性の
物質を洗浄除去するために加えたアルカリ性洗剤や界面
活性剤をその後完全に除去することは難しく、これらの
残渣が影響して非磁性金属下地層の均一,均質な成膜が
阻害されるという問題があった。アルカリ性洗剤や界面
活性剤の添加量を少なくすれば残渣をなくすことができ
るが、反面、油性の汚染物が残って良好な成膜を阻害す
る問題が発生する。
However, it is difficult to completely remove the alkaline detergent or the surfactant added to wash and remove the oily substance after that, and these residues affect the non-magnetic metal underlayer. However, there was a problem that the uniform and homogeneous film formation was hindered. If the amount of the alkaline detergent or the surfactant added is reduced, the residue can be eliminated, but on the other hand, a problem that oily contaminants remain and a good film formation is hindered occurs.

【0006】この発明は、上述の問題点を解消して、ア
ルカリ性洗剤や界面活性剤の添加量を少なくしても、さ
らには、アルカリ性洗剤や界面活性剤を使用しなくて
も、基体表面の汚染物を油性の汚染物も含めて充分除去
することができる基体の洗浄法を見いだし、基体表面の
汚染物,アルカリ性洗剤や界面活性剤の残渣に起因する
欠陥の発生しない磁気記録媒体の製造方法を提供するこ
とを目的とする。
The present invention solves the above-mentioned problems and reduces the amount of alkaline detergent or surfactant added, or even if alkaline detergent or surfactant is not used, A method of cleaning a substrate capable of sufficiently removing contaminants including oily contaminants, and a method for producing a magnetic recording medium free from defects caused by contaminants on the substrate surface, residues of alkaline detergents and surfactants The purpose is to provide.

【0007】[0007]

【課題を解決するための手段】上記の課題は、この発明
によれば、非磁性基体表面を洗浄液で清浄化し、その上
に少なくとも非磁性金属下地層,強磁性合金からなる薄
膜磁性層,保護層,潤滑層をこの順に形成する磁気記録
媒体の製造方法において、前記非磁性基体の清浄化に用
いる洗浄水として電気分解水を用いることによって解決
される。
According to the present invention, the above problems are solved by cleaning the surface of a non-magnetic substrate with a cleaning liquid, and further, at least a non-magnetic metal underlayer, a thin film magnetic layer made of a ferromagnetic alloy, and a protective layer. In a method of manufacturing a magnetic recording medium in which a layer and a lubricating layer are formed in this order, the problem can be solved by using electrolyzed water as cleaning water used for cleaning the non-magnetic substrate.

【0008】洗浄水としては、電気分解水のうちでも水
素(H2 )を含み還元性を有するカソード水が特に好適
である。非磁性基体が、アルミニウム合金からなる基板
の表面に無電解メッキ法で形成したNi−P層を備えて
なる基体、ガラスからなる基体いずれの場合でもこの方
法は極めて有効である。
Among the electrolyzed water, cathode water having hydrogen (H 2 ) and having a reducing property is particularly suitable as the washing water. This method is extremely effective regardless of whether the non-magnetic substrate is a substrate having a Ni-P layer formed by electroless plating on the surface of a substrate made of an aluminum alloy or a substrate made of glass.

【0009】[0009]

【作用】水を直流電気分解すると、アノード極では酸素
が発生し、カソード極では水素が発生する。従って、ア
ノード極近辺の水は酸素を含み酸化性を有し、カソード
極近辺の水は水素を含み還元性を有する。このような水
の電気分解により得られる酸化性を有する水(以下、ア
ノード水と称する)や還元性を有する水(以下、カソー
ド水と称する),すなわち電気分解水を磁気記録媒体の
非磁性基体の洗浄水として用いると、その酸化性,還元
性のために洗浄能力が大幅に向上し、アルカリ性洗剤,
界面活性剤の使用量を少なくしても、さらには使用しな
くても油性の汚染物を含めて基体表面の汚染物を効果的
に除去することができ、磁気記録媒体の基体として充分
な清浄度が得られる。
When water is subjected to DC electrolysis, oxygen is generated at the anode and hydrogen is generated at the cathode. Therefore, the water near the anode electrode contains oxygen and is oxidative, and the water near the cathode electrode contains hydrogen and is reducing. Oxidizing water (hereinafter referred to as "anode water") and reducing water (hereinafter referred to as "cathode water") obtained by electrolysis of such water, that is, electrolyzed water, is a non-magnetic substrate of a magnetic recording medium. When used as cleaning water for, the cleaning ability is greatly improved due to its oxidizing and reducing properties, and alkaline detergent,
It is possible to effectively remove contaminants on the surface of the substrate including oily contaminants even if the amount of surfactant used is reduced or even not used, and it is possible to clean the substrate sufficiently as a magnetic recording medium substrate. You get a degree.

【0010】[0010]

【実施例】図2は、この発明に係わる水の電気分解に用
いる電解槽の一例の説明図である。図2において、電解
槽1内にPtからなるアノード極2とカソード極3が挿
入されており、両極の互いに相対する面にはフッ素系の
カチオン交換膜4が密着して取り付けられている。電解
槽1内はアノード極2とカソード極3によりアノード室
1a,カソード室1b,中間室1cに分けられている。
両極間に直流電源5により所要の低電圧を印加すると電
解槽1内の水は電気分解し、アノード極においては
EXAMPLE FIG. 2 is an explanatory view of an example of an electrolytic cell used for electrolyzing water according to the present invention. In FIG. 2, an anode 2 and a cathode 3 made of Pt are inserted in an electrolytic cell 1, and a fluorine-based cation exchange membrane 4 is attached in close contact with the surfaces of both electrodes facing each other. The inside of the electrolytic cell 1 is divided into an anode chamber 1a, a cathode chamber 1b, and an intermediate chamber 1c by an anode electrode 2 and a cathode electrode 3.
When a required low voltage is applied between the both electrodes by the DC power source 5, the water in the electrolytic cell 1 is electrolyzed, and at the anode electrode

【0011】[0011]

【数1】2H2 O−4e- →4H+ +O2 の反応が起きてO2 (酸素)が発生し、カソード極にお
いては
## EQU1 ## The reaction of 2H 2 O-4e → 4H + + O 2 occurs to generate O 2 (oxygen), and at the cathode electrode,

【0012】[0012]

【数2】4H+ +4e- →2H2 の反応が起きてH2 (水素)が発生する。その結果、ア
ノード室1a では酸素を含み酸化性を有するアノード水
が得られ、カソード室1bでは水素を含み還元性を有す
るカソード水が得られ、中間室1cではHを含む中間室
水が得られる。
## EQU2 ## The reaction of 4H + + 4e → 2H 2 occurs to generate H 2 (hydrogen). As a result, anode water containing oxygen and having oxidizing properties is obtained in the anode chamber 1a, cathode water containing hydrogen and having reducing properties is obtained in the cathode chamber 1b, and intermediate chamber water containing H is obtained in the intermediate chamber 1c. .

【0013】ディスク状のアルミニウム合金基板の表面
に無電解メッキによりNi−P層を被覆形成した基体の
表面を市販の研削液(成分に鉱油,界面活性剤,有機ア
ミン,塩素系極圧剤などを含む)を用いて研削,研磨加
工を施し、その後純水に界面活性剤を添加した洗浄液で
スクライブ洗浄し風乾して基体試料とする。この基体試
料の表面には洗浄残渣が汚染物として付着している。
The surface of the substrate, which is formed by coating the surface of the disk-shaped aluminum alloy substrate with the Ni-P layer by electroless plating, is commercially available as a grinding liquid (mineral oil, surfactant, organic amine, chlorine-based extreme pressure agent, etc.). Is used), and then scribe cleaning is performed with a cleaning liquid obtained by adding a surfactant to pure water and air drying is performed to obtain a substrate sample. The cleaning residue adheres to the surface of the substrate sample as a contaminant.

【0014】このような試料表面に図2に示した電解槽
で得られた電気分解水であるアノード水,中間室水,カ
ソード水および通常の純水をそれぞれ3分間流下させて
洗浄し、洗浄後の試料表面に存在するC量をグリムグロ
ー表面分析装置で測定した。その結果を図1に示す。図
1において、縦軸は試料表面のC量を洗浄前の量を1と
し各洗浄水で洗浄後のC量を相対比で示したものであ
る。このC量は試料表面に残存する汚染物に由来するも
のであり、C量が少ない程試料表面の清浄度が高いと考
えられる。
On the surface of such a sample, anode water, intermediate chamber water, cathode water and ordinary pure water, which are electrolyzed water obtained in the electrolytic cell shown in FIG. The amount of C present on the surface of the sample after that was measured by a grim glow surface analyzer. The result is shown in FIG. In FIG. 1, the vertical axis represents the amount of C on the surface of the sample as 1 before washing, and shows the amount of C after washing with each washing water as a relative ratio. This amount of C is derived from contaminants remaining on the sample surface, and it is considered that the smaller the amount of C, the higher the cleanliness of the sample surface.

【0015】図1に見られるように、純水で洗浄したも
のよりも電気分解水で洗浄したものの方がC量が少な
く、電気分解水の洗浄能力が高いことが判る。なかで
も、カソード水の洗浄能力が特に高い。このように電気
分解水は洗浄能力が高いので、磁気記録媒体の基体の洗
浄に電気分解水を用いることにより、洗浄水に加えるア
ルカリ性洗剤,界面活性剤の量を従来よりも少なくする
こと,さらにはアルカリ性洗剤,界面活性剤を使用しな
いことも可能となる。
As shown in FIG. 1, it can be seen that the amount of C washed with electrolyzed water is smaller than that of washed with pure water, and the ability to wash electrolyzed water is higher. Among them, the cleaning ability of cathode water is particularly high. Since the electrolyzed water has a high cleaning ability as described above, by using the electrolyzed water for cleaning the substrate of the magnetic recording medium, the amount of the alkaline detergent and the surfactant added to the cleaning water can be reduced as compared with the conventional one. It is also possible to use no alkaline detergent or surfactant.

【0016】以上の実施例では、基体試料としてアルミ
ニウム合金基板の表面に無電解メッキによりNi−P層
を被覆形成した基体を用いたが、これに限定されるもの
ではなく、ガラスからなる基体試料に対しても電気分解
水による洗浄は同様に有効である。
In the above examples, a substrate obtained by coating the surface of an aluminum alloy substrate with a Ni-P layer by electroless plating was used as the substrate sample, but the substrate sample is not limited to this, and a substrate sample made of glass is used. Against this, cleaning with electrolyzed water is similarly effective.

【0017】[0017]

【発明の効果】この発明によれば、磁気記録媒体の非磁
性基体表面の清浄化に用いる洗浄水として純水の代わり
に電気分解水を用いることにより、洗浄水に加えるアル
カリ性洗剤,界面活性剤の量を従来よりも少なくして
も、さらには、アルカリ性洗剤や界面活性剤を使用しな
くても、基体表面の汚染物を油性の汚染物を含めて効果
的に充分除去することができ、基体表面の汚染物,アル
カリ性洗剤や界面活性剤の残渣に起因する欠陥のない磁
気記録媒体を製造することが可能となる。
According to the present invention, by using electrolytic water instead of pure water as the cleaning water used for cleaning the surface of the non-magnetic substrate of the magnetic recording medium, an alkaline detergent or a surfactant added to the cleaning water. Can be effectively and sufficiently removed including the oily contaminants even if the amount of is less than the conventional amount, and further, without using an alkaline detergent or a surfactant. It is possible to manufacture a magnetic recording medium without defects due to contaminants on the surface of the substrate, residues of alkaline detergents and surfactants.

【図面の簡単な説明】[Brief description of drawings]

【図1】各種洗浄水による洗浄後の基体試料表面の残存
C量を洗浄前のC量を1として相対的に示す線図
FIG. 1 is a diagram relatively showing the amount of residual C on the surface of a substrate sample after washing with various types of washing water, with the amount of C before washing being 1

【図2】この発明に係わる水の電解槽の一例の説明図FIG. 2 is an explanatory view of an example of a water electrolyzer according to the present invention.

【符号の説明】[Explanation of symbols]

1 電解槽 1a アノード室 1b カソード室 1c 中間室 2 アノード 3 カソード 4 カチオン交換膜 5 直流電源 1 Electrolyzer 1a Anode chamber 1b Cathode chamber 1c Intermediate chamber 2 Anode 3 Cathode 4 Cation exchange membrane 5 DC power supply

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】非磁性基体表面を洗浄液で清浄化し、その
上に少なくとも非磁性金属下地層,強磁性合金からなる
薄膜磁性層,保護層,潤滑層をこの順に形成する磁気記
録媒体の製造方法において、前記非磁性基体表面の清浄
化に用いる洗浄水として電気分解水を用いることを特徴
とする磁気記録媒体の製造方法。
1. A method of manufacturing a magnetic recording medium, wherein the surface of a non-magnetic substrate is cleaned with a cleaning liquid, and at least a non-magnetic metal underlayer, a thin film magnetic layer made of a ferromagnetic alloy, a protective layer, and a lubricating layer are formed in this order. 2. A method for manufacturing a magnetic recording medium, wherein electrolyzed water is used as cleaning water used for cleaning the surface of the non-magnetic substrate.
【請求項2】洗浄水として電気分解水のうちの水素(H
2 )を含み還元性を有するカソード水を用いることを特
徴とする請求項1記載の磁気記録媒体の製造方法。
2. Hydrogen (H) in electrolyzed water is used as washing water.
2. The method for producing a magnetic recording medium according to claim 1, wherein cathode water containing 2 ) and having a reducing property is used.
【請求項3】非磁性基体がアルミニウム合金からなる基
板の表面に無電解メッキ法で形成したNi−P層を備え
てなることを特徴とする請求項1記載の磁気記録媒体の
製造方法。
3. The method of manufacturing a magnetic recording medium according to claim 1, wherein the non-magnetic substrate comprises a substrate made of an aluminum alloy, and a Ni-P layer formed on the surface of the substrate by electroless plating.
【請求項4】非磁性基体がガラスからなることを特徴と
する請求項1記載の磁気記録媒体の製造方法。
4. The method for manufacturing a magnetic recording medium according to claim 1, wherein the non-magnetic substrate is made of glass.
JP10032694A 1994-05-16 1994-05-16 Manufacturing method of magnetic recording medium Expired - Lifetime JP3206296B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10032694A JP3206296B2 (en) 1994-05-16 1994-05-16 Manufacturing method of magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10032694A JP3206296B2 (en) 1994-05-16 1994-05-16 Manufacturing method of magnetic recording medium

Publications (2)

Publication Number Publication Date
JPH07311938A true JPH07311938A (en) 1995-11-28
JP3206296B2 JP3206296B2 (en) 2001-09-10

Family

ID=14271048

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10032694A Expired - Lifetime JP3206296B2 (en) 1994-05-16 1994-05-16 Manufacturing method of magnetic recording medium

Country Status (1)

Country Link
JP (1) JP3206296B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10172941A (en) * 1996-12-16 1998-06-26 Dainippon Screen Mfg Co Ltd Substrate cleaning method and equipment therefor
US5783790A (en) * 1995-11-30 1998-07-21 Organo Corporation Wet treatment method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5783790A (en) * 1995-11-30 1998-07-21 Organo Corporation Wet treatment method
JPH10172941A (en) * 1996-12-16 1998-06-26 Dainippon Screen Mfg Co Ltd Substrate cleaning method and equipment therefor

Also Published As

Publication number Publication date
JP3206296B2 (en) 2001-09-10

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