JPH0726297A - Cleaning fluid for sealed element - Google Patents

Abstract

PURPOSE:To obtain a cleaning fluid which can efficiently clean a sealed element in the field of electronic material by mixing a pyrrolidone and an aliphatic amine at a specified ratio. CONSTITUTION:This cleaning fluid contains 80-99wt.%, preferably 90-98wt.% pyrrolidone compound and 1-9wt.%, preferably 2-7wt.% aliphatic amine. Examples of the pyrrolidone compound include N-methyl-2-pyrrolidone and 2-pyrrolidone, which are used alone or as a mixture of at least two of them. Examples of the aliphatic amine include triethanolamine and cyclohexylamine. A plurality of the aliphatic amines may be used together. Other solvents (e.g. an alcohol) may be added in an amount within such a range as not to adversely affect the detergent. To remove the flash from a sealed element, a technique such as spray contact, shower contact, dip contact or ultrasonic contact is used. The cleaning is performed usually at 50-150 deg.C for 1-120min.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning liquid used for cleaning sealing elements mainly used in the field of electronic materials.

[0002]

2. Description of the Related Art A sealing element is formed by connecting a semiconductor chip or the like to a conductor substrate such as copper or silver and sealing the joints with a sealing agent such as epoxy resin, phenol resin or silicon resin. Manufactured by. When manufacturing such a sealing element, burrs derived from the sealing agent at the time of molding remain on the surface of the sealing element. Therefore, cleaning is generally performed using a solvent to remove the burrs.

Conventionally, fluorocarbon-based or chlorine-based solvents have been mainly used as cleaning solvents for sealing elements.
Currently, these solvents pose major problems in terms of safety and environmental impact, and alternative cleaning agents are being sought. Also,
As a cleaning liquid for an integrated circuit sealing element, there has been proposed a mixture of N-methyl-2-pyrrolidone with an alkali metal or alkaline earth metal compound (Japanese Patent Laid-Open No. 4-240).
738). Although the cleaning solution is excellent in the cleaning effect itself of deburring, metal ions in the cleaning solution are likely to remain on the object to be cleaned, and there is a risk of impairing its reliability in a sealing element that requires higher performance. is there. Further, there is a problem that the surface of the sealing element is easily colored depending on the type of base metal of the sealing element or the cleaning conditions.

Further, N-methyl-2-pyrrolidone itself has been a well-known solvent for a long time, and many detergent compositions containing it are also known. For example, Japanese Patent Publication Sho 58-2100
No. 0 publication contains a composition containing at least 50% by weight of N-methyl-2-pyrrolidone and at least 10% by weight of alkanolamine, and preferably containing an alkali metal or an alkaline earth metal, mainly for flux cleaning. The thing is disclosed.

On the other hand, in JP-A-64-81949, as a stripping agent for photoresist, γ-butyrolactone, N-methylformamide, N, N-dimethylformamide, N, N-dimethylacetamide, N-methyl-
A composition containing at least one selected from 2-pyrrolidone, an alkanolamine and water is disclosed. In the composition, water is an essential component, and as the photoresist release agent, the above-mentioned JP-B-58-21000 is used.
It is said that the composition proposed in Japanese Patent Publication, which is composed only of N-methyl-2-pyrrolidone and alkanolamine, is insufficient.

[0006]

As described above, as described above,
Despite the proposal of many cleaning compositions
It is necessary to develop the most suitable cleaning agent according to the type of cleaning object or the degree of cleaning required. An object of the present invention is to provide a cleaning liquid most suitable for cleaning the sealing element in the field of electronic materials, which requires more rigorous cleaning.

[0007]

Means for Solving the Problems The inventors of the present invention have made extensive studies to solve the above problems, and as a result, have completed the invention relating to the following cleaning liquid. That is, the present invention provides pyrrolidones of 80
To 99% by weight and 1 to 9% by weight of an aliphatic amine are contained in the cleaning liquid for a sealing element.

The pyrrolidone compounds which are the main components of the cleaning solution of the present invention include 2-pyrrolidone, 3-pyrrolidone and N.
-Alkyl-2-pyrrolidone (e.g. N-ethyl-2
-Pyrrolidone, N-propyl-2-pyrrolidone), 5-
Alkyl-2-pyrrolidone (for example, 5-methyl-2-
Pyrrolidone, 5-ethyl-2-pyrrolidone, 5-propyl-2-pyrrolidone), N-vinyl-2-pyrrolidone,
N-alkyl-3-pyrrolidone (for example, N-methyl-
3-pyrrolidone, N-ethyl-3-pyrrolidone, N-propyl-3-pyrrolidone) and the like. The pyrrolidone compounds may be used alone or as a mixture of two or more kinds.

As the aliphatic amine used in the cleaning solution of the present invention, an alkyl group having about 1 to 6 carbon atoms such as methylamine, ethylamine, isopropylamine, diethylamine, triethylamine, ethylenediamine, tetramethylethylenediamine and cyclohexylamine is used. Water-soluble amines that it has. Further, alkanolamine can also be preferably used, and ethanolamine,
Diethanolamine, triethanolamine, N-methyldiethanolamine, 2-methylaminoethanol and the like can be mentioned. These aliphatic amines may be used in combination of a plurality of types.

The cleaning liquid of the present invention has a composition of a pyrrolidone compound of 80 to 99% by weight, preferably 90 to 98.
% By weight, and 1 to 9% by weight, preferably 2 to 7% by weight, of an aliphatic amine. The aliphatic amine enhances the cleaning action only with pyrrolidones, but if the content is less than 1% by weight, the effect is not sufficient, and if it is 8% by weight or more, the cleaning effect itself is saturated, It is not preferable because it may damage the surface condition of the object to be cleaned.

Further, the cleaning liquid of the present invention may contain other solvent in a range in which they do not adversely affect the cleaning agent to an undesired degree. Other solvents include alcohols, ethers, esters, aromatic hydrocarbons and alicyclic hydrocarbons. The treatment method for removing the burr of the sealing element with the cleaning liquid of the present invention is not particularly limited as long as it is a cleaning treatment in which the sealing element is brought into contact with a cleaning agent solution, and for example, spray contact, shower contact, immersion contact, ultrasonic contact Etc. The washing temperature is usually 50 to 15
0 ° C., preferably 60 to 120 ° C., and the washing time is
It is usually carried out for 1 to 120 minutes, preferably 3 to 30 minutes.

[0012]

The present invention will be described in more detail with reference to the following examples, but the present invention is not limited to the following examples unless it exceeds the gist.

Example A cleaning liquid having the composition shown in Table 1 was heated to a predetermined temperature, and a sealing element manufactured by using a copper conductor substrate and an epoxy resin as a sealing agent was immersed in the cleaning liquid. Then, the cleaning process was performed under the conditions shown in Table-1. After washing, it was washed with water and dried. The degree of removal of the above IC sealing element deposits before and after the cleaning process was observed using an optical microscope, and the results of investigating the degree of burr removal are shown in Table 1.

In Table 1, the observation results of the surface of the IC sealing element after cleaning are shown by the following symbols. ○: Burrs are completely removed. Δ: A slight amount of burr remained. X: Most of the burr remains.

[0015]

[Table 1]

[0016]

By using the cleaning liquid of the present invention, the sealing element can be efficiently cleaned.

Claims (1)

[Claims] 1. A cleaning liquid for a sealing element, which comprises 80 to 99% by weight of pyrrolidones and 1 to 9% by weight of an aliphatic amine.