JPH0731168A - Ultrasonic motor - Google Patents

Ultrasonic motor

Info

Publication number
JPH0731168A
JPH0731168A JP5193983A JP19398393A JPH0731168A JP H0731168 A JPH0731168 A JP H0731168A JP 5193983 A JP5193983 A JP 5193983A JP 19398393 A JP19398393 A JP 19398393A JP H0731168 A JPH0731168 A JP H0731168A
Authority
JP
Japan
Prior art keywords
ultrasonic motor
disc
friction
rotary drum
drive module
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5193983A
Other languages
Japanese (ja)
Inventor
Shigeo Kuwabara
重雄 桑原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Electric Manufacturing Ltd
Original Assignee
Toyo Electric Manufacturing Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Electric Manufacturing Ltd filed Critical Toyo Electric Manufacturing Ltd
Priority to JP5193983A priority Critical patent/JPH0731168A/en
Publication of JPH0731168A publication Critical patent/JPH0731168A/en
Pending legal-status Critical Current

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To provide an ultrasonic motor in which the rotation can be detected with high resolution without projecting the ultrasonic motor to the outside of the case. CONSTITUTION:A drive module 1 is brought into external contact with a rotary drum 2 to cause rotary driving. A disc 3 is disposed integrally with the rotary drum 2 and a frictional disc 4 is pressed against the outer radial part thereof. The disc 3 has a diameter smaller than the height of the drive module 1 and a plurality of substantially conical protrusions 4a and recesses 3a are provided at the frictional transmission parts of both discs in order to prevent slip through mating. A rotation detector is linked with the frictional disc 4 and integrally fitted in a case 6.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は超音波モータ、特に回転
ドラムに駆動モジュールを外接させて回転駆動を得る超
音波モータの回転検出に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic motor, and more particularly to the rotation detection of an ultrasonic motor in which a drive module is circumscribed on a rotary drum to obtain rotary drive.

【0002】[0002]

【従来の技術】従来、回転ドラムに駆動モジュールを外
接せさ、回転駆動を得るその回転検出を行う超音波モー
タは、図3,4に示される。図3は従来の超音波モータ
の回転検出器の一例を示す要部正面図、図4は図3の側
面図であり、圧電素子などを用いて一体構築した駆動モ
ジュール16を回転ドラム11の外径部に取付金具17で弾性
的に外接させ、回転ドラム11と一体化した軸11a を回転
軸支し、この出力端にカップリング12を介して回転検出
器13へ駆動連係させ、これを取付円筒14によりモータの
ケース15へ取着し、これらを一体構築して超音波モータ
の回転検出を構成している。
2. Description of the Related Art Conventionally, an ultrasonic motor for circumscribing a drive module on a rotary drum and detecting its rotation to obtain rotational drive is shown in FIGS. FIG. 3 is a front view of an essential part showing an example of a rotation detector of a conventional ultrasonic motor, and FIG. 4 is a side view of FIG. 3, in which a drive module 16 integrally constructed by using a piezoelectric element or the like is provided outside the rotary drum 11. The shaft 11a, which is elastically circumscribed by the mounting bracket 17 on the diametrical part, is rotatably supported by the shaft 11a integrated with the rotary drum 11, and the output end is drive-coupled to the rotation detector 13 via the coupling 12 and mounted. The cylinder 14 is attached to the motor case 15, and these are integrally constructed to detect the rotation of the ultrasonic motor.

【0003】このように構成された超音波モータの駆動
とその回転検出方法を説明すれば、駆動モジュール16へ
所要のパルス状の電源を給電すれば駆動モジュール16の
押接下面には楕円運動した波動(図示せず)が合成さ
れ、この面に押接している回転ドラム11は波動の運動を
摩擦駆動により伝達されて回転する。回転ドラム11には
軸11a が一体化され、この軸11a に連係してカップリン
グ12を介して検出器13が回転し、ここで光,磁気方式な
どの一般の回転検出方法で回転検出が行なわれる。
A method of driving the ultrasonic motor having the above-described structure and a method of detecting its rotation will be described. When a required pulsed power source is supplied to the driving module 16, the lower surface of the pressing portion of the driving module 16 makes an elliptic motion. A wave (not shown) is synthesized, and the rotary drum 11 pressed against this surface rotates by transmitting the wave motion by friction drive. A shaft 11a is integrated with the rotary drum 11, and a detector 13 is rotated via a coupling 12 in association with the shaft 11a, where rotation detection is performed by a general rotation detection method such as an optical or magnetic method. Be done.

【0004】[0004]

【発明が解決しようとする課題】しかし、上述した構成
においては、超音波モータのケース15より外部へカップ
リング12,回転検出器13の分だけ突起(図中δ)してし
まう。本来超音波モータは電気モータにくらべ低速高ト
ルクで且つ小形軽量の特徴を有し、歯車などを使用ぜす
に直接ロボットなどに配してコンパクト化が得られるの
であり、このことは特に自在に移動する自走ロボットな
どの適用には極めて重要になっている。しかるに超音波
モータ本体の厚みよりも一般には2〜4倍の長さが突起
(図中δ)するので、前述の自走ロボットなど省スペー
スを要するところへの適用にはせっかく超音波モータが
コンパクトであっても、実際には前記の突起δのため、
その省力スペース化が損なわれ極めて問題となってい
る。本発明は上述した点に鑑みて創案されたもので、そ
の目的とするところは、かような欠点を除去した超音波
モータを得ることにある。
However, in the above-mentioned structure, the case 15 of the ultrasonic motor is projected to the outside by the amount of the coupling 12 and the rotation detector 13 (δ in the figure). Originally, the ultrasonic motor has the characteristics of low speed, high torque, small size and light weight as compared with the electric motor, and it can be placed directly on the robot etc. even if it uses gears etc., and it can be made compact. It has become extremely important for applications such as mobile robots that move. However, since the protrusions (δ in the figure) are generally 2 to 4 times as long as the thickness of the ultrasonic motor body, the ultrasonic motor is compact enough to be applied to a space-saving place such as the aforementioned self-propelled robot. However, because of the above-mentioned protrusion δ,
The labor saving space is impaired, which is a serious problem. The present invention was devised in view of the above-mentioned points, and an object of the present invention is to obtain an ultrasonic motor that eliminates such drawbacks.

【0005】[0005]

【課題を解決するための手段】つまり、その目的を達成
するための手段は、回転ドラムに駆動モジュールを外接
させて回転駆動モジュールを得る超音波モータにおい
て、回転ドラムの側部に一体的に円板3を配し、この円
板3の外径部に駆動モジュールの高さLと同等またはそ
れよりも小さな径Eの摩擦円板4を押接させ、これに回
転検出器5を連係させ、これらを超音波モータのケース
内に取着して一体構成し、超音波モータのケース外へ突
起することなく回転検出を行うようにしている。また、
前記摩擦円板4と円板3の押接部の摩擦伝達部にはそれ
ぞれ略円錐形の凸起と凹みを複数個形成してこの噛合に
よりスリップ防止と位置ずれ補正をするようにしてい
る。
[Means for Solving the Problems] That is, in order to achieve the object, an ultrasonic motor in which a drive module is circumscribed on a rotary drum to obtain a rotary drive module is integrally formed on a side portion of the rotary drum. A plate 3 is arranged, a friction disk 4 having a diameter E equal to or smaller than the height L of the drive module is pressed against the outer diameter portion of the disk 3, and the rotation detector 5 is linked thereto. These are attached to the inside of the case of the ultrasonic motor to be integrally configured, and rotation detection is performed without protruding outside the case of the ultrasonic motor. Also,
A plurality of substantially cone-shaped protrusions and depressions are formed in the friction transmission portions of the pressing contact portions of the friction discs 4 and 3, respectively, and the engagement prevents slippage and corrects the positional deviation.

【0006】[0006]

【作用】その作用は次に述べる実施例と併せて説明す
る。
The operation will be described in combination with the embodiment described below.

【0007】[0007]

【実施例】以下、本発明の一実施例を図面に基づいて詳
述する。図1は本発明の一実施例を示す要部正面図、図
2は図1の側面図であり、図1,2において、回転ドラ
ム2に駆動モジュール1を外接させてこれを取付金具に
より弾性的にケース6へ固定して回転駆動を得るように
する。この回転ドラムの側部に円板3を配し、これを回
転ドラム2と駆動連係し、円板3の外径部に駆動モジュ
ール1の高さLと同等またはそれより小さな径Eの摩擦
円板4を押接させ、摩擦円板4の外径部位に略円錐形で
凸起状の摩擦ずれ防止金4aを複数個形成している。押接
相手の円板3には、この凸起には対応させて略同形状の
円錐形の凹み3aと同ピッチで複数個形成し、この噛合に
より円板3と摩擦円板4のスリップ防止と位置ずれ補正
をするようになし、この摩擦円板4に回転検出器5を駆
動連係させ、これらを超音波モータのケース6内に取着
して一体構築し、超音波モータのケース6の外へ突起す
ることなく回転検出を行うように構成している。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to the drawings. 1 is a front view of an essential part showing an embodiment of the present invention, and FIG. 2 is a side view of FIG. 1. In FIGS. 1 and 2, a drive module 1 is circumscribed on a rotary drum 2 and elastically attached by a mounting bracket. It is fixed to the case 6 to obtain rotational drive. A disc 3 is arranged on the side of the rotary drum, and the disc 3 is drivingly linked with the rotary drum 2, and the friction circle having a diameter E equal to or smaller than the height L of the drive module 1 is provided on the outer diameter portion of the disc 3. The plate 4 is pressed into contact with the friction disc 4 and a plurality of substantially conical and convex friction deviation preventing gold 4a are formed on the outer diameter portion of the friction disc 4. A plurality of discs 3 to be pressed against each other are formed at the same pitch as the conical recesses 3a having substantially the same shape corresponding to the protrusions, and the engagement prevents the discs 3 and the friction discs 4 from slipping. The rotation detector 5 is driven and linked to the friction disk 4, and these are mounted in the case 6 of the ultrasonic motor to be integrally constructed. The rotation is detected without protruding to the outside.

【0008】このように構成された超音波モータの駆動
とその回転検出方法を説明すれば、駆動モジュール1へ
所要のパルス状の電源を給電すれば、駆動モジュール1
の押接下面には楕円運動した波動(図示せず)が合成さ
れ、この面に押接している回転ドラム2は波動の運動を
摩擦駆動により伝達されて回転し、これに連係している
円板3も同速度で回転する。さらに、これに押接されて
いる摩擦円板4も押接部の摩擦伝達により回転する。回
転検出はその精度,分解能が極めて重要で、この駆動等
では摩擦により伝達しているので、衝撃や種々の加減速
時のアクシデントなどにより円板3と摩擦円板4の伝達
系に何らかのスリップを生じる可能性が考えられる。そ
こで、もしこのずれが生じても両円板3,4の摩擦面に
形成した略円錐形の凸,凹3a,4aの噛合により、円錐の
三角形状の傾斜効用によりそのピッチ中心に補正され、
ずれの防止がなされる。したがって、このずれの最少補
正間隔がピッチに関係するので、使用目的に応じてピッ
チの刻みを決めればよい。
The driving of the ultrasonic motor constructed as above and the method of detecting the rotation thereof will be described. When the required pulsed power source is supplied to the driving module 1, the driving module 1
A wave (not shown) having an elliptical motion is synthesized on the lower surface of the pressing contact of the rotating drum 2, and the rotary drum 2 pressed against this surface rotates by transmitting the motion of the wave by friction drive, and is linked to the circle. The plate 3 also rotates at the same speed. Further, the friction disc 4 pressed against this also rotates due to the friction transmission of the pressing portion. The accuracy and resolution of rotation detection are extremely important, and since they are transmitted by friction in this drive etc., some slip is caused in the transmission system between the disc 3 and the friction disc 4 due to impact or accidents during various acceleration / deceleration. It may occur. Therefore, even if this deviation occurs, the substantially conical projections and recesses 3a and 4a formed on the friction surfaces of both discs 3 and 4 are corrected to the center of the pitch by the conical triangular inclination effect.
Misalignment is prevented. Therefore, since the minimum correction interval of this deviation is related to the pitch, the pitch increment may be determined according to the purpose of use.

【0009】前記摩擦円板4が回転すれば、これに回転
検出器5が駆動連係しているので、ここで回転検出が行
われる。さらに、実際の設計では駆動モジュール1の大
きさにくらべ、回転ドラム2は複数の駆動モジュール1
を配し、大きな容量を得るのでその配設スペースからし
て当然大きな径になり、円板3の径もこれに同等に大き
くでき、一方、摩擦円板4の小さな径Eは駆動モジュー
ル1の高さLと同等またはそれより小さいのでこの径比
の分だけ円板3の回転数は摩擦円板4に対し増速され、
この分回転検出器5への回転角度は拡大されるので高い
分解能で検出される。試作機では回転ドラム2の外径φ
が 120mmに対し、摩擦円板4の径は約40mm程度になり、
径比 120/40から3倍の分解能の向上が得られた。した
がって、ケース6の外側に突起することなく、またスリ
ップすることなく高分解能で回転検出がなされる。
When the friction disk 4 rotates, the rotation detector 5 is drivingly linked to the rotation, so that rotation detection is performed here. Further, in the actual design, the rotating drum 2 is composed of a plurality of drive modules 1 compared to the size of the drive module 1.
The diameter of the disc 3 can be made as large as this, and the small diameter E of the friction disc 4 is smaller than that of the drive module 1. Since the height L is equal to or smaller than the height L, the rotational speed of the disk 3 is increased with respect to the friction disk 4 by this diameter ratio.
The rotation angle to the rotation detector 5 is expanded by this amount, so that it can be detected with high resolution. Outer diameter of rotating drum 2 in prototype
Is 120 mm, the diameter of the friction disc 4 is about 40 mm,
A resolution improvement of 3 times was obtained from the diameter ratio of 120/40. Therefore, rotation detection is performed with high resolution without protruding outside the case 6 and without slipping.

【0010】[0010]

【発明の効果】以上説明したように本発明によれば、超
音波モータのケース6の外部へ突起することなく回転検
出が可能となり、従来例の回転検出器13,カツプリング
12などの外部突起δにくらべ全く突起δがないので極め
て有用な省スペース化が図られる。特に自走ロボットな
どへの適用が容易に実用可能となる。また、本発明では
円板3,摩擦円板4の厚みの分だけ幅方向の寸法が増す
が、これは数mm程度なので従来の突起δとくらべ数十分
の一となるので問題とならない。さらに、円板3の外径
にくらべ摩擦円板4の外径を小さくできるので、この径
比の分だけ増速され、回転検出器5への回転角度は拡大
されて分解能が上り、精度のよい回転検出が得られる。
このことは超音波モータでは、特に大切で、電気モータ
にくらべその駆動回転数は約(1/30)と低いので、こ
の状態でも増速により精度よく回転検出可能となり精密
な位置決めにも高い効果が得られる。
As described above, according to the present invention, the rotation can be detected without protruding to the outside of the case 6 of the ultrasonic motor, and the rotation detector 13 and the coupling of the conventional example can be detected.
Since there are no protrusions δ at all compared to external protrusions δ such as 12, it is possible to achieve a very useful space saving. Especially, it can be easily applied to a self-propelled robot. Further, in the present invention, the dimension in the width direction is increased by the thickness of the discs 3 and the friction discs 4, but since this is about several mm, it is a tenth of the projection δ in comparison with the conventional projection δ, so there is no problem. Further, since the outer diameter of the friction disk 4 can be made smaller than the outer diameter of the disk 3, the speed is increased by this diameter ratio, the rotation angle to the rotation detector 5 is expanded, the resolution is increased, and the accuracy is improved. Good rotation detection is obtained.
This is especially important for ultrasonic motors, and the driving speed is lower (about 1/30) than that of electric motors, so even in this state, rotation can be detected accurately by increasing the speed, which is highly effective for precise positioning. Is obtained.

【図面の簡単な説明】[Brief description of drawings]

【図1】図1は本発明の超音波モータの回転検出の要部
正面図である。
FIG. 1 is a front view of a main part of rotation detection of an ultrasonic motor according to the present invention.

【図2】図2は図1のアーア断面図である。FIG. 2 is a sectional view taken along the line of FIG.

【図3】図3は従来の超音波モータの回転検出の要部正
面図である。
FIG. 3 is a front view of a main part of rotation detection of a conventional ultrasonic motor.

【図4】図4は図3の側面図である。FIG. 4 is a side view of FIG.

【符号の説明】[Explanation of symbols]

1 駆動モジュール 2 回転ドラム 3 円板 3a 円錐形の凹み 4 摩擦円板 4a 円錐形の凸起 5 回転検出器 6 ケース 7 取付金具 11 回転ドラム 11a 軸 12 カップリング 13 回転検出器 14 取付円筒 15 ケース 16 駆動モジュール 17 取付金具 1 Drive module 2 Rotating drum 3 Disc 3a Conical recess 4 Friction disc 4a Conical protrusion 5 Rotation detector 6 Case 7 Mounting bracket 11 Rotating drum 11a Shaft 12 Coupling 13 Rotation detector 14 Mounting cylinder 15 Case 16 Drive module 17 Mounting bracket

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 回転ドラムに駆動モジュールを外接させ
て回転駆動を得る超音波モータにおいて、前記回転ドラ
ムの側部に円板を配し、これを回転ドラムと駆動連係
し、この円板の外径部に駆動モジュールの高さLと同等
またはそれより小さい径Eの摩擦円板を押接せしめ、こ
の摩擦円板の外径部位に略円錐形で凸起状の摩擦ずれ防
止金4aを複数個形成し、押接相手の円板にはこの凸起4a
に対応させて略同形状の円錐形の凹み3aを同ピッチで複
数個形成し、この噛合により円板と摩擦板部のスリップ
防止と位置ずれ補正をするようにし、この摩擦円板に回
転検出器を駆動連係させ、これらを超音波モータのケー
ス内に取着して一体構成し、超音波モータのケース外へ
突起することなく回転検出を高分解能で行うことを特徴
とする超音波モータ。
1. An ultrasonic motor for rotatively driving a rotary drum by circumscribing a drive module, wherein a disc is arranged on a side of the rotary drum, and the disc is drivingly linked to the rotary drum. A friction disk having a diameter E equal to or smaller than the height L of the drive module is pressed against the diameter portion, and a plurality of substantially anti-friction friction preventing gold 4a having a substantially conical shape is attached to the outer diameter portion of the friction disk. Individually formed, this protrusion 4a on the disk of the pressing partner
Corresponding to the above, a plurality of conical recesses 3a of approximately the same shape are formed at the same pitch, and the engagement prevents slippage between the disc and the friction plate and the displacement is corrected, and rotation detection is performed on this friction disc. An ultrasonic motor, characterized in that the devices are driven and linked, and these are attached inside a case of the ultrasonic motor to be integrally configured, and rotation detection is performed with high resolution without protruding outside the case of the ultrasonic motor.
JP5193983A 1993-07-09 1993-07-09 Ultrasonic motor Pending JPH0731168A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5193983A JPH0731168A (en) 1993-07-09 1993-07-09 Ultrasonic motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5193983A JPH0731168A (en) 1993-07-09 1993-07-09 Ultrasonic motor

Publications (1)

Publication Number Publication Date
JPH0731168A true JPH0731168A (en) 1995-01-31

Family

ID=16317027

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5193983A Pending JPH0731168A (en) 1993-07-09 1993-07-09 Ultrasonic motor

Country Status (1)

Country Link
JP (1) JPH0731168A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5919520A (en) * 1996-08-30 1999-07-06 Tokyo Electron Limited Coating method and apparatus for semiconductor process

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5919520A (en) * 1996-08-30 1999-07-06 Tokyo Electron Limited Coating method and apparatus for semiconductor process
US6749688B2 (en) 1996-08-30 2004-06-15 Tokyo Electron Limited Coating method and apparatus for semiconductor process

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