JPH07278802A - Graphite crucible device - Google Patents

Graphite crucible device

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Publication number
JPH07278802A
JPH07278802A JP9558294A JP9558294A JPH07278802A JP H07278802 A JPH07278802 A JP H07278802A JP 9558294 A JP9558294 A JP 9558294A JP 9558294 A JP9558294 A JP 9558294A JP H07278802 A JPH07278802 A JP H07278802A
Authority
JP
Japan
Prior art keywords
graphite crucible
crucible
graphite
melted
heating member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9558294A
Other languages
Japanese (ja)
Inventor
Sadafumi Takeuchi
貞文 竹内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Original Assignee
Ibiden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd filed Critical Ibiden Co Ltd
Priority to JP9558294A priority Critical patent/JPH07278802A/en
Publication of JPH07278802A publication Critical patent/JPH07278802A/en
Pending legal-status Critical Current

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  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To attain high efficiency heating and stable holding of a graphite crucible by fitting an outer peripheral surface of the graphite crucible housing a material to be melted to an inner peripheral surface of an induced heating member disposed outside the crucible in a tapered shape. CONSTITUTION:The induced heating member 13 composed of an isotropic graphite cylindrical member is disposed outside the graphite crucible 12 made of glassy carbon. Both the induced heating member 13 and the graphite crucible 12 are arranged in a refractory crucible 15 made of porous alumina, etc., and carbon fiber and a heat insulating material 16 such as alumina cement are packed in a space inside the refractory crucible 15. The induced heating member 13 is induction-heated by induction coils 14 disposed around the refractory crucible 15 and a material to be melted 11 housed in the graphite crucible 12 is heated and melted via the graphite crucible 12. In a graphite crucible device 10, the induced heating member 13 is held and fixed by the heat insulating material 16 and is formed to a cylindrical form or a crucible form and further the inner peripheral surface 18 thereof and the outer peripheral surface of the graphite crucible 12 are made to a tapered shape so that they can fit to each other.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、例えばアルミニウム、
銀等の金属を溶融させてシート状物の表面に蒸着する際
に用いられる黒鉛ルツボ装置に関するものである。
BACKGROUND OF THE INVENTION The present invention relates to aluminum,
The present invention relates to a graphite crucible device used when a metal such as silver is melted and deposited on the surface of a sheet-shaped material.

【0002】[0002]

【従来の技術】従来、この種の黒鉛ルツボ装置として
は、特開平4−101385号公報に開示され図3に示
すように、外周に誘導コイル31を配設した耐火ルツボ
32の内側に断熱材33a介して被誘導加熱部材である
黒鉛筒状体34を固定し、そして前記黒鉛筒状体34の
内側に所定の隙間を保ちガラス状炭素からなり内部に被
溶解物35を収容した黒鉛ルツボ36を前記耐火ルツボ
32の底部断熱材33b上に設置固定し、前記黒鉛筒状
体34を誘導加熱することで前記ガラス状炭素からなる
黒鉛ルツボ36を加熱し、被溶解物35を溶融させる黒
鉛ルツボ装置30が提案されている。
2. Description of the Related Art Conventionally, as a graphite crucible device of this type, as shown in FIG. 3 of Japanese Patent Laid-Open No. 4-101385, a heat insulating material is provided inside a refractory crucible 32 having an induction coil 31 arranged on the outer periphery thereof. A graphite crucible 34, which is an induction heating member, is fixed via 33a, and a graphite crucible 36 made of glassy carbon and containing a substance 35 to be melted therein is provided with a predetermined gap inside the graphite cylinder 34. Is fixed on the bottom heat insulating material 33b of the refractory crucible 32, and the graphite crucible 36 made of the glassy carbon is heated by induction heating the graphite tubular body 34 to melt the melted material 35. Device 30 has been proposed.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、上記従
来の黒鉛ルツボ装置30にあっては、前記黒鉛ルツボ3
6は前記黒鉛筒状体34と隙間を保ち断熱材33bの上
に固定されている。このため誘導加熱により加熱された
前記黒鉛筒状体34の熱が効率良く前記黒鉛ルツボ36
に伝わり難く、被溶解物35の溶解に時間がかかる。ま
た、前記黒鉛ルツボ36を断熱材33bの上に固定して
いるため、前記黒鉛ルツボ装置30の可動中に不安定に
なり易く前記黒鉛ルツボ36が傾き被溶解物35がこぼ
れることがあるという問題があった。
However, in the above-mentioned conventional graphite crucible device 30, the graphite crucible 3 is not used.
6 is fixed on the heat insulating material 33b while maintaining a gap with the graphite tubular body 34. Therefore, the heat of the graphite tubular body 34 heated by induction heating is efficiently supplied to the graphite crucible 36.
It is difficult to reach the target 35 and it takes time to dissolve the material 35 to be melted. In addition, since the graphite crucible 36 is fixed on the heat insulating material 33b, the graphite crucible 36 tends to become unstable during the movement of the graphite crucible device 30, and the graphite crucible 36 may tilt and the melted substance 35 may spill. was there.

【0004】本発明は上記問題に対処するためになされ
たもので、その目的は、被溶解物を収容した黒鉛ルツボ
を高効率で加熱することができ、更に前記黒鉛ルツボを
安定して拘持することができる黒鉛ルツボ装置を提供す
ることにある。
The present invention has been made to solve the above problems, and an object thereof is to heat a graphite crucible containing a material to be melted with high efficiency, and to stably hold the graphite crucible. It is to provide a graphite crucible device that can be used.

【0005】[0005]

【課題を解決するための手段】上記目的を達成するため
に、本発明の構成上の特徴は、被溶解物を収容するため
の黒鉛ルツボと、前記黒鉛ルツボの外側に配設した被誘
導加熱部材と、前記被誘導加熱部材の周囲に配設した誘
導コイルとから構成される黒鉛ルツボ装置において、前
記被誘導加熱部材を円筒形状あるいはルツボ形状に形成
するとともに、前記黒鉛ルツボの外周側面と前記被誘導
加熱部材の内周側面とをテーパー形状にして嵌合させ、
前記黒鉛ルツボを前記被誘導加熱部材が支持するように
したことにある。
In order to achieve the above object, a structural feature of the present invention is that a graphite crucible for accommodating a material to be melted and induction heating to be arranged outside the graphite crucible. In a graphite crucible device composed of a member and an induction coil arranged around the induction heating member, the induction heating member is formed in a cylindrical shape or a crucible shape, and the outer peripheral side surface of the graphite crucible and the The inner peripheral side surface of the induction-heated member is tapered and fitted,
The induction heating member supports the graphite crucible.

【0006】[0006]

【発明の作用及び効果】上記のように構成した本発明の
黒鉛ルツボ装置においては、被溶解物を収容するための
黒鉛ルツボの少なくとも外周側面と、円筒形状あるいは
ルツボ形状である被誘導加熱部材の内周側面とをテーパ
ー形状にして嵌合させた。このため被誘導加熱部材が誘
導発熱すると前記黒鉛ルツボを効率良く加熱することが
でき、短時間で前記黒鉛ルツボ内部の被溶解物を溶解さ
せることができる。また、前記黒鉛ルツボと前記被誘導
加熱部材との間の隙間が無くなることから生じる前記黒
鉛ルツボの脱着性を、前記テーパー形状で嵌合させたこ
とで、低下させることなく前記黒鉛ルツボを被誘導加熱
部材が安定、支持することができる。この結果、定期的
な点検、交換が必要となる前記黒鉛ルツボのメンテナン
スを容易にすることができ、前記黒鉛ルツボ装置の可動
率を上げることができ生産性を向上させることができ
た。
In the graphite crucible apparatus of the present invention configured as described above, at least the outer peripheral side surface of the graphite crucible for containing the material to be melted and the induction heating member having a cylindrical shape or a crucible shape. The inner peripheral side surface was tapered and fitted. Therefore, when the member to be heated by induction heats by induction, the graphite crucible can be efficiently heated, and the substance to be melted inside the graphite crucible can be dissolved in a short time. In addition, the detachability of the graphite crucible, which occurs due to the absence of the gap between the graphite crucible and the induction heating member, is fitted with the tapered shape, so that the graphite crucible is guided without being reduced. The heating member can be stably supported. As a result, the maintenance of the graphite crucible, which requires regular inspection and replacement, can be facilitated, the mobility of the graphite crucible device can be increased, and the productivity can be improved.

【0007】[0007]

【実施例】以下、本発明を実施例に基づき説明する。 実施例1EXAMPLES The present invention will be described below based on examples. Example 1

【0008】図1は本発明の実施例に係る黒鉛ルツボ装
置10の概略断面構造を示している。この黒鉛ルツボ装
置10は、被溶解物11を収容するための黒鉛ルツボ1
2と、前記黒鉛ルツボ12を嵌合、支持するための被誘
導加熱部材である黒鉛円筒部材13と、前記黒鉛円筒部
材13を内部に収容し、外周に誘導コイル14を配設し
た耐火ルツボ15と、前記黒鉛ルツボ12及び黒鉛円筒
部材13と耐火ルツボ15の間の断熱材16とを備えて
いる。
FIG. 1 shows a schematic sectional structure of a graphite crucible device 10 according to an embodiment of the present invention. This graphite crucible apparatus 10 is a graphite crucible 1 for containing a substance 11 to be melted.
2, a graphite cylindrical member 13 that is an induction-heated member for fitting and supporting the graphite crucible 12, and a refractory crucible 15 in which the graphite cylindrical member 13 is housed and an induction coil 14 is arranged on the outer periphery. And a heat insulating material 16 between the graphite crucible 12 and the graphite cylindrical member 13 and the refractory crucible 15.

【0009】この黒鉛ルツボ装置10において、前記黒
鉛ルツボ12は、厚さ約3mmで外周側面を5度のテー
パー形状に成形したガラス状炭素から形成される。また
前記黒鉛円筒部材13は、厚さ約7mmで、前記黒鉛ル
ツボ12の外周側面17テーパーと嵌合するようにし
て、被誘導加熱部材として優れた等方性黒鉛から形成さ
れる。次に、耐火ルツボ15は、多孔質アルミナから形
成し、外周に図示していない高周波電源に接続された誘
導コイル14を配設してなる。
In this graphite crucible apparatus 10, the graphite crucible 12 is formed of glassy carbon having a thickness of about 3 mm and a peripheral side surface formed into a taper shape of 5 degrees. The graphite cylindrical member 13 has a thickness of about 7 mm and is formed of isotropic graphite which is excellent as an induction heating member so as to fit with the outer peripheral side surface 17 taper of the graphite crucible 12. Next, the refractory crucible 15 is made of porous alumina and has the induction coil 14 connected to a high frequency power source (not shown) on the outer periphery thereof.

【0010】そして、前記耐火ルツボ15の内部に、前
記黒鉛円筒部材13を収容し、その間にカーボファイバ
ーとアルミナセメントを充填することで前記黒鉛円筒部
材13を耐火ルツボ15内に固定した。次いでこの前記
黒鉛円筒部材13に被溶解物を収容した前記黒鉛ルツボ
12を、脱着自在に支持されるよう嵌合させた。
Then, the graphite cylindrical member 13 was housed inside the refractory crucible 15, and the graphite cylindrical member 13 was fixed in the refractory crucible 15 by filling a carbon fiber and alumina cement between them. Next, the graphite crucible 12 containing the substance to be melted was fitted into the graphite cylindrical member 13 so as to be detachably supported.

【0011】耐火ルツボ15は、非導電性であることが
好ましく、断熱材16は、炭素繊維の他に炭素粒子(カ
ーボンブラック)や無機物質(アルミナ繊維など)であ
ってもよい。また前記黒鉛円筒部材13は、異方性黒鉛
であってもよい。
The refractory crucible 15 is preferably non-conductive, and the heat insulating material 16 may be carbon particles (carbon black) or an inorganic substance (alumina fiber, etc.) in addition to carbon fibers. The graphite cylindrical member 13 may be anisotropic graphite.

【0012】上記のように構成した黒鉛ルツボ装置10
に、図示していない高周波電源より適宜の高周波電流を
供給すると前記黒鉛円筒部材13のに誘導電流が流れ、
発熱する。これに伴って、前記ガラス状炭素からなる黒
鉛ルツボ12が加熱され、収容された被溶解物11が溶
解する。
A graphite crucible device 10 constructed as described above.
When an appropriate high-frequency current is supplied from a high-frequency power source (not shown), an induction current flows in the graphite cylindrical member 13,
Fever. Along with this, the graphite crucible 12 made of the glassy carbon is heated, and the contained substance 11 to be melted is melted.

【0013】次に、本発明に係るガラス状炭素からなる
黒鉛ルツボ12の製造要領を説明する。第一に、前記ガ
ラス状炭素からなる黒鉛ルツボ12は、フェーノール樹
脂あるいはフルフリルアルコール樹脂など熱硬化性樹脂
もしくは熱硬化性樹脂の材料(例えばフルフルリアルコ
ールなど)を出発材料として製造する。すなわち、たと
えばフェノール樹脂を出発材料として作成する場合、そ
の粉末を加熱しつつ加圧成形してルツボ形状の成形体を
作成する。またフルフリルアルコールを出発材料とする
場合、それを必要に応じ触媒とともに金属成形型に収容
し硬化せしめてルツボ形状の成形体を作成する。そして
上記それぞれのルツボ状の成形体を、不活性ガス雰囲気
中で炭化し必要に応じて加工し、加熱処理することによ
り、前記ガラス状炭素からなる黒鉛ルツボ12を製造す
る。
Next, a description will be given of the manufacturing procedure of the graphite crucible 12 made of glassy carbon according to the present invention. First, the graphite crucible 12 made of glassy carbon is manufactured by using a thermosetting resin such as a phenol resin or a furfuryl alcohol resin or a thermosetting resin material (for example, furfururialcohol) as a starting material. That is, for example, when a phenol resin is used as a starting material, the powder is heated and pressure-molded to form a crucible-shaped molded body. When furfuryl alcohol is used as a starting material, it is housed in a metal forming die together with a catalyst if necessary and cured to form a crucible-shaped formed body. Then, each of the crucible-shaped compacts described above is carbonized in an inert gas atmosphere, processed if necessary, and heat-treated to produce the graphite crucible 12 made of the glassy carbon.

【0014】次に、等方性黒鉛円筒部材13の製造要領
を説明する。等方性黒鉛円筒部材13は、ピッチを含む
炭素の微粒子を冷間静水圧プレスによりブロック形状に
加圧成形する。そして、その成形体を不活性雰囲気中で
焼結させ等方性黒鉛ブロックを得る。そして、前記等方
性黒鉛ブロックを、NC旋盤にてルツボ形状に切削加工
し黒鉛円筒部材13を製作した。このとき黒鉛円筒部材
13の内周側面18は前記黒鉛ルツボ12の外周側面1
7と嵌合し、支持するようテーパ形状に加工した。
Next, the manufacturing procedure of the isotropic graphite cylindrical member 13 will be described. The isotropic graphite cylindrical member 13 pressure-molds carbon particles containing pitch into a block shape by cold isostatic pressing. Then, the molded body is sintered in an inert atmosphere to obtain an isotropic graphite block. Then, the isotropic graphite block was cut into a crucible shape by an NC lathe to manufacture a graphite cylindrical member 13. At this time, the inner peripheral side surface 18 of the graphite cylindrical member 13 is the outer peripheral side surface 1 of the graphite crucible 12.
7 was fitted and processed into a tapered shape so as to be supported.

【0015】アルミニウム塊を約1450℃に溶解させ
シート紙材表面に連続的に蒸着させることに、本発明
の、ガラス状炭素からなる黒鉛ルツボ12の外周側面1
7と黒鉛円筒部材13の内周側面18とをテーパーで嵌
合させ支持した黒鉛ルツボ装置10と、ガラス状炭素か
らなる黒鉛ルツボ36とその外周に所定の隙間を保ち配
設された黒鉛円筒部材34を備えた従来技術による黒鉛
ルツボ装置30とを用いて被溶解物の加熱、冷却のサイ
クルを繰り返し、その結果を表1に示した。
By melting an aluminum lump at about 1450 ° C. and continuously vapor-depositing it on the surface of the sheet paper material, the outer peripheral side surface 1 of the graphite crucible 12 made of glassy carbon according to the present invention is used.
7, a graphite crucible device 10 in which a graphite cylindrical member 13 and an inner peripheral side surface 18 of the graphite cylindrical member 13 are fitted and supported by a taper, a graphite crucible 36 made of glassy carbon, and a graphite cylindrical member disposed with a predetermined gap on the outer periphery thereof. Using a graphite crucible apparatus 30 according to the prior art equipped with 34, the cycle of heating and cooling the material to be melted was repeated, and the results are shown in Table 1.

【0016】[0016]

【表1】 [Table 1]

【0017】この結果によると、本発明の黒鉛ルツボ装
置10は、従来の前記黒鉛ルツボ装置30に対し短時間
でアルミニウム塊を1450℃までに溶解させることが
でき、サイクルタイムの短縮による生産性の向上及び消
費電力の低減を可能とした。又、そのときの黒鉛ルツボ
12の内部はより均一に加熱され、前記内側黒鉛ルツボ
12内の溶融したアルミニウムの残留を少なくすること
ができ、材料の歩留まりを改善することができた。
According to this result, the graphite crucible apparatus 10 of the present invention can dissolve the aluminum lump up to 1450 ° C. in a short time with respect to the conventional graphite crucible apparatus 30, and the cycle time is shortened to improve the productivity. It is possible to improve and reduce power consumption. Further, at that time, the inside of the graphite crucible 12 was heated more uniformly, the amount of molten aluminum remaining in the inner graphite crucible 12 was reduced, and the yield of the material could be improved.

【0018】さらに、被溶解物11を収容するための黒
鉛ルツボ12の外周側面17と黒鉛円筒部材13の内周
側面18を、テーパー形状で嵌合させていることから定
期的なメンテナンスを必要とする黒鉛ルツボ12を容易
に脱着自在とすることができ、作業性を大幅に向上させ
ることができた。
Further, since the outer peripheral side surface 17 of the graphite crucible 12 for accommodating the melted material 11 and the inner peripheral side surface 18 of the graphite cylindrical member 13 are fitted in a tapered shape, regular maintenance is required. The graphite crucible 12 to be used could be easily attached and detached, and the workability could be greatly improved.

【0019】実施例2 図2は、本発明の第二の実施例に係る黒鉛ルツボ装置2
0の概略断面構造を示している。この黒鉛黒鉛ルツボ装
置20は、被溶解物21を収容するための内側黒鉛ルツ
ボ22と、被誘導加熱部材としての外側黒鉛ルツボ23
と、外周に誘導コイル24を配設した耐火ルツボ25
と、前記外側黒鉛ルツボ23と耐火ルツボ25の間の断
熱材26とを備えている。
Embodiment 2 FIG. 2 shows a graphite crucible apparatus 2 according to a second embodiment of the present invention.
0 shows a schematic sectional structure of 0. This graphite-graphite crucible device 20 includes an inner graphite crucible 22 for accommodating a material to be melted 21 and an outer graphite crucible 23 as an induction heating member.
And a refractory crucible 25 having an induction coil 24 on the outer periphery
And a heat insulating material 26 between the outer graphite crucible 23 and the refractory crucible 25.

【0020】この黒鉛ルツボ装置20において、前記内
側黒鉛ルツボ22は、厚さ約3mmで外周側面27を5
度のテーパーにし、ガラス状炭素から形成した。また前
記外側黒鉛ルツボ23は、厚さ約5mmで、前記内側黒
鉛ルツボ22の外周側面27テーパーと前記外側黒鉛ル
ツボ23の内周側面28とが嵌合するようし、被誘導加
熱部材として優れた等方性黒鉛から形成した。次に、外
周に図示していない高周波電源に接続された誘導コイル
24を配設してなる耐火ルツボ25を、多孔質アルミナ
から形成した。
In this graphite crucible device 20, the inner graphite crucible 22 has a thickness of about 3 mm and has an outer peripheral side surface 27 of 5 mm.
Tapered in degrees and formed from glassy carbon. Further, the outer graphite crucible 23 has a thickness of about 5 mm, and the outer peripheral side surface 27 taper of the inner graphite crucible 22 and the inner peripheral side surface 28 of the outer graphite crucible 23 are fitted to each other, which is excellent as an induction heating member. Formed from isotropic graphite. Next, a refractory crucible 25 having an induction coil 24 connected to a high frequency power source (not shown) was formed on the outer periphery from porous alumina.

【0021】そして、前記耐火ルツボ25の内部に、前
記外側黒鉛ルツボ23を収容し、その間にカーボファイ
バーとアルミナセメントを充填することで前記外側黒鉛
ルツボ23を耐火ルツボ25に固定した。次いでこの前
記外側黒鉛ルツボ23に被溶解物21を収容した前記黒
鉛ルツボ22を、脱着自在に支持されるよう嵌合、装着
させた。
Then, the outer graphite crucible 23 was housed inside the refractory crucible 25, and the outer graphite crucible 23 was fixed to the refractory crucible 25 by filling a carbo fiber and alumina cement between them. Next, the graphite crucible 22 accommodating the material to be melted 21 was fitted and attached to the outer graphite crucible 23 so as to be detachably supported.

【0022】上記のように構成した黒鉛ルツボ装置20
に、図示していない高周波電源により誘導電流を適宜に
供給すると前記外側黒鉛ルツボ23に誘導電流が流れ、
発熱する。これに伴って、前記ガラス状炭素からなる内
側黒鉛ルツボ22が加熱され、収容した被溶解物21が
溶解する。
A graphite crucible device 20 constructed as described above.
In addition, when an induction current is appropriately supplied by a high frequency power source (not shown), the induction current flows through the outer graphite crucible 23,
Fever. Along with this, the inner graphite crucible 22 made of the glassy carbon is heated, and the contained substance 21 to be melted is melted.

【0023】次に、本実施例の黒鉛ルツボ装置20を、
前述の実施例1と同様、アルミニウムを溶解、蒸着させ
ることに供して、従来の前記黒鉛ルツボ装置30と比較
した。この結果、本発明の黒鉛ルツボ装置20は、前述
の実施例1と同様の効果を得ることができたことに加
え、前記ガラス状炭素からなる内側黒鉛ルツボ22が破
壊しても溶解物21が外側黒鉛ルツボ23より流出しな
く黒鉛ルツボ装置20の信頼性を高めることができた。
Next, the graphite crucible device 20 of this embodiment is
Similar to the above-mentioned Example 1, the aluminum was melted and vapor-deposited to compare with the conventional graphite crucible apparatus 30. As a result, the graphite crucible apparatus 20 of the present invention was able to obtain the same effects as those of Example 1 described above, and in addition, even if the inner graphite crucible 22 made of the glassy carbon was broken, the melt 21 was not generated. It was possible to improve the reliability of the graphite crucible device 20 without flowing out from the outer graphite crucible 23.

【図面の簡単な説明】[Brief description of drawings]

【図1】図1は、本発明による円筒状の被誘導加熱部材
とガラス状炭素からなる黒鉛ルツボとを備えた黒鉛ルツ
ボ装置を説明するための概略正断面図である。
FIG. 1 is a schematic front sectional view for explaining a graphite crucible device including a cylindrical induction-heated member and a graphite crucible made of glassy carbon according to the present invention.

【図2】図2は、本発明によるルツボ状の被誘導加熱部
材と、その内部に嵌合する黒鉛ルツボとを備えた黒鉛ル
ツボ装置を説明するための概略正断面図である。
FIG. 2 is a schematic front sectional view for explaining a graphite crucible device including a crucible-shaped induction-heated member according to the present invention and a graphite crucible fitted therein.

【図3】図3は、従来技術による黒鉛ルツボ装置を説明
するための概略正断面図である。
FIG. 3 is a schematic front sectional view for explaining a graphite crucible device according to a conventional technique.

【符合の簡単な説明】[Simple explanation of the sign]

10・・・黒鉛ルツボ装置 11・・・被溶解物 12・・・黒鉛ルツボ 13・・・被誘導加熱部材 14・・・誘導コイル 15・・・耐火ルツボ 16・・・断熱材 17・・・黒鉛ルツボの外周側面 18・・・被誘導加熱部材の内周側面 10 ... Graphite crucible device 11 ... Melting object 12 ... Graphite crucible 13 ... Induction heating member 14 ... Induction coil 15 ... Fire-resistant crucible 16 ... Insulation material 17 ... Outer peripheral side surface of graphite crucible 18 ... Inner peripheral side surface of induction-heated member

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 被溶解物を収容するための黒鉛ルツボ
と、前記黒鉛ルツボの外側に配設した被誘導加熱部材
と、前記被誘導加熱部材の周囲に配設した誘導コイルと
から構成される黒鉛ルツボ装置において、前記被誘導加
熱部材が円筒形状あるいはルツボ形状に形成されてお
り、かつ前記黒鉛ルツボの外周側面と前記被誘導加熱部
材の内周側面とがテーパー形状で嵌合されてなることを
特徴とする黒鉛ルツボ装置。
1. A graphite crucible for containing a substance to be melted, an induction heating member arranged outside the graphite crucible, and an induction coil arranged around the induction heating member. In the graphite crucible apparatus, the induction heated member is formed in a cylindrical shape or a crucible shape, and the outer peripheral side surface of the graphite crucible and the inner peripheral side surface of the induction heated member are fitted in a tapered shape. Graphite crucible device characterized by.
【請求項2】 記黒鉛ルツボが、前記被誘導加熱部材に
より支持されていることを特徴とする請求項1に記載の
黒鉛ルツボ装置。
2. The graphite crucible apparatus according to claim 1, wherein the graphite crucible is supported by the induction-heated member.
JP9558294A 1994-04-07 1994-04-07 Graphite crucible device Pending JPH07278802A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9558294A JPH07278802A (en) 1994-04-07 1994-04-07 Graphite crucible device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9558294A JPH07278802A (en) 1994-04-07 1994-04-07 Graphite crucible device

Publications (1)

Publication Number Publication Date
JPH07278802A true JPH07278802A (en) 1995-10-24

Family

ID=14141590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9558294A Pending JPH07278802A (en) 1994-04-07 1994-04-07 Graphite crucible device

Country Status (1)

Country Link
JP (1) JPH07278802A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100666575B1 (en) * 2005-01-31 2007-01-09 삼성에스디아이 주식회사 Deposition source and deposition apparatus using the same
KR100700649B1 (en) * 2005-01-31 2007-03-27 삼성에스디아이 주식회사 Effusion Cell and Evaporating Apparatus
JP2011060865A (en) * 2009-09-07 2011-03-24 Optorun Co Ltd Linear vapor-deposition source, using method of the same, film depositing device and film depositing method
CN102080931A (en) * 2010-12-21 2011-06-01 黄喜锤 High frequency induction aluminum melting furnace for die casting of aluminum
KR101455851B1 (en) * 2013-04-24 2014-10-28 한국생산기술연구원 Melting furnace system having double crucible
CN108130513A (en) * 2017-12-14 2018-06-08 深圳市华星光电技术有限公司 Evaporation coating device and evaporation coating method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100666575B1 (en) * 2005-01-31 2007-01-09 삼성에스디아이 주식회사 Deposition source and deposition apparatus using the same
KR100700649B1 (en) * 2005-01-31 2007-03-27 삼성에스디아이 주식회사 Effusion Cell and Evaporating Apparatus
JP2011060865A (en) * 2009-09-07 2011-03-24 Optorun Co Ltd Linear vapor-deposition source, using method of the same, film depositing device and film depositing method
CN102080931A (en) * 2010-12-21 2011-06-01 黄喜锤 High frequency induction aluminum melting furnace for die casting of aluminum
KR101455851B1 (en) * 2013-04-24 2014-10-28 한국생산기술연구원 Melting furnace system having double crucible
CN108130513A (en) * 2017-12-14 2018-06-08 深圳市华星光电技术有限公司 Evaporation coating device and evaporation coating method

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