JPH0727627A - Temperature sensor - Google Patents

Temperature sensor

Info

Publication number
JPH0727627A
JPH0727627A JP19892793A JP19892793A JPH0727627A JP H0727627 A JPH0727627 A JP H0727627A JP 19892793 A JP19892793 A JP 19892793A JP 19892793 A JP19892793 A JP 19892793A JP H0727627 A JPH0727627 A JP H0727627A
Authority
JP
Japan
Prior art keywords
thermocouple
contact surface
measured
temperature sensor
heat insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19892793A
Other languages
Japanese (ja)
Other versions
JP2873655B2 (en
Inventor
Mamoru Nagase
守 永瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TLV Co Ltd
Original Assignee
TLV Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TLV Co Ltd filed Critical TLV Co Ltd
Priority to JP19892793A priority Critical patent/JP2873655B2/en
Publication of JPH0727627A publication Critical patent/JPH0727627A/en
Application granted granted Critical
Publication of JP2873655B2 publication Critical patent/JP2873655B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PURPOSE:To obtain a temperature sensor, wherein a thermocouple is pushed to the surface of an object to be measured with an intended pushing force. CONSTITUTION:A thermocouple comprises a contact plate 17, which is pushed to an object to be measured, and thermocouple lines 16a, 16b, which are extending from both ends of the contact plate. Elastic deformation parts 23a and 23b, which are bent inward beforehand, are formed on the thermocouple lines. A gap 21 is formed between the contact plate and the upper surface of the heat insulating pipe. Windows 20a and 20b, which allow the inward deformation of the elastic deformation parts when the contact plate is pushed down, are formed on the side surface of the heat insulating pipe 19. The contact plate is pushed to the material to be measured with the intended pushing force based on the elastic force of the elastic deformation parts.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、熱電対の接触面を被測
定対象物の表面に接触させて温度を測定するようにした
温度センサに関し、特に接触面が所望の押し付け力で被
測定対象物に押し当てられるようにしたものに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a temperature sensor in which a contact surface of a thermocouple is brought into contact with the surface of an object to be measured to measure the temperature, and in particular, the contact surface is an object to be measured with a desired pressing force. Regarding things that can be pressed against things.

【0002】[0002]

【従来の技術】従来の温度センサとしては、例えば、実
開平3−83829号公報に示されたものがある。これ
は、被測定対象物に押し当てられる接触面とこの接触面
の両端から延長された熱電対線とから成る熱電対と、接
触面が上面に位置し熱電対線が側面に位置する断熱管
と、熱電対線の外側に位置する保護管と、断熱管を上方
に付勢して接触面を保護管の上面から突出せしめるコイ
ルスプリングとから成るもので、コイルスプリングの弾
性力に抗して接触面を保護管の上面まで押し込むことに
よって、接触面を所望の押し付け力で被測定対象物に押
し当てることができるようにしたものである。
2. Description of the Related Art A conventional temperature sensor is disclosed in, for example, Japanese Utility Model Laid-Open No. 3-83829. This is a thermocouple consisting of a contact surface that is pressed against the object to be measured and thermocouple wires that extend from both ends of this contact surface, and a heat insulation tube where the contact surface is located on the upper surface and the thermocouple wire is located on the side surface. And a coil spring that is located outside the thermocouple wire and a coil spring that urges the heat insulating tube upward so that the contact surface projects from the upper surface of the protective tube. By pushing the contact surface to the upper surface of the protective tube, the contact surface can be pressed against the object to be measured with a desired pressing force.

【0003】[0003]

【本発明が解決しようとする課題】上記のものは、所望
の押し付け力を得るためにコイルスプリングを必要とす
る構成であるので、部品点数が多くなると共に構造が複
雑になりコスト高になる問題があった。
The above-mentioned structure requires a coil spring to obtain a desired pressing force, so that the number of parts is increased and the structure is complicated and the cost is increased. was there.

【0004】従って本発明の技術的課題は、コイルスプ
リングを用いずに、熱電対の接触面を所望の押し付け力
で被測定対象物に押し当てることができるようにするこ
とである。
Therefore, a technical object of the present invention is to enable a contact surface of a thermocouple to be pressed against an object to be measured with a desired pressing force without using a coil spring.

【0005】[0005]

【課題を解決する為の手段】上記の技術的課題を解決す
るために講じた本発明の技術的手段は、被測定対象物に
押し当てられる接触面と該接触面の両端から延長された
熱電対線とから成る熱電対と、前記接触面が上面に位置
し前記熱電対線が側面に位置する断熱管と、前記熱電対
線の外側に位置する保護管とから成り、該保護管の上面
まで前記接触面が押し下げられる温度センサにおいて、
前記熱電対線に予め内側に曲げられた弾性変形部を形成
すると共に、前記接触面が押し下げられたときに前記熱
電対線の弾性変形部の内側への変形を許容する凹部を断
熱管の側面に形成し、前記熱電対の接触面と前記断熱管
の上面との間に隙間を形成したことを特徴とするもので
ある。
Means for Solving the Problems The technical means of the present invention taken to solve the above technical problems are a contact surface to be pressed against an object to be measured and a thermoelectric member extended from both ends of the contact surface. A thermocouple consisting of a pair of wires, an adiabatic tube in which the contact surface is located on the upper surface and the thermocouple wire is located on the side surface, and a protective tube located outside the thermocouple wire, the upper surface of the protective tube In the temperature sensor where the contact surface is pushed down to
The thermocouple wire is formed with an elastically deformed portion that is bent inward in advance, and a concave portion that allows the thermocouple wire to be deformed inward when the contact surface is pressed down is formed on the side surface of the heat insulating tube. And a gap is formed between the contact surface of the thermocouple and the upper surface of the heat insulating tube.

【0006】[0006]

【作用】上記の技術的手段の作用は下記の通りである。
熱電対は、その接触面が被測定対象物に押し付けられる
と、断熱管の上面方向に変位せしめられ、予め内側に曲
げられた熱電対線の弾性変形部がさらに内側に湾曲せし
められ、接触面の上面が保護管23の上面まで押し込ま
れる。従って、接触面は、熱電対線の弾性変形部の弾性
反力によって所望の押し付け力で被測定対象物に押し当
てられる。
The operation of the above technical means is as follows.
When the contact surface of the thermocouple is pressed against the object to be measured, the thermocouple is displaced in the direction of the upper surface of the heat insulating tube, and the elastically deformed portion of the thermocouple wire that has been bent inward is further curved inward. Is pushed into the upper surface of the protective tube 23. Therefore, the contact surface is pressed against the object to be measured with a desired pressing force by the elastic reaction force of the elastically deforming portion of the thermocouple wire.

【0007】[0007]

【実施例】本発明の具体例を示す実施例を説明する(図
1参照)。本実施例は、本発明による温度センサを振動
センサに組合せたものである。
EXAMPLES Examples showing specific examples of the present invention will be described (see FIG. 1). In this embodiment, the temperature sensor according to the present invention is combined with a vibration sensor.

【0008】下部に小径の雄ねじが形成された振動検出
針1に、雌ねじが形成された振動伝達板2がねじ結合さ
れ、大径部下面に振動伝達板2の上面が当接している。
振動伝達板2の下側には上電極板3と圧電素子4と下電
極板5とウエイト6とが順次挿入され、ナット7で夫々
接触せしめられて振動検出針1に固定されている。振動
検出針1と振動伝達板2はステンレス鋼で形成され、上
下電極板3,5はリン青銅で形成され、ウエイト6はジ
ルコニアセラミックで形成される。振動検出針1と振動
伝達板2と上電極板3と圧電素子4と電極板5とウエイ
ト6とから振動センサの振動検出ユニットが形成され
る。
A vibration transmitting plate 2 having a female screw is screwed to a vibration detecting needle 1 having a small diameter male screw formed in the lower portion, and the upper face of the vibration transmitting plate 2 is in contact with the lower face of the large diameter portion.
An upper electrode plate 3, a piezoelectric element 4, a lower electrode plate 5, and a weight 6 are sequentially inserted below the vibration transmitting plate 2, and are brought into contact with each other by nuts 7 and fixed to the vibration detecting needle 1. The vibration detecting needle 1 and the vibration transmitting plate 2 are made of stainless steel, the upper and lower electrode plates 3, 5 are made of phosphor bronze, and the weight 6 is made of zirconia ceramic. The vibration detecting needle 1, the vibration transmitting plate 2, the upper electrode plate 3, the piezoelectric element 4, the electrode plate 5, and the weight 6 form a vibration detecting unit of a vibration sensor.

【0009】振動検出ユニットは、振動伝達板2の上面
とウエイト6の下面が、手前から向う側へ切込みが設け
られた上壁と、上壁の向う側の端から下方へ更に手前側
へ延びた二股のばね部とから成るスイッチ金具9に挟ま
れて保持され、スイッチ金具9のばね部によって上方へ
付勢されることによって、振動伝達板2の上面がスイッ
チ金具9の上壁下面に当接されている。またスイッチ金
具9は、上壁から下方に延びた両側の2つの側壁を有
し、この側壁と上壁とがケ―シング10の内部壁で保持
されることによって、振動検出ユニットがケ―シング1
0に取付けられている。
In the vibration detecting unit, the upper surface of the vibration transmitting plate 2 and the lower surface of the weight 6 are provided with a cutout from the front side to the opposite side, and a bifurcated part extending downward from the end on the opposite side of the upper wall toward the front side. It is held by being sandwiched by a switch fitting 9 composed of the spring part of the switch fitting 9 and is urged upward by the spring part of the switch fitting 9 so that the upper surface of the vibration transmitting plate 2 is brought into contact with the lower surface of the upper wall of the switch fitting 9. ing. Further, the switch fitting 9 has two side walls extending downward from the upper wall, and the side wall and the upper wall are held by the inner wall of the casing 10, so that the vibration detection unit can be casing. 1
It is attached to 0.

【0010】ケ―シング10は紙面の向う側の手前側の
2つのケ―シング部材から形成され、テ―パ―ねじ1
1,12によって連結されている。スイッチ金具9はス
テンレス鋼で形成され、ケ―シング10はPEEKで形
成されている。上下電極板3,5からの導線(図示せ
ず)は信号処理回路13の端子14,15へ結線されて
いる。
The casing 10 is formed of two casing members on the front side opposite to the paper surface, and the taper screw 1
1, 12 are connected. The switch fitting 9 is made of stainless steel, and the casing 10 is made of PEEK. Conductive wires (not shown) from the upper and lower electrode plates 3 and 5 are connected to terminals 14 and 15 of the signal processing circuit 13.

【0011】クロメルとアルメルの長い薄板から成る熱
電対線16a,16bは、夫々の上端が内側へ曲げら
れ、曲げられた部分の上下に中央に孔を有する円板状で
周囲に下方にのびた4つの足を有する接触板17と中央
に孔を有する円板状の保護板18とが溶接によって固定
されている。熱電対線16a,16bと接触板17と保
護板18とから熱電対が形成される。
The thermocouple wires 16a and 16b, which are made of long thin plates of chromel and alumel, are bent inward at their upper ends, and have a disk shape having a hole at the center above and below the bent parts and extend downward to the periphery. A contact plate 17 having one foot and a disc-shaped protection plate 18 having a hole in the center are fixed by welding. A thermocouple is formed from the thermocouple wires 16a and 16b, the contact plate 17, and the protective plate 18.

【0012】熱電対の内側に位置する中空円筒の断熱管
19は、上部の小径部と下部の大径部とその中間の長い
中径部とから成り、中径部には上端と下端を残して、中
空部の径とほぼ同じ幅で中空部を介して連通する2つの
窓20a,20bが両側に形成され、両窓20a,20
bの上側の残された部分は夫々垂直にカットされ、また
両窓20a,20bの下側の残された部分は上に向かっ
て内向きにカットされている。
The hollow cylindrical heat insulating tube 19 located inside the thermocouple is composed of a small diameter portion in the upper part, a large diameter portion in the lower portion and a long intermediate diameter portion in the middle, and the upper and lower ends are left in the medium diameter portion. Thus, two windows 20a, 20b having a width substantially equal to the diameter of the hollow portion and communicating with each other through the hollow portion are formed on both sides.
The remaining portions on the upper side of b are cut vertically, and the remaining portions on the lower side of both windows 20a and 20b are cut inward toward the top.

【0013】熱電対は、保護板18がその下面と断熱管
19の上面との間に僅かな隙間21を有すると共に、熱
電対線16a,16bが断熱管19の小径部の外側から
窓内そして大径部の外側から下面を通って大径孔に巻込
まれ、大径孔に圧入されたリング22によって固定され
ている。熱電対線16a,16bの窓内に位置する部位
は夫々予め内側に曲げられた弾性変形部23a,23b
として形成され、接触板17が押し下げられたときに、
内側の振動検出針1に接触しない範囲で、さらに内側へ
弾性変形できる。
In the thermocouple, the protective plate 18 has a slight gap 21 between the lower surface thereof and the upper surface of the heat insulating tube 19, and the thermocouple wires 16a and 16b extend from the outside of the small diameter portion of the heat insulating tube 19 into the window. It is wound from the outside of the large diameter portion through the lower surface into the large diameter hole and is fixed by the ring 22 press-fitted into the large diameter hole. The portions of the thermocouple wires 16a and 16b located inside the windows are elastically deformed portions 23a and 23b that are bent inward in advance, respectively.
Is formed as the contact plate 17 is pushed down,
It can be further elastically deformed inward as long as it does not come into contact with the inner vibration detecting needle 1.

【0014】断熱管19の小径部及び中径部の外側には
中径部の外径よりも僅かに大きな内径を有する保護管2
4が挿入されている。保護管24は断熱管19の中径部
の側面の下端に形成された点線で示す突起25に嵌め合
されて抜出しが防止されている。熱電対と断熱管19と
リング22と保護管24とから温度センサの測温ユニッ
トが形成される。接触板17と保護板18と保護管23
はステンレス鋼で形成され、断熱管はPEEKで形成さ
れ、リング22はベ―クライトで形成されている。熱電
対線16a,16bは、接触板17の足の下端に面する
部位から断熱管19の大径部の上部に面する部位まで絶
縁被覆している。
Outside the small-diameter portion and the medium-diameter portion of the heat insulating pipe 19, the protective pipe 2 has an inner diameter slightly larger than the outer diameter of the medium-diameter portion.
4 has been inserted. The protection tube 24 is fitted to a protrusion 25 shown by a dotted line formed at the lower end of the side surface of the heat insulating tube 19 at the middle diameter portion, and is prevented from being pulled out. The thermocouple, the heat insulating tube 19, the ring 22, and the protective tube 24 form a temperature measuring unit of a temperature sensor. Contact plate 17, protection plate 18, and protection tube 23
Is made of stainless steel, the heat insulating tube is made of PEEK, and the ring 22 is made of Bakelite. The thermocouple wires 16a and 16b are insulation-coated from a portion facing the lower end of the foot of the contact plate 17 to a portion facing the upper part of the large diameter portion of the heat insulating pipe 19.

【0015】測温ユニットが振動検出針1に通され、ケ
―シング10の上端開口から挿入される。断熱管19の
大径部の外側に位置する熱電対線16a,16bの部位
が信号処理回路13の端子26,27に結線された熱電
対接点28,29に接触して結線されている。テ―パ―
ねじ11,12に対応するケ―シング10のねじ孔の周
囲には夫々上下に切割りが設けられ、テ―パ―ねじ1
1,12がねじ込まれることによって夫々の切割りの内
側部分30,31が内向きに変形される。これによって
熱電対線16a,16bと熱電対接点28,29が強固
に圧接せしめられると共に測温ユニットがケ―シング1
0に固定される。テ―パ―ねじ11,12が付勢手段を
構成し、このテ―パ―ねじ11,12を緩めることによ
って、測温ユニットをケ―シング10から引抜くことが
できる。
The temperature measuring unit is passed through the vibration detecting needle 1 and inserted through the upper end opening of the casing 10. The portions of the thermocouple wires 16a and 16b located outside the large diameter portion of the heat insulating pipe 19 are connected to the thermocouple contacts 28 and 29 connected to the terminals 26 and 27 of the signal processing circuit 13 to be connected. Taper
Vertical cuts are provided around the screw holes of the casing 10 corresponding to the screws 11 and 12, respectively.
The inner portions 30, 31 of the respective slits are deformed inward by screwing 1, 12 therein. As a result, the thermocouple wires 16a and 16b and the thermocouple contacts 28 and 29 are firmly pressed against each other, and the temperature measuring unit is casing 1.
It is fixed at 0. The taper screws 11 and 12 constitute a biasing means, and the temperature measuring unit can be pulled out from the casing 10 by loosening the taper screws 11 and 12.

【0016】被測定対象物の作動状態を測定する場合、
ケ―シング10を手で握って、振動検出針1の先端を被
測定対象物の表面に押し当て、スイッチ金具9のばね部
の弾性力に抗して熱電対の接触板17の上面まで押し込
むことによって、熱電対の接触板17も被測定対象物に
押し当てる。更に熱電対線16a,16bの弾性変形部
23a,23bを内側に変形せしめて振動検出針1の先
端と接触板17の上面を保護管24の上面まで押し込
む。
When measuring the operating state of the object to be measured,
Holding the casing 10 by hand, the tip of the vibration detecting needle 1 is pressed against the surface of the object to be measured, and pushed to the upper surface of the contact plate 17 of the thermocouple against the elastic force of the spring portion of the switch fitting 9. As a result, the contact plate 17 of the thermocouple is also pressed against the object to be measured. Further, the elastically deforming portions 23a and 23b of the thermocouple wires 16a and 16b are deformed inward, and the tip of the vibration detecting needle 1 and the upper surface of the contact plate 17 are pushed to the upper surface of the protective tube 24.

【0017】被測定対象物の機械的振動が振動検出針1
を通して振動伝達板2に伝わり、圧力変動として圧電素
子4に作用する。これに応じて圧電素子4に電圧変動が
生じる。この電圧変動は電極板3,5から導線を介して
信号処理回路13の端子14,15に送られ、信号処理
回路13で増幅され検波されると共に平均値やピ―ク値
等に演算されて、表示部(図示せず)に表示される。一
方被測定対象物の温度信号が接触板17を介して熱電対
線16a,16bによって検出され、熱電対接点28,
29を介して信号処理回路13の端子26,27に送ら
れ、増幅されて表示部に表示される。
Mechanical vibration of the object to be measured causes vibration detection needle 1.
Through the vibration transmission plate 2 and acts on the piezoelectric element 4 as a pressure fluctuation. In response to this, a voltage change occurs in the piezoelectric element 4. This voltage fluctuation is sent from the electrode plates 3 and 5 to the terminals 14 and 15 of the signal processing circuit 13 through the conductors, amplified and detected by the signal processing circuit 13, and calculated into an average value or a peak value. , Is displayed on the display unit (not shown). On the other hand, the temperature signal of the object to be measured is detected by the thermocouple wires 16a and 16b via the contact plate 17, and the thermocouple contact 28,
It is sent to the terminals 26 and 27 of the signal processing circuit 13 via 29, amplified, and displayed on the display unit.

【0018】[0018]

【発明の効果】本発明は下記の特有の効果を生じる。上
記のように本発明によれば、熱電対線に形成した弾性変
形部の弾性力によって熱電対の接触面を所望の押し付け
力で被測定対象物に押し当てるようにしたので、部品点
数が少なく構造が簡単になる。熱電対線の弾性変形部を
外側に湾曲させると保護管の径を大きくしなければなら
ないが、本発明では内側に湾曲させるので保護管の径を
大きくする必要がなく、形状がコンパクトになる。
The present invention produces the following unique effects. As described above, according to the present invention, since the contact surface of the thermocouple is pressed against the object to be measured with a desired pressing force by the elastic force of the elastic deformation portion formed on the thermocouple wire, the number of parts is small. The structure is simple. When the elastically deforming portion of the thermocouple wire is bent outward, the diameter of the protection tube must be increased, but in the present invention, since it is bent inward, it is not necessary to increase the diameter of the protection tube, and the shape is compact.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明による実施例の温度センサを振動センサ
に組合せた温度センサ付き振動センサの断面図である。
FIG. 1 is a cross-sectional view of a vibration sensor with a temperature sensor in which a temperature sensor according to an embodiment of the present invention is combined with a vibration sensor.

【符号の説明】[Explanation of symbols]

16a,16b 熱電対線 17 接触板 19 断熱管 20a,20b 窓 21 隙間 23a,23b 弾性変形部 24 保護管 16a, 16b Thermocouple wire 17 Contact plate 19 Adiabatic tube 20a, 20b Window 21 Gap 23a, 23b Elastic deformation part 24 Protective tube

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 被測定対象物に押し当てられる接触面と
該接触面の両端から延長された熱電対線とから成る熱電
対と、前記接触面が上面に位置し前記熱電対線が側面に
位置する断熱管と、前記熱電対線の外側に位置する保護
管とから成り、該保護管の上面まで前記接触面が押し下
げられるものにおいて、前記熱電対線に予め内側に曲げ
られた弾性変形部を形成すると共に、前記接触面が押し
下げられたときに前記熱電対線の弾性変形部の内側への
変形を許容する凹部を断熱管の側面に形成し、前記熱電
対の接触面と前記断熱管の上面との間に隙間を形成した
ことを特徴とする温度センサ。
1. A thermocouple comprising a contact surface pressed against an object to be measured and thermocouple wires extending from both ends of the contact surface, the contact surface being located on an upper surface, and the thermocouple wire being located on a side surface. A heat-insulating tube positioned and a protective tube located outside the thermocouple wire, in which the contact surface is pushed down to the upper surface of the protective tube, the elastically deformable portion being bent inward to the thermocouple wire in advance. And forming a concave portion on the side surface of the heat insulating pipe that allows the elastic deformation portion of the thermocouple wire to be deformed inward when the contact surface is pushed down, and the contact surface of the thermocouple and the heat insulating pipe are formed. A temperature sensor characterized in that a gap is formed between the upper surface of the temperature sensor and the upper surface of the temperature sensor.
JP19892793A 1993-07-15 1993-07-15 Temperature sensor Expired - Fee Related JP2873655B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19892793A JP2873655B2 (en) 1993-07-15 1993-07-15 Temperature sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19892793A JP2873655B2 (en) 1993-07-15 1993-07-15 Temperature sensor

Publications (2)

Publication Number Publication Date
JPH0727627A true JPH0727627A (en) 1995-01-31
JP2873655B2 JP2873655B2 (en) 1999-03-24

Family

ID=16399284

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19892793A Expired - Fee Related JP2873655B2 (en) 1993-07-15 1993-07-15 Temperature sensor

Country Status (1)

Country Link
JP (1) JP2873655B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101159741B1 (en) * 2009-09-28 2012-06-28 현대제철 주식회사 Apparatus for measuring surface temperature of slab
JP2015111103A (en) * 2013-11-11 2015-06-18 株式会社テイエルブイ Vibration sensor with thermocouple
JP2016020857A (en) * 2014-07-15 2016-02-04 株式会社テイエルブイ Sensor device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102170425B1 (en) 2018-11-16 2020-10-28 주식회사 포스코 Temperature measuring equipment of slab bottom surface

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101159741B1 (en) * 2009-09-28 2012-06-28 현대제철 주식회사 Apparatus for measuring surface temperature of slab
JP2015111103A (en) * 2013-11-11 2015-06-18 株式会社テイエルブイ Vibration sensor with thermocouple
JP2016020857A (en) * 2014-07-15 2016-02-04 株式会社テイエルブイ Sensor device

Also Published As

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JP2873655B2 (en) 1999-03-24

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