JPH07276069A - Machining position detection device for laser working machine - Google Patents

Abstract

PURPOSE:To machine an accurate position with simple constitution. CONSTITUTION:An optical fiber 5 is inserted into an overflow place 1, laser light 18 is oscillated by a laser oscillation part 14 and passed through an optical path 13, an optical system 12 for fiber incidence, and an optical fiber 5 to irradiate the overflow place 1 with the laser light 18 from the tip of the optical fiber 5, and then the work part 3 at the overflow place 1 is machined. Prior to the machining of the work part 3 at the overflow place 1, reflected lights of laser lights 18, 21, and 29 which are reflected by the work part 3 at the overflow place 1 and return through the optical fiber 5 and optical system 12 for fiber incidence are detected by a position detector 28, so that the position of the work part 3 can be confirmed from a difference in reflection factor between a mark and the overflow place 1 when the work part 3 is marked in some way.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a processing position detecting device for a laser processing machine.

[0002]

2. Description of the Related Art When processing a narrow space such as the inner surface of a pipe, the laser light is guided to the narrow space by an optical fiber and the laser light is irradiated from the tip of the optical fiber to the narrow space to quench or harden the narrow space. It is possible to perform processing such as surface modification.

However, in the case where the narrow portion is to be partially processed, the processed portion cannot be seen directly, and it is difficult to grasp the exact position of the processed portion.

Therefore, conventionally, the position of the processed portion is obtained by calculation, and the tip of the optical fiber is guided to the obtained position.
I was working on that part.

[0005]

However, as described above, when the processing position is obtained by calculation, there is no guarantee that the tip of the optical fiber is actually at the position to be processed, and there is a risk that it will deviate from the position to be processed. It was

In view of the above situation, it is an object of the present invention to provide a processing position detecting device for a laser processing machine which can process an accurate position with a simple structure.

[0007]

SUMMARY OF THE INVENTION The present invention is directed to an optical fiber whose tip can be inserted into a narrow space, a fiber incidence optical system connected to the rear end of the optical fiber, and a laser beam generated from a laser oscillator. To the optical system for fiber incidence, and the optical path that guides the reflected light that is reflected by the processing part at the narrow place and returned through the optical fiber and the optical system for fiber incidence, and the reflection that returned to the optical path at the time of position detection. The present invention relates to a processing position detection device for a laser processing machine, which is provided with a position detector capable of detecting light.

[0008]

The operation of the present invention is as follows.

Inserting an optical fiber into a narrow spot, oscillating a laser beam from a laser oscillating section, and irradiating the laser beam from the tip of the optical fiber to the narrow spot through an optical path, a fiber entrance optical system, and an optical fiber. Thus, the processing part in the narrow space is processed.

Prior to the processing of the processing part of the narrow part, the position detector detects the reflected light of the laser beam reflected by the processing part of the narrow part and returned through the optical fiber and the fiber incidence optical system. Thus, if some kind of mark is applied to the processed portion, the position of the processed portion can be confirmed by the difference in reflectance between the mark and the narrow portion.

[0011]

Embodiments of the present invention will be described below with reference to the drawings.

1 and 2 show a first embodiment of the present invention.

Further, in the figure, 1 is a narrow portion such as the inside of the tube 2, 3 is a processing portion consisting of a pretreatment layer such as ceramic powder partially coated on the inner surface of the tube 2, 4 is an optical fiber inside 5 is an insertion rod passed through, 6 is a head attached to the upper end of the insertion rod 4 for fixing the tip of the optical fiber 5, 7 is an insertion rod rotating device including a worm 8 and a worm wheel 9, and 10 is It is an insertion rod lifting device composed of an air cylinder and the like.

Reference numeral 11 is a laser processing machine main body, 12 is a laser processing machine main body 11, and a fiber incidence optical system having a plurality of lenses and the like connected to the rear end of the optical fiber 5 is provided. Is a main optical path that guides laser beams 18 and 21, which will be described later, and a light beam 25 for photographing to the fiber incident optical system 12.

Reference numeral 14 denotes a laser oscillator for processing such as a high output YAG laser oscillator provided in the laser processing machine main body 11, and reference numeral 15 denotes light such as a small output He-Ne laser oscillator provided in the laser processing machine main body 11. Laser oscillator for axis adjustment, 16 and 17 are laser oscillators 1 for machining
A total reflection mirror for processing laser light that refracts the processing laser light 18 oscillated from 4 and guides it to the main optical path 13.
Reference numerals 9 and 20 refract the laser beam 21 for optical axis adjustment oscillated from the laser oscillation section 15 for optical axis adjustment, and the main optical path 1
It is a total reflection mirror for laser light for adjusting the optical axis leading to 3.

Reference numeral 22 denotes a photographing optical path provided on an extension of the main optical path 13, 23 denotes a photographing device such as a CCD camera provided at an end of the photographing optical path 22, 24 denotes a photographing light source,
Reference numeral 26 refracts a photographing light beam 25 generated from a photographing light source 24 to guide it to a photographing optical path 22, and reflects it at a narrow spot 1 to pass through an optical fiber 5, a fiber incidence optical system 12, and a main optical path 13. It is a semi-transmissive mirror for photographing light rays that allows a part of the photographing light rays 25 returning to the photographing optical path 22 to pass through and reach the photographing device 23.

A total reflection mirror 1 for laser light for processing.
Reference numerals 6 and 17 reflect 100% of the laser light 18 for processing, but one total reflection mirror 16 for laser light for processing uses a laser light 21 for adjusting the optical axis having a different wavelength from the above. It is possible to transmit 100%, and the other is a total reflection mirror 1 for laser light for processing.
7 is a laser beam 2 for adjusting the optical axis having a different wavelength from the above.
1 is reflected by 100%, and a photographing ray 25
Is 100% transparent.

The optical axis adjusting laser light total reflection mirrors 19 and 20 reflect the optical axis adjusting laser light 21 by 100%.

Further, the main optical path 1 of the laser processing machine main body 11
A position detection unit body 27 is provided between the fiber incidence optical system 12 and the processing laser light total reflection mirror 17 in FIG.

The position detecting portion main body 27 is inserted between the fiber incident optical system 12 and the processing laser light total reflection mirrors 16 and 17 for position detection, and the processing portion 3 of the narrow portion 1 is processed. A position detector 28 such as a photodiode capable of detecting the reflected light reflected by the optical fiber 5 and returned to the main optical path 13 via the fiber entrance optical system 12 is provided.

The position detector main body 27 is composed of the position detector 2
8, a laser output unit 30 for position detection with a small output that oscillates a laser beam 29 for position detection, and a laser beam 2 for position detection at a position closer to the optical system 12 for fiber incidence.
A semi-transmissive mirror 31 for position detecting laser light for refracting a part of 9 to guide it to the fiber incident optical system 12 and transmitting a part of reflected light to a position detector 28, and a position detecting laser light Laser light 2 for position detection from the laser oscillator 30 for position detection transmitted through the semi-transmissive mirror 31.
Beam damper 32 made of water-cooled copper block etc. that absorbs 9
Is equipped with.

The laser oscillator 30 for position detection is
As long as it has a small output, a YAG laser oscillator
Any He-Ne laser oscillator or red semiconductor laser oscillator may be used.

Further, in the figure, 33 is a position detection signal from the position detector 28, and 34 is a position detection signal 33, which can be used as control data by inputting the insertion rod rotating device 7 and the insertion rod elevating device. 10 and control devices for each laser oscillator.

Next, the operation will be described.

In the present invention, first, as shown in FIG. 1, when there is a pipe 2 to which a processed portion 3 made of a pretreatment layer of ceramic powder or the like is preliminarily partially applied on the inner surface, a narrow space such as the inside of the pipe 2 is provided. The insertion rod 4 is inserted into the position 1.

In this state, the laser beam 21 for adjusting the optical axis is oscillated from the laser oscillating unit 15 for adjusting the optical axis, such as a He-Ne laser oscillator having a small output, and a total reflection mirror for adjusting the optical axis is provided. 19, 20 and the laser light 21 for optical axis adjustment is made incident on the main optical path 13 through the processing laser light total reflection mirrors 16 and 17, and the fiber incident optical system 1
2. The inner surface of the tube 2 is irradiated with the laser light 21 for adjusting the optical axis through the optical fiber 5, and the laser light total reflection mirrors 19 and 20 for the optical axis adjustment and the total reflection mirrors 16 and 17 for the processing laser light. The optical axis is adjusted by changing the position and the angle of the optical system for fiber incidence 12 and the like.

After the adjustment of the optical axis is completed in this way, as shown in FIG. 2, in the main optical path 13 of the laser processing machine main body 11, between the fiber incidence optical system 12 and the processing laser light total reflection mirror 17. , Insert the position detection unit body 27,
A laser beam 29 for position detection is oscillated from a laser oscillator 30 for position detection of a minute output, refracted by a semi-transmission mirror 31 for laser beam for position detection and guided to the main optical path 13, and an optical system for fiber incidence 12, The inner surface of the tube 2 is illuminated via the optical fiber 5.

Of the position-detecting laser light 29 from the position-detecting laser oscillating unit 30, the part that has passed through the position-detecting laser light semi-transmissive mirror 31 is transmitted by a beam damper 32 made of a water-cooled copper block or the like. Be absorbed.

The position-detecting laser beam 29 applied to the inner surface of the tube 2 is reflected by the inner surface of the tube 2, and the optical fiber 5, the fiber-incident optical system 12, the main optical path 13, and the position-detecting laser beam semi-lens are used. The reflected light is detected by the position detector 28 such as a photodiode via the transmission mirror 31.

As described above, since the position detector 28 detects the reflected light from the inner surface of the tube 2, if the inner surface of the tube 2 is coated with a pretreatment layer such as ceramic powder, the tube 2
Due to the difference in reflectance between the inner surface and the pretreatment layer, the position detector 2
The output difference appears in the position detection signal 33 from 8.

Therefore, while the insertion rod elevating device 10 such as an air cylinder is moved up and down, the lower position and the upper position of the processing portion 3 are detected from the change in the output of the position detection signal 33, and the detected position is detected. It is input to the control device 34 as control data.

When the lower position or the upper position of the processing section 3 is detected, the expansion / contraction motion of the insertion rod elevating device 10 is stopped, and the insertion rod 4 is stopped at the upper position or the lower position.

When the position detection is completed in this way, the position detection section main body 27 is taken out of the laser processing machine main body 11 and returned to the state shown in FIG.

Then, a laser beam 18 for processing is oscillated from a laser oscillator 14 for processing such as a high-output YAG laser oscillator, and the total reflection mirror 1 for laser light for processing is used.
Laser light 18 for processing to the main optical path 13 via 6, 17
Is made incident, and the optical system 12 for fiber incidence and the optical fiber 5
While irradiating the laser beam 18 for processing to the upper position or the lower position of the processing portion 3 composed of a pretreatment layer of ceramic powder or the like applied to the inner surface of the tube 2 via the insertion rod rotating device 7, the insertion rod 4 is rotated. In addition, the insertion rod 4 is lowered or raised to the lower position or the upper position of the processing portion 3 detected by the insertion rod lifting device 10.

Then, by the processing laser beam 18,
The ceramic powder of the pretreatment layer of the processed portion 3 and a part of the inner surface of the tube 2 are melted to form a ceramic layer in the processed portion 3, and the inner surface of the tube 2 is partially surface-treated.

The pretreatment layer is not limited to ceramic powder,
It may be used as metal powder.

Further, if the pretreatment layer is not formed and some marks are attached to the upper and lower positions of the processed portion 3 to detect them, the inner surface of the pipe 2 can be quenched.

At this time, the light source 2 for photographing emits the light ray 2 for photographing.
5 is generated, refracted by the semi-transmissive mirror 26 for photographing light and guided to the photographing optical path 22, and the total reflection mirror 17 for processing laser light, the main optical path 13, the fiber incident optical system 12,
The inner surface of the tube 2 is illuminated through the optical fiber 5, and is reflected in the tube 2, and the optical fiber 5, the fiber incident optical system 12, the main optical path 13, the processing laser light total reflection mirror 17, the photographing optical path 22, By capturing the reflected light of the photographing light ray 25 returned through the photographing light beam semi-transmissive mirror 26 with the photographing device 23 such as a CCD camera, it is possible to know how the inner surface of the tube 2 is processed.

In the case of this embodiment, even when the optical axis is adjusted,
The image capturing device 23 can perform image capturing, but the image capturing device 23 cannot perform image capturing while position detection is being performed.

As described above, according to the present invention, the position can be detected before processing, so that the processing portion 3 can be processed more accurately than when the position is calculated.

FIG. 3 shows a second embodiment of the present invention, in which the position detecting unit main body 27 is provided with two semi-transmissive mirrors for processing laser light 35 and 36, and the position detecting laser oscillating unit 30 is provided. Instead of providing the above, the position detection can be performed by using the processing laser beam 18 from the processing laser oscillator 14.

In this case, the processing laser beam 1
Since the output 8 is too large for position detection, the two processing laser light semi-transmissive mirrors 35 and 36 attenuate the processing laser light 18 in two steps.

Further, one processing laser light semi-transmissive mirror 35 is used for optical axis correction, and the other processing laser light semi-transmission mirror 36 is used for reflected light extraction. ing.

Except for the above, the structure is almost the same as that of the above-mentioned embodiment, and the same action and effect can be obtained.

FIG. 4 shows a third embodiment of the present invention, in which a position detecting unit main body 27 is provided with one half mirror 37 for laser beam for optical axis adjustment, and the laser oscillation unit 1 for optical axis adjustment is provided.
The position detection can be performed by using the laser beam 21 for adjusting the optical axis from 5.

In this case, since the laser beam 21 for adjusting the optical axis has a small output, even if one laser beam half mirror 37 for adjusting the optical axis is sufficiently attenuated by reducing the output. it can.

Further, in the case of the present embodiment, the optical axis adjusting laser light half mirror 37 allows the photographing light beam 25 to pass therethrough, so that photographing is performed by the photographing device 23 even while position detection is being performed. Can be made.

Except for the above, the configuration is almost the same as that of the second embodiment, and the same action and effect can be obtained.

FIG. 5 shows a fourth embodiment of the present invention, in which an optical path for adjusting the optical axis is provided in the optical path 22 for photographing between the total reflection mirror 17 for laser light for processing and the semi-transmissive mirror 26 for photographing light. Position detection unit main body 2 provided with a half mirror 37 for laser light
7 is provided.

In this case, since the optical axis adjusting laser light half mirror 37 is provided at a position outside the passage of the high power processing laser light 18, the position detecting portion main body 27 can be moved in and out. Alternatively it can be permanently placed in this position.

Except for the above, the structure is almost the same as that of the third embodiment, and the same action and effect can be obtained.

The present invention is not limited to the above-described embodiments, and it goes without saying that various modifications can be made without departing from the gist of the present invention.

[0053]

As described above, according to the processing position detecting apparatus for a laser processing machine of the present invention, an excellent effect that an accurate position can be processed with a simple structure can be obtained.

[Brief description of drawings]

FIG. 1 is an overall schematic system diagram of a first embodiment of the present invention.

FIG. 2 is an operation diagram of FIG.

FIG. 3 is an overall schematic system diagram of a second embodiment of the present invention.

FIG. 4 is an overall schematic system diagram of a third embodiment of the present invention.

FIG. 5 is an overall schematic system diagram of a fourth embodiment of the present invention.

[Explanation of symbols]

 1 Narrow spots 3 Processing part 5 Optical fiber 12 Fiber entrance optical system 13 Optical path (main optical path) 14, 15, 30 Laser oscillating part 18, 21, 29 Laser light 22 Optical path (imaging optical path) 28 Position detector

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Kazuyuki Tsuchiya, No. 1 Shin-Nakahara-cho, Isogo-ku, Yokohama-shi, Kanagawa Ishi, Kawashima Harima Heavy Industries, Ltd. Technical Research Institute (72) Masao Yamadera Shinchu, Isogo-ku, Yokohama-shi, Kanagawa Haramachi No. 1 Ishi Kawashima Harima Heavy Industries Co., Ltd. Yokohama No. 1 Factory (72) Inventor Toshio Irisawa Shin Nakaharacho, Isogo Ward, Yokohama City, Kanagawa No. 1 Ishi Kawashima Harima Heavy Industries Co., Ltd. Technical Research Institute

Claims (1)

[Claims] 1. An optical fiber whose tip can be inserted into a narrow space, an optical system for fiber incidence connected to the rear end of the optical fiber, and a laser beam generated from a laser oscillation section is guided to the optical system for fiber incidence. Along with this, an optical path that guides the reflected light that has been reflected by the processing part in a narrow space and that has returned via the optical fiber and the optical system for fiber incidence, and a position detector that can detect the reflected light that has returned to the optical path when detecting the position A processing position detection device for a laser processing machine, which is provided with.