JPH07288070A - Vacuum valve - Google Patents

Abstract

PURPOSE:To accurately mount end plates in place in an insulated container and provide a reliable vacuum valve by using a wire rod or a linear plate, which is formed into a ring shape with both ends brazed or welded each other, as a sealing material. CONSTITUTION:As a sealing material for a seal portion 2 to seal end plates 4, 5 to an insulated container 1, a wire rod formed of alloy with the thermal expansion coefficient approximating to that of alumina ceramic is used. In this way, a joint between the container 1 and the seal portion 2 formed of alumina ceramic is prevented from breakage due to thermal stress during assembly. For the sealing material, a preset size of cover wire rod, e.g. is cut at a preset length and formed into a ring shape, both cut ends being welded or brazed each other for joint. To air-tightly joint the container 1 to the metal seal portion 2 with brazing, a metallized layer 2a is formed on the end of the container 1. The end plates 4, 5 have steps formed in areas where the seal portion 2 is welded or brazed to easily position the seal portion 2.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the structure of a vacuum valve having a contact point that can be contacted and separated.

[0002]

2. Description of the Related Art FIG.
FIG. 6 is a cross-sectional view showing a conventional vacuum valve disclosed in Japanese Patent Publication No. In FIG. 10, the insulating container 21 is made of a cylindrical ceramic or the like, and end plates 24 and 25 are attached to both ends of the insulating container 21 via sealing portions 22 and 23, respectively. Inside the insulating container 21, a fixed electrode 26 connected to a fixed electrode rod 28 and a movable electrode 27 connected to a movable electrode rod 29 are arranged so as to face each other. The fixed electrode rod 28 is fixed to one end plate 24, and the other end plate 25 holds a movable electrode rod 29 slidably. A bellows 30 is provided between the end plate 25 and the movable electrode rod 29, and the movable electrode rod 29 is configured to be able to move in and out while maintaining the airtightness inside the vacuum valve. In addition, the shields 31 and 32 are provided inside the vacuum valve.
Is provided to prevent the inner wall surface of the insulating container 21 and the bellows 30 from being contaminated with the steam generated by the arc.

FIG. 11 is a sectional view showing the vicinity of the sealing portion 22 in the conventional vacuum valve shown in FIG. A metallized layer 21 a of Mo—Mn having a thickness of about 20 μm is formed on an end portion of the insulating container 21.
The sealing portion 22 is configured to be airtightly joined by a silver brazing material. Further, the sealing portion 22 and the end plate 24 are joined and sealed by brazing or welding. on the other hand,
The sealing portion 23 near the movable electrode rod 29 is also the sealing portion 22.
Similarly, the airtightly joined to the insulating container 21 and the end plate 25.

Generally, in a vacuum valve, the larger the short-circuit current, the greater the electromagnetic force generated at that time. Further, the higher the voltage is, the higher the opening / closing speed needs to be made, and the end plates and the sealing parts are required to have high strength. For the material of the sealing part,
The use of low-cost copper has the drawback that the strength changes due to heat change due to heat during brazing. For this reason, in the conventional vacuum valve, as the material of the end plate, Fe-Ni-Co alloy, Fe-Ni alloy, Cu-N are used.
High-strength and high-priced materials such as i alloy were used.

In the conventional vacuum valve, some kind of positioning means was required to accurately attach the cylindrical insulating container 21 and the disk-shaped end plates 24, 25 concentrically and accurately. For this reason, conventional vacuum valves
In some cases, a special positioning means such as a separate jig was provided outside the insulating container 21 during assembly, or a special positioning means was provided as a component of the vacuum valve.

[0006]

The conventional vacuum valve is constructed as described above, and the sealing material of the sealing portion is manufactured by cutting the plate material into a desired shape and pressing it. In spite of the high-priced material, the unused part occurred, and the material was wasted. Therefore, there is a problem that the conventional vacuum valve becomes expensive.

Further, since the metallized layer is formed at the end of the insulating container, the electric field is concentrated in the vicinity of both ends of the metallized layer, which causes a problem that the withstand voltage performance is deteriorated.

Further, when the end plate or the like is sealed to the insulating container by using the positioning means on the outside of the insulating container, a special device for assembling is required and the assembly becomes complicated. there were. Furthermore, when the end plate and the insulating container are brazed, due to the difference in thermal expansion coefficient between them, when exposed to high temperature during brazing, the end plate and the insulating container are displaced in the diametrical direction, resulting in insulation between the end plate and the insulating container. The container could not be placed accurately. On the other hand, when the end plate is provided with the positioning means from the inside by the components of the vacuum valve, there is a problem that the insulating container is broken during brazing due to the difference in thermal expansion coefficient between the end plate and the insulating container. For example, when the end plate is made of stainless steel, the coefficient of thermal expansion is about 20 × 10 ⁻⁶ / ° C., and when the insulating container is ceramic, the coefficient of thermal expansion is about 8 × 10 ^{−. 6} / ° C
Is. Therefore, in the high temperature (800 ° C.) brazing process, the inner diameter side of the insulating container is pressed between the end plate made of high-strength stainless steel and the ceramic insulating container due to the difference in thermal expansion coefficient between them. Therefore, there is a problem that the ceramic insulating container is destroyed.

The present invention has been made to solve the above-mentioned problems, and can reduce the amount of the sealing material used in the expensive sealing portion to keep the manufacturing cost low. The object is to obtain a reliable vacuum valve having high mechanical strength.

Further, according to the present invention, the concentration of the electric field is relaxed in the vicinity of the metallized layer formed at the end of the insulating container,
The purpose is to obtain a vacuum valve with high withstand voltage performance.

Further, according to the present invention, the end plate can be accurately attached to a predetermined position of the insulating container, and the insulating container is not damaged even when exposed to high temperature during brazing. The purpose is to obtain a high vacuum valve.

[0012]

A vacuum valve according to the present invention includes a pair of electrodes that can be contacted and separated, a substantially cylindrical insulating container that houses the electrodes, and both ends of the insulating container. And an end plate disposed on the end plate, and a sealing portion having a sealing material that seals the end plate and the insulating container and has a wire or strip plate material formed in an annular shape.

A vacuum valve according to the present invention comprises a pair of electrodes that can be contacted and separated, a substantially cylindrical insulating container that houses the electrodes, a metallization layer formed on both end edges of the insulating container, The end plate is provided so as to close both ends of the insulating container, and has an end plate having an annular groove formed at a portion facing the metallized layer, and a sealing material having an annular wire or strip plate member. And a sealing portion at least a part of which is disposed inside the groove formed in the end plate when the insulating container is sealed.

A vacuum valve according to the present invention comprises a pair of electrodes that can be contacted and separated from each other, a substantially cylindrical insulating container that houses the electrodes, and a metallization layer formed on both end edges of the insulating container. Arranged to close both ends of the insulating container,
Forming an annular groove in a portion facing the metallized layer,
An end plate for arranging the metallized layer formed at the edge of the insulating container inside the groove when sealed to the insulating container, and the end plate and the insulating container are sealed, and a wire or strip plate is formed into an annular shape. And a sealing portion having the sealing material formed on.

The vacuum valve according to the present invention is provided with a pair of electrodes that can be contacted and separated, a substantially cylindrical insulating container that houses the electrodes, and both ends of the insulating container that are closed.
An end plate having bendable protrusions at positions contacting the inner wall surfaces of both ends of the insulating container, and a sealing material that seals the end plate and the insulating container and forms a wire or strip plate in an annular shape. And a sealing portion.

The vacuum valve according to the present invention is provided with a pair of electrodes which can be contacted and separated, a substantially cylindrical insulating container for accommodating the electrodes, and both ends of the insulating container. An end plate having at least three bendable projecting portions at positions on the same circumference that are in contact with the inner wall surfaces of both ends of the insulating container, and the end plate and the insulating container are sealed to form a wire or strip plate in a ring shape. And a sealing part having the formed sealing material.

The vacuum valve according to the present invention also has a sealing portion in which the wire or strip material of the sealing material has a circular, elliptical or rectangular cross-sectional shape.

The vacuum valve according to the present invention further has a sealing portion in which the material of the sealing material is Fe-Ni-Co alloy, Fe-Ni alloy or Cu-Ni alloy.

[0019]

In the vacuum valve according to the present invention, the sealing material of the sealing portion is formed by forming a wire or strip plate into an annular shape and brazing or welding both ends thereof, and the sealing material is substantially It is arranged between the end portion and the end plate of the cylindrical insulating container and fixed to each other by brazing to seal the inside of the insulating container.

Further, in the vacuum valve according to the present invention, at least a part of the sealing portion is disposed inside the annular groove formed in the end plate, and the metallized layer formed at the end portion of the insulating container. An end plate having the same potential is arranged in the vicinity, and electric field concentration near the metallized layer is relaxed.

Further, in the vacuum valve according to the present invention, the edge portion of the insulating container is arranged inside the annular groove formed in the end plate, and the metallized layer formed on the edge portion of the insulating container is surrounded by the end plate. The electric field concentration near the metallized layer is alleviated.

Further, in the vacuum valve according to the present invention, the thin projection for positioning contacts the inner wall of the edge of the insulating container inside the groove of the end plate formed so as to cover the edge of the insulating container. When the end plate is fixed to a predetermined position of the insulating container, the protruding portion is brought into contact with the edge portion of the insulating container to braze the sealing portion.

Further, in the vacuum valve according to the present invention, at least three deformable positioning protrusions of the insulating container are provided inside the groove of the end plate formed so as to cover the edge of the insulating container. It is formed at a position in contact with the edge inner wall, and when the end plate is fixed to a predetermined position of the insulating container, the protrusion is brought into contact with the edge inner wall of the insulating container to braze the sealing portion.

Further, in the vacuum valve according to the present invention, a wire or strip plate material having a circular, elliptical or rectangular cross section is formed into an annular shape, and both end edges thereof are fixed.
The insulating container and the end plate are sealed.

Further, in the vacuum valve according to the present invention, the material of the sealing material is Fe-Ni-Co alloy, Fe-Ni.
The insulating container made of ceramic and the end plate made of metal are sealed with an alloy or a Cu-Ni alloy.

[0026]

【Example】

Example 1 Hereinafter, Example 1 of the vacuum valve of the present invention will be described with reference to the drawings. FIG. 1 is a sectional view showing a vacuum valve of the first embodiment. In FIG. 1, the insulating container 1 is made of, for example, a ceramic such as a cylindrical alumina ceramic,
End plates 4 and 5 made of metal such as stainless steel are attached to both ends of the cylindrical insulating container 1 via sealing parts 2 and 3, respectively. For this purpose, the insulating container 1
The internal space is sealed. In the insulating container 1, a fixed electrode 6 connected to a metal fixed electrode rod 8 and a movable electrode 7 connected to a metal movable electrode rod 9 are arranged so as to face each other. The fixed electrode rod 8 is fixed to one end plate 4, and the other end plate 5 slidably holds the movable electrode rod 9. A bellows 10 is disposed between the end plate 5 and the movable electrode rod 9, and the movable electrode rod 9 is configured to be able to move in and out while maintaining the airtightness inside the vacuum valve.
Also, inside the vacuum valve, the shields 11 and 1 are provided.
2 is provided to prevent the inner wall surface of the insulating container 1 and the bellows 10 from being contaminated with the steam generated by the arc.

The sealing material of the sealing portion 2 for sealing the end plates 4 and 5 and the insulating container 1 is made of Fe-Ni-Co alloy, Fe-Ni alloy or C, which has a thermal expansion coefficient close to that of alumina ceramic.
A u-Ni alloy wire rod is used. By using such an alloy as a sealing material, the joint portion between the insulating container 1 and the sealing portion 2 made of alumina ceramic is prevented from being broken by thermal stress during brazing and assembling. As the sealing material of Example 1, for example, a Kovar (Fe: 53%, Ni: 29%, Co: 18% alloy) wire having a diameter of 2 mm is cut into a predetermined length to form a ring, The cut ends are joined by welding or brazing with silver brazing or the like by an automatic welding machine or the like. Figure 2
FIG. 2 is a cross-sectional view showing the vicinity of a sealing portion 2 in the vacuum valve shown in FIG. 1. As shown in FIG. 2, in order to hermetically join the insulating container 1 of alumina ceramic and the sealing portion 2 of metal such as stainless steel by brazing with silver brazing or the like, a metallized layer is provided at the end of the insulating container 1. The metallized layer 2a made of Mo-Mn or the like having a thickness of about 20 μm is formed. Further, the end plates 4 and 5 have stepped portions formed at positions where the sealing portion 2 is welded or brazed, which facilitates positioning of the sealing portion 2.

As described above, the sealing material of the sealing portion 2 is formed by forming a linear wire into an annular shape and welding or brazing both ends of the linear wire to join them. The ring-shaped wire processed in this manner is disposed between the metallized layers 2a formed at both end edges of the insulating container 1 and the end plates 4 and 5, and fixed by a silver brazing material to form the insulating container 1. The end plates 4 and 5 are sealed. By brazing with this silver wax,
Since the joint part of the annular wire is covered with silver brazing material,
The airtightness of this joint is sufficiently ensured. Thus, since the thin wire is used as the sealing material of the sealing portion 2, the dimension of the vacuum valve in the axial direction (vertical direction in FIG. 1) can be reduced. Since the end plates 4 and 5 are manufactured by using a thick plate material (for example, a plate material having a thickness of 5 mm) made of a metal material such as stainless steel, the vacuum valve of the present embodiment has an impact force at the time of mechanical opening and closing and a short circuit interruption. It can be configured to have sufficient strength against electromagnetic force at the time.

In Example 1, the wire was used as the material of the sealing portion 2. However, as shown in FIG. 3, the same material as the sealing material in Example 1, Fe-Ni-Co alloy, Fe was used.
Even if the sealing portion 32 is formed by forming a band plate material of —Ni alloy or Cu—Ni alloy in an annular shape, the same effect as that of the first embodiment is obtained. FIG. 3A is a perspective view showing the strip plate member formed in an annular shape, and FIG. 3B is a sectional view showing the vicinity of the sealing portion 32. As shown in (a) of FIG. 3, the sealing material 320 is formed by cutting a linear strip material into a predetermined length into an annular shape, and the cut end portion 320a is welded or silvered by an automatic welding machine or the like. It is formed by joining by brazing such as brazing. As shown in FIG. 3 (b), the sealing portion 32 using the sealing material 320 is disposed between the end plate 4 and the metallized layer 2a formed on the edge of the insulating container 1. It is brazed with silver brazing.

FIGS. 4 and 5 show another embodiment in which, as the sealing material for the sealing portions 42 and 52, a wire or strip plate having an elliptical or square cross section is used. It is sectional drawing which shows each sealing part 42 and 52 vicinity. Also in the case of these embodiments, the same effects as those of the above-mentioned first embodiment are obtained, and there is no waste of material in processing the sealing portions 42 and 52, and the sealing portions 42 and 52 are easily formed. It

Second Embodiment FIG. 6 is a sectional view showing a second embodiment of the vacuum valve of the present invention. 6, the portion of the structure corresponding to the above-described first embodiment is made of the same material as the vacuum valve of FIG.
Since they have the same functions and effects, the same reference numerals are given, the description thereof is omitted, and the description in Embodiment 1 is applied correspondingly. In FIG. 6, annular grooves 34a and 35a are formed in the end plates 34 and 35 made of metal such as stainless steel, so that part of the sealing portion 2 is housed. . By configuring the end plates 34 and 35 in this manner, the inner side surfaces of the end plates 34 and 35 having the same potential are disposed close to the metallized layer 2a formed at the end of the insulating container 1, The electric field in the vicinity of the metallized layer 2a is further relaxed as compared with the vacuum valve of Example 1 described above. Therefore, the withstand voltage performance between the end plates inside and outside the insulating container 1 is improved, and the vacuum valve has a high withstand voltage structure.

In the second embodiment, as the sealing portion 2, the wire or the like shown in the first embodiment is used, and the height of the sealing portion 2 in the axial direction (vertical direction in FIG. 6) is made low. Therefore, in order to store the sealing portion 2, the end plates 34, 35
It is not necessary to particularly increase the thickness of the vacuum valve, and the axial dimension of the vacuum valve can be made smaller than that of the first embodiment. In the vacuum valve of Example 2, as described in Example 1 above, the wire material or strip plate material of the sealing material is Fe-Ni-Co alloy, Fe-Ni alloy or Cu-Ni alloy. As shown in FIGS. 2, 3, 4 and 5, a circular, rectangular, elliptical or square sealing material is used as the cross-sectional shape thereof. As described above, according to the second embodiment, the grooves 34a and 35a are processed only in the end plates 34 and 35 without using a special component, so that the electric field gradient near the metallized layer 2a can be relaxed. As a result, a vacuum valve that is easy to assemble and highly reliable can be obtained.

Third Embodiment FIG. 7 is a sectional view showing a third embodiment of the vacuum valve of the present invention. In FIG. 7, the portion of the structure corresponding to the above-described first embodiment is made of the same material as the vacuum valve of FIG.
Since they have the same functions and effects, the same reference numerals are given, the description thereof is omitted, and the description in Embodiment 1 is applied correspondingly. As shown in FIG. 7, the end plate 44 made of metal such as stainless steel has two grooves 44a and 44b. The first groove 44a is formed so as to accommodate a part of the sealing portion 2, and the second groove 44b is formed so that the edge portion of the insulating container 1 is accommodated therein. . Therefore, the first groove 44a and the second groove 44b are formed in concentric annular shapes. Thus, the first groove 44
Since the a and the second groove 44b are configured, the metallized layer 2a formed on the edge portion of the insulating container 1 is disposed inside the second groove 44b and is surrounded by the end plate 44. . Thus, since the inside and the outside of the metallized layer 2a are covered with the end plates having the same potential, the electric field near the inside and the outside of the metalized layer 2a is relaxed. Further, in the vacuum valve of the third embodiment, it is possible to arrange the end plates 44, 44 on both sides close to each other while ensuring the axial length of the insulating container 1 necessary for withstanding voltage. Therefore, miniaturization of the vacuum valve can be achieved. In the vacuum valve of Example 3, as described in Example 1 above, the wire material or strip plate material of the sealing material was Fe-Ni-Co alloy, Fe-Ni alloy or Cu-.
A Ni alloy is used, and the cross-sectional shape thereof is a circular, rectangular, elliptical, or square sealing material as shown in FIGS. 2, 3, 4, and 5.

Embodiment 4 FIG. 8 is a sectional view showing Embodiment 4 of the vacuum valve of the present invention. In FIG. 8, the portion of the structure corresponding to the above-described first embodiment is made of the same material as the vacuum valve of FIG.
Since they have the same functions and effects, the same reference numerals are given, the description thereof is omitted, and the description in Embodiment 1 is applied correspondingly. In FIG. 8, the end plate 54 made of metal such as stainless steel is provided with annular two-stage grooves 54a and 54b. The first groove 54a is formed so as to accommodate a part of the sealing portion 2, and the second groove 54b is formed so that the edge portion of the insulating container 1 is accommodated therein. . Therefore, the first groove 54a and the second groove 54b are formed in a concentric annular shape. Thus, the first groove 54
Since the a and the second groove 54b are formed, the metallized layer 2a formed on the edge portion of the insulating container 1 is arranged inside the second groove 54b and is surrounded by the end plate 54. . Thus, since the inner and outer sides of the metallized layer 2a are covered with the end plates 54, the electric field in the vicinity of the inner and outer sides of the metallized layer 2a is relaxed.

As shown in FIG. 8, a protrusion 54c is formed inside the second groove 54b at a position in contact with the inner wall surface of the edge portion of the insulating container 1. The protruding portion 54c has, for example, 0.
The first groove 54 is a thin annular protrusion of 5 mm or less.
a and the second groove 54b are formed concentrically. In order to assemble the insulating container and the end plate accurately and concentrically, some positioning means is required.In the conventional device, however, a separate positioning means is provided outside the insulating container, or the vacuum valve is configured. Special positioning means were provided as parts. The vacuum valve of the above-described fourth embodiment is formed by simply forming the protrusion 54c on the end plate 54 as a positioning means.

In the vacuum valve of the fourth embodiment, the end plate 54
At the time of assembly, the thin protrusion 54c is formed so as to be close to the inner wall surface of the insulating container 1 and brazed with silver brazing or the like. When the protrusion 54c of the end plate 54 presses the inner wall surface of the alumina ceramic insulating container 1 during the brazing process using silver brazing or the like, the protrusion 54c of the end plate 54 is formed to be very thin. In addition, the protrusion 54c is bent and deformed to prevent the insulating container 1 from cracking. For example,
When the end plate 54 is made of stainless steel, its thermal expansion coefficient is about 20 × 10 ⁻⁶ / ° C., and when the insulating container 1 is alumina ceramic, its thermal expansion coefficient is about 8 ×.
Since it is 10 ⁻⁶ / ° C., the protrusion 54 c of the end plate 54 made of stainless steel presses the inner wall surface of the insulating container 1 in the brazing process using high temperature (800 ° C.) silver brazing or the like.
Since 4c is a thin protrusion of 0.5 mm or less, the protruding portion 54c itself bends to prevent the insulating container 1 from being broken. For this reason, the vacuum valve of the fourth embodiment is a highly reliable device that is easy to assemble and does not cause defective products. In the vacuum valve of Example 4, as described in Example 1 above, the wire rod or strip plate material of the sealing material was Fe-Ni-Co alloy, Fe-Ni.
An alloy or a Cu-Ni alloy is used, and the cross-sectional shape thereof is a circular, rectangular, elliptical or square sealing material as shown in FIGS. 2, 3, 4 and 5.

Example 5 FIG. 9 is a view showing an end plate 64 made of metal such as stainless steel used in Example 5 of the vacuum valve of the present invention.
9A is a cross-sectional view of the end plate 64, and FIG.
FIG. 10 is a rear view of the end plate 64 shown in FIG. 9A viewed from below. The parts other than the end plate 64 of the vacuum valve of the fifth embodiment, which correspond to the structure of the first embodiment described above, are made of the same material as the vacuum valve of FIG. 1 and have the same functions and effects. Example 1 will be omitted.
The explanations in section 1) shall apply accordingly. Although the end plate 54 in the fourth embodiment has the protrusion 54c formed in an annular shape, as shown in FIG.
In the end plate 64 of the fifth embodiment shown in Fig. 4, four protrusions 64c, which are protrusions for positioning, are formed at positions diagonally in contact with the inner wall surface of the insulating container. Since these protrusions 64c are formed to be thin, for example, 0.5 mm or less, the mechanical strength of the protrusions 64c is weak, and the pressing force at the time of brazing the end plate 64 to the insulating container with silver solder or the like. Is absorbed by the bending deformation of the protrusion 64c, and the insulating container is prevented from being broken. For this reason, the vacuum valve of the fifth embodiment has high reliability and is a device that can be easily assembled.
In addition, in the vacuum valve of Example 5, in Example 1
As described above, the wire or strip material of the sealing material is F
e-Ni-Co alloy, Fe-Ni alloy or Cu-Ni
An alloy is used, and a sealing material having a circular shape, a rectangular shape, an elliptical shape, or a square shape is used as the cross-sectional shape thereof as shown in FIGS. 2, 3, 4, and 5.

[0038]

As described above, according to the present invention, the sealing material in the sealing portion is formed by forming a wire rod or a strip-shaped plate into an annular shape and processing it by welding or brazing with silver brazing or the like. Therefore, there is no waste of materials used, the manufacturing cost can be kept low, and a vacuum valve having high mechanical strength can be obtained.

Further, according to the present invention, since the end plate is arranged close to the metallized layer formed at the end of the insulating container, the concentration of the electric field in the vicinity of the metallized layer is alleviated, and the withstand voltage performance is improved. The effect is to obtain a high vacuum valve.

Further, according to the present invention, since the metallized layer formed at the end of the insulating container is housed inside the groove formed in the end plate, the concentration of the electric field in the vicinity of the metallized layer is alleviated. And, it is effective to obtain a small vacuum valve.

Further, according to the present invention, since the bendable protrusion is formed at a position close to the inner wall surface of the end portion of the insulating container of the end plate, the end plate is placed at a predetermined position of the insulating container. The effect of obtaining a highly reliable vacuum valve that can be installed accurately and that does not damage the insulating container due to the bending deformation of its protruding part even when exposed to high temperatures when brazing with silver solder etc. There is.

Furthermore, according to the present invention, since at least three bendable thin protrusions are formed at the positions where the end plates contact the inner wall surfaces of the ends of the insulating container, the end plates are fixed in the insulating container. It can be easily and accurately installed at the position of, and the insulation container will not be broken due to bending deformation of its protruding part when exposed to high temperature during brazing with silver brazing etc. It has the effect of obtaining a valve.

According to the present invention, the cross-sectional shape is circular,
Oval or rectangular wire or strip material is formed in an annular shape, both edges of which are fixed, and the insulating container and the end plate are sealed. The effect is to obtain an inexpensive vacuum valve that does not have

Further, according to the present invention, the material of the sealing material is a Fe-Ni-Co alloy having a thermal expansion coefficient close to that of ceramics,
The Fe-Ni alloy or Cu-Ni alloy is used to seal the ceramic insulating container and the metal end plate, so that the insulating container is not destroyed at the high temperature of the brazing process. The effect is to obtain a highly reliable vacuum valve.

[Brief description of drawings]

FIG. 1 is a sectional view showing a first embodiment of a vacuum valve of the present invention.

FIG. 2 is a cross-sectional view showing the vicinity of a sealing portion of the vacuum valve of FIG.

FIG. 3 is a perspective view and a cross-sectional view showing the vicinity of a sealing portion showing another embodiment of the sealing portion of the vacuum valve of the present invention.

FIG. 4 is a cross-sectional view showing the vicinity of a sealing portion showing another embodiment of the sealing portion of the vacuum valve of the present invention.

FIG. 5 is a cross-sectional view showing the vicinity of a sealing portion showing another embodiment of the sealing portion of the vacuum valve of the present invention.

FIG. 6 is a sectional view showing a second embodiment of the vacuum valve of the present invention.

FIG. 7 is a cross-sectional view showing a third embodiment of the vacuum valve of the present invention.

FIG. 8 is a cross-sectional view showing a fourth embodiment of the vacuum valve of the present invention.

9A and 9B are a sectional view and a rear view showing an end plate of a vacuum valve according to a fifth embodiment of the present invention.

FIG. 10 is a cross-sectional view showing a conventional vacuum valve.

FIG. 11 is a cross-sectional view showing the vicinity of a sealing portion of a conventional vacuum valve.

[Explanation of symbols]

1 insulating container, 2 sealing part, 3 sealing part, 4 end plate, 5
End plate, 6 fixed electrodes, 7 movable electrodes.

Claims (7)

[Claims] 1. A pair of separable electrodes, a substantially cylindrical insulating container that houses the electrodes, an end plate disposed so as to close both ends of the insulating container, the end plate and the insulation A vacuum valve, comprising: a sealing part that seals a container and has a sealing material formed by annularly forming a wire material or a strip plate material. 2. A pair of electrodes that can be contacted and separated, a substantially cylindrical insulating container that accommodates the electrodes, a metallization layer formed on both edge portions of the insulating container, and both ends of the insulating container are closed. And an end plate having an annular groove formed in a portion facing the metallized layer, and a sealing material having an annular wire or band plate material, and the end plate and the insulating container are sealed. A vacuum valve, wherein at least a part is disposed inside the groove formed in the end plate. 3. A pair of electrodes that can be contacted and separated, a substantially cylindrical insulating container that houses the electrodes, a metallized layer formed on both end edges of the insulating container, and both ends of the insulating container. An end plate having an annular groove formed in a portion facing the metallized layer and having the metallized layer formed at the edge of the insulating container inside the groove when sealed in the insulating container. A vacuum valve, comprising: a sealing portion that seals the end plate and the insulating container, and has a sealing material formed by annularly forming a wire rod or a strip plate. 4. A pair of electrodes that can be contacted and separated, a substantially cylindrical insulating container that accommodates the electrodes, and an inner wall surface at both ends of the insulating container that is disposed so as to close both ends of the insulating container. An end plate having a bendable projecting portion at a contacting position, a sealing part having a sealing material that seals the end plate and the insulating container, and has a wire or band plate material formed in an annular shape. And vacuum valve. 5. A pair of electrodes that can be brought into and out of contact with each other, a substantially cylindrical insulating container that accommodates the electrodes, and inner wall surfaces at both ends of the insulating container that are disposed so as to close both ends of the insulating container. An end plate having at least three projecting portions that can be bent at positions on the same circumference that are in contact with each other, a seal having a sealing material that seals the end plate and the insulating container, and forms a wire or strip plate in an annular shape. A vacuum valve, comprising: a fitting part. 6. The vacuum valve according to claim 1, further comprising a sealing portion in which the wire rod or the strip plate material of the sealing material has a circular, elliptical or rectangular cross-sectional shape. 7. The vacuum valve according to claim 1, wherein the sealing material has a sealing portion made of a Fe—Ni—Co alloy, a Fe—Ni alloy or a Cu—Ni alloy. .