JPH07291660A - Cordierite-based crystallized glass and its production - Google Patents

Cordierite-based crystallized glass and its production

Info

Publication number
JPH07291660A
JPH07291660A JP30971394A JP30971394A JPH07291660A JP H07291660 A JPH07291660 A JP H07291660A JP 30971394 A JP30971394 A JP 30971394A JP 30971394 A JP30971394 A JP 30971394A JP H07291660 A JPH07291660 A JP H07291660A
Authority
JP
Japan
Prior art keywords
glass
cordierite
crystallized glass
mgo
heat treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP30971394A
Other languages
Japanese (ja)
Other versions
JP2759763B2 (en
Inventor
Yasuyuki Kawashima
康之 川嶋
Naoyuki Gotou
直雪 後藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ohara Inc
Original Assignee
Ohara Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ohara Inc filed Critical Ohara Inc
Priority to JP6309713A priority Critical patent/JP2759763B2/en
Priority to US08/409,320 priority patent/US5532194A/en
Publication of JPH07291660A publication Critical patent/JPH07291660A/en
Application granted granted Critical
Publication of JP2759763B2 publication Critical patent/JP2759763B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C10/00Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
    • C03C10/0036Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing SiO2, Al2O3 and a divalent metal oxide as main constituents
    • C03C10/0045Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing SiO2, Al2O3 and a divalent metal oxide as main constituents containing SiO2, Al2O3 and MgO as main constituents

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Glass Compositions (AREA)

Abstract

PURPOSE:To produce a crystallized glass excellent 10 melting properties and low-temperature crystallization properties and suitable for a heat-resistant, impact-resistant and high-strength material and various kinds of materials requiring fine processings or precise processings by melting a raw material glass having a specified composition, forming it and applying a heat treatment thereto. CONSTITUTION:A raw material glass having a composition of 38 to 50wt.% SiO2, 18 to 30wt.% Al2O3, 10 to 20wt.% MgO (provided that Al2O3/MgO=1.2 to 2.3 on weight base), 0 to 5wt.% B2O3, 0 to 5wt.% CaO, 0 to 5wt.% BaO, 0 to 5wt.% SrO, 0.5 to 7.5wt.% ZnO, 4 to 15wt.% TiO2, 0 to 5wt.% ZrO2 and 0 to 2wt.% As2O3 and/or Sb2O3 is melted at <=1500 deg.C, formed and subsequently cooled. The primary heat treatment is then applied thereto at 700 to 800 deg.C and the secondary heat treatment is subsequently applied thereto at 900 to 1000 deg.C to obtain a cordierite-based crystallized glass having <=10/mum crystalline grain size. Further, an abrasive treatment is applied thereto according to the conventional method, thus producing the objective finished glass having <=50Angstrom surface roughness.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、耐熱性、耐衝撃性を要
求される高強度材料として、また微細加工、精密加工を
必要とする各種材料、例えば電子部品材料、磁気ディス
ク用基板材料、機械部品材料等に用いるのに好適な結晶
化ガラスおよびその製造方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a variety of materials requiring high-strength materials requiring heat resistance and impact resistance, and fine processing and precision processing, such as electronic component materials and magnetic disk substrate materials. The present invention relates to a crystallized glass suitable for use as a material for machine parts and the like and a method for producing the same.

【0002】[0002]

【従来の技術】従来、コージェライト系結晶化ガラス
は、結晶核形成剤を含有するSiO2−Al23−Mg
O系組成をベースとした原ガラスを溶融し、熱処理する
ことにより得られるものが種々知られている。これらの
結晶化ガラス材料は、一般に主結晶相として、コーディ
エライト系結晶(Mg2Al4Si518)を含有するも
のであるが、前記用途分野の材料に対し、近年ますます
厳しい以下に示す高度な特性が要求されている。 析出結晶が微細であり、精密加工、精密研磨特性及び
機械的強度に優れていること。 材料中にNa2O、K2O成分を含有すると、使用の
際、各種処理工程中でこれらのイオンが拡散して特性が
変化してしまうので、実質的にNa2O、K2O成分を含
有しないこと。 原ガラスの溶融清澄が容易であって、そのため材料中
に脈理、泡および異物(インクルージョン)等を含有せ
ず、高度の光学的均質性を有すること。 原ガラスの結晶化温度が低温で安定量産性に優れてい
ること。
2. Description of the Related Art Conventionally, cordierite-based crystallized glass contains SiO 2 --Al 2 O 3 --Mg containing a crystal nucleating agent.
Various products obtained by melting raw glass based on an O-based composition and subjecting it to heat treatment are known. These crystallized glass materials generally contain a cordierite-based crystal (Mg 2 Al 4 Si 5 O 18 ) as a main crystal phase. The advanced characteristics shown in are required. Precipitated crystals are fine and have excellent precision processing, precision polishing characteristics and mechanical strength. If the material contains Na 2 O and K 2 O components, these ions will diffuse during various treatment steps during use, and the characteristics will change. Therefore, the Na 2 O and K 2 O components are substantially contained. Does not contain. Melting and refining of the raw glass is easy, and therefore the material does not contain striae, bubbles, inclusions, etc., and has a high degree of optical homogeneity. The raw glass has a low crystallization temperature and is stable and has excellent mass productivity.

【0003】ところで、上記従来のコーディエライト系
結晶化ガラスとしては、例えば特開昭55−37496
号公報には、TiO2成分を核剤として含有するSiO2
−Al23−MgO系ガラスにLa23、Pr23、お
よびNd23を含有させた結晶化ガラスが開示されてい
る。また、米国特許第4,304,603号公報、特開
昭33−7543号公報には、TiO2成分を核剤とし
て含有するSiO2−Al23−MgO系ガラスが開示
されている。さらに特開昭63−112439号公報に
は、TiO2・ZrO2成分を核剤として含有するSiO
2−Al23−MgO系ガラスが開示されている。しか
し、これらの公報明細書中結晶化ガラスはいずれも溶解
温度が約1520℃〜1650℃の高温を必要とし、均
質性の優れた原ガラスを得るのが困難である。また、結
晶化温度に関しても約1100℃〜1345℃の高温を
必要とし、量産し難い欠点があるのと同時に、高温結晶
化による粗大結晶の析出を避けられない。
By the way, as the conventional cordierite type crystallized glass, for example, JP-A-55-37496 is used.
In the publication, SiO 2 containing a TiO 2 component as a nucleating agent is disclosed.
A crystallized glass in which La 2 O 3 , Pr 2 O 3 , and Nd 2 O 3 are contained in a —Al 2 O 3 —MgO-based glass is disclosed. Also, U.S. Pat. No. 4,304,603 and JP-Sho 33-7543, SiO 2 -Al 2 O 3 -MgO based glass containing TiO 2 component as a nucleating agent is disclosed. Further, JP-A-63-112439 discloses a SiO containing a TiO 2 .ZrO 2 component as a nucleating agent.
2 -Al 2 O 3 -MgO based glass is disclosed. However, in each of these publications, the crystallized glass requires a high melting temperature of about 1520 ° C. to 1650 ° C., and it is difficult to obtain a raw glass having excellent homogeneity. Also, regarding the crystallization temperature, a high temperature of about 1100 ° C. to 1345 ° C. is required, and there is a drawback that mass production is difficult, and at the same time, precipitation of coarse crystals due to high temperature crystallization cannot be avoided.

【0004】[0004]

【発明が解決しようとする課題】本発明の目的は、前記
の各要望事項を満しつつ、前記従来技術にみられる諸欠
点を改善し原ガラスの溶融性と低温結晶化特性に一段と
優れたコージェライト系結晶化ガラスを提供することに
ある。
DISCLOSURE OF THE INVENTION The object of the present invention is to meet the above-mentioned requirements and to improve the various drawbacks of the prior art and to further improve the melting property and low temperature crystallization property of the raw glass. It is to provide a cordierite-based crystallized glass.

【0005】[0005]

【課題を解決するための手段】本発明は上記目的を達成
するために鋭意試験結果、TiO2成分を核形成剤とし
たSiO2−Al23−MgO系原ガラスにおいて、Z
nO成分を必須成分とし、B23、BaO、CaO、S
rOを導入することにより原ガラスの溶融温度を著しく
低下させ、また結晶化の熱処理条件の低温化を可能と
し、その結晶粒子は微細で、かつ、緻密性に優れること
をみいだし本発明に至った。
Means for Solving the Problems In order to achieve the above-mentioned object, the present invention has conducted a diligent test, and in a SiO 2 —Al 2 O 3 —MgO based raw glass using a TiO 2 component as a nucleating agent, Z
nO component as an essential component, B 2 O 3 , BaO, CaO, S
By introducing rO, the melting temperature of the raw glass is remarkably lowered, and the heat treatment conditions for crystallization can be lowered, and it was found that the crystal grains are fine and have excellent compactness, and thus the present invention was achieved. It was

【0006】本発明の結晶化ガラスの特徴は、重量百分
率で、SiO2 38%〜50%、Al23 18%〜
30%、MgO 10%〜20%、ただし、重量比で、
Al23/MgO=1.2〜2.3、B23 0%〜5
%、CaO 0%〜5%、BaO 0%〜5%、SrO
0%〜5%、ZnO 0.5%〜7.5%、TiO2
4%〜15%、ZrO2 0%〜5%、As23およ
び/またはSb23 0%〜2%、の組成から成る原ガ
ラスを溶融し、成形した後、熱処理することにより得ら
れ、主結晶がコージェライト系結晶であることにある。
本発明の結晶化ガラスの組成は、原ガラスと同様酸化物
基準で表示し得るが、原ガラスの組成範囲を上記のよう
に限定した理由について述べる。
The crystallized glass of the present invention is characterized in terms of weight percentage: SiO 2 38% -50%, Al 2 O 3 18%-
30%, MgO 10% to 20%, but by weight ratio,
Al 2 O 3 /MgO=1.2 to 2.3, B 2 O 3 0% to 5
%, CaO 0% to 5%, BaO 0% to 5%, SrO
0% to 5%, ZnO 0.5% to 7.5%, TiO 2
4% to 15%, ZrO 2 0% to 5%, As 2 O 3 and / or Sb 2 O 3 0% to 2%, the raw glass having the composition is melted, molded, and then obtained by heat treatment. The main crystal is cordierite-based crystal.
The composition of the crystallized glass of the present invention can be expressed on the basis of oxides like the original glass, but the reason why the composition range of the original glass is limited as described above will be described.

【0007】SiO2成分は原ガラスの熱処理により、
主結晶としてコージェライト(Mg2Al4Si518
系の結晶を生成するきわめて重要な成分であるが、その
量が38%未満では、得られる結晶化ガラスの析出結晶
が不安定となり、また50%を超えると原ガラスの溶融
が困難となる。好ましくは42%〜47%の範囲にする
のがよい。Al23成分は原ガラスの熱処理により、主
結晶としてコージェライト(Mg2Al4Si518)系
結晶を生成するきわめて重要な成分であるが、その量が
18%未満では上記結晶の析出が困難になると同時に、
原ガラスの溶融が困難となる。また30%を超えるとや
はり溶融性が困難となり、耐失透性も悪化する。好まし
くは22%〜27%の範囲にするのがよい。
The SiO 2 component is produced by heat treatment of the raw glass.
Cordierite (Mg 2 Al 4 Si 5 O 18 ) as the main crystal
Although it is a very important component for forming system crystals, if its amount is less than 38%, the precipitated crystals of the crystallized glass obtained will be unstable, and if it exceeds 50%, melting of the raw glass will be difficult. It is preferably in the range of 42% to 47%. The Al 2 O 3 component is a very important component that produces cordierite (Mg 2 Al 4 Si 5 O 18 ) type crystals as the main crystals by heat treatment of the raw glass. At the same time as precipitation becomes difficult,
It becomes difficult to melt the raw glass. On the other hand, if it exceeds 30%, the melting property becomes difficult and the devitrification resistance deteriorates. It is preferably in the range of 22% to 27%.

【0008】MgO成分は原ガラスの熱処理により、主
結晶としてコージェライト(Mg2Al4Si518)系
結晶を生成するきわめて重要な成分であるが、その量が
10%未満では上記結晶の析出が困難になると同時に、
原ガラスの溶融が困難となる。また20%を超えるとや
はり上記結晶の析出が困難となり、また耐失透性も悪化
する。ただし、Al23とMgO成分の重量比は所望の
結晶を得るため1.2〜2.3の範囲にする必要があ
る。なお、この重量比が1.2未満では所望の結晶を得
ることが困難となる。また2.3を超えると原ガラスの
溶融が困難となる。TiO2成分は核形成剤として不可
欠であるが、これらの量が4%未満では所望の結晶を生
成させることができず、また15%を超えると耐失透性
が悪化する。好ましくは8%〜12%の範囲にするのが
よい。
The MgO component is a very important component that produces cordierite (Mg 2 Al 4 Si 5 O 18 ) type crystals as the main crystal by heat treatment of the raw glass, but if the amount is less than 10%, the above crystal is At the same time as precipitation becomes difficult,
It becomes difficult to melt the raw glass. If it exceeds 20%, precipitation of the above-mentioned crystals becomes difficult, and devitrification resistance is deteriorated. However, the weight ratio of Al 2 O 3 and MgO components must be in the range of 1.2 to 2.3 in order to obtain desired crystals. If this weight ratio is less than 1.2, it will be difficult to obtain desired crystals. If it exceeds 2.3, melting of the raw glass becomes difficult. The TiO 2 component is indispensable as a nucleating agent, but if the amount is less than 4%, desired crystals cannot be formed, and if it exceeds 15%, devitrification resistance deteriorates. It is preferably in the range of 8% to 12%.

【0009】ZrO2成分は核形成剤として有効である
が、その量が5%を超えると所望の結晶が粗大化して緻
密性が低下すると同時に原ガラスの溶融が困難となる。
好ましくは3%以下にするのがよい。ZnO成分はガラ
スの溶融性を向上させる重要な成分であるが、その量が
0.5%未満では原ガラスの溶融が困難になると同時
に、所望の結晶を得ることが困難となる。また7.5%
を超えると耐失透性が悪化すると同時に、やはり所望の
結晶を得ることが困難となる。好ましくは1%〜4%の
範囲にするのがよい。
The ZrO 2 component is effective as a nucleating agent, but if the amount exceeds 5%, the desired crystal becomes coarse and the denseness decreases, and at the same time it becomes difficult to melt the raw glass.
It is preferably 3% or less. The ZnO component is an important component that improves the meltability of the glass, but if its amount is less than 0.5%, it becomes difficult to melt the raw glass and it becomes difficult to obtain a desired crystal. Also 7.5%
If it exceeds, the devitrification resistance deteriorates, and at the same time, it becomes difficult to obtain a desired crystal. It is preferably in the range of 1% to 4%.

【0010】CaO、BaO、SrOおよびB23の各
成分は、ガラスの溶融性の改善、ガラス成形時の部分的
乳白色化の防止および析出結晶の粗大化を抑制するため
の有効な成分である。しかし、CaO、BaO、SrO
およびB23成分の1種または2種以上の合計量が0.
5%未満ではそれらの効果は十分ではない。また、Ca
O、BaO、SrOおよびB23は5%をそれぞれ超え
ると、所望の結晶析出が困難になるとともに、結晶が粗
大化して緻密性が低下する。好ましくは3%以下にする
のがよい。As23および/またはSb23成分はガラ
ス溶融の際の清澄剤として添加し得るが、これらの1種
または2種の合計量は2%以下で十分である。なお、上
記成分の他に上記本発明の結晶化ガラスの所望の特性を
損なわない範囲で、La23、Gd23、CeO2,Y2
3成分を1種または2種以上の合計で3%まで、Fe2
3、Cr23、MnO2、CuO等の着色成分の1種ま
たは2種以上を合計で3%までそれぞれ添加させること
ができる。
Each of the components CaO, BaO, SrO and B 2 O 3 is an effective component for improving the meltability of glass, preventing partial opalescence during glass molding and suppressing coarsening of precipitated crystals. is there. However, CaO, BaO, SrO
And the total amount of one or more of the B 2 O 3 components is 0.
If it is less than 5%, these effects are not sufficient. Also, Ca
If O, BaO, SrO and B 2 O 3 exceed 5%, respectively, it becomes difficult to deposit desired crystals, and the crystals are coarsened to deteriorate the denseness. It is preferably 3% or less. The As 2 O 3 and / or Sb 2 O 3 component may be added as a fining agent during glass melting, but the total amount of one or two of these is preferably 2% or less. Incidentally, within a range not to impair the desired properties of the crystallized glass of the present invention in addition to the above components, La 2 O 3, Gd 2 O 3, CeO 2, Y 2
Fe 2 O 3 up to 3% in total of 1 or 2 or more
One or more coloring components such as O 3 , Cr 2 O 3 , MnO 2 and CuO can be added up to 3% in total.

【0011】つぎに本発明にかかるコージェライト系結
晶化ガラスの製造方法の特徴は、上記組成を有するガラ
スを1500℃以下の温度で溶融し、成形、冷却後、7
00℃〜800℃の範囲の温度で一次熱処理し、続い
て、900℃〜1000℃の範囲の温度で二次熱処理を
行なうことにある。さらに熱処理結晶化したガラスを通
常一般に広く知られている方法でラッピングし、ポリッ
シングしたガラスの表面粗度が50Å以下であることに
ある。
Next, a characteristic of the method for producing a cordierite-based crystallized glass according to the present invention is that the glass having the above composition is melted at a temperature of 1500 ° C. or lower, and after molding and cooling, 7
A primary heat treatment is performed at a temperature in the range of 00 ° C to 800 ° C, and a secondary heat treatment is subsequently performed at a temperature in the range of 900 ° C to 1000 ° C. Further, the glass which has been heat-treated and crystallized is usually lapped by a widely known method, and the surface roughness of the polished glass is 50 Å or less.

【0012】[0012]

【実施例】つぎに本発明のコージェライト系結晶化ガラ
スにかかる実施例について、比較例とともに説明する。
表1は、本発明のコージェライト系結晶化ガラスの実施
組成例(No.1〜No.10)と前記従来のコージェ
ライト系結晶化ガラスの比較組成例(No.1〜No.
3)について、原ガラスの溶融温度、溶融、冷却後のガ
ラスを再加熱するときの一次熱処理温度とその時間およ
び二次熱処理温度とその時間、また、その結晶相および
結晶粒径、研磨後の表面粗度(Ra)の測定結果をそれ
ぞれ示したものである。
EXAMPLES Next, examples of the cordierite-based crystallized glass of the present invention will be described together with comparative examples.
Table 1 shows an example composition of the cordierite-based crystallized glass of the present invention (No. 1 to No. 10) and a comparative composition example of the conventional cordierite-based crystallized glass (No. 1 to No. 10).
Regarding 3), the melting temperature of the original glass, the primary heat treatment temperature and its time for reheating the glass after melting and cooling, the secondary heat treatment temperature and its time, the crystal phase and crystal grain size, and the The measurement results of the surface roughness (Ra) are shown respectively.

【0013】[0013]

【表1】 [Table 1]

【表1】 [Table 1]

【表1】 [Table 1]

【表1】 [Table 1]

【0014】ここで、溶融条件の測定は、2500gの
ガラスが得られるように酸化物、炭酸塩、硝酸塩等の原
料を調合、混合し、組成の相違による溶融の難易度に応
じて、あらかじめ温度設定した炉中の白金製坩堝に投入
した後、一定の攪拌を行なって溶解し、ほぼ脱泡状態に
あることを肉眼観察する方法によった。得られたガラス
は二段階熱処理することによって結晶化ガラスとした。
そして、これらの結晶化ガラスは、X線回析の結果いず
れも主結晶としてコージェライトを有しており、また二
次結晶としてβ−石英固溶体およびコーネルパイン(M
gO、Al23、SiO2)を有していた。なお、表面
粗度(Ra)測定試料製作にあたっては、上記結晶化ガ
ラスを平均粒径9〜12μmの砥粒にて約10分〜20
分間ラッピングし、その後平均粒径1μm〜2μmの酸
化セリウムにて約30分〜40分間ポリッシングして仕
上げた。
Here, the melting conditions are measured by mixing and mixing raw materials such as oxides, carbonates and nitrates so that 2500 g of glass can be obtained, and the temperature is preliminarily determined according to the difficulty of melting due to the difference in composition. After being placed in a platinum crucible in a set furnace, it was dissolved by stirring a certain amount, and it was visually observed that it was in a substantially defoamed state. The obtained glass was heat-treated in two steps to obtain crystallized glass.
As a result of X-ray diffraction, each of these crystallized glasses has cordierite as a main crystal, and β-quartz solid solution and Cornelpine (M) as secondary crystals.
gO, Al 2 O 3 , SiO 2 ). In preparing the surface roughness (Ra) measurement sample, the crystallized glass was polished with abrasive grains having an average particle size of 9 to 12 μm for about 10 minutes to 20 minutes.
Lapping was performed for a minute, and then polishing was performed with cerium oxide having an average particle diameter of 1 μm to 2 μm for about 30 minutes to 40 minutes to finish.

【0015】表1にみられるとおり、実施例の場合の原
ガラスの溶融条件は1450℃以下であって、B23
の揮発成分の逸散も少なく、比較例の原ガラスの条件1
500℃〜1650℃に比べ有利であり、得られた結晶
化ガラスの均質度は一段と優れている。また熱処理での
一次熱処理温度および二次熱処理温度は、比較例の場
合、前者が900℃〜950℃、後者が1100℃〜1
300℃と高温域での熱処理を必要としているのに対
し、実施例の場合は前者が700℃〜800℃、後者が
900℃〜1000℃と低温域での熱処理を可能とし、
工業的な安定量産性に優れている。結晶粒径も比較例の
場合は11.0μm以上で粗大であるのに対し、実施例
の場合はいずれも10μm以下にあって、微細で、か
つ、緻密性に優れている。またその表面粗度(Ra)も
比較例の場合60Å以上であるのに対し、実施例の場合
にはいずれも50Å以下にあって表面特性に優れてお
り、精密加工、精密研磨を可能としている。
As can be seen from Table 1, the melting conditions of the raw glass in the examples are 1450 ° C. or lower, the volatile components such as B 2 O 3 are less diffused, and the raw glass conditions of the comparative example 1
It is more advantageous than 500 ° C. to 1650 ° C., and the homogeneity of the obtained crystallized glass is further excellent. In the comparative example, the first heat treatment temperature and the second heat treatment temperature in the heat treatment are 900 ° C. to 950 ° C. for the former and 1100 ° C. to 1 for the latter.
Whereas heat treatment in a high temperature range of 300 ° C. is required, in the case of the embodiment, the former enables heat treatment in a low temperature range of 700 ° C. to 800 ° C. and the latter in a low temperature range of 900 ° C. to 1000 ° C.
Excellent industrial stability and mass productivity. The crystal grain size is 11.0 μm or more in the comparative example, which is coarse, whereas the crystal grain size is 10 μm or less in each of the examples, which are fine and excellent in denseness. In addition, the surface roughness (Ra) of the comparative example is 60 Å or more, while in the case of each of the examples, it is 50 Å or less, which is excellent in surface characteristics, and enables precision processing and precision polishing. .

【0016】[0016]

【発明の効果】以上述べたとおり、本発明のコージェラ
イト系結晶化ガラスは、TiO2成分を核形成剤とした
SiO2−Al23−MgO系組成に所定の(Al23
/MgO)重量比を与え、かつ、特定範囲のZnO成分
を必須成分とし、BaO、CaO、SrO、B23成分
等を導入し、共存させた原ガラスを熱処理して得られる
ものであるから、溶融性に優れ、均質性がよく、低温域
での結晶化が可能となり、またその結晶粒径も微細で緻
密性に優れており、その上、表面特性に一層優れている
ため、微細加工、精密加工を必要とする各種材料には特
に有用である。
As described above, the cordierite-based crystallized glass of the present invention has a predetermined composition (Al 2 O 3) with a SiO 2 -Al 2 O 3 -MgO composition using a TiO 2 component as a nucleating agent.
/ MgO) weight ratio, and using a ZnO component in a specific range as an essential component, introducing BaO, CaO, SrO, B 2 O 3 components, etc., and heat-treating the coexisting raw glass. Therefore, it has excellent meltability, good homogeneity, can be crystallized in a low temperature range, and has a fine crystal grain size and excellent denseness. It is particularly useful for various materials that require processing and precision processing.

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 重量百分率で、SiO2 38%〜50
%、Al23 18%〜30%、MgO 10%〜20
%、ただし、重量比で、Al23/MgO=1.2〜
2.3、B23 0%〜5%、CaO 0%〜5%、B
aO 0%〜5%、SrO 0%〜5%、ZnO 0.
5%〜7.5%、TiO2 4%〜15%、ZrO2
%〜5%、As23および/またはSb23 0%〜2
%、の組成から成る原ガラスを溶融し、成形した後、熱
処理することにより得られ、主結晶として、コージェラ
イト系結晶を含有することを特徴とするコージェライト
系結晶化ガラス。
1. SiO 2 38% to 50% by weight.
%, Al 2 O 3 18% to 30%, MgO 10% to 20%
%, But by weight ratio, Al 2 O 3 /MgO=1.2 to
2.3, B 2 O 3 0% to 5%, CaO 0% to 5%, B
aO 0% to 5%, SrO 0% to 5%, ZnO 0.
5% to 7.5%, TiO 2 4% to 15%, ZrO 2 0
% -5%, As 2 O 3 and / or Sb 2 O 3 0% -2
%, A cordierite-based crystallized glass obtained by melting, shaping, and then heat-treating a raw glass, and containing a cordierite-based crystal as a main crystal.
【請求項2】 重量百分率で、SiO2 42%〜47
%、Al23 22%〜27%、MgO 13%〜18
%、ただし、重量比で、Al23/MgO=1.2〜
2.3、B23 0%〜3%、CaO 0%〜3%、B
aO 0%〜3%、SrO 0%〜3%、ZnO 1%
〜4%、TiO2 8%〜12%、ZrO2 0%〜3
%、As23および/またはSb23 0%〜2%、の
組成から成ることを特徴とする請求項1に記載のコージ
ェライト系結晶化ガラス。
2. SiO 2 42% to 47% by weight.
%, Al 2 O 3 22% to 27%, MgO 13% to 18%
%, But by weight ratio, Al 2 O 3 /MgO=1.2 to
2.3, B 2 O 3 0% to 3%, CaO 0% to 3%, B
aO 0% to 3%, SrO 0% to 3%, ZnO 1%
~4%, TiO 2 8% ~12 %, ZrO 2 0% ~3
%, As 2 O 3 and / or Sb 2 O 3 0% to 2%, and the cordierite-based crystallized glass according to claim 1.
【請求項3】 結晶粒径が10μm以下であり、研磨し
て成る表面粗度(Ra)が50Å以下であることを特徴
とする請求項1または2に記載のコージェライト系結晶
化ガラス。
3. The cordierite-based crystallized glass according to claim 1, wherein the crystal grain size is 10 μm or less and the surface roughness (Ra) obtained by polishing is 50 Å or less.
【請求項4】 請求項1、または2に記載の原ガラス
を、1500℃以下の温度で溶融し、成形した後冷却
し、700℃〜800℃の温度範囲で一次熱処理し、続
いて900℃〜1000℃の温度範囲で二次熱処理を行
なうことを特徴とするコージェライト系結晶化ガラスの
製造方法。
4. The raw glass according to claim 1 or 2 is melted at a temperature of 1500 ° C. or lower, molded, cooled, and then primary heat-treated in a temperature range of 700 ° C. to 800 ° C., and then 900 ° C. A method for producing a cordierite-based crystallized glass, which comprises performing a secondary heat treatment in a temperature range of to 1000 ° C.
JP6309713A 1994-02-22 1994-11-18 Cordierite-based crystallized glass and method for producing the same Expired - Fee Related JP2759763B2 (en)

Priority Applications (2)

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JP6309713A JP2759763B2 (en) 1994-02-22 1994-11-18 Cordierite-based crystallized glass and method for producing the same
US08/409,320 US5532194A (en) 1994-11-18 1995-03-23 Cordierite glass-ceramic and method for manufacturing the same

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Application Number Priority Date Filing Date Title
JP4787294 1994-02-22
JP6-47872 1994-02-22
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