JPH0727657A - Airtight testing equipment for clean room - Google Patents

Abstract

PURPOSE:To improve the technique for manufacturing a high-quality clean room by individually performing the airtight test of a facility equipment without removing the facility equipment. CONSTITUTION:In an airtight testing equipment 17 for clean room which confirms the airtightness of a facility equipment 19 exposed to the inner surface of a clean room, an opening 3 for the facility equipment 19 is formed on a box body 1 and a sealing member 5 for sealing between a wall surface 7 and the box body 1 is mounted on the edge part of the opening 3. A pressure gauge 11 for displaying the air pressure within the box body 1 is provided at the box body 1. An air pump 13 for generating differential pressure with external air inside the box body 1 by transporting air is provided in the box body 1.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an airtightness tester for a clean room, and more particularly to an airtightness tester for equipment installed in the cleanroom.

[0002]

2. Description of the Related Art A clean room requires high airtightness to prevent dust from entering. Because of this, floors, walls,
In addition, equipment that penetrates the ceiling (outlets, automatic fire detectors, thermostats, humidistats, telephone outlets, etc.) has an airtight structure using packing and seals to block communication with the outside. For example,
In the case of an outlet, a distribution box is provided in the wall, and the distribution box is connected to the distribution pipe. Airtightness is ensured by a seal between the distribution box and the distribution pipe. On the other hand, outlets can be attached to the distribution box,
When the outlet is attached, the decorative plate exposed in the clean room is in contact with the inner wall surface. Normally, installation of the outlet is completed with this, but in a clean room where airtightness is required, packing is provided between the decorative plate and the inner wall surface, and the packing is between the decorative plate and the inner wall surface. Is designed to be sealed. As described above, since the individual equipments installed in the clean room have the airtight structure, the airtightness can be ensured in the entire clean room.

[0003]

By the way, in a completed clean room, it is necessary to verify the airtightness. For example, it is relatively easy to test the airtightness of the entire clean room as one object. However, if this airtightness test result is not good, it will be necessary to confirm the airtightness of the individual equipment as the next step. However, conventionally, after the completion of the construction of each of the above-mentioned penetrating portions, there is no established means for verifying whether or not the airtightness is actually ensured, so all the equipment must be individually removed to check the airtight state. However, a lot of labor was spent, which was an obstacle to the production of high quality products. The present invention has been made in view of the above circumstances, provides a clean room airtightness tester capable of individually performing airtightness test of equipments without removing the equipments, thereby improving high quality manufacturing technology. The purpose is to plan.

[0004]

Means for Solving the Problems The structure of an airtightness tester for a clean room according to the present invention for achieving the above object is as follows:
An airtightness tester for a clean room that covers the equipment exposed on the inner surface of the clean room in an airtight state, applies a differential pressure to this equipment to the outside air, and measures the pressure fluctuation of the differential pressure to confirm the airtightness of this equipment. Therefore, an opening to cover the equipment is formed in the box, and a close contact member that seals between the wall surface and this box is attached over the entire circumference of the edge of the opening,
It is characterized in that a pressure gauge for displaying the air pressure in the box body is provided in the box body, and an air pump for generating a pressure difference between the inside of the box body and the outside air is provided in the box body.

[0005]

When the box body is put on the equipment and pressed against the wall surface, the close contact member is deformed, and the box body and the wall surface are sealed by the close contact member, and the inside of the box body becomes airtight. When a pressure difference between the air inside the box and the outside air is generated by the air pump, if the equipment has a defective sealing part, the air will pass through this defective sealing part and the air pressure inside the box will be the same as the outside air. The differential pressure is not displayed on. On the other hand, if the airtightness of the equipment is ensured, the differential pressure remains in the air pressure inside the box, and the differential pressure is displayed on the pressure gauge.

[0006]

The preferred embodiments of the airtightness tester for a clean room according to the present invention will be described below in detail with reference to the drawings.
1 is a side view of an airtightness tester for a clean room according to the present invention, and FIG. 2 is a front view of FIG. An opening 3 is formed on one side surface of the airtightness tester box 1, which is a box, and the opening 3 is open in a plane. A close contact member 5 made of a hard rubber material or the like is attached to the opening edge portion of the opening 3 over the entire circumference, and the close contact member 5 absorbs the unevenness of the abutting member by elastic deformation, and the opening 3 and the other member It is designed to seal the space between them. That is, in the airtightness tester box 1, when the opening 3 is brought into contact with the wall surface 7, the space between the wall surface 7 is sealed by the close contact member 5, and the inside 1a is in an airtight state. A handle 9 is provided on the other side surface of the airtightness tester box 1 on the opposite side of the opening 3, and the handle 9 is used when the opening 3 is pressed against the wall surface 7.

A pressure gauge 11 is attached to the air-tightness tester box 1, and the pressure gauge 11 displays the air pressure in the air-tightness tester box 1. Further, a manual air pump 13 is attached to the air tightness tester box 1, and the air pump 1
3 is configured to send air under pressure through the tube 15 into the airtightness tester box 1 by compressing the air supply unit 13a. Note that the air pump 13 may be a small electric motor pump driven by a dry cell, which is a well-known technique, in addition to the manual pump. The airtightness tester box 1, the close contact member 5, the pressure gauge 11, and the air pump 13 are main components of the airtightness tester 17 for a clean room.

In the procedure of using the airtightness tester 17 for a clean room constructed as described above, first, the handle 9 is held and the airtightness tester box 1 is put on the outlet 19. Next, the handle 9 is strongly pressed against the wall surface 7 to deform the close contact member 5, thereby ensuring the air tightness between the air tightness tester box 1 and the wall surface 7. After ensuring the airtightness in the box, the air supply part 13a of the air pump 13 is grasped by hand, and air is pressure-fed into the airtightness tester box 1. At this time, if the seal of the outlet mounting portion is incomplete, the pumped air escapes from the defective seal portion to the outside, the air pressure in the box does not rise, and the scale of the pressure gauge 11 does not rise. This verifies that the outlet 19 is not airtight. On the other hand, if the airtightness of the outlet 19 is secured, the air pressure in the box rises, and the scale of the pressure gauge 11 indicates high pressure. If the scale of the pressure gauge 11 continues to be in a high-pressure state while the airtightness tester box 1 is pressed, it is verified that the outlet 19 has airtightness.

The airtightness tester 17 for the clean room in the above-described embodiment presses the airtightness tester box 1 against the wall surface 7, and air is pumped into the airtightness tester box 1 by the air pump 13 to generate high-pressure air. Although the pressure gauge 11 is used to confirm the fluctuation of the air pressure due to the leak, on the contrary, by checking the fluctuation of the negative pressure with the pressure gauge 11 by setting the negative pressure inside the airtightness tester box 1, the airtightness can be checked. May be verified. As a configuration in this case, an electric or manual cylinder type pump intake side may be connected to the airtightness tester box 1 through a check valve so that the air in the box is discharged to the outside. . According to the method of verifying the airtightness with such a negative pressure, a small pressing force is applied to the wall surface 7 of the airtightness tester box 1 while confirming the pressure fluctuation, and a measurement failure due to insufficient pressing on the wall surface may occur. Less likely to occur.

[0010]

As described in detail above, according to the airtightness tester for a clean room according to the present invention, an air pump for producing a differential pressure in the box body is provided in the box body, and the pressure gauge for displaying the differential pressure is provided. Since the box is installed in the box, if the box is placed over the equipment to create a differential pressure, if the equipment has a defective seal, the pressure gauge will not display the differential pressure and the equipment will be airtight. If so, the pressure difference is displayed on the pressure gauge, and the airtightness of the equipment can be verified very easily. As a result, the airtight test can be individually performed without removing the equipment, and the technique for producing a high quality product can be improved.

[Brief description of drawings]

FIG. 1 is a side view of an airtightness tester for a clean room according to the present invention.

FIG. 2 is a front view of FIG.

[Explanation of symbols]

 1 Airtightness Tester Box (Box) 3 Opening 5 Closer Member 11 Pressure Gauge 13 Air Pump 17 Airtightness Tester for Clean Room 19 Outlet (Facility Equipment)

Claims (1)

[Claims] 1. An equipment device exposed on the inner surface of a clean room is covered in an airtight state, and a differential pressure from the outside air is applied to the equipment device,
A clean room airtightness tester for checking the airtightness of the equipment by measuring the pressure fluctuation of the differential pressure, wherein an opening to cover the equipment is formed in a box, and the wall surface and the box are A tight member that seals the space is installed over the entire circumference of the edge of the opening, and a pressure gauge that indicates the air pressure inside the box is provided in the box, and the pressure difference between the box and the outside air is obtained by transferring air. An airtightness tester for a clean room, characterized in that an air pump for generating the above is provided in the box body.