JPH07286862A - Displacement detector - Google Patents

Displacement detector

Info

Publication number
JPH07286862A
JPH07286862A JP10489194A JP10489194A JPH07286862A JP H07286862 A JPH07286862 A JP H07286862A JP 10489194 A JP10489194 A JP 10489194A JP 10489194 A JP10489194 A JP 10489194A JP H07286862 A JPH07286862 A JP H07286862A
Authority
JP
Japan
Prior art keywords
signal
rectangular wave
sinusoidal
sinusoidal signal
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10489194A
Other languages
Japanese (ja)
Inventor
Tatsuhiko Matsuura
辰彦 松浦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Mitsutoyo Kiko Co Ltd
Original Assignee
Mitutoyo Corp
Mitsutoyo Kiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp, Mitsutoyo Kiko Co Ltd filed Critical Mitutoyo Corp
Priority to JP10489194A priority Critical patent/JPH07286862A/en
Publication of JPH07286862A publication Critical patent/JPH07286862A/en
Pending legal-status Critical Current

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  • Optical Transform (AREA)

Abstract

PURPOSE:To provide an excellent abnormality detecting function with a simple constitution by adding first and second sine wave signals to each other and generating third sine wave signals which are used as criteria for judgment of the levels of and phase relation between the first and second sine wave signals. CONSTITUTION:A signal conversion circuit 21 is constituted of comparators 211 and 212 which respectively convert first and second sine wave signals A and B into square waves at a prescribed comparing level. A signal adding circuit 22 is constituted of resistors R1 and R2 which synthesize the signals A and B and generate third sine wave signals. Another signal conversion circuit 23 is constituted of a reference voltage generating circuit composed of a serial circuit of resistors R3, R4, and R5, comparators 231 and 232, and an OR gate 233. The comparators 231 and 232 convert the parts above or below a prescribed threshold of the positive or negative half waves of the signals C into positive or negative square waves. When the OR of both outputs is found, therefore, third square wave signals CD which are converted into positive square waves can be obtained on both the positive and negative sides.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、90°位相がずれた出
力を出すエンコーダを用いて構成された、異常検出機能
を持つ変位検出装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a displacement detecting device having an abnormality detecting function, which is constructed by using an encoder which outputs 90 ° out of phase with each other.

【0002】[0002]

【従来の技術】相対移動するスケールとインデックスを
有し、その相対移動に応じて位相が互いに90°ずれた
二つの正弦波状信号を出力するエンコーダを用いて、こ
れらの正弦波状信号を処理して変位測定を行う変位検出
装置が知られている。この種の変位検出装置において、
出力値異常や位相差異常を検出して報知する異常検出機
能を備えたものが種々提案されている。
2. Description of the Related Art An encoder having a scale and an index that move relative to each other and outputting two sinusoidal signals whose phases are shifted from each other by 90 ° according to the relative movement is used to process these sinusoidal signals. A displacement detection device that performs displacement measurement is known. In this type of displacement detection device,
Various types have been proposed that have an abnormality detection function for detecting and notifying an output value abnormality or a phase difference abnormality.

【0003】異常検出の基本原理は、エンコーダからの
二つの正弦波状信号が90°位相がずれたものであるこ
とを利用して、ある基準レベル範囲を設定して、その範
囲内で二つの正弦波状信号レベルかどのような関係にあ
るかを検出する(例えば特公平3−26771号公報、
特開昭61−66113号公報等)。
The basic principle of abnormality detection is to set a certain reference level range by utilizing the fact that two sinusoidal signals from the encoder are 90 ° out of phase with each other. It is detected whether there is a relation such as a wavy signal level (for example, Japanese Patent Publication No. 3-26771).
JP-A-61-66113, etc.).

【0004】[0004]

【発明が解決しようとする課題】従来提案されている異
常検出法は、出力値異常や位相差異常が著しい場合でな
いと確実な異常検出ができず、また基準レベル範囲の設
定によっては測定精度にそれ程影響しない異常でも検出
してしまうといった問題があった。
The anomaly detection methods that have been proposed so far cannot reliably detect anomalies unless the output value anomaly or the phase difference anomaly is significant, and depending on the setting of the reference level range, the accuracy of measurement may be reduced. There was a problem that even abnormalities that did not affect that much would be detected.

【0005】本発明は、簡単な構成で優れた異常検出機
能を実現した変位検出装置を提供することを目的として
いる。
It is an object of the present invention to provide a displacement detecting device which realizes an excellent abnormality detecting function with a simple structure.

【0006】[0006]

【課題を解決するための手段】本発明は、相対移動する
スケールとインデックスを有し、その相対移動に応じて
位相が互いに90°ずれた第1の正弦波状信号と第2の
正弦波状信号を出力するエンコーダと、このエンコーダ
から得られる第1の正弦波状信号と第2の正弦波状信号
を処理して変位を求める信号処理手段と、前記エンコー
ダから得られる第1の正弦波状信号と第2の正弦波状信
号を用いて異常検出を行う異常検出手段とを有し、前記
異常検出手段は、前記第1の正弦波状信号と第2の正弦
波状信号をそれぞれ所定のコンパレートレベルで矩形波
に変換して第1の矩形波信号及び第2の矩形波信号を得
る第1の信号変換手段と、前記第1の正弦波状信号と第
2の正弦波状信号を加算して第3の正弦波状信号を得る
信号加算手段と、この信号加算手段から得られる第3の
正弦波状信号を正及び負の所定しきい値で判定してこれ
らのしきい値に挟まれた範囲から外れる部分を矩形波に
変換した第3の矩形波信号を得る第2の信号変換手段
と、前記第1の矩形波信号と第2の矩形波信号の排他的
論理和をとり、その出力と前記第3の矩形波信号の論理
和否定をとって異常検出信号を出力する論理回路手段と
を備えたことを特徴としている。
The present invention provides a first sinusoidal signal and a second sinusoidal signal which have a scale and an index that move relative to each other and whose phases are deviated from each other by 90 ° according to the relative movement. An encoder for outputting, a signal processing means for processing the first sinusoidal signal and the second sinusoidal signal obtained from this encoder to obtain a displacement, a first sinusoidal signal and a second sinusoidal signal obtained from the encoder. An abnormality detecting means for detecting an abnormality using a sinusoidal signal, wherein the abnormality detecting means converts the first sinusoidal signal and the second sinusoidal signal into rectangular waves at predetermined comparator levels. And a first signal conversion means for obtaining a first rectangular wave signal and a second rectangular wave signal, and the first sinusoidal signal and the second sinusoidal signal are added to obtain a third sinusoidal signal. Signal adding means for obtaining, The third rectangular wave obtained by judging the third sinusoidal signal obtained from the signal adding means of (1) with predetermined positive and negative threshold values and converting the portion outside the range sandwiched by these threshold values into a rectangular wave. A second signal converting means for obtaining a signal and an exclusive OR of the first rectangular wave signal and the second rectangular wave signal are obtained, and the output thereof and the logical NOT of the third rectangular wave signal are taken. And a logic circuit means for outputting an abnormality detection signal.

【0007】[0007]

【作用】本発明における異常検出手段では、第1の正弦
波状信号と第2の正弦波状信号を加算して、これら第1
の正弦波状信号と第2の正弦波状信号のレベル及び位相
関係を判定するための基準として用いられる第3の正弦
波状信号を生成している。更にこの第3の正弦波状信号
を正及び負の所定しきい値で判定してこれらのしきい値
に挟まれた範囲から外れる部分を矩形波に変換した第3
の矩形波信号を得ている。そして、第1,第2の正弦波
信号をそれぞれ矩形波に変換した第1,第2の矩形波信
号と第3の矩形波信号との論理により、異常検出出力を
出すようにして、優れた異常検出機能を実現することが
できる。
In the abnormality detecting means according to the present invention, the first sinusoidal signal and the second sinusoidal signal are added to obtain the first sinusoidal signal.
The third sinusoidal signal used as a reference for determining the level and phase relationship between the sinusoidal signal and the second sinusoidal signal is generated. Furthermore, the third sinusoidal signal is judged by the positive and negative predetermined threshold values, and the portion outside the range sandwiched by these threshold values is converted into a rectangular wave.
Is getting a square wave signal. Then, the abnormality detection output is output by the logic of the first and second rectangular wave signals and the third rectangular wave signal obtained by converting the first and second sine wave signals into rectangular waves, respectively, which is excellent. An abnormality detection function can be realized.

【0008】[0008]

【実施例】以下、図面を参照して、本発明の実施例を説
明する。図1は、本発明の一実施例にかかる光電式エン
コーダを用いた変位検出装置である。スケール11とイ
ンデックス12にはそれぞれ光学格子からなる目盛りが
形成されて、矢印で示すように相対移動可能に配置され
ている。光源13は例えば半導体レーザとその出力光を
コリメートする手段を有し、そのコリメート光がスケー
ル11に照射されるようになっている。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a displacement detecting device using a photoelectric encoder according to an embodiment of the present invention. The scale 11 and the index 12 are each provided with a graduation made of an optical grating and are arranged so as to be relatively movable as indicated by an arrow. The light source 13 has, for example, a semiconductor laser and means for collimating its output light, and the scale 11 is irradiated with the collimated light.

【0009】スケール11及びインデックス12を透過
した光は受光素子14及び15により検出される。二つ
の受光素子14,15からは互いに位相が90°ずれた
第1の正弦波状信号Aと第2の正弦波状信号Bが得られ
るようになっている。これはインデックス12の二つの
受光素子14,15が対向する部分に形成される光学格
子の位相を、スケール11との関係での90°ずらして
形成することにより実現される。
The light transmitted through the scale 11 and the index 12 is detected by the light receiving elements 14 and 15. A first sinusoidal signal A and a second sinusoidal signal B whose phases are deviated from each other by 90 ° are obtained from the two light receiving elements 14 and 15. This is realized by shifting the phase of the optical grating formed in the portion where the two light receiving elements 14 and 15 of the index 12 face each other by 90 ° in relation to the scale 11.

【0010】二つの受光素子14,15からの第1,第
2の正弦波状信号A,Bは信号処理回路16に送られ
て、所定の信号処理がなされ、変位が演算出力される。
信号処理回路16は通常、二つの正弦波状信号A,Bを
所定のコンパレートレベルで矩形波に変換する変換回
路、得られた二つの矩形波信号の関係から変位方向を弁
別する回路、また二つの矩形波信号の立上がりまたは立
下がりを検出してパルスを発生し、そのパルスを計数す
るカウンタ等により構成される。
The first and second sinusoidal signals A and B from the two light receiving elements 14 and 15 are sent to the signal processing circuit 16 where they are subjected to predetermined signal processing and the displacement is arithmetically output.
The signal processing circuit 16 is usually a conversion circuit that converts the two sinusoidal signals A and B into a rectangular wave at a predetermined comparison level, a circuit that discriminates the displacement direction from the relationship between the obtained two rectangular wave signals, and It is composed of a counter or the like that detects the rising or falling of one rectangular wave signal to generate a pulse and counts the pulse.

【0011】二つの受光素子14,15から得られる第
1,第2の正弦波状信号A,Bはまた、異常検出回路1
7に送られる。異常検出回路17では測定誤差につなが
る出力異常や位相差異常が検出されて、異常があった場
合にはアラーム出力が出される。
The first and second sinusoidal signals A and B obtained from the two light receiving elements 14 and 15 are also used in the abnormality detection circuit 1.
Sent to 7. The abnormality detection circuit 17 detects an output abnormality or a phase difference abnormality that leads to a measurement error, and outputs an alarm output when there is an abnormality.

【0012】図2は、異常検出回路17の具体回路構成
を示している。異常検出回路17は、第1,第2の正弦
波状信号A,Bをそれぞれ矩形波信号に変換する第1の
信号変換回路21、第1,第2の正弦波状信号A,Bを
加算する信号加算回路22、この信号加算回路22の出
力を所定の矩形波信号に変換する第2の信号変換回路2
3、及び第1の信号変換回路21の出力と第2の信号変
換回路23の出力について所定の論理をとってアラーム
信号を生成する論理回路24を有する。
FIG. 2 shows a specific circuit configuration of the abnormality detection circuit 17. The abnormality detection circuit 17 includes a first signal conversion circuit 21 that converts the first and second sinusoidal signals A and B into rectangular wave signals, and a signal that adds the first and second sinusoidal signals A and B. Adder circuit 22, second signal conversion circuit 2 for converting the output of the signal adder circuit 22 into a predetermined rectangular wave signal
3, and a logic circuit 24 for generating an alarm signal by taking a predetermined logic for the output of the first signal conversion circuit 21 and the output of the second signal conversion circuit 23.

【0013】第1の信号変換回路21は、第1,第2の
正弦波状信号A,Bを所定のコンパレートレベルで矩形
波に変換するコンパレータ211,212により構成さ
れている。この実施例の場合コンパレートレベルは振動
中心であり、図3に示すように、第1,第2の正弦波状
信号A,Bの正の半波をそれぞれ矩形波にした第1,第
2の矩形波信号AD,BDが得られる。
The first signal conversion circuit 21 is composed of comparators 211 and 212 which convert the first and second sinusoidal signals A and B into rectangular waves at a predetermined comparison level. In the case of this embodiment, the comparison level is the center of vibration, and as shown in FIG. 3, the positive half waves of the first and second sinusoidal signals A and B are made into rectangular waves, respectively. The rectangular wave signals AD and BD are obtained.

【0014】なお、この異常検出回路17における第1
の信号変換回路21は、同種の回路が信号処理回路16
にも用いられるので、信号処理回路16と共用とするこ
とができる。また、コンパレータ211,212のコン
パレートレベルは、それぞれの入力信号振幅等に応じて
異なる値に設定する事も可能である。
The first in the abnormality detection circuit 17
The signal conversion circuit 21 of FIG.
Since it is also used for, it can be shared with the signal processing circuit 16. Further, the comparator levels of the comparators 211 and 212 can be set to different values according to the respective input signal amplitudes and the like.

【0015】信号加算回路22は、第1,第2の正弦波
状信号A,Bを合成する抵抗R1,R2(R1=R2)
により構成され、これにより、図3に示すように、第3
の正弦波状信号Cが得られる。
The signal adder circuit 22 includes resistors R1 and R2 (R1 = R2) for synthesizing the first and second sinusoidal signals A and B.
And, as shown in FIG.
A sinusoidal signal C of is obtained.

【0016】第2の信号変換回路23は、抵抗R3,R
4,R5の直列回路からなる基準電圧発生回路と、コン
パレータ231,232及びオアゲート233により構
成されている。一方のコンパレータ231は反転入力端
子に所定の基準電圧が入力され、非反転入力端子に第3
の正弦波状信号Cが入力される。これにより、正弦波状
信号Cの正の半波の所定しきい値以上の部分が正の矩形
波に変換される。他方のコンパレータ232は、非反転
入力端子に所定の基準電圧が入力され、反転入力端子に
第3の正弦波状信号Cが入力される。これにより、正弦
波状信号Cの負の半波の所定しきい値以下の部分が正の
矩形波に変換される。
The second signal conversion circuit 23 includes resistors R3 and R3.
The reference voltage generating circuit is composed of a series circuit of R4 and R5, comparators 231, 232 and an OR gate 233. One of the comparators 231 receives an input of a predetermined reference voltage at its inverting input terminal and a third reference voltage at its non-inverting input terminal.
The sinusoidal signal C of is input. As a result, the portion of the positive half-wave of the sinusoidal signal C that is equal to or greater than the predetermined threshold is converted into a positive rectangular wave. The other comparator 232 has a non-inverting input terminal to which a predetermined reference voltage is input, and an inverting input terminal to which the third sinusoidal signal C is input. As a result, the portion of the negative half wave of the sine wave signal C that is equal to or smaller than the predetermined threshold value is converted into a positive rectangular wave.

【0017】従ってこれら二つのコンパレータ231,
232の出力のオアをとることにより、図3に示すよう
に、振動中心を挟んで設定された正側しきい値V1と負
側しきい値V2の間に挟まれた部分を除いて、正側,負
側共に正の矩形波に変換した第3の矩形波信号CDが得
られることになる。
Therefore, these two comparators 231,
By taking the OR of the output of 232, as shown in FIG. 3, except for the portion sandwiched between the positive side threshold value V1 and the negative side threshold value V2 set with the center of vibration interposed therebetween, A third rectangular wave signal CD converted into a positive rectangular wave on both the side and the negative side is obtained.

【0018】論理回路24は、第1,第2の矩形波信号
AD,BDが入力される排他的論理和ゲート241と、
その出力と第3の矩形波信号CDとが入力される論理和
否定ゲート242により構成されて、アラーム出力を出
すようになっている。
The logic circuit 24 includes an exclusive OR gate 241 to which the first and second rectangular wave signals AD and BD are input,
It is configured by a logical sum negation gate 242 to which the output and the third rectangular wave signal CD are input, and outputs an alarm output.

【0019】図3は、二つの受光素子14,15から得
られる第1,第2の正弦波状信号A,Bが90°位相差
からの位相ズレやオフセットがない正常状態での波形を
示している。図示のようにこの場合、第1,第2の矩形
波信号AD,BDの排他的論理和出力と第3の矩形波信
号CDが共にLレベルとなることはなく、アラーム信号
は出力されない。
FIG. 3 shows waveforms of the first and second sinusoidal signals A and B obtained from the two light receiving elements 14 and 15 in a normal state where there is no phase shift or offset from the 90 ° phase difference. There is. As shown in the figure, in this case, neither the exclusive OR output of the first and second rectangular wave signals AD and BD nor the third rectangular wave signal CD becomes L level, and the alarm signal is not output.

【0020】図4及び図5は、異常が検出されたときの
アラーム出力の様子をシミュレーション結果により示し
ている。図4(a)は、オフセットが大きい場合、即ち
第2の正弦波状信号(B相信号)はオフセットがゼロで
あるが、第1の正弦波状信号(A相信号)のオフセット
が0.3Vある場合である。図4(b)は、位相ズレが
ある場合、即ち第1,第2の正弦波状信号A,Bが位相
差が90°であるべきところ、120°程度の位相差と
なった場合である。いずれの場合も、第1,第2の矩形
波信号AD,BDの排他的論理和出力と第3の矩形波信
号CDが共にLレベルとなる時間帯が発生してHレベル
のアラーム信号が出力される。
FIG. 4 and FIG. 5 show the states of alarm output when an abnormality is detected by simulation results. In FIG. 4A, when the offset is large, that is, the offset of the second sinusoidal signal (B-phase signal) is zero, but the offset of the first sinusoidal signal (A-phase signal) is 0.3V. This is the case. FIG. 4B shows a case where there is a phase shift, that is, when the first and second sinusoidal signals A and B should have a phase difference of 90 °, but a phase difference of about 120 °. In either case, the exclusive OR output of the first and second rectangular wave signals AD and BD and the third rectangular wave signal CD are both at the L level in a time zone, and the H level alarm signal is output. To be done.

【0021】図5(a)はB相信号振幅が小さい場合の
例、具体的にはB相信号振幅が0.5V、コンパレート
レベルが0.5Vの場合である。この場合も図示のよう
に断続的にHレベルのアラーム信号が出力される。図5
(b)は、B相信号振幅が0.5Vと小さいが、これに
対応してB相側のコンパレートレベルを0.2Vと小さ
く設定して、アラーム信号が出ないようにした場合であ
る。この様に信号レベルが小さい場合でも、これに応じ
てコンパレートレベルを調整すれば、アラーム信号が出
ない正常動作ができる。
FIG. 5A shows an example in which the B-phase signal amplitude is small, specifically, the B-phase signal amplitude is 0.5V and the comparator level is 0.5V. Also in this case, the H-level alarm signal is intermittently output as shown in the figure. Figure 5
(B) shows a case where the B-phase signal amplitude is as small as 0.5 V, and correspondingly, the B-phase side comparator level is set as small as 0.2 V so that no alarm signal is output. . Even if the signal level is low as described above, if the comparator level is adjusted according to this, a normal operation without an alarm signal can be performed.

【0022】[0022]

【発明の効果】以上述べたように本発明によれば、簡単
な構成で優れた異常検出機能を実現した変位検出装置を
提供することができる。
As described above, according to the present invention, it is possible to provide a displacement detecting device which realizes an excellent abnormality detecting function with a simple structure.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の一実施例にかかる変位検出装置を示
す。
FIG. 1 shows a displacement detection device according to an embodiment of the present invention.

【図2】 同実施例の異常検出回路の構成を示す。FIG. 2 shows a configuration of an abnormality detection circuit of the same embodiment.

【図3】 同異常検出回路の正常動作時の動作波形を示
す。
FIG. 3 shows operation waveforms of the abnormality detection circuit during normal operation.

【図4】 同異常検出回路のアラーム信号出力の様子を
示す。
FIG. 4 shows how an alarm signal is output from the abnormality detection circuit.

【図5】 同異常検出回路のアラーム信号出力の様子を
示す。
FIG. 5 shows how an alarm signal is output from the abnormality detection circuit.

【符号の説明】[Explanation of symbols]

11…スケール、12…インデックス、13…光源、1
4,15…受光素子、16…信号処理回路、17…異常
検出回路、21…第1の信号変換回路、22…信号加算
回路、23…第2の信号変換回路、24…論理回路。
11 ... Scale, 12 ... Index, 13 ... Light source, 1
4, 15 ... Light receiving element, 16 ... Signal processing circuit, 17 ... Abnormality detection circuit, 21 ... First signal conversion circuit, 22 ... Signal addition circuit, 23 ... Second signal conversion circuit, 24 ... Logic circuit.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 相対移動するスケールとインデックスを
有し、その相対移動に応じて位相が互いに90°ずれた
第1の正弦波状信号と第2の正弦波状信号を出力するエ
ンコーダと、このエンコーダから得られる第1の正弦波
状信号と第2の正弦波状信号を処理して変位を求める信
号処理手段と、前記エンコーダから得られる第1の正弦
波状信号と第2の正弦波状信号を用いて異常検出を行う
異常検出手段とを有し、前記異常検出手段は、 前記第1の正弦波状信号と第2の正弦波状信号をそれぞ
れ所定のコンパレートレベルで矩形波に変換して第1の
矩形波信号及び第2の矩形波信号を得る第1の信号変換
手段と、 前記第1の正弦波状信号と第2の正弦波状信号を加算し
て第3の正弦波状信号を得る信号加算手段と、 この信号加算手段から得られる第3の正弦波状信号を正
及び負の所定しきい値で判定してこれらのしきい値に挟
まれた範囲から外れる部分を矩形波に変換した第3の矩
形波信号を得る第2の信号変換手段と、 前記第1の矩形波信号と第2の矩形波信号の排他的論理
和をとり、その出力と前記第3の矩形波信号の論理和否
定をとって異常検出信号を出力する論理回路手段とを備
えたことを特徴とする変位検出装置。
1. An encoder that has a scale and an index that move relative to each other, and outputs a first sinusoidal signal and a second sinusoidal signal whose phases are deviated from each other by 90 ° according to the relative movement; Abnormality detection using the signal processing means for processing the obtained first sinusoidal signal and the second sinusoidal signal to obtain the displacement, and the first sinusoidal signal and the second sinusoidal signal obtained from the encoder. And an abnormality detecting unit for converting the first sinusoidal signal and the second sinusoidal signal into rectangular waves at predetermined comparator levels to convert the first rectangular wave signal into a rectangular wave signal. And first signal converting means for obtaining a second rectangular wave signal, and signal adding means for adding the first sinusoidal signal and the second sinusoidal signal to obtain a third sinusoidal signal, Obtained from the addition means A third rectangular wave signal obtained by determining a third sinusoidal signal with a predetermined positive and negative threshold value and converting a portion outside the range sandwiched by these threshold values into a rectangular wave. A signal converting means, which takes an exclusive OR of the first rectangular wave signal and the second rectangular wave signal, and outputs an abnormality detection signal by taking the logical NOT of its output and the third rectangular wave signal. A displacement detecting device comprising: a logic circuit means.
JP10489194A 1994-04-19 1994-04-19 Displacement detector Pending JPH07286862A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10489194A JPH07286862A (en) 1994-04-19 1994-04-19 Displacement detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10489194A JPH07286862A (en) 1994-04-19 1994-04-19 Displacement detector

Publications (1)

Publication Number Publication Date
JPH07286862A true JPH07286862A (en) 1995-10-31

Family

ID=14392797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10489194A Pending JPH07286862A (en) 1994-04-19 1994-04-19 Displacement detector

Country Status (1)

Country Link
JP (1) JPH07286862A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013190327A (en) * 2012-03-14 2013-09-26 Omron Corp Monitoring device and method for rotary encoder
JP2014210637A (en) * 2013-04-18 2014-11-13 株式会社リコー Sheet conveyance device and image forming device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013190327A (en) * 2012-03-14 2013-09-26 Omron Corp Monitoring device and method for rotary encoder
JP2014210637A (en) * 2013-04-18 2014-11-13 株式会社リコー Sheet conveyance device and image forming device

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