JPH0727155U - Substrate storage disk - Google Patents

Abstract

(57) [Abstract] [Purpose] A board storage disk that can accommodate boards of different sizes and can be handled as if it were a single board. Provided is a substrate storage disk. [Structure] The substrate storage disk 22 includes a concave portion 2 having a circular plane shape.
A disk 24 having 6 Three columns 29 are provided in the periphery of the recess 26 at intervals of approximately 120 degrees. In the recess 26, three inwardly curved arms 28, which are rotatably supported by the columns 29, are housed. A small hole 34 is formed around the bottom of the recess 26.
Is provided for each arm 28. A V-shaped wire spring 30 is detachably provided between the inner wall 26a of the recess 26 and each arm 28.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention is used for an apparatus for processing a substrate such as an ion implantation apparatus, a dry etching apparatus, a thin film forming apparatus, etc., and accommodates substrates of different sizes, as if it were one substrate. The present invention relates to a substrate storage disc that can be handled, and more specifically, to a substrate storage disc that can accommodate irregularly shaped substrates.

[0002]

[Prior art]

 When ion-implanting substrates (for example, wafers) of different sizes in an ion implanter, etc., it is usually a holder that holds the substrate for ion implantation in the implantation chamber or a substrate holder that temporarily holds the substrate in the vacuum preliminary chamber. It is necessary to replace parts such as the ones that match the board dimensions, but to prevent wasting of this replacement time, it is necessary to store boards of different sizes and handle them as if they were one board. In some cases, a substrate storage disk that can be used is used.

FIG. 5 shows a conventional example of such a substrate storage disk. This substrate storage disc 2 is provided with a pressing piece 8 which can be moved back and forth on the side of a flat circular recess 6 of the disc 4, and which is elastically pushed out by a V-shaped wire spring 10. The substrate 12 is sandwiched and held between the pressing piece 8 and the side wall 6a of the recess 6. The inner wall 6a is inclined downward to prevent the substrate 12 from rising (see the inner wall 26a in FIG. 2 or 3).

[0004]

[Problems to be solved by the device]

 However, although the above-mentioned substrate storage disk can handle substrates 12 having different sizes, the shape of the substrate 12 that can be dealt with is limited to a circle in the example of FIG. 5, such as a semicircle, a quarter circle, and a rectangle. It is not possible to support indefinite (arbitrary shape) substrates including, etc., and if the substrate is indefinite, it is necessary to separately prepare a substrate storage disk, which increases costs and labor for management. There was a problem.

Therefore, the main object of the present invention is to provide a substrate storing disk adapted to accommodate an irregularly shaped substrate.

[0006]

[Means for Solving the Problems]

 In order to achieve the above-mentioned object, the substrate storing disk of the present invention has a flat circular concave portion, the inner wall of which is inclined downward and the peripheral portion inside the concave portion of the circular disk. It is housed in three recesses of the disc, which are provided at regular intervals, each of which is curved inward, and one end of which is supported by the support post in a corridor freely, and the inside and outside of the disc. Of the three arms whose side walls are inclined in an inverted V-shape in cross section and the bottom of the concave part of the above-mentioned disk, and between each arm and the inner wall of the concave part, and for each arm. A plurality of small holes, and each of them is provided between the inner wall of the concave portion of the disk and each arm, and has a V shape, and has an insertion portion bent downward at one end thereof. , The insertion part to one of the small holes for each arm, respectively. Characterized in that it comprises a wire spring which is inserted detachably.

[0007]

[Action]

 According to the above configuration, each of the three arms is elastically biased toward the center of the disk by the corresponding wire spring, and when the substrate is stored between the three arms. The substrate is gripped and held in three directions by three arms. In this case, since three inwardly curved arms are used, a substrate having an arbitrary shape, that is, an amorphous substrate can be grasped and held.

[0008]

【Example】

 FIG. 1 is a plan view showing a substrate storage disk according to an embodiment of the present invention. FIG. 2 is an enlarged cross-sectional view generally taken along the line AO in FIG. 1, and for convenience, shows a cross-section up to the vicinity of the arm contacting the substrate. FIG. 3 is an enlarged sectional view generally taken along the line OB of FIG.

The substrate storage disc 22 of this embodiment includes a disc 24 having a recess 26 having a circular planar shape. The inner wall 26a of the recess 26 is inclined downward (in other words, in a cross-section C-shape) as shown in FIGS. 2 and 3 in order to prevent the wire spring 30 from being lifted up.

On the periphery of the recess 26 of the disk 24, three columns 29 are provided at intervals of approximately 120 degrees.

In the recess 26 of the disc 24, three arms 28 each having one end rotatably supported by each of the columns 29 are housed. Each arm 28 is curved inward. Further, the inner and outer side walls 28a and 28b of each arm 28 are inclined in an inverted V-shape in cross section as shown in FIGS. 2 and 3 in order to prevent lifting of a wire spring 30 and a substrate 32, which will be described later. . The upper portions of the columns 29 are, for example, swaged so that the arms 28 do not come out upward.

A plurality of small holes 34 are provided for each arm 28 at the bottom of the recess 26 of the disk 24 and between each arm 28 and the inner wall 26 a of the recess 26. The number of the small holes 34 for each arm 28 is two in this embodiment, but is not limited to this and may be two or more.

A wire spring 30 is provided between the inner wall 26 a of the recess 26 of the disk 24 and each arm 28. As shown in FIG. 4, each wire spring 30 is V-shaped and has a downwardly bent insertion portion 30a at one end thereof. As shown in FIG. 3, the insertion portion 30a is detachably inserted into one of the plurality of small holes 34 for each arm 28.

With the above structure, each arm 28 is rotatable about the column 29 as shown by arrow C, and is elastically attached toward the center of the disc 24 by the corresponding wire spring 30. It is energized.

When the substrate 32 is housed between the three arms 28, the substrate 32 is held and held by the three arms 28 in three directions. In that case, since the three inwardly curved arms 28 are used, even if the substrate 32 has a deformed shape as shown in FIG. 1, it can be securely grasped and held.

Since such a deformed substrate 32 can be held, it goes without saying that a substrate of any other shape such as a circle, a semicircle, a quarter circle, a rectangle, or the like, that is, an irregular substrate Can be held. Therefore, the substrate storage disk 22 can correspond to an irregularly shaped substrate. Of course, it is possible to support substrates of different sizes.

In that case, the force applied from the wire spring 30 to the arm 28 becomes stronger as the position where the wire spring 30 is inserted is closer to the column 29 of each arm 28. It is preferable to insert 30 into eyelet 34 closer to post 29.

Further, several kinds of wire springs 30 having different lengths and spring constants are prepared, and the wire spring 30 to be used is changed or the small hole 34 to be inserted thereinto is changed according to the shape and size of the substrate. This may be combined with the above, and if so, the range of applicable substrate shapes and sizes is further expanded.

[0019]

[Effect of device]

 As described above, according to the present invention, three inwardly curved arms are used, and each arm is elastically biased inwardly by the wire spring, so that the shape of the substrate is Even if there is, these arms can grab and hold the substrate. That is, it is possible to deal with an amorphous substrate. It can also be applied to substrates of different sizes.

As a result, since one substrate storage disk can handle many substrates, the cost can be reduced as compared with the conventional case where a number of substrate storage disks are formed according to the shape of the substrate. In addition, it is possible to reduce the management labor and the like.

[Brief description of drawings]

FIG. 1 is a plan view showing a substrate storage disk according to an embodiment of the present invention.

2 is an enlarged cross-sectional view generally taken along the line AO in FIG.
For convenience, the area around the arm contacting the substrate is shown in cross section.

FIG. 3 is an enlarged cross-sectional view generally taken along line OB of FIG.

FIG. 4 is an enlarged perspective view of the wire spring in FIG.

FIG. 5 is a plan view showing an example of a conventional substrate storage disc.

[Explanation of symbols]

 22 Board Storage Disk 24 Disk 26 Recess 28 Arm 29 Support 30 Wire Spring 32 Board 34 Small Hole

Continuation of front page (51) Int.Cl. ⁶ Identification number Office reference number FI technical display location // H01L 21/3065

Claims (1)

[Scope of utility model registration request] 1. A disk having a flat circular recess, the inner wall of which is inclined downward and three pillars provided at intervals of approximately 120 degrees in the peripheral portion of the recess of the disk. The discs are housed in the recesses of the disc, each of which is curved inward, one end of which is supported by the pillar so that the corridor is freely movable, and the inner and outer side walls are inclined in an inverted V-shape in cross section. The three arms and the bottom of the recess of the disc,
A small hole is provided between each of the arms and the inner wall of the recess, and a plurality of small holes are provided for each of the arms, and between the inner wall of the recess of the disc and each of the arms. And a wire spring having an insertion part bent downward at one end thereof, and the insertion part being detachably inserted into one of the plurality of small holes for each arm. A board storage disk.