JPH073029U - Processing status display - Google Patents

Abstract

(57) [Summary] [Structure] The processing status display device 8 specifies the specified data storage unit 3 that stores necessary information data as specified data in a changeable manner, and the information data output from the ion implantation control device 6. The comparison unit 2 that compares the data and outputs only the matched information data, the data recording unit 4 that records the information data output from the comparison unit 2, and the information data read from the data recording unit 4 are displayed on the screen. And an input / output unit 5 having a display device for displaying. [Effect] While continuing the operation of the ion implantation control device 6, it is possible to display and change the information data on the screen for a predetermined period. Therefore, the efficiency and workability in finding a software bug and developing a program are improved.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a processing state display device that displays information data output from a control device such as an ion implantation control device on a screen.

[0002]

[Prior art]

 The ion implanter implants impurities into the ion irradiation target by irradiating the ion irradiation target with the ion beam generated by the ion source and the mass spectrometer, and uniformly implants a predetermined amount of impurities. Therefore, the ion implantation control device monitors and controls the implantation state.

The above-mentioned ion implantation control device monitors and controls the complicated operation of the ion implantation device, and thus requires data processing of various types of information data. Therefore, in the ion implantation control device, the program required for data processing has become large in scale, and along with this, software bugs are likely to exist in the program. Further, since the ion implantation control device easily develops a large-scale program, it is required to be able to confirm the execution of the program.

Therefore, a processing state display device showing the execution of the program is connected to the ion implantation control device, and a conventional processing state display device is shown in FIG. A display device 53 for displaying the information data output from the control device 51 on the screen is used. When a software bug is discovered or a program is developed using this display device 53, a data output routine for outputting specified information data is stored in the storage area of the ion implantation control device 51. Every time, necessary information data is designated as the data output unit 52, and the information data corresponding to the data output unit 52 is output to the display device 53 and displayed on the screen while the ion implantation apparatus is in operation. .

[0005]

[Problems to be solved by the device]

 However, in the display device 53 which is the conventional processing state display device, the specified information data is continuously output during the operation of the ion implantation device, and the screen display of the display device 53 is continuously replaced with the latest information data. As a result, the operator cannot take his eyes off the screen display, and it is necessary for the operator to perform a transcription work when recording the information data displayed on the screen.

Further, when the necessary information data cannot be obtained from the screen display, it is necessary to stop the execution of the program of the ion implantation control device 51 in order to change and add the data output section 52 of the data output routine. There is.

Therefore, the conventional processing status display device has a problem that the efficiency and workability at the time of finding a software bug or developing a program are reduced, and therefore, the present invention provides: It is an object of the present invention to provide a processing status display device capable of solving these problems.

[0008]

[Means for Solving the Problems]

 In order to solve the above-mentioned problems, the processing state display device of the present invention displays only the necessary information data on the screen among the information data output when the program of the control device is executed. have.

That is, the designated data storage means for storing the required information data as designated data in a changeable manner is compared with the designated data and the information data output from the control device, and only the matched information data is output. And comparing means for recording the information data output from the comparing means, and display means for displaying the information data recorded in the recording means on a screen.

[0010]

[Action]

 According to the above configuration, of the processing of reading the information data once recorded in the recording means and displaying it on the screen of the display means, the processing of changing the designated data of the designated data storage means, and the information data from the control device, The process of recording the required information data in the recording means is performed independently. Therefore, even when new information data is input to the processing status display device, the display time of the information data can be set arbitrarily and the execution of the program of the processing status display device is stopped. Even if it is not necessary, it is possible to arbitrarily select the required information data by changing the designated data. Therefore, since the processing status display device can sufficiently grasp the operating status while continuing the operation of the control device, it is possible to improve the efficiency and workability when finding a software bug or developing a program. It is possible.

[0011]

【Example】

 An embodiment of the present invention will be described below with reference to FIGS. 1 to 3.

As shown in FIG. 1, the processing state display device according to the present embodiment is connected to, for example, an ion implantation control device 6 via a communication cable. The ion implantation control device 6 has a data output routine, and the data output routine executes the data output routine when the program execution reaches the data output portion 7. The data is converted into a signal form that conforms to the RS232C communication standard and is output. The data output unit 7 is set in the program so as to specify all information data considered necessary for finding a software bug.

The information data output from the ion implantation control device 6 is input to the buffer unit 1 of the processing state display device 8. Storage areas corresponding to the respective pieces of information data are formed in the buffer section 1, and the respective pieces of information data are temporarily stored in these storage areas.

The buffer unit 1 is connected to one input terminal of the comparison unit 2 (comparison means). A designated data storage unit 3 (designated data storage means) storing designated data is connected to the other input terminal of the comparison unit 2, and an input / output unit 5 is connected to the designated data storage unit 3. . The input / output unit 5 has a keyboard, and by inputting operation data and designation data from the keyboard, the designation data stored in the designation data storage unit 3 can be changed and added.

The comparison section 2 connected to the designated data storage section 3 and the buffer section 1 is connected to a data recording section 4 (recording means) such as a hard disk, and the information stored in the buffer section 1 The data is compared with the designated data stored in the designated data storage unit 3, and only the matched information data is output to the data recording unit 4. Then, the data recording unit 4 is configured to sequentially record the information data input from the comparison unit 2 together with the date and time.

The data recording section 4 is connected to the input / output section 5. The input / output unit 5 has a display device (display means) such as a CRT device in addition to the keyboard, and the display device outputs desired information data recorded in the data recording unit 4 by operating the keyboard. It is designed to be displayed on the screen.

The operation of the processing state display device having the above configuration will be described.

First, the processing state display device 8 is connected to the ion implantation control device 6 via a communication cable, and it is necessary for finding a software bug from the input / output unit 5 of the processing state display device 8. The possible types of information data will be keyed in as designated data. After that, the ion implantation control device 6 is put into operation, and the execution of the program for monitoring and controlling the ion implantation device is started.

When the program execution process reaches the data output unit 7 set in the program, the ion implantation control device 6 outputs the reached information data in the data output unit 7 by executing the data output routine. It will be. This information data is to be output to the processing status display device 8 via the communication cable, and is input to the buffer section 1 of the processing status display device 8 (S1) as shown in FIG. It is stored in the corresponding storage area (S2).

The above S1 and S2 will be performed each time the execution process of the program reaches the data output unit 7 in the program, and the information data in each data output unit 7 is stored in the ion implantation control device 6 As long as is operating, the data will be stored in the buffer unit 1 sequentially without interruption. At this time, as shown in FIG. 3, the processing state display device 8 monitors the storage state of the buffer unit 1 and confirms that the information data of all the data output units 7 has been stored in the buffer unit 1 ( S3), the information data stored in the buffer unit 1 is sequentially read from the top storage area (S4).

The read information data is to be compared with the designated data stored in the designated data storage unit 3 (S5), and if the information data and the designated data match, a comparison is made. After the target information data is recorded in the data recording unit 4 (S6), it is determined whether or not the comparison between all the information data stored in the buffer unit 1 and the designated data is completed. (S7). On the other hand, when the information data and the specified data do not match, S7 is executed without recording the information data to be compared, and all the information data stored in the buffer unit 1 is compared with the specified data. It is determined whether or not is completed (S7).

If a result of the determination that all the information data have not been compared is obtained in S 7, S 4 will be re-executed, and the information data will be read from the buffer unit 1 and designated. Only the information data matching the data will be recorded in the data recording unit 4. On the other hand, when the result of the determination that the comparison of all the information data is completed is obtained, after all the information data stored in the buffer unit 1 is erased (S8), it is re-executed from S3 described above. It will be.

Next, when confirming the operation status of the ion implantation control device 6, the operator operates the keyboard of the input / output unit 5 to display the information data recorded in the data recording unit 4. The screen will be displayed on the device. At this time, new information data is input to the ion injection control device 6 and continuously recorded in the data recording section 4, but the information data displayed on the screen is the information data once recorded in the data recording section 4. Since it was read out, it is possible to set the display time arbitrarily, and at the same time, it is possible to print it out at any time.

If the operation status cannot be sufficiently grasped by the information data displayed on the screen of the display device and the software bug cannot be found, new designated data is input from the input / output unit 5. When the key is input, the data content of the designated data storage unit 3 is changed. At this time, the processing state display device 8 stores the information data output from the ion implantation control device 6 in the buffer unit 1, compares the information data with the designated data, and records the information data corresponding to the designated data in the data recording unit. 4 is continuously recorded, and the collection of information data is not interrupted by the screen display of the information data on the display device and the change of the data content of the designated data storage unit 3. Therefore, the necessary information data can be taken out by arbitrarily changing the designated data while maintaining the operation of the ion implantation control device 6.

As described above, the processing state display device 8 of the present embodiment displays only necessary information data on the screen among the information data output when the program of the ion implantation control device 6 is executed. A designated data storage unit 3 that stores the required information data as designated data in a changeable manner, and a comparison unit that compares the designated data with the designated data and the information data output from the ion implantation control device 6 and outputs only the matched information data. 2, a data recording unit 4 for recording the information data output from the comparison unit 2, and an input / output unit 5 having a display device for displaying the information data read from the data recording unit 4 on a screen. There is.

As a result, the processing state display device 8 of the present embodiment reads the information data temporarily recorded in the data recording unit 4 and displays it on the screen of the display device, and the designated data in the designated data storage unit 3. The changing process and the process of recording the required information data out of the information data from the ion implantation control device 6 in the data recording unit 4 are performed independently. Therefore, even when new information data is input to the processing status display device 8, the display time of the information data can be set arbitrarily and the execution of the program of the processing status display device 8 is stopped. Even if it is not necessary, the required information data can be arbitrarily selected by changing the designated data. Therefore, the processing status display device 8 can sufficiently grasp the operating status while continuing the operation of the ion implantation control device 6, so that the efficiency and workability in finding a software bug or developing a program can be improved. Has improved.

[0027]

[Effect of device]

 As described above, the processing state display device of the present invention displays only the necessary information data on the screen among the information data output when the program of the control device is executed. The specified data storage means that stores the changeable data as the above, the comparison means that compares the specified data with the information data output from the control device, and outputs only the matched information data, and the information output from the comparison means. It is configured to have a recording means for recording data and a display means for displaying the information data recorded in the recording means on a screen.

As a result, of the processing of reading the information data once recorded in the recording means and displaying it on the display means, the processing of changing the designated data in the designated data storage means, and the information data from the control device. The process of recording the required information data in the recording means is performed independently. Therefore, without stopping the execution of the program of the processing status display device, it is possible to arbitrarily select the required information data and display it on the screen by changing the specified data. This has the effect of improving the efficiency and workability in the development of.

[Brief description of drawings]

FIG. 1 is a block diagram of a processing state display device connected to an ion implantation control device according to the present invention.

FIG. 2 is a flowchart of a buffer storage routine.

FIG. 3 is a flowchart of a designated data recording routine.

FIG. 4 shows a conventional example, and is a block diagram of a processing state display device connected to an ion implantation control device.

[Explanation of symbols]

 1 buffer section 2 comparison section (comparison means) 3 designated data storage section (designated data storage section) 4 data recording section (recording section) 5 input / output section (display section) 6 ion implantation control device 7 data output section 8 processing status display apparatus

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Internal reference number FI technical indication H01L 21/265

Claims (1)

[Scope of utility model registration request] 1. A processing status display device for displaying only necessary information data on a screen among information data output when a program of a control device is executed, and the necessary information data is changeably stored as designated data. Designated data storage means, comparison means for comparing the information data output from the control device with the designated data, and outputting only the matched information data, and a recording means for recording the information data output from the comparison means. And a processing unit for displaying the information data recorded in the recording unit on a screen.