JPH07301514A - Shape measuring instrument - Google Patents

Abstract

PURPOSE:To provide a shape measuring instrument with which the degree of deformation of the outer periphery of an object to be measured can be obtained quantitatively with high accuracy and the degrees of deformation of the outer peripheries of objects to be measured as the same value when the objects have similar figures. CONSTITUTION:The shape measuring instrument 1 is provided with a measuring section 3 having a memory section 21 which temporarily stores the signals 5a of a binarized image, outer peripheral point measuring section 22, coordinate data arranging section 23, vector data generating section 24, unit vector generating section 25, primary- direction difference calculating section 31, average value calculating section 311 which calculates the average value of direction differences between each unit vector as a calculating section for calculating the primary average value, etc., deviation value calculating section 312 which finds the deviation values of the direction differences between each unit vector as a calculating section for calculating the primary average value, etc. By using the set Q of unit vectors found by the section 25, primary variations thetad their average value M, and their deviation value S<2> are quantmtatmvely found as the values indicating the degree of deformation of the outer periphery of the object 4.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for measuring the shape of agricultural products, industrial products, etc., and to an apparatus configuration for improving the measuring method.

[0002]

2. Description of the Related Art For example, in selecting fruits,
Grading is performed according to the size of the fruit and the degree of unevenness and distortion of its outer shape. As a device for measuring the shape of agricultural products such as fruits, a shape measuring device that automatically measures the shape of agricultural products using image processing technology based on images of agricultural products is already known. Has been.

FIG. 17 is a block diagram for explaining an example of such a conventional shape measuring apparatus. In FIG. 17, reference numeral 9 denotes a shape measuring device, which is necessary to supply a mounting table 41 on which a measurement target 4 which is an appropriate measurement target such as a fruit is mounted, and illumination light 42a which illuminates the measurement target 4. An illumination device 42, a position sensor 49, an imaging device 5, an outer peripheral point detection unit 6, an image outer peripheral length measurement unit 7, a signal bus 81, a cpu 82, a display device 83, a console 84, and an input / output interface 85, which are installed according to the above. I have it. The mounting table 41 is capable of sequentially moving a large number of measurement objects 4 like a conveyor or a conveyor on which the measurement object 4 (hereinafter, may be abbreviated as measurement object) is placed in a stationary state. There are some things. The imaging device 5 processes the two-dimensional image of the measurement target 4 obtained by the camera device 51 and the camera device 51 for imaging such as a television camera for acquiring the two-dimensional image of the measurement target 4, and measures the measurement target. 4 and an image processing unit 52 which obtains a binarized two-dimensional image signal 5a. When the mounting table 41 is a conveyor or the like and the measurement target 4 arrives at an appropriate position in the field of view of the camera device 51, the position sensor 49 detects this and outputs a signal 49a to the image processing unit 5.
Send to 2. The camera device 51 captures a two-dimensional image of the measurement target 4 and outputs an image signal 51a corresponding to this two-dimensional image of the measurement target 4. Image processing unit 52
Is a circuit device that performs binarization processing of the image signal 51a at the timing when the signal 49a is input, etc., and obtains the signal 5a that is the binarized image signal of the measurement target 4.

The outer peripheral point detection unit 6 receives the signal 5a, detects the boundary between the two-dimensional image of the measuring object 4 and the background image, that is, the outer peripheral point of the measuring object 4 from the signal 5a. , A circuit device for obtaining a signal 6a which is a binarized signal having an end portion corresponding to an outer peripheral point. The image perimeter measurement unit 7
By inputting the data of the outer peripheral points detected by the outer peripheral point detecting unit 6, the perimeter and the area of the binarized image regarding the measurement target 4 are measured, and the binarization defined by the following (Formula 1) is performed. It is a circuit device that calculates a shape factor (α) of an image and stores it in a built-in memory.

[0005]

[Formula 1] α = 4π × area / (perimeter) ² (1) The shape factor (α) of the measurement target 4 defined by (Equation 1) is
It is a coefficient that has a maximum (= 1) when the outer shape of the measurement target 4 is a perfect circle, and becomes smaller than 1 as it deviates from the perfect circle.

Further, the cpu 82 controls the entire shape measuring device 9, executes the above-described calculation flow, and based on the shape coefficient (α) obtained by the above-mentioned processing by the image outer peripheral length measuring unit 7. In addition, it is a processor that executes a program for determining the grading of the measurement target 4. Display device 83
Is a device for displaying a signal obtained by the image outer circumference length measuring unit 7, an image of the outer circumference point obtained by the outer circumference point detecting unit 6, a determination result performed by the cpu 82, and the like, and the console 84 is a shape measuring device. 9 is an apparatus used for inputting various conditions in each process performed by 9 and for instructing operation mode setting, etc. The input / output interface 85 uses the shape measurement result of the shape measuring apparatus 9 as another related apparatus ( For example, it is a device for transmitting to a conveyor, a host computer, or the like that constitutes the mounting table 41. Further, the signal bus 81, which constitutes the shape measuring device 9, includes the image outer peripheral length measuring unit 7, cp.
Signals are transmitted between the u 82, the display device 83, the console 84, the input / output interface 85, and the like.

In the conventional shape measuring apparatus 9 having the above-described structure, for example, when the object 4 to be measured is a fruit such as a tomato whose outer shape is roughly circular, the shape coefficient (α) is set to 1. The closer the shape factor (α) is to one, the closer the shape is to a perfect circle. Therefore, the closer the shape factor (α) is to one, the higher the quality is, and the smaller the shape factor (α) is, the more the shape is deformed. Since the degree is high, the smaller the shape factor (α) is, the lower the quality is evaluated.

However, this conventional example is a case applied when the measuring object 4 has a relatively simple shape, and is applied to an industrial product in which the measuring object 4 often has a complicated shape. As a conventional example, a shape measuring device shown in FIG. 18 is also known. FIG. 18 is a block diagram illustrating a shape measuring apparatus 9A of another conventional example.
In FIG. 17, the same parts as those of the shape measuring apparatus 9 according to the conventional example shown in FIG. In FIG. 18, 9A is a shape measuring device,
Instead of the image outer peripheral length measuring unit 7 in the shape measuring device 9,
The image area measuring unit 7A is provided. Image area measuring unit 7A
Is a memory unit 71 for temporarily storing the signal 5a of the binarized image of the measurement object 4, and a dictionary unit (may be called a template) 72 for holding a non-defective image as a binarized image or the like.
A positioning unit 73, a logical operation unit 74, and an area measuring unit 75. The alignment unit 73 matches the binarized image of the measurement target 4 with the image of the good product held in the dictionary unit 72 as much as possible based on the reference position of the measurement target 4 obtained by the logical operation unit 74 and the like. It is a circuit device that aligns with.

The logical operation unit 74 obtains reference positions such as the barycentric position and the marker position of the measurement target 4 based on the binarized image of the measurement target 4, and after the positioning by the alignment unit 73. Based on the binarized image, a logical product with a non-defective image held in the dictionary unit 72 (equivalent to obtaining the image area of the part that matches the non-defective image) and the dictionary. This is a circuit device for performing an exclusive logical product (equivalent to obtaining the image area of a portion that does not match the non-defective image) held with the non-defective image held in the unit 72.
The area measuring unit 75, based on the logical product value and the exclusive logical product value obtained by the logical operation unit 74,
This is a circuit device that calculates the difference between the area of the measurement target 4 and the area of non-defective products.

The different shape measuring device 9A of the conventional example having the above-mentioned structure obtains the degree of deformation of the shape of the measuring object 4 by the difference of the area of the measuring object 4 with respect to the area of the non-defective item, and determines the degree of coincidence with the area of the non-defective item. The quality of the measurement object 4 is evaluated by the level.

[0011]

In the shape measuring devices 9 and 9A according to the prior art described above, it is possible to automatically measure the quality relating to the shape of the outer circumference of the measuring object 4, which is a typical example. There are the following problems. That is, since the shape measuring device 9 handles the total length of the entire circumference of the measurement target 4 as the circumference of the measurement target 4, when the measurement target 4 has an abnormal point, it is compared with manual selection. The detection sensitivity of the abnormal point is low, and especially when the shape of the measurement target 4 is not a perfect circle, the measurement error must be large. Further, the shape measuring apparatus 9A is effective for inspecting a product in which the measurement target 4 has a small outer peripheral size variation such as a semiconductor product, but the measurement target 4 is an individual measurement target such as an agricultural product. If the shape and size of the measurement object 4 are not uniform, the change in the area of each measurement object 4 falls within the fluctuation range of the area of the measurement object 4 with respect to the area of the non-defective product, and It was difficult to measure the degree of deformation of the outer shape. For these reasons, the shape measuring device is required to meet the following requirements.

The degree of deformation of the measuring object 4 must be quantitatively and highly accurately obtained. Deformation degree of the measuring object 4 is
It must be classified as other small deformations. Measuring object 4 that is circular or elliptical
The effect based on the basic shape of 1 and the deformation degree of the measuring object 4 should be obtained separately.

It should be obtained by specifying the position of the deformed portion. Even if the dimensions are different, it is possible to obtain the deformation degrees of the measurement objects 4 having a similar shape to each other as the same value. The present invention has been made in view of the above-mentioned problems of the conventional art, and an object thereof is to obtain the degree of deformation of the outer peripheral shape of the measurement object with high accuracy and quantitatively, and to measure the similarity measurement object. In the case of, it is to provide a shape measuring device that can obtain the same degree of deformation.

[0014]

SUMMARY OF THE INVENTION In the present invention, the above-mentioned objects are as follows: 1) An image pickup device for obtaining a signal of a binarized two-dimensional image of a measurement object, and a shape factor of the measurement object from the signal of the two-dimensional image. In a shape measuring apparatus having a measuring unit for measuring, the measuring unit for measuring a shape factor is based on a signal of a two-dimensional image, and coordinates of a plurality of outer peripheral points corresponding to the outer periphery of a measurement target held by the image. Input the coordinate data of the outer peripheral point measuring unit that obtains the data and the outer peripheral point coordinate of a large number of images obtained by the outer peripheral point measuring unit, and each has the same length, and the outer periphery of the measurement target is successively connected to each other. A unit vector generation unit that generates a set of unit vectors that make one round and a unit vector set that is obtained by the unit vector generation unit are separated from each other by a section D centered around an appropriate outer peripheral point along a constant circumferential direction. Two units And a primary direction difference calculation unit for obtaining a direction difference between vectors, and configured to measure the degree of deformation of the outer shape of the measurement target by the direction difference between the unit vectors, or 2) described in 1 above. In the means, the unit vector generation unit included in the measurement unit rearranges the coordinate data of the outer peripheral points of the multiple images obtained by the outer peripheral point measurement unit in an order along one direction of the outer periphery of the measurement target. And a vector data conversion unit that converts the rearranged coordinate data into vector data connecting adjacent outer peripheral points, and a fixed constant based on the vector data converted outer peripheral point coordinate data. A unit vector for taking a moving average with an averaging window having a width of a constant creepage distance W for each pitch P of the creepage distance and converting the moving average into a set of unit vectors having a vector length of the constant pitch P. Or 3) In the means described in 1) above, the unit vector generation unit included in the measurement unit is coordinate data of outer peripheral points of a large number of images obtained by the outer peripheral point measurement unit. Are arranged in order along one direction of the outer circumference of the object to be measured, and the coordinates of the object to be measured based on the coordinate data of the outer peripheral points of a large number of images obtained by the outer peripheral point measuring unit. Calculate the area for a three-dimensional image,
Input the area magnification calculation unit that calculates the magnification of this area with respect to the standard area held in advance, the coordinate data rearranged by the coordinate data alignment unit, and the area magnification data obtained by the area magnification calculation unit, A normalization calculation unit that multiplies the rearranged coordinate data by magnification data to obtain rearranged and normalized coordinate data, and a normalization operation unit that is adjacent to each other based on the rearranged and normalized coordinate data Based on the vector data conversion unit for converting into the vector data connecting the outer peripheral points and the normalized outer peripheral point coordinate data converted into the vector data, the width of the constant creepage distance W is set for each pitch P of the constant creepage distance. 4. A unit vectorization unit configured to take a moving average by using the averaging window and convert it to a set of unit vectors having the vector length of the constant pitch P, or ) In the means described in any one of the items 1 to 3, the measuring unit for measuring the shape factor inputs the direction difference between the unit vectors obtained by the primary direction difference calculating unit, and calculates the average value and Equipped with a calculation unit for primary average value, etc. for obtaining the deviation value and / or the standard deviation value, the degree of deformation of the outer shape of the measuring object is measured by the mean value and / or deviation value and / or standard deviation value of the direction difference 5) In the means described in any one of 1 to 4 above, the measuring unit that measures the shape factor measures the direction difference between the unit vectors output by the primary direction difference calculating unit. A primary direction difference restricting unit having one or two or more threshold values for controlling the output range of this direction difference is provided, and only the direction difference in the region divided by the threshold value of the primary direction difference restricting unit is extracted. hand, The configuration is such that the degree of deformation of the outer shape of the measurement target is measured as the directional difference between the unit vectors, or 6) in the means described in any one of items 1 to 4, the measurement unit that measures the shape factor is The direction difference between the unit vectors output by the primary direction difference calculation unit is input, and one or more threshold values for dividing the range of the value of the direction difference are provided, and the convex portions and / Alternatively, a primary change amount central position calculation unit for determining the central positions of the divided convex portions and / or concave portions after dividing the concave portions below these thresholds can be obtained by the primary change amount central position calculation unit. The position of the outer shape of the measurement target having a large degree of deformation is specified by the center position, or 7) an imaging device that obtains a binarized two-dimensional image signal of the measurement target, and the two-dimensional image Measured from signal In a shape measuring device having a measuring unit for measuring a shape factor of an object, the measuring unit for measuring the shape factor is based on a signal of a two-dimensional image, and has a large number of outer peripheral points corresponding to the outer periphery of the measuring object held by the image. Based on the coordinate data of the outer peripheral points to obtain the coordinate data of each of them, and the coordinate data of the outer peripheral points of a large number of images obtained by the outer peripheral point measurement units, each has the same length and is successively connected to each other for measurement. A unit vector generation unit that generates a set of unit vectors that goes around the outer circumference of the target, and a section centered on a certain outer circumference point along a constant circumferential direction with respect to the unit vector set obtained by the unit vector generation unit A primary direction difference calculation unit for obtaining a direction difference between two unit vectors separated by D, and a direction difference between the unit vectors are input to center an appropriate outer peripheral point along a constant circumferential direction. Separate section E A secondary direction difference calculation unit for calculating the difference in the direction difference at two different points, and the degree of deformation of the outer shape of the measurement target is measured by the difference in the direction difference between the unit vectors, or 8) In the means described in the item 7, the unit vector generation unit included in the measurement unit sets the coordinate data of the outer peripheral points of the multiple images obtained by the outer peripheral point measurement unit along one direction of the outer periphery of the measurement target. A coordinate data arranging unit that rearranges in order, a vector data converting unit that converts the rearranged coordinate data into vector data that connects adjacent outer peripheral points, and the outer peripheral point coordinates converted into vector data Based on the data, a moving average is calculated by an averaging window having a width of a constant creepage distance W for each pitch P of a constant creepage distance, and a set of unit vectors having the vector length of the constant pitch P. Or 9) In the means described in 7) above, the unit vector generating unit included in the measuring unit is the outer periphery of a large number of images obtained by the outer peripheral point measuring unit. The coordinate data alignment section that rearranges the coordinate data of the points in the order along one direction of the outer circumference of the measured object, and the measured data based on the coordinate data of the outer peripheral points of many images obtained by the outer peripheral point measurement section Calculate the area of the two-dimensional image of the object,
Input the area magnification calculation unit that calculates the magnification of this area with respect to the standard area held in advance, the coordinate data rearranged by the coordinate data alignment unit, and the area magnification data obtained by the area magnification calculation unit, A normalization calculation unit that multiplies the rearranged coordinate data by magnification data to obtain rearranged and normalized coordinate data, and a normalization operation unit that is adjacent to each other based on the rearranged and normalized coordinate data Based on the vector data conversion unit for converting into the vector data connecting the outer peripheral points and the normalized outer peripheral point coordinate data converted into the vector data, the width of the constant creepage distance W is set for each pitch P of the constant creepage distance. And a unit vectorization unit that takes a moving average by using the averaging window and converts it to a set of unit vectors having the vector length of the constant pitch P, or 0) In the means described in any one of the items 7 to 9, the measuring unit for measuring the shape factor inputs the difference in the direction difference between the unit vectors obtained by the secondary direction difference calculating unit, A secondary average value calculation unit for obtaining an average value and / or a deviation value and / or a standard deviation value is provided, and the outer shape of the object to be measured is calculated by the average value and / or the deviation value and / or the standard deviation value of the difference in the direction difference. 11) In the means described in any one of the items 7 to 10, the measuring unit for measuring the shape factor is obtained by the secondary direction difference calculating unit. The secondary direction difference regulating section is provided with the secondary direction difference regulating section having one or more threshold values for inputting the difference in the direction difference between two unit vectors and regulating the output range of this difference in direction difference. In the area divided by the threshold The difference in the direction difference between the unit vectors is taken out, and the degree of deformation of the outer shape of the measurement target is measured as the difference in the direction difference between the unit vectors, or 12) any of the items 7 to 10 above. In the means, the measuring unit for measuring the shape factor inputs the difference in the direction difference between the unit vectors output by the secondary direction difference calculating unit,
There is one or more thresholds for dividing the range of the difference value of the direction difference, and the convex portions exceeding these thresholds and / or the concave portions below these thresholds are divided, and the divided convex portions and And / or a secondary change amount central position calculation unit for determining the central position of the concave portion is provided, and a position with a large degree of deformation of the outer shape of the measurement target is specified, or or 13) the above items 1 to 12 In any one of the means described above, the measuring unit that measures the shape factor has a major axis and a minor axis that are a ratio of the major axis length of an equivalent ellipse and the minor axis length of an equivalent ellipse with respect to the outer shape of the measurement target. A deviation value or standard deviation value of the direction difference between the unit vectors obtained by the primary direction difference calculation section is provided, which is provided with a long / short axis ratio calculation section, or 2
Orthogonal with the deviation value or standard deviation value of the direction difference between the unit vectors obtained by the next direction difference calculation unit on one axis and the major / minor axis ratio obtained by the major / minor axis ratio calculation unit on the other axis. Create coordinates, divide areas with the same degree of deformation based on these coordinates, and classify measurement objects included in the same area of this area as the same grade in terms of degree of deformation. Is achieved by.

[0015]

According to the present invention, 1) The shape measuring device is based on the signal of the binarized two-dimensional image, for example, as a unit vector generation unit, a coordinate data alignment unit, a vector data conversion unit, a unit vector. The coordinate data of the xy coordinates, for example, of each outer peripheral point located at the boundary with the background is first obtained in the outer peripheral point measuring unit by using the one having the digitizing unit. Next, in order to facilitate the conversion into a vector value, a large number of these outer peripheral points are rearranged in the order along one direction of the image outer periphery, for example, clockwise in the coordinate data alignment unit. Subsequently, using the coordinate data arranged along the one direction, the vector data conversion unit converts the coordinate data into a vector data string that connects adjacent outer peripheral points. The unit vectorization unit takes a moving average of this vector data string by an averaging window having a width of a constant creepage distance W for each pitch P of a constant creepage distance, and calculates the vector length of the constant pitch P. Convert to a set of unit vectors having Further, by using this standardized unit vector sequence, the primary direction difference calculator calculates a direction difference between two unit vectors separated along a constant circumferential direction by a section D centered on a certain outer peripheral point. Then, this direction difference is obtained as the primary change amount θ _d of the shape of the outer circumference of the measurement target at the intermediate position between both unit vectors. In the primary direction difference calculation unit, the primary change amount θ _d is obtained by making at least one round of the outer circumference of the two-dimensional image along a fixed direction. The amount of deformation of the outer circumference of the measurement target can be obtained with high accuracy from the primary change amount θ _d thus obtained.

2) In addition to the action of the above item (1), the area of the object to be measured with respect to the two-dimensional image and this area are held in advance based on the signal of the binarized two-dimensional image. The area magnification calculator calculates the magnification for the standard area.
Then, the normalization operation unit multiplies the coordinate data arranged along one direction by this magnification data to obtain rearranged and normalized coordinate data. The vector data conversion unit uses this rearranged and normalized coordinate data to convert it into a vector data string that connects adjacent outer peripheral points. Therefore, even if the dimensions are different, it is possible to obtain the deformation degrees of the measurement objects that are in a similar shape and have the same value.

3) In addition to the actions of the above items (1) and (2), the average value thereof is set to 1 based on the set of the primary variation θ _d.
The macro deformation amount of the outer circumference of the measurement target can be calculated by the calculation by the next average value calculation unit. This macroscopic deformation amount indicates the curvature of the outer circumference of the measurement target when the shape of the outer circumference of the measurement target is a perfect circle. Further, the distribution value of the deformation of the outer circumference of the measurement target can be quantitatively obtained by obtaining the deviation value and / or the standard deviation value by the calculation unit of the primary average value and the like.

4) In addition to the actions of the above-mentioned items (1) to (3), the primary direction difference restricting portion has, for example, a large threshold value and a small threshold value smaller than the threshold value. And the threshold value of 1
The following variation theta _d, the threshold value larger the upper limit, and a relatively small primary variation theta _d to the lower limit threshold value smaller
When the primary variation theta _d of large protrusions relatively to the threshold large as the lower limit, divided into primary variation theta _d of relatively large recess to a maximum of the threshold value smaller Therefore, it can be obtained quantitatively.

5) The shape measuring device has the above-mentioned (1) to (4).
In addition to the action of the term, based on the set of the primary change amount θ _d of the shape of the outer periphery of the measurement target, the primary change amount central position calculation unit,
When the threshold value is exceeded, the convex area is extracted, and when the threshold value is less than the threshold value, the concave area is segmented and taken out, and the center position of each convex and concave area is calculated, and the convex area is calculated. It is possible to specify the positions of the partial area and the concave area.

6) The shape measuring device has the above-mentioned (1), (2)
In addition to the action of the term, based on the set of the primary change amount θ _d of the shape of the outer circumference of the measurement target, in the secondary direction difference calculation unit, a certain outer circumference point is centered along a certain circumferential direction. The difference in direction difference between unit vectors at two points separated by the interval E,
That is, the secondary change amount θ _dd is obtained as the difference between the primary change amounts θ _d . This secondary change amount θ _dd is obtained by making at least one round of the outer circumference of the two-dimensional image along a fixed direction. The amount of selective deformation of the outer circumference of the measurement target can be obtained with high accuracy from the secondary change amount θ _dd thus obtained.

7) In addition to the operation of the above item (6), the average value is calculated by the secondary average value calculation unit based on the set of the secondary variation θ _dd , and the outer circumference of the object to be measured is selected. The amount of static deformation can be obtained. Further, the distribution value of the selective deformation of the outer circumference of the measurement target can be quantitatively obtained by obtaining the deviation value and / or the standard deviation value by the quadratic average value computing unit.

8) In addition to the operations of the above items (6) and (7), the secondary direction difference regulating unit may have a large threshold value and a small threshold value smaller than the threshold value, for example. And the threshold value of
The secondary change amount θ _dd is a relatively small secondary change amount θ _dd whose upper limit is a large threshold value and whose lower limit is a small threshold value.
When a secondary variation theta _dd large convex portion relatively to the lower the threshold value of the larger value, and, the threshold value of the smaller value to the secondary variation theta _dd of relatively large recesses of up It can be classified and obtained quantitatively.

9) In addition to the actions of the above items (6) to (8), the threshold value is exceeded in the secondary change amount central position calculation unit based on the set of the secondary change amount θ _dd. If the convex area is below the threshold value, the concave area is divided and taken out, and the center positions of the convex area and the concave area are calculated to determine the positions of the convex area and the concave area. Can be specified.

10) In addition to the operations of the above items (1) to (9), the ratio of the major axis to the minor axis, which is the ratio of the major axis length to the minor axis length of the equivalent ellipse of the outer circumference of the object to be measured, is calculated, Two-dimensional coordinates are set with this long / short axis ratio as one axis and the other axis as the primary change amount θ _d or the secondary change amount θ _dd . Based on these two-dimensional coordinates, areas with the same degree of deformation are divided, and measurement objects included in the same area of this area are graded as the same grade product with respect to the degree of deformation. It becomes possible to quantitatively and uniquely perform the grading regarding the degree of deformation.

[0025]

Embodiments of the present invention will be described in detail below with reference to the drawings. Embodiment 1; FIG. 1 is a block diagram for explaining a shape measuring apparatus according to an embodiment of the present invention corresponding to claims 1, 2, and 4. FIG. 2 is a graph for explaining an image of the object to be measured obtained by the measuring unit shown in FIG. 1, and FIG. 2A is a graph for explaining an image obtained by the outer peripheral point measuring unit.
(B) is a graph explaining the outer peripheral point coordinate sequence,
(C) is a graph explaining a circumferentially aligned coordinate sequence. 3A and 3B are explanatory diagrams for explaining data obtained in the main part of the measurement unit shown in FIG. 1, FIG. 3A is an explanatory diagram of an outer peripheral point coordinate sequence, and FIG. It is an explanatory view of a coordinate sequence, (c) is an explanatory view of a set of vectors, (d)
Is an explanatory diagram of a set of unit vectors, and (e) is 1
It is explanatory drawing of the amount of next change. FIG. 4 is a graph illustrating a method of obtaining a unit vector set. FIG. 5 is a graph for explaining the operation of the measuring unit shown in FIG. 1 when the basic shape of the measured object is circular, and (a) is a graph of the outer shape of the measured object, (B) is a graph of the primary change amount. FIG. 6 is a graph for explaining the operation of the measuring unit shown in FIG. 1 when the basic shape of the measured object is flat, and (a) is a graph of the outer shape of the measured object. , (B) are graphs of the primary change amount. Figure 1
In FIG. 17, the same parts as those of the conventional shape measuring apparatus shown in FIGS.

In FIG. 1, reference numeral 1 denotes an image outer circumference length measuring unit 7 for the shape measuring apparatus 9 according to the conventional example shown in FIG.
The shape measuring apparatus is configured to use a measuring unit 3 that measures a shape factor instead of the shape measuring apparatus. The measurement unit 3 includes a unit vector generation unit 2, a primary direction difference calculation unit 31, an average value calculation unit 311 that calculates an average value of direction differences between unit vectors as a primary average value calculation unit, and A deviation value calculation unit 312 that calculates a deviation value of a directional difference between unit vectors as a calculation unit for the primary average value and the like is provided. Also, the unit vector generation unit 2
Includes a memory unit 21, an outer peripheral point measurement unit 22, a coordinate data alignment unit 23, a vector data conversion unit 24, and a unit vector conversion unit 25.

As described above, the outer peripheral point detection unit 6 inputs the above-mentioned signal 5a and the main scanning direction of the camera device 51 [here, the x direction in FIG. 2A is the horizontal direction of the camera device 51]. It is assumed that the scanning direction is set. ], The boundary between the two-dimensional image of the measuring object 4 and the background image, that is, the measuring object 4
2A is a circuit device for detecting an outer peripheral point of the signal and obtaining a signal 6a which is image data as illustrated in FIG. The memory unit 21 is a circuit device that receives and stores the signal 6a. In the shape measuring device 1, the signal 4 from the position sensor 49
After the storage of all the signals 6a of the measurement target 4 in the memory unit 21 at the timing when 9a is output, the outer peripheral point measuring unit 22 first converts and stores the coordinate string of each outer peripheral point. At that time, in order to reduce the number of data as much as possible, the respective outer peripheral points are, as shown in FIG.
In the signal 6a, it is preferable to arrange the coordinates of the pixels at both ends in contact with the outer periphery of the pixel group aligned in the main scanning direction of the camera device 51. Thus, the outer peripheral point measuring unit 22 first obtains and stores the outer peripheral point coordinate sequence B (x, y) that can be arranged in the form illustrated in FIG.

Next, the coordinate data alignment unit 23 has the smallest y-coordinate value from the outer peripheral point coordinate sequence B (x, y) as shown in FIG. The outer peripheral point having the smallest x-coordinate value [indicated as 0 point in FIG. 2 (c)]. 3] in a fixed direction (clockwise in the case of this embodiment), and in the order of so-called one-stroke writing, as shown in FIG.
All the outer peripheral points according to (a) are rearranged and saved. This will be referred to as an outer peripheral point coordinate sequence C (x, y). If there is a hole in the signal 6a, the outer peripheral point coordinate sequence C (x,
In the process of obtaining y), since the hole portion is out of the portion to be drawn with one stroke, the outer peripheral point corresponding to the hole is removed. Therefore, the number of outer peripheral points in the outer peripheral point coordinate sequence C (x, y) is smaller than the number of outer peripheral points in the outer peripheral point coordinate sequence B (x, y). In addition, the peripheral point coordinate sequence C (x, y)
Will be described later in addition to the amount of one round of the outer circumference of the measurement target 4 so that the calculation of the deformation amount of the outer circumference of the measurement target 4 can be performed completely for the entire circumference of the measurement target 4 (Equation 6). It is necessary to obtain only β due to. Therefore, the start point and a part of the outer peripheral points of the outer peripheral point coordinate sequence B (x, y) are used twice when determining the outer peripheral point coordinate sequence C (x, y).

Next, using the outer peripheral point coordinate sequence C (x, y) stored in the coordinate data alignment unit 23 and expressed in absolute coordinates, a vector data conversion unit (hereinafter, may be simply referred to as a vector). .) 24, the starting point is 0.
The points are converted into a set of vectors V (Δx, Δy) connecting the adjacent outer peripheral points with each other as the starting points and stored. Here, the respective Δx and Δy are defined as Δx _n and Δy _n according to (Equation 2), and between two points adjacent to each other in the outer peripheral point coordinate sequence C (x, y), respectively. Is the orthogonal component distance of.

[0030]

[Formula 2] Δx _n = x _{n + 1} −x _n ………… (2.1) Δy _n = y _{n + 1} −y _n ………… (2.2) In this way , The length is [(Δx _n ) ² + (Δ
y _n ) ² ] ^1/2 and the direction is arctan (Δx _n / Δy
A vector set V (x, y) of _n ) is arranged and obtained in the form illustrated in FIG. The vector set V (x, y) is also the outer peripheral point coordinate sequence C (x, y) described above.
For the same reason as above, in addition to one round of the outer circumference of the measurement target 4, it is necessary to additionally obtain β by (Expression 6) described later.

Here, the set of vectors V (x, y) is
Based on the peripheral point coordinate sequence C (x, y) with a limited number of pixels
Since it is the obtained value, the set of vectors V (x, y) is
If you use it as it is to obtain shape data,
Due to the influence of the
If it is deformed, the shape
There is a concern that data will be obtained. To eliminate this
, The set of this vector stored in vector 24
Using V (x, y), a unit vectorization unit (hereinafter, unit
Sometimes abbreviated as vector. ) In 25, equal
Further, we have a set Q (a, b) of unit vectors with a large length P.
Convert to and save. Vector set V (x, y)
, A set of unit vectors Q (a,
There are two methods for converting into b). Na
The results obtained from these are the same. First of all
The method is the length of each element of the vector set V (x, y)
[(Δx_n)²+ (Δy_n)²]^1/2All outer peripheral points of
Total perimeter (L = Σ [(Δx_n) ²+ (Δy_n)²]
^1/2) Is taken first, and this total perimeter L is set to a constant creepage distance.
Constant creepage distance in the section of width W (= nP, n> 1)
A moving average is taken for each separation pitch P to obtain a constant creepage distance pitch.
The unit is set for each chip P and the direction is determined.
It How to take the creepage distance pitch P and the creepage distance width W is
An example is shown in FIG. In addition, the second method is that the total perimeter L
Is divided into fixed creeping distance pitches P,
The moving average is taken for each creeping distance width W. To these
Due to the limited number of pixels in the camera device 51
Since it is possible to remove the error that occurs due to
is there. That is, each of the set of unit vectors Q (a, b)
The elements a and b have the values according to (Equation 3), and as shown in FIG.
It can be obtained by organizing in the illustrated form. Based on the above
, Along the outer peripheral surface of the measuring object 4 along a constant circumferential direction,
A set Q of unit vectors that are successively connected to each other is obtained.
It

[0032]

## EQU3 ## a = ΣΔx _n …………………… (3.1) b = ΣΔy _n ……………… (3.2) However, a constant creepage distance pitch P ， Certain creepage width W
The elements (Δx _n , Δy) of the vector set V (x, y) for each
When dividing _n ), the elements (Δx _n , Δy _n ) are subdivided, and the creeping distance pitch P and the creeping width W with high accuracy are obtained.
It is necessary to get When performing this subdivision, by setting the creepage distance width W to an integer multiple of the creepage distance pitch P (that is, n is an integer), the element (Δx _n , Δy _n ) is set. ) It is possible to simplify the calculation for subdividing. Note that this set of unit vectors Q (a, b) will also be described later in addition to the amount of one round of the outer circumference of the measurement target 4 for the same reason as the outer peripheral point coordinate sequence C (x, y) described above. It is necessary to obtain an extra β by Equation 6).

Using the set of standardized unit vectors Q (a, b) obtained as described above, the primary change amount θ _d of the outer circumference of the object 4 to be measured (which is called the direction of the tangent line at the outer circumference point) Is calculated and stored in the primary direction difference calculation unit 31. Here, the primary change amount θ _d of the shape of the outer circumference of the measurement target 4 is the direction (θ) of the unit vector between the two outer circumference points that are separated from each other by a distance D (= mP, m> 1). It can be defined as a change of _j ). The value of the distance D can be appropriately selected according to the degree of deformation of the target outer peripheral shape. Thus, the primary change amount θ _d is the vector set Q
It is calculated as a value shown in (Equation 4) using (a, b).

[0034]

Equation 4] θ _d = arctan _{{[a (j + k) -a (} j) ] / _{[a (j + k) -a (} j) ]} ......... (4) However, theta _d is measured When going around the outer circumference of the target 4,
Taking the case where the value at the start point is 0 [rad] as an example, 0 → π → 2π → 3π ... · → 2π [rad] (It means that after going around the outer circumference to the start point, This is because the value of θ _d becomes 2π [rad] regardless of the progress, and the values are treated as continuous numerical values.

For the set Q (a, b) of the unit vectors obtained for one round + β of the outer circumference of the measuring object 4, the primary change amount θ _d is calculated for the entire circumference of the measuring object 4. Note that the primary change amount θ _{d of} the unit vector Q (a, b)
In order to obtain the secondary change amount θ _dd described in Example 2 to be described later, it is necessary to additionally obtain γ according to (Equation 8) described below in addition to the amount of one round of the outer circumference of the measurement target 4. There is. For this purpose, it is necessary to additionally calculate the outer peripheral point coordinate sequence C (x, y) by β [see (Equation 6)] + γ in addition to the amount of one round of the outer periphery of the measurement target 4. become.

Subsequent to the calculation of the primary change amount θ _d , the average value M and the deviation value S ² of the primary change amount θ _d are calculated. ^The value ² is calculated and stored in the deviation value calculator 312 according to the relationship shown in (Equation 5). Here, K is the number of outer peripheral points that can be represented by L / P using the creepage distance pitch P, where L is the outer peripheral length of the measurement object 4,
It is the number of data when the average value M and the deviation value S ² are obtained.

[0037]

Equation 5] M = (1 / K) × Σθ d ............ (5.1) S 2 = (1 / K) × Σ (θ d -M) 2 ... (5.2) shape measuring apparatus 1 In this way, in the measurement unit 3 included in the measurement target 4, the primary change amount θ _d and the primary change amount θ _d are measured as the measurement value indicating the degree of deformation of the outer circumference of the measurement target 4 based on the signal 5a of the binarized image of the measurement target 4. An average value M and its deviation value S ² are obtained. These quantities are calculated by the signal 6a and the outer peripheral point coordinate sequence B.
Together with (x, y) and the like, the cpu 82 and the display device 8 are connected via the signal bus 81 as in the case of the conventional shape measuring device 9.
It is transmitted to 3rd grade and used for grade work.

The above β will be described with reference to FIG. In FIG. 7, the outer peripheral points are Q ₀ , Q ₁ , Q ₂ ·
... Q _K-2 , Q _K-1 , and Q _K , and there are a total of K (≈L / P) outer peripheral points. The Kth peripheral point is drawn as coincident with the starting point Q ₀ . In order to obtain the primary change amount θ _d with respect to the entire outer circumference of the measurement object 4 having the circular basic shape shown in FIG. 7, it is necessary to start from the outer circumference point Q ₀ to the outer circumference point Q _K. . Meanwhile, in order to determine the primary variation theta _d at the outer point Q _K, the distance D [7 of the from the outer peripheral point Q _K, D
= 5P (ie, m = 5). ] Unit vectors of points (depicted as Q _{5 in} FIG. 7) are required. To obtain the unit vector of the outer peripheral point Q ₅ , the creeping distance width W [in FIG. 7, W = 6P
(Ie, n = 6). ] Of 1/2
The outer peripheral point coordinates C (x, y) of the outer peripheral point (indicated as Q _{8 in} FIG. 7) that has advanced by just that amount are required. That is, the required β is the value shown in (Equation 6).

[0039]

[Equation 6] β = [m + (1/2) n] × P (6) In the first embodiment shown in FIG. 1, the basic shape of the measuring object 4 is as shown in FIG. As shown in (a), when the shape is circular, the degree of deformation with respect to the ideal outer circumference is compared with the case where the shape has an ideal outer circumference without any deformation (shown by the dotted line in FIG. 5). A graph as illustrated in FIG. 5B is obtained, which expresses the first-order variation θ _d . Further, when the basic shape of the measurement target 4 is a substantially flat surface as shown in FIG. 6A, the ideal outer surface has an ideal flat surface without any deformation (shown by a dotted line in FIG. 6). ), A graph as illustrated in FIG. 6B is obtained in which the degree of deformation with respect to the ideal outer circumference is represented by the primary change amount θ _d . The primary change amount θ _d is shown in FIG.
As shown in (b) and FIG. 6 (b), a large value is obtained in a portion where the deformation degree of the measurement object 4 is remarkable, and a small value is obtained in a portion where the deformation degree is small.

In addition, 1 obtained by the average value calculation unit 311
The average value of the secondary change amount θ _d indicates the macroscopic deformation degree of the outer circumference of the measurement target 4, and the deviation value of the primary change amount θ _d obtained by the deviation value calculation unit 312 is the deviation value of the measurement target 4. This shows the distribution amount of the degree of deformation of the outer circumference, and the degree of deformation of the outer circumference of the measurement object 4 can be quantitatively and highly accurately obtained from them.

Embodiment 2; FIG. 8 is a block diagram for explaining a shape measuring apparatus according to an embodiment of the present invention corresponding to claims 7, 8 and 10. FIG. 9 is a graph for explaining the operation of the measuring unit shown in FIG. 8 when the basic shape of the measured object is an ellipse, and (a) is a graph of the outer shape of the measured object. , (B) are graphs of the primary change amount with respect to FIG. 9 (a), and (c) is a graph of the secondary change amount with respect to FIG. 9 (a). In FIG. 8, the same parts as the shape measuring apparatus according to one embodiment of the present invention corresponding to claims 1, 2, and 4 shown in FIG. 1 and the shape measuring apparatus according to the conventional example shown in FIGS. Have the same sign,
The description is omitted.

In FIG. 8, 1A is replaced with a measuring unit 3 for measuring a shape factor in the shape measuring apparatus 1 according to one embodiment of the present invention corresponding to claims 1, 2 and 4 shown in FIG. The shape measuring apparatus uses the measuring unit 3A. The measurement unit 3A excludes the average value calculation unit 311 and the deviation value calculation unit 312 from the measurement unit 3, and the secondary direction difference calculation unit 32 and the secondary average value calculation unit 321, which is a calculation unit of the secondary average value and the like. A secondary deviation value calculation unit 322 is provided.
The secondary direction difference calculation unit 32 uses the primary change amount θ _d of the outer circumference of the measurement target 4 obtained by the primary direction difference calculation unit 31 described in the first embodiment to determine the value of the outer circumference of the measurement target 4. The next change amount θ _dd is calculated. Here, the secondary change amount θ _dd of the shape of the outer circumference of the measurement target 4 is a primary change amount θ _d between two outer circumference points that are separated from each other by a distance E (= qP, q> 1).
Can be defined as the change of. Distance E
The value of depends on the degree of deformation of the target outer shape,
The distance E can be selected as appropriate, but when the measurement object 4 has, for example, an oval basic shape and a local deformation exists at an interval H on the outer circumference thereof, the distance E is set to By setting the distance H to 1/2 or less, the deformation component due to the ellipse-shaped measurement object 4 is almost removed, and the local deformation can be easily detected. Thus, the secondary variation θ _dd
Is calculated as a value shown in (Equation 7) using the primary change amount θ _d .

[0043]

(7) θ_{dd (i)}= Θ_{d (k + E)}−θ_{d (k)} …………… (7) This secondary change θ_ddIs calculated for the entire circumference of measurement object 4
To be done. Secondary change θ _ddFor the entire circumference of measurement object 4
In order to calculate,_dAs measurement target 4
1st-order variation θ obtained for 1 round of the outer circumference of +_dBut
is necessary. For the explanation of the reason, β mentioned above is necessary.
Based on the explanation of the reason, the following will be performed. Secondary change
Quantity θ_ddTo obtain the entire circumference of measurement object 4,
Amount of primary change at a point separated by the distance E from the outer peripheral point of the eye
θ_dWill be required. That is, the required γ is (Equation 8)
It becomes the value shown in.

[0044]

Equation 8] γ = q × P ....................................... (8 ) following the calculation of the secondary variation theta _dd, average value M, the deviation of the secondary variation theta _dd The value S ² is calculated by the secondary average value calculation unit 321 for the average value M and the secondary deviation value calculation unit 322 for the deviation value S ^{2 according} to the relationship shown in (Equation 9). Note that i is the number of data of the secondary change amount θ _dd , and i = q / K.

[0045]

[Formula 9] M = (1 / i) × Σθ _dd ………… (9.1) S ² = (1 / i) × Σ (θ _dd −M) …… (9.2) Shape measuring device 1A In this way, in the measurement unit 3A included in, the secondary change amount θ _dd and the average value thereof are used as the measurement value indicating the degree of deformation of the measurement target 4 based on the signal 5a of the binarized image of the measurement target 4. M and its deviation value S ² are obtained. These quantities are calculated by the signal 6a and the outer peripheral point coordinate sequence B (x,
y) and the like, the signal is transmitted to the cpu 82, the display device 83 and the like via the signal bus 81 as in the case of the shape measuring device 9 of the conventional example, and is used for grading work.

In the second embodiment shown in FIG. 8, the basic configuration of the outer circumference of the measuring object 4 is as shown in FIG.
In comparison with the case where the shape is not a perfect circle, such as an ellipse as shown in FIG. 9A, has an ideal outer circumference without any deformation (shown by the dotted line in FIG. 9), By expressing the degree of deformation with respect to an ideal outer circumference by the secondary change amount θ _dd , a graph as illustrated in FIG. 9C can be obtained.
Here, FIG. 9B is a graph of the primary change amount θ _d of the outer circumference of the measurement target 4 having an elliptical outer circumference shape, which is calculated by the primary direction difference calculation unit 31. When the basic shape of the measurement target 4 is, for example, an ellipse, the primary change amount θ _d of the outer circumference of the measurement target 4 having a shape close to a circle [see FIG. 5 (b)]. Unlike the above case, the graph of the primary change amount θ _d of the shape of the outer circumference of the measurement target 4 obtained by the primary direction difference calculation unit 31 is caused by the fact that the basic shape is not a perfect circle.
The large pulsation component shown by the dotted line in FIG. 9B is included. Even if the basic shape of the outer circumference of the measuring object 4 is elliptical or the like, the secondary change amount θ _dd obtained by (Equation 9) is calculated with respect to this primary change amount θ _d , and this amount is evaluated. The degree of deformation can be evaluated appropriately. As described above, the method of performing the evaluation with the secondary change amount θ _dd is effective when used for an object whose basic shape of the measurement object 4 is an ellipse.

In addition, 2 obtained by the average value calculation unit 321
The average value of the next change amount θ _dd indicates the degree of selective macroscopic deformation of the outer circumference of the measurement target 4, and the deviation value calculation unit 32
The deviation value of the secondary variation θ _dd obtained in 2 is measured by 4
The distribution amount of the degree of selective deformation of the outer periphery of
As a result, the degree of deformation of the outer circumference of the measuring object 4 can be quantitatively and highly accurately obtained.

In the above description of the second embodiment, the measuring section 3A includes the average value calculating section 311 and the deviation value calculating section 31.
However, the present invention is not limited to this, and, for example, the average value calculation unit 311 and the deviation value calculation unit 312 are also installed integrally, and depending on the shape of the measurement target 4, the measurement target 4 As the deformation amount with respect to either, either the primary change amount θ _d or the secondary change amount θ _dd may be selectable.

Embodiment 3; FIG. 10 shows claims 1, 2, 4,
It is a block diagram explaining the shape measuring device by one Example of this invention corresponding to 5 and 7,8,10,11.
10, a shape measuring apparatus according to an embodiment of the present invention corresponding to claims 1, 2 and 4 shown in FIG. 1, and a shape measuring device according to claims 7, 8 and 10 shown in FIG. The same parts as those of the shape measuring apparatus according to the embodiment and the shape measuring apparatus according to the conventional example shown in FIGS. 17 and 18 are denoted by the same reference numerals and the description thereof will be omitted.

In FIG. 10, 1B is replaced with a measuring unit 3 for measuring a shape factor in the shape measuring apparatus 1 according to one embodiment of the present invention corresponding to claims 1, 2 and 4 shown in FIG. The shape measuring apparatus uses the measuring unit 3B. The measuring section 3B is different from the measuring section 3 in that the convex primary direction difference regulating section 314, the intermediate primary direction difference regulating section 315, and the concave section 1
Secondary direction difference regulating section 316 and convex secondary direction difference regulating section 32
4, the intermediate part secondary direction difference regulation part 325, the concave part secondary direction difference regulation part 326, and the secondary direction difference calculation part 3 described in the second embodiment.
A secondary average value computing unit 321 and a secondary deviation value computing unit 322 as a secondary average value computing unit are provided.

By the way, it is calculated by the primary direction difference calculation unit 31.
Primary change θ_dIs measured as illustrated in FIG.
Areas where the deformation of the outer periphery of the object 4 presents convex parts do not form a mountain shape.
However, the part that presents the concave portion on the outer circumference has a valley shape.
It In addition, the height or depth of these peaks and valleys is
The greater the degree of deformation of the outer circumference, the greater the degree. Convex
The primary direction difference regulation unit 314 determines the upper limit threshold value (l₁With a)
The primary change calculated by the primary direction difference calculation unit 31
Quantity θ_dAnd enter the upper threshold (l₁a) Larger part
Only the minutes (the part with the right hatch in Fig. 11) are separated.
Output in minutes. In addition, the intermediate section primary direction difference regulation section 315
Is the upper threshold (l₁a) and this upper threshold (l₁a)
Lower threshold for smaller value (l₁b) and
Primary change θ _dAnd enter the upper threshold (l₁a) and below
Limited threshold (l₁Output only the part between b)
It Further, the recess primary direction difference regulating portion 316 is configured to have a lower limit threshold.
Value (l ₁b) and the primary variation θ_dEnter
The lower limit threshold (l₁b) Smaller part (in FIG. 11)
The part with the left hatch. ) Is output separately
It

Also calculated by the secondary direction difference calculation unit 32.
Secondary change θ_ddAlso relates to the degree of deformation of the outer circumference of the measuring object 4.
Then, the above-mentioned primary change amount θ_dHaving a similar relationship to
Therefore, the upper threshold (l₂quadratic convex with a)
The difference control unit 324 and the upper limit threshold (l₂a) and this upper limit
Threshold (l₂a) Lower limit threshold value (l) smaller than₂b)
An intermediate part secondary direction difference restricting part 325 having and a lower limit threshold
Value (l₂a recessed secondary direction difference restricting portion 326 having b) is provided.
Thus, the secondary change calculated by the secondary direction difference calculation unit 32 is obtained.
Amount θ_ddFrom the upper threshold (l₂a) the larger part,
Upper threshold (l ₂a) and the lower threshold (l₂part between b)
Min, lower threshold (l₂b) divided into smaller parts
Output.

As a result, the upper limit threshold (l ₁ a),
The first-order change amount θ _d , the second-order change amount θ _{dd of} a relatively large convex portion whose lower limit is (l ₂ a), and the lower-limit threshold value (l
_{1 b), (l 2 b} ) primary variation of relatively large recess to an upper limit theta _d, 2-order variation theta _dd an upper limit threshold value (l ₁
a) and the lower limit threshold (l ₁ b), or between the upper limit threshold (l ₂ a) and the lower limit threshold (l ₂ b), the first-order change amount having a relatively small degree of deformation. It is possible to _separately determine from the θ _d and the second-order change amount θ _dd component.

In the above description of the third embodiment, the convex primary direction difference regulating portion 314, the intermediate primary direction difference regulating portion 31.
Although the upper limit threshold value included in No. 5 and the lower limit threshold value included in the intermediate portion primary direction difference regulation portion 315 and the concave portion primary direction difference regulation portion 316 have been assumed to have the same value, respectively, the present invention is not limited to this. Instead, for example, the upper limit thresholds provided in the convex primary direction difference regulating section 314 and the intermediate primary direction difference regulating section 315 may have different values. In that case,
The upper limit threshold value provided in the intermediate portion primary direction difference regulation unit 315 is
It is preferable that it is smaller than the upper limit threshold provided in the convex primary direction difference regulating section 314. Further, the lower limit thresholds provided in the intermediate portion primary direction difference regulating portion 315 and the concave portion primary direction difference regulating portion 316 may be different values. In that case, it is preferable that the lower limit threshold provided in the recess primary direction difference regulating section 316 is smaller than the lower limit threshold provided in the intermediate section primary direction difference regulating section 315. The same applies to the upper limit threshold value and the lower limit threshold value provided in the convex part secondary direction difference regulating part 324, the intermediate part secondary direction difference regulating part 325, and the concave part secondary direction difference regulating part 326. .

Embodiment 4; FIG. 12 shows claims 1, 3 to 7,
It is a block diagram explaining the shape measuring device by one Example of this invention corresponding to 9-12. FIG. 13 is a graph for explaining the operation contents of the shape measuring apparatus shown in FIG. 12, (a) is a graph schematically showing image data of a large measured object, and (b) is It is a graph which shows the image data of a small to-be-measured object modelly, (c) is,
It is a graph which shows modelly the image data of the to-be-measured object normalized. In FIG. 12, the same parts as the shape measuring apparatus according to one embodiment of the present invention corresponding to claims 1, 2 and 4 shown in FIG. 1 and the shape measuring apparatus according to the conventional example shown in FIGS. Are denoted by the same reference numerals, and description thereof will be omitted.

In FIG. 12, 1C is replaced with a measuring unit 3 for measuring a shape factor in the shape measuring apparatus 1 according to one embodiment of the present invention corresponding to claims 1, 2 and 4 shown in FIG. The shape measuring device is configured to use the measuring unit 3C. The measuring unit 3C is provided with an area magnification calculating unit 26 and a normalizing calculating unit 27 with respect to the measuring unit 3. by the way,
There are cases in which the measurement targets 4 are similar to each other but have different dimensions, as illustrated in FIG. The measurement object 4A shown in FIG. 13 (a) has a relatively large size, and the measurement object 4B shown in FIG. 13 (b) is
Although it is similar to the measurement object 4A, it has a relatively small size.

Measurement object 4 having such a shape and size
When A and 4B are measured by the shape measuring device 1, the following problems may occur. That is, in the shape measuring apparatus 1, using the outer peripheral point coordinate sequence C (x, y) obtained by the coordinate data aligning unit 23, the set Q (a, Q) of the unit vectors p having the same length P in the unit vector 25 is used. b), and set Q of this unit vector
Using (a, b), the primary change amount θ of the outer circumference of the measurement target 4
_d is calculated by the primary direction difference calculation unit 31. Therefore, one of the measurement objects 4A and 4B obtained by the shape measuring device 1
The next-order change amount θ _d is shown in FIG. 13 because the dimensions of the measurement targets 4A and 4B are different from each other (in FIG. 13, the first-order change amount θ at the top of each of the measurement targets 4A and 4B).
_d is displayed as the primary change amounts θ _d4A and θ _d4B . ) Different values. This is inconvenient when it is desired to obtain the deformation degrees of the measurement objects 4 having similar shapes even though the dimensions are different, as the same value. The shape measuring device 1C solves this problem.

That is, in the shape measuring apparatus 1C, the area magnification calculator 26 is configured to measure the measuring object 4 having a standard size,
The area is calculated in advance using the data of the outer peripheral points of the two-dimensional image of the object having the standard size for the measurement object 4, and this value is stored as the standard area value A _Q. And then
At the time of actually measuring the measurement target 4, the outer peripheral point coordinate sequence B (x, y) obtained by the outer peripheral point measuring unit 22 described in the first embodiment.
First, using the coordinate data of the outer peripheral points by
The area A for the two-dimensional image of is calculated. At that time, when a hole or the like exists in the two-dimensional image of the measurement target 4, the area value A for the two-dimensional image of the measurement target 4 is calculated from the coordinate data of the outer peripheral points excluding the holes and the like. .

The area magnification calculator 26 uses the area value A and the standard area value A _Q to calculate the magnification k of the object to be measured 4 with respect to an object having a standard size, for example, a value represented by (Equation 10). Is calculated and stored. When the area value A of the two-dimensional image of the measurement object 4 is larger than the standard area value A _Q , the magnification k calculated by (Equation 10) is k <1, and the area value A of the two-dimensional image of the measurement object 4 is A. Is the standard area value A
If smaller than _Q , k> 1. Note that (Equation 1
The reason why the square root value is adopted in 0) is to convert the magnification k into a value of the dimension of length.

[0060]

## EQU10 ## k = (A _Q / A) ^1/2 (10) In the measurement unit 3C, the normalization calculation unit 27 is used in the first embodiment.
The outer peripheral point coordinate sequence C (x, y) obtained by the coordinate data aligning unit 23 described in the above is multiplied by the above-mentioned magnification k,
The normalized coordinate data of the two-dimensional image of the measurement target 4 is obtained and stored. In the measuring unit 3C, the outer peripheral point coordinate sequence C
It is possible to perform the normalization processing of (x, y) by one multiplication processing of multiplying the multiplication factor k. The shape measuring apparatus 1C after the vector 24 is different from the case of the shape measuring apparatus 1 only in that the vector 24 uses the normalized peripheral point coordinate sequence C (x, y). By using the normalized outer peripheral point coordinate sequence C (x, y), the shape measuring apparatus 1C uses the normalized outer peripheral point coordinate sequence C (x) of each of the measurement target 4A and the measurement target 4B. , Y), the two two-dimensional images are the same two-dimensional image 4N as shown in FIG. 13C because both measurement objects have similar shapes. In addition, the primary change amount θ _{d at} the top of the two-dimensional image 4N is
As shown in (c), it is the primary change amount θ _dn (in this case, θ _dn has a relationship of θ _d4A <θ _dn <θ _d4B ).

As described above, the shape measuring apparatus 1C
Then, the measurement objects 4 having a similar shape are measured as having the same degree of deformation regardless of their dimensions. In the above description of the fourth embodiment, the measurement unit 3C includes the secondary direction difference calculation unit 32, the secondary average value calculation unit 321, and the secondary deviation value calculation unit 322, and the convex primary direction difference regulation. Part 314, intermediate part primary direction difference regulation part 3
15, the concave primary direction difference regulating portion 316, the convex secondary direction difference regulating portion 324, the intermediate secondary direction difference regulating portion 325, and the concave secondary direction difference regulating portion 326 have not been provided. The present invention is not limited to this, and these arithmetic units and the like may be provided as needed.

[Embodiment 5] FIG. 14 shows claims 1-4, 6-.
It is a block diagram explaining the shape measuring device by one Example of this invention corresponding to 10, 12 and 13. Figure 15
15A and 15B are graphs for explaining the operation contents of the shape measuring apparatus shown in FIG. 14, FIG. 15A is a graph schematically showing the outer shape of the object to be measured, and FIG. It is a graph explaining the relationship between the primary variation | change_quantity corresponding to a), and a threshold value, (c) is a graph explaining the method of calculating | requiring the center position of the uneven | corrugated part corresponding to FIG.15 (b). Also, FIG.
6 is a graph illustrating the two-dimensional coordinates obtained by the shape measuring device shown in FIG.

In FIG. 14, claims 1 and 2 shown in FIG.
The shape measuring apparatus according to one embodiment of the present invention corresponding to Nos. 2, 4, and claims 1, 2, 4, 5 and 7 shown in FIG.
The same parts as those of the shape measuring apparatus according to the embodiment of the present invention corresponding to 8, 10, and 11 and the shape measuring apparatus according to the conventional example shown in FIGS. 17 and 18 are designated by the same reference numerals, and the description thereof will be omitted. To do.

In FIG. 14, 1D is replaced with a measuring unit 3 for measuring a shape factor in the shape measuring apparatus 1 according to one embodiment of the present invention corresponding to claims 1, 2 and 4 shown in FIG. The shape measuring apparatus is configured to use the measuring unit 3D. The measuring unit 3D includes a convex primary change amount central position calculating unit 318, a concave primary change amount central position calculating unit 319, a convex secondary change amount central position calculating unit 328, and a concave unit 2 with respect to the measuring unit 3. The next change amount center position calculation unit 329, the equivalent elliptic diameter ratio calculation unit 33, the secondary direction difference calculation unit 32 described in the second embodiment,
And a secondary average value computing section 3 as a secondary average value computing section
A 21st and 2nd deviation value calculation unit 322 is provided.

Here, the case where the shape of the outer circumference of the measuring object 4 having a deformation on the outer circumference is as shown in FIG. 15A will be described as an example. The convex primary change amount central position calculation unit 318 has an upper limit threshold (l ₈ a), and is calculated by the primary direction difference calculation unit 31 having the relationship described in the third embodiment. Target 4 according to FIG. 15 (a)
The primary change amount θ _d is input to the upper limit threshold (l ₈
a) Larger component [A portion with a right hatch in FIG. 15 (b). ]] Is once classified. Also, the recess 1
The next change amount center position calculation unit 319 determines the upper limit threshold value (l
₈ a) has a lower limit threshold value (l ₈ b) smaller than ₈ a) and the primary change amount θ _d calculated by the primary direction difference calculation unit 31.
By inputting a component smaller than the lower limit threshold value (l ₈ b) [the portion hatched to the left in FIG. 15 (b). ]] Is once classified. [Refer to FIG.15 (b). ] By using a component larger than the upper limit threshold (l ₈ a) and a component smaller than the lower limit threshold (l ₈ b) _divided from the deformation amount primary change amount θ _d , the division is first performed. By obtaining the center point of the area of the marked portion and further calculating the absolute coordinates of this center point, based on the signal 5a of the binarized image, along the creepage distance of the deformation position of the outer circumference of the measurement object 4 The positions are P ₁ and P ₂ as illustrated in FIG.
To identify as ~P _12.

The deformed position of the outer periphery of the object to be measured 4 obtained by this embodiment is a concave deformed portion because the method for determining the center point is the above-described method [FIG. 15].
These are P ₁ , P _3, etc. ] Is shown not as the deepest part of the concave portion of the measurement object 4 having the deformation according to FIG. 15A but as a point near the deepest part and outside the deepest part. In the case of a convex deformed portion [P _{2 in} FIG. 15,
P ₄ etc. ] Is not the highest part of the convex part, but is shown as a point located in the vicinity of the highest part and inside the highest part. The equivalent elliptic diameter ratio calculation unit 33 inputs the signal 6a,
A ratio δ between the major axis and the minor axis of the equivalent ellipse with respect to the outer circumference of the measurement target 4 is calculated. This major axis / minor axis ratio δ is measured 4
Mθ _max and M θ _min [Mechanical Engineering Handbook (Revised 6th Edition)
See pages 3-15 of (The Japan Society of Mechanical Engineers). ] Is used to calculate by the relationship shown in (Equation 11). The major axis / minor axis ratio δ indicates the macroscopic circularity of the measuring object 4, which is 1 when the measuring object 4 is a perfect circle and is long when the measuring object 4 is an ellipse. The larger the yen, the larger the number.

[0067]

Δ = {Mθ _max / Mθ _min } ^1/2 (11) Here, Mθ _max is the maximum second moment of the measurement target 4, and Mθ _min is the minimum second moment of the measurement target 4. It is the second moment. Classification of the degree of deformation of the outer periphery of the measurement target 4 is performed collectively by using the major axis / minor axis ratio δ and the deviation value S ² obtained by the deviation value calculation unit 312 or the secondary deviation value calculation unit 322. It becomes possible to handle it.

FIG. 16 shows an example in which the major axis / minor axis ratio δ is plotted on the X axis of the Cartesian coordinates and the deviation value S ² is plotted on the Y axis. Figure 1
By using the two-dimensional space defined by the major axis / minor axis ratio δ according to No. 6 and the deviation value S ² to divide by the dividing line shown by the dotted line in FIG. 16, the X, Y coordinate axes and the dividing line are surrounded. Further, it becomes easy to collectively evaluate the deformation degree existing in each area as the same grade. This evaluation method is used for the measurement object 4 which is almost circular.
It is especially effective when used for. Note that FIG. 16 uses the data of the major axis / minor axis ratio δ and the deviation value S ² obtained as described above, and uses the cpu 82 or the input / output interface 8
It is created by an external host computer or the like via 5. In addition, the division line shown by the dotted line in FIG. 16 is set according to the selection criteria when the selection work was manually performed at the initial stage of the introduction of the shape measuring apparatus 1D.
After that, it is preferable to make a correction change based on the operation record of the shape measuring apparatus 1D. The operator of the shape measuring apparatus 1D uses the display device 83 and the operator console 84 to set the lane markings and correct and change the lane markings by the cpu 82 or an external host computer.

In the above description of the fifth embodiment, referring to FIG.
The two-dimensional space defined by the major axis / minor axis ratio δ and the deviation value S ² shown as an example in 6 has been created by the cpu 82 or an external host computer, but the invention is not limited thereto. For example, in the measuring unit 3D, this 2
Dedicated hardware such as an arithmetic unit for creating a dimensional space may be provided.

In the above description of Examples 1 to 5,
The measurement value indicating the distribution amount of the deformation of the outer circumference of the measurement target 4 has been described as the deviation value S ² , but the invention is not limited to this, and may be the standard deviation value S, for example. Further, in the above description of the first to fifth embodiments, the present invention described in each of the embodiments is assumed to be configured separately, but the invention is not limited to this, and for example, The present invention described in each of the embodiments may be combined with each other, or the contents of all the embodiments may be integrated.

In the above description of the first to fifth embodiments, the outer peripheral point measuring section 22, the coordinate data aligning section 23, the area magnification calculating section 26, and the normalizing section included in the measuring sections 3, 3A, 3B, 3C and 3D are normalized. The circuit devices such as the calculation unit 27, the primary direction difference calculation unit 31, and the average value calculation unit 311 have been described as being individually formed, but the invention is not limited to this, and for example, the above-described The respective circuit devices may be appropriately integrated and configured, or if necessary, may be configured as a single integrated device.

Furthermore, in the above description of the first to fifth embodiments, the measuring units 3, 3A, 3B, 3C and 3D are assumed to be hardware, but the present invention is not limited to this. All of 3,3A, 3B, 3C and 3D do not necessarily have to be hardware, and for example, some of them may be installed in the shape measuring apparatus as a program executed by the cpu 82.

[0073]

The present invention has the following effects. The measuring unit that measures the shape factor, based on the signal of the two-dimensional image, an outer peripheral point measuring unit that obtains coordinate data of each of a large number of outer peripheral points corresponding to the outer periphery of the measured object that the image has, for example, A coordinate data aligning unit that rearranges the coordinate data of the outer peripheral points of a large number of images obtained by the outer peripheral point measuring unit in an order along one direction of the outer periphery of the measured object, based on the rearranged coordinate data. Then, based on the vector data conversion unit that converts the vector data connecting the adjacent outer peripheral points to each other, based on the vector data of the outer peripheral point coordinate data, a constant creepage distance W is set for each constant creeping distance pitch P. A unit vector generation unit including: a unit vectorization unit that takes a moving average with an averaging window having a width and converts the moving average into a set of unit vectors having the vector length of the constant pitch P; Primary direction difference calculation unit that obtains a direction difference between two unit vectors that are separated from each other by a section D centered around an appropriate outer peripheral point along a constant circumferential direction with respect to the set of unit vectors obtained in And a primary average value etc. computing unit for obtaining an average value or / and a deviation value of the directional difference between the unit vectors obtained by the primary directional difference computing unit, and by the value of the directional difference between the unit vectors, By measuring the degree of deformation of the outer shape of the measured object, when the basic shape of the measured object is circular or planar, the outer circumference of the measured object is irrespective of its shape and dimensions. It is possible to quantitatively and highly accurately determine the degree of deformation, that is, the quality of the shape of the outer circumference.

In the above item, there is provided a primary average value etc. computing unit for obtaining an average value and / or a deviation value of the directional difference between the unit vectors obtained by the primary directional difference computing unit, and the directional difference between the unit vectors is provided. By measuring the degree of deformation of the outer shape of the object to be measured by the average value and / or deviation value of Since the macro deformation amount and / or the micro deformation distribution amount of can be obtained with high accuracy, regardless of the shape and size of the outer circumference of the measurement target, the degree of deformation of the outer circumference, that is, the quality related to the outer shape, It is possible to obtain it quantitatively and with higher accuracy. The measuring unit that measures the shape factor, based on the signal of the two-dimensional image, an outer peripheral point measuring unit that obtains coordinate data of each of a large number of outer peripheral points corresponding to the outer periphery of the measured object that the image has, for example, A coordinate data aligning unit that rearranges the coordinate data of the outer peripheral points of a large number of images obtained by the outer peripheral point measuring unit in an order along one direction of the outer periphery of the measured object, based on the rearranged coordinate data. Then, based on the vector data conversion unit that converts the vector data connecting the adjacent outer peripheral points to each other, based on the vector data of the outer peripheral point coordinate data, a constant creepage distance W is set for each constant creeping distance pitch P. A unit vector generation unit including: a unit vectorization unit that takes a moving average with an averaging window having a width and converts the moving average into a set of unit vectors having the vector length of the constant pitch P; Primary direction difference calculation unit that obtains a direction difference between two unit vectors that are separated from each other by a section D centered around an appropriate outer peripheral point along a constant circumferential direction with respect to the set of unit vectors obtained in Based on the direction difference between the unit vectors, the difference in the direction difference between the two points separated by the section E centered on a certain outer peripheral point along the constant circumferential direction is obtained. By including a calculation unit and measuring the degree of deformation of the outer shape of the object to be measured by the value of the difference in the direction difference between the unit vectors,
Even if the basic shape of the measurement target is elliptical,
Regardless of the shape and size of the outer circumference of the measurement object, the degree of deformation of the outer circumference, that is, the quality of the outer shape can be quantitatively and highly accurately obtained.

In the above item, the average value of the difference in the direction difference between the unit vectors obtained by the secondary direction difference calculation unit and /
Alternatively, a secondary average value calculation unit for obtaining a deviation value is provided, and the deformation degree of the outer shape of the object to be measured is measured by the average value and / or the deviation value of the directional difference between the unit vectors. By doing so, even when the basic shape of the measurement target is an elliptical shape, it is possible to obtain the macro deformation amount and / or the micro deformation distribution amount of the outer circumference of the measurement target with high accuracy, and Shape of the outer circumference of
Regardless of the size, the degree of deformation of the outer circumference, that is, the quality relating to the shape of the outer circumference can be quantitatively and highly accurately obtained.

In the items 1 and 2, the direction difference between the unit vectors output by the primary direction difference calculation unit is input, and the primary direction difference having one or more threshold values for controlling the output range of this direction difference is input. The restriction unit or the directional difference difference between the two unit vectors obtained by the secondary directional difference calculation unit is input, and one or more threshold values for restricting the output range of the directional difference are provided. The direction difference between the unit vectors, or the direction difference between the unit vectors, is extracted by providing the secondary direction difference regulating unit and extracting only the direction difference in the region defined by the thresholds of the primary and secondary direction difference regulating units , By measuring the degree of deformation of the outer shape of the object to be measured as the difference in the direction difference between the unit vectors, the area of the large convex portion due to exceeding the threshold value is also below the threshold value. Big in that Area parts is, because it is removed is divided, the degree of deformation of the measuring object, and local large deformation, becomes possible by dividing it clearly determined to a small deformation otherwise.

In the terms and the terms, the direction difference between the unit vectors output by the primary direction difference calculation unit is input, and one or more threshold values for dividing the range of the value of this direction difference are provided. A primary change amount central position calculation unit for determining the center position of the divided convex and / or concave portions after dividing the convex portions exceeding the equal threshold value and / or the concave portion lower than these threshold values, or the secondary direction The difference in the direction difference between the unit vectors output by the difference calculation unit is input, and one or more threshold values for dividing the range of the difference value of the direction difference are provided. Alternatively, a primary change amount central position calculation unit is provided with a secondary change amount central position calculation unit that determines the central positions of the divided convex and / or concave parts after dividing the recesses below these threshold values. Depending on the center position obtained in With the structure for specifying a large positional variation degree of the outer shape of the constant object,
It is possible to quantitatively obtain the central positions of the convex region and the concave region, and it is possible to clearly and quantitatively determine the position of the deformed portion.

In the above items 1 to 4, the unit vector generation unit calculates the area of the object to be measured with respect to the two-dimensional image based on the coordinate data of the outer peripheral points of a large number of images obtained by the outer peripheral point measurement unit. Input the area magnification calculation unit that calculates the magnification of the area with respect to the standard area that is held in advance, the coordinate data rearranged by the coordinate data alignment unit and the area magnification data obtained by the area magnification calculation unit, and A normalization operation unit for multiplying the changed coordinate data by magnification data to obtain rearranged and normalized coordinate data, and supplying the rearranged and normalized coordinate data to a vector data forming unit With this configuration, the coordinate data of the measurement target is normalized, so that in the case of measurement targets that have similar shapes even if they have different dimensions, the deformation of the outer circumference of the measurement target is changed. And including the distribution amount of the macroscopic deformation amount and / or microscopic deformation of the outer periphery of the measurement object, it is possible to determine as the same value.

In the items (1) to (4), the long / short axis ratio for obtaining the long / short axis ratio, which is the ratio of the long axis length of the equivalent ellipse and the short axis length of the equivalent ellipse relating to the outer shape of the object to be measured. One of the deviation value of the directional difference between the unit vectors obtained by the primary direction difference calculation section or the deviation value of the difference of the direction differences between the unit vectors obtained by the secondary direction difference calculation section is provided. For each axis, create a rectangular coordinate with the long-short axis ratio obtained by the long-short axis ratio calculation unit on the other axis, and divide the area with the same degree of deformation based on this coordinate, and identify the same area in this area. The objects to be measured included in the area are graded so that they have the same degree of deformation with respect to the degree of deformation, so that the objects having the same degree of deformation existing in the area divided in the two-dimensional coordinates are the same. It is possible to evaluate collectively as a grade Ri, it is possible to perform quantitatively and unambiguously the grading on deformation degree of the measurement target.

[Brief description of drawings]

FIG. 1 is a block diagram illustrating a shape measuring apparatus according to an embodiment of the present invention corresponding to claims 1, 2, and 4.

2A and 2B are graphs for explaining an image of an object to be measured obtained by the measuring unit shown in FIG. 1, FIG. 2A is a graph for explaining an image obtained by a peripheral point measuring unit, and FIG. , A graph for explaining an outer peripheral point coordinate sequence, and (c) a graph for explaining a circumferential direction coordinate coordinate sequence obtained by the coordinate data alignment unit.

3A and 3B are explanatory diagrams for explaining data obtained in the main part of the measurement unit shown in FIG. 1, in which FIG. 3A is an explanatory diagram of an outer peripheral point coordinate sequence, and FIG. 3B is a circumferential aligned coordinate sequence. Explanatory drawing of (c)
Is an explanatory diagram of a vector set, (d) is an explanatory diagram of a unit vector set, and (e) is an explanatory diagram of a primary change amount.

FIG. 4 is a graph illustrating a method for obtaining a unit vector set.

FIG. 5 is a graph explaining the operation of the measuring unit shown in FIG. 1 when the basic shape of the object to be measured is circular,
(A) is a graph of the outer shape of the object to be measured, (b) is
Graph of primary variation

FIG. 6 is a graph explaining the operation of the measuring unit shown in FIG. 1 when the basic shape of the measured object is a plane;
(A) is a graph of the outer shape of the object to be measured, (b) is
Graph of primary variation

FIG. 7 is an explanatory diagram for explaining β.

FIG. 8 is a block diagram illustrating a shape measuring apparatus according to an embodiment of the present invention corresponding to claims 7, 8 and 10.

9 is a graph for explaining the operation of the measuring unit shown in FIG. 8 when the basic shape of the measured object is an ellipse;
(A) is a graph of the outer shape of the object to be measured, (b) is
9A is a graph of the primary change amount, and FIG. 9C is a graph of the secondary change amount with respect to FIG. 9A.

FIG. 10: Claims 1, 2, 4, 5 and 7, 8, 10,
11 is a block diagram illustrating a shape measuring apparatus according to an embodiment of the present invention corresponding to FIG.

FIG. 11 is a graph explaining the operation content of the shape measuring apparatus shown in FIG.

FIG. 12 is a block diagram illustrating a shape measuring apparatus according to an embodiment of the present invention corresponding to claims 1, 3 to 7, and 9 to 12.

13A and 13B are graphs for explaining the operation content of the shape measuring apparatus shown in FIG. 12, FIG. 13A is a graph schematically showing image data of a large object to be measured, and FIG.
It is a graph which shows the image data of a small to-be-measured object modelly, (c) is a graph which shows the image data of the normalized to-be-measured object modelly.

FIG. 14 is a block diagram illustrating a shape measuring device according to an embodiment of the present invention corresponding to claims 1 to 4, 6 to 10, 12 and 13.

15A and 15B are graphs for explaining the operation contents of the shape measuring apparatus shown in FIG. 14, in which FIG. 15A is a graph schematically showing the outer shape of the object to be measured, a graph illustrating the relationship between the primary change amount and the threshold value corresponding to a),
FIG. 15C is a graph illustrating a method of obtaining the center position of the uneven portion corresponding to FIG.

16 is a graph illustrating two-dimensional coordinates obtained by the shape measuring device shown in FIG.

FIG. 17 is a block diagram illustrating an example of a conventional shape measuring apparatus.

FIG. 18 is a block diagram illustrating another conventional shape measuring apparatus.

[Explanation of symbols]

 1 shape measuring device 2 unit vector generation unit 21 memory unit 22 outer peripheral point measurement unit 23 coordinate data alignment unit 24 vector data conversion unit 25 unit vectorization unit 3 measurement unit 31 primary direction difference calculation unit 311 average value calculation unit 312 deviation value Arithmetic section

Claims (13)

[Claims] 1. A shape measuring instrument comprising an image pickup device for obtaining a signal of a binarized two-dimensional image of an object to be measured, and a measuring unit for measuring a shape factor of the object to be measured from the signal of the two-dimensional image. In the device, the measuring unit that measures the shape factor is an outer peripheral point measuring unit that obtains coordinate data of a large number of outer peripheral points corresponding to the outer periphery of the measured object that the image has, based on the signal of the two-dimensional image. Input the coordinate data of the peripheral points of a large number of images obtained by the peripheral point measurement unit, each has the same length, and is a set of unit vectors that are successively connected to each other and go around the circumference of the measured object. And a unit vector generation unit that generates a unit vector, and two unit vectors that are separated from each other by a section D centered around an appropriate outer peripheral point along a constant circumferential direction with respect to the set of unit vectors obtained by the unit vector generation unit. First order to find the direction difference between A shape measuring device, comprising: a direction difference calculating unit; and measuring a degree of deformation of an outer shape of an object to be measured by a direction difference between the unit vectors. 2. The shape measuring apparatus according to claim 1, wherein the unit vector generating unit included in the measuring unit calculates coordinate data of outer peripheral points of a large number of images obtained by the outer peripheral point measuring unit from an object to be measured. A coordinate data arrangement unit that rearranges in an order along one direction of the outer circumference, a vector data conversion unit that converts the coordinate data rearranged into vector data that connects adjacent outer peripheral points, and this vector Based on the data of the outer peripheral point coordinate data, a moving average is taken by an averaging window having a width of a constant creepage distance W for each pitch P of a constant creepage distance, and the vector length of the constant pitch P is obtained. And a unit vectorization unit for converting the unit vector into a set of unit vectors. 3. The shape measuring device according to claim 1, wherein the unit vector generating unit included in the measuring unit converts the coordinate data of the outer peripheral points of a large number of images obtained by the outer peripheral point measuring unit into an object to be measured. The coordinate data aligning unit that rearranges in order along one direction of the outer circumference and the area of the measured object with respect to the two-dimensional image are calculated based on the coordinate data of the outer circumference points of many images obtained by the outer circumference point measuring unit. ， Enter the area magnification calculation unit that calculates the magnification of this area with respect to the standard area that is held in advance, the coordinate data rearranged by the coordinate data alignment unit, and the area magnification data obtained by the area magnification calculation unit. , A normalization operation unit that multiplies the rearranged coordinate data by magnification data to obtain rearranged and normalized coordinate data, and a normalization operation unit that is adjacent to each other based on the rearranged and normalized coordinate data Outer peripheral point An average having a width of a constant creepage distance W for each pitch P of a constant creepage distance, based on the vector data conversion unit that converts the vector data to connect the vector data and the normalized peripheral point coordinate data that has been vectorized A shape measuring device, comprising: a unit vectorization unit that takes a moving average with a conversion window and converts the moving average into a set of unit vectors having the constant pitch P. 4. The shape measuring device according to claim 1, wherein the measuring unit for measuring the shape factor inputs the direction difference between the unit vectors obtained by the primary direction difference calculating unit. , To find the average value and / or deviation value and / or standard deviation value 1
Equipped with a calculation unit for the next average value, etc.
Alternatively, a shape measuring device characterized by measuring a degree of deformation of an outer shape of an object to be measured by a deviation value and / or a standard deviation value. 5. The shape measuring device according to claim 1, wherein the measuring unit for measuring the shape factor inputs the direction difference between the unit vectors output by the primary direction difference calculating unit, 1 that has one or two or more thresholds that regulate the output range of this direction difference
The primary direction difference regulation unit is provided, and only the direction difference in the area divided by the threshold value of the primary direction difference regulation unit is extracted, and the degree of deformation of the outer shape of the object to be measured is measured as the direction difference between the unit vectors. A shape measuring device characterized by the above. 6. The shape measuring device according to claim 1, wherein the measuring unit for measuring the shape factor inputs the direction difference between the unit vectors output by the primary direction difference calculating unit, One or two or more threshold values for dividing the range of the value of the direction difference are provided, and the convex portions exceeding these threshold values and / or the concave portions below these threshold values are divided, and then the divided convex portions and /
Alternatively, a primary change center position calculating unit for obtaining the center position of the recess is provided, and a position having a large degree of deformation of the outer shape of the measured object is specified by the center position obtained by the primary change center position calculating unit. Shape measuring device characterized by. 7. A shape measuring instrument comprising an image pickup device for obtaining a signal of a binarized two-dimensional image of an object to be measured, and a measuring unit for measuring a shape factor of the object to be measured from the signal of the two-dimensional image. In the device, the measuring unit that measures the shape factor is an outer peripheral point measuring unit that obtains coordinate data of a large number of outer peripheral points corresponding to the outer periphery of the measured object that the image has, based on the signal of the two-dimensional image. , A set of unit vectors that have the same length based on the coordinate data of the peripheral points of a large number of images obtained by the peripheral point measurement unit, and that are successively connected to each other and that make a circuit around the periphery of the measured object. And a section D having a certain outer peripheral point as a center along a constant circumferential direction with respect to a set of unit vectors obtained by the unit vector generating section.
Find the direction difference between two unit vectors separated by 1
By inputting the direction difference between the next direction difference calculation unit and this unit vector, the difference between the direction differences at two points separated by a section E centered around an appropriate outer peripheral point along a constant circumferential direction. And a secondary direction difference calculation unit for calculating the degree of deformation of the outer shape of the object to be measured by the difference in the direction difference between the unit vectors. 8. The shape measuring device according to claim 7, wherein the unit vector generating unit included in the measuring unit calculates coordinate data of outer peripheral points of a large number of images obtained by the outer peripheral point measuring unit, from the object to be measured. A coordinate data arrangement unit that rearranges in an order along one direction of the outer circumference, a vector data conversion unit that converts the coordinate data rearranged into vector data that connects adjacent outer peripheral points, and this vector Based on the data of the coordinate data of the outer peripheral points, a moving average is calculated by an averaging window having a width of a constant creepage distance W for each pitch P of a constant creepage distance, and the vector length of the constant pitch P is obtained. And a unit vectorization unit for converting the unit vector into a set of unit vectors. 9. The shape measuring device according to claim 7, wherein the unit vector generating unit included in the measuring unit calculates the coordinate data of the outer peripheral points of a large number of images obtained by the outer peripheral point measuring unit from the object to be measured. The coordinate data alignment section that rearranges in order along one direction of the outer circumference, and the area of the measured object for the two-dimensional image is calculated based on the coordinate data of the outer circumference points of the many images obtained by the outer circumference point measurement section. ， Enter the area magnification calculation unit that calculates the magnification of this area with respect to the standard area that is held in advance, the coordinate data rearranged by the coordinate data alignment unit, and the area magnification data obtained by the area magnification calculation unit. , A normalization calculation unit that multiplies the rearranged coordinate data by magnification data to obtain rearranged and normalized coordinate data, and a normalization operation unit that is adjacent to each other based on the rearranged and normalized coordinate data Outer peripheral point An average having a width of a constant creepage distance W for each pitch P of a constant creepage distance, based on the vector data conversion unit that converts the vector data to connect the vector data and the normalized peripheral point coordinate data that has been vectorized A shape measuring device, comprising: a unit vectorization unit that takes a moving average with a conversion window and converts the moving average into a set of unit vectors having the constant pitch P. 10. The shape measuring device according to claim 7, wherein the measuring unit for measuring the shape factor calculates the difference in directional difference between the unit vectors obtained by the secondary directional difference calculating unit. A second-order average value calculating unit for inputting and calculating the average value and / or deviation value and / or standard deviation value thereof is provided, and the external shape of the object to be measured is calculated by the average value and / or standard deviation value of the difference in the direction difference. A shape measuring device characterized by measuring the degree of deformation of a shape. 11. The shape measuring device according to claim 7, wherein the measuring unit that measures the shape factor is the difference in direction between the two unit vectors obtained by the secondary direction difference calculator. Input the difference and set one or two thresholds that regulate the output range of this difference in direction.
The secondary direction difference restricting unit having more than one is provided, and only the difference in the direction difference in the area divided by the threshold value of the secondary direction difference restricting unit is taken out, and the measured object is determined as the difference in the direction difference between the unit vectors. A shape measuring device characterized by measuring the degree of deformation of an outer shape. 12. The shape measuring device according to claim 7, wherein the measuring unit for measuring the shape factor inputs the difference in the direction difference between the unit vectors output by the secondary direction difference calculating unit. However, it has one or more thresholds for dividing the range of the difference value of the direction difference, and divides the convex portions exceeding these thresholds and / or the concave portions below these thresholds, and the divided convexes. Department and /
Alternatively, a shape measuring apparatus comprising a secondary change amount central position calculation unit for determining a central position of a concave portion and specifying a position where the degree of deformation of the outer shape of the measured object is large. 13. The shape measuring device according to claim 1, wherein the measuring unit for measuring the shape factor has an equivalent elliptical major axis length related to the outer shape of the object to be measured, Equipped with a long / short axis ratio calculation unit that obtains a long / short axis ratio that is a ratio with the short axis length of an equivalent ellipse, the deviation value or standard deviation value of the direction difference between unit vectors obtained by the primary direction difference calculation unit , Or the deviation value or the standard deviation value of the difference in the direction difference between the unit vectors obtained by the secondary direction difference calculation unit is used for one axis, and the long / short axis ratio obtained by the long / short axis ratio calculation unit is used for the other axis. Create two-dimensional coordinates, divide the areas with the same degree of deformation based on these coordinates, and classify the objects to be measured included in the same area of this area as the same grade with respect to the degree of deformation. A shape measuring device characterized by performing.