JPH0727611A - Infrared spectroscopic image pickup apparatus - Google Patents
Infrared spectroscopic image pickup apparatusInfo
- Publication number
- JPH0727611A JPH0727611A JP17317493A JP17317493A JPH0727611A JP H0727611 A JPH0727611 A JP H0727611A JP 17317493 A JP17317493 A JP 17317493A JP 17317493 A JP17317493 A JP 17317493A JP H0727611 A JPH0727611 A JP H0727611A
- Authority
- JP
- Japan
- Prior art keywords
- infrared
- image
- filter plate
- sensor
- spectroscopic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000701 chemical imaging Methods 0.000 claims description 25
- 238000003384 imaging method Methods 0.000 claims description 16
- 230000005540 biological transmission Effects 0.000 claims description 4
- 238000005259 measurement Methods 0.000 abstract description 12
- 238000010408 sweeping Methods 0.000 abstract 2
- 238000003331 infrared imaging Methods 0.000 description 6
- 230000003595 spectral effect Effects 0.000 description 5
- 238000001816 cooling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000003086 colorant Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J2003/1226—Interference filters
- G01J2003/123—Indexed discrete filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、赤外線撮像対象物の
赤外線分光画像を得る赤外線分光撮像装置に関するもの
である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an infrared spectroscopic imaging device for obtaining an infrared spectroscopic image of an infrared imaging target.
【０００２】[0002]
【従来の技術】図５は、例えば特開昭５７−１２８８２
３号公報に示された従来の分光測定装置であり、図にお
いて、１は測定対象物からの赤外光を集光する対物レン
ズ、９は赤外光を分光する回折格子、３は分光された赤
外線分光像を再結像するリレーレンズ、１０は赤外線分
光像を検出する１次元イメージセンサである。図６は可
視のカラー撮像装置であり、１は撮像対象物からの可視
光を集光する対物レンズ、１１は２次元イメージセンサ
であるカラーＣＣＤである。2. Description of the Related Art FIG. 5 shows, for example, JP-A-57-12882.
A conventional spectroscopic measurement device disclosed in Japanese Patent Publication No. 3 is shown. In FIG. 1, 1 is an objective lens that collects infrared light from an object to be measured, 9 is a diffraction grating that disperses infrared light, and 3 is spectrally separated. A relay lens 10 for re-imaging the infrared spectral image is a one-dimensional image sensor for detecting the infrared spectral image. FIG. 6 shows a visible color image pickup device, 1 is an objective lens which collects visible light from an image pickup object, and 11 is a color CCD which is a two-dimensional image sensor.
【０００３】次に動作について説明する。図５において
対物レンズ１により集光された赤外線は、回折格子９に
よって分光され、リレーレンズ３により１次元イメージ
センサ１０上に再結像され検出される。１次元状に分光
された赤外光は、ＣＣＤ掃引回路により順次イメージセ
ンサ１０により読み出され、測定対象物の赤外線分光測
定ができる。また図６において対物レンズ１により集光
された撮像対象物からの可視光は、２次元イメージセン
サであるカラーＣＣＤ１１上に結像され、ＣＣＤ掃引回
路により、２次元状に順次検出光が読み出されて２次元
画像を得る。カラーＣＣＤ１１上には、各画素毎に、３
原色に対応する色素フィルタが付加されており、分光さ
れた２次元カラー画像を得る。Next, the operation will be described. Infrared rays collected by the objective lens 1 in FIG. 5 are separated by the diffraction grating 9 and re-imaged on the one-dimensional image sensor 10 by the relay lens 3 to be detected. The one-dimensionally dispersed infrared light is sequentially read by the image sensor 10 by the CCD sweep circuit, and infrared spectroscopic measurement of the measurement object can be performed. Further, in FIG. 6, visible light from the object to be imaged focused by the objective lens 1 is imaged on the color CCD 11 which is a two-dimensional image sensor, and the detection light is sequentially read out two-dimensionally by the CCD sweep circuit. Then, a two-dimensional image is obtained. 3 pixels for each pixel on the color CCD 11.
A pigment filter corresponding to the primary colors is added, and a spectral two-dimensional color image is obtained.
【０００４】[0004]
【発明が解決しようとする課題】従来の分光測定装置は
以上のように構成されているので、測定対象物の１点で
の分光測定はできるが２次元映像を得るためには、さら
に走査機構が必要であり装置が大型化するなどの問題点
があった。また赤外線の２次元イメージセンサは、可視
のカラーＣＣＤの色素フィルタのように、各画素毎に分
光させるフィルタをセンサ上に構築することは、有効な
材質がないことから製造技術上の問題点があった。Since the conventional spectroscopic measuring device is constructed as described above, spectroscopic measurement can be made at one point of the measuring object, but in order to obtain a two-dimensional image, the scanning mechanism is further added. However, there is a problem that the device becomes large in size. Further, in the infrared two-dimensional image sensor, it is difficult to construct a filter for spectrally separating each pixel on the sensor, like a dye filter of a visible color CCD, because there is no effective material. there were.
【０００５】この発明は上記のような問題点を解消する
ためになされたもので、測定対象物の分光測定をすると
ともに２次元映像を取得できる赤外線分光撮像装置を得
ることを目的とする。The present invention has been made in order to solve the above problems, and an object thereof is to obtain an infrared spectroscopic imaging device capable of performing spectroscopic measurement of a measuring object and acquiring a two-dimensional image.
【０００６】[0006]
【課題を解決するための手段】請求項１の赤外線分光撮
像装置は、入射する赤外線を集光する赤外線集光手段
と、集光された像面に位置して回転するフィルタ板と、
前記赤外線集光手段の像を再結像する再結像手段と、結
像された赤外線映像を検出する赤外線２次元イメージセ
ンサと、を備えたものである。An infrared spectroscopic image pickup device according to a first aspect of the present invention includes an infrared ray condensing means for condensing incident infrared rays, and a filter plate which is positioned on a converged image plane and rotates.
It is provided with re-imaging means for re-imaging the image of the infrared condensing means and an infrared two-dimensional image sensor for detecting the formed infrared image.
【０００７】請求項２の赤外線分光撮像装置は、請求項
１記載の赤外線分光撮像装置において、赤外線集光手段
と再結像手段は、屈折透過型のレンズで構成されたもの
である。An infrared spectroscopic image pickup device according to a second aspect of the present invention is the infrared spectroscopic image pickup device according to the first aspect, wherein the infrared light condensing means and the re-imaging means are constituted by a refraction / transmission type lens.
【０００８】請求項３の赤外線分光撮像装置は、請求項
１記載の赤外線分光撮像装置において、赤外線集光手段
と再結像手段は、反射型のミラーで構成されたものであ
る。According to a third aspect of the present invention, there is provided the infrared spectroscopic imaging device according to the first aspect, wherein the infrared condensing means and the re-imaging means are reflection type mirrors.
【０００９】請求項４の赤外線分光撮像装置は、請求項
１記載の赤外線分光撮像装置において、フィルタ板は、
その円周上に各波長λ1 〜λn の中心波長を持つ各干渉
フィルタを構成したものである。An infrared spectroscopic imaging device according to claim 4 is the infrared spectroscopic imaging device according to claim 1, wherein the filter plate is
Each interference filter having a central wavelength of each wavelength λ 1 to λ n is configured on the circumference.
【００１０】請求項５の赤外線分光撮像装置は、請求項
１記載の赤外線分光撮像装置において、フィルタ板は、
その円周上に参照とする波長λ0 に対するフィルタを一
つおきに構成したものである。An infrared spectroscopic imaging device according to claim 5 is the infrared spectroscopic imaging device according to claim 1, wherein the filter plate is
Every other filter on the circumference for the reference wavelength λ 0 is constructed.
【００１１】[0011]
【作用】請求項１の赤外線分光撮像装置は、赤外線集光
手段の像面において、フィルタ板を赤外線２次元イメー
ジセンサの掃引周期と同期させることにより、赤外線撮
像対象物の分光測定ができる。In the infrared spectroscopic imaging device of the first aspect, the spectroscopic measurement of the infrared imaging target can be performed by synchronizing the filter plate with the sweep cycle of the infrared two-dimensional image sensor on the image plane of the infrared condensing means.
【００１２】請求項２の赤外線分光撮像装置は、対物レ
ンズの像面において、フィルタ板を赤外線２次元イメー
ジセンサの掃引周期と同期させることにより、赤外線撮
像対象物の分光測定ができる。In the infrared spectroscopic imaging device of the second aspect, the infrared imaging target can be spectroscopically measured by synchronizing the filter plate with the sweep cycle of the infrared two-dimensional image sensor on the image plane of the objective lens.
【００１３】請求項３の赤外線分光撮像装置は、反射型
のミラーの像面において、フィルタ板を赤外線２次元イ
メージセンサの掃引周期と同期させることにより、赤外
線撮像対象物の分光測定ができる。In the infrared spectroscopic image pickup device according to the third aspect of the present invention, spectroscopic measurement of the infrared image pickup target can be performed by synchronizing the filter plate with the sweep cycle of the infrared two-dimensional image sensor on the image plane of the reflection type mirror.
【００１４】請求項４の赤外線分光撮像装置は、フィル
タ板は、各波長λ1 〜λn の中心波長を持つ各干渉フィ
ルタにより構成されており、各波長に合致した赤外光を
透過させることにより、分光された２次元画像を赤外線
２次元イメージセンサ上に結像することができる。In the infrared spectroscopic image pickup device according to a fourth aspect of the present invention, the filter plate is composed of each interference filter having a center wavelength of each wavelength λ 1 to λ n , and transmits infrared light matching each wavelength. Thereby, the spectrally separated two-dimensional image can be formed on the infrared two-dimensional image sensor.
【００１５】請求項５の赤外線分光撮像装置は、各波長
に対する分光撮像データの校正の精度を上げることがで
きる。According to the infrared spectroscopic imaging device of the fifth aspect, it is possible to improve the accuracy of calibration of the spectroscopic imaging data for each wavelength.
【００１６】[0016]
実施例１．以下、この発明の実施例１を図について説明
する。図１において、１は赤外線集光手段である対物レ
ンズ、２はこの対物レンズ１の像面に位置するフィルタ
板、３は再結像手段であるリレーレンズ、４は赤外線２
次元イメージセンサ、５は開口絞りに位置するコールド
シールド、６は２次元イメージセンサ４を冷却するデュ
ワ、７は、フィルタ板２を回転させるモータである。ま
た図２において、フィルタ板２は、その円周上にフィル
タ２ａ〜２ｆの各フィルタを構成させている。Example 1. Embodiment 1 of the present invention will be described below with reference to the drawings. In FIG. 1, 1 is an objective lens which is an infrared ray condensing means, 2 is a filter plate located on the image plane of the objective lens 1, 3 is a relay lens which is reimaging means, and 4 is infrared rays
A three-dimensional image sensor, 5 is a cold shield located at the aperture stop, 6 is a dewar for cooling the two-dimensional image sensor 4, and 7 is a motor for rotating the filter plate 2. Further, in FIG. 2, the filter plate 2 has filters 2a to 2f formed on its circumference.
【００１７】次に動作について説明する。対物レンズ１
により集光された測定対象物からの赤外光は、対物レン
ズ１の焦点面に位置するフィルタ板２を透過し、リレー
レンズ３により赤外線２次元イメージセンサ４上に再結
像される。フィルタ板２は、各波長λ1 〜λ6 の中心波
長をもつ干渉フィルタ２ａ〜２ｆにより構成されてお
り、各波長に合致した赤外光を透過させることにより、
分光された２次元画像をイメージセンサ４上に結像する
ことができる。イメージセンサ４で検出された赤外光
は、ＣＣＤ掃引回路により順次読み出され、分光された
撮像測定データを得る。フィルタ板２を回転させるモー
タ７は、ＣＣＤ掃引回路と同期させて回転させることに
より、１画像を得るフレーム時間の間、同一干渉フィル
タ２ａを透過させ、１分光画像を取得する。なお赤外線
２次元イメージセンサ４は冷却保持のためデュワ６内に
あり、また撮像対象物以外からイメージセンサ４に入射
する不要な赤外光を除去するため開合絞り位置にコール
ドシールド５を有する。Next, the operation will be described. Objective lens 1
The infrared light from the object to be measured, which has been collected by, passes through the filter plate 2 located on the focal plane of the objective lens 1 and is re-imaged on the infrared two-dimensional image sensor 4 by the relay lens 3. The filter plate 2 is composed of the interference filters 2a to 2f having the center wavelengths of the respective wavelengths λ 1 to λ 6 , and by transmitting the infrared light matching the respective wavelengths,
A spectrally separated two-dimensional image can be formed on the image sensor 4. The infrared light detected by the image sensor 4 is sequentially read by the CCD sweep circuit, and spectrally separated imaging measurement data is obtained. The motor 7 for rotating the filter plate 2 is rotated in synchronization with the CCD sweep circuit to transmit the same interference filter 2a during the frame time for obtaining one image and acquire one spectral image. The infrared two-dimensional image sensor 4 is in the Dewar 6 for cooling and holding, and has a cold shield 5 at the aperture stop position for removing unnecessary infrared light incident on the image sensor 4 other than the object to be imaged.
【００１８】実施例２．なお、上記実施例では図２に示
すようにフィルタ板２は各波長に対応する干渉フィルタ
２ａ〜２ｆで構成することにより、分光撮像データを順
次取得するが、図３に示すように参照とする波長λ0 に
対するフィルタを例えばひとつおきに構成することによ
り、各波長に対する分光撮像データの校正の精度を上げ
ることができる。また、画像追尾等早いデータレートを
要求する装置においても、追尾画像を得る波長域λ0 に
対するフィルタが多い図３の構成は有利である。また、
図２、図３において一例としてフィルタ板２は干渉フィ
ルタ２ａ〜２ｆの６枚で構成しているが、フィルタの数
には制限を持たない。Example 2. In the above embodiment, as shown in FIG. 2, the filter plate 2 is composed of the interference filters 2a to 2f corresponding to the respective wavelengths to sequentially acquire the spectral imaging data. However, as shown in FIG. By configuring every other filter for the wavelength λ 0, for example, it is possible to improve the accuracy of calibration of the spectral imaging data for each wavelength. Further, even in a device requiring a high data rate such as image tracking, the configuration of FIG. 3 is advantageous in that there are many filters for the wavelength region λ 0 for obtaining a tracking image. Also,
2 and 3, the filter plate 2 is composed of six interference filters 2a to 2f as an example, but the number of filters is not limited.
【００１９】実施例３．また、上記実施例では光学系の
赤外線集光手段と再結像手段として屈折透過型のレンズ
で構成したものを示したが、図４に示すように反射型の
ミラーで構成した装置であってもよく、上記実施例と同
様の効果を奏する。Example 3. Further, in the above-described embodiment, the infrared ray condensing means of the optical system and the re-imaging means constituted by the refraction / transmission type lens are shown. However, as shown in FIG. 4, it is an apparatus constituted by a reflection type mirror. Of course, the same effect as that of the above-mentioned embodiment is obtained.
【００２０】[0020]
【発明の効果】請求項１の赤外線分光撮像装置は、入射
する赤外線を集光する赤外線集光手段と、集光された像
面に位置して回転するフィルタ板と、前記赤外線集光手
段の像を再結像する再結像手段と、結像された赤外線映
像を検出する赤外線２次元イメージセンサと、を備えた
構成にしたので、赤外線集光手段の像面において、フィ
ルタ板を赤外線２次元イメージセンサの掃引周期と同期
させることにより、赤外線撮像対象物の分光測定がで
き、装置を小型にできる。According to the infrared spectroscopic image pickup device of the present invention, the infrared ray condensing means for condensing the incident infrared rays, the filter plate which is positioned on the converged image plane and rotates, and the infrared ray condensing means. Since the re-imaging means for re-imaging the image and the infrared two-dimensional image sensor for detecting the formed infrared image are provided, the filter plate is placed on the image plane of the infrared condensing means with the infrared rays 2. By synchronizing with the sweep cycle of the three-dimensional image sensor, the infrared imaging target can be spectroscopically measured, and the device can be downsized.
【００２１】請求項２の赤外線分光撮像装置は、請求項
１記載の赤外線分光撮像装置において、赤外線集光手段
と再結像手段は、屈折透過型のレンズで構成したので、
対物レンズの像面において、フィルタ板を赤外線２次元
イメージセンサの掃引周期と同期させることにより、赤
外線撮像対象物の分光測定ができ、装置を小型にでき
る。An infrared spectroscopic imaging device according to a second aspect of the present invention is the infrared spectroscopic imaging device according to the first aspect, wherein the infrared condensing means and the re-imaging means are composed of refraction and transmission type lenses.
By synchronizing the filter plate with the sweep cycle of the infrared two-dimensional image sensor on the image plane of the objective lens, spectroscopic measurement of the infrared imaging target can be performed, and the device can be downsized.
【００２２】請求項３の赤外線分光撮像装置は、請求項
１記載の赤外線分光撮像装置において、赤外線集光手段
と再結像手段は、反射型のミラーで構成したので、反射
型のミラーの像面において、フィルタ板を赤外線２次元
イメージセンサの掃引周期と同期させることにより、赤
外線撮像対象物の分光測定ができ、装置を小型にでき
る。The infrared spectroscopic imaging device according to claim 3 is the infrared spectroscopic imaging device according to claim 1, wherein the infrared condensing means and the re-imaging means are composed of reflection type mirrors. On the surface, by synchronizing the filter plate with the sweep cycle of the infrared two-dimensional image sensor, spectroscopic measurement of the infrared imaging target can be performed, and the device can be downsized.
【００２３】請求項４の赤外線分光撮像装置は、請求項
１記載の赤外線分光撮像装置において、フィルタ板は、
その円周上に各波長λ1 〜λn の中心波長を持つ各干渉
フィルタを構成したので、各波長に合致した赤外光を透
過させることにより、分光された２次元画像を赤外線２
次元イメージセンサ上に結像することができる。An infrared spectroscopic imaging device according to claim 4 is the infrared spectroscopic imaging device according to claim 1, wherein the filter plate is
Since each interference filter having a central wavelength of each wavelength λ 1 to λ n is formed on the circumference, the spectral two-dimensional image is converted into infrared rays 2 by transmitting infrared light matching each wavelength.
An image can be formed on the three-dimensional image sensor.
【００２４】請求項５の赤外線分光撮像装置は、請求項
１記載の赤外線分光撮像装置において、フィルタ板は、
その円周上に参照とする波長λ0 に対するフィルタを一
つおきに構成したので、各波長に対する分光撮像データ
の校正の精度を上げることができる。An infrared spectral imaging device according to a fifth aspect is the infrared spectral imaging device according to the first aspect, wherein the filter plate is
Since every other filter for the reference wavelength λ 0 is formed on the circumference, the accuracy of calibration of the spectral imaging data for each wavelength can be improved.
【図１】この発明の実施例１による赤外線分光撮像装置
を示す断面図。FIG. 1 is a sectional view showing an infrared spectroscopic imaging device according to a first embodiment of the present invention.
【図２】この発明の実施例１のフィルタ板の構成図。FIG. 2 is a configuration diagram of a filter plate according to the first embodiment of the present invention.
【図３】この発明の実施例２を示すフィルタ板の構成
図。FIG. 3 is a configuration diagram of a filter plate showing a second embodiment of the present invention.
【図４】この発明の実施例３を示す赤外線分光撮像装置
の断面図。FIG. 4 is a sectional view of an infrared spectroscopic imaging device showing a third embodiment of the present invention.
【図５】従来の分光測定装置を示す断面図。FIG. 5 is a cross-sectional view showing a conventional spectroscopic measurement device.
【図６】従来の撮像装置を示す断面図。FIG. 6 is a sectional view showing a conventional imaging device.
１ 対物レンズ ２ フィルタ板 ３ リレーレンズ ４ 赤外線２次元イメージセンサ ５ コールドシールド ６ デュワ ７ モータ 1 Objective Lens 2 Filter Plate 3 Relay Lens 4 Infrared 2D Image Sensor 5 Cold Shield 6 Dewar 7 Motor
Claims (5)
段と、集光された像面に位置して回転するフィルタ板
と、前記赤外線集光手段の像を再結像する再結像手段
と、結像された赤外線映像を検出する赤外線２次元イメ
ージセンサと、を備えた赤外線分光撮像装置。1. An infrared ray condensing means for condensing incident infrared rays, a filter plate which is positioned on a focused image plane and rotates, and a re-imaging means for re-imaging the image of the infrared ray converging means. And an infrared two-dimensional image sensor that detects an infrared image that has been formed into an image.
過型のレンズで構成された請求項１記載の赤外線分光撮
像装置。2. The infrared spectroscopic image pickup device according to claim 1, wherein the infrared ray condensing means and the re-imaging means are constituted by a refraction / transmission type lens.
のミラーで構成された請求項１記載の赤外線分光撮像装
置。3. The infrared spectroscopic image pickup device according to claim 1, wherein the infrared ray condensing means and the re-imaging means are constituted by reflection type mirrors.
〜λn の中心波長を持つ各干渉フィルタを構成した請求
項１記載の赤外線分光撮像装置。4. The filter plate has wavelengths λ 1 on its circumference.
The infrared spectroscopic imaging device according to claim 1, wherein each interference filter having a center wavelength of ˜λ n is configured.
波長λ0 に対するフィルタを一つおきに構成した請求項
１記載の赤外線分光撮像装置。5. The infrared spectroscopic image pickup device according to claim 1, wherein the filter plate has, on its circumference, every other filter for the reference wavelength λ 0 .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17317493A JPH0727611A (en) | 1993-07-13 | 1993-07-13 | Infrared spectroscopic image pickup apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17317493A JPH0727611A (en) | 1993-07-13 | 1993-07-13 | Infrared spectroscopic image pickup apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0727611A true JPH0727611A (en) | 1995-01-31 |
Family
ID=15955469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17317493A Pending JPH0727611A (en) | 1993-07-13 | 1993-07-13 | Infrared spectroscopic image pickup apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0727611A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08285688A (en) * | 1995-04-13 | 1996-11-01 | Masanori Okuyama | Spectrum image analyzing device |
| CN108534898A (en) * | 2018-06-06 | 2018-09-14 | 首都师范大学 | Hyperspectral imager, EO-1 hyperion camera and EO-1 hyperion camera system |
-
1993
- 1993-07-13 JP JP17317493A patent/JPH0727611A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08285688A (en) * | 1995-04-13 | 1996-11-01 | Masanori Okuyama | Spectrum image analyzing device |
| CN108534898A (en) * | 2018-06-06 | 2018-09-14 | 首都师范大学 | Hyperspectral imager, EO-1 hyperion camera and EO-1 hyperion camera system |
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